TWI425888B - Circuit substrate structure and method of manufacturing the same - Google Patents

Circuit substrate structure and method of manufacturing the same Download PDF

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TWI425888B
TWI425888B TW101102314A TW101102314A TWI425888B TW I425888 B TWI425888 B TW I425888B TW 101102314 A TW101102314 A TW 101102314A TW 101102314 A TW101102314 A TW 101102314A TW I425888 B TWI425888 B TW I425888B
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carrier
adhesion promoting
substrate structure
conductive
circuit substrate
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TW101102314A
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TW201332405A (en
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Cheng Feng Chiang
Jung Chuan Chiang
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Kuang Hong Prec Co Ltd
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線路基板結構及其製作方法 Circuit substrate structure and manufacturing method thereof

本發明是有關於一種線路基板結構及其製作方法,特別是有關於一種在非導電性載體上形成具有線路基板結構的製作方法。 The present invention relates to a circuit substrate structure and a method of fabricating the same, and more particularly to a method of fabricating a circuit substrate structure on a non-conductive carrier.

基於目前3C產品的多樣化使得大眾對於3C產品的便利性及可攜帶性更加講究,驅使電子產品朝向微小化、輕量化及多功能化的方向發展,同時促使了IC設計及其電路設計朝向立體3D設計的方向進展。藉由電路元件設計的立體化,可以在有限體積的電路元件上形成複雜的電路,讓電子產品在不影響其功能下,可以縮小外觀體積,使其更加微小化及輕量化。換句話說,立體化的電路元件設計,促使電子產品在微小的體積下,也能保有複雜的電路,因此電路元件的立體化設計,確實具有讓電子產品微小化、輕量化及多功能化的多重潛力,具有較高的產品競爭力,並可被廣泛的應用在各種層面上,如手機、汽車電路、提款機及助聽器等電子產品。 Based on the diversification of current 3C products, the public is more particular about the convenience and portability of 3C products, driving the development of electronic products toward miniaturization, light weight and multi-functionality, and at the same time promoting IC design and its circuit design towards three-dimensional The direction of 3D design is progressing. By the three-dimensional design of the circuit components, complex circuits can be formed on a finite-volume circuit component, so that the electronic product can be reduced in size and weight, and the miniaturization and weight reduction can be made without affecting its function. In other words, the three-dimensional circuit component design enables electronic products to retain complex circuits in a small volume. Therefore, the three-dimensional design of circuit components does make the electronic products smaller, lighter and more multifunctional. Multiple potentials, high product competitiveness, and can be widely used in various levels, such as mobile phones, automotive circuits, cash machines and hearing aids and other electronic products.

目前,用於製作立體電路元件的多種方式中,其中之一為模制互連元件-雷射直接成型法(MID-LDS,Molded Interconnect device-Laser Direct Structuring),此方式是將含有觸媒的非導電性塑料經由射出成型形成元件載體,再以雷射激光活化載體上的觸媒,使觸媒轉變為觸媒核,藉由觸媒核和預鍍金屬離子進 行化學鍍反應,而形成金屬導電線路。 At present, one of the various methods for fabricating three-dimensional circuit components is MID-LDS (Molded Interconnect device-Laser Direct Structuring), which is to contain a catalyst. The non-conductive plastic forms the component carrier by injection molding, and then activates the catalyst on the carrier with a laser to convert the catalyst into a catalyst core, through the catalyst core and the pre-plated metal ions. An electroless plating reaction is performed to form a metal conductive line.

上述立體電路製程中之導電線路結構的設計常是由互不相連接的多個線路所組成,藉由電路元件上欲形成導電線路圖樣的部分其表面所附著的金屬觸媒,對化學鍍液中存在的預鍍金屬離子進行一催化反應以將預鍍金屬離子還原於電路元件上欲形成電路圖樣的部分表面,因此化學鍍相較於電鍍具有不存在電力線分佈不均勻的影響及對幾何形狀複雜的鍍件也能獲得厚度均勻的鍍層的優點。目前習用方法多採用化學鍍方式製作立體電路元件的導電線路。 The design of the conductive circuit structure in the above three-dimensional circuit process is usually composed of a plurality of lines that are not connected to each other, and the metal catalyst attached to the surface of the portion of the circuit component on which the conductive circuit pattern is to be formed is applied to the electroless plating solution. The pre-plated metal ions present in the catalyst undergo a catalytic reaction to reduce the pre-plated metal ions to a part of the surface of the circuit component on which the circuit pattern is to be formed, so that the electroless plating has no influence on the uneven distribution of the power line and the geometric shape compared to the electroplating. Complex plating parts also have the advantage of obtaining a coating of uniform thickness. At present, the conventional methods use electroless plating to make conductive lines of three-dimensional circuit components.

化學鍍是在不施加電力的情況下,藉由電路元件上欲形成電路圖樣的部分其表面所附著的金屬觸媒,對化學鍍液中存在的預鍍金屬離子進行一催化反應,以將預鍍金屬離子還原於電路元件上欲形成電路圖樣的部分之表面。因此,化學鍍法可以於電路元件上欲形成電路圖樣的部分之表面形成厚度均勻的金屬鍍層。 Electroless plating is a catalytic reaction of a pre-plated metal ion present in an electroless plating solution by a metal catalyst attached to a surface of a circuit component on which a circuit pattern is to be formed without applying electric power. The metal plating ions are reduced to the surface of the portion of the circuit component where the circuit pattern is to be formed. Therefore, the electroless plating method can form a metal plating layer having a uniform thickness on the surface of the portion of the circuit component on which the circuit pattern is to be formed.

由上述可見,目前立體電路製程中之導電線路結構其目的欲達成所製成之電子產品更加微小化、輕量化及多功能化以及達到較高的產品競爭力,具有廣大應用潛力於3C電子產品領域上,然而,其仍具有下述限制及缺點: It can be seen from the above that the current conductive circuit structure in the three-dimensional circuit process has the purpose of achieving a miniaturization, light weight and multi-functionality of the electronic products, and achieving high product competitiveness, and has a wide application potential in 3C electronic products. In the field, however, it still has the following limitations and disadvantages:

1.習用立體電路元件的製作方法,雖然可以有效率的製作出立體電路製程中之導電線路結構,但卻需添加入大量的觸媒至非導電性塑料中,再射出成型載體,於模制互連元件-雷射直接成型法(MID-LDS)製程中,其實參與反應的觸媒也僅在表面層,卻因為需加入一定比例的觸媒於非導電性塑料中,因此需耗費較高的觸 媒成本。 1. A method for manufacturing a three-dimensional circuit component, although the conductive circuit structure in the three-dimensional circuit process can be efficiently produced, but a large amount of catalyst is added to the non-conductive plastic, and then the molded carrier is injected and molded. In the interconnect component-laser direct molding (MID-LDS) process, the catalyst involved in the reaction is only in the surface layer, but it is expensive because it needs to add a certain proportion of catalyst to the non-conductive plastic. Touch Media cost.

2.如上所述,因MID-LDS製程中需添加入大量的觸媒至非導電性塑料中,再射出成型形成載體,因為觸媒均勻分布在載體中,經雷射剝除後表面的金屬核在後續化學鍍過程中需較高劑量的還原劑濃度,才能使金屬核順利的啟鍍。相對的,化學銅鍍液較不安定,需耗費較多的化學鍍液對整體載體表面進行化學還原反應,於電路元件上形成所欲之立體電路之導電線路,然而卻耗費較高的化學鍍液成本。 2. As mentioned above, a large amount of catalyst is added to the non-conductive plastic in the MID-LDS process, and then injection molded to form a carrier, because the catalyst is evenly distributed in the carrier, and the surface of the metal is removed by laser stripping. The core needs a higher dose of reducing agent concentration in the subsequent electroless plating process to enable the metal core to be smoothly plated. In contrast, the chemical copper plating solution is relatively unstable, and requires more chemical plating solution to chemically reduce the surface of the entire carrier, forming a conductive circuit of the desired three-dimensional circuit on the circuit component, but it consumes high electroless plating. Liquid cost.

據此,現有立體電路之製程技術仍受限於高額生產成本,目前仍缺乏一種導電線路結構及其製作方法應用於3C電子產品領域中。 Accordingly, the process technology of the existing three-dimensional circuit is still limited by the high production cost, and there is still a lack of a conductive line structure and a manufacturing method thereof for use in the field of 3C electronic products.

有鑑於上述習知技藝之問題,本發明之目的就是在提供一種線路基板結構及其製作方法,以解決習用立體電路製程中需耗費較高的生產成本等問題。 In view of the above problems in the prior art, the object of the present invention is to provide a circuit board structure and a manufacturing method thereof, which solve the problems of high production cost and the like in the process of the conventional three-dimensional circuit.

根據本發明之目的,提出一種線路基板結構之製造方法,適用於非導電載體之電路製程,首先提供一載體,並於載體表面以粗糙化處理法形成具有粗糙表面之一附著促進部,附著促進部之性質由疏水性轉換為親水性,再於載體之附著促進部表面設置一觸媒,最後觸媒以化學鍍還原法反應,進而在附著促進部形成金屬層。 According to the object of the present invention, a method for manufacturing a circuit substrate structure is proposed, which is suitable for a circuit process of a non-conductive carrier. First, a carrier is provided, and an adhesion promoting portion having a rough surface is formed on the surface of the carrier by a roughening treatment method, and adhesion is promoted. The nature of the part is converted from hydrophobic to hydrophilic, and then a catalyst is placed on the surface of the adhesion promoting portion of the carrier, and finally the catalyst is reacted by an electroless plating reduction method to form a metal layer in the adhesion promoting portion.

