CN202712149U - Substrate adsorption apparatus - Google Patents
Substrate adsorption apparatus Download PDFInfo
- Publication number
- CN202712149U CN202712149U CN 201220266506 CN201220266506U CN202712149U CN 202712149 U CN202712149 U CN 202712149U CN 201220266506 CN201220266506 CN 201220266506 CN 201220266506 U CN201220266506 U CN 201220266506U CN 202712149 U CN202712149 U CN 202712149U
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- absorption
- mask plate
- adsorption
- substrate
- bar
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Abstract
The utility model relates to the display technology field, particularly to a substrate adsorption apparatus. The substrate adsorption apparatus comprises a frame, at least one retractable adsorption rod connected to the frame, and a pressure pumping unit connected to the adsorption rod, wherein one end of the adsorption rod is provided with an adsorption end; the end face of the adsorption end is provided with an adsorption sheet made of transparent flexible material; and the top of the frame is connected with a driving unit. In the substrate adsorption apparatus of the utility model, the adsorption end, which is directly contacted with a mask plate, is made of transparent flexible material, thereby being capable of effectively protecting the surface of the mask plate against scratches. In addition, the gap between the adsorption end and the mask plate can be substantially reduced, thereby making the adsorption end firmly suck the mask plate and avoiding the shedding problem in the mask plate production process. The substrate adsorption apparatus features convenient operation and maximally raises the working efficiency.
Description
Technical field
The utility model relates to the Display Technique field, particularly relates to a kind of substrate absorption device.
Background technology
Usually, be used for the appearance of rapid curing fluid sealant at solidifyingization of ultraviolet ray equipment, its curing degree is about 50% of fluid sealant integral body, and the purpose of its curing is in order to prevent that the too fast diffusion of liquid crystal from contacting with fluid sealant and bring into play reaction, and prevents that liquid crystal is diffused into outside the panel.And the effect of ultraviolet mask plate can prevent effectively that ultraviolet ray from shining the liquid crystal property that liquid crystal causes and changing, and the quality of its effect directly has influence on the quality of final products, and therefore, this link is most important.
And at present, the mode that most of manufacturer mostly adopts quartz pushrod absorption is mask plate fixedly, by direct open channels and adopt the method for pull of vacuum to adsorb mask plate in the quartz pushrod, and the method easy following problem of appearance in implementation process:
(1) because the quartz pushrod material is harder, and to often carry mask plate in working order, and then so that quartz pushrod when contacting with the surface of mask plate is frequent, is easy to scratch the surface of mask plate, make mask plate in the process that picks and places, be subject to unnecessary damage;
(2) because quartz pushrod and mask plate all belong to rigid material, when these two rigid materials are in contact with one another, the surface of this quartz pushrod is difficult to produce deformation and comes to attach fully with mask plate, existing easily the slit that gas leakage occurs between the two causes the suction of vacuum inadequate, cause in the mask plate carrying production process obscission occurs, cause certain cost allowance.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model provides a kind of substrate absorption device, is easy to scratch mask plate and causes easily the insecure defective such as cause that mask plate comes off of absorption to overcome existing suction type.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of substrate absorption device, comprising:
Framework connects at least one scalable absorption bar on the described framework, described absorption bar connects takes out the pressure unit, and an end of described absorption bar has the absorption end, and the end face of described absorption end is provided with the suction sheet of being made by the transparent flexible material; The connection for transmission unit, top of described framework.
Further, described gear unit comprises screw mandrel, and described screw mandrel connects driver element.
Further, described gear unit also comprises decelerator, and it is connected between described screw mandrel and the driver element.
Further, described flexible material is sulphurated siliastic or polystyrene.
Further, described absorption bar inside is provided with for the spring members that shortens the absorption pole length at vertical direction.
Further, be provided with the passage that connects to the absorption end in the described absorption bar, described passage connects takes out the pressure unit.
Further, the two ends of described framework connect lead.
Further, the end face of described absorption end is circular.
(3) beneficial effect
Technique scheme has following advantage: the substrate absorption device that the utility model provides, adopt the transparent flexible material to make with the absorption end end face that mask plate directly contacts, can effectively avoid the mask plate surface to be scratched, can greatly reduce simultaneously the slit that exists between absorption end and the mask plate, so that the absorption end can firmly adsorb mask plate, prevent the obscission that mask plate occurs in process of production, easy to operate, farthest increase work efficiency.
