CN101531007B - Vacuum adsorption device - Google Patents
Vacuum adsorption device Download PDFInfo
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- CN101531007B CN101531007B CN2009101351127A CN200910135112A CN101531007B CN 101531007 B CN101531007 B CN 101531007B CN 2009101351127 A CN2009101351127 A CN 2009101351127A CN 200910135112 A CN200910135112 A CN 200910135112A CN 101531007 B CN101531007 B CN 101531007B
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Abstract
The invention provides a vacuum adsorption device which includes a nozzle platform, a seat body, at least one movable trigger element and an air pump. The nozzle platform has a contact surface contacted with a plate material and at least one nozzle hole located on the contact surface, the seat body connects with the nozzle platform, and the nozzle platform and the seat body define a vacuum chamber communicated with the nozzle hole altogether. The movable trigger element is assembled in the nozzle hole, wherein, the movable trigger element has a contact part extruded to the contact surface, and a block part for preventing the nozzle hole communicating with the vacuum chamber, when the plate material contacts with the contact surface, the plate material pushes the contact part and changes the movable trigger element state in the nozzle hole which can prevent the block part from blocking the nozzle hole communicating with the vacuum chamber. The air pump communicates with the vacuum chamber.
Description
Technical field
The invention relates to a kind of vacuum absorption device (vacuum suction apparatus), and particularly relevant for a kind of vacuum absorption device that can adjust adsorption range automatically.
Background technology
Vacuum absorption device is applied to transporting of sheet material (as wafer, glass substrate, circuit board, diaphragm etc.) usually, at different board dimensions and shape, the position is set need does to a certain degree adjustment of the suction nozzle hole of vacuum absorption device, can be stably with sheet material absorption and be passed to the destination.The size and shape of the sheet material that the quantity in the suction nozzle hole in traditional vacuum absorption device and position can be passed corresponding to institute's tendency to develop.Generally speaking, if will adsorb the sheet material of different size and shape, the producer need change the nozzle platform of vacuum absorption device, so that the quantity in the suction nozzle hole on the nozzle platform and position can be corresponding to the sheet materials of institute's desire absorption.Yet, change the huge burden that nozzle platform will cause time and cost.
Under the prerequisite of not changing nozzle platform, existing many known technologies one after the other propose solution, so that vacuum absorption device can stably adsorb and transmit the sheet material of more kinds of specifications, as TaiWan, China patent TW266374, TaiWan, China patent disclosure case TW 200716473, TaiWan, China patent TW 527048 etc.In TaiWan, China patent TW 266374 and TaiWan, China patent disclosure case TW 200716473, vacuum absorption device can have a plurality of suction nozzles hole, and part must not sealed by screw or other obturating element by the suction nozzle hole that sheet material covered, produce with the phenomenon of avoiding leaking gas, so, vacuum absorption device could stably adsorb sheet material.When the sheet material of absorption different size and shape, obturating element must be assembled in the different suction nozzle holes by manpower, and this measure is very consuming time and be unfavorable for volume production.
Summary of the invention
The invention provides a kind of vacuum absorption device, its adsorption range can be adjusted along with the board dimension of institute's desire absorption.
The invention provides a kind of vacuum absorption device that can adsorbent, it comprises a nozzle platform, a pedestal, at least one movable trigger element (movable trigger) and an air exhauster (air-extractor).Nozzle platform has a contact surface that contacts with sheet material and at least one suction nozzle hole that is positioned on the contact surface, and pedestal is connected with nozzle platform, and nozzle platform defines a vacuum chamber that is communicated with the suction nozzle hole jointly with pedestal.Movable trigger element is assembled in the suction nozzle hole, wherein movable trigger element has the stop part that a contact site and that protrudes in contact surface can hinder suction nozzle hole and vacuum chamber, when sheet material contacts with contact surface, sheet material promotes contact site and changes the state of movable trigger element in the suction nozzle hole, so that stop part can't hinder suction nozzle hole and vacuum chamber.Air exhauster and vacuum chamber.
In an embodiment of the present invention, the quantity in aforesaid suction nozzle hole is a plurality of, and aforesaid suction nozzle hole for example is (regularly) or at random (randomly) is arranged on the contact surface regularly.
In an embodiment of the present invention, when sheet material contacted with contact surface, movable trigger element can be pushed in the suction nozzle hole fully.
In an embodiment of the present invention, aforesaid nozzle platform has at least one projection that is positioned at the suction nozzle hole, and movable trigger element comprises that one is connected in the connecting portion between contact site and the stop part, and connecting portion is bearing on (lean against) projection, rotates so that movable trigger element is fulcrum with the projection.
In an embodiment of the present invention, aforesaid suction nozzle hole comprises that one is connected in perforation between spatial accommodation and the vacuum chamber in order to the spatial accommodation and that holds movable trigger element, and at contact site not with before sheet material contacts, stop part is bearing on the bottom of spatial accommodation to stop perforation fully, and after sheet material promoted contact site, stop part can be lifted and perforation is communicated with spatial accommodation.
In an embodiment of the present invention, aforesaid nozzle platform has at least one projection that is positioned at the suction nozzle hole, and movable trigger element comprises that one is connected in the connecting portion between contact site and the stop part, and connecting portion is articulated in (pivotally connected with) projection, rotates so that movable trigger element is pivot with the projection.
In an embodiment of the present invention, aforesaid suction nozzle hole comprises that one is connected in perforation between spatial accommodation and the vacuum chamber in order to the spatial accommodation and that holds movable trigger element, and at contact site not with before sheet material contacts, stop part is bearing on the bottom of spatial accommodation to stop perforation fully, and after sheet material promoted contact site, stop part can be lifted and perforation is communicated with spatial accommodation.
In an embodiment of the present invention, aforesaid nozzle platform has an inner surface with respect to contact surface, contact site directly is connected with stop part, and at contact site not with before sheet material contacts, stop part is bearing on the inner surface of nozzle platform to stop the suction nozzle hole fully, and after sheet material promoted contact site, stop part can be made suction nozzle hole and vacuum chamber by jack-up.
In an embodiment of the present invention, aforesaid stop part is positioned at outside the suction nozzle hole.
In an embodiment of the present invention, aforesaid air exhauster comprises a vavuum pump.
In an embodiment of the present invention, aforesaid vacuum absorption device can comprise further that one is disposed at the elastomer between nozzle platform and the movable trigger element, resets under situation about not promoted by sheet material to assist movable trigger element.
Based on above-mentioned, because the present invention can see through the contact site of sheet material promotion movable trigger element to change the state of movable trigger element in the suction nozzle hole, therefore vacuum absorption device of the present invention can be adjusted its adsorption range automatically.
Description of drawings
Figure 1A to Fig. 1 D is the generalized section according to the vacuum absorption device of first embodiment of the invention.
Fig. 2 A to Fig. 6 B is the local enlarged diagram of vacuum absorption device.
Fig. 7 A and Fig. 7 B are the generalized sections according to the vacuum absorption device of second embodiment of the invention.
Description of reference numerals:
100,200: vacuum absorption device
110,210: nozzle platform
110a, 210a: contact surface
110b, 210b: suction nozzle hole
110c, 210c: projection
120,220: pedestal
130,230: movable trigger element
132,232: contact site
134,234: stop part
136: connecting portion
140,240: air exhauster
150,150 ': elastomer
210c: inner surface
A: bearing
H: perforation
P: sheet material
S: spatial accommodation
V: vacuum chamber
The specific embodiment
First embodiment
Figure 1A to Fig. 1 D is the generalized section according to the vacuum absorption device of first embodiment of the invention.Please refer to Figure 1A and Figure 1B, the vacuum absorption device 100 of present embodiment comprises a nozzle platform 110, a pedestal 120, at least one movable trigger element 130 and an air exhauster 140.Nozzle platform 110 has a contact surface 110a who contacts with sheet material P and at least one suction nozzle hole 110b that is positioned on the contact surface 110a.Pedestal 120 is connected with nozzle platform 110, and nozzle platform 110 defines a vacuum chamber V who is communicated with suction nozzle hole 110b jointly with pedestal 120.Movable trigger element 130 is assembled among the 110b of suction nozzle hole, wherein movable trigger element 130 has a contact site 132 and that protrudes in contact surface 110a and can hinder the stop part 134 that suction nozzle hole 110b is communicated with vacuum chamber V, when sheet material P contacts with contact surface 110a, sheet material P can promote contact site 132 and change the state of movable trigger element 130 in the 110b of suction nozzle hole, is communicated with vacuum chamber V so that stop part 134 can't hinder suction nozzle hole 110b.In addition, air exhauster 140 is communicated with vacuum chamber V.In the present embodiment, air exhauster 140 for example is a vavuum pump (vacuum pump).
