CN105607249B - 一种单侧不等高梳齿驱动的微扭转镜 - Google Patents
一种单侧不等高梳齿驱动的微扭转镜 Download PDFInfo
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- CN105607249B CN105607249B CN201510968367.7A CN201510968367A CN105607249B CN 105607249 B CN105607249 B CN 105607249B CN 201510968367 A CN201510968367 A CN 201510968367A CN 105607249 B CN105607249 B CN 105607249B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Recording Or Reproduction (AREA)
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CN201510968367.7A CN105607249B (zh) | 2015-12-21 | 2015-12-21 | 一种单侧不等高梳齿驱动的微扭转镜 |
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CN201510968367.7A CN105607249B (zh) | 2015-12-21 | 2015-12-21 | 一种单侧不等高梳齿驱动的微扭转镜 |
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CN105607249A CN105607249A (zh) | 2016-05-25 |
CN105607249B true CN105607249B (zh) | 2018-06-26 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10266389B2 (en) * | 2017-07-31 | 2019-04-23 | Infineon Technologies Dresden Gmbh | Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device |
CN108061966B (zh) * | 2017-12-11 | 2021-01-19 | 无锡英菲感知技术有限公司 | 一种兼具平动和转动工作模式的微镜 |
CN109581653B (zh) * | 2019-01-25 | 2020-06-26 | 山东大学 | 一种基于突出梳齿的mems驱动器及其工作方法 |
CN110879466A (zh) * | 2019-12-04 | 2020-03-13 | 中国科学院光电技术研究所 | 一种实现低频大角度mems扫描镜的装置 |
CN113031250B (zh) * | 2019-12-09 | 2022-12-30 | 觉芯电子(无锡)有限公司 | 一种具有创新电互连结构的微镜装置及制作方法 |
CN113671690B (zh) * | 2020-05-13 | 2024-06-18 | 安徽中科米微电子技术有限公司 | 一种转轴结构及mems双轴转镜 |
CN113671689B (zh) * | 2020-05-13 | 2024-06-18 | 安徽中科米微电子技术有限公司 | 一种具有大镜面的mems转镜结构 |
CN115784144A (zh) * | 2021-09-10 | 2023-03-14 | 华为技术有限公司 | 微镜芯片封装结构、激光设备以及汽车 |
CN114035253B (zh) * | 2021-11-23 | 2024-06-07 | 西安知微传感技术有限公司 | 具有杂散光消除功能的mems微镜、激光扫描设备和微镜的制作方法 |
CN118414297A (zh) * | 2022-11-30 | 2024-07-30 | 京东方科技集团股份有限公司 | 微机电系统及其制作方法 |
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JP2013078206A (ja) * | 2011-09-30 | 2013-04-25 | Olympus Corp | 櫛歯型アクチュエータ |
CN103376547A (zh) * | 2012-04-19 | 2013-10-30 | 探微科技股份有限公司 | 环状结构及其相关微扫瞄镜 |
CN103744178A (zh) * | 2014-01-02 | 2014-04-23 | 桂林市光隆光电科技有限公司 | 一种可双轴旋转的mems微镜芯片 |
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CN204116713U (zh) * | 2014-10-30 | 2015-01-21 | 桂林市光隆光电科技有限公司 | 静电驱动微机电系统二维扫描微镜 |
CN104297922A (zh) * | 2014-10-30 | 2015-01-21 | 桂林市光隆光电科技有限公司 | 静电驱动微机电系统二维扫描微镜 |
CN104370272A (zh) * | 2014-10-30 | 2015-02-25 | 无锡微奥科技有限公司 | 一种mems自对准高低梳齿及其制造方法 |
CN104765144A (zh) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | 电磁—静电混合驱动二维微扫描镜及制作方法 |
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US7282775B2 (en) * | 2004-02-13 | 2007-10-16 | Advanced Numicro Systems, Inc. | MEMS scanning mirror with trenched surface and tapered comb teeth for reducing intertia and deformation |
