TWI420648B - Method for manufacturing three-dimensional stacking dice - Google Patents

Description

Method for manufacturing three-dimensional stacked die package structure

The present invention relates to a three-dimensional stacked die package structure and a method of fabricating the same; and more particularly to a wafer level fabrication method for a three-dimensional stacked die package structure.

In order to achieve the above objectives, the three-dimensional integrated circuit (3D-IC) stacking structure was born due to the demand for light, thin, short, and small electronic products, and the narrowing of the line width of the integrated circuit. The three-dimensional integrated circuit forms a vertical through hole in the germanium wafer through a Trough-Silicon-Vias (TSVs), and deposits an insulating material and a metal material in the through holes for the germanium wafer. A vertical electrical connection structure is formed, and the germanium wafers are stacked. Due to the short electrical connection path, the package structure can avoid electrical problems caused by the continuous reduction of the line width, and can improve the transmission speed, and is suitable for application to high-speed arithmetic components or memory components. Moreover, the package structure is stacked in the vertical direction to meet the requirements of light, thin, short, small and high density packages. Three-dimensional integrated circuit stack packaging has become an important advanced packaging structure in the future.

The present invention provides a three-dimensional stacked die package structure and a manufacturing method thereof, which utilizes Through-Silicon-Vias (TSVs) technology to form a vertical electrical connection structure of the three-dimensional stacked die package structure to shorten Electrical transmission path, which in turn increases the electrical transmission rate.

The present invention provides a three-dimensional stacked die package structure and a manufacturing method thereof, which utilizes the design of a redistribution layer (RDL) between a Via-on-pad and a through-hole in the structure of the present invention. The electrical properties of the three-dimensional stacked die package structure are directed from its first surface to an opposite second surface.

The present invention provides a three-dimensional stacked die package structure and a method for fabricating the same, which utilizes conductive bumps to cover spacers that are bonded to each other between stacked crystal grains to prevent breakage of the spacers, thereby improving the three-dimensional stacked die package structure. Reliability.

The invention provides a three-dimensional stacked die package structure and a manufacturing method thereof, which utilizes a conductive pattern layer directly as a hard mask layer for fabricating a wire structure on a die.

In addition, an embodiment of the present invention provides a grain structure with vertical electrical conduction, which utilizes a design of rewiring between a blind via and a through hole on a die to electrically charge the die from a first surface thereof. Guided to a second surface opposite.

An embodiment of the present invention provides a three-dimensional stacked die package structure including at least a first substrate, a second substrate, and at least one first conductive bump, wherein the first substrate includes: at least one die, at least one a first conductive pad, at least one through hole, and at least one blind hole, wherein the first conductive pad is formed on a first surface of the first substrate, the through hole is through the first conductive pad And the first substrate and the blind via are formed on the first conductive pad; an insulating layer is formed on the through hole and the peripheral wall of the blind via, and the first surface of the first substrate and an opposite first On the two surfaces, an electrical connection layer is formed on the insulating layer and fills the through holes and the blind holes to guide the electrical properties of the first substrate from the first surface to the second surface. The second substrate has the same structure as the first substrate. The first surface of the second substrate is stacked under the second surface of the first substrate, and the electrical connection layers corresponding to each other are bonded to each other. The at least one first conductive bump covers the electrical connection layer of the first substrate and the second substrate bonded to each other.

An embodiment of the present invention provides a method for fabricating a three-dimensional stacked die package structure, comprising the steps of: providing a substrate having at least one die and at least one first conductive pad on a first surface thereof; The at least one first through hole penetrates the first conductive pad and the substrate; forming an insulating layer covering the first surface of the substrate and an opposite second surface thereof and filling the first through hole; forming at least a second The through hole penetrates the insulating layer and the at least one blind hole in the corresponding first through hole above the corresponding one of the first conductive pads; forming a conductive layer to fill the second through hole and the blind hole and covering Directing the electrical properties of the substrate from the first surface to the second surface on the first surface and the second surface of the substrate; forming a conductive hard mask layer on the first surface of the substrate And etching the conductive hard mask layer to form a conductive pattern mask on the first surface and the second surface of the substrate; etching the substrate One The conductive layer on the surface and the second surface to form a conductive pattern layer on the first surface and the second surface of the substrate, respectively; and stacking at least two of the foregoing substrates in a front-facing manner to face each other After the conductive pattern layers are bonded to each other, the conductive hard mask layers coat the conductive layers bonded to each other.

