TWI384085B - Reciprocating two-section atmospheric pressure plasma coating system - Google Patents

Description

Reciprocating double-stage jet normal piezoelectric slurry coating system

The present invention relates to a coating system, and more particularly to a reciprocating reciprocating two-stage jet normal piezoelectric slurry coating system that provides cleaning activation and coating.

The constant piezoelectric slurry technology has been widely used on clean substrates. Among various coating technologies, the biggest advantage of the sprayed normal piezoelectric slurry coating technology is that high vacuum equipment is not required, and the production cost can be reduced, which is suitable for various materials. Substrates (such as metal, glass, plastic, wood, textiles and ceramics).

The Republic of China Patent Publication No. 557560 discloses a "method for preparing a copper metallized wafer for wire bonding", and the Republic of China Patent Publication No. I230967 discloses a "removal of a metal-containing polymer material and ion implantation in a normal pressure downstream plasma spraying system. The method of photoresist residue is to clean the surface of the material by using plasma alone. For the application of the common piezoelectric slurry to the surface of the material, the Republic of China Bulletin No. I293338 discloses an "atmospheric plasma jet coating device". However, this patent mainly uses atmospheric plasma jet coating nozzles, and none of the above discloses the cleaning and activation of the surface and the coating coating.

In order to effectively solve the aforementioned related issues, the creator of the present invention developed a reciprocating two-stage jet normal piezoelectric slurry coating system based on the research and development technology and experience accumulated in the field of coating systems in the past.

The invention relates to a reciprocating two-stage jet normal piezoelectric pulp coating system, and the object thereof is to provide a reciprocating cleaning activation and coating film of a workpiece.

In order to achieve the above object, the present invention comprises a casing and at least two plasma spraying devices, wherein the casing is movably assembled internally with a moving carrier carrying a workpiece, and the casing is internally provided with a movable load. a gas flow separator passing through the stage; the two plasma spraying devices are respectively assembled on two sides of the air flow partition in the casing, and the two plasma spraying devices are respectively provided with an air guiding pipe and a normal piezoelectric slurry generator connected to the air guiding pipe And a nozzle connected to the normal piezoelectric slurry generator, the normal piezoelectric slurry generator forms a plasma through the reaction gas introduced by the air guiding tube, and the workpiece is reciprocally displaced with the moving stage relative to the two plasma spraying devices.

By the foregoing further analysis, the following effects can be obtained: the first plasma spraying device of the present invention is used for cleaning a workpiece, activating a surface of the workpiece, maintaining the surface activity of the coating, and densifying the coating structure, the second plasma spraying device It is used to coat the coating on the workpiece. The workpiece is repeatedly moved by the moving stage. On the one hand, the film is coated, on the one hand, the loose deposited atoms are desorbed, and the surface activity of the film is maintained to increase the adsorption and reaction between the grains of the film. Improve film adsorption and microstructure properties.

The present invention has been described with reference to the embodiments and the detailed description of the embodiments of the present invention. Body solution.

Please refer to FIG. 1 and FIG. 2 for the embodiment of the present invention. The present invention includes a casing 10, a first plasma spraying device 20 and a second plasma spraying device 30; There is a through hole 11 in which a pair of moving stages A corresponding to the two through holes 11 are movably assembled, and a through hole 11 of the case 10 guides the workpiece B into the case through the moving stage A. The other through hole 11 of the casing 10 guides the workpiece B away from the casing 10 through the moving stage A. The casing 10 is internally provided with a porous exhaust partition 121 below the moving stage A. A discharge hole 12 is disposed inside the casing 10, and an air flow partition 13 is disposed above the moving stage A. The casing 10 partitions the first space 14 and the second space 15 through the air flow partition 13, the air flow partition 13 A perforation 131 through which the moving stage A passes is provided below.

The first plasma spraying device 20 and the second plasma spraying device 30 are respectively movably assembled in the first space 14 and the second space 14 of the casing 10, so that the first plasma spraying device 20 and the first plasma spraying device 20 The second plasma spraying device 30 is respectively located on the two sides of the air flow partition 13 to block the air flow. The first plasma spraying device 20 and the second plasma spraying device 30 are respectively provided with a communication medium for introducing the reaction gas. Air guiding tubes 21, 31, a normal piezoelectric slurry generator 22, 32 connecting the air guiding tubes 21, 31, and a nozzle 23, 33 connecting the normal piezoelectric slurry generators 22, 32, the air guiding tubes 21, 31 and Normal piezoelectric slurry An adjustment mechanism 24, 34 is further provided between the generators 22, 32.

The normal piezoelectric slurry generators 22, 32 provide energy to dissociate the reaction gas introduced by the air guiding tubes 21, 31 into a plasma under normal pressure, and the nozzles 23, 33 are used for the normal piezoelectric slurry generator 22, The generated plasma is ejected, and the workpiece B is reciprocally displaced with the moving stage A in the casing 10 relative to the first plasma spraying device 20 and the second plasma spraying device 30, so that the plasma is passed from the nozzle 23. And 33 is ejected to the workpiece B, the workpiece B can be cleaned and activated by plasma, and the workpiece B is coated with plasma. The adjusting mechanisms 24 and 34 of the plasma spraying devices 20 and 30 can also be Adjusting the angle and distance between the air guiding tubes 21, 31 and the normal piezoelectric slurry generators 22, 32, thereby changing the angle and distance of the nozzles 23, 33 for discharging the plasma to the workpiece B, the nozzle 23 depending on different needs Change the shape (such as round or flat).

