M350811 八、新型說明： 【新型所屬之技術領域】 本新型係關於一種針測裴M350811 Eight, new description: [New technology field] This new type is about a needle test
,A t I 对測卡座、針測卡及JL 、、且百件，特別是關於一種呈有 八 Λ, ^ 、有獨特政熱功能的針測裝置、 針測卡座、針測卡及其組合件。 【先前技術】 在積體電路元件的製造過程 # ti > |έ r - 0, 勺θ以針測卡測試其電氣 竹|王精以師選出不符合姦〇招功 付σ屋口口規格之積體電路元件。 =揭示-種針測裝置u’其包含二平行設置於矩 …兩側的滑執16、複數個非圓形懸樑12以 設於該非圓形懸樑上 h v <微凋口 14。該非圓形懸樑12之二末 女而係为別糟由一滑座18羊今於#、取t 条0又於该滑執16上。該微調台14 用於攜▼一針測卡，且可，敕姑 凋·ίΕ•該針測卡與一待測元件之相 對角度。該針測裝置u可兹, A t I test card holder, needle test card and JL, and 100 pieces, especially for a needle measuring device, needle card holder, needle test card with a gossip, ^, unique political function Its assembly. [Prior Art] In the manufacturing process of integrated circuit components # ti > |έ r - 0, spoon θ to test its electrical bamboo with a needle test card | Wang Jing selected by the teacher does not meet the speculation of the σ 〇 Integrated circuit components. = Revealing-type needle measuring device u' comprises two slides 16 arranged in parallel on both sides of the moment, and a plurality of non-circular cantilever beams 12 are arranged on the non-circular cantilever beam h v < The second round of the non-circular cantilever beam 12 is tied to a slippery seat 18 sheep now in #, take t strip 0 and on the slippery 16. The fine adjustment stage 14 is used to carry a ▼ card, and the needle can be compared with a component to be tested. The needle measuring device u
了猎由禝數個螺絲13固設於一洌 5式機台上。 J =導體晶圓於測試時係安置於一具有加熱 ^當進行測試時，該加熱裝置會加熱半導體㈣ ’例如進行該積體電路元件之可#性測試㈣iabi = est而其產生之熱量可以熱輕射方式傳送至該針測卡所 :之㈣環境’或經由該針測卡之探針尖端以熱傳導方式 傳运至該測試卡所虛之 Λ 處之j %楗，導致該測試環境之溫度 &上升之溫度可能引起該針測卡以及處於該測試 衣兄之物件的物理性暂$於與祕开片 貝或化子性負產生變化（例如物 ,，、、服冷縮特性造成物 、 乂初仵產生形變）’導致量測過程無法順利 133156.doc M350811 進行，抑或影響量測結果之準確性。 【新型内容】 本新型之主要目的係提供—種針測裝置、針測卡座、針 =卡及…且口件’其可有效地降低測試過程中該針測卡之 皿度’以避免該針測卡產生物理或化學性質的變化。 本新里之針測裝置包含二滑執、至少一非圓形懸樑、複 數個針測卡座及至少_傳輪軸。該至少—非圓形懸摔之二 末端設置於該：滑軌上。該複數個針測卡座設置於該非圓 形懸樑上。該至少—傳輪軸包含至少一風管，纟中該至少 一風管連通至該針測卡座之底部。 本新型之針測卡座包含複數個連接端子和至少_風洞。 該複數個連接端子設置於該針測卡座之底部，用於傳送和 接收該傳輸軸和針測卡之間之電氣訊號。該至少_風_ 於傳运該傳輸轴送出之氮氣或冷氣。 =新型之針測卡包含—電路板。該電路板具有-支撑件 及-散熱孔。該支撑件用於支撑複數個探針而形成針尖。 «亥政熱孔用於冷卻該針測卡。 本新型之組合件具有一凹陷部、一開口及一 中該開口用於容納該支撑件。 。^ 【實施方式】 圖2顯示本新型之針測裝置和待測元件間的關係。和習 知技術類似，本新型之針測裝置2G亦具有二平行設置於二 矩形開口平台兩側的滑執16及複數個非圓形懸樑12 : 個針測卡座24架設於該非圓形懸樑12上，其可微調針剛 133156.doc M350811 卡和該待測元件21 (例如晶圓）之相對位置。藉由於該非 圓形懸樑12上的水平移動及該非圓形懸樑以該滑軌^ 上的=直移動’該探針卡座24可被粗調至該待測元件 之任意位置。和習知技術不同的是，該探針卡座Μ藉由— 傳輸轴和外部之測試機台（圖未示出）溝通，而該料轴 不僅包含訊號線，更包含至少一風管。該風管傳送氮氣或 冷氣，討穿越該探針卡座24,並由其底部之風孔32射出。 • 圖3顯示該探針卡座24之底部構造^該底座31包含一 風孔32，其可流通氮氣或冷氣，且伴隨著電氣訊號傳 至該針測卡42。 圖4顯示本新型之針測卡42及其搭配之組合件4ι之一 立體圖。該針測卡42具有至少一散熱孔切，里可朴 2^針測卡座24所傳來之氮氣或冷氣而有效達成;針二 卡42的均温’且有效降低該針測卡42因該待測元件幻 之加熱而增加之溫度。因此即便該待測元件2ι加執 藝G，。該針測卡42仍可藉由該散熱孔w而維持例如約 ' :〇C的均温。為了確保探針之水平位置不因使用時間 增加而產生針位偏移的情況，該複數個探針係以環 固定於支撐件424上。該複數個探針之端部形成^ Μ ’该針尖423和該探針425形成—夾角，用大 該探針425和待測元件21接觸時所產生之牛低 化。該針測卡42可設置複數個對位孔428， …力變 探針卡座24之對位孔33,且必要時 蜉鹎目對於該 处上产 精由螺絲鎖固於診蕊 座24。該組合件4 i係用於覆蓋該 " 、J卞42，其除 133156.doc M350811 了 ^保護該針測卡42外，亦可防止該散熱孔427傳來 ^氮氣或冷氣直接吹向該待測元件21。該組合# 41包含 4 1 2及衩數個對位孔4丨丨，且該開口 4丨2係用 於令納該針測卡42之支撐件424。The hunting was fixed by a number of screws 13 on a 5-type machine. J = the conductor wafer is placed in a test with heating. When the test is performed, the heating device heats the semiconductor (4) 'For example, the integrated circuit component can be tested (4) iabi = est and the heat generated can be hot Lightly transmitted to the card test card: (4) Environment' or via the probe tip of the pin test card to be thermally transferred to the x% of the test card, resulting in the temperature of the test environment & rising temperature may cause the physical property of the needle card and the object in the test suit to change with the secret opening or the negative nature (for example, the object, the cold shrinkage property, The initial deformation of the crucible has caused the measurement process to fail, or the accuracy of the measurement results. [New content] The main purpose of the present invention is to provide a needle measuring device, a needle measuring card holder, a needle = card and ... and the mouth piece 'which can effectively reduce the degree of the needle card during the test' to avoid the The needle card produces a change in physical or chemical properties. The needle measuring device of the present invention comprises two sliding handles, at least one non-circular cantilever beam, a plurality of needle measuring decks and at least a transmission shaft. The at least two non-circular suspension ends are disposed on the: rail. The plurality of card test decks are disposed on the non-circular cantilever beam. The at least one transmission shaft includes at least one air duct, and the at least one air duct is connected to the bottom of the card test deck. The needle card holder of the present invention comprises a plurality of connecting terminals and at least a wind tunnel. The plurality of connection terminals are disposed at the bottom of the card test deck for transmitting and receiving electrical signals between the transmission shaft and the card test card. The at least _ wind _ transports the nitrogen or cold air sent by the transmission shaft. = The new pin test card contains - the circuit board. The board has a - support and a heat sink. The support is used to support a plurality of probes to form a needle tip. «Hai Zheng hot hole is used to cool the needle test card. The assembly of the present invention has a recess, an opening and an opening for receiving the support. . ^ [Embodiment] FIG. 2 shows the relationship between the needle measuring device of the present invention and the element to be tested. Similar to the prior art, the needle measuring device 2G of the present invention also has two sliding handles 16 disposed on two sides of the two rectangular opening platforms and a plurality of non-circular cantilever beams 12: a needle measuring card holder 24 is erected on the non-circular cantilever beam On the 12th, it can fine-tune the relative position of the needle 133156.doc M350811 card and the device under test 21 (for example, a wafer). The probe cartridge 24 can be coarsely adjusted to any position of the member to be tested by the horizontal movement on the non-circular cantilever 12 and the non-circular cantilever beam on the slide rail. Different from the prior art, the probe holder is communicated by a transmission shaft and an external test