TWI383103B - 密封件 - Google Patents
密封件 Download PDFInfo
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- TWI383103B TWI383103B TW096105939A TW96105939A TWI383103B TW I383103 B TWI383103 B TW I383103B TW 096105939 A TW096105939 A TW 096105939A TW 96105939 A TW96105939 A TW 96105939A TW I383103 B TWI383103 B TW I383103B
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- Prior art keywords
- seal
- elastomer
- annular body
- perfluorinated
- fkm
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
- F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
- F16J15/3212—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings with metal springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
- Glass Compositions (AREA)
- Sealing Material Composition (AREA)
- Compressor (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
本發明係關於一種密封件。該密封件可特定(但非排他性)地用於真空泵中。
吾人已知如下真空泵:其增壓室中無油,且因此可用於諸如半導體工業中所發現之彼等清潔環境中。該等乾式真空泵通常為多級正排量泵,其在各泵級中採用相互嚙合之轉子。該等轉子在各級中可具有相同類型剖面,或剖面可逐級變化。
在魯氏(Roots)或Northey("爪")類型乾式真空泵中,定子通常係自多個分離定子組件形成,且該等轉子位於界定於該等定子組件之間的增壓室中。因此有必要在該等定子組件之間提供密封,以防止泵抽液體自該泵洩漏且防止周圍空氣進入泵中。通常提供一o形環密封件來執行此密封功能。
乾式真空泵經常用於需要其泵抽實質量腐蝕液(包括鹵素氣體及溶劑)之應用中。該等物質侵蝕o形環密封件,導致該等密封件可能變得過於塑性或非常脆,其可能嚴重影響提供於該等定子組件之間的密封件的完整性。該密封件上的侵蝕強度視多個變數而定,包括(例如)泵抽液體、o形環材料及泵溫度。舉例而言,諸如Viton或Tecnoflon之FKM彈性體(或氟基彈性體)所形成之密封件在(例如)超過140℃之溫度下泵抽氟氣時尤其易於受到侵蝕。用於惡劣泵抽環境中之現行替代密封件係自諸如Kalrez或Chemraz之FFKM彈性體(或全氟化彈性體)形成,但此等彈性體較Viton顯著更昂貴。此外,較之FKM彈性體,FFKM彈性體具有相對高的壓縮形變,亦即,對於一固定時段,在承受一標準壓縮負載之後,無法恢復至其原始厚度之物質量相對較高。
至少本發明之較佳實施例之一目標在於試圖解決此問題。
在一第一態樣中,本發明提供一種密封件,其包含一柔性環狀體、一嵌埋於該環狀體內之環狀增強構件及一FFKM彈性體塗層。
嵌埋於該環狀體內之該增強構件的存在可使該密封件能夠具有非常低的壓縮形變。該增強構件較佳為抗壓縮形變,且因此該密封件可隨時間保持一高密封應力。FFKM彈性體(或全氟化彈性體)塗層可使該密封件能夠具有相對高的耐蝕性以及良好密閉性及低氣體滲透性。較之完全由FKM彈性體環狀體形成之密封件,僅使用FFKM彈性體(相對昂貴)層可顯著降低成本。
在一較佳實施例中,該環狀體係自FKM彈性體或氟基彈性體形成,且因此在一第二態樣中,本發明提供一種密封件,其包含一FKM彈性體環狀體、一嵌埋於該環狀體內之環狀增強構件及一FFKM彈性體塗層。
該FKM彈性體可包含可購自DuPont,Ausimont,Daikin之氟基彈性體(包括Viton類型A、Viton類型B、Viton類型F及VitonExtreme材料中之任一者)及可購自Asahi Glass Ltd之Aflas氟基彈性體中之一者。
該柔性體可包含選自包含碳、氟化鈣、二氧化矽、硫酸鋇及氧化鈦之群中的填充材料。
該FFKM彈性體可包含可購自DuPont之Kalrez全氟化彈性體、可購自Greene,Tweed & Co,Inc.之Chemraz全氟化彈性體、ParofluorTM
全氟化彈性體、HifluorTM
全氟化彈性體(二者皆可購自Parker Hannifin Corp.)、可購自Freudenberg Simrit LP之Simriz全氟化彈性體及可購自Busak and Shamban(Trelleborg)之Isolast全氟化彈性體中之一者。該塗層較佳具有處於0.1 mm至0.3 mm範圍內之厚度。
該FFKM彈性體可由另一具有較形成該環狀體之FKM彈性體高的耐蝕性的FKM彈性體替換。因此,在本發明之第三態樣中提供一種密封件,其包含一第一FKM彈性體環狀體、一嵌埋於該環狀體內之環狀增強構件及一第二FKM彈性體塗層,該第二FKM彈性體具有較該第一FKM彈性體高之耐蝕性。
另一替代方法係該環狀體可由與該塗層相同之材料形成。本發明亦提供一種密封件,其包含一柔性環狀體(較佳由FKM彈性體形成)、一嵌埋於該環狀體內之環狀增強構件及一FKM彈性體塗層。
在上述任一態樣中,該增強構件較佳包含金屬線圈及穿孔金屬或塑膠管中之一者。用於該增強構件之替代形式包括編織金屬線、編織石墨線及撓性石墨管狀構件。
作為FKM或FFKM之塗層之彈性體係真空相容的,該密封件可在真空泵中找到特定用途。因此,在另一態樣中,本發明提供一種真空泵,其包含兩個定子組件及一密封件,該密封件係如之前所提及位於該等組件之間,以使得各組件與該密封件接觸從而提供一位於該等組件之間的液密密封件。
圖1說明來自典型多級乾式泵之泵級的定子組件12之表面10。泵裝配期間,第二定子組件(參看圖2)之相應表面14開始接觸該組件12之表面10以在該等定子組件之間形成一空穴16。提供此空穴16以容納該泵之轉子組件(未圖示)。具有魯氏及/或Northey("爪")類型轉子之乾式泵通常包含若干個如此之級,各級之空穴16經由一端口18與相鄰下游級溝通。
