TWI377581B - - Google Patents
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- Publication number
- TWI377581B TWI377581B TW99147186A TW99147186A TWI377581B TW I377581 B TWI377581 B TW I377581B TW 99147186 A TW99147186 A TW 99147186A TW 99147186 A TW99147186 A TW 99147186A TW I377581 B TWI377581 B TW I377581B
- Authority
- TW
- Taiwan
- Prior art keywords
- groove
- chassis
- rotating
- translational
- unit
- Prior art date
Links
- 230000007246 mechanism Effects 0.000 claims description 17
- 238000005096 rolling process Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 19
- 238000005259 measurement Methods 0.000 description 8
- 238000013519 translation Methods 0.000 description 5
- 230000014616 translation Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99147186A TW201129987A (en) | 2007-01-17 | 2007-01-17 | Rotation unit for 4-driving alignment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99147186A TW201129987A (en) | 2007-01-17 | 2007-01-17 | Rotation unit for 4-driving alignment mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201129987A TW201129987A (en) | 2011-09-01 |
| TWI377581B true TWI377581B (enExample) | 2012-11-21 |
Family
ID=48087832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99147186A TW201129987A (en) | 2007-01-17 | 2007-01-17 | Rotation unit for 4-driving alignment mechanism |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201129987A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201321120A (zh) * | 2011-11-22 | 2013-06-01 | Metal Ind Res & Dev Ct | 共平面三軸定位裝置 |
-
2007
- 2007-01-17 TW TW99147186A patent/TW201129987A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW201129987A (en) | 2011-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |