TWI415967B - Holder for holding workpieces to be sputtered and sputtering method using the same - Google Patents

Abstract

A holder for holding workpieces to be sputtered includes a plate, a cooling pipe running through the plate, and a plurality of holding elements. The plate includes a carrying surface. The cooling pipe includes a plurality of protrusions. Each holding element is attached to a corresponding protrusion such that the holding element is capable of holding workpieces to be sputtered. The cooling pipes allow a cooling liquid to flow through thereby cooling the workpieces to be sputtered. A sputtering method using the apparatus is also provided.

Description

Coating workpiece carrying device and coating method

The invention relates to the field of coating technology, in particular to a coated workpiece carrying device and a coating method for a sputter coating.

With the development of camera technology, the lens module has been widely used in various types of camera devices. The combination of the lens module and various portable electronic devices such as mobile phones and computers has been favored by many consumers.

The lens module generally includes a lens, a lens holder, a filter, and an image sensor. For the lens design method, please refer to the paper Aspheric Lens Design by Min-Kang Chao and Sheng-Wen Cheng at the IEEE IEEE Ultrasonics Symposium. In order to reduce the degree of electromagnetic interference of the image sensor, it is generally necessary to apply an Electromagnetic Interference (EMI) coating on the surface of the lens holder.

In the prior art, In-Line Sputtering is commonly used to coat components such as a lens barrel and a mirror holder. This continuous sputtering machine has the advantages of high speed, high yield, and good coating quality. However, the continuous sputtering machine is used for carrying the workpiece carrying device of the workpiece to be plated, and the heat dissipation performance of the coated workpiece carrier device is not good, resulting in damage to the workpiece due to excessive temperature and distortion. Moreover, the coating workpiece carrying device and the workpiece to be plated are not well fixed, and the workpiece is slightly deformed during coating, which may cause a large residual stress between the coating layer and the workpiece after cooling, which affects the adhesion of the coating.

In view of this, it provides an effective improvement of coating adhesion and drop It is necessary to coat the workpiece bearing device and the coating method for the distortion of the low-coated workpiece.

A coated workpiece carrying device and a coating method will be described below by way of specific embodiments.

A coated workpiece carrying device includes a chassis, at least one cooling pipe disposed inside the chassis, and a plurality of retaining members, the chassis having a bearing surface, the cooling pipe having a plurality of protruding portions protruding from the bearing surface, each holding member The sleeve is sleeved on the corresponding protrusion for fixing the workpiece to be plated, and the cooling tube is used for cooling fluid to cool the workpiece to be plated.

Providing a workpiece to be plated and the coated workpiece carrying device as above; screwing the workpiece to be plated to the fixing member; sleeve the fixing member that has been screwed to the workpiece to be placed on the protruding portion of the cooling tube; coating the workpiece to be plated; after cooling the coating , remove the coated workpiece.

Compared with the prior art, the coated workpiece carrying device and the coating method of the present technical solution have the following advantages: First, the workpiece to be plated is fixed by screwing with the holding member, and the holding member screwed with the workpiece to be plated can be kept in the coating process. The internal thread of the workpiece is not deformed, and the slight deformation of the workpiece during coating is reduced to reduce the adhesion stress between the coating layer and the workpiece after the coating workpiece is cooled. Secondly, in the coating process, the protruding portion of the cooling device is used to cool and fix the workpiece to be plated fixed to the holding member, and the protruding portion can enhance the heat dissipation effect of the coated workpiece, thereby avoiding deformation and deformation caused by excessive local temperature during the coating of the workpiece.

The coated workpiece carrying device of the present technical solution will be further described in detail below with reference to the accompanying drawings.

Referring to FIG. 1 and FIG. 2 , the coated workpiece carrying device 100 provided by the embodiment of the present invention includes a chassis 10 , at least one cooling tube 20 and a plurality of holding members 30 extending through the inside of the chassis 10 . The cooling pipe 20 is fixed to the chassis 10, and the holding member 30 is disposed on the cooling pipe 20. The holding member 30 is used for fixing the workpiece to be plated to coat the workpiece to be plated.