較佳地,上述載體可為非導電載體,且其具有熱傳導性質材料,其中粗糙化處理法可用噴砂加工方式或雷射照射蝕刻方式;上述載體表面進行粗糙化處理法步驟前,可進一步設置觸媒絕緣層於 載體上,且於載體從觸媒絕緣層以粗糙化處理法貫穿至表面,並於載體表面形成附著促進部。 Preferably, the carrier may be a non-conductive carrier, and has a material of heat conduction property, wherein the roughening treatment may be performed by a sandblasting method or a laser irradiation etching method; the carrier surface may be further provided with a touch before the roughening treatment step Medium insulation layer On the carrier, the carrier penetrates from the catalytic insulating layer to the surface by a roughening treatment, and an adhesion promoting portion is formed on the surface of the carrier.

較佳地,上述非導電載體之材料可為陶瓷材料、高分子塑料,其中高分子塑料可為熱塑性塑料或熱固性塑料,其中陶瓷材料可為氧化物、氮化物、碳化物、硼化物其中之一。更進一步地,陶瓷材料係由氧化物、氮化物、碳化物、硼化物其中之一結合黏結劑形成可以射出、壓出等之混合物,並於混合物成形後,去除黏結劑再燒結成形。 Preferably, the material of the non-conductive carrier may be a ceramic material or a polymer plastic, wherein the polymer plastic may be a thermoplastic or a thermosetting plastic, wherein the ceramic material may be one of an oxide, a nitride, a carbide, and a boride. . Further, the ceramic material is formed by combining one of an oxide, a nitride, a carbide, and a boride with a binder to form a mixture of injection, extrusion, etc., and after the mixture is formed, the binder is removed and then sintered.

較佳地,上述觸媒可為鈦、銻、銀、鈀、鐵、鎳、銅、釩、鈷、鋅、鉑、銥、鋨、銠、錸、釕、錫其中之一或其混合物或上述元素之化合物。 Preferably, the catalyst may be one of titanium, bismuth, silver, palladium, iron, nickel, copper, vanadium, cobalt, zinc, platinum, rhodium, ruthenium, osmium, iridium, iridium, tin or a mixture thereof or the above Elemental compound.

較佳地,上述非導電載體之高分子塑料可添加無機填充物;其中無機填充物之成份可為矽酸、矽酸衍生物、碳酸、碳酸衍生物、磷酸、磷酸衍生物、活性碳、多孔碳、碳黑、玻璃纖維、碳纖維或礦纖維其中之一或其組合。 Preferably, the polymer plastic of the non-conductive carrier may be added with an inorganic filler; wherein the inorganic filler may be a component of tannic acid, a citric acid derivative, a carbonic acid, a carbonic acid derivative, a phosphoric acid, a phosphoric acid derivative, an activated carbon, and a porous material. One or a combination of carbon, carbon black, glass fiber, carbon fiber or mineral fiber.

較佳地,上述雷射照射之波長範圍可介於為248奈米至10600奈米之間;其中雷射照射蝕刻方式可為二氧化碳(CO2)雷射、銣雅鉻(Nd:YAG)雷射、摻釹釩酸釔晶體(Nd:YVO4)雷射、準分子(EXCIMER)雷射或光纖雷射(Fiber Laser)。 Preferably, the wavelength range of the laser irradiation may be between 248 nm and 10600 nm; wherein the laser irradiation etching method may be a carbon dioxide (CO 2 ) laser or a Nd: YAG thunder. Shot, doped yttrium vanadate crystal (Nd: YVO 4 ) laser, excimer (EXCIMER) laser or fiber laser (Fiber Laser).

較佳地,上述具有熱傳導性質之非導電載體係可將具有熱傳導性質材料或其衍生物材料分散於其內;更佳地,具有熱傳導性質之材料可為金屬導熱材或非金屬導熱材;上述金屬導熱材可為鉛、鋁、金、銅、鎢、鎂、鉬、鋅或銀其中之一或其組合;上述非金 屬導熱材可為石墨、石墨烯、鑽石、奈米碳管、奈米碳球、奈米泡沫、碳六十、碳奈米錐、碳奈米角、碳奈米滴管、樹狀碳微米結構、氧化鈹、氧化鋁、氧化鋯、氮化硼、氮化鋁、氧化鎂、氮化矽或碳化矽其中之一或其組合。 Preferably, the non-conductive carrier having thermal conductivity properties may disperse a material having a heat conductive property or a derivative thereof therein; more preferably, the material having heat conductive properties may be a metal heat conductive material or a non-metal heat conductive material; The metal heat conductive material may be one or a combination of lead, aluminum, gold, copper, tungsten, magnesium, molybdenum, zinc or silver; the above non-gold The heat conductive material may be graphite, graphene, diamond, carbon nanotube, nano carbon sphere, nano foam, carbon sixty, carbon nano cone, carbon nanometer, carbon nanotube dropper, dendritic carbon micron One of or a combination of structure, cerium oxide, aluminum oxide, zirconium oxide, boron nitride, aluminum nitride, magnesium oxide, tantalum nitride or tantalum carbide.

較佳地,上述非導電載體中埋設至少一導熱柱,用以增加非導電載體之熱傳效率;上述導熱柱之材料可為鉛、鋁、金、銅、鎢、鎂、鉬、鋅、銀、石墨、石墨烯、鑽石、奈米碳管、奈米碳球、奈米泡沫、碳六十、碳奈米錐、碳奈米角、碳奈米滴管、樹狀碳微米結構、氧化鈹、氧化鋁、氧化鋯、氮化硼、氮化鋁、氧化鎂、氮化矽或碳化矽其中之一或其組合。 Preferably, the non-conductive carrier is embedded with at least one heat conducting column for increasing the heat transfer efficiency of the non-conductive carrier; the material of the heat conducting column may be lead, aluminum, gold, copper, tungsten, magnesium, molybdenum, zinc, silver. , graphite, graphene, diamond, carbon nanotube, nano carbon sphere, nano foam, carbon sixty, carbon nanocone, carbon nanohorn, carbon nanotube dropper, dendritic carbon microstructure, cerium oxide One or a combination of alumina, zirconia, boron nitride, aluminum nitride, magnesium oxide, tantalum nitride or tantalum carbide.

進一步可利用如上所述之製造方法,於提供載體後,同時以粗糙化處理法於附著促進部外設置至少一導電接點於載體上;並藉由各導電接點連接載體的邊緣和各附著促進部並形成相通之線路;在進行化學電鍍處理於附著促進部及各導電接點上設置金屬層;於各導電接點上設置一防鍍絕緣層;進一步,可利用通電電鍍方式於附著促進部上設置電鍍層以增加金屬層厚度;最後移除設置於各導電接點上之防鍍絕緣層及金屬層,得到獨立之線路圖樣。 Further, by using the manufacturing method as described above, after the carrier is provided, at least one conductive contact is disposed on the carrier outside the adhesion promoting portion by the roughening treatment; and the edge and the adhesion of the carrier are connected by the conductive contacts. The promotion unit forms a common line; a metal layer is disposed on the adhesion promoting portion and each of the conductive contacts; and an anti-plating insulation layer is disposed on each of the conductive contacts; further, the adhesion can be promoted by the electroplating method An electroplated layer is disposed on the portion to increase the thickness of the metal layer; finally, the anti-plating insulating layer and the metal layer disposed on each of the conductive contacts are removed to obtain an independent circuit pattern.

較佳地,上述之製造方法適用於具有熱傳導性質之塑膜互連組件之立體電路製程,所述之載體具有熱傳導性質,於電鍍過程中,可藉由電鍍通電產生具有電導通性的金屬層在電鍍過程中作為負極,並讓電源之正極和預鍍金屬固體相接,當載體元件浸泡於含有預鍍金屬離子的電鍍液時,預鍍金屬離子便在作為負極的金屬層上接收電子而還原析出預鍍金屬於金屬層,形成所要的金屬線路;其中預電鍍的金屬包括可以為銅、鎳、鉻、錫、銀或金或其 合金金屬。 Preferably, the above manufacturing method is suitable for a three-dimensional circuit process of a plastic film interconnection component having heat conduction properties, the carrier having heat conduction property, and a metal layer having electrical conductivity can be generated by electroplating during electroplating. As a negative electrode in the electroplating process, and the positive electrode of the power source is connected with the pre-plated metal solid, when the carrier element is immersed in the plating solution containing the pre-plated metal ions, the pre-plated metal ions receive electrons on the metal layer as the negative electrode. Reducing pre-plated metal to the metal layer to form a desired metal line; wherein the pre-plated metal comprises copper, nickel, chromium, tin, silver or gold or Alloy metal.

根據上述線路基板結構之製造方法,可廣泛適用於非導電載體、具有熱傳導性質之非導電載體或具有熱傳導性質之塑膜互連組件之立體電路製程。 According to the manufacturing method of the above-mentioned circuit substrate structure, it can be widely applied to a non-conductive carrier, a non-conductive carrier having thermal conductivity properties, or a three-dimensional circuit process of a plastic film interconnection assembly having heat conduction properties.

