CN219226257U - Suction nozzle and adsorption module - Google Patents
Suction nozzle and adsorption module Download PDFInfo
- Publication number
- CN219226257U CN219226257U CN202222554083.1U CN202222554083U CN219226257U CN 219226257 U CN219226257 U CN 219226257U CN 202222554083 U CN202222554083 U CN 202222554083U CN 219226257 U CN219226257 U CN 219226257U
- Authority
- CN
- China
- Prior art keywords
- suction nozzle
- adsorption
- suction
- head
- nozzle head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Manipulator (AREA)
Abstract
The utility model provides a suction nozzle and an adsorption module, wherein the suction nozzle comprises a suction nozzle seat; a suction nozzle head connected with the suction nozzle seat; a gas channel for connecting with the vacuumizing equipment is formed on the suction nozzle seat; the adsorption port of the suction nozzle head is communicated with the gas channel; the suction nozzle further comprises a moving part; the moving part comprises a moving part capable of moving up and down in the suction nozzle head and an action part combined and fixed with the moving part; the movable piece is configured to move upwards under the action of vacuum suction when the suction nozzle adsorbs and takes materials, so that the movable piece is completely positioned in the suction nozzle head, and a product is adsorbed and fixed on the adsorption port; when the suction nozzle discharges materials, the moving part moves downwards under the action of self gravity, and the acting part protrudes downwards from the adsorption port so as to push the product positioned on the adsorption port, so that the product is separated from the suction nozzle head. The suction nozzle can reduce the material sticking condition when adsorbing products, so that the small-sized products or products with dirty surfaces can be more stably sucked and discharged, and the working efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor testing. And more particularly, to a suction nozzle and an adsorption module.
Background
A semiconductor chip is a semiconductor device that can achieve a certain function by etching and wiring on a semiconductor sheet. Along with the development of semiconductor technology, the complexity of the chip is higher and higher, in order to ensure the quality of the chip delivered from the factory, the chip needs to be subjected to functional test before delivery to ensure the integrity of the chip function, realize the control of the quality of the chip, and promote the development of the semiconductor industry. When the chip is detected, the chip is generally required to be adsorbed and fixed by a suction nozzle and then conveyed to a detection position.
However, when the existing suction nozzle adsorbs a product with the size of 3mm or less, serious sticking problems can be generated due to small size and light weight of the product or excessive pollutants on the surface of the product, so that the product is attached to the suction head, and inaccurate discharging is caused.
Disclosure of Invention
In view of the above problems, the utility model provides a suction nozzle and an adsorption module, wherein the suction nozzle can reduce the sticky material condition when adsorbing products, so that the suction of small-sized products or products with dirty surfaces is more stable, and the working efficiency is improved.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a suction nozzle, comprising:
a suction nozzle seat; and
a suction nozzle head connected with the suction nozzle seat;
the suction nozzle seat is provided with a gas channel for connecting with a vacuum pumping device;
the adsorption port of the suction nozzle head is communicated with the gas channel;
the suction nozzle further comprises a moving part;
the moving part comprises a moving part capable of moving up and down in the suction nozzle head and an action part combined and fixed with the moving part;
the movable piece is configured to move upwards under the action of vacuum suction when the suction nozzle adsorbs and takes materials, so that the movable piece is completely positioned in the suction nozzle head, and a product is adsorbed and fixed on the adsorption port; when the suction nozzle discharges materials, the moving part moves downwards under the action of self gravity, and the acting part protrudes downwards from the adsorption port so as to push the product positioned on the adsorption port, so that the product is separated from the suction nozzle head.
Furthermore, preferably, the suction nozzle head comprises a first connecting piece and a suction nozzle combined and fixed with the first connecting piece;
the adsorption port is formed on the suction head; a first channel for communicating with the gas channel is formed in the first connecting piece; a second channel communicated with the adsorption port is formed in the suction head; the first channel is communicated with the second channel; the moving part is positioned in the second channel.
Furthermore, preferably, the suction nozzle seat is provided with an annular table top; the suction nozzle head comprises a boss surrounding the suction nozzle head; the suction nozzle seat is sleeved on the suction nozzle head;
a spring is arranged between the suction nozzle seat and the suction nozzle head; one end of the spring is fixedly connected with the annular table top, and the other end of the spring is fixedly connected with the boss; the suction nozzle head can move along the axial direction of the suction nozzle seat.
Furthermore, preferably, the suction nozzle comprises a fixing piece for connecting the suction nozzle seat and the suction nozzle head; a fixing hole is formed on the suction nozzle seat; the suction nozzle head is provided with a strip-shaped hole extending along the axial direction of the suction nozzle head; the fixed holes correspond to the strip-shaped hole positions; the fixing piece is in threaded connection with the fixing hole; the end of the fixing piece is positioned in the strip-shaped hole.
Furthermore, preferably, the moving member is formed with a flow groove;
the air flow groove is configured to be communicated with the air channel and the adsorption port when the suction nozzle adsorbs the material.
Further, preferably, the second channel includes a first collar formed by extending inward from an inner wall surface of the suction head, and the first collar is configured to abut against a moving portion of the moving member.
The utility model also provides an adsorption module, which comprises a rotatable driving shaft; and
at least two groups of adsorption units arranged along the axial direction X of the driving shaft;
each group of adsorption units comprises two second connecting pieces arranged along the X direction;
one end part of the second connecting piece is connected to the driving shaft, and the other end part of the second connecting piece comprises an absorbing piece;
the suction member includes a suction nozzle as described above;
the two second connecting pieces of the same adsorption unit can be mutually close to or mutually far away under the rotation driving force of the driving shaft;
the two adjacent groups of adsorption units can be mutually close to or mutually far away under the rotation driving force of the driving shaft.
Furthermore, preferably, the adsorbing member further includes a main body; the suction nozzle is connected with the vacuumizing equipment through the main body; an elastic piece is arranged between the suction nozzle and the main body.
In addition, preferably, the adsorption module further comprises a lifting mechanism for driving all the adsorption elements to move along the Y direction.
Furthermore, preferably, the absorbing member is mounted on the connecting member through a fine adjustment assembly; the fine adjustment assembly comprises a connecting plate combined and fixed with the second connecting piece and an adjusting plate combined and fixed with the adsorption piece; the connecting plate comprises a groove extending along the X direction; the adjusting plate comprises a protrusion correspondingly matched with the groove; the adjusting plate is configured to drive the adsorbing piece to move relative to the connecting plate under the action of external force.
The beneficial effects of the utility model are as follows:
according to the utility model, the position of the moving part on the suction nozzle head is adjusted, when the moving part moves upwards under the action of vacuum suction, the moving part can be completely positioned in the suction nozzle head to avoid a product to be adsorbed, then the vacuum suction is matched to ensure that the product can be stably adsorbed and fixed on the adsorption port, when the vacuum suction is disappeared, the moving part moves downwards under the action of self gravity, at the moment, the acting part protrudes downwards along the adsorption port to push the product adhered on the adsorption port downwards, so that the separation of the product and the suction nozzle head is completed, the problem of sticky materials when the product is adsorbed is solved, the product with small size or the product with dirty surface is more stable to be adsorbed and released, and the working efficiency is improved.
Drawings
The following describes the embodiments of the present utility model in further detail with reference to the drawings.
Fig. 1 is a schematic view of the overall structure of the suction nozzle of the present utility model.
Fig. 2 is a cross-sectional view of the suction nozzle of the present utility model.
Fig. 3 is an assembly view of the suction nozzle of the present utility model.
Fig. 4 is a schematic diagram of the overall structure of the adsorption module of the present utility model.
Fig. 5 is an assembly view of the adsorption module of the present utility model.
Fig. 6 is a schematic view of the assembly of the absorbent member of the present utility model.
Fig. 7 is an assembled schematic view of the trimming assembly of the present utility model.
Detailed Description
Various exemplary embodiments of the present utility model will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present utility model unless it is specifically stated otherwise.
The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the utility model, its application, or uses.
Techniques and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate.
In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of exemplary embodiments may have different values.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
In order to solve the problem that the existing suction nozzle can generate serious sticky materials when adsorbing products with the size of 3mm below 3mm or products with excessive pollutants on the surface. The present utility model provides a suction nozzle and an adsorption module, and in particular, the suction nozzle 10 includes, as shown in fig. 1 to 7: a suction nozzle seat 11; and a nozzle head 12 connected to the nozzle base 11 for adsorbing and fixing the product 30; the suction nozzle seat 11 is provided with a gas channel 111 for connecting with a vacuum pumping device; the adsorption port 121 of the suction nozzle head 12 is communicated with the gas channel 111; the suction nozzle 10 further comprises a moving member 13; the moving member 13 includes a moving part 131 movable up and down in the nozzle head 12, and an acting part 132 coupled and fixed to the moving part 131; the moving member 13 is configured such that when the suction nozzle 10 sucks the material, the moving member 13 moves upward under the action of the vacuum suction force, so that the moving member 13 is completely located in the suction nozzle head 12 to avoid the suction space, and the product 30 is sucked and fixed on the suction port 121; when the suction nozzle 10 is discharged, the vacuum pumping device does not work any more, the moving member 13 moves downward under the action of its own gravity, and the acting portion 132 protrudes downward from the suction opening 121 to push the product 30 adhered to the suction opening 121 due to the small size, light weight or excessive contaminants on the surface, so that the product 30 is separated from the suction nozzle head 12, the failure rate in the running process of the device is reduced, and the productivity of the device is greatly improved.
In one embodiment, regarding the specific structure of the nozzle head 12, the nozzle head 12 includes a first connecting member 122 for connecting with the nozzle base 11, and a suction head 123 combined and fixed with the first connecting member 122; the adsorption port 131 is formed on the suction head 123; a first passage 1221 for communicating with the gas passage 111 is formed in the first connecting member 122, a second passage 1231 for communicating with the suction port 121 is formed in the suction head 123, the first passage 1221 and the second passage 1231 are communicated, and the gas passage 111, the first passage 1221, the second passage 1231 and the suction port 121 form a complete gas path of the suction nozzle 10; the moving part 131 is located in the second passage 1231 and can move up and down in the second passage 1231.
Further, regarding the specific structure of the nozzle base 11, the nozzle base 11 includes a first structure portion 112 and a second structure portion 113 integrally formed with the first structure portion 112; the bottom surface of the first structure part 112 is an annular table surface 114; the outer side wall of the suction nozzle head 12 comprises a boss 124, and the boss 124 surrounds the suction nozzle head 12; the suction nozzle seat 11 is sleeved on the first connecting piece 122 of the suction nozzle head 12, the suction nozzle seat 11 and the suction nozzle head 12 are coaxially arranged, and the boss 124 is positioned outside the suction nozzle seat 11; the suction nozzle head 12 can move along the axial direction of the suction nozzle seat 11; a spring 125 is sleeved on the second structure part 113; one end of the spring 125 is fixedly connected with the annular table 114, the other end of the spring 125 is fixedly connected with the boss 124, and the elasticity of the spring 125 is smaller than the suction force of the vacuum pumping device to the first connecting piece 122 when the suction nozzle 10 is in suction (i.e. does not suck products), so that the first connecting piece 122 moves upwards and compresses the spring 125 when vacuum is sucked; advantageously, when the vacuum apparatus is not operated, the nozzle head 12 is moved to be restored by the elastic force of the spring 125, and the stroke impact force can damage the adhesion between the product 30 and the suction head 123 to some extent. Specifically, when the suction nozzle 10 sucks the material, the moving member 13 moves upward and the first connecting member 122 also moves upward; when the suction nozzle 10 discharges, the moving member 13 moves downward under the action of its own weight, and the first connecting member 122 also moves downward, thereby further improving the success rate of separating the product from the suction nozzle head.
Regarding the specific connection mode of the nozzle base 11 and the nozzle head 12, the nozzle 10 includes a fixing member 126 for connecting the nozzle base 11 and the nozzle head 12; a fixing hole is formed on the suction nozzle seat 11; the suction nozzle head 12 is provided with a strip-shaped hole extending along the axial direction of the suction nozzle head 12; the fixed holes correspond to the strip-shaped hole positions; the fixing piece 126 is in threaded connection and fixed with the fixing hole; the end of the fixing piece 126 is positioned in the strip-shaped hole; through the above arrangement, the nozzle head 12 can move along the axial direction of the nozzle seat 11 within a certain distance range through the strip-shaped hole, and the fixing member 126 also has the function of limiting the nozzle head 12, which can prevent the nozzle head 12 from rotating around the axis of the nozzle seat 11.
In order to ensure that the gas channel 111 and the adsorption port 121 are communicated to stably adsorb the product, in one embodiment, the moving member 13 is formed with a gas flow groove 133; the airflow groove 133 is configured such that when the suction nozzle 10 sucks the material, the airflow groove 133 is communicated with the air channel 111 and the suction port 121, so that the situation that the moving part 131 blocks the first channel 1221 after contacting the first connecting piece 122 can be avoided; more specifically, the overall size of the acting portion 132 is smaller than the size of the adsorption port 121 to ensure that the passage above the adsorption port 121 is not completely blocked by the acting portion 132 when adsorbing the product 30, and to ensure that the air flow groove 133 communicates with the adsorption port 121.
In a specific embodiment, the second channel 1231 includes a first collar 1232 formed by extending the inner wall surface of the suction head 123 inward, and the top surface of the first collar 1232 can abut against the bottom surface of the moving portion 131 of the moving member 13, so as to limit the load-bearing position of the moving member 13.
The utility model also provides an adsorption module comprising a rotatable drive shaft 22; and at least two groups of adsorption units arranged along the axial direction X of the drive shaft 22; each group of adsorption units comprises two second connecting pieces 23 arranged along the X direction; the second connecting piece 23 has one end connected to the driving shaft 22 and the other end including an absorbing piece 24; the suction member 24 includes the suction nozzle 10 as described above; the two second connection pieces 23 of the same adsorption unit can be moved closer to or further away from each other by the rotational driving force of the driving shaft 22; the adjacent two groups of adsorption units can be mutually close to or mutually far away under the rotation driving force of the driving shaft 22; that is, when the two second connectors 23 of the same adsorption unit move close to each other, the two adjacent groups of adsorption units move away from each other; when the two second connecting pieces 23 of the same adsorption unit move away from each other, the two adjacent groups of adsorption units move close to each other.
In the above embodiment, the suction units 24 are driven to move closer to or farther from each other by rotating the driving shaft 22 to adjust the distance between the adjacent suction nozzles 10, and the distance between the adjacent two groups of suction units can be adjusted, as shown in fig. 4, in this embodiment, the suction module includes two groups of suction units, and by the above arrangement, the distance between all four suction nozzles 10 can be adjusted without using other devices to rotate only by using the driving shaft, and meanwhile, the assembly precision of the product is improved; it will be appreciated that the drive shaft 22 is rotated about the axis of the drive shaft 22 itself by the drive of the drive member 21.
In the above embodiment, the absorbent member 24 is mounted on the second connecting member 23 by the fine adjustment assembly 20; the fine tuning assembly 20 comprises a connecting plate 25 combined and fixed with the second connecting piece 23 and an adjusting plate 26 combined and fixed with the absorbing piece 24; the connecting plate 25 includes a groove 251 extending in the X direction; the adjusting plate 26 comprises a protrusion 261 correspondingly matched with the groove 251; the adjusting plate 26 is configured to drive the absorbing member 24 to move relative to the connecting plate 25 under the action of external force, and the adjusting plate 26 and the connecting plate 25 can be screwed and fixed by screws after the relative position is adjusted. Further, the adsorption module further includes a lifting mechanism for driving all the adsorption elements 24 to move along the Y direction at the same time, and the lifting mechanism is a linear module 27. It can be understood that the axial direction of the nozzle seat 11 of the nozzle 10 is also the Y direction, and by the above arrangement, the requirement for the assembly accuracy of the product is effectively reduced, so that the adsorption module can perform error compensation in the Y direction and the X direction.
In order to make the suction nozzle 10 accurately and stably adsorb the chip, the adsorption module further includes a camera 28 for calibrating and positioning the suction nozzle 10, and the lens axis of the camera 28 is arranged along the Y direction, which is the vertical direction. Further, the adsorption module further comprises a sensor 29 for sensing the rotation angle of the driving shaft 22. The rotation angle of the driving shaft 22 is sensed by the sensor 29, so that the distance between the two absorption parts 24 is determined, the distance is controlled and changed, and the distance changing precision and efficiency of the absorption module are ensured.
In one embodiment, the adsorbing member 24 further includes a main body 241; the suction nozzle 10 is connected with a vacuum pumping device through a main body 241; an elastic member 242 is disposed between the suction nozzle 10 and the main body 241; when the suction nozzle 10 sucks the chip, the elastic member 242 can provide compression buffer for the suction nozzle 10, so that the suction nozzle 10 can better suck the chip due to the various thicknesses of the chip.
In summary, according to the utility model, by adjusting the position of the moving member on the suction nozzle head, when the moving member moves upwards under the action of vacuum suction, the moving member can be completely positioned in the suction nozzle head to avoid a product to be adsorbed, then the vacuum suction is matched to ensure that the product can be stably adsorbed and fixed on the adsorption port, when the vacuum suction disappears, the moving member moves downwards under the action of self gravity, and at the moment, the acting part protrudes downwards along the adsorption port to push the product adhered on the adsorption port downwards, so that the separation of the product and the suction nozzle head is completed, the problem of sticking materials during the adsorption of the product is solved, the sucking and releasing of the product with small size or the product with dirty surface are more stable, and the working efficiency is improved.