如同在習知此類型泵中,圍繞該空穴16之周邊提供一密封件20,以在該等相鄰定子組件之表面10、14之間提供一液密密封件,使得使用該泵時防止製程流體自該空穴16溢出且防止周圍空氣進入該空穴16中。
圖2說明一根據本發明之密封件20之實例。該密封件20係位於一形成於該等定子組件中之一者表面中的凹槽22內。該密封件20包含一柔性環狀體24、一嵌埋於該環狀體24內之環狀增強構件26及一FFKM彈性體塗層28,例如,Kalrez全氟化彈性體、Chemraz全氟化彈性體、ParofluorTM
全氟化彈性體、HifluorTM
全氟化彈性體、Simriz全氟化彈性體、Isolast全氟化彈性體及Perlast全氟化彈性體中之一者。
該環狀體24可由適於該密封件欲使用之環境的任何材料形成。為用於相對高的溫度下,可藉由自可熔融處理之氟塑膠材料形成該環狀體而提供熱穩定性,該氟塑膠材材料係諸如氟化乙烯丙烯(FEP)、全氟烷氧基(PFA)、聚氯三氟乙烯(CTFE)、聚偏二氟乙烯(PVDF)及聚氟乙烯(PVF)。為用於相對低的溫度下,可藉由自FKM彈性體形成該環狀體而提供熱穩定性。該FKM彈性體可包含可購自DuPont,Ausimont,Daikin之氟基彈性體(包括Viton類型A、Viton類型B、Viton類型F及VitonExtreme材料中之任一者)及可購自Asahi Glass Ltd之Aflas氟基彈性體中之一者。選自包含碳、氟化鈣、二氧化矽、硫酸鋇及氧化鈦之群中的填充材料可分散於該環狀體24內。
在圖2及圖3中所說明之實例中,該環狀增強構件26係由一抗壓縮形變線圈26提供。該線圈26較佳由金屬材料形成,諸如不銹鋼。在圖4及圖5中所說明之實例中,該環狀增強構件係由一穿孔金屬或塑膠管26提供。使用熟習該項技術者已知之技術,該環狀體24係經由壓縮或射出成形形成於該增強構件26上。
該FFKM彈性體塗層28較佳具有處於0.1 mm至0.3 mm之範圍內的厚度,最佳為約0.2 mm。經由傳遞模塑或其類似技術以該FFKM彈性體來塗佈該環狀體24。
在另一實施例中,該環狀體24可自Viton類型A氟基彈性體製成,而該塗層28可自VitonExtreme氟基彈性體製成,VitonExtreme氟基彈性體具有較Viton類型A氟基彈性體高的耐蝕性,且較使用FFKM彈性體便宜。該密封件將適用於不太惡劣之環境中,在該環境中使用FFKM彈性體塗層28被認為係不必要的。在又一實施例中,該塗層28可由與該環狀體24相同之材料形成。
10...表面
12...定子組件
14...表面
16...空穴
18...端口
20...密封件
22...凹槽
24...環狀體
26...環狀增強構件
28...塗層
圖1為真空泵之定子組件的正視圖;圖2為圖1中密封件之側視橫截面圖;圖3為用於圖2之密封件之插入件之一實例的透視圖;圖4為適用於真空泵中之另一密封件之側視橫截面圖;圖5為用於圖4之密封件之插入件之一實例的透視圖。
10...表面
14...表面
22...凹槽
24...環狀體
26...環狀增強構件
28...塗層
Claims (10)
- 一種真空泵O形環密封件,其包含一柔性環狀體、一嵌埋於該環狀體內之環狀增強構件及FKM彈性體與FFKM彈性體中之一者之塗層。
- 如請求項1之密封件,其中該環狀體包含可熔融處理之氟塑膠。
- 如請求項1之密封件,其中該環狀體包含FKM彈性體。
- 一種真空泵O形環密封件,其包含:一包含FKM彈性體之環狀體、一嵌埋於該環狀體內之環狀增強構件,及FFKM彈性體與第二FKM彈性體中之一者之塗層,該第二FKM彈性體具有較該首先提及之FKM彈性體高之耐蝕性。
- 如請求項3或4之密封件,其中該環狀體之該FKM彈性體包含Viton® 類型氟基彈性體及Aflas® 氟基彈性體中之一者。
- 如請求項1至4中任一項之密封件,其中該柔性體包含選自包含碳、氟化鈣、二氧化矽、硫酸鋇及氧化鈦之群中的填充材料。
- 如請求項1至4中任一項之密封件,其中該FFKM彈性體包含Kalrez® 全氟化彈性體、Chemraz® 全氟化彈性體、ParofluorTM 全氟化彈性體、HifluorTM 全氟化彈性體、Simriz® 全氟化彈性體、Isolast® 全氟化彈性體及Perlast® 全氟化彈性體中之一者。
- 如請求項1至4中任一項之密封件,其中該增強構件包含 一金屬線圈。
- 如請求項1至4中任一項之密封件,其中該增強構件包含一穿孔金屬或塑膠管。
- 一種真空泵,其包含兩個定子組件及一如請求項1至4中任一項之密封件,該密封件係位於該等組件之間,使得各組件與該密封件接觸以提供一位於該等組件之間的液密密封件。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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GBGB0603318.7A GB0603318D0 (en) | 2006-02-20 | 2006-02-20 | Seal |
Publications (2)
Publication Number | Publication Date |
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TW200804701A TW200804701A (en) | 2008-01-16 |
TWI383103B true TWI383103B (zh) | 2013-01-21 |
Family
ID=36142104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW096105939A TWI383103B (zh) | 2006-02-20 | 2007-02-16 | 密封件 |
Country Status (10)
Country | Link |
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US (1) | US20100232999A1 (zh) |
EP (1) | EP1987273B1 (zh) |
JP (1) | JP2009527712A (zh) |
KR (1) | KR20080097428A (zh) |
CN (1) | CN101384844B (zh) |
