201003079 玖、發明說明： 【發明所屬之技術領域】 i :係關於一種針測系統、針測卡座、針測卡及其組 、疋關於種具有獨特散熱功能的針測系統、針 測卡座、針測卡及其组合件。 【先前技術】 拄姓賣體電路兀件的製造過程中均會以針測卡測試其電氣 、藉以篩選出不符合產品規格之積體電路元件。 二么馬T _針測系統11 ’其包含二平行設置於矩形開 二"口兩侧的滑執16、複數個非圓形懸# 12以及至少—架 设於該非圓形懸楞 ,，、之楗凋α 14。該非圓形懸樑12之二末 用：刀別猎由一滑座18架設於該滑執16上。該微調台14 對自=帶Γ針測卡可調整該針測卡與—待測元件之相 ㈣：。^針測系統U可藉由複數個螺絲13固設於-測 s式機台上。 =半導體晶圓於職時係安置於—具有加熱裝置之晶圓 ^上。當進行測試時，該加熱裝置會加熱半導體晶圓， 发進㈣《電路元件之可靠^eUabiihy㈣，而 〜生之熱量可以熱㈣方式傳送至該針測卡所處之測試 、'兄，或經由該針測卡之探針尖端以熱傳導方式傳送至該 測4卡所處之測試環境，導致該測試環境之溫度上升。惟， 起該針測卡以及處於該測試環境之物件 性造成物W 生變化(例如物質之熱脹冷縮特 成物件產生形變)，導致量測過程無法順利進行，抑或 201003079 影響量測結果之準確性。 【發明内容] 主要目的係提供一種針測系統、針測卡座、針 、J卡及八，、且口件，其可有效地降低測試過程中該針測卡之 S 又以避免5亥針測卡產生物理或化學性質的變化。 本發明之針測系統包含二滑執、至少-非圓形懸樑、複 數:針測卡座及至少—傳輸軸。該至少—非圓形懸標之二 f , π執上。該複數個針測卡座設置於該非圓 > 樑上°亥至少一傳輸軸包含至少一風管，其中該至少 風笞連通至s亥針測卡座之底部。 j發明之針測卡座包含複數個連接端子和至少―風洞。 違後數個連接端子設置於該針測卡座之 接收該傳輸轴和針測卡之間之電氣部 、傳达和 於德…# # ± 」心包虱訊唬。該至少一風洞用 於傳运㈣輪轴送出之氮氣或冷氣。 及本::：之針測卡包含一電路板。該電路板具有-支撑件 孔。^撑件心域複數個探針㈣成針尖。 X月文…孔用於冷卻該針測卡。 二發：之組合件具有一凹陷部、一開口及一邊 該開口用於容納該支撑件。 【實施方式】201003079 玖, invention description: [Technical field of invention] i : About a needle measurement system, a needle test card holder, a needle test card and its group, a needle measurement system with a unique heat dissipation function, and a needle test card holder , needle test card and its assembly. [Prior Art] In the manufacturing process of the 拄 卖 卖 兀 兀 兀 兀 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针 针a two-horse T _ pin measurement system 11 'which includes two slides 16 arranged in parallel on the sides of the rectangular opening, a plurality of non-circular suspensions # 12 and at least - erected on the non-circular suspension, After the assault α 14. The second of the non-circular cantilever beams 12 is used for the knives to be erected by the slides 18 on the slides 16. The fine adjustment stage 14 can adjust the phase of the needle test card and the component to be tested (4) to the self-belt test card. The needle measuring system U can be fixed to the s-type machine by a plurality of screws 13. = The semiconductor wafer is placed on the wafer with the heating device. When the test is performed, the heating device heats the semiconductor wafer and sends in (4) "Reliable ^e Uabiihy (4) of the circuit components, and the heat generated by the heat can be transferred to the test where the card is located, 'brother, or via The probe tip of the needle card is thermally transferred to the test environment in which the card is tested, resulting in an increase in temperature of the test environment. However, the needle card and the object in the test environment cause a change in the material (for example, the thermal expansion and contraction of the material is deformed), which causes the measurement process to not proceed smoothly, or 201003079 affects the measurement result. accuracy. SUMMARY OF THE INVENTION The main object is to provide a needle measuring system, a needle measuring card holder, a needle, a J card and an eight, and a mouth piece, which can effectively reduce the S of the needle card during the test and avoid the needle The card produces changes in physical or chemical properties. The needle testing system of the present invention comprises a two-slide, at least a non-circular cantilever, a plurality: a needle deck and at least a transmission shaft. The at least - non-circular suspension of the two f, π is carried. The plurality of needle-measuring card holders are disposed on the non-circular beam; at least one of the transmission shafts includes at least one air duct, wherein the at least one airflow is connected to the bottom of the singer card deck. The needle card holder of the invention comprises a plurality of connecting terminals and at least a "wind tunnel." After the violation, a plurality of connection terminals are disposed on the electrical part of the pin test card holder to receive the transmission axis and the card test card, and communicate with the German...# #± ”心包虱. The at least one wind tunnel is used to transport (iv) nitrogen or cold air sent from the axle. And the ::: pin test card contains a circuit board. The board has a - support hole. ^ Support a plurality of probes in the heart area (four) into a needle tip. X month... The hole is used to cool the needle card. The second assembly: the assembly has a recess, an opening and an opening for receiving the support. [Embodiment]
:2顯示本發明之針測系統和待測元件間的關 知技術類似，本於明夕紅 、和I ㈣門… 針测系統2〇亦具有二平行設置於該 形開口千。兩側的滑執16及複 個針測卡座24牟机於兮外 口〜心知12。複數 於該非圓形懸樑12上，其可微調針測 6 201003079 t和該待測元件21(例如日日』）之相對位置。藉由於該非 Η形懸樑12上的水平移動及該非圓形懸樑12於該滑軌16 上的垂直移動’該探針卡座24可被粗調至該待測元件Μ 之任意位置。和習知技術不同的是，該探針卡座Μ藉由一 傳輸轴和外部之測試機台（圖未示出）溝通，而該傳輸軸 不僅包含訊號線，更台含$少一 ΤΞΤ ^ 文匕3至乂 風官。該風管傳送氮氣或 '氣，其可穿越該探針卡座24,並由其底部之風孔32射出。 圖3顯示該探針卡座24之底部構造。該底座η包含一 風孔32 ’其可流通氮氣或冷氣，且伴隨著電氣訊號傳送 至該針測卡42。 圖4顯示本發明之針測卡42及其搭配之組合件41之一 立體圖。該針測卡42具有至少-散熱孔427, 1可終 :該針測卡座24所傳來之氮氣或冷氣而有效達成該針； 42的均温，且有效降低該針測卡42因該待測元件^ 。之加熱而增加之溫度。因此即便該待測元件Η加熱至 c，該針測卡42仍可藉由該散熱孔4 、C的句温。為了確保探針之水平位置不因使用時間的 增加而產生針位偏移的情況，該複數個探針係 固定於支據件-上。該複數個探針之端部形 似’ δ亥針尖423和該探針425形成一《角，用以降低 ::探=425和待測元件21接觸時所產生之應力變 广針測卡42可設置複數個對位孔428，其係相對 探針卡座24之對位孔33,且必要時可藉由螺絲鎖固於^ 金1" 庙 9 4。+ a a μ 名R· 、、且合件41係用於覆蓋該針測卡仏其除 201003079 了用於保護該針測卡42外，亦可防止該散熱孔⑵傳來 之見虱或冷氣直接吹向該待測元件2】。該組合件μ包人 一開口川及複數個對位孔411，且該開口 412 3 於容納該針測卡42之支撐件424。 、 圖5顯示本發明之針測卡42及其搭配之組合件41 角度之立體圖。圖6顯示本發明之針測卡42及 =件41依圖5之方向結合後之立體圖。圖心 月之針測卡42及其搭配之組合件41之反面立體 圖。圖8顯示本發明之針測卡42及其搭配之組合件q :圖7之方向結合後之立體圖。圖9顯示圖8之剖面 、子於t知技術，本發明之針測系統2〇、探針卡座 針測卡4 2及其搭配之組合件4 1至少纟有下列優點： k探針卡座24除具有訊號線外，並具有風洞。在 傳輪量測訊號時可一併送出氮氣或冷氣。 十利卡42可利用螺絲鎖固該複數個對位孔‘Μ於該 探針卡座24,且使該針測卡42平行於該待測元件2 = 該針測卡42設置有散熱孔427,可利用該探針卡座24 所傳來的氮氣或冷氣而維持均温，且降低該針測卡 42的温度。 藉由組合件4 1 ’該針測卡42可避免氮氣或冷氣直 接吹向待測元件21。且該組合件41在組合該針測 卡42後仍留有一容室，氮氣或冷氣經由該散熱孔 進入該容室後可平行流動，且均勻地接觸該針測卡42 201003079 之任一位置，而達成均温冷卻之目的。 本發明之技術内容及技術特點已揭示如上， 項技術之人士仍可能基於本發明之教示及揭示 背離本發明精神之替換及修飾。因此，本發明 應不限於實施例所揭示者，而應包括各種不背 替換及修飾，亚為以τ之申請專利範圍所涵蓋 【圖式簡要說明】 圖1顯示一針測系統； 頁示針;則系統和待測元件間的關係； 圖3顯示一探針卡座之底部構造，· 圖4和圖5顯示針測卡及其搭配之組合件之 圖6顯示針測卡及其搭配之組合件之 圖7顯示針測卡；5 I ® 】卡及其搭配之組合件之另—角 8顯示針測卡及其搭配之組合件 圖9顯示圖8之剖面圖。 【元件符號說明】 之結合圖 然而熟悉本 而作種種不 之保護範圍 離本發明之 立體圖； 9 度之立體 ;以及 11針測系統 13 螺絲 16滑軌 20針剛系統 24探針卡座 3 1底座 33對位孔 12 懸樑 14 探針卡座 18 滑座 21待測元件 3 2 風洞 201003079 4 1 組合件 4 1 1對位孔 4 1 5擋止部 42 1電路板 4 2 4支撐件 4 2 8對位孔 4 2 針測卡 4 12 開口 4 1 6夾擊部 423針尖 427散熱孔 10: 2 shows that the sensing technology of the needle measuring system of the present invention is similar to that of the component to be tested. The present invention is based on the Mingxihong, and the I (four) door. The needle measuring system 2〇 also has two parallel openings arranged in the shape. The sliding 16 on both sides and the double needle card holder 24 are machined in the outer mouth ~ Xinzhi 12. In addition to the non-circular cantilever 12, it can finely adjust the relative position of the needle test 6 201003079 t and the component 21 to be tested (e.g., day and day). The probe holder 24 can be coarsely adjusted to any position of the member to be tested 藉 by the horizontal movement on the non-circular cantilever 12 and the vertical movement of the non-circular cantilever 12 on the slide rail. Different from the prior art, the probe card holder communicates with an external test machine (not shown) through a transmission axis, and the transmission axis not only includes a signal line, but also contains less than one ΤΞΤ ^ Wen Hao 3 to Hurricane Officer. The duct delivers nitrogen or 'gas, which can pass through the probe holder 24 and be ejected from the bottom of the vent 32. Figure 3 shows the bottom configuration of the probe deck 24. The base η includes a vent 32' that is permeable to nitrogen or cold air and is coupled to the card 42 with electrical signals. Figure 4 shows a perspective view of one of the needle card 42 of the present invention and its associated assembly 41. The needle card 42 has at least a heat dissipation hole 427, which can end: the nitrogen or cold air from the needle card holder 24 effectively achieves the needle; 42 is uniform temperature, and the needle card 42 is effectively lowered. The component to be tested ^. The temperature is increased by heating. Therefore, even if the device under test Η is heated to c, the card 42 can still pass the temperature of the heat dissipation holes 4 and C. In order to ensure that the horizontal position of the probe does not cause a needle position shift due to an increase in the use time, the plurality of probes are fixed to the support member. The ends of the plurality of probes are shaped like 'δ 针 尖 423 and the probe 425 form an angle to reduce:: Detecting 425 and the stress generated by the component 21 to be tested is widened. A plurality of alignment holes 428 are provided, which are opposite to the alignment holes 33 of the probe card holder 24, and can be locked to the gold 1" Temple 94 by screws if necessary. + aa μ name R· , , and assembly 41 is used to cover the needle card. In addition to 201003079, it is used to protect the needle card 42. It can also prevent the heat dissipation hole (2) from passing through the air or direct air. Blowing to the device under test 2]. The assembly member includes an open channel and a plurality of alignment holes 411, and the opening 412 is formed in the support member 424 for receiving the card 42. Figure 5 is a perspective view showing the angle of the needle card 42 of the present invention and its associated assembly 41. Fig. 6 is a perspective view showing the combination of the card 42 and the member 41 of the present invention in the direction of Fig. 5. The opposite side of the picture card 42 and its associated assembly 41. Fig. 8 is a perspective view showing the combination of the needle card 42 of the present invention and its collocation assembly q: the direction of Fig. 7. 