machine (not shown), and the shaft includes not only a signal line but also at least one duct. The duct conveys nitrogen or cold air and travels through the probe holder 24 and is ejected from the bottom of the wind hole 32. • Figure 3 shows the bottom configuration of the probe deck 24. The base 31 includes a vent 32 that is permeable to nitrogen or cold air and is passed to the card 42 with electrical signals. Figure 4 shows a perspective view of the needle card 42 of the present invention and its associated assembly 4i. The needle card 42 has at least one heat-dissipation hole cut, which can be effectively achieved by the nitrogen or cold air from the card holder 24; the average temperature of the needle card 42 is lowered and the needle card 42 is effectively lowered. The temperature of the component to be tested is heated and increased. Therefore, even if the component to be tested 2 is added to the process G, The needle card 42 can still maintain the average temperature of, for example, about : 〇 C by the heat dissipation holes w. In order to ensure that the horizontal position of the probe does not cause a needle position shift due to an increase in the use time, the plurality of probes are fixed to the support member 424 by a loop. The ends of the plurality of probes form a tip 423 which forms an angle with the probe 425, which is reduced when the probe 425 is in contact with the element 21 to be tested. The needle card 42 can be provided with a plurality of alignment holes 428, ... the force-changing probe holders 24 of the alignment holes 33, and if necessary, the screws are fixed to the diagnostic core 24 by screws. The assembly 4 i is used to cover the ", J卞42, which protects the needle card 42 in addition to 133156.doc M350811, and prevents the heat dissipation hole 427 from being sent directly to the nitrogen or cold air. Element 21 to be tested. The combination #41 includes 4 1 2 and a plurality of alignment holes 4丨丨, and the opening 4丨2 is used to hold the support member 424 of the card 42.
一圖5顯示本新型之針測卡42及其搭配之組合件41之另 角度之立體圖。圖6顯示本新型之針測卡42及其搭配 、’、&件41依圖5之方向結合後之立體圖。圖7顯示 本新i之針測卡42及其搭配之組合彳Μ《反面立體 圖。圖8顯示本新型之針測卡42及其搭配之組合件μ 圖之方向結合後之立體圖。圖9顯示圖8之剖面 相對於習知技術，本新型之針測裝置2〇、探針卡座 2'針測卡42及其搭配之組合件41至少具有下列優點： _ °亥探針卡座24除具有訊號線外，並具有風洞。在 傳輸量測訊號時可—併送出氮氣或冷氣。 2· ^針測卡42可利用螺絲鎖固該複數個對位孔428於該 探針卡座24’且使該針測卡42平行於該待測元件。 3·該針測卡42設置有散熱孔似，可利用該探針卡座24 所傳來的氮氣或冷氣而维技 7虱肉維持均温，且降低該針測卡 42的温度。 4.藉由組合件4 1 ,兮4+、、目，丨上μ 该針/則卡42可避免氮氣或冷氣直 接吹向待測元件2 1。且兮知人从 1遠組合件4 1在組合該針測 卡42後仍留有—容室，氣洛々、人斤 、 合至乱乳或冷氣經由該散熱孔427 進入該容室後可平行流動 丁 L動且均勻地接觸該針測卡42 133156.doc M350811 之任一位置，而達成均温冷卻之目的。 本新型之技術内容及技術特點已揭示如上，然而熟悉 本^技術之人士仍可能基於本新型之教示及揭示而作種= 2離本㈣精神之#換及㈣。因此，本新型之保護 圍^限於實施例所揭示者，而應包括各種不背離本新型 之曰換及修飾’並為以下之申請專利範圍 【圖式簡單說明】 ^Figure 5 shows a perspective view of the needle card 42 of the present invention and its associated assembly 41. Fig. 6 is a perspective view showing the needle card 42 of the present invention and its collocation, ', & member 41 in the direction of Fig. 5. Figure 7 shows the combination of the new test pin 42 and its combination 彳Μ "reverse perspective view. Fig. 8 is a perspective view showing the combination of the needle card 42 of the present invention and the combination of the μ drawings. 