TWI421130B - Door type operating device - Google Patents

Description

Gate type working device

The present invention relates to a gantry type work device having a work head movable in a direction in which the frame extends, and more particularly to a work device having a passage for facilitating maintenance work of the work head and for human access.

In addition, the term "liquid material" as used in this specification includes liquid materials covered by a wide range of viscosity from low-viscosity liquids such as solvents and aqueous solutions to viscous bodies such as greases and adhesives, and also covers fillers and solid particles. The liquid material contains a paste-like flow body such as a silver paste or a solder paste.

Further, the "discharging" in the present specification includes a discharge of a pattern in which the liquid material comes into contact with the workpiece before leaving the nozzle, and a discharge of a pattern in which the liquid material comes out of the nozzle and contacts the workpiece.

There is a known working device having a table on which a workpiece is placed and a frame with a working head (also referred to as a beam or a door frame), which is generally referred to as a door type working device. As a gate type working device for applying a desired operation to a workpiece that moves relative to the work head, there are, for example, a device for applying a sealant in the manufacture of a liquid crystal display panel, a pattern exposure device for a solar cell panel, and a defect inspection of a semiconductor device. Device, etc.

In such a device, the size of the device itself tends to increase as the size of the device increases. For example, the glass substrate for the liquid crystal display panel of the eighth generation has a size of 2160 mm × 2400 mm, and the working device needs to be mounted. Workpiece platform for workpieces of dimensions.

As a gate-type liquid material coating device of a gate structure, as disclosed in Patent Document 1, a device is configured such that a substrate holding mechanism for holding a substrate on which a paste pattern is formed can be moved only in one direction, and is respectively coated on a substrate. The coating head of the paste is provided with two sets of coating head supporting mechanisms for moving the coating head in the direction perpendicular to the substrate moving direction, one coating head supporting mechanism is fixed on the frame, and the other coating head supports The mechanism can move in the direction in which the substrate moves.

Further, Patent Document 2 discloses a device in which a paste coater which is applied to a substrate mounted on a stage and which draws a paste pattern of a desired shape is provided, and is provided with a frame which can be painted and coated. The surface of the paste pattern of the substrate moves in a direction parallel to the plane and extends in a direction different from the direction; the plurality of coating heads are arranged on the frame, and a linear motor movable in the direction in which the frame extends is provided, and a paste storage tube and a nozzle having a paste discharge port for discharging the paste filled in the paste storage tube; and a control means for moving the frame relative to the stage within a range in which the nozzle discharge port faces the substrate mounted on the stage, The plurality of coating heads are moved relative to the frame while controlling the paste discharge from the paste ejection outlets of the plurality of coating heads; and the paste pattern of the desired shape is drawn by coating the plurality of coating heads on the substrate.

Patent Document 1: Japanese Patent No. 3,701,882, Patent Document 2: Japanese Patent Laid-Open No. 2003-225606

As the device exemplified in the patent document, in the door type device in which the working head is mounted on the inner side of the frame, since the working head moving on the frame is often located in the gantry The inside, so when the head is repaired, the operator stretches his hand for a long time to work. In particular, in a multi-head type apparatus having a plurality of working heads in a frame, there is a case where an operator's hand cannot extend from the gantry to obtain a working head, and there is also a need to mount the gantry, grasp the frame, and hold the hand for maintenance. Stretching on the platform and other conditions that are not conducive to clean work. Moreover, such work may also result in a decrease in the accuracy of the device with extremely high assembly accuracy.

Further, since the platform on which the workpiece is placed is placed on the gantry, it is preferable not to allow the operator to perform maintenance work in the vicinity of or above the operator. In particular, for devices that require high-definition clarity, it is best not to repair them near the platform, so sometimes it is necessary to cover the sheets on the platform to perform work.

Moreover, when the apparatus main body is placed in the outer cover, there is a further problem. During maintenance, the upper body of the operator must enter the outer cover to perform maintenance. Because of its poor workability, dust, garbage and other particles, or dust generated by the human body, may be carried in the device requiring a clean environment. It is less expensive, and there are also problems such as damage to the platform due to contact or falling of tools or the like during maintenance work.

Moreover, the particles generated during maintenance are retained in the outer casing, which also impairs the problem of detergency.

However, in a large-scale work apparatus, it is also a subject to be solved to realize the ease of transportation. For example, a work device having a frame larger than the glass substrate of the eighth generation is difficult to transport by a truck or the like, and may be decomposed during transportation. However, the working device is fixed in one place, and the design is not based on the decomposition movement, so it takes more time and labor to disassemble. In particular, in precision-operated devices, the assembly work must also be carried out in a precise manner. High-tech is required to ensure sufficient precision adjustment work, and heavy machinery such as cranes is sometimes required for assembly.

In view of the above problems, the present invention provides a work apparatus which can make a work head easy to maintain and can be repaired without impairing the detergency.

The inventor of the present invention completed the present invention on the assumption that the workability is improved by providing a passage in an unnecessary portion of the gantry based on the huge gantry damage and workability. Regarding the aspect of the passage provided on the gantry, the cross-sectional type and the longitudinal type were reviewed. However, considering the strength of the frame and the conveyance, it was found that The glyph is the most appropriate. In the frame of the word shape, the structural strength can be improved without the passage portion, and the beam can be set in the passage to be reinforced without impairing the accessibility.

The meaning of the passage of the passage on the gantry is more remarkable for the structure of the cover covering work device. On the other hand, since the operator enters the passage, the operator itself may cause problems such as particles. Therefore, such a problem can be solved by the wall surface interrupting the maintenance area where the operator enters and the area where the workpiece platform is located.

That is, the working device according to the first aspect of the invention includes: a gantry having a passage extending in a first direction in which the operator can enter; and a frame extending in a second direction different from the first direction above the gantry; The utility model is configured to be movable in a first direction on the gantry including the channel; and the working head is disposed on the frame opposite to the platform, and is movable in the second direction; and the platform and the working head are relatively moved. The desired work is applied to the workpiece placed on the platform.

According to a second aspect of the invention, in the first aspect of the invention, the passage extends beyond the frame; and the platform is movable to a position that does not overlap the passage on the gantry.

According to a third aspect of the invention, in the first or second aspect of the invention, the gantry is formed by a lattice structure having a plurality of holes penetrating from the upper surface of the passage to the lower surface.

According to a fourth aspect of the invention, in the first aspect to the third aspect of the invention, there is provided an opening door for entering the passage; and a square outer cover covering the working device provided on the gantry.

According to a fifth aspect of the invention, in the first aspect of the invention, the frame includes a work head cover that covers the work head, and the upper end portion of the work head cover is configured to be located at a height near a ceiling of the cover.

According to a sixth aspect of the invention, in the fifth aspect of the invention, the work head cover is formed by a slope which is lowered from the upper surface thereof to the opposite side of the passage.

According to a seventh aspect of the invention, the working head is a liquid material discharge head that discharges a liquid material from a tip end of the nozzle.

According to a seventh aspect of the invention, in the seventh aspect of the invention, the weighing device is provided at the end portion of the passage, and is disposed on a stand that is independent of the gantry.

According to a ninth aspect of the invention, in the first aspect of the invention, the plurality of working heads are disposed in the frame.

According to a tenth aspect of the invention, in the first aspect of the invention, the frame is configured to be movable in the first direction.

According to the present invention, the working head of the working device can be easily repaired, and maintenance can be performed without impairing the detergency.

Moreover, since the frame size can be suppressed in structure, the conveyability is also good.

The best mode working device for carrying out the invention comprises: a gantry having a passage extending in a first direction accessible to the operator; and a frame extending in a second direction different from the first direction above the gantry; The utility model is configured to be movable in a first direction on the gantry including the channel; the working head is disposed on the frame opposite to the platform, and is movable in the second direction; the working head cover covers the frame and the working head; a door disposed at an end of the passage; and a square outer cover covering the working device disposed on the frame; moving the platform relative to the working head to perform a desired operation on the workpiece placed on the platform; The working device is characterized in that the height of the upper end portion of the work head cover is located near the top end of the cover.