本發明之一目的,係利用上述線路基板結構之製造方法製作出一種線路基板結構,其係包含一載體、至少一附著促進部,其中各附著促進部利用粗糙化處理方式於載體表面形成粗糙表面,且各附著促進部之粗糙表面呈現開放狀態,以及在各附著促進部設置一金屬層,此金屬層係預設於各附著促進部之觸媒與化學鍍液反應所形成。 An object of the present invention is to provide a circuit substrate structure comprising a carrier and at least one adhesion promoting portion, wherein each of the adhesion promoting portions forms a rough surface on the surface of the carrier by using a roughening treatment method. And the rough surface of each adhesion promoting portion is in an open state, and a metal layer is formed in each of the adhesion promoting portions, and the metal layer is formed by reacting the catalyst of each adhesion promoting portion with the electroless plating solution.

較佳地,上述線路基板結構進一步包括至少一導電接點,各導電接點亦隨粗糙化處理法設置於載體上,且設置於各附著促進部外,藉由各導電接點連接載體的邊緣和各附著促進部並形成相通之線路。 Preferably, the circuit substrate structure further includes at least one conductive contact, and each of the conductive contacts is disposed on the carrier along with the roughening treatment, and is disposed outside each adhesion promoting portion, and is connected to the edge of the carrier by each conductive contact. And each adhesion promoting portion forms a communication line.

上述線路基板結構進一步包括電鍍層,於各導電接點上再設置一防鍍絕緣層,利用通電電鍍方式於各附著促進部上設置電鍍層,以增加各線路圖樣上之金屬層之厚度,最後移除各導電接點上之防鍍絕緣層及金屬層,得到獨立之線路圖樣。 The circuit substrate structure further includes a plating layer, and an anti-plating insulating layer is further disposed on each of the conductive contacts, and a plating layer is disposed on each of the adhesion promoting portions by using an electroplating method to increase the thickness of the metal layer on each of the circuit patterns, and finally The anti-plating insulation layer and the metal layer on each of the conductive contacts are removed to obtain an independent circuit pattern.

本發明之另一目的,係利用上述線路基板結構之製造方法製作出一種線路基板結構,其係包含一載體、一觸媒絕緣層、至少一附著促進部以及一金屬層;其中各附著促進部利用粗糙化處理方式貫穿觸媒絕緣層並設置於載體表面而形成粗糙表面,且各附著促進部之粗糙表面呈開放狀態,以及在各附著促進部設置一金屬層 ,此金屬層係預設於各附著促進部之觸媒與化學鍍液反應所形成。 Another object of the present invention is to fabricate a circuit substrate structure comprising a carrier, a catalyst insulating layer, at least one adhesion promoting portion, and a metal layer by using the method for manufacturing the circuit substrate structure; wherein each adhesion promoting portion Roughening treatment is used to form a rough surface through the catalyst insulating layer and on the surface of the carrier, and the rough surface of each adhesion promoting portion is in an open state, and a metal layer is disposed in each adhesion promoting portion. The metal layer is formed by reacting a catalyst of each adhesion promoting portion with an electroless plating solution.

上述線路基板結構進一步包括至少一導電接點及電鍍層,各導電接點亦隨粗糙化處理法貫穿觸媒絕緣層並設置於載體表面且設置於附著促進部外,藉由各導電接點連接載體的邊緣和附著促進部並形成相通之線路,藉由各導電接點用以連接載體的邊緣和附著促進部進行化學鍍形成金屬層,於各導電接點之金屬層上設置一防鍍絕緣層,其係用以將各導電接點絕緣,防止電鍍析出金屬,利用通電電鍍方式形成電鍍層,用以增加金屬層之厚度,最後將各導電接點上之防鍍絕緣層及金屬層去除,得到獨立之線路圖樣。 The circuit substrate structure further includes at least one conductive contact and a plating layer, and each of the conductive contacts penetrates the catalytic insulating layer along the roughening treatment method and is disposed on the surface of the carrier and disposed outside the adhesion promoting portion, and is connected by each conductive contact The edge of the carrier and the adhesion promoting portion form a communication line, and each of the conductive contacts is used for connecting the edge of the carrier and the adhesion promoting portion to form a metal layer by electroless plating, and an anti-plating insulation is disposed on the metal layer of each conductive contact. The layer is used for insulating the conductive contacts to prevent electroplating of the metal, forming a plating layer by electroplating to increase the thickness of the metal layer, and finally removing the anti-plating insulating layer and the metal layer on each conductive contact. , get an independent circuit pattern.

綜上所述,本發明所提供之線路基板結構及其製造方法,其提供下列的優點: In summary, the circuit board structure and the manufacturing method thereof provided by the present invention provide the following advantages:

(1)習用立體電路製程中,因於高分子塑料中需添加入大量的觸媒或催化劑以及化學鍍液,具有耗費較高的生產成本問題。因本發明之非導電載體不含金屬氧化物或催化劑,當以雷射照射蝕刻形成區域化粗糙表面後,觸媒可僅附著於載體表面之區域,有效降低於電路製程中高分子塑料所使用的觸媒。 (1) In the conventional three-dimensional circuit process, a large amount of catalyst, catalyst, and electroless plating solution are required to be added to the polymer plastic, which has a problem of high production cost. Since the non-conductive carrier of the present invention does not contain a metal oxide or a catalyst, when a regionalized rough surface is formed by laser irradiation etching, the catalyst can be attached only to the surface of the carrier surface, effectively reducing the use of the polymer plastic in the circuit manufacturing process. catalyst.

(2)習用之LDS雷射激光活化金屬氧化物或催化劑產生金屬核之方法,對於化學鍍銅的反應需要較高劑量的還原劑濃度才能使金屬核順利的啟鍍,相對化學銅的鍍液較不穩定且壽命較短,鍍液的管理費用增加,需要較高的生產成本。本發明以雷射照射蝕刻方式形成粗糙附著部,其可以有效吸附觸媒,以利後續金屬層之 形成,而減少觸媒或催化劑的使用,具有較低生產成本的優勢,大幅降低觸媒及催化劑以及化學鍍液的使用成本。 (2) Conventional LDS laser lasers activate metal oxides or catalysts to produce metal cores. For the electroless copper plating, a higher dose of reducing agent concentration is required to enable the metal core to be smoothly plated, and the chemical copper plating solution. It is less stable and has a shorter life span, and the management cost of the plating solution is increased, which requires higher production costs. The invention forms a rough adhesion portion by laser irradiation etching, which can effectively adsorb the catalyst to facilitate the subsequent metal layer Formation, while reducing the use of catalyst or catalyst, has the advantage of lower production costs, greatly reducing the cost of use of catalysts and catalysts as well as electroless plating solutions.

1‧‧‧線路基板結構 1‧‧‧Line substrate structure

11‧‧‧載體 11‧‧‧ Carrier

111‧‧‧導電接點 111‧‧‧Electrical contacts

1111‧‧‧導熱材料 1111‧‧‧ Thermal material

12‧‧‧附著促進部 12‧‧‧Adhesion Promotion Department

121‧‧‧粗糙表面 121‧‧‧Rough surface

13‧‧‧金屬層 13‧‧‧metal layer

141‧‧‧防鍍絕緣層 141‧‧‧Anti-plating insulation

14‧‧‧觸媒絕緣層 14‧‧‧catalyst insulation

15‧‧‧電鍍層 15‧‧‧Electroplating

16‧‧‧導熱體 16‧‧‧ Thermal Conductor

S1~S4‧‧‧流程步驟 S1~S4‧‧‧ Process steps

S1a~S7a‧‧‧流程步驟 S1a~S7a‧‧‧ process steps

Sa1~Sa5‧‧‧流程步驟 Sa1~Sa5‧‧‧Process steps

第1圖 係為本發明第一實施例之線路基板結構之製造方法之步驟流程圖。 Fig. 1 is a flow chart showing the steps of a method of manufacturing a circuit board structure according to a first embodiment of the present invention.

第2圖 係為本發明第一實施例之線路基板結構之結構示意圖。 Fig. 2 is a schematic structural view showing the structure of a wiring substrate according to a first embodiment of the present invention.

第3圖 係為本發明第二實施例之線路基板結構之製造方法之步驟流程圖。 Fig. 3 is a flow chart showing the steps of a method of manufacturing a circuit board structure according to a second embodiment of the present invention.

第4~5圖 係為本發明第二實施例之線路基板結構之結構示意圖。 4 to 5 are schematic views showing the structure of the circuit substrate structure of the second embodiment of the present invention.

第6圖 係為本發明第三實施例之線路基板結構之製造方法之步驟流程圖。 Figure 6 is a flow chart showing the steps of a method of manufacturing a circuit substrate structure according to a third embodiment of the present invention.

第7圖 係為本發明第三實施例之線路基板結構之結構示意圖。 Figure 7 is a schematic view showing the structure of a circuit substrate structure according to a third embodiment of the present invention.

第8~9圖 係為本發明第四實施例之線路基板結構之結構示意圖。 8 to 9 are schematic views showing the structure of a circuit substrate structure according to a fourth embodiment of the present invention.

第10圖 係為本發明第五實施例之線路基板結構之結構示意圖。 Figure 10 is a schematic view showing the structure of a circuit substrate structure according to a fifth embodiment of the present invention.

第11圖 係為本發明第六實施例之線路基板結構之結構示意圖。 Figure 11 is a schematic view showing the structure of a circuit substrate structure according to a sixth embodiment of the present invention.

第12圖 係為本發明第七實施例之線路基板結構之結構示意圖。 Figure 12 is a schematic view showing the structure of a circuit substrate structure according to a seventh embodiment of the present invention.