AT (1) | ATE555334T1 (zh) |
GB (1) | GB0603318D0 (zh) |
TW (1) | TWI383103B (zh) |
WO (1) | WO2007096664A1 (zh) |
ZA (1) | ZA200806948B (zh) |
Families Citing this family (11)
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GB0712779D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Seal |
JP5544907B2 (ja) * | 2010-02-04 | 2014-07-09 | 東京エレクトロン株式会社 | ガスシャワー用の構造体及び基板処理装置 |
US20110204545A1 (en) | 2010-02-25 | 2011-08-25 | Tanner Douglas E | Method of making high performance seals |
DE102011078639A1 (de) * | 2011-07-05 | 2013-01-10 | Siemens Aktiengesellschaft | Befehls- und Meldevorrichtung |
DE102011078638A1 (de) * | 2011-07-05 | 2013-01-10 | Siemens Aktiengesellschaft | Befehls- und Meldevorrichtung |
EP3026303B1 (de) * | 2014-11-28 | 2021-01-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung |
US11085564B2 (en) | 2015-11-11 | 2021-08-10 | Greene, Tweed Technologies, Inc. | Sealing rings and sealing ring assemblies for high temperature end applications |
EP3318763B1 (de) * | 2016-11-04 | 2020-07-01 | Pfeiffer Vacuum Gmbh | Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe |
WO2019183160A1 (en) * | 2018-03-21 | 2019-09-26 | Schlumberger Technology Corporation | High performance fluoroelastomer bonded seal for downhole applications |
CN112253750A (zh) * | 2020-10-21 | 2021-01-22 | 中国航发沈阳发动机研究所 | 一种柔性石墨编织密封条及其安装方法 |
US20230089463A1 (en) * | 2021-09-22 | 2023-03-23 | Hamilton Sundstrand Corporation | High temperature fuel seals and methods of making thereof |
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- 2007-02-14 AT AT07705376T patent/ATE555334T1/de active
- 2007-02-14 EP EP07705376A patent/EP1987273B1/en not_active Not-in-force
- 2007-02-14 JP JP2008555881A patent/JP2009527712A/ja active Pending
- 2007-02-14 KR KR1020087020250A patent/KR20080097428A/ko not_active Application Discontinuation
- 2007-02-14 CN CN2007800059268A patent/CN101384844B/zh not_active Expired - Fee Related
- 2007-02-14 US US12/223,848 patent/US20100232999A1/en not_active Abandoned
- 2007-02-16 TW TW096105939A patent/TWI383103B/zh not_active IP Right Cessation
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2008
- 2008-08-12 ZA ZA200806948A patent/ZA200806948B/xx unknown
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Also Published As
Publication number | Publication date |
---|---|
JP2009527712A (ja) | 2009-07-30 |
ZA200806948B (en) | 2009-06-24 |
TW200804701A (en) | 2008-01-16 |
US20100232999A1 (en) | 2010-09-16 |
WO2007096664A1 (en) | 2007-08-30 |
CN101384844B (zh) | 2011-11-23 |
KR20080097428A (ko) | 2008-11-05 |
CN101384844A (zh) | 2009-03-11 |
ATE555334T1 (de) | 2012-05-15 |
EP1987273A1 (en) | 2008-11-05 |
GB0603318D0 (en) | 2006-03-29 |
EP1987273B1 (en) | 2012-04-25 |
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