The plasma will return to the gas after use, and the dust generated by the gas and the cleaning process will be discharged outward through the discharge hole 13 of the casing 10, and the discharge hole 13 can be used to obtain the suction lifting gas and the dust through the air suction mechanism or the dust collecting mechanism. The effect of the discharge, the deposition of the film is a series of adsorption involving atoms, the diffusion of adsorbed atoms on the surface, and coalescing at a suitable step or neck junction to form a film. The first plasma spraying device 20 utilizes ions in the plasma. Bombard the surface of the workpiece B and the surface of the coating, so that the loose surface of the surface of the workpiece B and the surface of the coating utilizes the bombardment effect of ions, so that the loose atoms are desorbed to a dense structure, and the activity and cleanliness of the surface of the workpiece B will be affected. Coating adhesion, the higher the cleanliness and activity of the surface of the workpiece B, the deposited atoms It is easier to combine with the surface reaction of the workpiece B, so that the adhesion of the film is better.

It is known that the use of plasma for cleaning not only does not require chemical cleaners and water, does not pollute the environment, does not have mechanical strong grinding to avoid excessive grinding of the workpiece B, and can also be applied to different materials. The workpiece B (such as iron, copper, aluminum, polymer polymerization, etc.) and the workpiece B of different shapes (such as a circular shape, a plate shape, etc.), and the number of the two plasma injection devices 20, 30 is not limited to The aforementioned two increase in demand.

When the workpiece B is in the shape of a plate (refer to FIG. 1), the moving stage A is linearly moved for reciprocating displacement, and the perforation 131 of the air flow partition 13 is provided below for the moving stage A and The workpiece B passes; when the workpiece B is a cylinder (see FIG. 2), the moving stage A is rotated and reciprocated, and the perforation 131 of the air flow partition 13 is disposed in the middle for the movement. The stage A and the workpiece B pass; the workpiece B is introduced through the through hole 11 of the casing 10 through the moving stage A and is led out from the other through hole 12 of the casing 10.

In summary, the "industry availability" of the present invention is obvious, and the feature technology disclosed in the embodiments of the present invention has not been seen in various publications and media, and has not been publicly used, and has an additional effect that cannot be neglected. Therefore, the "novelty" and "progressiveness" of the present invention have been in compliance with patent laws and regulations, and applications for invention patents have been filed according to law, and it is prayed for review and early grant of patents.

However, as described above, it is only a possible embodiment of the present invention, and the embodiment is mainly The present invention is not intended to limit the scope of the invention, and is not intended to limit the scope of the present invention. It is still within the scope of protection covered by the present invention.

10‧‧‧shell

11‧‧‧through hole

12‧‧‧Exhaust hole

121‧‧‧Multiple exhaust diaphragm

13‧‧‧Air baffle

131‧‧‧Perforation

14‧‧‧First space

15‧‧‧Second space

20, 30‧‧‧ Plasma jetting device

21, 31‧‧‧ air duct

22, 32‧‧‧Normal piezoelectric pulp generator

23, 33‧‧‧ nozzle

24, 34‧‧ ‧ adjustment agency

A‧‧‧Mobile stage

B‧‧‧Workpiece

Figure 1 is a schematic plan view of the present invention.

Fig. 2 is a plan view 2 of the present invention.

10. . . case

11. . . Through hole

12. . . Drain hole

121. . . Porous exhaust separator

13. . . Air flow partition

131. . . perforation

14. . . First space

15. . . Second space

20, 30. . . Plasma spray device

21, 31. . . Air duct

22, 32. . . Normal piezoelectric generator

23, 33. . . nozzle

24, 34. . . Adjustment mechanism

A. . . Mobile stage

B. . . Workpiece

Claims (5)

A reciprocating two-stage jet normal piezoelectric slurry coating system comprising: a casing for internally movably assembling a moving stage carrying a workpiece, the casing being internally provided with an air flow for the moving stage a separator; and two plasma spraying devices are assembled in the casing, and the two plasma spraying devices are respectively located on two sides of the air flow partition, and the two plasma spraying devices are respectively provided with a communication gas introduced into the outside to introduce a reaction gas. An air guiding tube, a normal piezoelectric slurry generator connected to the air guiding tube, and a nozzle connected to the normal piezoelectric slurry generator, the normal piezoelectric slurry generator forms a plasma through a reaction gas introduced by the air guiding tube, and the workpiece The moving stage is reciprocally displaced relative to the two plasma spraying devices, and the nozzle is used for ejecting the plasma generated by the normal piezoelectric slurry generator to the workpiece of the housing to repeatedly clean and activate the workpiece Coating. The reciprocating two-stage jet normal piezoelectric slurry coating system according to claim 1, wherein an adjustment mechanism is further disposed between the air guiding tube of the two plasma spraying device and the normal piezoelectric slurry generator. The reciprocating two-stage jet normal piezoelectric slurry coating system according to claim 1, wherein the housing is further provided with at least one through hole, and at least one through hole of the housing provides the moving stage to the workpiece or is exported. The workpiece. The reciprocating two-stage jet normal piezoelectric slurry coating system according to claim 1, wherein the housing is further provided with a discharge hole having a porous exhaust separator. The reciprocating double-stage jet normal piezoelectric slurry coating system according to claim 4, wherein the discharge hole of the casing is further connected to a suction mechanism or a dust collecting mechanism.