第13~14圖 係為本發明第八實施例之線路基板結構之結構示意圖。 13 to 14 are schematic views showing the structure of the circuit substrate structure of the eighth embodiment of the present invention.

第15~16圖 係為本發明第九實施例之線路基板結構之結構示意圖。 15 to 16 are schematic views showing the structure of a circuit substrate structure according to a ninth embodiment of the present invention.

為利 貴審查員瞭解本發明之技術特徵、內容與優點及其所能達成之功效,茲將本發明配合附圖,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本發明實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本發明於實際實施上的權利範圍,合先敘明。為能詳細瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,茲進一步藉由以下實施例,詳細說明如后。 The technical features, contents, and advantages of the present invention, as well as the advantages thereof, can be understood by the present inventors, and the present invention will be described in detail with reference to the accompanying drawings. The subject matter is only for the purpose of illustration and description. It is not intended to be a true proportion and precise configuration after the implementation of the present invention. Therefore, the scope and configuration relationship of the attached drawings should not be interpreted or limited. First described. In order to understand the technical features and practical effects of the present invention in detail, and in accordance with the contents of the specification, the following embodiments will be further described in detail below.

本發明提出一種線路基板結構及其製作方法。請參閱第1圖為本發明之線路基板結構之製作方法的步驟流程圖之第一實施例示意圖。 The invention provides a circuit substrate structure and a manufacturing method thereof. 1 is a schematic view showing a first embodiment of a flow chart of a method for fabricating a circuit substrate structure according to the present invention.

請參照第1圖所示,本發明之線路基板結構之製作方法主要步驟包括: Referring to FIG. 1 , the main steps of the method for fabricating the circuit substrate structure of the present invention include:

步驟S1,首先提供一載體。載體可為非導電載體。 In step S1, a carrier is first provided. The carrier can be a non-conductive carrier.

步驟S2,於載體表面以粗糙化處理法形成具有粗糙表面之附著促進部。 In step S2, an adhesion promoting portion having a rough surface is formed on the surface of the carrier by a roughening treatment.

步驟S3,設置一觸媒於附著促進部。上述之觸媒形成之方式,係將載體浸入觸媒溶液槽中,令觸媒附著在附著促進部。 In step S3, a catalyst is disposed in the adhesion promoting portion. In the above-described method of forming the catalyst, the carrier is immersed in the catalyst solution tank, and the catalyst is attached to the adhesion promoting portion.

步驟S4,最後在載體表面之觸媒上進行化學鍍金屬化以形成金屬層。 In step S4, electroless metallization is finally performed on the catalyst on the surface of the carrier to form a metal layer.

請參考附件第1圖,在步驟S2之附著促進部,由電子顯微鏡攝影結果呈現,其呈現不平整的粗糙形狀。請參考附件第2圖,以掃 描式電子顯微鏡(Scanning Electron Microscopy,簡稱:SEM)偵測獲得,經粗糙化處理後之載體表面之附著促進部,其孔隙大小約10~20μm。 Referring to FIG. 1 of the attached file, the adhesion promoting portion in step S2 is presented by an electron microscope photographing result, which exhibits an uneven rough shape. Please refer to the attached figure 2, Esau Scanning Electron Microscopy (SEM) is used to detect the adhesion promoter on the surface of the carrier after roughening, and the pore size is about 10-20 μm.

請參考附件第3及4圖所示,在步驟S3將載體表面乾淨化,清除載體表面上的油脂及污塵等物質;本實施例採用將載體浸到稀釋好的清潔劑(係可含有界面活性劑)中,用以除油使其載體表面乾淨化,且將附著促進部之粗糙表面之性質由疏水性轉換為親水性,再以純水清洗載體。 Please refer to the attachments 3 and 4, the surface of the carrier is cleaned in step S3, and the grease, dirt and the like on the surface of the carrier are removed; in this embodiment, the carrier is immersed in the diluted detergent (the interface may be included) In the active agent, the surface of the carrier is degreased to be clean, and the properties of the rough surface of the adhesion promoting portion are converted from hydrophobic to hydrophilic, and the carrier is washed with pure water.

進一步言,由電子顯微鏡捕捉水珠滴附在載體表面上的影像。參照附件第4圖所示,圖中右側未經粗糙化處理後之載體表面將水珠滴附在載體表面,水珠未呈現附著及吸附現象,故呈水滴狀。圖中左側係為經粗糙化處理後之載體表面之附著促進部,水珠呈現附著及擴散現象,故附著促進部已由疏水性轉為親水性,表示較多的觸媒可吸附且可較牢靠地在附著促進部,以利後續化學鍍反應。 Further, an image of water droplets adhering to the surface of the carrier is captured by an electron microscope. Referring to Fig. 4 of the attached figure, the surface of the carrier which has not been roughened on the right side of the figure is attached with water droplets on the surface of the carrier, and the water droplets do not show adhesion and adsorption, so they are in the form of water droplets. The left side of the figure is the adhesion promoting part of the surface of the carrier after roughening treatment, and the water droplets appear to adhere and diffuse, so the adhesion promoting part has changed from hydrophobic to hydrophilic, indicating that more catalyst can be adsorbed and can be compared. Firmly in the adhesion promoter to facilitate subsequent electroless plating reactions.

在步驟S3所採用的觸媒可用鈦、銻、銀、鈀、鐵、鎳、銅、釩、鈷、鋅、鉑、銥、鋨、銠、錸、釕、錫其中之一或其混合物,亦可包含上述元素的化合物。例如:氯化鈀(PdCl2)、氯化錫(SnCl2)、硫酸鈀(II)水合物(Palladium Sulfate Hydrate)等,但不以此為限。 The catalyst used in the step S3 may be one of titanium, bismuth, silver, palladium, iron, nickel, copper, vanadium, cobalt, zinc, platinum, rhodium, ruthenium, iridium, osmium, iridium, or tin, or a mixture thereof. A compound which may contain the above elements. For example, palladium chloride (PdCl 2 ), tin chloride (SnCl 2 ), palladium sulphate (II) hydrate (Palladium Sulfate Hydrate), etc., but not limited thereto.

步驟S4係可採用銅或鎳以化學還原反應在載體表面之觸媒上進行化學鍍上至少一層金屬層,亦可做為非導電載體進行電鍍處理前的最初導電膜,以供後面銅、鎳、鉻之一般電氣電鍍程序。在本 發明中,金屬層係可為任何具有良好導電性質之金屬或合金,本實施例採用銅與觸媒反應形成金屬層,但不以此例為限。上述步驟S1~S4之線路基板結構之製作方法可廣泛適用於非導電載體之立體或平面電路製程。 In step S4, at least one metal layer may be electrolessly plated on the catalyst on the surface of the carrier by using a copper or nickel chemical reduction reaction, or the first conductive film before the electroplating treatment may be used as a non-conductive carrier for the copper and nickel behind. , general electrical plating procedures for chromium. In this In the invention, the metal layer may be any metal or alloy having good electrical conductivity. In this embodiment, copper is reacted with a catalyst to form a metal layer, but is not limited thereto. The manufacturing method of the circuit substrate structure of the above steps S1 to S4 can be widely applied to the stereo or planar circuit process of the non-conductive carrier.

請參照第2圖所示,係為上述利用第1圖之步驟S1~S4所製成之第一實施例之線路基板結構。如圖所示,本發明之線路基板結構1適用於線路結構中,線路基板結構1包括載體11及至少一附著促進部12,其中各附著促進部12以粗糙化處理法(本實施例採用雷射照射蝕刻方式)於載體11表面以形成粗糙表面121,各附著促進部12之粗糙表面121呈開放狀態。之後,將載體11浸入觸媒溶液槽中,令觸媒附著在附著促進部12。最後,在載體11表面上之觸媒上進行化學鍍金屬化以形成金屬層13,金屬層13係包括至少一線路圖樣。 Referring to Fig. 2, the circuit board structure of the first embodiment manufactured by the above steps S1 to S4 of Fig. 1 is used. As shown in the figure, the circuit substrate structure 1 of the present invention is suitable for use in a circuit structure. The circuit substrate structure 1 includes a carrier 11 and at least one adhesion promoting portion 12, wherein each of the adhesion promoting portions 12 is roughened (this embodiment uses a lightning The surface of the carrier 11 is formed by a radiation etching method to form a rough surface 121, and the rough surface 121 of each adhesion promoting portion 12 is in an open state. Thereafter, the carrier 11 is immersed in the catalyst solution tank, and the catalyst is attached to the adhesion promoting portion 12. Finally, electroless metallization is performed on the catalyst on the surface of the carrier 11 to form a metal layer 13, which includes at least one wiring pattern.

在本發明中,金屬層亦可做為非導電載體進行電鍍處理前的最初導電膜,為能更了解本案進一步應用在電鍍處理的技術手段,故特於此說明於金屬層上進行電鍍的處理流程。請參見第3圖所示,本發明應用於電鍍處理之步驟流程圖之第二實施例示意圖,如下所示: In the present invention, the metal layer can also be used as a non-conductive carrier for the initial conductive film before the electroplating process. In order to better understand the technical means for further application in the electroplating process, it is specifically described that the electroplating treatment is performed on the metal layer. Process. Referring to FIG. 3, a schematic diagram of a second embodiment of the flow chart of the present invention applied to the electroplating process is as follows:

步驟S1a,首先提供一載體,載體可為非導電載體。 In step S1a, a carrier is first provided, and the carrier may be a non-conductive carrier.