In the present embodiment, vacuum chamber V general reference can be born the chamber that air pressure is lower than extraneous matter of fundamental importance pressure, and not limiting vacuum chamber V herein must be the state that is in the perfect vacuum.When vacuum absorption device 100 in when running, the weight of the sheet material P of the visual institute of the level of vacuum of vacuum chamber V desire absorption and determining, obviously, when the weight of the sheet material P of 100 desires of vacuum absorption device absorption is heavy more, the level of vacuum of its vacuum chamber V just must be high more, otherwise when the weight of the sheet material P of 100 desire absorption of vacuum absorption device was light more, the level of vacuum of its vacuum chamber V then need not be too high.
In the present embodiment, the quantity of suction nozzle hole 110b can be a plurality of, and these suction nozzle holes 110b for example be at random (randomly) or regularly (regularly) be arranged on the contact surface 110a.This field has knows that usually the knowledgeable should know, the quantity of suction nozzle hole 110b and the visual producer's of distributing position actual demand and determine that present embodiment does not limit quantity and the distributing position of suction nozzle hole 110b.
Shown in Figure 1A and Figure 1B, suction nozzle hole 110b comprises that one is connected in perforation H between spatial accommodation S and the vacuum chamber C in order to the spatial accommodation S and that holds movable trigger element 130.In addition, nozzle platform 110 has at least one projection 110c that is positioned at suction nozzle hole 110a, and movable trigger element 130 comprises that one is connected in the connecting portion 136 between contact site 132 and the stop part 134, and connecting portion 136 is bearing on the projection 110c.
Not with before sheet material P contacts, contact site 132 can protrude in contact surface 110a at contact site 132, and stop part 134 then can be bearing on the bottom of spatial accommodation S to stop perforation H fully, illustrates as Figure 1A.At this moment, can't be connected by perforation H between vacuum chamber C and the spatial accommodation S, in other words, suction nozzle hole 110a does not at this time have the function of adsorbent P.It should be noted that present embodiment can see through counterbalance design and make the stop part 134 of movable trigger element 130 be bearing on the bottom of spatial accommodation S naturally, to seal the place that is communicated with of spatial accommodation S and perforation H.For example, the producer can allow the weight of stop part 134 greater than the weight of contact site 132.In addition, be under the situation of fulcrum with projection 110c, the turning moment that the turning moment that the producer can allow stop part 134 be caused is caused greater than contact site 132.
Please refer to Figure 1B, when vacuum absorption device 100 during along action that the opposite direction of gravity direction is adsorbed near sheet material P and to sheet material P, sheet material P can oppress and promote to protrude in the contact site 132 of contact surface 110a, at this moment, because the weight of sheet material P is greater than the weight of stop part 134, therefore movable trigger element 130 can be that fulcrum rotates with projection 110c, meaning promptly, stop part 134 can be lifted and vacuum chamber V and spatial accommodation S are connected through perforation H, and suction nozzle hole 110a at this time just has the function of adsorbent P.It should be noted that after sheet material P promoted contact site 132, movable trigger element 130 can be pushed in the 110b of suction nozzle hole fully so that sheet material P because of vacuum attraction be close to contact surface 110a on.Herein, the design of spatial accommodation S is a principle can hold the movable trigger element 130 of rotating the back fully, and the shape that the present invention does not limit spatial accommodation S must be to illustrate as Figure 1A.
Please refer to Figure 1B to Fig. 1 D, the vacuum absorption device 100 of present embodiment can adsorb the sheet material P of all size (different size and shape), when sheet material P size and nozzle platform 110 quite the time (illustrating) as Figure 1B, sheet material P can cover all suction nozzle hole 110b, all movable trigger element 130 are pressed in the 110b of suction nozzle hole, at this moment, all suction nozzle hole 110b have the function of adsorbent P.When being significantly less than nozzle platform 110, sheet material P size (illustrates) as Fig. 1 C and 1D, sheet material P only can cover the suction nozzle hole 110b of part, at this moment, only have part can be had the function of adsorbent P by the suction nozzle hole 110b that sheet material P is covered, all the other are not then had the function of adsorbent P by the suction nozzle hole 110b that sheet material P is covered.From Fig. 1 C and 1D as can be known, the vacuum absorption device 100 of present embodiment has the ability of automatic adjustment adsorption range, and sheet material P can be adsorbed on the optional position on the nozzle platform 110, and is difficult for the problem that has sheet material P accident to drop.
