TW200734474A - Film-coating device with replaceable coating chamber - Google Patents

Film-coating device with replaceable coating chamber

Info

Publication number
TW200734474A
TW200734474A TW095107803A TW95107803A TW200734474A TW 200734474 A TW200734474 A TW 200734474A TW 095107803 A TW095107803 A TW 095107803A TW 95107803 A TW95107803 A TW 95107803A TW 200734474 A TW200734474 A TW 200734474A
Authority
TW
Taiwan
Prior art keywords
coating
film
chamber
replaceable
coating chamber
Prior art date
Application number
TW095107803A
Other languages
Chinese (zh)
Other versions
TWI312812B (en
Inventor
Chia-Ming Hsu
Original Assignee
Univ Chienkuo Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Chienkuo Technology filed Critical Univ Chienkuo Technology
Priority to TW095107803A priority Critical patent/TW200734474A/en
Publication of TW200734474A publication Critical patent/TW200734474A/en
Application granted granted Critical
Publication of TWI312812B publication Critical patent/TWI312812B/zh

Links

Abstract

A film-coating device with replaceable coating chamber is disclosed, which comprises at least a film-coating chamber for placing a coating member inside the chamber for coating. A connector is employed to integrate the degassing pipes, gas-inlet pipes, control circuits, and cooling pipes for cutting off or connecting the vacuum pump, external gas supply, control system, cooling pipes, and the film-coating chamber.
TW095107803A 2006-03-08 2006-03-08 Film-coating device with replaceable coating chamber TW200734474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095107803A TW200734474A (en) 2006-03-08 2006-03-08 Film-coating device with replaceable coating chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095107803A TW200734474A (en) 2006-03-08 2006-03-08 Film-coating device with replaceable coating chamber

Publications (2)

Publication Number Publication Date
TW200734474A true TW200734474A (en) 2007-09-16
TWI312812B TWI312812B (en) 2009-08-01

Family

ID=45072654

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107803A TW200734474A (en) 2006-03-08 2006-03-08 Film-coating device with replaceable coating chamber

Country Status (1)

Country Link
TW (1) TW200734474A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384085B (en) * 2009-05-07 2013-02-01 Univ Kao Yuan Reciprocating two-section atmospheric pressure plasma coating system
TWI396760B (en) * 2008-06-13 2013-05-21 Hon Hai Prec Ind Co Ltd Automatic coating device
TWI415967B (en) * 2008-11-28 2013-11-21 Hon Hai Prec Ind Co Ltd Holder for holding workpieces to be sputtered and sputtering method using the same
TWI452168B (en) * 2010-06-21 2014-09-11 Hon Hai Prec Ind Co Ltd Plasma coating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI486469B (en) * 2010-04-22 2015-06-01 Hon Hai Prec Ind Co Ltd Coating system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396760B (en) * 2008-06-13 2013-05-21 Hon Hai Prec Ind Co Ltd Automatic coating device
TWI415967B (en) * 2008-11-28 2013-11-21 Hon Hai Prec Ind Co Ltd Holder for holding workpieces to be sputtered and sputtering method using the same
TWI384085B (en) * 2009-05-07 2013-02-01 Univ Kao Yuan Reciprocating two-section atmospheric pressure plasma coating system
TWI452168B (en) * 2010-06-21 2014-09-11 Hon Hai Prec Ind Co Ltd Plasma coating device

Also Published As

Publication number Publication date
TWI312812B (en) 2009-08-01

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