Description of drawings
Fig. 1 is the utility model embodiment substrate absorption device structural representation;
Fig. 2 is the utility model embodiment substrate absorption device application places structural representation;
Fig. 3 is that the utility model embodiment substrate absorption device is applied to the system schematic in the solidifying metallization processes of ultraviolet ray.
Reference numeral:
1: framework; 11: guide post; 2: the absorption bar; 21: the absorption end; 22: suction sheet; 23: vacuum port; 24: spring members; 3: screw mandrel; 4: motor; 5: decelerator; 6: bolt; 7: ultraviolet lamp box; 8: baffle plate; 9: cross bar; 10: mask plate.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
Shown in Fig. 1-2, the present embodiment substrate absorption device comprises: framework 1, connect at least one collapsible absorption bar 2 on the framework 1, and the concrete quantity of this absorption bar 2 can be decided according to the actual requirements.Be provided with the passage that connects to the absorption end in this absorption bar 2, this passage is provided with and vacuumizes end 23, and this vacuumizes end 23 and connects and be used for adopting that vacuum takes out negative pressure takes out the pressure unit.This is taken out, and general vacuum machine gets final product in the pressure unit employing prior art.One end of this absorption bar 2 has absorption end 21, and the end face of absorption end 21 is provided with the suction sheet 22 of being made by flexible material; The connection for transmission unit, top of framework 1.In order to increase the contact area of this absorption end and modeling version, the end face of absorption end 21 is set for circular, guarantee that mask plate 10 is adsorbed rear difficult drop-off.
Concrete, this transparent flexible material can adopt the common material that adopts in the prior art for having high transparent, thermal endurance and the characteristic such as softness, more preferably, can select to be sulphurated siliastic or polystyrene.This suction sheet 22 directly contacts with the surface of mask plate 10, can effectively avoid mask plate 10 to be scratched, and mask plate 10 is played preferably protective effect, plays to a certain extent the effect of saving production cost.And this suction sheet 22 is soft material, when it directly contacts with the surface of mask plate 10, by taking out the pressure effect of taking out of pressing the unit, slit between suction sheet 22 and the mask plate 10 can reduce to the minimum, thereby suction sheet 22 can firmly be adsorbed mask plate 10, effectively solve mask plate 10 and the problem that comes off without reason in generative process, occurs.In addition, this suction sheet 22 is transparent material, and its light transmission is good, can not hinder ultraviolet irradiation.
Concrete, this gear unit is used for driving the transmission of this device, and it specifically comprises screw mandrel 3, drive unit and decelerator 5, and wherein, this drive unit specifically can adopt motor 4.This screw mandrel 3 connects motors 4, and decelerator 5 is connected in screw mandrel 3 and motor 4, because the kinetic energy of motor 4 is very large, and when the excessive velocities of motor 4 drive lead screws 3, the movement velocity that can regulate by decelerator 5 screw mandrel.Present embodiment adopts screw mandrel to come the motion of transmission absorption bar, can effectively control the displacement accuracy that adsorbs bar.
In addition, these absorption bar 2 inside are provided with for the spring members 24 that shortens the absorption pole length at vertical direction, self can regulate its length automatically, and the introducing of spring members 24 is in order to compress absorption end and mask plate when manipulator loads mask plate, can not cause vacuum gas leakage.And spring has elasticity, can not damage mask plate when loading.
In order to prevent that this framework 1 from vacillating now to the left, now to the right under the driving force of screw mandrel 3, the two ends of its framework 1 connect lead 11, further guarantee the stable of framework 1, and then the stability of guaranteeing to adsorb bar 2.
As shown in Figure 3, be the system schematic of this application of installation in the solidifying metallization processes of ultraviolet ray.This system also comprises at least one ultraviolet lamp box 7 except comprising the device in the present embodiment, is used for providing ultraviolet irradiation.This ultraviolet lamp box 7 is fixed on the cross bar 9 that is connected in lead 11 two ends.Penetrate in order to prevent that ultraviolet ray is outer, this lead 11 that is positioned at framework 1 both sides connects respectively baffle plate 8.Leading screw will move up and down when adopting manipulator to carry out the loading and unloading mask plate, move to the fixed position after suction sheet adsorbs mask plate, move to mechanism's stop motion behind the fixed position.In addition, in operating process, this mask plate can be placed directly on the position that will adsorb of absorption bar 2 by manipulator, need not to rise to load mask plate 10 with lower board, so that the action of loading mask plate 10 is convenient and swift, increases work efficiency.