The chassis 10 is a rectangular flat plate structure having a first surface 12, a second surface 14, and a first side 16 and a second side 18 connected between the first surface 12 and the second surface 14. The first surface 12 is parallel to the second surface 14, wherein the first surface 12 is a bearing surface. The first side 16 and the second side 18 are also parallel to each other. In this embodiment, the chassis 10 has a plurality of receiving holes 102. Each of the receiving holes 102 includes a horizontal receiving portion 104 and a plurality of vertical receiving portions 106 communicating with the horizontal receiving portion 104. The horizontal receiving portion 104 penetrates the first side surface 16 and the second side surface 18. The plurality of vertical receiving portions 106 penetrate from the horizontal receiving portion 104 to the first surface 12.

In the present embodiment, the coated workpiece carrier device 100 has a plurality of cooling tubes 20 disposed in parallel with each other. The cooling tube 20 has a first cooling portion 22 and a protruding portion 24 that are connected. The projection 22 of the cooling tube 20 protrudes from the first surface 12 of the chassis 10, i.e., protrudes from the bearing surface. The first cooling unit 22 is bored in the horizontal housing portion 104 of the chassis 10 and is fixed to the chassis 10 . The protruding portion 24 is formed by bending the cooling tube 20 , and the protruding portion 24 is received and fixed in the vertical receiving portion 106 . The protruding portion 24 is from the vertical receiving portion 106 to the bearing surface of the chassis 10 Prominent. The first cooling portion 22 extends through the first side surface 16 and the second side surface 18. One end of the first cooling portion 22 is a cooling fluid inlet, and the other end is a cooling fluid outlet, so that cooling fluid can flow from one end of the first cooling portion 22 and flow out from the other end of the first cooling portion 22 for cooling. The fluid is cyclically updated in the cooling device 20. Generally, the cooling fluid can be pure water, ammonia water, methanol, acetone, heptane or a mixed liquid thereof.

The holder 30 has a sleeve hole 32 and an external thread 34. In this embodiment, the holding member 30 is approximately a cylindrical sleeve. The sleeve hole 32 of the holding member 30 is opened along the central axis of the holding member 30, which is a circular hole. The sleeve hole 32 has a size corresponding to the protrusion 24, so that the holder 30 can be sleeved and fixed to the protrusion 24 by the sleeve hole 32. The external thread 34 of the holding member 30 is disposed on the outer surface of the holding member 30, and cooperates with the workpiece to be plated for screwing with the workpiece to be plated to fix the workpiece to be plated. Of course, the holding member 30 can also have no external thread, as long as it is tightly fixed with the workpiece to be plated, the excessive deformation of the workpiece to be plated can be avoided.

Referring to FIG. 3, the technical solution further provides a coating method for coating a workpiece to be plated by using the above-mentioned coated workpiece carrier device 100. The following steps are taken as an example of a coating to be plated as a workpiece to be plated:

In a first step, a workpiece to be plated and a coated workpiece carrier 100 as described above are provided.

The workpiece to be plated is a lens holder 200 having an internal thread 210 for screwing the lens barrel, and an outer surface 220 thereof is plated with an anti-electromagnetic interference coating.

In the second step, the workpiece to be plated is screwed to the fixing member 30.

The mirror base 200 is opposite to the fixing member 30. Since the thread 34 of the holder 30 and the internal thread 210 of the lens holder 200 can cooperate with each other, the lens holder 200 can be matched. It can be screwed to the fixing member 30 and fixed to the fixing member 30.

In the third step, the fixing member 30 that has been screwed to the workpiece to be plated is sleeved on the protruding portion 24 of the cooling tube 20.

The sleeve hole 32 of the fixing member 30 is opposed to the protruding portion 24. Since the sleeve hole 32 is equivalent to the protruding portion 24, the fixing member 30 of the screwing mirror holder 200 can be sleeved and fixed to the protruding portion 24 of the cooling tube 20.

The fourth step is to coat the plated workpiece.

The outer surface 220 of the lens holder 200 is plated with an anti-electromagnetic interference coating which can be plated by vacuum sputtering.

