TWI379992B - - Google Patents
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- Publication number
- TWI379992B TWI379992B TW97149405A TW97149405A TWI379992B TW I379992 B TWI379992 B TW I379992B TW 97149405 A TW97149405 A TW 97149405A TW 97149405 A TW97149405 A TW 97149405A TW I379992 B TWI379992 B TW I379992B
- Authority
- TW
- Taiwan
- Prior art keywords
- detecting
- mass
- driving
- detection
- angular velocity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007327502 | 2007-12-19 | ||
JP2008265489 | 2008-10-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200942776A TW200942776A (en) | 2009-10-16 |
TWI379992B true TWI379992B (ja) | 2012-12-21 |
Family
ID=40795402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97149405A TW200942776A (en) | 2007-12-19 | 2008-12-18 | Angular velocity sensor |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4929489B2 (ja) |
KR (1) | KR101149266B1 (ja) |
TW (1) | TW200942776A (ja) |
WO (1) | WO2009078284A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE496279T1 (de) * | 2008-11-11 | 2011-02-15 | Fraunhofer Ges Forschung | Mikromechanischer coriolis-drehratensensor |
JP5807344B2 (ja) * | 2011-02-25 | 2015-11-10 | ソニー株式会社 | 角速度センサ及び電子機器 |
DE102011057081A1 (de) * | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors |
KR101299731B1 (ko) * | 2012-05-29 | 2013-08-22 | 삼성전기주식회사 | 각속도 센서 |
JP6891932B2 (ja) * | 2018-10-03 | 2021-06-18 | 株式会社村田製作所 | ピエゾz軸ジャイロスコープ |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
JPH0791958A (ja) * | 1993-09-27 | 1995-04-07 | Canon Inc | 角速度センサ |
JPH09196682A (ja) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
JPH1089968A (ja) * | 1996-09-12 | 1998-04-10 | Murata Mfg Co Ltd | 角速度センサ |
DE19641284C1 (de) * | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
JPH10239347A (ja) * | 1997-02-28 | 1998-09-11 | Japan Aviation Electron Ind Ltd | 運動センサ |
JP3999377B2 (ja) * | 1997-11-04 | 2007-10-31 | 日本碍子株式会社 | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 |
JP3399336B2 (ja) * | 1997-12-22 | 2003-04-21 | 株式会社豊田中央研究所 | 検出器 |
JP4348759B2 (ja) * | 1998-12-15 | 2009-10-21 | ミツミ電機株式会社 | 回転振動型ジャイロ |
JP4529203B2 (ja) * | 1999-08-05 | 2010-08-25 | パナソニック株式会社 | 角速度センサ |
JP3627618B2 (ja) | 2000-04-19 | 2005-03-09 | 株式会社デンソー | 角速度センサ |
JP2002296038A (ja) | 2001-03-30 | 2002-10-09 | Mitsubishi Electric Corp | 角速度センサ |
JP3870895B2 (ja) | 2002-01-10 | 2007-01-24 | 株式会社村田製作所 | 角速度センサ |
JP2004354109A (ja) * | 2003-05-27 | 2004-12-16 | Matsushita Electric Works Ltd | 回転振動式角速度センサ |
JP2005241500A (ja) | 2004-02-27 | 2005-09-08 | Mitsubishi Electric Corp | 角速度センサ |
JP4353087B2 (ja) * | 2004-12-01 | 2009-10-28 | 株式会社デンソー | 回転振動型角速度センサ |
JP2006250850A (ja) * | 2005-03-14 | 2006-09-21 | Japan Aviation Electronics Industry Ltd | 振動ジャイロ |
US7240552B2 (en) * | 2005-06-06 | 2007-07-10 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
EP1832841B1 (en) * | 2006-03-10 | 2015-12-30 | STMicroelectronics Srl | Microelectromechanical integrated sensor structure with rotary driving motion |
WO2009087858A1 (ja) * | 2008-01-07 | 2009-07-16 | Murata Manufacturing Co., Ltd. | 角速度センサ |
-
2008
- 2008-12-04 KR KR20107013320A patent/KR101149266B1/ko active IP Right Grant
- 2008-12-04 WO PCT/JP2008/072037 patent/WO2009078284A1/ja active Application Filing
- 2008-12-04 JP JP2009546214A patent/JP4929489B2/ja not_active Expired - Fee Related
- 2008-12-18 TW TW97149405A patent/TW200942776A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20100086059A (ko) | 2010-07-29 |
JP4929489B2 (ja) | 2012-05-09 |
KR101149266B1 (ko) | 2012-07-20 |
TW200942776A (en) | 2009-10-16 |
JPWO2009078284A1 (ja) | 2011-04-28 |
WO2009078284A1 (ja) | 2009-06-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |