TWI574346B - Composite cold plate for glass substrate cooling - Google Patents

Description

Composite cold plate for glass substrate cooling

The invention relates to a composite cold plate for cooling a glass substrate, which is attached with a composite layer on a cold plate for placing a glass substrate for cooling. The composite layer is light and easy to replace, and does not need to be cold. The board is removed and replaced to save replacement costs.

According to the glass substrate, the main processing material of the liquid crystal display device (TFT-LCD) is commonly known as mother glass or plain glass. It is a high-precision and transparent electronic component. The glass plays a role in the liquid crystal display device (TFT-LCD) industry. The role is like a wafer in the semiconductor industry, so the liquid crystal display device (TFT-LCD) industry has almost perfect requirements for the precision of the surface of the glass substrate.

Secondly, the process of the liquid crystal display device (TFT-LCD) is to use two alkali-free glass substrates to form a color filter and an IC circuit on the surface of the alkali-free glass substrate, and dry-etch the surface of the glass substrate to red, The blue and green primary colors and black are placed on the glass surface in a fine structure to form a color filter. The IC driver circuit uses a semiconductor process, and the CMOS circuit is placed on the glass surface. The function of the glass substrate is used as a color filter. The substrate and the IC driver circuit carrier material, and the liquid crystal display device (TFT-LCD) process requires vacuum evaporation and etching, so the glass substrate must be able to withstand the strong acid and alkali corrosion, high temperature process environment, and must be very precise Surface flatness and flatness.

Therefore, each process of the glass substrate in the manufacturing process is very fine, wherein the glass substrate is a relatively precise electronic component, and the glass substrate is absolutely not allowed to be damaged or scratched. Once the glass substrate is scratched, it will be affected. The quality of the glass substrate, so in the baking and cooling process of the glass substrate, the glass substrate needs to be moved from the hot plate to the cold plate, and the surface of the hot plate and the cold plate must be smooth and wear-free, so as not to damage the glass substrate, but cold After the plate is used for a long time, the surface will gradually cause wear or unevenness. If the loss of the cold plate is continued, the defective rate of the glass substrate is easily caused. At this time, the cold plate is completely replaced to maintain the quality of the glass substrate. However, the cold plate replacement procedure is rather cumbersome because the water pipeline connection at the bottom of the cold plate is complicated, re-assembly is time consuming and laborious, and the cost of replacing the entire set of cold plates is extremely high, and the economic efficiency is not good.

In view of the above-mentioned shortcomings, the inventors have specially developed a composite layer for a cold plate, as long as it is attached to a cold plate and then directly replaced at the time of wear, it is not necessary to eliminate the entire set of cold plates, thereby saving a large amount. The cold plate replacement cost, and does not affect the water pipeline at the bottom of the cold plate at all, is an ideal composite cold plate structure.

The invention relates to a composite cold plate for cooling a glass substrate, in particular to a heat dissipation cold plate used in a liquid crystal display device (LCD) process, which is provided with a composite layer on a cold plate, when worn out It can be replaced without replacing the entire set of cold plates, which can reduce the replacement cost of the equipment. The main structure is composed of a cold plate and a composite layer. The cold plate is made of metal and can be easily dissipated. A water line is arranged at the bottom of the cold plate for heat dissipation, and a groove is formed above the cold plate to thereby form a composite layer. It is attached to the groove so as to be flush with the cold plate for placing the glass substrate, and the composite layer is formed by a film or a surface coating, which is light and thin, and is quick and easy to assemble, and can be easily assembled or pasted. Covering the cold plate, it not only does not affect the water pipeline inside the cold plate, but can be directly replaced at the time of loss, and is an ideal composite layer for cold plates.

When assembling, the composite layer is assembled on the groove of the cold plate so that it can be flush with the cold plate, and the glass substrate can be conveniently placed. The glass substrate is a fine electronic part, and the glass substrate is heated and During the cooling process, slight scratches or abrasions are not allowed. Therefore, when the surface of the composite layer is worn or uneven, it must be replaced so as not to affect the quality of the glass substrate, and the composite layer is light and thin, and is disassembled. It is quite simple and can improve the replacement efficiency of the composite layer.

When the cold plate is used for a long time, it will often cause the surface of the composite layer to be worn out or uneven. If the use of the cold plate will affect the conductivity of the glass substrate, the traditional cold plate will be eliminated in the whole group, and then a new set of cold will be reinstalled. Board, because complex water pipelines are involved in the cold plate, each reassembly project is not only time-consuming and laborious, but also the downtime affects the production efficiency of the glass substrate. The feature of the present invention is mainly to remove the composite layer, and then By re-adhesing the new composite layer, the cold plate can be used continuously, and the water pipeline in the cold plate can be completely eliminated, and the expensive cost of replacing the entire set of cold plates can be saved, which is an improved structure that breaks through the traditional practice.