The vacuum absorption device 100 that is illustrated among Figure 1A to Fig. 1 D only is in order to illustrating, and it is not in order to limit the present invention.Fig. 2 A to Fig. 6 B that below will arrange in pairs or groups illustrates the specific embodiment that other is feasible.
Fig. 2 A to Fig. 6 B is the local enlarged diagram of vacuum absorption device.At first please refer to Fig. 2 A and Fig. 2 B, vacuum absorption device 100 can comprise further that one is disposed at the elastomer 150 between nozzle platform 110 and the movable trigger element 130, resets under situation about not promoted by sheet material P to assist movable trigger element 130.In the present embodiment, elastomer 150 for example is a spring, and under the situation of not oppressed by sheet material P, elastomer 150 can be in order to support the contact site 132 of movable trigger element 130, shown in Fig. 2 A in movable trigger element 130.When movable trigger element 130 was pressed down by sheet material P, elastomer 150 also can be touched portion's 132 compressings, shown in Fig. 2 B.At this moment, oppressed elastomer 150 can provide one with the restoring force of lifting on the contact site 132, so that movable trigger element 130 can reset when not oppressed by sheet material P smoothly.
Please refer to Fig. 3 A and Fig. 3 B, elastomer 150 is also configurable between nozzle platform 110 and stop part 134.Under the situation of not oppressed by sheet material P, elastomer 150 can be in order to lift on the stop part 134 of avoiding movable trigger element 130, as shown in Figure 3A in movable trigger element 130.When movable trigger element 130 was pressed down by sheet material P, elastomer 150 also can be blocked portion's 134 compressings, shown in Fig. 3 B.At this moment, oppressed elastomer 150 can provide a restoring force that stop part 134 is pressed down, so that movable trigger element 130 can reset when not oppressed by sheet material P smoothly.
Please refer to Fig. 4 A and Fig. 4 B, in the present embodiment, the connecting portion 136 of movable trigger element 130 is articulated in projection 110c, so that movable trigger element 130 is that pivot rotates with projection 110c.For example, movable trigger element 130 sees through a bearing A and is hubbed on the projection 110c, and bearing A can control the slewing area of movable trigger element 130 effectively, and movable trigger element 130 can be resetted when not pressed down by sheet material P smoothly.In addition, vacuum absorption device 100 can comprise further that one is disposed at the elastomer 150 ' between nozzle platform 110 and the movable trigger element 130, to assist movable trigger element 130 under situation about not promoted, to reset, illustrate as Fig. 5 A, Fig. 5 B, Fig. 6 A and Fig. 6 B by sheet material P.Elastomer 150 ' configuration mode and the elastomer 150 among 2A, Fig. 2 B, Fig. 3 A and Fig. 3 B among Fig. 5 A, Fig. 5 B, Fig. 6 A and Fig. 6 B are similar, so no longer repeat in this.
Second embodiment
Fig. 7 A and Fig. 7 B are the generalized sections according to the vacuum absorption device of second embodiment of the invention.The vacuum absorption device 200 of present embodiment comprises a nozzle platform 210, a pedestal 220, at least one movable trigger element 230 and an air exhauster 240.Nozzle platform 210 has a contact surface 210a who contacts with sheet material P and at least one last suction nozzle hole 210b of contact surface 210a that is positioned at.Pedestal 220 is connected with nozzle platform 210, and nozzle platform 210 defines a vacuum chamber V who is communicated with suction nozzle hole 210b jointly with pedestal 220.Movable trigger element 230 is assembled among the 210b of suction nozzle hole, wherein movable trigger element 230 has a contact site 232 and that protrudes in contact surface 210a and can hinder the stop part 234 that suction nozzle hole 210b is communicated with vacuum chamber V, when sheet material P contacts with contact surface 210a, sheet material P can promote contact site 232 and change the state of movable trigger element 230 in the 210b of suction nozzle hole, is communicated with vacuum chamber V so that stop part 234 can't hinder suction nozzle hole 210b.In addition, air exhauster 240 is communicated with vacuum chamber V.In the present embodiment, air exhauster 240 for example is a vavuum pump (vacuum pump).