The substrate absorption device that the utility model provides, adopt the transparent flexible material to make with the absorption end end face that mask plate directly contacts, can effectively solve mask plate surface tear phenomenon, can greatly reduce simultaneously the slit that exists between absorption end and the mask plate, so that the absorption end can firmly adsorb mask plate, prevent the obscission that mask plate occurs in process of production, make things convenient for simultaneously manipulator to carry out the loading and unloading of mask plate, significantly reduce the cargo handling process required time, farthest increase work efficiency.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection range of the present utility model.
Claims (8)
1. a substrate absorption device is characterized in that, comprising:
Framework connects at least one scalable absorption bar on the described framework, described absorption bar connects takes out the pressure unit, and an end of described absorption bar has the absorption end, and the end face of described absorption end is provided with the suction sheet of being made by the transparent flexible material; The connection for transmission unit, top of described framework.
2. substrate absorption device as claimed in claim 1 is characterized in that, described flexible material is sulphurated siliastic or polystyrene.
3. substrate absorption device as claimed in claim 1 is characterized in that, described gear unit comprises screw mandrel, and described screw mandrel connects driver element.
4. substrate absorption device as claimed in claim 3 is characterized in that, described gear unit also comprises decelerator, and it is connected between described screw mandrel and the driver element.
5. substrate absorption device as claimed in claim 1 is characterized in that, described absorption bar inside is provided with for the spring members that shortens the absorption pole length at vertical direction.
6. substrate absorption device as claimed in claim 1 is characterized in that, is provided with the passage that connects to the absorption end in the described absorption bar, and described passage connects takes out the pressure unit.
7. substrate absorption device as claimed in claim 1 is characterized in that, the two ends of described framework connect lead.
8. substrate absorption device as claimed in claim 1 is characterized in that, the end face of described absorption end is circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220266506 CN202712149U (en) | 2012-06-06 | 2012-06-06 | Substrate adsorption apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220266506 CN202712149U (en) | 2012-06-06 | 2012-06-06 | Substrate adsorption apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202712149U true CN202712149U (en) | 2013-01-30 |
Family
ID=47592426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220266506 Expired - Fee Related CN202712149U (en) | 2012-06-06 | 2012-06-06 | Substrate adsorption apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202712149U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104345572A (en) * | 2013-07-26 | 2015-02-11 | 上海微电子装备有限公司 | Mask plate fixation device and method |
| CN106842645A (en) * | 2017-02-28 | 2017-06-13 | 合肥鑫晟光电科技有限公司 | A kind of control method for adsorbing bar, vacuum abutted equipment and vacuum abutted equipment |
| CN107475675A (en) * | 2017-09-11 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | evaporator |
| CN107621705A (en) * | 2017-09-16 | 2018-01-23 | 合肥惠科金扬科技有限公司 | A kind of crystal liquid substrate adsorbent equipment |
| CN110625540A (en) * | 2014-05-03 | 2019-12-31 | 株式会社半导体能源研究所 | Film-like member supporting apparatus |
-
2012
- 2012-06-06 CN CN 201220266506 patent/CN202712149U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104345572A (en) * | 2013-07-26 | 2015-02-11 | 上海微电子装备有限公司 | Mask plate fixation device and method |
| CN110625540A (en) * | 2014-05-03 | 2019-12-31 | 株式会社半导体能源研究所 | Film-like member supporting apparatus |
| CN106842645A (en) * | 2017-02-28 | 2017-06-13 | 合肥鑫晟光电科技有限公司 | A kind of control method for adsorbing bar, vacuum abutted equipment and vacuum abutted equipment |
| US20180247750A1 (en) * | 2017-02-28 | 2018-08-30 | Boe Technology Group Co., Ltd. | Adsorption bar, vacuum aligner system, and control method of vacuum aligner system |
| CN106842645B (en) * | 2017-02-28 | 2019-08-13 | 合肥鑫晟光电科技有限公司 | A kind of control method for adsorbing bar, vacuum abutted equipment and vacuum abutted equipment |
| US10886052B2 (en) | 2017-02-28 | 2021-01-05 | Boe Technology Group Co., Ltd. | Adsorption bar, vacuum aligner system, and control method of vacuum aligner system |
| CN107475675A (en) * | 2017-09-11 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | evaporator |
| CN107621705A (en) * | 2017-09-16 | 2018-01-23 | 合肥惠科金扬科技有限公司 | A kind of crystal liquid substrate adsorbent equipment |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20210606 |
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| CF01 | Termination of patent right due to non-payment of annual fee |