TW201529511A - Treatment of a surface modification layer for controlled bonding of thin sheets with carriers - Google Patents

Treatment of a surface modification layer for controlled bonding of thin sheets with carriers Download PDF

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Publication number
TW201529511A
TW201529511A TW104102739A TW104102739A TW201529511A TW 201529511 A TW201529511 A TW 201529511A TW 104102739 A TW104102739 A TW 104102739A TW 104102739 A TW104102739 A TW 104102739A TW 201529511 A TW201529511 A TW 201529511A
Authority
TW
Taiwan
Prior art keywords
carrier
sheet
glass
energy
gas
Prior art date
Application number
TW104102739A
Other languages
Chinese (zh)
Inventor
Robert Alan Bellman
Dana Craig Bookbinder
Theresa Chang
Shiwen Liu
Robert George Manley
Prantik Mazumder
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US201461931912P priority Critical
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW201529511A publication Critical patent/TW201529511A/en

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