9 shows the cross-sectional view of FIG. 8 and the prior art, the needle measuring system 2 本 of the present invention, the probe card holder card 4 2 and the combination thereof 4 1 have at least the following advantages: k probe card The seat 24 has a wind tunnel in addition to the signal line. Nitrogen or cold air can be sent together when transmitting the measurement signal. The Phillips 42 can be screwed to the plurality of alignment holes Μ to the probe card holder 24, and the card test card 42 is parallel to the device under test 2 = the card test card 42 is provided with a heat dissipation hole 427 The nitrogen or cold air from the probe card holder 24 can be used to maintain the temperature uniformity and the temperature of the card 42 can be lowered. By means of the assembly 4 1 ', the needle card 42 prevents nitrogen or cold air from being blown directly toward the element 21 to be tested. The assembly 41 still has a chamber after the card 42 is combined. After entering the chamber through the heat dissipation hole, the nitrogen or cold air can flow in parallel and uniformly contact the needle card 42 201003079. And achieve the purpose of equal temperature cooling. The technical content and technical features of the present invention have been disclosed above, and those skilled in the art can still make alternatives and modifications in addition to the spirit of the present invention based on the teachings of the present invention. Therefore, the present invention should not be limited to those disclosed in the embodiments, but should include various alternatives and modifications, which are covered by the patent application scope of τ [a brief description of the drawings] FIG. 1 shows a needle measuring system; The relationship between the system and the component to be tested; Figure 3 shows the bottom structure of a probe card holder, Figure 4 and Figure 5 show the combination of the needle card and its combination. Figure 6 shows the needle card and its matching Figure 7 of the assembly shows the needle card; 5 I ® 】 card and its combination of the other - angle 8 shows the needle card and its combination of components Figure 9 shows a cross-sectional view of Figure 8. [Bit symbol description] The combination of the drawings is familiar with the various aspects of the protection from the perspective of the present invention; 9 degree stereo; and 11 pin measurement system 13 screw 16 slide 20 pin system 24 probe card holder 3 1 Base 33 registration hole 12 Cantilever beam 14 Probe card holder 18 Slide 21 Component to be tested 3 2 Wind tunnel 201003079 4 1 Assembly 4 1 1 Registration hole 4 1 5 Stop portion 42 1 Circuit board 4 2 4 Support 4 2 8 registration hole 4 2 needle test card 4 12 opening 4 1 6 pinch portion 423 pin tip 427 heat dissipation hole 10