CN218808988U - Grabbing device and processing equipment - Google Patents

Grabbing device and processing equipment Download PDF

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Publication number
CN218808988U
CN218808988U CN202223095884.2U CN202223095884U CN218808988U CN 218808988 U CN218808988 U CN 218808988U CN 202223095884 U CN202223095884 U CN 202223095884U CN 218808988 U CN218808988 U CN 218808988U
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China
Prior art keywords
suction nozzle
negative pressure
chip
driver
communicated
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CN202223095884.2U
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Chinese (zh)
Inventor
何嘉炜
余俊华
卢金洲
倪俊鑫
刘友月
贺清明
尹建刚
高云峰
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Shenzhen Hans Semiconductor Equipment Technology Co Ltd
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Shenzhen Hans Semiconductor Equipment Technology Co Ltd
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Priority to CN202223095884.2U priority Critical patent/CN218808988U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The grabbing device comprises a suction nozzle, a flow detection device, a first electromagnetic valve, a positive pressure air source and a negative pressure air source, wherein the flow detection device is communicated with the suction nozzle; the first electromagnetic valve is communicated with the flow detection device; the positive pressure air source is communicated with the first electromagnetic valve; the negative pressure air source is communicated with the first electromagnetic valve. The embodiment of the application detects the flow of the air flow flowing through the flow detection device, judges whether the negative pressure in the suction nozzle is enough to completely adsorb the chip or not, and provides enough negative pressure in the suction nozzle by controlling the negative pressure air source, so that the aim of stably adsorbing the chip is fulfilled, and the stability of adsorbing the chip by the suction nozzle is improved; the error of the flow measured by the flow detection device can be reduced, so that whether the suction nozzle completely adsorbs the chip can be judged more accurately according to the flow detected by the flow detection device, and the stability of the suction nozzle adsorbing the chip is improved.

Description

Grabbing device and processing equipment
Technical Field
The application relates to the technical field of chip manufacturing, in particular to a gripping device and processing equipment.
Background
The Mini LED generally refers to an LED device with the chip size of 50-200 mu m, has the characteristics of high peak brightness, long service life and low power consumption, and is widely applied to products such as televisions, flat panels, notebook computers, mobile phones and the like.
The Mini LED has a large number of chips, and the damaged chips can be replaced by repairing the Mini LED under the condition that the chips are defective, so that the quality of the Mini LED can be improved, the cost is reduced, and the market competitiveness is improved.
When repairing the Mini LED, the individual chip needs to be grabbed to move to the damaged chip position of the Mini LED for replacement. However, because the chip has a small size, when the chip is sucked by the suction nozzle, the chip is easy to drop from the suction nozzle under the condition of insufficient negative pressure, so that the chip is very unstable when the chip is sucked by the suction nozzle.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a grabbing device and processing equipment, can improve the stability that the chip was absorb to the suction nozzle.
In order to achieve the above object, in a first aspect, an embodiment of the present application provides a grasping apparatus, including:
a suction nozzle;
a flow detection device in communication with the suction nozzle;
a first solenoid valve in communication with the flow detection device;
the positive pressure gas source is communicated with the first electromagnetic valve;
and the negative pressure air source is communicated with the first electromagnetic valve.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
and the pressure switch is communicated between the negative pressure air source and the first electromagnetic valve.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
and the gas tank is communicated between the negative pressure gas source and the first electromagnetic valve.
In some possible embodiments of the first aspect, the gas tank is disposed between the pressure switch and the negative pressure gas source.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
the filter is communicated between the suction nozzle and the flow detection device.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
the second electromagnetic valve is communicated between the first electromagnetic valve and the positive pressure air source; or/and
and the regulating valve is communicated between the first electromagnetic valve and the positive pressure air source.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
a mounting base;
the first driver is arranged on the mounting seat, the suction nozzle is connected with the output end of the first driver, and the first driver is used for driving the suction nozzle to slide on the mounting seat.
In some possible embodiments of the first aspect, the grasping apparatus further includes:
the second driver is arranged on the mounting seat in a sliding mode and connected with the output end of the first driver, the suction nozzle is connected with the output end of the second driver, and the second driver is used for driving the suction nozzle to rotate;
wherein, the rotation center line of the suction nozzle is parallel to the sliding direction of the second driver.
In some possible embodiments of the first aspect, the flow detection means or/and the first solenoid valve is provided to the mount or the first driver.
In a second aspect, an embodiment of the present application provides a processing apparatus, where the processing apparatus includes the gripping device according to any one of the above technical solutions.
The negative pressure air source, the first electromagnetic valve, the flow detection device and the suction nozzle of the gripping device and the processing equipment are communicated in sequence, so that negative pressure is generated in the suction nozzle, and the chip is sucked through the suction nozzle; the positive pressure air source is communicated with the first electromagnetic valve so as to generate positive pressure in the suction nozzle through the positive pressure air source, so that the chip sucked on the suction nozzle falls off; the flow detection device is used for detecting the flow of the air flow flowing through the flow detection device and judging whether the negative pressure in the suction nozzle is enough to completely adsorb the chip or not so as to provide enough negative pressure in the suction nozzle by controlling a negative pressure air source, thereby realizing the purpose of stably adsorbing the chip, improving the stability of the chip adsorbed by the suction nozzle and avoiding the occurrence of the condition that the chip is not adsorbed or falls off after being adsorbed because the negative pressure in the suction nozzle is not enough to completely adsorb the chip; because the flow detection device sets up between first solenoid valve and suction nozzle, consequently can reduce because of the error of devices such as first solenoid valve leak gas and lead to the flow that the flow detection device measured to whether can judge the suction nozzle completely to adsorb the chip more accurately according to the flow that the flow detection device detected obtains, thereby realize the purpose that the chip was adsorbed to the suction nozzle stability, improve the stability that the suction nozzle adsorbs the chip.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of a grasping apparatus according to the present application;
fig. 2 is a schematic structural diagram of another embodiment of the grasping apparatus according to the present application.
The reference numbers illustrate:
1. a suction nozzle; 2. a flow detection device; 3. a first solenoid valve; 4. a positive pressure gas source; 5. a negative pressure air source; 6. a pressure switch; 7. a gas tank; 8. a filter; 9. a second solenoid valve; 10. adjusting a valve; 20. a mounting seat; 30. a first driver; 40. a second driver.
The implementation, functional features and advantages of the objectives of the present application will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.
It should be understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
The embodiment of the application provides a grabbing device and processing equipment for solve the unstable technical problem of suction nozzle absorption chip.
In the embodiment of the application, as shown in fig. 2, the gripping device includes a suction nozzle 1, a flow detection device 2, a first electromagnetic valve 3, a positive pressure air source 4 and a negative pressure air source 5, wherein the flow detection device 2 is communicated with the suction nozzle 1; the first electromagnetic valve 3 is communicated with the flow detection device 2; the positive pressure air source 4 is communicated with the first electromagnetic valve 3; the negative pressure air source 5 is communicated with the first electromagnetic valve 3. Namely, the negative pressure air source 5, the first electromagnetic valve 3, the flow detection device 2 and the suction nozzle 1 are communicated in sequence.
In the present embodiment, the negative pressure air source 5 is used for generating negative pressure so that the pressure in the air path is less than atmospheric pressure, so as to suck the chip through the suction nozzle 1; the positive pressure air source 4 is used for generating positive pressure so that the pressure in the air path is greater than atmospheric pressure, and the chip sucked on the suction nozzle 1 falls off from the suction nozzle 1. The negative pressure gas source 5 and the positive pressure gas source 4 may each include a vacuum pump to generate a negative pressure or a positive pressure by the vacuum pump.
When the chip is sucked, the negative pressure air source 5 works, and the first electromagnetic valve 3 is opened, so that the negative pressure air source 5 is communicated with the flow detection device 2; simultaneously positive pressurized air source 4 is out of work, perhaps positive pressurized air source 4 work is in order to produce the malleation, but the gas circuit of positive pressurized air source 4 is closed to first solenoid valve 3 to reduce the influence of the malleation that positive pressurized air source 4 produced to the negative pressure that negative pressurized air source 5 produced, so that produce the negative pressure in the suction nozzle 1, thereby absorb the chip. When the chip is placed, the positive pressure gas source 4 works, and the first electromagnetic valve 3 is opened, so that the positive pressure gas source 4 is communicated with the flow detection device 2; meanwhile, the negative pressure air source 5 does not work, or the negative pressure air source 5 works to generate negative pressure, but the first electromagnetic valve 3 closes the air path of the negative pressure air source 5 so as to reduce the influence of the negative pressure generated by the negative pressure air source 5 on the positive pressure generated by the positive pressure air source 4, so that the positive pressure is generated in the suction nozzle 1, the chip sucked on the suction nozzle 1 is jacked open by the positive pressure air flow, and the purpose of placing the chip is realized.
The negative pressure air source 5, the first electromagnetic valve 3, the flow detection device 2 and the suction nozzle 1 are sequentially communicated so as to generate negative pressure in the suction nozzle 1, and therefore a chip is sucked through the suction nozzle 1; the positive pressure air source 4 is communicated with the first electromagnetic valve 3 so as to generate positive pressure in the suction nozzle 1 through the positive pressure air source 4, so that a chip sucked on the suction nozzle 1 falls off; the air flow flowing through the flow detection device 2 is detected by the flow detection device 2, whether the negative pressure in the suction nozzle 1 is enough to completely adsorb the chip is judged, and the negative pressure air source 5 is controlled to provide enough negative pressure in the suction nozzle 1, so that the aim of stably adsorbing the chip is fulfilled, the stability of adsorbing the chip by the suction nozzle 1 is improved, and the situation that the chip is not adsorbed or falls off after being adsorbed due to the fact that the negative pressure in the suction nozzle 1 is not enough to completely adsorb the chip is avoided; because flow detection device 2 sets up between first solenoid valve 3 and suction nozzle 1, consequently can reduce because of devices such as first solenoid valve 3 leak gas and lead to the error of the flow of flow detection device 2 measuring to whether can judge suction nozzle 1 adsorb the chip completely more accurately according to the flow that flow detection device 2 detected and obtain, thereby realize that suction nozzle 1 adsorbs the purpose of chip steadily, improve the stability that suction nozzle 1 adsorbs the chip.
In an embodiment, the flow detection device 2 detects the flow of the gas flowing through the flow detection device 2 in real time, obtains a flow average value in a preset time period, and judges whether the suction nozzle 1 completely adsorbs the chip according to the flow average value so as to improve the stability of the suction nozzle 1 in adsorbing the chip. Wherein, this time of predetermineeing can be according to actual demand manual setting.
Specifically, when the average flow value detected by the flow detection device 2 is 157 to 167ml/min, it can be determined that the suction nozzle 1 does not suck the chip;
when the average flow value detected by the flow detection device 2 is 95-126 ml/min, it can be determined that the suction nozzle 1 sucks the chip, but an air leakage gap exists between the suction nozzle 1 and the chip, so that the chip is in risk of falling, that is, the suction nozzle 1 does not firmly suck the chip;
when the average flow value detected by the flow detection device 2 is 85-95 ml/min, the suction nozzle 1 can be judged to completely suck the chip, and the risk of falling does not exist basically.
It can be understood that when the average value of the flow detected by the flow detecting device 2 is large, it indicates that the negative pressure generated by the negative pressure air source 5 is small, and the chip cannot be completely adsorbed, so that the negative pressure can be increased by the negative pressure air source 5, so that the chip can be completely adsorbed by the suction nozzle 1, and the stability of the chip being adsorbed by the suction nozzle 1 is improved.
In an embodiment, as shown in fig. 2, the gripping device further includes a pressure switch 6, the pressure switch 6 is connected between the negative pressure air source 5 and the first electromagnetic valve 3, and is configured to detect whether a negative pressure exists in an air path between the negative pressure air source 5 and the suction nozzle 1, so that the suction nozzle 1 can suck a chip, and a situation that the chip cannot be sucked due to the suction nozzle 1 when no negative pressure exists in the air path between the negative pressure air source 5 and the suction nozzle 1 is avoided.
In an embodiment, as shown in fig. 2, the grasping apparatus further includes a gas tank 7, the gas tank 7 is communicated between the negative pressure gas source 5 and the first electromagnetic valve 3 to buffer through the gas tank 7, so as to improve the stability of the negative pressure in the gas path between the negative pressure gas source 5 and the suction nozzle 1, and avoid the too large variation range of the negative pressure in the gas path between the negative pressure gas source 5 and the suction nozzle 1, thereby improving the stability of the suction nozzle 1 sucking the chip.
In one embodiment, as shown in fig. 2, an air tank 7 is disposed between the pressure switch 6 and the negative pressure air source 5 to improve the sensitivity of the pressure switch 6, so as to quickly reflect whether there is a negative pressure in the air path between the negative pressure air source 5 and the suction nozzle 1.
In one embodiment, as shown in fig. 2, the gripping device further includes a filter 8, and the filter 8 is communicated between the suction nozzle 1 and the flow detection device 2, so as to filter the air flow through the filter 8, thereby improving the detection accuracy of the flow detection device 2 and the stability of the suction nozzle 1 for sucking the chip. The problem that the flow detection device 2 cannot work due to the fact that the flow detection device 2 is blocked due to dust particles in the airflow is avoided; or dust particles are deposited in the flow rate detecting device 2, resulting in a decrease in the detection accuracy of the flow rate detecting device 2.
In an embodiment, as shown in fig. 2, the grasping apparatus further includes a second solenoid valve 9, the second solenoid valve 9 is communicated between the first solenoid valve 3 and the positive pressure gas source 4, and the second solenoid valve 9 is used for switching on and off a gas path between the positive pressure gas source 4 and the first solenoid valve 3.
In an embodiment, as shown in fig. 2, the gripping device further includes a regulating valve 10, the regulating valve 10 is communicated between the first electromagnetic valve 3 and the positive pressure gas source 4, and the regulating valve 10 is used for adjusting the gas flow in the gas path between the positive pressure gas source 4 and the first electromagnetic valve 3, so as to avoid the excessive or insufficient positive pressure. If the positive pressure is too large, the chip may be blown away by the suction nozzle 1 and is difficult to place at the corresponding position; if the positive pressure is too small, the effect of dropping the chip off the suction nozzle 1 may not be obtained.
In one embodiment, as shown in fig. 2, a regulator valve 10 is disposed between the second solenoid valve 9 and the positive pressure gas source 4. A second solenoid valve 9 may also be provided between the regulator valve 10 and the positive pressure gas source 4.
In an embodiment, as shown in fig. 1, the gripping device further includes a mounting base 20 and a first driver 30, the first driver 30 is disposed on the mounting base 20, the suction nozzle 1 is connected to an output end of the first driver 30, and the first driver 30 is configured to drive the suction nozzle 1 to slide on the mounting base 20. The suction nozzle 1 is driven by the first driver 30 to slide on the mounting base 20, so that the chip can be sucked at the material taking position and placed at the material placing position by the movement of the suction nozzle 1.
In an embodiment, as shown in fig. 1, the gripping device further includes a second driver 40, the second driver 40 is slidably disposed on the mounting base 20 and connected to an output end of the first driver 30, the suction nozzle 1 is connected to an output end of the second driver 40, and the second driver 40 is configured to drive the suction nozzle 1 to rotate; wherein the rotation center line of the suction nozzle 1 is parallel to the sliding direction of the second actuator 40.
The second driver 40 is connected with the output end of the first driver 30, and the suction nozzle 1 is connected with the output end of the second driver 40, so that the first driver 30 drives the second driver 40 to slide on the mounting base 20, and then the second driver 40 drives the suction nozzle 1 to rotate, so that the suction nozzle 1 can move along the sliding direction of the second driver 40 and can rotate. So that the suction nozzle 1 sucks the chip from the material taking position, then adjusts the polarity of the chip and the placing angle of the chip through rotation, and then places the chip at the material placing position.
It will be appreciated that the sliding direction of the second actuator 40 on the mounting base 20 may be vertical, so that the suction nozzle 1 can be lifted or rotated in a horizontal plane.
In one embodiment, as shown in fig. 1 and 2, the flow rate detection device 2 or/and the first solenoid valve 3 is disposed on the mounting seat 20 or the first driver 30. That is, the flow rate detection device 2 or the first solenoid valve 3 may be mounted on the mounting seat 20 or the first driver 30 alone, or may be mounted on the mounting seat 20 or the first driver 30 together, so as to improve the integrity of the grasping apparatus.
In addition, the embodiment of the present application further provides a processing apparatus, the processing apparatus includes the gripping device described in any of the above embodiments, and the specific structure of the gripping device refers to the above embodiments.
In this embodiment, the processing equipment may be Mini LED repair equipment.
The above description is only a preferred embodiment of the present application, and not intended to limit the scope of the present application, and all modifications and equivalents of the technical solutions that can be directly or indirectly applied to other related fields without departing from the spirit of the present application are intended to be included in the scope of the present application.

