TWI370097B - Vacuum suction apparatus - Google Patents

Vacuum suction apparatus

Info

Publication number
TWI370097B
TWI370097B TW098109734A TW98109734A TWI370097B TW I370097 B TWI370097 B TW I370097B TW 098109734 A TW098109734 A TW 098109734A TW 98109734 A TW98109734 A TW 98109734A TW I370097 B TWI370097 B TW I370097B
Authority
TW
Taiwan
Prior art keywords
vacuum suction
suction apparatus
vacuum
suction
Prior art date
Application number
TW098109734A
Other languages
English (en)
Other versions
TW201034927A (en
Inventor
Chien Fa Wang
Ming Hui Chen
Wen Chun Chen
Kuo Hsih Teng
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW098109734A priority Critical patent/TWI370097B/zh
Priority to JP2009126936A priority patent/JP4994423B2/ja
Priority to KR1020090051127A priority patent/KR101068192B1/ko
Publication of TW201034927A publication Critical patent/TW201034927A/zh
Priority to JP2011154116A priority patent/JP5215437B2/ja
Application granted granted Critical
Publication of TWI370097B publication Critical patent/TWI370097B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
TW098109734A 2009-03-25 2009-03-25 Vacuum suction apparatus TWI370097B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW098109734A TWI370097B (en) 2009-03-25 2009-03-25 Vacuum suction apparatus
JP2009126936A JP4994423B2 (ja) 2009-03-25 2009-05-26 真空吸引装置
KR1020090051127A KR101068192B1 (ko) 2009-03-25 2009-06-09 진공 흡착 장치
JP2011154116A JP5215437B2 (ja) 2009-03-25 2011-07-12 真空吸引装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098109734A TWI370097B (en) 2009-03-25 2009-03-25 Vacuum suction apparatus

Publications (2)

Publication Number Publication Date
TW201034927A TW201034927A (en) 2010-10-01
TWI370097B true TWI370097B (en) 2012-08-11

Family

ID=43045096

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098109734A TWI370097B (en) 2009-03-25 2009-03-25 Vacuum suction apparatus

Country Status (3)

Country Link
JP (2) JP4994423B2 (zh)
KR (1) KR101068192B1 (zh)
TW (1) TWI370097B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105277868A (zh) * 2014-07-11 2016-01-27 致茂电子(苏州)有限公司 测试装置
TWI613449B (zh) * 2016-12-30 2018-02-01 致茂電子股份有限公司 吸附式測試裝置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013240870A (ja) * 2012-05-22 2013-12-05 Kansai Univ 把持装置
JP6181799B1 (ja) * 2016-04-01 2017-08-16 ソウ テクノロジー カンパニー、リミテッド 半導体ストリップグラインダー
TWI670784B (zh) * 2016-10-05 2019-09-01 啟端光電股份有限公司 真空吸取裝置
US10978332B2 (en) * 2016-10-05 2021-04-13 Prilit Optronics, Inc. Vacuum suction apparatus
CN107263410A (zh) * 2017-06-19 2017-10-20 杨煜海 一种汽车配件加工用支撑台
CN108705690B (zh) * 2018-05-29 2020-08-25 新昌县皇骐电子科技有限公司 一种半导体晶圆划片机
CN109256351B (zh) * 2018-09-20 2021-06-08 南方科技大学 微型芯片的批量转移装置以及转移方法
CN112850149A (zh) * 2021-01-13 2021-05-28 深圳市明信测试设备股份有限公司 一种简易传送机构装置
CN113305601A (zh) * 2021-06-16 2021-08-27 嘉兴职业技术学院 一种数控机床自适应定位装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03232640A (ja) * 1990-02-05 1991-10-16 Mitsubishi Electric Corp 吸着装置
JPH05305592A (ja) * 1992-04-28 1993-11-19 Sony Corp 真空チャック
JPH06238589A (ja) * 1993-02-12 1994-08-30 Natl House Ind Co Ltd ワーク吸着装置
JPH06270087A (ja) * 1993-03-22 1994-09-27 Ebara Corp 真空吸着装置
JPH1034580A (ja) * 1996-07-22 1998-02-10 Sekisui Chem Co Ltd 水硬性無機質成形体の移送装置及び脱型装置
JP2001267271A (ja) 2000-03-22 2001-09-28 Yoshioka Seiko:Kk 吸着装置
JP2006319182A (ja) * 2005-05-13 2006-11-24 Toyota Motor Corp 吸着保持装置
JP2007322806A (ja) 2006-06-01 2007-12-13 Nsk Ltd 露光装置の基板保持機構

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105277868A (zh) * 2014-07-11 2016-01-27 致茂电子(苏州)有限公司 测试装置
CN105277868B (zh) * 2014-07-11 2018-06-26 致茂电子(苏州)有限公司 测试装置
TWI613449B (zh) * 2016-12-30 2018-02-01 致茂電子股份有限公司 吸附式測試裝置

Also Published As

Publication number Publication date
JP2010228909A (ja) 2010-10-14
JP5215437B2 (ja) 2013-06-19
JP2011238954A (ja) 2011-11-24
JP4994423B2 (ja) 2012-08-08
KR101068192B1 (ko) 2011-09-28
KR20100107368A (ko) 2010-10-05
TW201034927A (en) 2010-10-01

Similar Documents

Publication Publication Date Title
GB2487168B (en) Vacuum Cleaner
EP2498837A4 (en) SLEEPING APPARATUS
EP2469096A4 (en) VACUUM PUMP
PL2509484T3 (pl) Odkurzacz
TWI370097B (en) Vacuum suction apparatus
PL2409317T3 (pl) Urządzenie do obróbki próżniowej
EP2420173A4 (en) VACUUM CLEANER
GB2474507B (en) Vacuum pump
EP2420172A4 (en) VACUUM
ZA201103757B (en) Vacuum processing apparatus
GB2470109B (en) Vacuum cleaner
GB0907607D0 (en) Vacuum pump
EP2512550A4 (en) Suction device
GB2472638B (en) Vacuum system
GB2475254B (en) Vacuum pump
GB2469313B (en) Vacuum cleaner
EP2497403A4 (en) VACUUM CLEANER
AU330002S (en) Vacuum cleaner
TWI369968B (en) Vacuum cleaner
EP2422672A4 (en) VACUUM CLEANER
GB0907606D0 (en) Improved monovane vacuum pump
ZA201203553B (en) Suction device
GB2471352B (en) Vacuum cleaner
GB0907298D0 (en) Vacuum pump
TWM373743U (en) Hermetic sputum suction device