步驟S2a,於載體表面以粗糙化處理法形成具有粗糙表面的線路圖樣之附著促進部及導電接點。 In step S2a, an adhesion promoting portion and a conductive contact of the wiring pattern having a rough surface are formed on the surface of the carrier by a roughening treatment.

步驟S3a,設置一觸媒於附著促進部。上述之觸媒形成之方式,係將載體浸入觸媒溶液槽中,令觸媒附著在附著促進部。 In step S3a, a catalyst is disposed in the adhesion promoting portion. In the above-described method of forming the catalyst, the carrier is immersed in the catalyst solution tank, and the catalyst is attached to the adhesion promoting portion.

步驟S4a,在載體表面之觸媒上進行化學鍍金屬化以形成金屬層。 In step S4a, electroless metallization is performed on the catalyst on the surface of the carrier to form a metal layer.

步驟S5a,於導電接點上再施以防鍍絕緣層。 In step S5a, an anti-plating insulating layer is further applied to the conductive contacts.

步驟S6a,可利用電鍍處理在金屬層上設置電鍍層。 In step S6a, a plating layer may be provided on the metal layer by a plating process.

步驟S7a,最後將導電接點上之防鍍絕緣層及金屬層去除,形成各獨立之線路圖樣。 In step S7a, the anti-plating insulating layer and the metal layer on the conductive contacts are finally removed to form separate circuit patterns.

請參照第4及5圖所示,係為上述利用第3圖之步驟S1a~S7a所製成的線路基板結構。如第4圖所示,本發明之線路基板結構1適用於線路結構中,線路基板結構1包括載體11及至少一附著促進部12,其中各附著促進部12以粗糙化處理法(本實施例採用雷射照射蝕刻方式)設置於載體11表面以形成各附著促進部12之粗糙表面121,各附著促進部12之粗糙表面121呈開放狀態,載體11表面亦進一步增設導電接點111於載體11中,各導電接點111連接於載體11的邊緣和各附著促進部12,藉由各導電接點111用以連接載體11的邊緣和各附著促進部12進行化學鍍形成金屬層13。如第5圖所示,於各導電接點111上再施以一防鍍絕緣層141,利用通電電鍍方式增加附著促進部12之金屬層13厚度形成一電鍍層15,最後移除各導電接點111上之防鍍絕緣層141及金屬層13去除,形成各獨立之線路圖樣。 Referring to Figures 4 and 5, the circuit board structure produced by the above steps S1a to S7a of Fig. 3 is used. As shown in FIG. 4, the circuit board structure 1 of the present invention is applied to a circuit structure, and the circuit board structure 1 includes a carrier 11 and at least one adhesion promoting portion 12, wherein each of the adhesion promoting portions 12 is roughened (this embodiment) The surface of the carrier 11 is formed by a laser irradiation to form a rough surface 121 of each of the adhesion promoting portions 12, and the rough surface 121 of each of the adhesion promoting portions 12 is in an open state, and the surface of the carrier 11 is further provided with a conductive contact 111 on the carrier 11. Each of the conductive contacts 111 is connected to the edge of the carrier 11 and the adhesion promoting portion 12, and the conductive layer 111 is used to connect the edge of the carrier 11 and the adhesion promoting portion 12 to form a metal layer 13 by electroless plating. As shown in FIG. 5, an anti-plating insulating layer 141 is further applied to each of the conductive contacts 111, and the thickness of the metal layer 13 of the adhesion promoting portion 12 is increased by electroplating to form a plating layer 15, and finally the conductive contacts are removed. The plating resist 141 and the metal layer 13 on the dots 111 are removed to form separate circuit patterns.

電鍍過程當中,可藉由電鍍通電產生具有電導通性的金屬層13在電鍍過程中作為負極,並讓電源的正極和預鍍金屬固體相接,當將載體11元件浸泡於含有預鍍金屬離子的電鍍液時,預鍍金屬離子便在作為負極的金屬層13上接收電子而還原析出預鍍金屬於金 屬層13,形成所要的金屬線路。其中,預電鍍的金屬可以為銅、鎳、鉻、錫、銀或金或其合金金屬。 During the electroplating process, the metal layer 13 having electrical conductivity can be generated by electroplating as a negative electrode during the electroplating process, and the positive electrode of the power source and the pre-plated metal solid are connected, and the carrier 11 element is immersed in the pre-plated metal ion. In the plating solution, the pre-plated metal ions receive electrons on the metal layer 13 as the negative electrode to reduce precipitation of the pre-plated metal in gold. The genus layer 13 forms the desired metal line. The pre-plated metal may be copper, nickel, chromium, tin, silver or gold or an alloy metal thereof.

由於,載體表面未具有活性催化層之部份,於進行化學鍍時,可能因其材料物性易與觸媒、化學鍍液產生反應。請參見本發明之第三實施例之線路基板結構之製作方法的步驟流程,請參見第6圖,係如下所示: Since the surface of the carrier does not have a portion of the active catalytic layer, when the electroless plating is performed, the material property may easily react with the catalyst or the electroless plating solution. Please refer to the flow chart of the method for fabricating the circuit substrate structure according to the third embodiment of the present invention, which is shown in FIG.

步驟Sa1,首先提供一載體,載體可為非導電載體。 In step Sa1, a carrier is first provided, and the carrier may be a non-conductive carrier.

步驟Sa2,於載體表面設置觸媒絕緣層。 In step Sa2, a catalytic insulating layer is disposed on the surface of the carrier.

步驟Sa3,於載體以粗糙化處理法貫穿觸媒絕緣層並設置於載體表面而形成各附著促進部。 In step Sa3, the adhesion promoting portion is formed by penetrating the carrier through the catalyst insulating layer and on the surface of the carrier.

步驟Sa4,設置觸媒於附著促進部。上述之觸媒形成之方式,係將載體浸入觸媒溶液槽中,令觸媒附著在附著促進部。 In step Sa4, a catalyst is provided in the adhesion promoting unit. In the above-described method of forming the catalyst, the carrier is immersed in the catalyst solution tank, and the catalyst is attached to the adhesion promoting portion.

步驟Sa5,最後在載體表面之觸媒上進行化學鍍金屬化以形成金屬層。 In step Sa5, electroless metallization is finally performed on the catalyst on the surface of the carrier to form a metal layer.

易言之,本發明第三實施例之線路基板結構與第一實施例雷同,兩者差異處係在於,步驟S2之前於載體11表面設置觸媒絕緣層14(如第7圖所示)。 In other words, the circuit board structure of the third embodiment of the present invention is the same as that of the first embodiment, and the difference is that the catalyst insulating layer 14 is disposed on the surface of the carrier 11 before step S2 (as shown in FIG. 7).

又,請參照第8圖及第9圖所示,本發明之第四實施例之線路基板結構之製作方法的步驟流程與第二實施例雷同,兩者之差異處係在於,步驟2a之前於載體11表面設置觸媒絕緣層14,且於載體以粗糙化處理法貫穿觸媒絕緣層14,並設置於載體表面而形成各附著促進部,後續步驟與S2a~S7a相同。 Moreover, referring to FIG. 8 and FIG. 9, the flow of steps of the method for fabricating the circuit substrate structure according to the fourth embodiment of the present invention is the same as that of the second embodiment, and the difference between the two is that before step 2a The catalyst insulating layer 14 is provided on the surface of the carrier 11, and the carrier is penetrated through the catalytic insulating layer 14 by a roughening treatment, and is provided on the surface of the carrier to form respective adhesion promoting portions. The subsequent steps are the same as those of S2a to S7a.

其中,觸媒絕緣層14可以使用光阻劑、油墨或塗料以印刷、噴墨等方式加工而成,或可以貼上絕緣膠帶或乾膜光阻劑作為觸媒絕緣層14,觸媒絕緣層14可選擇除去或不除去。 The catalyst insulating layer 14 may be processed by printing, inkjet or the like using a photoresist, an ink or a coating, or may be an insulating tape or a dry film photoresist as a catalytic insulating layer 14 and a catalytic insulating layer. 14 may or may not be removed.

上述所有實施例中,採用將載體浸泡在觸媒溶液槽內,觸媒溶液主要成份可以為氯化鈀、氯化錫及氯化氫(PdCl2+SnCl2+HCl),藉以在附著促進部形成一層很薄而具催化作用的觸媒。由於載體之材料表面的錫離子變成氫氧化錫Sn(OH)4,因其無催化效果,且氫氧化錫會形成膠體減弱鈀(Pd)金屬粒子的催化效果。剝除此「錫殼」處理,使載體之表面還原出金屬態的鈀(Pd)以作為後續化學鍍的催化劑。上述之過程稱之速化(Accelerator)。 In all the above embodiments, the carrier is immersed in the catalyst solution tank, and the main component of the catalyst solution may be palladium chloride, tin chloride and hydrogen chloride (PdCl 2 + SnCl 2 + HCl), thereby forming a layer in the adhesion promoting portion. Very thin and catalytic catalyst. Since the tin ions on the surface of the material of the carrier become tin hydroxide Sn(OH) 4 , since it has no catalytic effect, the tin hydroxide forms a colloid to attenuate the catalytic effect of the palladium (Pd) metal particles. The "tin shell" treatment is stripped to reduce the metallic palladium (Pd) on the surface of the support as a catalyst for subsequent electroless plating. The above process is called Accelerator.

