TWI379082B - Probe station, probe socket, probe card and the combination thereof - Google Patents

Description

^79082 玫,发明说明: [Technical field of invention] The present invention relates to a needle measuring system, a needle measuring card holder, a needle card and an assembly thereof, in particular, a needle measuring with a unique heat dissipation function System, needle test card holder, needle test card and its assembly. [Prior Art] In the manufacturing process of integrated circuit components, the electrical characteristics of the card are tested by a pin test card, thereby screening out integrated circuit components that do not meet the product specifications. Figure 1 discloses a needle test "u' which comprises two parallel flats arranged in a rectangular opening. The slide rails 16 on both sides, a plurality of non-circular cantilever beams 12 and at least a fine adjustment platform mounted on the non-circular cantilever beam. The two ends of the circular cantilever 12 are respectively erected on the slide rail 16 by the slide block 18. The fine adjustment table is used to carry the "needle test card, S_ VT mouth 敕 Λ 卞» and adjust the The needle test card u can be fixed on the test machine by a plurality of screws 13. The semiconductor wafer is placed on the wafer with the heating device during the test. On the susceptor, when the test is performed, the heating device heats the semiconductor wafer, for example, the reliability test of the integrated circuit component, and the heat generated by the heating device can be transmitted to the pin test card by thermal radiation. The test environment, or the probe tip of the card is thermally transferred to the test environment in which the test card is located, causing the temperature of the test environment to rise. However, the rising temperature may cause the pin card to be in and Test environment objects Changes in the nature or chemical properties (eg, the thermal expansion and contraction properties of the material cause deformation of the object), resulting in the measurement process not being able to proceed smoothly, or affecting the accuracy of the measurement results. [Summary] The main object of the invention is to provide a The needle measuring system, the needle measuring card holder, the needle measuring card and the combination thereof can effectively reduce the ambient temperature of the needle measuring card during the test to avoid physical or chemical changes of the needle card. The system comprises two slidings, at least one non-circular suspension, a plurality of seats and at least a transmission shaft. The at least one non-circular cantilever is placed on the slide rail. The plurality of needle card holders are disposed on the The at least-transmission shaft comprises at least a duct (the air duct is connected to the bottom of the card test deck). The needle card deck of the present invention comprises a plurality of connection terminals and at least a wind tunnel. The plurality of connections The terminal is disposed at the bottom of the card test deck for transmitting and receiving an electrical signal between the transmission shaft and the card test card. The at least one wind tunnel is configured to transmit nitrogen or cold air sent by the transmission shaft. The card includes a circuit board having a support member and a heat dissipation hole. The support member is configured to support a plurality of probes to form a needle tip. The heat dissipation hole is used for cooling the needle test card. The assembly of the present invention has a recessed portion The opening is for accommodating the support member. [Embodiment] The opening and the side wall, wherein Figure 2 shows the relationship between the needle measuring system of the present invention and the component to be tested. Similar to the prior art, the needle measuring system 2Q of the present invention is also The utility model has two slides 16 disposed on two sides of the rectangular open platform and a plurality of non-circular cantilever beams 12. A plurality of needle test card holders 24 are erected on the (four)-shaped suspension beam 12, which can finely adjust the needle test card and the to-be-tested The relative position of the component 2 i (e.g., wafer). The probe card holder 24 can be coarsely adjusted by the horizontal movement on the non-circular suspension 12 and the vertical movement of the non-circular cantilever 12 on the slider 16. To the position of the test element 21. Different from the prior art, the probe card holder 24 communicates with an external test machine (not shown) through a transmission shaft, and the transmission shaft includes not only the signal line but also at least the air duct. The duct delivers nitrogen or cold gas 'which can pass through the probe holder 24 and is ejected from the bottom of the wind hole 32. Figure 3 shows the bottom configuration of the probe deck 24. The base 31 includes a plurality of apertures 32 that are permeable to nitrogen or cold air and are transmitted to the card 42 with electrical signals. Figure 4 shows a perspective view of one of the needle card 42 of the present invention and its associated assembly 41. The card 42 has at least a heat dissipation hole 427, which can effectively achieve the temperature of the (4) card 42 by the air or cold air transmitted from the card holder 24, and effectively reduce the card 42 The element to be tested 21 . The temperature is increased by heating. Therefore, even if the device to be tested is heated to the outline °C. The needle card 42 can still maintain a temperature of, for example, about 100 C by the heat dissipation holes 427. In order to ensure that the horizontal position of the probe does not cause a needle position shift due to an increase in the use time, the plurality of probes are epoxy-coated on the support member 424. The end of the plurality of probes forms a tip 祀, and the tip 423 and the probe 425 form a central corner for reducing the contact between the probe 425 and the element to be tested. Like the alignment holes, which are relative to the