Claims (10)

1. A grasping apparatus, characterized in that the grasping apparatus comprises:
a suction nozzle;
a flow detection device in communication with the suction nozzle;
a first solenoid valve in communication with the flow detection device;
the positive pressure gas source is communicated with the first electromagnetic valve;
and the negative pressure air source is communicated with the first electromagnetic valve.
2. The grasping apparatus according to claim 1, wherein the grasping apparatus further comprises:
and the pressure switch is communicated between the negative pressure air source and the first electromagnetic valve.
3. The grasping apparatus according to claim 2, wherein the grasping apparatus further comprises:
and the gas tank is communicated between the negative pressure gas source and the first electromagnetic valve.
4. The grasping device according to claim 3, wherein the gas tank is disposed between the pressure switch and the negative pressure gas source.
5. The grasping apparatus according to claim 1, wherein the grasping apparatus further comprises:
the filter is communicated between the suction nozzle and the flow detection device.
6. The grasping apparatus according to claim 1, wherein the grasping apparatus further comprises:
the second electromagnetic valve is communicated between the first electromagnetic valve and the positive pressure air source; or/and
and the regulating valve is communicated between the first electromagnetic valve and the positive pressure air source.
7. The grasping apparatus according to claim 1, wherein the grasping apparatus further comprises:
a mounting base;
the first driver is arranged on the mounting seat, the suction nozzle is connected with the output end of the first driver, and the first driver is used for driving the suction nozzle to slide on the mounting seat.
8. The grasping apparatus according to claim 7, wherein the grasping apparatus further comprises:
the second driver is arranged on the mounting seat in a sliding mode and connected with the output end of the first driver, the suction nozzle is connected with the output end of the second driver, and the second driver is used for driving the suction nozzle to rotate;
wherein, the rotation center line of the suction nozzle is parallel to the sliding direction of the second driver.
9. The grasping apparatus according to claim 7, wherein the flow rate detecting device or/and the first solenoid valve are provided to the mount base or the first driver.
10. A processing plant, characterized in that it comprises a gripping device according to any one of claims 1-9.
CN202223095884.2U 2022-11-17 2022-11-17 Grabbing device and processing equipment Active CN218808988U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223095884.2U CN218808988U (en) 2022-11-17 2022-11-17 Grabbing device and processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223095884.2U CN218808988U (en) 2022-11-17 2022-11-17 Grabbing device and processing equipment

Publications (1)

Publication Number Publication Date
CN218808988U true CN218808988U (en) 2023-04-07

Family

ID=87250339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223095884.2U Active CN218808988U (en) 2022-11-17 2022-11-17 Grabbing device and processing equipment

Country Status (1)

Country Link
CN (1) CN218808988U (en)

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