進一步,為增加整體線路基板結構之熱傳效率,可埋設一導熱柱於載體中。請參照第10圖所示,係為本發明之第五實施例之線路基板結構之製作方法的步驟流程,其步驟流程與第一實施例雷同,兩者差異處係在於,步驟S2之前埋設一導熱柱16於載體11,於步驟S2中係於載體11表面於對應導熱柱16位置及導熱柱16周圍,以粗糙化處理法形成具有粗糙表面121之附著促進部12。所述之埋設導熱柱於載體,可依照生產者設計產品需求,選擇於載體中之高熱源處埋設至少一導熱柱16藉以增加整體線路基板結構之熱傳效率。 Further, in order to increase the heat transfer efficiency of the overall circuit substrate structure, a heat conducting column may be buried in the carrier. Referring to FIG. 10, it is a flow chart of a method for fabricating a circuit board structure according to a fifth embodiment of the present invention. The step flow is the same as that of the first embodiment. The difference between the two is that a step is buried before step S2. The heat transfer column 16 is mounted on the carrier 11, and is attached to the surface of the carrier 11 at a position corresponding to the heat transfer column 16 and around the heat transfer column 16 in step S2, and an adhesion promoting portion 12 having a rough surface 121 is formed by a roughening process. The buried heat conducting column is disposed on the carrier, and at least one heat conducting column 16 is embedded in the high heat source in the carrier according to the manufacturer's design product requirement to increase the heat transfer efficiency of the overall circuit substrate structure.

進一步,導熱柱之材料可為鉛、鋁、金、銅、鎢、鎂、鉬、鋅、銀、石墨、石墨烯、鑽石、奈米碳管、奈米碳球、奈米泡沫、碳六十、碳奈米錐、碳奈米角、碳奈米滴管、樹狀碳微米結構、氧化鈹、氧化鋁、氧化鋯、氮化硼、氮化鋁、氧化鎂、氮化矽或碳 化矽其中之一或其組合,但不以此為限。 Further, the material of the heat conducting column may be lead, aluminum, gold, copper, tungsten, magnesium, molybdenum, zinc, silver, graphite, graphene, diamond, carbon nanotube, nano carbon sphere, nano foam, carbon sixty , carbon nanocone, carbon nanohorn, carbon nanotube dropper, dendritic carbon micron structure, yttria, alumina, zirconia, boron nitride, aluminum nitride, magnesium oxide, tantalum nitride or carbon One of them or a combination thereof, but not limited to this.

請參照第11圖所示,係為本發明之第六實施例之線路基板結構之示意圖。與上述第五實施例之目的相同,同為增加整體線路基板結構之熱傳效率,可添加導熱材料於載體中。第六實施例其結構與第一實施例(第2圖)雷同,兩者差異處係在於,在步驟S1之提供載體11之步驟時,當中已添加導熱材料1111,並均勻混合於載體11中,之後同樣以粗糙化處理法形成具有粗糙表面121之附著促進部12。後續步驟均與第一實施例相同。 Referring to Fig. 11, there is shown a schematic diagram of a circuit board structure according to a sixth embodiment of the present invention. Similar to the purpose of the fifth embodiment described above, in order to increase the heat transfer efficiency of the overall circuit substrate structure, a heat conductive material may be added to the carrier. The structure of the sixth embodiment is the same as that of the first embodiment (Fig. 2). The difference between the two is that, in the step of providing the carrier 11 in the step S1, the heat conductive material 1111 is added and uniformly mixed in the carrier 11. Then, the adhesion promoting portion 12 having the rough surface 121 is also formed by the roughening treatment. The subsequent steps are the same as in the first embodiment.

請參照第12圖所示,係為本發明之第七實施例之線路基板結構之示意圖,其結構與第三實施例雷同,兩者差異處係在於,在步驟1之提供載體11之步驟時,當中已添加導熱材料1111並均勻混合於載體11中,之後在步驟2之前於載體11表面先設置觸媒絕緣層14,以隔絕載體11表面,避免載體11表面因其材料物性易與觸媒、化學鍍液產生反應。 Referring to FIG. 12, it is a schematic diagram of a circuit board structure according to a seventh embodiment of the present invention, and its structure is the same as that of the third embodiment. The difference between the two is that, in the step of providing the carrier 11 in the step 1. The heat conductive material 1111 has been added and uniformly mixed in the carrier 11, and then the catalyst insulating layer 14 is first disposed on the surface of the carrier 11 before the step 2 to isolate the surface of the carrier 11, so as to avoid the surface of the carrier 11 from being easily catalyzed by the material properties. The electroless plating solution reacts.

請參照第13~14圖所示,係為本發明之第八實施例之線路基板結構之示意圖,其係為第二實施例之變形態樣(第4~5圖),兩者差異處係在於,在步驟S1之提供載體11之步驟時,添加導熱材料1111,並均勻混合於載體11中。後續步驟均與第二實施例相同。 Referring to Figures 13 to 14, there is shown a schematic diagram of a circuit board structure according to an eighth embodiment of the present invention, which is a modification of the second embodiment (Figs. 4-5). In the step of providing the carrier 11 in the step S1, the heat conductive material 1111 is added and uniformly mixed in the carrier 11. The subsequent steps are the same as in the second embodiment.

請參照第15~16圖所示,係為本發明之第九實施例之線路基板結構之示意圖,其係為第四實施例之變形態樣(第8~9圖),兩者之差異處係在於,提供載體11之步驟時,當中添加導熱材料1111並均勻混合於載體11中,後續步驟均與第四實施例相同。 Referring to Figures 15 to 16, a schematic diagram of a circuit board structure according to a ninth embodiment of the present invention is a modification of the fourth embodiment (Figs. 8-9). In the step of providing the carrier 11, the heat conductive material 1111 is added and uniformly mixed in the carrier 11, and the subsequent steps are the same as in the fourth embodiment.

綜上所述,本發明之第六、七、八、九實施例,均於載體11中添 加導熱材料1111,其所需添加量及種類可依照生產者設計產品需求而做適度調整,目的為增加整體線路基板結構之熱傳效率。 In summary, the sixth, seventh, eighth, and ninth embodiments of the present invention are all added to the carrier 11. The heat conductive material 1111 is added, and the required addition amount and kind can be appropriately adjusted according to the demand of the manufacturer to design the product, and the purpose is to increase the heat transfer efficiency of the overall circuit substrate structure.

本發明中所採用的非導電載體之材料可為高分子塑料或陶瓷材料。高分子塑料可為熱塑性塑料或熱固性塑料。採用的非導電載體之材料係具有熱傳導性質,且非導電載體之高分子塑料中可添加無機填充物,其中無機填充物之成份可為矽酸、矽酸衍生物、碳酸、碳酸衍生物、磷酸、磷酸衍生物、活性碳、多孔碳、碳黑、玻璃纖維、碳纖維或礦纖維其中之一或其組合。又,陶瓷材料可為氧化物、氮化物、碳化物、硼化物其中之一。更進一步地,陶瓷材料係由氧化物、氮化物、碳化物、硼化物其中之一結合黏結劑形成可以射出、壓出等之混合物,並於混合物成形後,去除黏結劑再燒結成形。 The material of the non-conductive carrier used in the present invention may be a polymer plastic or a ceramic material. The polymer plastic can be a thermoplastic or a thermosetting plastic. The material of the non-conductive carrier used has thermal conductivity, and an inorganic filler may be added to the polymer of the non-conductive carrier, wherein the inorganic filler may be a component of tannic acid, a citric acid derivative, a carbonic acid, a carbonic acid derivative, or a phosphoric acid. One or a combination of a phosphoric acid derivative, activated carbon, porous carbon, carbon black, glass fiber, carbon fiber or mineral fiber. Further, the ceramic material may be one of an oxide, a nitride, a carbide, and a boride. Further, the ceramic material is formed by combining one of an oxide, a nitride, a carbide, and a boride with a binder to form a mixture of injection, extrusion, etc., and after the mixture is formed, the binder is removed and then sintered.

本發明中所採用的粗糙化處理法可採用噴砂加工方式或雷射照射蝕刻等方式將其載體表面設置形成具有粗糙化之附著促進部,採用的雷射照射之波長範圍可介於為248奈米至10600奈米之間,其中雷射照射蝕刻方式可為二氧化碳(CO2)雷射、銣雅鉻(Nd:YAG)雷射、摻釹釩酸釔晶體(Nd:YVO4)雷射、準分子(EXCIMER)雷射或光纖雷射(Fiber Laser),但不以此為限。 The roughening treatment method used in the present invention may adopt a sandblasting processing method or a laser irradiation etching method to form a surface of the carrier to form a roughening adhesion promoting portion, and the laser irradiation wavelength range may be 248 Nai. Between meters and 10,600 nm, the laser irradiation etching method can be carbon dioxide (CO 2 ) laser, 铷 铬 chrome (Nd: YAG) laser, ytterbium yttrium vanadate crystal (Nd: YVO 4 ) laser, Excimer (EXCIMER) laser or Fiber Laser, but not limited to this.