An embodiment of the present invention provides a vertical electrically conductive die structure including a die, an insulating layer, an electrical connection layer, and at least one conductive hard mask pattern layer. The die has at least one conductive spacer, at least one through hole, and at least one blind hole, wherein the conductive pad is formed on a first surface of the die, and the through hole penetrates the conductive pad And the die and the blind via are formed above the conductive pad. The insulating layer is formed on the through hole and the peripheral wall of the blind hole and the first surface of the die and a second surface opposite thereto. The electrical connection layer is formed on the insulating layer and fills the through hole and the blind hole to guide the electrical properties of the die from the first surface to the second surface. The conductive hard mask pattern layers are formed on the electrical connection layer of the first surface and the second surface of the die.

The present invention provides a three-dimensional stacked die package structure and a manufacturing method thereof, and more particularly to a three-dimensional stacked die package structure manufactured by a wafer level process, which is described in detail below by using the following specific embodiments in conjunction with the drawings. .

The first embodiment to the first K are the first embodiment of the method for manufacturing the three-dimensional stacked die package structure of the present invention, and the schematic cross-sections of the structures corresponding to the respective process stages are respectively illustrated. Referring to FIG. 1A, a substrate 100 is first provided. The substrate 100 has at least one die (not shown) and at least one first conductive pad 101 on a first surface 100a thereof. The substrate 100 can be a germanium wafer having a plurality of integrated circuit components and a plurality of metal pads, for example, Ni/Au alloy pads on the surface thereof. The substrate 100 may be a III-V wafer or a glass wafer. Referring to FIG. 1B, a TSVs technique is performed to form at least one first through hole 102 penetrating the first conductive pad 101 and the substrate 100, for example, laser drilling, The first through hole 102 is formed by dry etching or wet etching. Referring to FIG. 1C, an insulating layer 103 is formed to cover the first surface 100a of the substrate 100 and the opposite second surface 100b and to fill the first through hole 102. The insulating layer 103 may be a polymer insulating material layer, for example, an ABF (Ajinomoto Build-up Film) insulating film, and may be formed on the first surface 100a and the second surface 100b of the substrate 100 by double-sided pressing. The first through hole 102 is filled. Referring to FIG. 1D, at least one second through hole 104 is formed through the insulating layer 103 and at least one blind hole (Via-on-Pad) 105 in the corresponding first through hole 102 at a corresponding one of the first conductive holes. Above the spacer 101. In the first embodiment, the second through hole 104 and the blind hole 105 can be formed by laser drilling in the present invention. Referring to FIG. 1E, a first conductive layer 106 is formed in the peripheral wall of the second through hole 104 and the blind via 105 and covers the insulating layer upper surface 103a above the substrate 100 and the insulating layer under the substrate 100. Surface 103b. In the first embodiment, since the blind via 105 has a smaller inner diameter, the first conductive layer 106 can fill the blind via 105. The first conductive layer 106 serves as a seed layer to facilitate the fabrication of a subsequent plated metal layer. The first conductive layer 106 may be a titanium germanium (TiW) layer deposited by a sputtering method. Referring to the first F pattern, a second conductive layer 107 is then deposited by electroplating or electroless plating. For example, a copper metal layer is on the first conductive layer 106 and the second through hole 104 is filled, so that the electrical properties of the substrate 100 can be guided from the first surface 100a to the second surface 100b. In the first embodiment, when the blind via 105 is not filled by the first conductive layer 106, in the process of the subsequent second conductive layer 107, the second conductive layer 107 may be filled in. The blind hole 105 is filled (not shown). In the first embodiment, in the first embodiment, the present invention can also directly form an electrical connection layer in a deposition manner to fill the second through hole 104 and the blind via 105 and cover the insulating layer above the substrate 100. The upper surface 103a and the insulating layer lower surface 103b below the substrate 100 further guide the electrical properties of the substrate 100 from the first surface 100a to the second surface 100b.

