TWI411064B - Microelectromechanical system - Google Patents
Microelectromechanical system Download PDFInfo
- Publication number
- TWI411064B TWI411064B TW99107653A TW99107653A TWI411064B TW I411064 B TWI411064 B TW I411064B TW 99107653 A TW99107653 A TW 99107653A TW 99107653 A TW99107653 A TW 99107653A TW I411064 B TWI411064 B TW I411064B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- cover
- layer
- movable plate
- movable
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
- B81B2207/098—Arrangements not provided for in groups B81B2207/092 - B81B2207/097
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009062805A JP2010220344A (ja) | 2009-03-16 | 2009-03-16 | 可動構造体及びそれを用いたマイクロミラー素子 |
JP2009062844A JP2010217397A (ja) | 2009-03-16 | 2009-03-16 | マイクロミラー素子 |
JP2009275848A JP5551923B2 (ja) | 2009-12-03 | 2009-12-03 | Memsデバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201110274A TW201110274A (en) | 2011-03-16 |
TWI411064B true TWI411064B (zh) | 2013-10-01 |
Family
ID=42739676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW99107653A TWI411064B (zh) | 2009-03-16 | 2010-03-16 | Microelectromechanical system |
Country Status (2)
Country | Link |
---|---|
TW (1) | TWI411064B (fr) |
WO (1) | WO2010107016A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI745154B (zh) * | 2019-11-07 | 2021-11-01 | 大陸商上海茗富半導體有限公司 | 製造光感測裝置和具有平面內及出平面運動的裝置的方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9276080B2 (en) | 2012-03-09 | 2016-03-01 | Mcube, Inc. | Methods and structures of integrated MEMS-CMOS devices |
US10036635B2 (en) | 2013-01-25 | 2018-07-31 | MCube Inc. | Multi-axis MEMS rate sensor device |
US10132630B2 (en) | 2013-01-25 | 2018-11-20 | MCube Inc. | Multi-axis integrated MEMS inertial sensing device on single packaged chip |
US9249012B2 (en) | 2013-01-25 | 2016-02-02 | Mcube, Inc. | Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures |
US10046964B2 (en) | 2013-03-07 | 2018-08-14 | MCube Inc. | MEMS structure with improved shielding and method |
KR101522670B1 (ko) * | 2014-08-19 | 2015-05-26 | 주식회사 이노칩테크놀로지 | 압전 소자 및 이를 구비하는 전자기기 |
CN105607249B (zh) * | 2015-12-21 | 2018-06-26 | 西安励德微系统科技有限公司 | 一种单侧不等高梳齿驱动的微扭转镜 |
EP3896838B8 (fr) * | 2019-01-22 | 2023-08-30 | The University of Tokyo | Élément collecteur d'énergie stimulé par vibrations |
JP7090249B2 (ja) * | 2019-06-06 | 2022-06-24 | 国立大学法人 東京大学 | 静電型デバイスを製造する製造方法 |
WO2021140944A1 (fr) * | 2020-01-10 | 2021-07-15 | 京セラ株式会社 | Dispositif résonateur piézoélectrique |
CN111965811A (zh) * | 2020-09-10 | 2020-11-20 | 上海汽车集团股份有限公司 | 一种三维mems扫描镜 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1062448A (ja) * | 1996-08-14 | 1998-03-06 | Murata Mfg Co Ltd | 外力検出装置 |
JP2007283413A (ja) * | 2006-04-13 | 2007-11-01 | Nippon Signal Co Ltd:The | アクチュエータ及びその製造方法 |
JP2008048388A (ja) * | 2006-07-21 | 2008-02-28 | Konica Minolta Opto Inc | 撮像ユニットおよび撮像装置 |
-
2010
- 2010-03-16 TW TW99107653A patent/TWI411064B/zh not_active IP Right Cessation
- 2010-03-16 WO PCT/JP2010/054408 patent/WO2010107016A1/fr active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1062448A (ja) * | 1996-08-14 | 1998-03-06 | Murata Mfg Co Ltd | 外力検出装置 |
JP2007283413A (ja) * | 2006-04-13 | 2007-11-01 | Nippon Signal Co Ltd:The | アクチュエータ及びその製造方法 |
JP2008048388A (ja) * | 2006-07-21 | 2008-02-28 | Konica Minolta Opto Inc | 撮像ユニットおよび撮像装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI745154B (zh) * | 2019-11-07 | 2021-11-01 | 大陸商上海茗富半導體有限公司 | 製造光感測裝置和具有平面內及出平面運動的裝置的方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2010107016A1 (fr) | 2010-09-23 |
TW201110274A (en) | 2011-03-16 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |