TW200734474A - Film-coating device with replaceable coating chamber - Google Patents
Film-coating device with replaceable coating chamberInfo
- Publication number
- TW200734474A TW200734474A TW095107803A TW95107803A TW200734474A TW 200734474 A TW200734474 A TW 200734474A TW 095107803 A TW095107803 A TW 095107803A TW 95107803 A TW95107803 A TW 95107803A TW 200734474 A TW200734474 A TW 200734474A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- film
- chamber
- replaceable
- coating chamber
- Prior art date
Links
Abstract
A film-coating device with replaceable coating chamber is disclosed, which comprises at least a film-coating chamber for placing a coating member inside the chamber for coating. A connector is employed to integrate the degassing pipes, gas-inlet pipes, control circuits, and cooling pipes for cutting off or connecting the vacuum pump, external gas supply, control system, cooling pipes, and the film-coating chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095107803A TW200734474A (en) | 2006-03-08 | 2006-03-08 | Film-coating device with replaceable coating chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095107803A TW200734474A (en) | 2006-03-08 | 2006-03-08 | Film-coating device with replaceable coating chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200734474A true TW200734474A (en) | 2007-09-16 |
TWI312812B TWI312812B (en) | 2009-08-01 |
Family
ID=45072654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095107803A TW200734474A (en) | 2006-03-08 | 2006-03-08 | Film-coating device with replaceable coating chamber |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200734474A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI384085B (en) * | 2009-05-07 | 2013-02-01 | Univ Kao Yuan | Reciprocating two-section atmospheric pressure plasma coating system |
TWI396760B (en) * | 2008-06-13 | 2013-05-21 | Hon Hai Prec Ind Co Ltd | Automatic coating device |
TWI415967B (en) * | 2008-11-28 | 2013-11-21 | Hon Hai Prec Ind Co Ltd | Holder for holding workpieces to be sputtered and sputtering method using the same |
TWI452168B (en) * | 2010-06-21 | 2014-09-11 | Hon Hai Prec Ind Co Ltd | Plasma coating device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI486469B (en) * | 2010-04-22 | 2015-06-01 | Hon Hai Prec Ind Co Ltd | Coating system |
-
2006
- 2006-03-08 TW TW095107803A patent/TW200734474A/en unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI396760B (en) * | 2008-06-13 | 2013-05-21 | Hon Hai Prec Ind Co Ltd | Automatic coating device |
TWI415967B (en) * | 2008-11-28 | 2013-11-21 | Hon Hai Prec Ind Co Ltd | Holder for holding workpieces to be sputtered and sputtering method using the same |
TWI384085B (en) * | 2009-05-07 | 2013-02-01 | Univ Kao Yuan | Reciprocating two-section atmospheric pressure plasma coating system |
TWI452168B (en) * | 2010-06-21 | 2014-09-11 | Hon Hai Prec Ind Co Ltd | Plasma coating device |
Also Published As
Publication number | Publication date |
---|---|
TWI312812B (en) | 2009-08-01 |
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