TWI379992B - - Google Patents
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- Publication number
- TWI379992B TWI379992B TW97149405A TW97149405A TWI379992B TW I379992 B TWI379992 B TW I379992B TW 97149405 A TW97149405 A TW 97149405A TW 97149405 A TW97149405 A TW 97149405A TW I379992 B TWI379992 B TW I379992B
- Authority
- TW
- Taiwan
- Prior art keywords
- detecting
- mass
- driving
- detection
- angular velocity
- Prior art date
Links
- 238000001514 detection method Methods 0.000 claims description 192
- 239000000758 substrate Substances 0.000 claims description 104
- 238000012544 monitoring process Methods 0.000 claims description 64
- 238000006073 displacement reaction Methods 0.000 claims description 58
- 230000007246 mechanism Effects 0.000 claims description 24
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 description 19
- 230000008859 change Effects 0.000 description 16
- 230000035945 sensitivity Effects 0.000 description 14
- 238000012545 processing Methods 0.000 description 12
- 230000009467 reduction Effects 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000010363 phase shift Effects 0.000 description 6
- 229910052707 ruthenium Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007327502 | 2007-12-19 | ||
| JP2008265489 | 2008-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200942776A TW200942776A (en) | 2009-10-16 |
| TWI379992B true TWI379992B (enrdf_load_stackoverflow) | 2012-12-21 |
Family
ID=40795402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97149405A TW200942776A (en) | 2007-12-19 | 2008-12-18 | Angular velocity sensor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4929489B2 (enrdf_load_stackoverflow) |
| KR (1) | KR101149266B1 (enrdf_load_stackoverflow) |
| TW (1) | TW200942776A (enrdf_load_stackoverflow) |
| WO (1) | WO2009078284A1 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE502008002421D1 (de) * | 2008-11-11 | 2011-03-03 | Fraunhofer Ges Forschung | Mikromechanischer Coriolis-Drehratensensor |
| JP5807344B2 (ja) * | 2011-02-25 | 2015-11-10 | ソニー株式会社 | 角速度センサ及び電子機器 |
| DE102011057081A1 (de) | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors |
| KR101299731B1 (ko) * | 2012-05-29 | 2013-08-22 | 삼성전기주식회사 | 각속도 센서 |
| JP6891932B2 (ja) | 2018-10-03 | 2021-06-18 | 株式会社村田製作所 | ピエゾｚ軸ジャイロスコープ |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
| JPH0791958A (ja) * | 1993-09-27 | 1995-04-07 | Canon Inc | 角速度センサ |
| JPH09196682A (ja) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
| JPH1089968A (ja) * | 1996-09-12 | 1998-04-10 | Murata Mfg Co Ltd | 角速度センサ |
| DE19641284C1 (de) * | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
| US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
| JPH10239347A (ja) * | 1997-02-28 | 1998-09-11 | Japan Aviation Electron Ind Ltd | 運動センサ |
| JP3999377B2 (ja) * | 1997-11-04 | 2007-10-31 | 日本碍子株式会社 | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 |
| JP3399336B2 (ja) * | 1997-12-22 | 2003-04-21 | 株式会社豊田中央研究所 | 検出器 |
| JP4348759B2 (ja) * | 1998-12-15 | 2009-10-21 | ミツミ電機株式会社 | 回転振動型ジャイロ |
| JP4529203B2 (ja) * | 1999-08-05 | 2010-08-25 | パナソニック株式会社 | 角速度センサ |
| JP3627618B2 (ja) | 2000-04-19 | 2005-03-09 | 株式会社デンソー | 角速度センサ |
| JP2002296038A (ja) | 2001-03-30 | 2002-10-09 | Mitsubishi Electric Corp | 角速度センサ |
| JP3870895B2 (ja) | 2002-01-10 | 2007-01-24 | 株式会社村田製作所 | 角速度センサ |
| JP2004354109A (ja) * | 2003-05-27 | 2004-12-16 | Matsushita Electric Works Ltd | 回転振動式角速度センサ |
| JP2005241500A (ja) | 2004-02-27 | 2005-09-08 | Mitsubishi Electric Corp | 角速度センサ |
| JP4353087B2 (ja) * | 2004-12-01 | 2009-10-28 | 株式会社デンソー | 回転振動型角速度センサ |
| JP2006250850A (ja) * | 2005-03-14 | 2006-09-21 | Japan Aviation Electronics Industry Ltd | 振動ジャイロ |
| US7240552B2 (en) * | 2005-06-06 | 2007-07-10 | Bei Technologies, Inc. | Torsional rate sensor with momentum balance and mode decoupling |
| EP1832841B1 (en) * | 2006-03-10 | 2015-12-30 | STMicroelectronics Srl | Microelectromechanical integrated sensor structure with rotary driving motion |
| KR101078587B1 (ko) * | 2008-01-07 | 2011-11-01 | 가부시키가이샤 무라타 세이사쿠쇼 | 각속도 센서 |
-
2008
- 2008-12-04 JP JP2009546214A patent/JP4929489B2/ja not_active Expired - Fee Related
- 2008-12-04 KR KR20107013320A patent/KR101149266B1/ko not_active Expired - Fee Related
- 2008-12-04 WO PCT/JP2008/072037 patent/WO2009078284A1/ja active Application Filing
- 2008-12-18 TW TW97149405A patent/TW200942776A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2009078284A1 (ja) | 2011-04-28 |
| JP4929489B2 (ja) | 2012-05-09 |
| WO2009078284A1 (ja) | 2009-06-25 |
| KR101149266B1 (ko) | 2012-07-20 |
| KR20100086059A (ko) | 2010-07-29 |
| TW200942776A (en) | 2009-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |