201034927 1V/A->V 30542twf.doc/n 六、發明說明： 【發明所屬之技術領域】 本發明疋有關於一種真空吸附裝置（vacuum sucti〇n apparatus)，且特別是有關於一種能夠自動調整吸附範圍的 真空吸附裝置。 【先前技術】 真空吸附裝置通常被應用於板材（如晶圓、玻璃基 板、電路板、膜片等）的運送上，針對不同的板材尺寸與 形狀，真空吸附裝置的吸嘴孔之設置位置便須做一定程^ 的調整，方可穩定地將板材吸附並傳遞至目的地。傳統的 真空吸附裝置中的吸嘴孔之數量與位置會對應於所欲傳遞 之板材的尺寸與形狀。一般而言，若要吸附不同尺寸與形 狀的板材，製造者須更換真空吸附裝置的吸嘴平台，以使 得吸嘴平台上的吸嘴孔之數量與位置能夠對應於所欲吸附 之板材。然而，更換吸嘴平台將導致時間與成本的龐大負 擔。 、 在不更換吸嘴平台的前提下’已有許多習知技術相繼 地提出解決方案，以使真空吸附裝置能夠穩定地吸附並傳 遞更多種規格的板材’如中華民國專利TW266374、中華 民國專利公開案TW 200716473、中華民國專利TW 527048 等。在中華民國專利TW 266374以及中華民國專利公開案 =W^_6473中，真空賴裝置會具有多個吸嘴孔，且 部分未被板材所覆蓋的吸嘴孔必須藉由螺絲或其他堵塞元 201034927 /\υυ〇ιυυ6 30542twf.doc/n 件封住，以避免漏氣的現象產生，如此，真空吸附裝置才 能，定地吸附住板材。在吸附不同尺寸與形狀的板材時， 堵塞元件必須透過人力組裝於不同的吸嘴孔内，此舉十分 耗時且不利於量產。 【發明内容】 〇 ❹ 本發明提供-種真空吸附裝置，其吸附範圍可隨著所 欲吸附的板材尺寸而調整。 本發明提供一種能夠吸附板材之真空吸附裝置，其包 括-吸嘴平自、—錢、至少—活動觸發元件(_敲 trigger)以及一抽氣機(air_extract〇r)。吸嘴平台具有一與板 材接觸之接觸表面以及至少—位於接觸表面上^吸嘴; 座體與吸嘴平台連接，且吸嘴平台與座體共同定義出一斑 吸嘴孔連通之真空室。活動觸發元件叙裝於吸嘴孔中，其 中活動觸發元件具有一突出於接觸表面之接觸部以及一能 吸嘴孔與真空室連通之阻擋部，#板材與接觸表面 接觸^，板材推動接觸部而改變活動觸發元特吸嘴孔内 ^大，’以使阻擒部無法阻礙吸嘴孔與真空室連通 機與真空室連通。 在本發明-實施例中，前述之吸嘴孔的數量為多個， 且前述之吸嘴孔例如是規則地(regulady)或是任意地 (randomly)排列於接觸表面上。 f本發明一實施例中’當板材與接觸表面接觸時，活 動觸發元件會被完全推入吸嘴孔内。 在本發明一實施例_，前述之吸嘴平台具有至少一位 5 201034927 iwjvolkjljv 30542twf.doc/n 於吸嘴孔__，而活_發元件包括— 與阻擔部之_連接部，且連接部承靠於卜 上，以使活動觸發元件以突起為支點轉動。 在本發明-實施例中，前述之吸嘴孔包括—用以 活動觸發元件之容触間从—連接於容齡間盥直允室 之間的貫孔’而在接觸部未與板材接觸之前，阻擋部承靠 於容納空間的底部以完全輯貫孔，且在板材推動接觸部 之後，阻擋部會被抬起而使貫孔與容納空間連通。 在本發明一實施例中，前述之吸嘴平台具有至少一位 於吸嘴孔_突起，而活_發元件包括—連接於接觸 與阻擔部之間的連接部’且連接部枢接於(piv〇taiiy connected with)突起’以使;鴻觸發元件以突起為姉轉 動。 在本發明一實施例中，前述之吸嘴孔包括—用以容納 活動觸發元件之容納空間以及一連接於容納空間與真空室 之間的貫孔，而在接觸部未與板材接觸之前，阻擋部承靠 於容納空間的底部以完姐擔貫孔，且在板獅動接觸部 之後，阻擋部會被抬起而使貫孔與容納空間連通。 在本發明一實施例中，前述之吸嘴平台具有一相對於 接觸表面之内表面，接觸部與阻擋部直接連接，而在接觸 部未與板材接觸之前，阻擋部承靠於吸嘴平台的内表面以 兀全阻播吸嘴孔，且在板材推動接觸部之後，阻擋部會被 頂起而使吸嘴孔與真空室連通。 在本發明一實施例中，前述之阻擋部位於吸嘴孔外。 在本發明一實施例中，前述之抽氣機包括一真空泵。 201034927. v ……30542twf.doc/n 在本發明一實施例中 包括-配置於吸嘴之真空吸附裝置可進—步 協助工動觸發元件在:被 株上逑’由於本發明能夠透過板材推動活動觸發元 2ΓΓΓ錢活動觸發元件在吸嘴孔内的狀態，因此 X之’、工吸附裝置能乡自自動調整其吸附範圍。201034927 1V/A->V 30542twf.doc/n VI. Description of the Invention: [Technical Field] The present invention relates to a vacuum sucti〇n apparatus, and in particular to an automatic A vacuum adsorption device that adjusts the adsorption range. [Prior Art] Vacuum adsorption devices are usually applied to the transportation of sheets (such as wafers, glass substrates, circuit boards, diaphragms, etc.). For different plate sizes and shapes, the position of the nozzle holes of the vacuum adsorption device is set. The adjustment of a certain distance must be made to stably adsorb and transfer the sheet to the destination. The number and position of the nozzle holes in a conventional vacuum adsorption device will correspond to the size and shape of the sheet to be transferred. In general, in order to adsorb sheets of different sizes and shapes, the manufacturer must replace the nozzle platform of the vacuum adsorption device so that the number and position of the nozzle holes on the nozzle platform can correspond to the sheet to be adsorbed. However, replacing the nozzle platform will result in a huge burden of time and cost. Without replacing the nozzle platform, there are many conventional technologies that have successively proposed solutions to enable the vacuum adsorption device to stably adsorb and transfer more types of plates, such as the Republic of China patent TW266374 and the Republic of China patent. Publication TW 200716473, Republic of China Patent TW 527048, etc. In the Republic of China patent TW 266374 and the Republic of China patent publication = W^_6473, the vacuum-laid device will have a plurality of nozzle holes, and some of the nozzle holes not covered by the plate must be screwed or other blocked elements 201034927 / \υυ〇ιυυ6 30542twf.doc/n pieces are sealed to avoid air leakage, so that the vacuum adsorption device can hold the plate in a fixed position. When absorbing sheets of different sizes and shapes, the clogging elements must be manually assembled into different nozzle holes, which is time consuming and unfavorable for mass production. SUMMARY OF THE INVENTION The present invention provides a vacuum adsorption apparatus whose adsorption range can be adjusted in accordance with the size of a sheet to be adsorbed. The present invention provides a vacuum adsorption apparatus capable of adsorbing a sheet material, which comprises - a nozzle, a cigarette, at least an active triggering element (_knocking trigger), and an air extractor (air_extractor). The nozzle platform has a contact surface in contact with the sheet material and at least - a nozzle on the contact surface; the seat body is coupled to the nozzle platform, and the nozzle platform and the seat body define a vacuum chamber in which the nozzle holes communicate. The movable triggering element is embodied in the nozzle hole, wherein the movable triggering element has a contact portion protruding from the contact surface and a blocking portion capable of communicating with the vacuum chamber, and the plate contacts the contact surface, and the plate pushes the contact portion. The change activity triggers the inside of the nozzle hole to be large, so that the obstruction portion cannot block the nozzle hole and the vacuum chamber connecting machine from communicating with the vacuum chamber. In the present invention-embodiment, the number of the nozzle holes is plural, and the aforementioned nozzle holes are, for example, regularly or arbitrarily arranged on the contact surface. In an embodiment of the invention, when the sheet comes into contact with the contact surface, the active triggering element is pushed completely into the nozzle opening. In an embodiment of the present invention, the nozzle platform has at least one bit of 5 201034927 iwjvolkjljv 30542twf.doc/n in the nozzle hole __, and the live element includes a connection portion with the blocking portion and is connected The part is supported by the disc so that the movable triggering element rotates with the protrusion as a fulcrum. In the present invention-embodiment, the aforementioned nozzle hole includes - a contact hole for the movable triggering member to be connected to the through hole between the intermediate length and the direct chamber, and before the contact portion is not in contact with the sheet, The blocking portion bears against the bottom of the accommodating space to completely align the hole, and after the plate pushes the contact portion, the blocking portion is lifted to communicate the through hole with the accommodating space. In an embodiment of the invention, the nozzle platform has at least one protrusion in the nozzle hole, and the living element includes a connection portion connected between the contact and the blocking portion, and the connecting portion is pivotally connected to ( Piv〇taiiy connected with) protrusions; so that the trigger element rotates with the protrusions. In an embodiment of the invention, the nozzle hole includes a receiving space for accommodating the movable triggering element and a through hole connected between the receiving space and the vacuum chamber, and blocking before the contact portion contacts the plate. The part bears against the bottom of the accommodating space to pass through the hole, and after the lion's moving contact portion, the blocking portion is lifted to connect the through hole with the accommodating space. In an embodiment of the invention, the nozzle platform has an inner surface opposite to the contact surface, and the contact portion is directly connected to the blocking portion, and the blocking portion bears against the nozzle platform before the contact portion is not in contact with the plate member. The inner surface is fully blocked by the nozzle hole, and after the plate pushes the contact portion, the blocking portion is lifted up to allow the nozzle hole to communicate with the vacuum chamber. In an embodiment of the invention, the blocking portion is located outside the nozzle hole. In an embodiment of the invention, the aforementioned air extractor includes a vacuum pump. 201034927. v ......30542 twf.doc/n In one embodiment of the invention, the vacuum absorbing device disposed in the nozzle can further assist the urging trigger element in: The activity trigger element 2 saves the activity of the component in the nozzle hole state, so the X's, the work adsorption device can automatically adjust its adsorption range.
為讓本發明之上述特徵和優點能更鴨祕，下文特 牛只施例’並配合所附_作詳細說明如下。 【實施方式】 【第一實施例】 圖1A至圖1D是依照本發明第一實施例之真空吸附 装置的剖面示意圖。請參照圖1A與圖1B，本實施例之真 空吸附裝置100包括一吸嘴平台11〇、一座體12〇、至少一 活動觸發元件130以及一抽氣機14〇。吸嘴平台11〇具有 與板材P接觸之接觸表面110a以及至少一位於接觸表面 110a上之吸嘴孔11〇b。座體12〇與吸嘴平台n〇連接且 吸嘴平台U0與座體120共同定義出一與吸嘴孔110b連通 之真空室V。活動觸發元件130組裝於吸嘴孔110b中，其 中活動觸發元件130具有一突出於接觸表面11〇3之接觸部 132以及一能夠阻礙吸嘴孔110b與真空室V連通之阻擋部 134 ¥板材P與接觸表面1 l〇a接觸時，板材P會推動接 觸部132而改變活動觸發元件130在吸嘴孔u〇t>内的狀 恶’以使阻擋部134無法阻礙吸嘴孔ii〇b與真空室v連 通。此外，抽氣機140與真空室v連通。在本實施例中， 7 201034927 AUU81U130 30542twf.doc/n 抽氣機140例如是一真空泵(vacuum pUmp)。 在本實施例中，真空室V泛指能夠承受氣壓低於外界 大計壓力之腔室’此處並不限定真空室v必須是處於完全 真空的狀態。當真空吸附裝置1〇〇在運作時，真空室V的 真工程度可視所欲吸附之板材p的重量而決定，顯然，當 真空吸附裝置100所欲吸附之板材P的重量越重時，其真 空室V的真空程度便須越高，反之，當真空吸附裝置100 所欲吸附之板材p的重量越輕時，其真空室V的真空程度 則無須太高。 '、 在本實施例中，吸嘴孔110b的數量可為多個，且這 些吸嘴孔110b例如是任意地(rand〇mly)或規則地 排列於接觸表面110 a上。此領域具有通常知識者應知，吸 ，孔11%的數i與分佈位置可視製造者的實際需求而決 疋，本實施例並不限定吸嘴孔11〇b的數量與分佈位置。 如圖1A與圖1B所示’吸嘴孔腿包括一用以容納 $觸發元件BG之容納空間s以及—連接於容納空間s 〜、空室C之間的貫孔η。此外，吸嘴平台11〇具有至少 =於吸嘴孔ll〇a内的突起聰，而活動觸發元件請 匕括-連接於接觸部132與阻擔部m之間的連接部 ，且連接部136承靠於突起n〇c上。 中於ί接觸部132未與板材P接觸之前，接卿132會突 出於接觸表面ll〇a，而阻擋部134則合承素 的底部以完擋貫田？4則曰承罪於谷納空間S a U兀王阻榀貝孔Η，如圖1A所繪示。此時，直处 =與容納空間S之間無法藉由貫孔H相連通，換：之二 k時候的吸嘴孔ma不具有吸附板材p的功能。值^注意 201034927 …3〇542twf.d〇c/n 的疋=本實施例可以透過配重設計使得活動觸發元件I% 的阻擋部134自然地承靠於容納空間s的底部，以封住容 納二間S與貝孔H的連通處。舉例而言，製造者可讓阻擋 部134的重置大於接觸部132的重量。此外，在以突起u〇c 為支點的情況下，製造者可讓阻擔部134所造成的旋轉力 矩大於接觸部132所造成的旋轉力矩。 請f照圖1B，當真空吸附裝置1〇〇沿著重力方向的 反方向罪近板材P並對板材p進行吸附的動作時，板材p 〇 會壓迫並推動突出於接觸表面110a之接觸部132，此時， 由於板材P的重量大於阻擋部134的重量，因此活動觸發 兀件130會以突起110c為支點轉動，意即，阻擋部^4 會被抬起而使真空室V與容納空間s透過貫孔H 這時候的吸嘴孔110a便具有吸附板材p的功能。值得注意 的疋，备板材P推動接觸部132後，活動觸發元件13〇合 被完全推入吸嘴孔l10b内，以使板材p因真空吸引而^ 貼於與接觸表面ll〇a上。此處，容納空間s的設計以能夠 完全容納轉動後之活動觸發元件13〇為原則， =限 ❹ 定容納空間s的形狀必須是如圖1A所繪·示。x 請參照圖1B至圖1D，本實施例之3真空吸附裝置ι〇〇 能夠吸附各種規格（不同尺寸與形狀）的板材p，卷 P尺寸與吸嘴平台110相當時（如圖1B所繪示），^材p 可覆蓋住所有的吸嘴孔110b’以將所有的活動觸發元件 130壓入吸嘴孔110b内，此時，所有的吸嘴孔都具 有吸附板材p的功能。當板材p尺寸明顯小於吸嘴平台11〇 時（如圖1C與1D所繪示），板材p僅會覆蓋住部分的吸 9 201034927 AU0810136 30542twf.doc/n 嘴孔110b ’此時’僅有部分被板材P所覆蓋的吸嘴孔丨10b 會具有吸附板材P的功能，其餘未被板材p所覆蓋的吸嘴 孔110b則不具有吸附板材p的功能。從圖ic與id可知， 本實施例之真空吸附裝置100具有自動調整吸附範圍的能 力’且板材P可以被吸附於吸嘴平台110上的任意位置， 而不易有板材P意外掉落的問題。 圖1A至圖1D中所繪示的真空吸附裝置1〇〇僅是用 以舉例說明’其並非用以限定本發明。以下將搭配圖2A 至圖6B說明其他可行的實施方式。 〇 圖2A至圖6B是真空吸附裝置的局部放大示意圖。首 先請參照圖2A與圖2B，真空吸附裝置1〇〇可進一步包括 一配置於吸嘴平台110與活動觸發元件130之間的彈性體 150，以協助活動觸發元件130在未被板材p推動的情況 下復位。在本實施例中，彈性體150例如是一彈簧，在活 動觸發元件130在未被板材P壓迫的情況下，彈性體150 可用以支撐活動觸發元件130的接觸部132，如圖2A所 示。當活動觸發元件130被板材P下壓時，彈性體150亦 會被接觸部132壓迫，如圖2B所示。此時，被壓迫的彈 〇 性體150能夠提供一將接觸部132上抬之回復力，以使活 動觸發元件130在未被板材P壓迫時能夠順利復位。 請參照圖3A與圖3B，彈性體150亦可配置於吸嘴平 台110與阻擋部134之間。在活動觸發元件130在未被板 材P壓迫的情況下’彈性體150可用以避免活動觸發元件 130的阻擋部134上抬，如圖3A所示。當活動觸發元件 130被板材P下壓時，彈性體150亦會被阻擋部134壓迫， 10 6 30542twf.doc/n 201034927 Λ X V-f X V A _> 如圖3Β所示。此時，被壓迫的彈性體15〇能夠提供一將 阻擋部134下壓之回復力，以使活動觸發元件13〇在未被 板材Ρ壓迫時能夠順利復位。 請麥照圖4Α與圖4Β，在本實施例中，活動觸發元件 130的連接部136樞接於突起n〇c，以使活動觸發元件13〇 以突起110c為樞軸轉動。舉例而言，活動觸發元件13〇 透過一轴承A樞設於突起11〇()上，軸承A可以有效地控 制活動觸發元件130的轉動範圍，使活動觸發元件13〇能 〇 夠在未被板材p下壓時順利復位。此外，真空吸附裝置1〇〇 可進一步包括一配置於吸嘴平台110與活動觸發元件13〇 之間的彈性體150’，以協助活動觸發元件13〇在未被板材 P推動的情況下復位，如圖5A、圖5B、圖6A以及圖6B 所繪示。圖5A、圖5B、圖6A以及圖0B中的彈性體150, 配置方式與2A、圖2B、圖3A以及圖3B中的彈性體150 類似，故於此不再重述。 【弟二實施例】 ❹ 圖7A與圖7B是依照本發明第二實施例之真空吸附裝 置的剖面示意圖。本實施例之真空吸附裝置2〇〇包括一吸 嘴平台210、一座體220、至少—活動觸發元件23〇以及一 抽氣機240。吸嘴平台210具有一與板材P接觸之接觸表 面210a以及至少一位於接觸表面21〇a上之吸嘴孔21〇b。 座體220與吸嘴平台210連接，且吸嘴平台21〇與座體22〇 共同疋義出一與吸嘴孔210b連通之真空室V。活動觸發元 件230組裝於吸嘴孔210b中，其中活動觸發元件23〇具有 犬出於接觸表面210a之接觸部232以及一能夠阻礙吸嘴 201034927 Λ,υυοιυι^ο 30542twf. doc/n 孔210b與真空室V連通之阻擋部234，當板材p與接觸 表面210a接觸時’板材p會推動接觸部232而改變活動觸 發元件230在吸嘴孔210b内的狀態，以使阻擋部234無法 阻礙吸嘴孔210b與真空室V連通。此外，抽氣機24〇與 真空室V連通。在本實施例中，抽氣機240例如是一真空 泵(vacuum pump) ° 由圖7A與圖7B可知’吸嘴平台210具有一相對於接 觸表面210a之内表面210c，接觸部232與阻擋部234直 接連接，且阻擋部234位於吸嘴孔210a外。在接觸部232 未與板材P接觸之前，阻擋部234會承靠於吸嘴平台21〇 的内表面210c上，以完全阻擋吸嘴孔21〇b，此時，吸嘴 孔210b不具有吸附板材p的功能。當真空吸附裝置2⑻ 沿著重力方向靠近板材P並對板材p進行吸附的動作時， 與板材P接觸的活動觸發元件230會被頂起而使真空室γ 與吸嘴孔210b相連通，這時候的吸嘴孔21〇a便具有吸 板材P的功能。 值得注意的是，本實施例之真空吸附裝置2〇〇中亦可 選擇性地設置彈性體，如彈簧、彈片等，以協助活 元件順利独。 Μ 基於上述’由於本發明能夠透過板材推動活動觸發元 件的接觸部以改變活動觸發元件在吸嘴孔内的狀態，因此 本發明之真空吸附裝置能夠自動調整其吸附範圍，以吸附 任意形狀與任意尺寸之板材。 雖然本發明已以實施例揭露如上，然其並非用以限定 本發明’任何所屬技術領域中具有通常知識者，在不脫雜 12 30542twf.doc/n 201034927 本發明之精神和範圍内，當可作些許之更動與潤飾，故本 發明之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1A至圖1D是依照本發明第一實施例之真空吸附 裝置的剖面示意圖。 圖2A至圖6B是真空吸附裝置的局部放大示意圖。 圖7A與圖7B是依照本發明第二實施例之真空吸附裝 〇 置的剖面示意圖。 【主要元件符號說明】 100、200 :真空吸附裝置 110、210 :吸嘴平台 110a、210a :接觸表面 110b、210b :吸嘴孔 110c、210c :突起 q 120、220 :座體 130、230 :活動觸發元件 132、232 :接觸部 134、234 :阻擋部 136 :連接部 140、240 :抽氣機 150、150’ ：彈性體 210c :内表面 13 201034927 Λυυδίυυο 30542twf.doc/n A :軸承 Η :貫孔 Ρ :板材 S:容納空間 V :真空室In order to make the above features and advantages of the present invention more versatile, the following detailed description will be given below with reference to the accompanying drawings. [First Embodiment] Figs. 1A to 1D are schematic cross-sectional views showing a vacuum adsorption apparatus according to a first embodiment of the present invention. Referring to FIG. 1A and FIG. 1B, the vacuum adsorption device 100 of the present embodiment includes a nozzle platform 11〇, a body 12〇, at least one movable triggering component 130, and an air extractor 14〇. The nozzle platform 11A has a contact surface 110a in contact with the sheet P and at least one nozzle hole 11b on the contact surface 110a. The seat body 12 is coupled to the nozzle platform n〇 and the nozzle platform U0 and the base body 120 define a vacuum chamber V that communicates with the nozzle hole 110b. The movable triggering element 130 is assembled in the nozzle hole 110b, wherein the movable triggering element 130 has a contact portion 132 protruding from the contact surface 11〇3 and a blocking portion 134 capable of blocking the nozzle hole 110b from communicating with the vacuum chamber V. When in contact with the contact surface 1 l〇a, the sheet P pushes the contact portion 132 to change the shape of the movable triggering member 130 in the nozzle hole u〇t> so that the blocking portion 134 cannot obstruct the nozzle hole ii〇b and The vacuum chamber v is connected. Further, the air blower 140 is in communication with the vacuum chamber v. In the present embodiment, 7 201034927 AUU81U130 30542twf.doc/n The air extractor 140 is, for example, a vacuum pump (vacuum pUmp). In the present embodiment, the vacuum chamber V generally refers to a chamber capable of withstanding a pressure lower than the outside world pressure. Here, it is not limited that the vacuum chamber v must be in a completely vacuum state. When the vacuum adsorption device 1 is in operation, the true degree of the vacuum chamber V can be determined by the weight of the sheet p to be adsorbed. Obviously, when the weight of the sheet P to be adsorbed by the vacuum adsorption device 100 is heavier, The vacuum chamber V must have a higher degree of vacuum. Conversely, when the weight of the sheet p to be adsorbed by the vacuum adsorption device 100 is lighter, the vacuum level of the vacuum chamber V does not need to be too high. In the present embodiment, the number of the nozzle holes 110b may be plural, and the nozzle holes 110b are, for example, arbitrarily arranged or regularly arranged on the contact surface 110a. It is known to those skilled in the art that the number i and the distribution position of the suction and hole 11% can be determined by the actual needs of the manufacturer. This embodiment does not limit the number and distribution position of the nozzle holes 11〇b. As shown in Figs. 1A and 1B, the nozzle hole includes a receiving space s for accommodating the trigger member BG and a through hole η connected between the accommodating space s 〜 and the empty chamber C. In addition, the nozzle platform 11A has a protrusion at least in the nozzle hole 11a, and the movable triggering element includes a connection portion connected between the contact portion 132 and the blocking portion m, and the connecting portion 136 Rely on the protrusion n〇c. Before the ί contact portion 132 is not in contact with the sheet P, the splicing portion 132 protrudes from the contact surface ll 〇 a, and the blocking portion 134 is joined to the bottom of the stalk to complete the stalk? 4 曰 曰 于 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷At this time, the straight line = is not communicated with the accommodating space S by the through hole H, and the nozzle hole ma at the time of the second k does not have the function of adsorbing the sheet p. Value ^ Note 201034927 ... 3 〇 542 twf.d 〇 c / n 疋 = This embodiment can be made through the weight design so that the blocking portion 134 of the active triggering element I% naturally bears against the bottom of the accommodation space s to seal the accommodation The intersection of two S and the shell hole H. For example, the manufacturer can have the reset of the blocking portion 134 greater than the weight of the contact portion 132. Further, in the case where the projection u 〇 c is used as a fulcrum, the manufacturer can cause the rotational torque caused by the blocking portion 134 to be larger than the rotational moment caused by the contact portion 132. Referring to FIG. 1B, when the vacuum adsorption device 1 smashes the sheet P and adsorbs the sheet p in the opposite direction of the gravity direction, the sheet p 压 presses and pushes the contact portion 132 protruding from the contact surface 110a. At this time, since the weight of the sheet P is larger than the weight of the blocking portion 134, the movable triggering member 130 is rotated with the protrusion 110c as a fulcrum, that is, the blocking portion 4 is lifted to make the vacuum chamber V and the accommodating space s The nozzle hole 110a passing through the through hole H at this time has the function of adsorbing the sheet p. It is noted that after the plate member P pushes the contact portion 132, the movable triggering member 13 is completely pushed into the nozzle hole l10b, so that the plate p is attached to the contact surface 11a due to vacuum suction. Here, the design of the accommodating space s is based on the principle that the movable triggering element 13 can be completely accommodated, and the shape of the accommodating space s must be as shown in Fig. 1A. x Referring to FIG. 1B to FIG. 1D, the vacuum adsorption device ι of the present embodiment can adsorb sheets p of various specifications (different sizes and shapes), and the volume P is equivalent to the nozzle platform 110 (as shown in FIG. 1B). The material p can cover all the nozzle holes 110b' to press all the movable trigger elements 130 into the nozzle holes 110b. At this time, all the nozzle holes have the function of adsorbing the sheet p. When the sheet p size is significantly smaller than the nozzle platform 11〇 (as shown in Figures 1C and 1D), the sheet p will only cover part of the suction 9 201034927 AU0810136 30542twf.doc / n mouth hole 110b 'this time only part The nozzle hole 10b covered by the sheet P has the function of adsorbing the sheet P, and the remaining nozzle hole 110b not covered by the sheet p does not have the function of adsorbing the sheet p. As is apparent from Figs. 2 and id, the vacuum adsorption apparatus 100 of the present embodiment has the ability to automatically adjust the adsorption range and the sheet material P can be adsorbed to any position on the nozzle stage 110, and the sheet P is unlikely to fall accidentally. The vacuum adsorption apparatus 1 illustrated in Figures 1A through 1D is for illustrative purposes only and is not intended to limit the invention. Other possible embodiments will be described below in conjunction with Figures 2A-6B. 2A to 6B are partially enlarged schematic views of the vacuum adsorption device. Referring