TWI416120B - - Google Patents

Info

Publication number
TWI416120B
TWI416120B TW98131187A TW98131187A TWI416120B TW I416120 B TWI416120 B TW I416120B TW 98131187 A TW98131187 A TW 98131187A TW 98131187 A TW98131187 A TW 98131187A TW I416120 B TWI416120 B TW I416120B
Authority
TW
Taiwan
Prior art keywords
probe
low
insulating materials
insulating
conductive layer
Prior art date
Application number
TW98131187A
Other languages
English (en)
Chinese (zh)
Other versions
TW201111796A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW98131187A priority Critical patent/TW201111796A/zh
Publication of TW201111796A publication Critical patent/TW201111796A/zh
Application granted granted Critical
Publication of TWI416120B publication Critical patent/TWI416120B/zh

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW98131187A 2009-09-16 2009-09-16 High-frequency cantilever probe structure TW201111796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98131187A TW201111796A (en) 2009-09-16 2009-09-16 High-frequency cantilever probe structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98131187A TW201111796A (en) 2009-09-16 2009-09-16 High-frequency cantilever probe structure

Publications (2)

Publication Number Publication Date
TW201111796A TW201111796A (en) 2011-04-01
TWI416120B true TWI416120B (cg-RX-API-DMAC7.html) 2013-11-21

Family

ID=44909014

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98131187A TW201111796A (en) 2009-09-16 2009-09-16 High-frequency cantilever probe structure

Country Status (1)

Country Link
TW (1) TW201111796A (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI405974B (zh) * 2011-04-26 2013-08-21 Mpi Corp Cantilever high frequency probe card
TWI453423B (zh) * 2012-04-25 2014-09-21 探針阻抗匹配方法
IT201700021397A1 (it) * 2017-02-24 2018-08-24 Technoprobe Spa Testa di misura con migliorate proprietà in frequenza
CN112881886A (zh) * 2021-01-13 2021-06-01 上海华岭集成电路技术股份有限公司 多工位探针卡及晶圆测试的方法
CN119024021A (zh) * 2024-10-28 2024-11-26 浙江微针半导体有限公司 一种阻抗匹配的金属探针及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09304436A (ja) * 1996-05-17 1997-11-28 Tokyo Electron Ltd プローブカード
US6727716B1 (en) * 2002-12-16 2004-04-27 Newport Fab, Llc Probe card and probe needle for high frequency testing
JP2004170189A (ja) * 2002-11-19 2004-06-17 Micronics Japan Co Ltd プローブ及びこれを用いた電気的接続装置
TWI274164B (en) * 2005-12-23 2007-02-21 Probeleader Co Ltd Probe card for high frequency circuit test
TW200842368A (en) * 2007-04-27 2008-11-01 Microelectonics Technology Inc Probe card with electrical shielding structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09304436A (ja) * 1996-05-17 1997-11-28 Tokyo Electron Ltd プローブカード
JP2004170189A (ja) * 2002-11-19 2004-06-17 Micronics Japan Co Ltd プローブ及びこれを用いた電気的接続装置
US6727716B1 (en) * 2002-12-16 2004-04-27 Newport Fab, Llc Probe card and probe needle for high frequency testing
TWI274164B (en) * 2005-12-23 2007-02-21 Probeleader Co Ltd Probe card for high frequency circuit test
TW200842368A (en) * 2007-04-27 2008-11-01 Microelectonics Technology Inc Probe card with electrical shielding structure

Also Published As

Publication number Publication date
TW201111796A (en) 2011-04-01

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