CN205166195U - Vacuum adsorption device - Google Patents

Vacuum adsorption device Download PDF

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Publication number
CN205166195U
CN205166195U CN201520971268.XU CN201520971268U CN205166195U CN 205166195 U CN205166195 U CN 205166195U CN 201520971268 U CN201520971268 U CN 201520971268U CN 205166195 U CN205166195 U CN 205166195U
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Prior art keywords
vacuum
absorption device
vacuum absorption
adsorption hole
seal
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CN201520971268.XU
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王艳华
王洪亚
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Kunshan Govisionox Optoelectronics Co Ltd
Kunshan Guoxian Photoelectric Co Ltd
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Kunshan Guoxian Photoelectric Co Ltd
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Abstract

The utility model provides a vacuum adsorption device, including vacuum adsorption platform, sealing mechanism and control system, the vacuum adsorption platform be used for bearing a base plate and be provided with adsorb the hole and with the cavity that adsorbs the hole intercommunication, adsorb a hole and cavity formation vacuum passageway, during the use, control system monitors the vacuum adsorption platform is placed it is when having naked absorption hole behind the base plate, steerable sealing mechanism is sealed naked absorption hole. The utility model discloses a vacuum adsorption device monitors the vacuum adsorption platform through control system and places when having naked absorption hole behind the base plate, and control sealing mechanism carries out the shutoff with naked absorption hole, ensured the vacuum adsorption platform from this in the negative pressure normal to avoided because of the base plate damage cause adsorb that the hole is exposed and lead to the vacuum adsorption platform in the negative pressure unusual, and then vacuum adsorption device deadlock problem appears.

Description

Vacuum absorption device
Technical field
The utility model belongs to process equipment technical field, is particularly used for the vacuum absorption device of fixing glass substrate during a kind of laser cutting.
Background technology
Liquid crystal display has that high image quality, volume are little, lightweight, the advantage such as low voltage drive, low consumpting power and applied range, thus, be widely used in the consumer electronics such as portable TV, mobile phone, notebook computer, console display and projection TV or computer product, become the main flow of display.
Face glass (Panel) is parts considerable in liquid crystal display, because the cross section quality of mechanical type cutting is poor, the cutting mode using laser brisement now, to cut into the face glass of fritter more by glass substrate (Sheet).
As shown in Fig. 1 ~ 2, existing laser cutting vacuum absorption device 10 comprises the vacuum absorbing platform 12 with some adsorption holes 11, each adsorption hole 11 is all communicated with the cavity 13 in vacuum absorbing platform 12, and described cavity 13 also connects a vacuum generating system (not shown).As shown in Figure 3, during laser cutting, glass substrate 20 on vacuum absorbing platform 12, and then is cut into some face glass by laser by glass substrate 20 vacuum suction.
But inventor finds, often there is edge breakage situation, cause it cannot cover all adsorption holes 11 during glass substrate 20 supplied materials, laser cutting device 10 is made often to occur abnormal and crash.
Utility model content
The purpose of this utility model is to provide a kind of vacuum absorption device, the problem causing it to crash because glass substrate edge is damaged with the laser cutting vacuum absorption device solving prior art.
For solving the problems of the technologies described above, the utility model provides a kind of vacuum absorption device, comprise one for the vacuum absorbing platform of bearing substrate, the cavity that described vacuum absorbing platform is provided with adsorption hole and is communicated with described adsorption hole, described adsorption hole and cavity form a vacuum passage, and described vacuum absorption device also comprises detecting the control system of exposed adsorption hole on described vacuum absorbing platform and the sealing mechanism in order to seal described exposed adsorption hole.
Optionally, in described vacuum absorption device, described sealing mechanism comprises seal and driving mechanism, and described driving mechanism drives described seal to move under the control of described control system, to make adsorption hole exposed described in described seal shutoff.
Optionally, in described vacuum absorption device, described control system comprises control module and monitor, when having exposed adsorption hole after described monitor monitors to the described substrate of placement, described control module controls the motion of described driving mechanism, to drive adsorption hole exposed described in described seal shutoff.
Optionally, in described vacuum absorption device, described monitor is a pressure sensor or camera.
Optionally, in described vacuum absorption device, described pressure sensor is arranged in described vacuum passage or is arranged on described seal.
Optionally, in described vacuum absorption device, described driving mechanism is a fluid pressure drive device or actuating device of atmospheric pressure.
Optionally, in described vacuum absorption device, described actuating device of atmospheric pressure comprises cylinder, feeder and valve, described cylinder to be arranged in described cavity and to be connected with described feeder, described valve connects described feeder and control system, and described cylinder comprises cylinder body and piston, described piston to be arranged in described cylinder body and to connect described seal by a piston rod.
Optionally, in described vacuum absorption device, described pressure sensor is arranged on described seal.
Optionally, in described vacuum absorption device, described driving mechanism comprises air bag, feeder and valve, and described seal is arranged on described air bag, described air bag to be arranged in described cavity and to be connected with described feeder, and described valve connects described feeder and control system.
Optionally, in described vacuum absorption device, described seal is a cork.
Optionally, in described vacuum absorption device, described vacuum absorption device also comprises a vacuum generating system, and described vacuum generating system is connected with described cavity, and described vacuum absorption device is a laser cutting vacuum absorption device or cmp vacuum absorption device.
Compared to prior art, vacuum absorption device of the present utility model, during its work, when having exposed adsorption hole after monitoring vacuum absorbing platform placement substrate by control system, control sealing mechanism and exposed adsorption hole is carried out shutoff, to thus ensure that in vacuum absorbing platform that negative pressure is normal, thus avoid and cause negative pressure in vacuum absorbing platform abnormal because substrate damage causes adsorption hole exposed, and then occur vacuum absorption device deadlock problem; Especially, for cutting glass by laser substrate, vacuum absorption device of the present utility model is adopted to fix described glass substrate, even if there is edge breakage problem in glass substrate, laser cutting device still can normal glass-cutting substrate, the glass substrate of edge breakage can be utilized, reduce material cost more greatly.
Accompanying drawing explanation
Fig. 1 is the schematic top plan view of vacuum absorption device in prior art;
Fig. 2 is the longitudinal sectional view of the vacuum absorption device shown in Fig. 1;
Fig. 3 is that the vacuum absorption device shown in Fig. 1 is in the schematic diagram of absorption glass substrate;
Fig. 4 is the schematic diagram of the vacuum absorption device according to the utility model with a driving mechanism;
Fig. 5 is the schematic diagram of the vacuum absorption device according to the utility model with another driving mechanism.
The description of reference numerals of the utility model embodiment is as follows:
100-vacuum absorption device; 111-cavity; 112-adsorption hole; 113-seal; 114-monitor; 115-control module; 116-horizontal component; 117-vertical portion; 118-cylinder; 119-valve; 120-feeder; 121-piston; 122-piston rod; 123-pipeline; 124-air bag; 125-rod member.
Detailed description of the invention
Below in conjunction with accompanying drawing 4 ~ 5, the vacuum absorption device that the utility model proposes is described in further detail.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
Shown in Fig. 4 is the schematic diagram that the utility model has the vacuum absorption device 100 of a driving mechanism.As shown in Figure 4, a kind of vacuum absorption device 100, comprise vacuum absorbing platform, sealing mechanism and control system, described vacuum absorbing platform is for carrying a substrate, the adsorption hole 112 being provided with cavity 111 simultaneously and being communicated with cavity 111, described cavity 111 and adsorption hole 112 form a vacuum passage, during work, when described control system monitors and to have exposed adsorption hole 112 after described vacuum absorbing platform places described substrate, described sealing mechanism can be controlled and seal exposed adsorption hole 112.Herein, described exposed adsorption hole 112 refers to the adsorption hole 112 do not covered by described substrate, and such as described substrate exists breakage causes it to fail to cover adsorption hole 112 completely.
Concrete, described sealing mechanism comprises seal 113 and driving mechanism, and described driving mechanism is with dynamic seal 113 to move under the control of described control system, with the adsorption hole 112 making seal 113 shutoff exposed.Described control system comprises monitor 114 and control module 115, described monitor 114 monitors to be placed when to have exposed adsorption hole 112 after described substrate, described control module 115 controls the motion of described driving mechanism, with the exposed adsorption hole 112 of dynamic seal 113 shutoff.
Optionally, described monitor 114 is a pressure sensor, it can be arranged in described vacuum passage, for obtaining the pressure information in described vacuum passage, and the pressure information of acquisition is transferred to control module 115, there is exposed adsorption hole 112 to monitor after described vacuum absorbing platform places described substrate, now, described control module 115 controls described driving mechanism band dynamic seal 113 according to described pressure information and moves, and blocks exposed adsorption hole 112 to make seal 113.Such as described pressure sensor is arranged on seal 113, and after described seal 113 motion, described pressure sensor can be placed in exposed adsorption hole 112.Described monitor 114 is such as a vacuum pressure sensor.In other embodiments, described monitor 114 can be the first-class device with imaging function of a shooting, and it is taken described vacuum absorbing platform after can placing described substrate to described vacuum absorbing platform, to obtain exposed adsorption hole 112.Certainly, monitor 114 of the present utility model, including, but not limited to the above-mentioned pressure sensor enumerated and camera, has exposed adsorption hole 112 as long as be convenient to obtain after described vacuum absorbing platform places described substrate.
Preferably, described seal 113 is arranged in cavity 111, with the entrance of the exposed adsorption hole 112 of shutoff under the drive of described driving mechanism, so, does not affect the outward appearance of device, and does not take installing space.
When the vacuum absorption device 100 of the present embodiment works, exposed adsorption hole 112 is monitored by monitor 114, and by seal 113, exposed adsorption hole 112 is carried out shutoff, ensure that the negative pressure value in vacuum absorbing platform is normal thus, namely after exposed adsorption hole 112 is by shutoff, described vacuum passage can remain vacuum state, thus guarantees that the negative pressure value in described platform is normal, avoids vacuum absorption device 100 and occurs because negative pressure is abnormal crashing.Specifically, if the entrance of described seal 113 to exposed adsorption hole 112 carries out shutoff, then exposed adsorption hole 112 communicates with outside atmosphere, its internal gas pressure equals atmospheric pressure, and described cavity 111 remains vacuum environment, so, ensure that the normal of negative pressure inside and outside cavity 111.
In the present embodiment, the vertical portion 117 that described vacuum absorbing platform comprises horizontal component 116 and is connected with horizontal component 116.Such as described horizontal component 116 and vertical portion 117 are connected to form one " T " character form structure.Concrete, described adsorption hole 112 to be opened on horizontal component 116 and up/down perforation, and described cavity 111 is arranged in vertical portion 117.
In addition, the quantity of described adsorption hole 112 is multiple, and each adsorption hole 112 is communicated with cavity 111.Preferably, each adsorption hole 112 place configures a seal 113, when making vacuum absorption device 100 work, if described adsorption hole 112 exists exposed situation, described seal 113 can the corresponding exposed adsorption hole 112 of shutoff, avoids vacuum absorption device to occur deadlock because negative pressure is abnormal.Such as described vacuum absorption device 100 fixes a glass substrate for laser cutting, and described glass substrate exists edge breakage situation, then the adsorption hole 112 being preferably placed at fringe region configures a seal 113.Specifically, the concrete configuration situation of described seal 113 makes relative set according to the position of exposed adsorption hole 112 and quantity, and at this, the utility model does not limit.
In the present embodiment, described seal 113 is preferably a cork, good seal performance.Described cork can be made by the soft material such as rubber, plastics.Described cork is chosen as truncated cone-shaped, rectangular shape etc., too should not limit the shape of described cork.In addition, described cork can with the lug boss coordinated with exposed adsorption hole 112.
Wherein, above-mentioned driving mechanism is chosen as a fluid pressure drive device or actuating device of atmospheric pressure.At this, preferred described driving mechanism is an actuating device of atmospheric pressure, and use cost is low, reliable in action.
If described driving mechanism is actuating device of atmospheric pressure, it comprises cylinder 118, valve 119 and feeder 120, described cylinder 118 is arranged in cavity 111, it comprises cylinder body and is arranged at the piston 121 in described cylinder body, described piston 121 is by piston rod 122 connection sealing element 113, described cylinder 118 connects feeder 120 by a pipeline 123, described air feed assembling device 120 for carrying gas in cylinder 118, to promote piston 121 moving linearly, described valve 119 to be arranged on pipeline 123 and link control module 115.Described valve 119 is chosen as a magnetic valve.
At this, it should be noted that, the driving mechanism that can realize being elevated with dynamic seal 113 is not limited to fluid pressure drive device disclosed in the utility model and actuating device of atmospheric pressure, in the prior art, can realize in addition being with dynamic seal 113 to do other mechanism of this function of elevating movement, and those skilled in the art understand that this function can also adopt other alternative do not mentioned in description, described driving mechanism does not belong to the mechanism that just can complete in a specific way.Such as described seal 113 also drives by an air bag and moves up and down.
Shown in Fig. 5 is the schematic diagram that the utility model has the vacuum absorption device 100 of another driving mechanism.As shown in Figure 5, described driving mechanism comprises the air bag 124 be arranged in cavity 111 and the feeder 120 be connected with air bag 124, and described seal 113 is arranged on air bag 124, moves with the inflation/deflation band dynamic seal 113 by air bag 124.Preferred described driving mechanism also comprises a rod member 125, and described air bag 124 and seal 113 all sealing shroud are located on rod member 125, is beneficial to seal 113 and moves along the axis direction of rod member 125, the reliability of assurance mechanism.
In conjunction with above preferred embodiment, and consult Fig. 4, the operation principle of described vacuum absorption device 100 is: if described substrate exists damaged, then when it is positioned over after on described vacuum absorbing platform, the adsorption hole 112 in corresponding described substrate damage region will be exposed, and exposed adsorption hole 112 will produce quick flow when vacuumizing, after air-flow reaches certain pressure, described pressure sensor will be opened, and pressure information is now fed back to control module 115, described control module 115 further by-pass valve control 119 is opened, now, described feeder 120 starts insufflation gas in cylinder 118, and then described piston 121 moves upward and moves to the porch of exposed adsorption hole 112 with dynamic seal 113 under the promotion of gas pressure, thus the adsorption hole 112 that shutoff is exposed, to make described vacuum absorbing platform negative pressure normal, afterwards, after corresponding operation, described piston 121 declines, seal 113 is made to depart from exposed adsorption hole 112, remove sealed condition.
Hold above-mentioned, described vacuum absorption device 100 also comprises a vacuum generating system (not shown), described vacuum generating system is connected with cavity 111, a vacuum environment is formed for making cavity 111, thus make the gas pressure in above-mentioned vacuum passage (i.e. adsorption hole 112 and cavity 111 are formed vacuum passage) lower than the atmospheric pressure of the outside in adsorption hole 112 exit, thus define negative pressure, so, described substrate is adsorbed in securely on described vacuum absorbing platform under the effect of the atmospheric pressure of outside.Described vacuum generating system comprises the vacuum pipe be connected with cavity 111 and the vavuum pump be connected with described vacuum pipe, and described vavuum pump is used for vacuumizing cavity 111.
In the present embodiment, described vacuum absorption device 100 is applicable to a laser cutting device, to fix a glass substrate.But, described vacuum absorption device 100 comprises but does not limit to and is applied to laser cutting device, every miscellaneous equipment by vacuum suction mode fixing base is also applicable, cmp (the CMP of such as wafer manufacturing process, ChemicalMechanicalPolishing) equipment, now, described vacuum absorption device 100 is for fixing a wafer grinding.
In sum, the vacuum absorption device 100 that the utility model provides, during its work, when having exposed adsorption hole 112 after monitoring vacuum absorbing platform placement substrate by control system, control sealing mechanism and exposed adsorption hole 112 is carried out shutoff, to thus ensure that in vacuum absorbing platform that negative pressure is normal, thus avoid and cause negative pressure in vacuum absorbing platform abnormal because substrate damage causes adsorption hole 112 exposed, and then occur that vacuum absorption device 100 crashes problem.
Especially, concerning cutting glass by laser substrate, adopt vacuum absorption device 100 of the present utility model, even if there is edge breakage problem in glass substrate, laser cutting device still can normal glass-cutting substrate, the glass substrate of edge breakage can be utilized, reduce material cost more greatly.
Foregoing description is only the description to the utility model preferred embodiment; any restriction not to the utility model scope; any change that the those of ordinary skill in the utility model field does according to above-mentioned disclosure, modification, all belong to the protection domain of claims.