〔this invention〕

11‧‧‧ cold plate

111‧‧‧Water pipeline

12‧‧‧Composite layer

121‧‧‧Composite layer

2‧‧‧ glass substrate

Figure 1 is an exploded view of the present invention.

Figure 2 is a schematic representation of the use of the invention.

Figure 3 is a perspective exploded view of the present invention.

Figure 4 is a schematic view of another embodiment of the present invention.

Figure 5 is a diagram showing another embodiment of the composite layer of the present invention.

First, please refer to FIG. 1 , which is an exploded view of the present invention, which is mainly composed of a cold plate 11 and a composite layer 12 , which is made of a metal material and can be easily dissipated, and is located at the bottom of the cold plate 11 . The water pipeline 111 is configured to dissipate heat from the cold plate 11, and a groove 112 is formed on the cold plate 11 to cover the composite layer 12 on the groove 112 so as to be flush with the cold plate 11 for placing the glass substrate. The composite layer 12 is formed by a film or a surface coating film, and the type thereof is light and thin, and the assembly is quick and simple, and can be easily assembled or attached to the cold plate 11 without affecting the water pipeline inside the cold plate 11 at all. The cold plate 11 mainly functions to cool the glass substrate, and then the cooling operation must be performed. At this time, the glass substrate is placed on the cold plate 11 to cool the glass substrate.

When assembling, please still refer to FIG. 1 , the composite layer 12 is assembled on the groove 112 of the cold plate 11 so that it can be flush with the cold plate 11 , and the glass substrate 2 can be conveniently placed (such as the second As shown in the figure, the glass substrate is a fine electronic component, and during the heating and cooling process of the glass substrate 2, slight scratches or abrasions are not allowed, so when the surface of the composite layer 12 is worn or uneven, It must be replaced so as not to affect the quality of the glass substrate 2, and the composite layer 12 is light and thin and has a sheet shape, which is quite easy to disassemble and can improve the replacement efficiency of the composite layer 12.

Then, please continue to refer to Figure 2, when the cold plate 11 is used for a long time, it will often cause the surface of the composite layer 12 to be worn or uneven. If the use of the cold plate 11 will affect the quality of the glass substrate 2, the conventional cold plate is The group is eliminated, and then a new set of cold plates is reinstalled, but the complex water pipeline is involved in the cold plate 11, and each reassembly project is not only time-consuming and laborious, but also the downtime affects the production efficiency of the glass substrate. However, the feature of the present invention is mainly that the composite layer 12 is removed, and then the new composite layer 12 is re-adhered, so that the cold plate 11 can be continuously used, and the water pipeline in the cold plate 11 can be completely changed, and the entire group can be saved. Cold plate 1 The expensive cost of 1 is an improved structure that breaks through the traditional practice.

In addition, please refer to FIG. 3 again, and as shown in FIG. 4, the composite layer 12 can be directly attached to the cold plate 11, which is a smooth surface, so that the composite layer 12 is formed on the surface of the cold plate 11, when The glass substrate 2 is placed on the composite layer 12 of the cold plate 11, so that the glass substrate 2 can be prevented from being electrically conductive, and when the composite layer 12 is worn out, the composite layer 12 is torn apart and the new composite layer 12 is replaced. The entire set of cold plates 11 can continue to be used.

In addition, in order to improve the replacement efficiency of the composite layer 12, please refer to FIG. 5 again, the composite layer 12 is assembled by surface treatment (for example, coating) so that it can be attached to the cold plate 11 to form a surface. The processed composite layer 121 is not only quick to assemble, but also quite convenient when it is replaced.

In summary, the present invention is to provide a composite layer on the cold plate. When the composite layer is worn out for a long time, it can be directly replaced, and the water pipeline of the cold plate needs to be replaced, and the composite layer can be easily cooled. The board is combined and can extend the service life of the cold plate. The economic benefit is excellent, and it has already met the patent requirements of the invention, and the patent application is filed according to law.

11‧‧‧ cold plate

111‧‧‧Water pipeline

112‧‧‧ Groove

12‧‧‧Composite layer

Claims (1)

The utility model relates to a composite cold plate for cooling a glass substrate, which is mainly composed of a cold plate and a composite layer. The cold plate is made of a metal material and can be easily dissipated, and a water pipeline is arranged at the bottom of the cold plate for heat dissipation of the cold plate. The utility model is characterized in that: a groove is formed on the cold plate, so that the composite layer is attached to the groove to be flush with the cold plate, and the composite layer is formed into a film or surface plated on the surface of the cold plate, which can be easily assembled. Or attached to the cold plate for the replacement of the composite layer.