CN101384844A - 密封件 - Google Patents
密封件 Download PDFInfo
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- CN101384844A CN101384844A CNA2007800059268A CN200780005926A CN101384844A CN 101384844 A CN101384844 A CN 101384844A CN A2007800059268 A CNA2007800059268 A CN A2007800059268A CN 200780005926 A CN200780005926 A CN 200780005926A CN 101384844 A CN101384844 A CN 101384844A
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- elastomer
- sealing
- perfluoroelastomer
- annular solid
- fkm
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
- F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
- F16J15/3212—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings with metal springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
- Sealing Material Composition (AREA)
- Glass Compositions (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Compressor (AREA)
Abstract
真空泵包括两个定子元件(10,14)和位于上述元件之间的密封件(20)来在这些元件之间提供流体紧密密封。在一个实施例中,该密封件包括顺从环形体(24),嵌入该环形体的环形加强件(26),及FFKM弹性体的涂层(28)。
Description
技术领域
本发明涉及密封件。该密封件在真空泵中获得特殊但不专用的用途。
背景技术
真空泵被认为在其泵腔内无油并因而在洁净制造环境如半导体行业中是有用的。这些干式真空泵一般是在每个泵级中采用相互互啮合转子的多级容积式泵。这些转子可以在每级中有相同的型线或者其型线可以在级与级之间变化。
在罗茨或Northey(“爪型”)型干式真空泵中,该定子基本上由许多单独的定子元件构成,这些转子位于在这些定子元件之间所限定的泵腔中。因此有必要在这些定子元件之间提供密封以阻止泵送流体从该泵中泄露并阻止周围的空气进入该泵。通常提供O形环密封件来执行这种密封功能。
干式真空泵经常配置在需要它们泵送巨大数量的腐蚀性流体的场合,该腐蚀性流体包括卤素气体和溶剂。这些材料侵蚀O形环密封件,结果这些密封件可能变成过度塑化或非常易碎,这会对设置在这些定子元件之间的密封件的完整性产生不利影响。密封件上的侵蚀强度取决于许多因素,例如包括泵送的流体,O形环材料,及该泵的温度。举个例子,例如在超过140℃的温度下泵送氟气时,由FKM弹性体(或氟化弹性体),如或构成的密封件特别易于被侵蚀。现有可选的、用于苛刻的泵送环境下的密封件是由FFKM弹性体(或全氟化弹性体),如或构成的,但这些比贵的多。此外,FFKM弹性体有相对高的压缩形变,也就是,与FKM弹性体相比较,相对较多数量的这种材料在规定时间段内承受标准压缩载荷后未能回复到其原始厚度。
发明内容
至少本发明优选实施例的目的是寻求解决这个问题。
按照第一方面,本发明提供包括密封件,其包括顺从环形体,嵌入该环形体的环形加强件,及FFKM弹性体涂层。
嵌入该环形体的环形加强件的出现可以使该密封件具有非常低的压缩形变。该加强件优选是抗压缩形变的,因此可能通过该密封件随时间保持高的密封压力。该FFKM弹性体(或氟化弹性体)涂层可以使得该密封件具有相对高的抗腐蚀性能和良好的密封性及低的透气性。与全部由FFKM弹性环形体构成的密封件相比较,(相对较贵的)FFKM弹性体涂层的单独使用可以显著地降低成本。
在优选实施例中,该环形体是由FKM弹性体或氟化弹性体构成的,因此按照第二方面,本发明提供密封件,其包括FKM弹性体构成的环形体,嵌入该环形体的环形加强件,及FFKM弹性体涂层。
顺从体可能包括从包括碳,氟化钙,硅,硫酸钡和氧化钛的组中选出的填充材料。
该FFKM弹性体可能包括从DuPont获得的全氟弹性体,从Greene,Tweed&股份有限公司获得的全氟弹性体,均从Parker Hannifin公司获得的ParofluorTM全氟弹性体和HifluorTM全氟弹性体,从Freudenberg Simrit跨国公司获得的全氟弹性体,从Busak和Shamban(Trelleborg)获得的全氟弹性体中的一个。该涂层优选具有位于0.1到0.3mm范围的厚度。
该FFKM弹性体可能由具有比构成该环形体的该FKM弹性体更优良的抗腐蚀性的另一种FKM弹性体代替。因此,按照第三方面,本发明提供密封件,其包括第一FKM弹性体构成的环形体,嵌入该环形体的环形加强件,和具有比第一FKM弹性体更优良的抗腐蚀性的第二FKM弹性体构成的涂层。
作为另一种选择,该环形体可能由与涂层相同的材料构成。本发明还提供密封件,其包括优选为FKM弹性体的顺从环形体,嵌入该环形体的环形加强件,和FKM弹性体涂层。
按照以上的任一方面,该加强件优选包括金属卷和穿孔的金属或塑料管中的一种。该加强件的可选形式包括编织金属网,编织石墨网和柔性石墨管件。
作为含有FKM或FFKM的涂层,弹性体是适用于真空的,该密封件在真空泵中获得特殊用途。因此,按照另一方面,本发明提供真空泵,其包括两个定子元件和如上述位于这些元件之间的密封件从而使得各元件与该密封件接触以在这些元件之间提供流体密封。
附图说明
现在参考附图,仅仅以举例的方式描述本发明的优选特征,其中:
图1是真空泵的定子元件的前视图;