Claims (10)

1. a vacuum absorption device, comprise one for the vacuum absorbing platform of bearing substrate, the cavity that described vacuum absorbing platform is provided with adsorption hole and is communicated with described adsorption hole, described adsorption hole and cavity form a vacuum passage, it is characterized in that, described vacuum absorption device also comprises detecting the control system of exposed adsorption hole on described vacuum absorbing platform and the sealing mechanism in order to seal described exposed adsorption hole.
2. vacuum absorption device according to claim 1, it is characterized in that, described sealing mechanism comprises seal and driving mechanism, and described driving mechanism drives described seal to move under the control of described control system, to make adsorption hole exposed described in described seal shutoff.
3. vacuum absorption device according to claim 2, it is characterized in that, described control system comprises control module and monitor, described monitor monitors is to when having exposed adsorption hole after described vacuum absorbing platform places described substrate, described control module controls the motion of described driving mechanism, to drive adsorption hole exposed described in described seal shutoff.
4. vacuum absorption device according to claim 3, is characterized in that, described monitor is a pressure sensor or camera.
5. vacuum absorption device according to claim 4, is characterized in that, described pressure sensor is arranged in described vacuum passage or is arranged on described seal.
6. the vacuum absorption device according to any one of claim 2 to 5, is characterized in that, described driving mechanism is a fluid pressure drive device or actuating device of atmospheric pressure.
7. vacuum absorption device according to claim 6, it is characterized in that, described actuating device of atmospheric pressure comprises cylinder, feeder and valve, described cylinder to be arranged in described cavity and to be connected with described feeder, described valve connects described feeder and control system, and described cylinder comprises cylinder body and piston, described piston to be arranged in described cylinder body and to connect described seal by a piston rod.
8. the vacuum absorption device according to any one of claim 2 to 5, it is characterized in that, described driving mechanism comprises air bag, feeder and valve, described seal is arranged on described air bag, described air bag to be arranged in described cavity and to be connected with described feeder, and described valve connects described feeder and control system.
9. the vacuum absorption device according to any one of claim 2 to 5, is characterized in that, described seal is a cork.
10. vacuum absorption device according to claim 1, it is characterized in that, described vacuum absorption device also comprises a vacuum generating system, described vacuum generating system is connected with described cavity, and described vacuum absorption device is a laser cutting vacuum absorption device or cmp vacuum absorption device.
CN201520971268.XU 2015-11-30 2015-11-30 Vacuum adsorption device Active CN205166195U (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105921894A (en) * 2016-05-17 2016-09-07 京东方科技集团股份有限公司 Bearing platform and cutting method
CN106141519A (en) * 2016-08-31 2016-11-23 株洲天瑞精密钣金有限公司 A kind of negative-pressure adsorption welder and negative-pressure adsorption welding method
CN106583944A (en) * 2016-12-09 2017-04-26 无锡航亚科技股份有限公司 Device and method for cutting flash of forging
WO2018059089A1 (en) * 2016-09-30 2018-04-05 京东方科技集团股份有限公司 Base stage, laser cutting device and control method therefor
CN108831298A (en) * 2018-05-31 2018-11-16 昆山国显光电有限公司 Bend jig
CN110369936A (en) * 2019-07-19 2019-10-25 晶澳(邢台)太阳能有限公司 Adsorbent equipment and photovoltaic string welding machine
CN111791161A (en) * 2020-07-20 2020-10-20 邹友栓 Vacuum adsorption base
CN115055860A (en) * 2022-08-11 2022-09-16 江苏绿能汽配科技有限公司 Pipe fitting welding equipment for vehicle production
CN115072370A (en) * 2022-06-29 2022-09-20 闽南理工学院 Intelligent vacuum sucker

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105921894A (en) * 2016-05-17 2016-09-07 京东方科技集团股份有限公司 Bearing platform and cutting method
CN106141519A (en) * 2016-08-31 2016-11-23 株洲天瑞精密钣金有限公司 A kind of negative-pressure adsorption welder and negative-pressure adsorption welding method
WO2018059089A1 (en) * 2016-09-30 2018-04-05 京东方科技集团股份有限公司 Base stage, laser cutting device and control method therefor
US10898974B2 (en) 2016-09-30 2021-01-26 Boe Technology Group Co., Ltd. Abutment, laser cutting device and control method thereof
CN106583944A (en) * 2016-12-09 2017-04-26 无锡航亚科技股份有限公司 Device and method for cutting flash of forging
CN108831298A (en) * 2018-05-31 2018-11-16 昆山国显光电有限公司 Bend jig
CN110369936A (en) * 2019-07-19 2019-10-25 晶澳(邢台)太阳能有限公司 Adsorbent equipment and photovoltaic string welding machine
CN111791161A (en) * 2020-07-20 2020-10-20 邹友栓 Vacuum adsorption base
CN111791161B (en) * 2020-07-20 2022-03-18 深圳市君昊医用吸塑包装有限公司 Vacuum adsorption base
CN115072370A (en) * 2022-06-29 2022-09-20 闽南理工学院 Intelligent vacuum sucker
CN115072370B (en) * 2022-06-29 2023-12-29 闽南理工学院 Intelligent vacuum chuck
CN115055860A (en) * 2022-08-11 2022-09-16 江苏绿能汽配科技有限公司 Pipe fitting welding equipment for vehicle production

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