In a preferred embodiment of the present invention, when the work is performed on the workpiece, the work position in the first direction is adjusted by moving the platform, and the work position in the second direction is adjusted by moving the plurality of work heads at a desired interval. For example, it is suitable for the job of simultaneously drawing a plurality of desired patterns on a workpiece. In such a configuration, the platform is configured to be freely movable only in the first direction, and the necessary driving source can be reduced, so that an increase in the size of the casing can be suppressed. That is, since the gantry size configuration is slightly wider than the width of the platform, the frame size can be made smaller than the conventional structure in which the platform can be moved in the first and second directions.

The position of the above-mentioned working head can be controlled by a driving source such as a linear motor or a rotary motor.

The working head includes, for example, a liquid material that is stored in a storage container by air pressure, and a discharge device that is attached to the workpiece by the liquid material discharged from the nozzle tip, and is stored above the liquid material stored in the storage container. The inner wall surface of the container is closely moved and stopped by the sliding plunger, so that the droplets are applied to the surface of the workpiece after the liquid material is separated from the front end of the nozzle, and the shape of the droplet is drawn on the surface of the workpiece, or at least the shape of the line is drawn. An inspection device of any of height, width, sectional area, and defect. It can be equipped with a plurality of devices of the same type, or can be combined with different types of devices.

Further, in the working device of the type in which the frame is moved, the operator can perform the work without entering the inside of the cover, or the open door can be provided at a position facing the moving frame to improve the workability.

Further, in the configuration including the plurality of frames, it is necessary to provide a passage having a length sufficient to operate on all the frames.

In the liquid crystal panel manufacturing process, for example, in the liquid crystal panel manufacturing process, the sealing device is applied to prevent liquid crystal from leaking out. In a so-called multi-piece cutting method in which a plurality of panels are produced from a glass substrate, a plurality of panels such as four (2 × 2), nine (3 × 3), and 20 (4 × 5) sheets are formed from one glass substrate. However, here, a rectangular pattern composed of a sealing material is drawn in units of panels. For example, when a 4×5 panel is produced from a piece of glass substrate, five coating heads are provided, and five patterns of the first row are simultaneously drawn by five coating heads, and after the first row is coated, the coating is performed. The head is moved to the coating position after the second row, and five patterns are simultaneously drawn with five coating heads.

However, the technical idea of the present invention is not limited to the above-described coating device, and can be applied as long as it is a so-called door type working device.

The details of the present invention are described below by way of examples, but the present invention is not limited by the examples.

(Example 1) <structure>

The liquid material coating apparatus of this embodiment is as shown in FIG. The word-shaped gantry 1 has a stage 12 on which a workpiece is placed, and a frame 3 that straddles the short side direction (X direction) of the gantry 1. In Fig. 1, reference numeral 101 is the direction in which the platform moves, and symbol 102 is the direction in which the coating head moves. Hereinafter, for convenience of explanation, the side of the door 31 of FIG. 1 will be referred to as the front or the front, and the side of the platform 12 will be referred to as the rear or the back.

A work head slider seat 4 is disposed on the front surface of the frame 3, and a plurality of work heads 6 that are movable in the X direction are attached to the work head slider base 4 via the work head slider 5.

The working head 6 is a coating head having a nozzle for discharging liquid. The working head 6 is configured to be movable in the Z direction by a conventional driving means (not shown). Each of the working heads 6 can be independently moved.

The platform 12 is configured to be movable in the Y direction by the Y slider holder 8 disposed in parallel with the passage 10. Further, a θ rotation means may be provided on the stage 12 for moving the workpiece in the θ-axis direction to be positioned at a predetermined angle.

The sliders in the X direction and the Y direction may be configured to include a magnet for a linear motor and a linear motion guide. However, the configuration is not limited thereto. For example, the slider holder may be provided with a motor and rotated in conjunction with the motor. The ball screw has a nut that is moved in parallel with the rotation of the ball screw.

The gantry 1 of the present embodiment is provided with a space for maintenance at the front side thereof. Channel 10. The passage 10 extends to a substantially central position in the longitudinal direction of the gantry 1 and is formed directly below the work head 6. The maintenance operator opens the door 31 and enters the passage 10, whereby the frame 3 can be repaired from the front or the bottom. The reinforcing beam can sometimes be erected under the passage 10, but it does not hinder the entry of the operator.