In the fifth step, after the coating is cooled, the coated workpiece is removed.

After the coating of the lens holder 200 is cooled, the fixing member 30 is removed, and the lens holder 200 is unscrewed, that is, the coating treatment of the lens holder 200 is completed.

Compared with the prior art, the coated workpiece carrying device and the coating method of the present technical solution have the following advantages: First, the workpiece to be plated is fixed by screwing with the holding member, and the holding member screwed with the workpiece to be plated can be kept in the coating process. The internal thread of the workpiece is not deformed, and the slight deformation of the workpiece during coating is reduced to reduce the adhesion stress between the coating layer and the workpiece after the coating workpiece is cooled. Secondly, in the coating process, the protruding portion of the cooling device is used to cool and fix the workpiece to be plated fixed to the holding member, and the protruding portion can enhance the heat dissipation effect of the coated workpiece, thereby avoiding deformation and deformation caused by excessive local temperature during the coating of the workpiece.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Familiar with the case Equivalent modifications or variations made by those skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

Coated workpiece carrier ‧‧100

Chassis ‧ ‧ 10

Cooling pipe ‧‧20

Fixings ‧ ‧ 30

First surface ‧‧12

Second surface ‧‧14

First side ‧‧16

Second side ‧‧18

Receiving hole ‧‧‧102

Horizontal containment department ‧‧104

Vertical containment department ‧‧106

First Cooling Department ‧‧22

Prominence ‧‧24

Set of holes ‧‧32

External thread ‧‧34

Mirror holder ‧‧200

Internal thread ‧ ‧ ‧

Outer surface ‧‧‧220

1 is a schematic view of a coated workpiece carrying device provided by an embodiment of the present technical solution.

Figure 2 is a cross-sectional view taken along line II-II of Figure 1.

FIG. 3 is a schematic view showing coating of a workpiece to be plated by using a coated workpiece carrier device of the present technical solution.

Coated workpiece carrier ‧‧100

Chassis ‧ ‧ 10

Cooling pipe ‧‧20

Fixings ‧ ‧ 30

First surface ‧‧12

Second surface ‧‧14

First side ‧‧16

Second side ‧‧18

Set of holes ‧‧32

External thread ‧‧34

Claims (9)

A coated workpiece carrying device includes a chassis, at least one cooling pipe disposed inside the chassis, and a plurality of retaining members, the chassis having a bearing surface, the cooling pipe having a plurality of protruding portions protruding from the bearing surface, each holding member The sleeve is sleeved on the corresponding protrusion for fixing the workpiece to be plated, and the cooling tube is used for cooling fluid to cool the workpiece to be plated. The coated workpiece carrying device of claim 1, wherein the coated workpiece carrying device comprises a plurality of cooling tubes disposed in parallel with each other. The coated workpiece carrying device of claim 1, wherein the protruding portion is formed by bending a cooling tube. The coated workpiece carrying device of claim 1, wherein the chassis has a first side and a second side that are opposite to each other, the cooling tube has a first cooling portion that communicates with the protrusion, and the first cooling portion runs through To the first side and the second side. The coated workpiece carrying device according to claim 1, wherein the holding member has a sleeve hole and an external thread, and the holding member is sleeved on the protruding portion by the sleeve hole, and the external thread of the holding member is used for the workpiece to be plated. Screw together. The coated workpiece carrier device of claim 1, wherein the cooling tube has a cooling fluid, which is pure water, ammonia water, methanol, acetone, heptane or a mixed liquid thereof. A coating method comprising the steps of: providing a workpiece to be plated and a coated workpiece carrying device as described in claim 1; and screwing the workpiece to be plated to the fixing member; The fixing member that has been screwed to the workpiece to be plated is sleeved on the protruding portion of the cooling tube; the workpiece to be plated is coated; after the coating is cooled, the coated workpiece is removed. The coating method according to the seventh aspect of the invention, wherein the coating element is coated by vacuum sputtering. The coating method according to claim 7, wherein the plating film is a metal plating film.