By Fig. 7 A and Fig. 7 B as can be known, nozzle platform 210 has an inner surface 210c with respect to contact surface 210a, and contact site 232 directly is connected with stop part 234, and stop part 234 is positioned at outside the 210a of suction nozzle hole.Not with before sheet material P contacts, stop part 234 can be bearing on the inner surface 210c of nozzle platform 210 at contact site 232, and to stop suction nozzle hole 210b fully, at this moment, suction nozzle hole 210b does not have the function of adsorbent P.When vacuum absorption device 200 during along action that gravity direction adsorbs near sheet material P and to sheet material P, the movable trigger element 230 that contacts with sheet material P can be made vacuum chamber V be connected with suction nozzle hole 210b by jack-up, and suction nozzle hole 210a at this time just has the function of adsorbent P.
It should be noted that in the vacuum absorption device 200 of present embodiment elastomer also optionally is set,, reset smoothly to assist movable trigger element as spring, shell fragment etc.
Based on above-mentioned, because the present invention can see through sheet material and promote the contact site of movable trigger element to change the state of movable trigger element in the suction nozzle hole, therefore vacuum absorption device of the present invention can be adjusted its adsorption range automatically, with the sheet material of absorption arbitrary shape and arbitrary dimension.
Though the present invention discloses as above with embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when doing a little change and retouching, so the present invention's protection domain is as the criterion when looking claims person of defining.
Claims (13)
1. a vacuum absorption device is suitable for adsorbing a sheet material, and this vacuum absorption device comprises:
One nozzle platform has a contact surface that contacts with this sheet material and at least one suction nozzle hole that is positioned on this contact surface;
One pedestal is connected with this nozzle platform, and wherein this nozzle platform defines a vacuum chamber that is communicated with this suction nozzle hole jointly with this pedestal;
At least one movable trigger element, be assembled in this suction nozzle hole, wherein this movable trigger element has the stop part that a contact site and that protrudes in this contact surface can hinder this suction nozzle hole and this vacuum chamber, when this sheet material contacts with this contact surface, this sheet material promotes this contact site and changes the state of this movable trigger element in this suction nozzle hole, so that this stop part can't hinder this suction nozzle hole and this vacuum chamber; And
One air exhauster is with this vacuum chamber.
2. vacuum absorption device as claimed in claim 1 is characterized in that, the quantity in suction nozzle hole is a plurality of.
3. vacuum absorption device as claimed in claim 2 is characterized in that, described suction nozzle hole is arranged on this contact surface regularly.
4. vacuum absorption device as claimed in claim 2 is characterized in that, described suction nozzle hole at random is arranged on this contact surface.
5. vacuum absorption device as claimed in claim 1 is characterized in that, when this sheet material contacted with this contact surface, this movable trigger element was pushed in this suction nozzle hole fully.
6. vacuum absorption device as claimed in claim 1, it is characterized in that, this nozzle platform has at least one projection that is positioned at this suction nozzle hole, and this movable trigger element comprises that one is connected in the connecting portion between this contact site and this stop part, and this connecting portion is bearing on this projection, so that this movable trigger element is that fulcrum rotates with this projection.
7. vacuum absorption device as claimed in claim 6, it is characterized in that, this suction nozzle hole comprises that one is connected in perforation between this spatial accommodation and this vacuum chamber in order to the spatial accommodation and that holds this movable trigger element, and at this contact site not with before this sheet material contacts, this stop part is bearing on the bottom of this spatial accommodation to stop this perforation fully, and after this sheet material promoted this contact site, this stop part was lifted and this perforation is communicated with this spatial accommodation.
8. vacuum absorption device as claimed in claim 1, it is characterized in that, this nozzle platform has at least one projection that is positioned at this suction nozzle hole, and this movable trigger element comprises that one is connected in the connecting portion between this contact site and this stop part, and this connecting portion is articulated in this projection, so that this movable trigger element is that pivot rotates with this projection.