A communication socket (not shown) is provided at a lower portion of the gantry 1, and is connected to an external terminal such as a PC via a network cable, whereby the device can be remotely operated. The portable dedicated terminal can be connected to the network for remote operation, or can be operated by wireless remote control by using a communication means such as a wireless LAN.

Further, the gantry 1 is formed in a lattice shape as viewed from above, and is structurally easy to remove particles or the like by a downdraft flow from a fan provided above.

A plurality of weighing devices 13 may be provided at the end portion of the passage 10. The number of the weighing devices 13 is a design matter depending on factors such as the number of the working heads 6 or the cost, but it is preferably set to the same number as the working head 6.

The weigher 13 is disposed on a scale gantry 11 that is provided separately from the gantry 1, and the weigher gantry 11 is separated from the gantry 1 and placed on the floor (see Fig. 2). The weighing device 13 is located below the platform 12 during operation, but as shown in Fig. 1, the platform 12 is exposed when it is moved rearward during maintenance.

Further, it is preferable that a small disk, a cup, or the like is placed in advance on the scaler 13 so as not to interfere with the stage 12.

Actuation

The workpiece is loaded on the platform 12 by loading the workpiece from the back side by an automatic conveyor such as a robot. At this time, the working head 6 moves to move the hand in the Z direction. The position after the rise of the segment (retracted position) does not prevent the workpiece from being moved in.

After the workpiece on the stage 12 is placed, the main control unit (not shown) moves the platform 12 by moving the Y slider holder 8 (not shown), and the work head slider 5 is actuated to arrange the work head 6 with the workpiece. At the desired position, the working head 6 is lowered by the Z-direction moving means provided in the working head 6, and the workpiece and the working head 6 are relatively moved to apply the liquid material to the workpiece.

After the coating operation is completed, the working head 6 is again moved to the retracted position in order to avoid obstructing the removal of the workpiece. After the movement of the working head 6 is completed, the automatic conveyor carries out the workpiece from the back side.

The operator opens the door 31 and enters the passage 10 to perform maintenance work on the work head 6. At this time, the platform 12 is moved rearward to a position that does not face the work head 6. The space above the passage 10 becomes a space, so the operator can stand and work.

(Example 2)

The liquid material application device of the present embodiment has the outer cover 30 and the work head cover 70, and is different from the liquid material application device of the first embodiment. Hereinafter, for convenience of explanation, the side of the door 31 of FIG. 3 will be referred to as a front or front side, and the side of the platform 12 will be referred to as a rear or back side.

3 is a perspective view of the liquid material application device of the embodiment in which the work head cover 70 is attached to the frame 3. The upper end portion 73 of the work head cover 70 is located near the top end of the outer cover 30, and the front surface of the work head cover 70 has an inner wall function to prevent particles from intruding into the region on the back side of the frame 3 (clean holding area).

The upper surface of the work head cover 70 is a slope from the top toward the rear side. Its shape does not cause a large change in the air flow (sinking flow) from top to bottom. borrow By forming the bevel shape on the upper surface, it is possible to prevent the airflow from generating a whirl in the middle or failing to reach the lower side.

The back of the working head cover 70 is flat to prevent particles from entering the clean holding area. Further, the clearance between the work head cover 70 and the gantry 1 is a distance that does not hinder the movement of the stage 12. The distance between the upper end portion 73 of the work head cover 70 and the top end of the outer cover 30 and the distance between the lower end of the work head cover 70 and the gantry 1 are design matters, and the shape of the body of the frame 3 can be reduced.

The front surface and the side surface of the work head cover 70, and the space in which the work head 6 is placed are covered with a plate-shaped transparent member in three directions. The work head door 71 is disposed at the center portion of the front portion via the three hinges 72, and can be opened to the upper side. Further, in the present embodiment, the transparent member on the side surface cannot be opened and closed, but whether or not the side transparent member can be opened and closed is a matter of design.

The liquid material application device of the present embodiment is disposed in the square outer cover 30 as shown in FIGS. 4 to 8 .

The outer cover 30 is a closed space for preventing garbage or dust from adhering to the workpiece, and an opening portion 34 for carrying out the workpiece is provided on the back surface, and a pair of half-opening doors 32 and a door 31 for entering the passage 10 are provided on the front surface. .

Further, an emergency stop button 37 and an operation panel 38 for operating a main control unit (not shown) are provided on the front surface of the outer cover, and each of the panels constituting the outer cover 30 can be opened and closed.

Fig. 9 is a plan view of the liquid material application apparatus of the present embodiment, Fig. 10 is a cross-sectional view taken along line A-A' of Fig. 9, Fig. 11 is a cross-sectional view taken along line B-B' of Fig. 9, and Fig. 12 is a cross-sectional view taken along line C-C' of Fig. 9. Channel 10 extends to the front of the A-A’ line, As can be seen from Fig. 11, the cross section constitutes a U shape. The C-C' line portion of the gantry 1 is not provided with the passage 10, and has the function of improving the structural strength of the gantry 1.

In Fig. 9, the platform 12 is located at the rear position, but the platform 12 can be moved forward when working, and can be moved to the position of Fig. 13.

In the present embodiment, a fan mechanism (not shown) is provided on the back side of the frame 3, so that the cleaned air often flows from the upper portion to the lower portion. Thereby, unnecessary substances such as dust are discharged from the lower portion of the outer cover 30 to the outside, so that unnecessary objects do not remain in the outer cover 30, so that the coating operation can be performed frequently in a clean environment. In this case, it is preferable to use an air cleaner or a filter such as a HEPA (High Efficiency Particulate Air Filter) to supply outside air to the work area.

Further, by setting the region on the back side of the frame 3 (cleaning holding region) to the positive pressure on the front side of the frame 70, air can flow from the former region to the latter region. This flow has the function of preventing particles generated during maintenance from entering the clean holding area of the frame 3 where the platform is located.

Further, in a preferred embodiment of the outer cover 30, in addition to a metal frame made of SUS (stainless steel) or an aluminum frame, a wall made of a metal or a wall made of a transparent resin may be exemplified. The resin wall can be transparent (colorless and transparent), yellow, strong tea, red, dark gray, smoky gray (gray), etc., but depending on the use of the liquid material used (for example, aversion to ultraviolet rays, etc.) You can choose the most appropriate one. The shaded portion of Figure 14 is transparent or translucent.

Similarly to the first embodiment, a communication socket (not shown) is provided at a lower portion of the gantry 1, and can be remotely operated. It is also possible to operate by operating the panel 38. In the maintenance work of opening the front or side door or panel, the operation panel The operation is more difficult, so the remote control operation is more effective.

Actuation

The workpiece is carried in the opening portion 34 of the back surface by an automatic conveyor such as a robot, and the workpiece is placed on the stage 12. At this time, the working head 6 is moved to a position (retracted position) in which the moving means in the Z direction is raised, so that the workpiece is not prevented from being carried in.

After the workpiece on the stage 12 is placed, the main control unit (not shown) moves the platform 12 by moving the Y slider holder 8 (not shown), and the work head slider 5 is actuated to arrange the work head 6 with the workpiece. At the desired position, the working head 6 is lowered by the Z-direction moving means provided in the working head 6, and the workpiece is moved relative to the working head 6 to apply the liquid material to the workpiece.

After the coating operation is completed, the working head 6 is again moved to the retracted position in order to avoid obstructing the removal of the workpiece. After the movement of the work head 6 is completed, the automatic conveyance machine carries out the workpiece from the opening 34.

The operator opens the door 31 and enters the passage 10 to perform maintenance work on the work head 6. At this time, the platform 12 is moved rearward to a position that does not face the work head 6. The space above the passage 10 becomes a space, so the operator can stand and work. The work head door 71 can also be opened as appropriate, thereby making it easier to work.

By entering the passage 10, the work head 6 is located in an easily accessible range, so that maintenance work such as replacement of consumables can be easily performed.

After the maintenance work is completed, the work head door 71 is closed, exits from the passage 10, and the door 31 is closed. Since it is estimated that particles will be generated due to maintenance work, it is best to start work after a certain waiting time.

Further, the accuracy of the amount of the liquid material discharged from the working head 6 can be adjusted during the standby time, and the time can be utilized efficiently. During the maintenance work, the platform 12 moves rearward to expose the weighing device 13, and thus is suitable for the work of adjusting the precision of the amount.