Referring to the first F pattern, a third conductive layer 108 having a predetermined thickness is formed on the second conductive layer 107 above the first surface 100a and the second surface 100b of the substrate 100, respectively. The third conductive layer 108 may be a solder layer formed by electroplating. The plating thickness of the third conductive layer 108 is pre-calculated so that the minimum thickness thereof after the subsequent die stack bonding reflow, the third conductive layer 108 can completely cover the stacked crystal grains to be bonded to each other. Gaskets to prevent breakage of such gaskets.

Referring to FIG. 1G, the third conductive layer 108 is used for subsequently forming a conductive hard mask on the first surface 100a and the second surface 100b of the substrate 100. Floor. In the process stage, the third conductive layer 108 is patterned by laser etching to form a wire on the second conductive layer 107 above the first surface 100a and the second surface 100b of the substrate 100. The pattern mask is formed to facilitate subsequent fabrication of the wire pattern on the first surface 100a and the second surface 100b of the substrate 100.

Referring to the first H diagram, the second conductive layer 107 is etched by chemical or physical etching, for example, dry etching or wet etching. Referring to FIG. 1A, the first conductive layer 106 is then etched by chemical or physical etching, for example, dry etching or wet etching, to form separately on the first surface 100a and the second surface 100b of the substrate 100. The aforementioned wire pattern. The wire pattern includes the first conductive layer 106, the second conductive layer 107, and the third conductive layer 108.

In the first embodiment, the present invention transmits the conductive pattern between the second through hole 104 and the blind via 105 above the first conductive spacer 101 as a rewiring to electrically connect the substrate 100. Guided from the first surface 100a to the second surface 100b. Furthermore, the wire patterning process uses the third conductive layer 108 as a hard mask layer without using a yellow light process, thereby reducing the process cost of the present invention.

In addition, in the first embodiment, an electrical connection guiding layer is directly formed to fill the second through hole 104 and the blind hole 105 and cover the insulating layer upper surface 103a and the insulating layer over the substrate 100. Lower layer surface 103b. Next, a patterned conductive hard mask layer having a predetermined thickness is formed on the conductive layer upper surface 103a and the conductive layer lower surface 103b. In this case, the conductive layer may be etched in a single etching manner in a subsequent wire patterning stage to form the wire pattern.

Referring to FIG. 1J, a die stacking step is performed, wherein at least two of the foregoing substrates 100 that complete the above process steps are stacked and joined in a front-side manner, so that the corresponding wire pattern layers corresponding to each other are bonded to each other and reflowed. In the reflow step, the third conductive layers 108 corresponding to the bonding are melted to completely cover the first conductive layer 106 and the second conductive layer 107 that are bonded to each other. In this case, the patterned first conductive layer 106 and the second conductive layer 107 form an electrical connection layer on the first surface 100a of the substrate 100 and the insulation of the second surface 100b. On layer 103. In the first embodiment, the joined third conductive layer 108 can completely cover the electrically connected layers that are butted by the upper and lower substrates 100 after reflowing, and the electrically connected layers are passed through the electrical connection layer. The third conductive layers 108 are bonded to each other as shown in the first J diagram. Alternatively, as shown in FIG. 3, the second conductive layers 107' of the electrically connected layers that are butted on the lower substrate 100 are in direct contact, and the third conductive layer 108 completely encapsulates the electrical properties. Connection layer. The above process steps are a wafer level manufacturing method for implementing the three-dimensional stacked die package structure of the present invention.

Referring to the first K diagram, a stacked die cutting step is then performed, that is, the foregoing substrate stack structure is cut to separate the individual stacked crystal grains from the foregoing substrate stack structure. Next, the separated individual stacked die is adhered to a circuit substrate 110 such that the wire pattern under the second surface 100b of the substrate 100 under the individual stacked die corresponds to at least one of the circuit substrate 110. Two conductive pads 112. The reflowing step is performed such that the molten third conductive layer 108 completely covers the electrical connection layer and the butted second conductive spacer 112 under the second surface 100b of the lower substrate 100. The circuit substrate 110 may be a printed circuit substrate, or the material thereof may be tantalum or ceramic material. Thus, the package structure of the three-dimensional stacked die of the present invention is completed. It should be noted that, in the package structure of the three-dimensional stacked die of the present invention, the electrical connection layer and the electrical connection layer between the die and the circuit substrate 110 are overlapped with each other. The two conductive pads 112 are completely covered by the third conductive layer 108 after the reflow, so that the electrical connection layer and the second conductive pad 112 can be prevented from being broken, thereby improving the three-dimensional stacking. The reliability of the package structure of the die.

Referring to the first embodiment, in the first embodiment, the present invention may also firstly cut and separate the die having the vertical electrical conduction from the wafer-level processing step from the substrate 100, and then The dies are stacked in a frontal manner, stacked in the same manner as described above, and then assembled over the circuit substrate 110 as described above. In this way, the same three-dimensional stacked die package structure can still be obtained.

2A to 2K are schematic cross-sectional views of a second embodiment of the method for fabricating a three-dimensional stacked die package structure according to the present invention corresponding to each process stage. Referring to FIG. 2A, a substrate 200 is first provided. The substrate 200 has at least one die (not shown) and at least one first conductive pad 201 on a first surface 200a thereof. The substrate 200 can be a germanium wafer having a plurality of integrated circuit components and a plurality of metal pads, for example, Ni/Au alloy pads on the surface thereof. The substrate 200 may be a III-V wafer or a glass wafer. Referring to FIG. 2B, a TSVs technique is performed to form at least one first through hole 202 extending through the first conductive spacer 201 and the substrate 200, for example, laser drilling, The first through hole 202 is formed by dry etching or wet etching. Referring to FIG. 2C, an insulating layer 203 is formed on the peripheral wall of the first through hole 202 and covers a first surface 200b of the substrate 200 opposite thereto. The insulating layer 203 may be a ceria or tantalum nitride layer. When the substrate 200 is a germanium wafer, a germanium dioxide layer may be directly formed on the peripheral wall of the first through hole 202 by thermal oxidation to cover the first surface 200a and the second surface 200b of the substrate 200.

Referring to FIG. 2D, at least one blind via 204 is formed over the corresponding one of the first conductive pads 201 by a laser drilling technique. Referring to FIG. 2E, a first conductive layer 205 is formed on the insulating layer 203 of the inner peripheral wall of the first through hole 202 and the insulating layer upper surface 203a above the substrate 200 and the insulating layer under the substrate 200. Surface 203b and the blind hole 204. Since the blind via 204 has a smaller inner diameter, the first conductive layer 205 can fill the blind via 204. The first conductive layer 205 serves as a seed layer to facilitate the fabrication of a subsequent plated metal layer. The first conductive layer 205 may be a titanium germanium (TiW) layer deposited by a sputtering method.

Referring to FIG. 2F, a second conductive layer 206 is deposited by electroplating or electroless plating. For example, a copper metal layer is formed on the first conductive layer 205 and the first through hole 202 is filled and covered. Above the 204, the first conductive layer 205 is above the insulating layer upper surface 203a and below the insulating layer lower surface 203b. In this way, the electrical properties of the substrate 200 can be guided from the first surface 200a to the second surface 200b. In the second embodiment, when the blind via 204 is not filled by the first conductive layer 205, in the subsequent step of the second conductive layer 206, the second conductive layer 206 may be filled in. The blind hole 204 is filled (not shown).

In the second embodiment, in the second embodiment, the present invention can also directly form an electrical connection layer in a deposition manner to fill the first through hole 202 and the inside of the blind hole 204 and cover the insulation above the substrate 200. The upper surface 203a of the layer and the lower surface 203b of the insulating layer below the substrate further guide the electrical properties of the substrate 200 from the first surface 200a to the second surface 200b. Referring to the second F pattern, a third conductive layer 207 having a predetermined thickness is formed on the second conductive layer 206 below the insulating layer upper surface 203a and below the insulating layer lower surface 203b. The third conductive layer 207 may be a solder layer formed by electroplating. The plating thickness of the third conductive layer 207 is pre-calculated so that the minimum thickness thereof is after the subsequent die stack bonding reflow, the third conductive layer 207 can be completely covered by the stacked die. Gaskets to prevent breakage of such gaskets.