本發明中,非導電載體分散添加具有熱傳導性質材料或其衍生物材料;所採用的具有熱傳導性質之材料可為金屬導熱材或非金屬導熱材;採用的金屬導熱材可為鉛、鋁、金、銅、鎢、鎂、鉬、鋅或銀其中之一或其組合;採用的非金屬導熱材可為石墨、石墨烯、鑽石、奈米碳管、奈米碳球、奈米泡沫、碳六十、碳奈米錐、碳奈米角、碳奈米滴管、樹狀碳微米結構、氧化鈹、氧化鋁、 氧化鋯、氮化硼、氮化鋁、氧化鎂、氮化矽或碳化矽其中之一或其組合,但不以此為限。 In the present invention, the non-conductive carrier is dispersedly added with a material having thermal conductivity properties or a derivative thereof; the material having thermal conductivity properties may be a metal heat conductive material or a non-metal heat conductive material; the metal heat conductive material used may be lead, aluminum or gold. , one or a combination of copper, tungsten, magnesium, molybdenum, zinc or silver; the non-metallic heat conductive material used may be graphite, graphene, diamond, carbon nanotube, nano carbon sphere, nano foam, carbon six X. Carbon nanocone, carbon nanohorn, carbon nanotube dropper, dendritic carbon microstructure, cerium oxide, aluminum oxide, One or a combination of zirconia, boron nitride, aluminum nitride, magnesium oxide, tantalum nitride or tantalum carbide, but not limited thereto.

本實施例所採用的觸媒可採用鈦、銻、銀、鈀、鐵、鎳、銅、釩、鈷、鋅、鉑、銥、鋨、銠、錸、釕、錫其中之一或其混合物,亦可包含上述元素的化合物。例如:氯化鈀(PdCl2)、氯化錫(SnCl2)、硫酸钯(II)水合物(Palladium Sulfate Hydrate)等,但不以此為限。 The catalyst used in this embodiment may be one of titanium, bismuth, silver, palladium, iron, nickel, copper, vanadium, cobalt, zinc, platinum, rhodium, ruthenium, osmium, iridium, iridium, or tin, or a mixture thereof. Compounds which may also contain the above elements. For example, palladium chloride (PdCl 2 ), tin chloride (SnCl 2 ), palladium sulphate (II) hydrate (Palladium Sulfate Hydrate), etc., but not limited thereto.

根據上述第一~九實施例所述之線路基板結構之製造方法,可廣泛適用於各種非導電載體,且其係可具有熱傳導性質之材料或具有熱傳導性質之塑膜互連組件之立體電路製程。 According to the manufacturing method of the circuit substrate structure described in the above first to ninth embodiments, it can be widely applied to various non-conductive carriers, and it can be a three-dimensional circuit process of a material having heat conduction properties or a plastic film interconnection component having heat conduction properties. .

請參照附件第5圖所示,其係以附件第2圖之本發明之載體進行元素分析(EDS)後所得之資料,如資料中顯示本發明之載體中並未參雜任何金屬氧化物或催化劑,圖中所呈現的金(Au)元素係為非導電性導體於前處理過程中均需先鍍上的金層,其是為了要增加導電性,避免表面電子的累積,可避免電荷累積對解析度造成影響。 Please refer to the attached figure 5, which is the material obtained after the elemental analysis (EDS) of the carrier of the present invention in Figure 2 of the annex, as shown in the data, the carrier of the present invention is not doped with any metal oxide or Catalyst, the gold (Au) element presented in the figure is a gold layer which is first coated on the non-conductive conductor during the pre-treatment, in order to increase the conductivity, avoid the accumulation of surface electrons, and avoid charge accumulation. It affects the resolution.

請參見附件第6圖所示,係為習知LPKF-LDS技術對載體(LPKF)表面以雷射雕刻之SEM圖,目前產業上所用之LPKF載體中均參雜有金屬氧化物成分;另請參閱附件第7圖所示,資料當中顯示LPKF載體中參雜有金屬氧化物,元素分析(EDS)圖中顯示具有鉻(Cr)及銅(Cu)元素存在於LPKF載體中。由上述所述,本發明之技術特徵與習知技術之不同在於,本發明之載體因不含任何金屬氧化物,當以粗糙化處理方式(雷射照射蝕刻)設置形成區域化粗糙表面 後,觸媒可附著及牢附於載體表面之粗糙化區域,可有效降低於立體或平面電路製程中高分子塑料所使用的觸媒量。習知技術以LDS雷射激光活化金屬氧化物以產生金屬核,因習知LPKF載體含有金屬氧化物,故於化學鍍銅的反應中需要較高劑量的還原劑濃度才能使金屬核順利的啟鍍,具有相對化學銅的鍍液較不穩定、壽命較短、鍍液的費用增加及需要較高的生產成本等缺點。 Please refer to the attached figure 6 for the laser SEM image of the surface of the carrier (LPKF) by the conventional LPKF-LDS technology. Currently, the LPKF carrier used in the industry is doped with metal oxide components; Referring to Figure 7 of the Annex, the data shows that the LPKF carrier is doped with metal oxides. The elemental analysis (EDS) shows the presence of chromium (Cr) and copper (Cu) elements in the LPKF carrier. From the above, the technical features of the present invention are different from the prior art in that the carrier of the present invention is formed by a roughening treatment (laser irradiation etching) to form a regionalized rough surface because it does not contain any metal oxide. After that, the catalyst can be attached and adhered to the roughened area of the surface of the carrier, which can effectively reduce the amount of the catalyst used in the polymer in the stereo or planar circuit process. The prior art activates a metal oxide by an LDS laser to generate a metal core. Since the conventional LPKF carrier contains a metal oxide, a higher dose of a reducing agent is required in the electroless copper plating reaction to enable the metal core to be smoothly plated. The plating solution with relatively chemical copper is unstable, the life is short, the cost of the plating solution is increased, and the high production cost is required.

綜上所述,本發明之線路基板結構及其製造方法,藉由雷射照射蝕刻使其非導電載體形成附著促進部,其可以有效吸附觸媒並牢靠設置於附著促進部上,以利後續金屬層之形成,可以有效減少觸媒或催化劑的使用,具有較低生產成本的優勢,可以大幅降低觸媒及催化劑用量以及化學鍍液的使用成本。改善習用之雷射激光活化金屬氧化物或催化劑產生金屬核之方法,所耗費較高生產成本之問題。 In summary, the circuit board structure and the manufacturing method thereof of the present invention form a adhesion promoting portion by laser irradiation etching, which can effectively adsorb the catalyst and be firmly disposed on the adhesion promoting portion for subsequent use. The formation of the metal layer can effectively reduce the use of the catalyst or the catalyst, and has the advantages of lower production cost, and can greatly reduce the amount of the catalyst and the catalyst and the use cost of the electroless plating solution. A method of improving the production cost of a conventional laser laser to activate a metal oxide or a catalyst to produce a metal core is expensive.

又,在此需陳明的是,在本發明之各實施例中,各附著促進部、觸媒、金屬層、防鍍絕緣層、觸媒絕緣層、及電鍍層…等,係設置非導電載體上的其中一個單一平面上呈現。但本發明在實際實施時,並不限於此,亦可設置在非導電載體不同的平面上設置各附著促進部、觸媒、金屬層、防鍍絕緣層、觸媒絕緣層、及電鍍層…等。換言之,本發明之線路基板結構及其製造方法是可製作立體或平面的電路。 Moreover, it should be noted that in each of the embodiments of the present invention, each of the adhesion promoting portion, the catalyst, the metal layer, the plating resist, the catalyst insulating layer, and the plating layer are provided with a non-conductive Presented on one of the single planes on the carrier. However, the present invention is not limited thereto, and may be provided with different adhesion promoting portions, a catalyst, a metal layer, an anti-plating insulating layer, a catalytic insulating layer, and a plating layer on different planes of the non-conductive carrier. Wait. In other words, the circuit board structure of the present invention and the method of manufacturing the same are capable of producing a three-dimensional or planar circuit.

再者,在本發明之各實施例中,在各步驟要進行下一步驟前,皆會有清潔之動作,以避免前一步驟之污染下一步驟之製造程序,此技術領域所熟悉之技術手段,故在本發明中並未贅述。例如:非導電載體上以粗糙化處理法形成具有粗糙表面之附著促進部, 此時,將會有廢料殘留在非導電載體,利用清潔之動作將廢料從非導電載體表面移除。但其中要強調的是,非導電載體浸入觸媒溶液槽中,令觸媒附著在附著促進部,經過清潔之動作後,由於附著促進部之粗糙表面,使得觸媒可附著在附著促進部,非導電載體其餘未具有附著促進部之部份,則會因清潔之動作,而去除觸媒,或觸媒的殘留量不易與化學鍍產生反應,或其反應不致對線路基板結構之線路品質有太大之影響。 Furthermore, in various embodiments of the present invention, there will be a cleaning action before the next step in each step to avoid contamination of the next step of the manufacturing process of the next step, a technique familiar in the art. Means, therefore, are not described in the present invention. For example, a non-conductive carrier is formed by a roughening treatment to form an adhesion promoting portion having a rough surface. At this point, there will be waste remaining on the non-conductive carrier, and the waste is removed from the surface of the non-conductive carrier by a cleaning action. However, it should be emphasized that the non-conductive carrier is immersed in the catalyst solution tank, so that the catalyst adheres to the adhesion promoting portion, and after the cleaning operation, the catalyst can adhere to the adhesion promoting portion due to the rough surface of the adhesion promoting portion. If the remaining portion of the non-conductive carrier does not have an adhesion promoting portion, the catalyst may be removed due to the cleaning action, or the residual amount of the catalyst may not easily react with the electroless plating, or the reaction may not have a line quality to the circuit substrate structure. Too big impact.