The slanting position of the wooden needle holder 24 fq 3 g V 35 π± "4J the alignment hole 33 and if necessary, can be locked by the screw to the probe, the card 41. The assembly 41 is used to cover the needle card 42 In addition to the 1379082 _ for protecting the card 42, the nitrogen or cold air from the vent 410 is prevented from being directly blown toward the device under test 2. The assembly 4 1 includes an opening 4 1 2 and a plurality of alignment holes 411 ′ and the openings 4 ! 2 are for accommodating the slab 424 of the card 42 .

Figure 5 shows a perspective view of another embodiment of the needle card 42 of the present invention and its associated assembly 41. Figure 6 shows a perspective view of the needle card 42 of the present invention and its collocations and the combination of the five members 41 in the direction of Figure 5. Figure 7 shows a reverse perspective view of the needle card 42 of the present invention and its associated assembly 41. Figure 8 is a perspective view showing the combination of the needle card 42 of the present invention and its associated assembly μ in the direction of Figure 7. Figure 9 is a cross-sectional view of Figure 8 relative to the prior art, the needle measuring system of the present invention. The probe card 24, the probe card 42 and the collocation assembly 41 thereof have at least the following advantages: The probe card holder 24 has a wind tunnel in addition to the signal line, and can send nitrogen gas together when transmitting the measurement signal. Air conditioning.

2. The needle card 42 can be screwed to the plurality of alignment holes 428 to the probe card holder 2 4 ' and the needle card 4 2 is parallel to the device under test 2 | 3 · the card 42 is provided with a heat dissipation hole 427, which can maintain the average temperature by using nitrogen gas or cold air sent from the probe card holder 2, and reduces the temperature recovery of the needle measurement _42. 4. By the assembly 41, the needle card 42 can prevent nitrogen or cold air from being blown toward the element 21 to be tested. And the assembly 41 still has a chamber after the needle card 42 is combined, and nitrogen or cold air can enter the volume through the heat dissipation hole 42 to flow in parallel, and both hooks are connected to the needle card * 8 I379Q82 Position, and achieve the purpose of uniform cooling. The technical contents and technical features of the present invention have been disclosed as above, but those skilled in the art can still make various alternatives and modifications to the present invention based on the teachings and disclosures of the present invention. Therefore, the scope of the invention is not limited by the scope of the invention, and the invention is intended to cover various alternatives and modifications. [Simplified description of the drawings] Figure 1 shows a needle measurement system;

Figure 2 shows the relationship between a needle measuring system and the component to be tested; Figure 3 shows the bottom structure of a probe card holder; Figure 4 and Figure 5 show a perspective view of the combination of the needle card and its combination; Figure 6 shows the needle test A combination of the card and its combination; Figure 7 shows a perspective view of another angle of the card and its combination.

Figure 8 shows the junction of the pin test card and its combination. Figure 9 shows the cross-sectional view of Figure 8. [Component Description] 11 Needle Test System 12 Cantilever Beam 13 Screw 14 Probe Card Holder 16 Slide Rail 18 Slider 20 Needle Test System 21 Test Element 24 Probe Holder 3 1 Base 32 Wind Tunnel 33 Alignment Hole I379Q82 41 Assembly 42 Needle 41 1 Alignment Hole 412 Open 415 Stop 416 Clip 42 1 Circuit Board 423 Needle 424 Support 427 428 alignment hole measuring bayonet hitting tip hot hole

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Claims (1)

Patent Application No. 097126016 Patent Application for Fan Park Replacement (May, May of the next year) / eve 1790082 Pickup, patent application scope: 1. A combination of needle test cards, including a needle test card, including _ staff support And a heat dissipation hole disposed at the other end of the support member; and the assembly member has a recess portion, an opening and a side wall, wherein the opening is adjacent to the support member, and the side wall is along the recess The edge of the ministry was established. 2. The combination of the needle card of claim 2, wherein the recess comprises a chamber & the chamber is connectable to more than three-quarters of the area of the card. 3. The combination of the needle cards of claim 1, wherein the recesses extend along the long axis direction to have a wider to narrower width. 4. The combination of the needle card according to the first aspect of the patent application, wherein the side has a plurality of alignment holes, and the combination of the needles according to the first aspect of the patent application, wherein The group of people has a hitting portion on both sides of the opening, and the pinch portion has a tapered shape. 11