(industrial availability)

The present invention is also applicable to a working device in which a work head other than the liquid discharge head is mounted. For example, a UV irradiation head having a UV light source for curing a UV adhesive applied to a workpiece, or a feeling of determining and inspecting the surface of the workpiece, or the coating line drawn by the liquid material can be mounted. A working device for an inspection head of a camera such as a CCD or the like.

Moreover, it can also be applied to a working device equipped with a processing head having a processing device for a tool such as a drill.

1‧‧‧Rack

2‧‧‧Support

3‧‧‧Frame

4‧‧‧Working head slider seat

5‧‧‧Work head slider

6‧‧‧Work head

8‧‧‧ platform slide seat

10‧‧‧ channel

11‧‧‧Weighing device stand

12‧‧‧ platform

13‧‧‧Weighing device

30‧‧‧ Cover

31~33‧‧‧

34‧‧‧ openings

35‧‧‧Speakers

36‧‧‧Monitor

37‧‧‧Emergency stop button

38‧‧‧Operator panel

39‧‧‧ display lights

70‧‧‧Working head cover

71‧‧‧Working head door

72‧‧‧ Hinges

73‧‧‧Upper end

101‧‧‧ Platform movement direction

102‧‧‧The direction of the coating head

Fig. 1 is a perspective view of a liquid material coating apparatus of the first embodiment.

Fig. 2 is a bottom view of the liquid material coating apparatus of the first embodiment.

Fig. 3 is a perspective view of the liquid material coating apparatus of the second embodiment.

Fig. 4 is a perspective view showing a state in which a cover is attached to the liquid material application device of the second embodiment.

Fig. 5 is a front elevational view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment.

Fig. 6 is a rear elevational view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment.

Fig. 7 is a left side view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment.

Fig. 8 is a right side view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment.

Fig. 9 is a plan view showing a state in which a cover is attached to the liquid material application device of the second embodiment, and the stage is brought to the rear position.

Figure 10 is a cross-sectional view taken along line A-A' of Figure 9;

Figure 11 is a cross-sectional view taken along line B-B' of Figure 9;

Figure 12 is a cross-sectional view taken along line C-C' of Figure 9;

Fig. 13 is a plan view showing a state in which a cover is attached to the liquid material application device of the second embodiment, and the stage is brought to the front position.

Figure 14 is a front elevational view for explaining the transparent portion of Figure 4.

1‧‧‧Rack

2‧‧‧Support

3‧‧‧Frame

4‧‧‧Working head slider seat

5‧‧‧Work head slider

6‧‧‧Work head

8‧‧‧ platform slide seat

10‧‧‧ channel

12‧‧‧ platform

13‧‧‧Weighing device

31‧‧‧

101‧‧‧ Platform movement direction

102‧‧‧The direction of the coating head

Claims (10)

A working device comprising: a gantry having a passage extending in a first direction accessible to an operator; a frame extending above the gantry in a second direction different from the first direction; a table The movable head is movable in the first direction on the gantry including the channel; and the working head is disposed on the frame opposite to the platform, and is movable in the second direction; the platform is moved relative to the working head, and Apply the desired work to the workpiece placed on the platform. The working device of claim 1, wherein the passage extends below the frame; the platform is movable to a position that does not overlap the passage on the gantry. The working device according to claim 1 or 2, wherein the gantry is formed of a lattice structure having a plurality of holes penetrating from the upper surface of the passage to the lower surface. The working device according to claim 1 or 2, further comprising: an opening door for entering the passage; and a square outer cover covering the working device provided on the frame. The working device of claim 4, wherein the frame is provided with a working head cover covering the working head, and the working head cover is constructed by a height at which the upper end portion is located near a ceiling of the outer cover to make. The working device of claim 5, wherein the upper surface of the working head cover is formed by a downwardly inclined surface facing the channel. The working device according to claim 1 or 2, wherein the working head is a liquid material discharge head that discharges a liquid material from a tip end of the nozzle. The working device according to claim 7, wherein a weighing device is disposed at a terminal end of the passage, and is disposed on a stand independent of the gantry. The working device of claim 1 or 2, wherein the frame is provided with a plurality of working heads. The working device according to claim 1 or 2, wherein the frame is configured to be movable in the first direction.