以上所述之實施例僅係為說明本發明之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本發明之內容並據以實施,當不能以之限定本發明之專利範圍,即大凡依本發明所揭示之精神所作之均等變化或修飾,仍應涵蓋在本發明之專利範圍內。 The embodiments described above are merely illustrative of the technical spirit and the features of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

S1~S4‧‧‧步驟流程 S1~S4‧‧‧Step procedure

Claims (17)

一種線路基板結構之製造方法,適用於非導電載體之電路製程,其係包含下列步驟:提供一載體;以一粗糙化處理法於該載體表面形成具有粗糙表面及一預定路徑之一附著促進部,其中該粗糙化處理法係為噴砂加工方式或雷射照射蝕刻方式其中之一;設置一觸媒於該附著促進部上;以及該觸媒以化學鍍還原法反應,進而在該附著促進部形成一金屬層,且該金屬層包括對應於該附著促進部之該預定路徑之一線路圖樣。 A method for manufacturing a circuit substrate structure, which is suitable for a circuit process of a non-conductive carrier, comprising the steps of: providing a carrier; forming a rough surface and a predetermined path adhesion promoting portion on the surface of the carrier by a roughening treatment method; The roughening treatment method is one of a sandblasting processing method or a laser irradiation etching method; a catalyst is disposed on the adhesion promoting portion; and the catalyst is reacted by an electroless plating reduction method, and further in the adhesion promoting portion A metal layer is formed, and the metal layer includes a circuit pattern corresponding to the predetermined path of the adhesion promoting portion. 如申請專利範圍第1項所述之線路基板結構之製造方法,其中該載體表面進行該粗糙化處理法步驟前,進一步設置一觸媒絕緣層於該載體上,且以粗糙化處理法更進一步貫穿該觸媒絕緣層,而於該載體表面形成該附著促進部。 The method for manufacturing a circuit substrate structure according to claim 1, wherein before the surface of the carrier is subjected to the roughening step, a catalyst insulating layer is further disposed on the carrier, and the roughening treatment is further performed. The adhesion promoting portion is formed on the surface of the carrier through the catalyst insulating layer. 如申請專利範圍第1項所述之線路基板結構之製造方法,其中該載體係由非導電材料製成一非導電載體,該非導電材料係包括高分子塑料或陶瓷材料其中之一。 The method of manufacturing a circuit substrate structure according to claim 1, wherein the carrier is made of a non-conductive material, and the non-conductive material comprises one of a polymer plastic or a ceramic material. 如申請專利範圍第1項所述之線路基板結構之製造方法,所述之觸媒包含鈦、銻、銀、鈀、鐵、鎳、銅、釩、鈷、鋅、鉑、銥、鋨、銠、錸、釕、錫其中之一或其混合物或上述元素之化合物。 The method for manufacturing a circuit substrate structure according to claim 1, wherein the catalyst comprises titanium, bismuth, silver, palladium, iron, nickel, copper, vanadium, cobalt, zinc, platinum, rhodium, ruthenium, iridium. One of or a mixture of ruthenium, osmium, and tin or a compound of the above elements. 如申請專利範圍第3項所述之線路基板結構之製造方法,其中該 高分子塑料包括無機填充物。 The method of manufacturing a circuit substrate structure according to claim 3, wherein the method Polymer plastics include inorganic fillers. 如申請專利範圍第3項所述之線路基板結構之製造方法,其中該非導電載體係將具有熱傳導性質材料或其衍生物材料分散其中。 The method of manufacturing a wiring substrate structure according to claim 3, wherein the non-conductive carrier is obtained by dispersing a material having a heat conductive property or a derivative thereof. 如申請專利範圍第3項所述之線路基板結構之製造方法,其中該具有熱傳導性質之非導電載體之材料係包括一金屬導熱材或一非金屬導熱材。 The method for manufacturing a circuit substrate structure according to claim 3, wherein the material of the non-conductive carrier having heat conducting properties comprises a metal heat conductive material or a non-metal heat conductive material. 如申請專利範圍第3項所述之線路基板結構之製造方法,其中該非導電載體中埋設至少一導熱柱。 The method of manufacturing a circuit substrate structure according to claim 3, wherein at least one heat conducting column is embedded in the non-conductive carrier. 如申請專利範圍第1項所述之線路基板結構之製造方法,進一步包括下述步驟:於提供該載體後,同時以該粗糙化處理法於該附著促進部外設置至少一導電接點於該載體上,各該導電接點連接該載體的邊緣和該附著促進部並形成相通之線路;進行化學電鍍處理於各該附著促進部上設置該金屬層;各該導電接點上設置一防鍍絕緣層;利用電鍍方式於各該金屬層上設置一電鍍層;移除設置於各該導電接點上之該防鍍絕緣層及該金屬層,得到各獨立之該線路圖樣。 The method for manufacturing a circuit board structure according to claim 1, further comprising the step of: providing the carrier, and simultaneously providing at least one conductive contact outside the adhesion promoting portion by the roughening treatment On the carrier, each of the conductive contacts is connected to the edge of the carrier and the adhesion promoting portion and forms a line connecting the same; the metal plating layer is disposed on each of the adhesion promoting portions; and each of the conductive contacts is provided with an anti-plating layer An insulating layer; an electroplating layer is disposed on each of the metal layers by electroplating; and the anti-plating insulating layer and the metal layer disposed on each of the conductive contacts are removed to obtain respective independent circuit patterns. 一種線路基板結構,其係包含:一載體;至少一附著促進部,各該附著促進部係利用一粗糙化處理法於該載體表面而形成粗糙表面,且各該附著促進部之粗糙表面呈現開放狀態,且各該附著促進部係具有一預定路徑;以及一金屬層,在各該附著促進部設置該金屬層,該金屬層係預設於各該附著促進部之觸媒與化學鍍液反應所形成,且該金屬層包括 對應該附著促進部之該預定路徑之一線路圖樣;其中,該粗糙化處理法係為噴砂加工方式或雷射照射蝕刻方式其中之一。 A circuit substrate structure comprising: a carrier; at least one adhesion promoting portion, each of the adhesion promoting portions forming a rough surface on the surface of the carrier by a roughening treatment, and the rough surface of each of the adhesion promoting portions is open a state, and each of the adhesion promoting portions has a predetermined path; and a metal layer, wherein the metal layer is disposed in each of the adhesion promoting portions, and the metal layer is preset to react with the electroless plating solution of each of the adhesion promoting portions Formed, and the metal layer includes A circuit pattern corresponding to one of the predetermined paths of the adhesion promoting portion; wherein the roughening treatment method is one of a sandblasting processing method or a laser irradiation etching method. 如申請專利範圍第10項所述之線路基板結構,其中進一步包括至少一導電接點,各該導電接點係連接該載體的邊緣和各該附著促進部並形成相通之線路。 The circuit substrate structure of claim 10, further comprising at least one conductive contact, each of the conductive contacts connecting the edge of the carrier and each of the adhesion promoting portions and forming a communication line. 如申請專利範圍第11項所述之線路基板結構,其中進一步在各該導電接點之金屬層上設置一防鍍絕緣層。 The circuit substrate structure of claim 11, wherein a plating resist is further disposed on the metal layer of each of the conductive contacts. 如申請專利範圍第12項所述之線路基板結構,其中該金屬層上設置一電鍍層。 The circuit substrate structure of claim 12, wherein a plating layer is disposed on the metal layer. 一種線路基板結構,其係包含:一載體;一觸媒絕緣層,其係設置於該載體表面上;至少一附著促進部,各該附著促進部係利用一粗糙化處理法貫穿該觸媒絕緣層並設置於該載體表面,且各該附著促進部之粗糙表面呈開放狀態並具有一預定路徑;以及一金屬層,係在各該附著促進部上,且該金屬層係預設於各附著促進部之觸媒與化學鍍液反應所形成,且該金屬層包括對應該附著促進部之該預定路徑之一線路圖樣;其中,該粗糙化處理法係為噴砂加工方式或雷射加工照射蝕方式其中之一。 A circuit substrate structure comprising: a carrier; a catalyst insulating layer disposed on the surface of the carrier; at least one adhesion promoting portion, each of the adhesion promoting portions penetrating the catalyst through a roughening treatment The layer is disposed on the surface of the carrier, and the rough surface of each of the adhesion promoting portions is in an open state and has a predetermined path; and a metal layer is attached to each of the adhesion promoting portions, and the metal layer is preset to each adhesion The catalyst of the promotion unit is formed by reacting with the electroless plating solution, and the metal layer includes a circuit pattern corresponding to the predetermined path corresponding to the adhesion promoting portion; wherein the roughening treatment method is a sandblasting processing method or a laser processing irradiation One of the ways. 如申請專利範圍第14項所述之線路基板結構,其中進一步包括至少一導電接點,各該導電接點連接該載體的邊緣和各該附著促進部並形成相通之線路。 The circuit substrate structure of claim 14, further comprising at least one conductive contact, each of the conductive contacts connecting the edge of the carrier and each of the adhesion promoting portions and forming a communication line. 如申請專利範圍第15項所述之線路基板結構,其中各該導電接點 之金屬層上設置一防鍍絕緣層。 The circuit substrate structure of claim 15, wherein each of the conductive contacts An anti-plating insulating layer is disposed on the metal layer. 如申請專利範圍第16項所述之線路基板結構,其中各該金屬層上設置一電鍍層。 The circuit substrate structure of claim 16, wherein a plating layer is disposed on each of the metal layers.
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