Referring to the second G diagram, the third conductive layer 207 is used as a conductive hard mask for subsequently forming a conductive pattern (rewiring pattern) over the insulating layer upper surface 203a and below the insulating layer lower surface 203b. Curtain layer. In the process stage, the third conductive layer 207 is patterned by laser etching to form a second conductive layer 206 above the insulating layer upper surface 203a and below the insulating layer lower surface 203b. The wire pattern mask is formed to facilitate subsequent fabrication of the wire pattern above the insulating layer upper surface 203a and below the insulating layer lower surface 203b. Referring to the second H diagram, the second conductive layer 206 is etched by a chemical etching method such as dry etching or wet etching. Referring to FIG. 1A, the first conductive layer 205 is then etched by a chemical etching method such as dry etching or wet etching to form the conductive patterns on the upper surface 203a of the insulating layer and under the lower surface 203b of the insulating layer. . The wire pattern includes the first conductive layer 205, the second conductive layer 206, and the third conductive layer 207. In the second embodiment, the present invention transmits the conductive pattern between the first through hole 202 and the blind via 204 above the first conductive spacer 201 as a rewiring to electrically connect the substrate 200. Guided from the first surface 200a to the second surface 200b. Furthermore, the wire patterning process uses the third conductive layer 207 as a hard mask layer without using a yellow light process, thereby reducing the process cost of the present invention.

In addition, in the second embodiment, an electrical connection layer is directly formed to fill the first through hole 202 and the inside of the blind hole 204 and cover the insulating layer upper surface 203a and the insulating layer lower surface 203b. . Next, a patterned conductive hard mask layer is further formed on the conductive layer upper surface 203a and the conductive layer lower surface 203b. In this case, the conductive layer may be etched in a single etching manner in a subsequent wire patterning stage to form the wire pattern.

Referring to FIG. 2J, a die stacking step is performed, in which at least two of the foregoing substrates 200 which complete the above process steps are stacked and joined in a front-side manner, so that the corresponding wire pattern layers corresponding to each other are bonded to each other and reflowed. In the reflow step, the third conductive layers 207 corresponding to the bonding are melted to completely cover the first conductive layer 205 and the second conductive layer 206 that are bonded to each other. In this case, the patterned first conductive layer 205 and the second conductive layer 206 form an electrical connection layer on the first surface 200a and the second surface 200b of the substrate 200. on. In the second embodiment, the joined third conductive layer 207 can completely cover the electrically connected layers that are butted by the upper and lower substrates 200 after reflowing, and pass the electrically connected layers through the The third conductive layers 207 are bonded to each other as shown in the second J diagram. Or, as shown in FIG. 4, the second conductive layers 206' of the electrical connection layers that are butted by the lower substrate 200 are in direct contact, and the third conductive layer 207 completely covers the electrical connections. Floor. The wafer level processing step described above implements a method of fabricating another three-dimensional stacked die package structure of the present invention.

Referring to the second K diagram, a stacked die cutting step is then performed, that is, the foregoing substrate stack structure is cut to separate the individual stacked crystal grains from the foregoing substrate stack structure. Next, the separated individual stacked die is adhered to a circuit substrate 210 such that the wire pattern under the second surface 200b of the substrate 200 below the individual stacked die corresponds to at least one of the circuit substrate 210. Two conductive pads 212. The reflowing step is performed, so that the molten third conductive layer 207 completely covers the electrical connection layer under the second surface 200b of the lower substrate 200 and the second conductive spacer 212 that is butted, thereby completing the three-dimensional invention. The package structure of the stacked die is fabricated. The circuit substrate 210 may be a printed circuit substrate, or the material thereof may be tantalum or ceramic material. It should be noted that, in the package structure of the three-dimensional stacked die of the present invention, the electrical connection layer and the electrical connection layer between the die and the circuit substrate 210 and the circuit substrate 210 are connected to each other. The second conductive spacers 212 are completely covered by the third conductive layer 207 after reflow, so that the electrical connection layer and the second conductive spacer 212 can be prevented from being broken, thereby improving the three-dimensional stacking. The reliability of the package structure of the die.