9 shows the cross-section of FIG. 8 with respect to the prior art. The needle measuring device 2〇 of the present invention, the probe card holder 2', the card 42 and the collocation assembly 41 thereof have at least the following advantages: _ ° Hai probe card The seat 24 has a wind tunnel in addition to the signal line. When transmitting the measurement signal, you can send nitrogen or cold air. 2. The needle card 42 can be used to lock the plurality of alignment holes 428 to the probe card holder 24' by screws and to cause the needle card 42 to be parallel to the device under test. 3. The needle card 42 is provided with a heat dissipation hole, and the nitrogen or cold air sent from the probe card holder 24 can be used to maintain the average temperature and reduce the temperature of the needle card 42. 4. By means of the assembly 4 1 , 兮 4+, 目, 上上 μ, the needle/card 42 prevents nitrogen or cold air from being directly blown toward the element to be tested 21 . And the 人 从 从 从 从 1 1 1 1 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合 组合The flow L is evenly and uniformly contacted with any position of the card 42 133156.doc M350811 for the purpose of uniform temperature cooling. The technical content and technical features of the present invention have been disclosed as above, but those skilled in the art may still make a variety based on the teachings and disclosures of the present invention = 2 and (4). Therefore, the protection of the present invention is limited to those disclosed in the embodiments, and should include various modifications and modifications that do not depart from the present invention and is the scope of the following patent application [Simple Description] ^
圖1顯示一針測農置； 圖2顯示一針測裝置和待測元件間的關係； 圖3顯示一探針卡座之底部構造； 圖4和圖5顯不針測卡及其搭配之组 圖6顯示針測卡及其搭配之組合件之: _圖； 圖 圖7顯示針測卡及其搭配之組合 :’ ； 干之另—角度之立體 圖；以及 圖J顯示針測卡及其搭配之組合件之結合 θ顯示圖8之剖面圖0 【主要元件符號說明】 11 針琪彳裝置 12 13 螺絲 14 16 滑執 18 20 針鲫裝置 2 1 24 探針卡座 3 1 底座 32 33 對位孔 懸樑 操針卡座 滑座 待踯元件 >同 133156.doc -10- M350811 4 1 組合件 4 1 1對位孔 4 1 5擋止部 42 1電路板 4 2 4支撐件 428對位孔 42 針測卡 4 1 2 開口 416夾擊部 423針尖 427散熱孔Figure 1 shows a needle surveying device; Figure 2 shows the relationship between a needle measuring device and the component to be tested; Figure 3 shows the bottom structure of a probe card holder; Figure 4 and Figure 5 show the needle card and its matching Figure 6 shows the combination of the needle test card and its combination: _ Figure; Figure 7 shows the combination of the needle test card and its combination: '; dry another-angle perspective view; and Figure J shows the needle test card and The combination of the combined components θ shows the sectional view of Fig. 8 [Description of the main components] 11 pin Qiqi device 12 13 screws 14 16 slipper 18 20 pin device 2 1 24 probe card holder 3 1 base 32 33 pairs Position hole cantilever needle holder slide waiting element> same 133156.doc -10- M350811 4 1 assembly 4 1 1 registration hole 4 1 5 stopper 42 1 circuit board 4 2 4 support 428 alignment Hole 42 pin test card 4 1 2 opening 416 pinch portion 423 pin tip 427 vent hole
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