9. vacuum absorption device as claimed in claim 8, it is characterized in that, this suction nozzle hole comprises that one is connected in perforation between this spatial accommodation and this vacuum chamber in order to the spatial accommodation and that holds this movable trigger element, and at this contact site not with before this sheet material contacts, this stop part is bearing on the bottom of this spatial accommodation to stop this perforation fully, and after this sheet material promoted this contact site, this stop part was lifted and this perforation is communicated with this spatial accommodation.
10. vacuum absorption device as claimed in claim 1, it is characterized in that, this nozzle platform has an inner surface with respect to this contact surface, this contact site directly is connected with this stop part, and at this contact site not with before this sheet material contacts, this inner surface that this stop part is bearing on this nozzle platform is stopping this suction nozzle hole fully, and after this sheet material promoted this contact site, this stop part was made this suction nozzle hole and this vacuum chamber by jack-up.
11. vacuum absorption device as claimed in claim 10 is characterized in that, this stop part is positioned at outside this suction nozzle hole.
12. vacuum absorption device as claimed in claim 1 is characterized in that, this air exhauster comprises a vavuum pump.
13. vacuum absorption device as claimed in claim 1 is characterized in that, more comprises an elastomer, is disposed between this nozzle platform and this movable trigger element, resets under situation about not promoted by this sheet material to assist this movable trigger element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101351127A CN101531007B (en) | 2009-04-20 | 2009-04-20 | Vacuum adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101351127A CN101531007B (en) | 2009-04-20 | 2009-04-20 | Vacuum adsorption device |
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| Publication Number | Publication Date |
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| CN101531007A CN101531007A (en) | 2009-09-16 |
| CN101531007B true CN101531007B (en) | 2010-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101351127A Active CN101531007B (en) | 2009-04-20 | 2009-04-20 | Vacuum adsorption device |
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| CN (1) | CN101531007B (en) |
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| TWI470593B (en) * | 2011-08-15 | 2015-01-21 | Au Optronics Corp | Method of manufacturing flexible display panel |
| CN103449209A (en) * | 2013-09-22 | 2013-12-18 | 浙江通业印刷机械有限公司 | Paper transfer mechanism of paper feeding head |
| CN106183579B (en) * | 2016-07-08 | 2018-12-04 | 青岛理工大学 | Trigger type double-sided vacuum adsorption device, system and method |
| CN106183580B (en) * | 2016-07-08 | 2019-01-18 | 青岛理工大学 | Double-sided vacuum adsorption device, system and method with controllable regions |
| CN107443131B (en) * | 2017-07-17 | 2019-06-11 | 合肥卡星数控设备有限公司 | A kind of anticlogging vacuum adsorption table embolism structure |
| CN108438895A (en) * | 2018-04-25 | 2018-08-24 | 阜阳盛东智能制造技术研发有限公司 | Metallic plate automatic charging device in a kind of compressor housing intelligence manufacture |
| CN108705690B (en) * | 2018-05-29 | 2020-08-25 | 新昌县皇骐电子科技有限公司 | Semiconductor wafer scribing machine |
| CN111791245A (en) * | 2020-06-17 | 2020-10-20 | 合肥学院 | Five-axis transfer robot manipulator with multiple clamping states |
| CN113600884B (en) * | 2021-09-01 | 2022-04-22 | 安徽金元素复合材料有限公司 | Metal composite board surface milling device |
| TWI841309B (en) * | 2023-03-21 | 2024-05-01 | 盛詮科技股份有限公司 | Suction nozzle and conveying device having the suction nozzle |
| CN116329112B (en) * | 2023-05-30 | 2023-09-12 | 常州市新拓工具有限公司 | Binding post detection mechanism, production system and detection method |
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2009
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Inventor after: Wang Jianfa Inventor after: Chen Minghui Inventor after: Chen Wenjun Inventor after: Deng Guoxin Inventor after: Li Huijuan Inventor after: Li Weixiang Inventor before: Wang Jianfa Inventor before: Chen Minghui Inventor before: Chen Wenjun Inventor before: Deng Guoxin |
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Free format text: CORRECT: INVENTOR; FROM: WANG JIANFA CHEN MINGHUI CHEN WENJUN DENG GUOXIN TO: WANG JIANFA CHEN MINGHUI CHEN WENJUN DENG GUOXIN LI HUIJUAN LI WEIXIANG |