first to FIG. 2A and FIG. 2B, the vacuum adsorption device 1A may further include an elastic body 150 disposed between the nozzle platform 110 and the movable triggering member 130 to assist the movable triggering member 130 to be pushed by the plate p. Reset in case. In the present embodiment, the elastomer 150 is, for example, a spring that can be used to support the contact portion 132 of the movable triggering element 130, as shown in Figure 2A, in the event that the active triggering element 130 is not forced by the sheet P. When the movable triggering member 130 is pressed by the sheet P, the elastic body 150 is also pressed by the contact portion 132 as shown in Fig. 2B. At this time, the pressed elastic body 150 can provide a restoring force for lifting the contact portion 132 so that the movable triggering member 130 can be smoothly reset without being pressed by the plate member P. Referring to Figures 3A and 3B, the elastic body 150 may also be disposed between the nozzle platform 110 and the blocking portion 134. In the event that the active triggering element 130 is not pressed by the sheet P, the elastomer 150 can be used to avoid lifting of the blocking portion 134 of the movable triggering element 130, as shown in Figure 3A. When the movable triggering member 130 is pressed by the sheet P, the elastic body 150 is also pressed by the blocking portion 134, as shown in Fig. 3A. At this time, the pressed elastic body 15 can provide a restoring force for pressing the blocking portion 134 so that the movable triggering member 13 can be smoothly reset without being pressed by the sheet. In the present embodiment, the connecting portion 136 of the movable triggering member 130 is pivotally connected to the projection n〇c so that the movable triggering member 13 is pivoted by the projection 110c. For example, the movable triggering element 13 is pivotally disposed on the protrusion 11 〇 through a bearing A, and the bearing A can effectively control the range of rotation of the movable triggering component 130 so that the movable triggering component 13 can be smashed by the plate. When p is pressed, it is smoothly reset. In addition, the vacuum adsorption device 1A may further include an elastic body 150' disposed between the nozzle platform 110 and the movable triggering member 13A to assist the movable triggering member 13 to be reset without being pushed by the plate P. 5A, 5B, 6A, and 6B. The elastic body 150 in FIGS. 5A, 5B, 6A, and 0B is similar in configuration to the elastic body 150 in 2A, 2B, 3A, and 3B, and thus will not be described again. [Second Embodiment] Fig. 7A and Fig. 7B are schematic cross-sectional views showing a vacuum suction apparatus according to a second embodiment of the present invention. The vacuum adsorption device 2 of the present embodiment includes a nozzle platform 210, a body 220, at least an activity triggering member 23A, and an air extractor 240. The nozzle platform 210 has a contact surface 210a in contact with the sheet P and at least one nozzle opening 21b on the contact surface 21A. The base 220 is coupled to the nozzle platform 210, and the nozzle platform 21 and the base 22 疋 together define a vacuum chamber V that communicates with the nozzle hole 210b. The movable triggering element 230 is assembled in the nozzle hole 210b, wherein the movable triggering element 23 has a contact portion 232 of the canine from the contact surface 210a and a can block the nozzle 201034927 Λ, υυοιυι^ο 30542twf. doc/n hole 210b and vacuum The chamber V is connected to the blocking portion 234. When the sheet p is in contact with the contact surface 210a, the sheet p pushes the contact portion 232 to change the state of the movable triggering member 230 in the nozzle hole 210b, so that the blocking portion 234 cannot block the nozzle hole. 210b is in communication with the vacuum chamber V. Further, the air extractor 24 is in communication with the vacuum chamber V. In the present embodiment, the air extractor 240 is, for example, a vacuum pump. As can be seen from FIGS. 7A and 7B, the nozzle platform 210 has an inner surface 210c with respect to the contact surface 210a, and the contact portion 232 and the blocking portion 234. Directly connected, and the blocking portion 234 is located outside the nozzle hole 210a. Before the contact portion 232 is not in contact with the sheet P, the blocking portion 234 bears against the inner surface 210c of the nozzle platform 21〇 to completely block the nozzle hole 21〇b. At this time, the nozzle hole 210b does not have the adsorption sheet. The function of p. When the vacuum suction device 2 (8) approaches the sheet P in the direction of gravity and adsorbs the sheet p, the movable triggering member 230 in contact with the sheet P is lifted up to connect the vacuum chamber γ with the nozzle hole 210b. The nozzle hole 21〇a has the function of sucking the sheet P. It should be noted that the vacuum adsorption device 2 of the embodiment may also selectively provide an elastic body such as a spring, a spring, or the like to assist the living element to be smoothly and uniquely. Μ Based on the above description, since the contact portion of the movable triggering member can be pushed through the plate to change the state of the movable triggering member in the nozzle hole, the vacuum adsorption device of the present invention can automatically adjust its adsorption range to adsorb any shape and arbitrary. Size plate. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention to those of ordinary skill in the art, without departing from the spirit and scope of the present invention, 12 30542 twf.doc/n 201034927 The scope of protection of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Figs. 1A to 1D are schematic cross-sectional views showing a vacuum adsorption apparatus according to a first embodiment of the present invention. 2A to 6B are partial enlarged schematic views of a vacuum adsorption device. 7A and 7B are schematic cross-sectional views showing a vacuum adsorption device in accordance with a second embodiment of the present invention. [Main component symbol description] 100, 200: vacuum adsorption device 110, 210: nozzle platform 110a, 210a: contact surface 110b, 210b: nozzle hole 110c, 210c: protrusion q 120, 220: seat 130, 230: active Triggering elements 132, 232: contact portions 134, 234: blocking portion 136: connecting portions 140, 240: air extractors 150, 150': elastic body 210c: inner surface 13 201034927 Λυυ δίυυο 30542twf.doc/n A : bearing Η : Hole: Plate S: accommodation space V: vacuum chamber