图2是图1中的密封件的侧面横断面视图;
图3是图2中的密封件的嵌件示例的透视图;
图4是适用于真空泵的另一个密封件的侧面横断面视图;
图5是图4中的密封件的嵌件示例的透视图。
具体实施方式
图1示出选自通用多级干式泵的泵送级的定子元件12的表面10。在泵装配过程中,第二定子元件(见图2)的相应表面14与该元件12的表面10接触以在定子元件之间形成空腔16。该空腔16被用来容纳泵的转子部件(未示出)。具有罗茨和/或Northey(“爪型”)型转子的干式泵一般包括几个这种级,各级的空腔16都通过端口18与相邻的下游级相连通。
与传统的这种类型的泵一样,在空腔16外围提供密封件20以在相邻的定子元件的表面10,14之间提供流体紧密密封从而在该泵工作时防止工作流体(process fluid)从空腔16中逸出并防止周围空气进入空腔16。
图2示出根据本发明的密封件20的一个例子。该密封件20位于形成在一个定子元件的表面中的凹槽22中。该密封件20包括顺从环形体22,嵌入该环形体24的环形加强件26及FFKM弹性体的涂层,例如以下中的一种,全氟弹性体,全氟弹性体,ParofluorTm全氟弹性体,HifluorTm全氟弹性体,全氟弹性体,全氟弹性体及全氟弹性体。
该环形体24可能由适合于使用该密封件的环境的任何材料构成。对于在相对高的温度下的使用,热稳定性可能通过由可熔氟塑料材料构成该环形体来提供,例如氟化乙丙烯(FEP),氟化烷氧(PFA),聚氯三氟乙烯(CTFE),聚偏二氟乙烯(PVDF),及聚氟乙烯(PVF)。对于在较低温度下的使用,热稳定性可能通过由FKM弹性体构成环形体来提供。该FKM弹性体可能包括如下所述中的一种,从DuPont,Ausimont,Daikin获得的氟化弹性体(包括型,型,型, Extreme材料中的任意一种)及从Asahi Glass公司获得的氟化弹性体。从包括碳,氟化钙,硅,硫酸钡和氧化钛的组中选择得到的填充材料分布在该环形体24内部。
在图2和3示出的例子中,该环形加强件26是由抗压缩形变的线圈26提供的。该线圈26优选由金属材料构成,如不锈钢。在图4和5示出的例子中,该环形加强件是由穿孔的金属或塑料管26提供的。使用对于本领域技术人员来说是公知的技术,通过压模或注模将该环形体24形成在该加强件26之上。
该FFKM弹性体涂层28优选具有位于从0.1mm到0.3mm范围内的厚度,最优选为大约0.2mm。该环形体24通过移动造型或类似方法涂覆有FFKM弹性体。
Claims (10)
1.密封件,包括顺从环形体,嵌入该环形体的环形加强件,及由FKM弹性体和FFKM弹性体中的一种构成的涂层。
2.根据权利要求1所述的密封件,其中该环形体包括可熔氟塑料。
3.根据权利要求1所述的密封件,其中该环形体包括FKM弹性体。
4.密封件,其包括包含FKM弹性体的环形体,嵌入该环形体的环形加强件,及涂层,该涂层由FFKM弹性体和具有比先前所述的FKM弹性体更高的抗腐蚀性的第二FKM弹性体中的一个构成。
6.根据上述权利要求中的任一项所述的密封件,其中该顺从体包含从包括碳,氟化钙,硅,硫酸钡,氧化钛的组中选择得到的填充材料。
8.根据上述权利要求中任一项所述的密封件,其中该加强件包括金属线圈。
9.根据权利要求1-7中的任一项所述的密封件,其中该加强件包括穿孔的金属或塑料管。
10.真空泵,包括两个定子元件和位于这些元件之间的根据上述任一项权利要求所述的密封件使得各元件与该密封件接触以在这些元件之间提供流体紧密密封的密封。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0603318.7 | 2006-02-20 | ||
GBGB0603318.7A GB0603318D0 (en) | 2006-02-20 | 2006-02-20 | Seal |
PCT/GB2007/050063 WO2007096664A1 (en) | 2006-02-20 | 2007-02-14 | Seal |
Publications (2)
Publication Number | Publication Date |
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CN101384844A true CN101384844A (zh) | 2009-03-11 |
CN101384844B CN101384844B (zh) | 2011-11-23 |
Family
ID=36142104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800059268A Expired - Fee Related CN101384844B (zh) | 2006-02-20 | 2007-02-14 | 真空泵o形环密封件 |
Country Status (10)
Country | Link |
---|---|
US (1) | US20100232999A1 (zh) |
EP (1) | EP1987273B1 (zh) |
JP (1) | JP2009527712A (zh) |
KR (1) | KR20080097428A (zh) |
CN (1) | CN101384844B (zh) |
AT (1) | ATE555334T1 (zh) |
GB (1) | GB0603318D0 (zh) |
TW (1) | TWI383103B (zh) |
WO (1) | WO2007096664A1 (zh) |
ZA (1) | ZA200806948B (zh) |
Cited By (1)
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CN112253750A (zh) * | 2020-10-21 | 2021-01-22 | 中国航发沈阳发动机研究所 | 一种柔性石墨编织密封条及其安装方法 |
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GB0712779D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Seal |
JP5544907B2 (ja) * | 2010-02-04 | 2014-07-09 | 東京エレクトロン株式会社 | ガスシャワー用の構造体及び基板処理装置 |
US20110204545A1 (en) | 2010-02-25 | 2011-08-25 | Tanner Douglas E | Method of making high performance seals |
DE102011078638A1 (de) * | 2011-07-05 | 2013-01-10 | Siemens Aktiengesellschaft | Befehls- und Meldevorrichtung |
DE102011078639A1 (de) * | 2011-07-05 | 2013-01-10 | Siemens Aktiengesellschaft | Befehls- und Meldevorrichtung |
EP3026303B1 (de) * | 2014-11-28 | 2021-01-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung |
EP3374681A4 (en) | 2015-11-11 | 2019-07-24 | Greene, Tweed Technologies, Inc. | SEALING RINGS AND SEAL RING ASSEMBLIES FOR FINAL APPLICATIONS AT HIGH TEMPERATURE |
EP3318763B1 (de) * | 2016-11-04 | 2020-07-01 | Pfeiffer Vacuum Gmbh | Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe |
US20210095541A1 (en) * | 2018-03-21 | 2021-04-01 | Schlumberger Technology Corporation | High performance fluoroelastomer bonded seal for downhole applications |
US20230089463A1 (en) * | 2021-09-22 | 2023-03-23 | Hamilton Sundstrand Corporation | High temperature fuel seals and methods of making thereof |
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2006
- 2006-02-20 GB GBGB0603318.7A patent/GB0603318D0/en not_active Ceased
-
2007
- 2007-02-14 US US12/223,848 patent/US20100232999A1/en not_active Abandoned
- 2007-02-14 EP EP07705376A patent/EP1987273B1/en not_active Not-in-force
- 2007-02-14 AT AT07705376T patent/ATE555334T1/de active
- 2007-02-14 JP JP2008555881A patent/JP2009527712A/ja active Pending
- 2007-02-14 CN CN2007800059268A patent/CN101384844B/zh not_active Expired - Fee Related
- 2007-02-14 WO PCT/GB2007/050063 patent/WO2007096664A1/en active Application Filing
- 2007-02-14 KR KR1020087020250A patent/KR20080097428A/ko not_active Application Discontinuation
- 2007-02-16 TW TW096105939A patent/TWI383103B/zh not_active IP Right Cessation
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2008
- 2008-08-12 ZA ZA200806948A patent/ZA200806948B/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112253750A (zh) * | 2020-10-21 | 2021-01-22 | 中国航发沈阳发动机研究所 | 一种柔性石墨编织密封条及其安装方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2009527712A (ja) | 2009-07-30 |
EP1987273B1 (en) | 2012-04-25 |
KR20080097428A (ko) | 2008-11-05 |
ZA200806948B (en) | 2009-06-24 |
GB0603318D0 (en) | 2006-03-29 |
US20100232999A1 (en) | 2010-09-16 |
TW200804701A (en) | 2008-01-16 |
CN101384844B (zh) | 2011-11-23 |
TWI383103B (zh) | 2013-01-21 |
ATE555334T1 (de) | 2012-05-15 |
EP1987273A1 (en) | 2008-11-05 |
WO2007096664A1 (en) | 2007-08-30 |
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