Referring to the second embodiment, in the second embodiment, the present invention may also firstly cut and separate the die having the vertical electrical conduction from the wafer-level processing step from the substrate 200, and then The dies are stacked in a frontal manner in the same manner as described above, and then assembled over the circuit substrate 210 as described above. In this way, the same three-dimensional stacked die package structure can still be obtained.

The above description is only for the specific embodiments of the present invention, and is not intended to limit the scope of the claims of the present invention; all other equivalent changes or modifications which are not departing from the spirit of the present invention should be included in the following Within the scope of the patent application.

100, 200. . . Substrate

100a, 200a. . . First surface

100b, 200b. . . Second surface

101, 201. . . First conductive gasket

102, 202. . . First through hole

103, 203. . . Insulation

103a, 203a. . . Upper surface of the insulating layer

103b, 203b. . . Lower surface of the insulating layer

104. . . Second through hole

105, 204. . . Blind hole

106, 205‧‧‧ first conductive layer

107, 107', 206, 206'‧‧‧ second conductive layer

108, 207‧‧‧ third conductive layer

110, 210‧‧‧ circuit board

112, 212‧‧‧Second conductive gasket

1A through 1K are schematic cross-sectional views of respective process steps corresponding to the first embodiment of the method for fabricating a three-dimensional stacked die package structure of the present invention;

The first L diagram shows a schematic diagram of grain cutting of a wafer fabricated according to the manufacturing method of the first embodiment of the present invention;

2A to 2K are schematic cross-sectional views of respective process steps corresponding to the second embodiment of the method for fabricating the three-dimensional stacked die package structure of the present invention;

The second L diagram shows a schematic diagram of grain cutting of a wafer fabricated according to the manufacturing method of the second embodiment of the present invention;

The third figure is a variation of the substrate stack structure of the first embodiment of the present invention; and

The fourth figure is a modification of the substrate stack structure of a second embodiment of the present invention.

100. . . Substrate

100a. . . First surface

100b. . . Second surface

101. . . First conductive gasket

103. . . Insulation

106. . . First conductive layer

107. . . Second conductive layer

108. . . Third conductive layer

110. . . Circuit substrate

112. . . Second conductive gasket

Claims (18)