US20140126034A1 (en) * | 2012-11-07 | 2014-05-08 | Canon Kabushiki Kaisha | Variable shape mirror and method of manufacturing the same |
TWM505613U (zh) * | 2015-03-23 | 2015-07-21 | Rich Flash Technology Ltd | 記憶卡檢測裝置 |
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2015
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TW505613B (en) * | 2000-05-31 | 2002-10-11 | Univ California | Staggered torsional electrostatic combdrive and method of forming same |
CN1740843A (zh) * | 2004-08-24 | 2006-03-01 | 先进奈米系统公司 | 具有分散铰链和多个支撑附件的微机电系统扫描镜 |
CN1862312A (zh) * | 2005-05-13 | 2006-11-15 | 先进奈米系统公司 | 具有肋条和锥形梳齿的微机电系统(mems)扫描镜的尺寸 |
WO2008122865A2 (en) * | 2007-04-04 | 2008-10-16 | Tiansheng Zhou | Micro-electro-mechanical system micro mirror |
WO2010107016A1 (ja) * | 2009-03-16 | 2010-09-23 | パナソニック電工株式会社 | Memsデバイス |
JP2010283994A (ja) * | 2009-06-04 | 2010-12-16 | Hoya Corp | 静電型アクチュエータ |
CN102841445A (zh) * | 2011-06-22 | 2012-12-26 | 日立视听媒体股份有限公司 | 反射镜装置 |
JP2013078206A (ja) * | 2011-09-30 | 2013-04-25 | Olympus Corp | 櫛歯型アクチュエータ |
CN103376547A (zh) * | 2012-04-19 | 2013-10-30 | 探微科技股份有限公司 | 环状结构及其相关微扫瞄镜 |
CN103809286A (zh) * | 2012-11-07 | 2014-05-21 | 佳能株式会社 | 致动器、可变形镜、使用可变形镜的自适应光学系统和使用自适应光学系统的扫描激光检眼镜 |
CN104101981A (zh) * | 2013-04-11 | 2014-10-15 | 弗兰霍菲尔运输应用研究公司 | 用于偏转电磁辐射的微致动器装置 |
CN103744178A (zh) * | 2014-01-02 | 2014-04-23 | 桂林市光隆光电科技有限公司 | 一种可双轴旋转的mems微镜芯片 |
CN103901227A (zh) * | 2014-04-02 | 2014-07-02 | 清华大学 | 硅微谐振式加速度计 |
CN204116713U (zh) * | 2014-10-30 | 2015-01-21 | 桂林市光隆光电科技有限公司 | 静电驱动微机电系统二维扫描微镜 |
CN104297922A (zh) * | 2014-10-30 | 2015-01-21 | 桂林市光隆光电科技有限公司 | 静电驱动微机电系统二维扫描微镜 |
CN104370272A (zh) * | 2014-10-30 | 2015-02-25 | 无锡微奥科技有限公司 | 一种mems自对准高低梳齿及其制造方法 |
CN104765144A (zh) * | 2015-03-20 | 2015-07-08 | 西北工业大学 | 电磁—静电混合驱动二维微扫描镜及制作方法 |
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Effective date of registration: 20170221 Address after: 710077 Shaanxi science and technology resources center, No. 85, No. 10, Xi'an Road, high tech Zone, Shaanxi, China, B503 Applicant after: Xi'an Micro Sensor Technology Co., Ltd. Address before: 710199 West Road, high tech Zone, Shaanxi, Xi'an, No. 119 Applicant before: Xi'an Leadmems SCI. & TECH. Co., Ltd. |
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Effective date of registration: 20170727 Address after: 710199 West Road, high tech Zone, Shaanxi, Xi'an, No. 119 Applicant after: Xi'an Leadmems SCI. & TECH. Co., Ltd. Address before: 710077 Shaanxi science and technology resources center, No. 85, No. 10, Xi'an Road, high tech Zone, Shaanxi, China, B503 Applicant before: Xi'an Micro Sensor Technology Co., Ltd. |
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