A method for manufacturing a three-dimensional stacked die package structure, comprising: providing a substrate having at least one die and at least one first conductive pad on a first surface thereof; forming at least one first through hole a first conductive spacer and the substrate; forming an insulating layer covering the first surface of the substrate and a second surface thereof and filling the first through hole; forming at least one second through hole through the corresponding first The insulating layer and the at least one blind hole in a through hole are above the corresponding one of the first conductive pads; forming a conductive layer to fill the second through hole and the blind hole and covering the first surface of the substrate And the second surface is configured to guide the electrical properties of the substrate from the first surface to the second surface; respectively forming a conductive hard mask layer on the first surface and the second surface of the substrate In the conductive layer, the conductive hard mask layer is in direct contact with the conductive layer of the first surface and the second surface, and does not pass through the through hole; etching the conductive hard mask layer to Forming a wire diagram Masking the first surface and the second surface of the substrate; etching the conductive layer on the first surface and the second surface of the substrate to form a conductive pattern layer on the first surface of the substrate And the second surface; and the at least two of the substrates are stacked and joined in a front-facing manner, such that the conductive pattern layers are bonded to each other, and the conductive hard mask layers are bonded to each other An electrically conductive layer. The method for manufacturing a three-dimensional stacked die package structure according to claim 1, wherein the second through hole and the blind hole are formed by laser drilling. The method for fabricating a three-dimensional stacked die package structure according to claim 1, wherein the conductive hard mask layers are etched by laser etching. The method of fabricating a three-dimensional stacked die package structure according to claim 1, wherein the conductive layer is etched by chemical or physical etching. The method of manufacturing a three-dimensional stacked die package structure according to claim 1, wherein the conductive layer comprises a first conductive layer and a second conductive layer, and the first conductive layer is interposed between the insulating layer Between the second conductive layer and the second conductive layer. The method of manufacturing a three-dimensional stacked die package structure according to claim 5, wherein the conductive layer is formed by electroplating or electroless plating. The method of manufacturing a three-dimensional stacked die package structure according to claim 1, wherein the substrate is selected from the group consisting of: a germanium wafer, a III-V wafer, and a glass wafer. The method for fabricating a three-dimensional stacked die package structure according to claim 1, further comprising a stacked die cutting step and an assembly step, wherein the stacked die cutting step separates the individual stacked die from the stacked substrate And the assembling step of bonding the individual stacked die to a circuit substrate, wherein the conductive layer of the individual stacked die is correspondingly bonded to at least one second conductive pad on the circuit substrate, and the conductivity The hard mask layer is coated with the one that is bonded to each other a conductive layer and the second conductive spacer. The method for fabricating a three-dimensional stacked die package structure according to claim 1, wherein before the stacking of at least two of the foregoing substrates in a front-side manner, the substrate cutting step is further performed to separate individual crystal grains from the foregoing. The substrate is separated, and then the substrate stacking step is performed, and at least two of the foregoing dies are stacked and joined together in a front-surface manner, and the corresponding conductive hard mask layer is coated on the conductive layers bonded to each other. A method for manufacturing a three-dimensional stacked die package structure, comprising: providing a substrate having at least one die and at least one first conductive pad on a first surface thereof; forming at least one first through hole a first conductive pad and the substrate; forming an insulating layer covering the first surface of the substrate and a second surface thereof and a peripheral wall of the first through hole; forming at least one blind hole in the corresponding one of the first Above the conductive pad; forming a conductive layer on the insulating layer and filling the first through hole and the blind hole to guide the electrical property of the substrate from the front surface to the back surface; respectively forming a conductive hard mask Laminating the conductive layer on the first surface and the second surface of the substrate, the conductive hard mask layer is in direct contact with the conductive layer of the first surface and the second surface, and does not pass The through holes, the conductive hard mask layers are etched to form a wire pattern mask on the first surface and the second surface of the substrate; and the first surface and the second surface of the substrate are etched The guide An electrically conductive layer to respectively form a conductive pattern layer on the first surface and the second surface of the substrate; and stacking and bonding at least two of the foregoing substrates on the front side in a front side manner so that the conductive pattern layers corresponding to each other are mutually After bonding, the electrically conductive hard mask layers coat the electrically conductive layers joined to each other. The method for fabricating a three-dimensional stacked die package structure according to claim 10, wherein the insulating layer is formed by a thermal oxidation method or a deposition method. The method for fabricating a three-dimensional stacked die package structure according to claim 10, wherein the conductive hard mask layers are etched by laser etching. The method of fabricating a three-dimensional stacked die package structure according to claim 10, wherein the conductive layer is etched by chemical or physical etching. The method of manufacturing a three-dimensional stacked die package structure according to claim 10, wherein the conductive layer comprises a first conductive layer and a second conductive layer, the first conductive layer being interposed between the insulating layer Between the second conductive layer and the second conductive layer. The three-dimensional stacked die package structure of claim 14, wherein the conductive layer is formed by electroplating or electroless plating. The method of manufacturing a three-dimensional stacked die package structure according to claim 10, wherein the substrate is selected from the group consisting of: a germanium wafer, a III-V wafer, and a glass wafer. The method for manufacturing a three-dimensional stacked die package structure according to claim 10, further comprising a stacked die cutting step and an assembly step, wherein the stacked die cutting step is to separate individual stacked crystal grains from the foregoing stack Separating the stacked substrate, and the assembling step is to adhere the individual stacked die to a circuit substrate, so that the conductive layer of the individual stacked die corresponds to at least one second conductive pad on the circuit substrate. And the conductive hard mask layer coats the conductive layer and the second conductive spacer bonded to each other. The method for manufacturing a three-dimensional stacked die package structure according to claim 10, wherein before the stacking of at least two of the foregoing substrates in a front-side manner, the substrate further comprises a step of performing a substrate cutting step to remove individual grains from the foregoing Separating the substrate, and then performing the foregoing substrate stacking step to stack and bond at least two of the foregoing dies to the front side in a front-facing manner, and to cause the corresponding conductive hard mask layers to coat the conductive layers bonded to each other .