It should be understood that the foregoing examples of the present utility model are provided merely for clearly illustrating the present utility model and are not intended to limit the embodiments of the present utility model, and that various other changes and modifications may be made therein by one skilled in the art without departing from the spirit and scope of the present utility model as defined by the appended claims.
Claims (10)
1. A suction nozzle, comprising:
a suction nozzle seat; and
a suction nozzle head connected with the suction nozzle seat;
the suction nozzle seat is provided with a gas channel for connecting with a vacuum pumping device;
the adsorption port of the suction nozzle head is communicated with the gas channel;
the suction nozzle further comprises a moving part;
the moving part comprises a moving part capable of moving up and down in the suction nozzle head and an action part combined and fixed with the moving part;
the movable piece is configured to move upwards under the action of vacuum suction when the suction nozzle adsorbs and takes materials, so that the movable piece is completely positioned in the suction nozzle head, and a product is adsorbed and fixed on the adsorption port; when the suction nozzle discharges materials, the moving part moves downwards under the action of self gravity, and the acting part protrudes downwards from the adsorption port so as to push the product positioned on the adsorption port, so that the product is separated from the suction nozzle head.
2. The suction nozzle as claimed in claim 1, wherein the suction nozzle head comprises a first connector and a suction head fixed in combination with the first connector;
the adsorption port is formed on the suction head; a first channel for communicating with the gas channel is formed in the first connecting piece; a second channel communicated with the adsorption port is formed in the suction head; the first channel is communicated with the second channel; the moving part is positioned in the second channel.
3. The suction nozzle as claimed in claim 1, wherein the suction nozzle base has an annular table-top formed thereon; the suction nozzle head comprises a boss surrounding the suction nozzle head; the suction nozzle seat is sleeved on the suction nozzle head;
a spring is arranged between the suction nozzle seat and the suction nozzle head; one end of the spring is fixedly connected with the annular table top, and the other end of the spring is fixedly connected with the boss; the suction nozzle head can move along the axial direction of the suction nozzle seat.
4. The suction nozzle as claimed in claim 1, wherein the suction nozzle comprises a fixing member for connecting the nozzle base and the nozzle head; a fixing hole is formed on the suction nozzle seat; the suction nozzle head is provided with a strip-shaped hole extending along the axial direction of the suction nozzle head; the fixed holes correspond to the strip-shaped hole positions; the fixing piece is in threaded connection with the fixing hole; the end of the fixing piece is positioned in the strip-shaped hole.
5. The suction nozzle as claimed in claim 1, wherein the moving member is formed with a flow groove;
the air flow groove is configured to be communicated with the air channel and the adsorption port when the suction nozzle adsorbs the material.
6. The suction nozzle as claimed in claim 2, wherein the second passage includes a first collar formed by extending an inner wall surface of the suction nozzle inward, the first collar being adapted to abut against the moving portion of the moving member.
7. An adsorption module, comprising a rotatable drive shaft; and
at least two groups of adsorption units arranged along the axial direction X of the driving shaft;
each group of adsorption units comprises two second connecting pieces arranged along the X direction;
one end part of the second connecting piece is connected to the driving shaft, and the other end part of the second connecting piece comprises an absorbing piece;
the suction member comprising a suction nozzle according to any one of claims 1 to 6;
the two second connecting pieces of the same adsorption unit can be mutually close to or mutually far away under the rotation driving force of the driving shaft;
the two adjacent groups of adsorption units can be mutually close to or mutually far away under the rotation driving force of the driving shaft.
8. The adsorption module of claim 7, wherein the adsorption member further comprises a body; the suction nozzle is connected with the vacuumizing equipment through the main body; an elastic piece is arranged between the suction nozzle and the main body.
9. The adsorption module of claim 7, further comprising a lift mechanism for driving movement of all of the adsorption elements in the Y-direction.
10. The adsorption module of claim 7, wherein the adsorption member is mounted to the second connector by a trim assembly; the fine adjustment assembly comprises a connecting plate combined and fixed with the second connecting piece and an adjusting plate combined and fixed with the adsorption piece; the connecting plate comprises a groove extending along the X direction; the adjusting plate comprises a protrusion correspondingly matched with the groove; the adjusting plate is configured to drive the adsorbing piece to move relative to the connecting plate under the action of external force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222554083.1U CN219226257U (en) | 2022-09-27 | 2022-09-27 | Suction nozzle and adsorption module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222554083.1U CN219226257U (en) | 2022-09-27 | 2022-09-27 | Suction nozzle and adsorption module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219226257U true CN219226257U (en) | 2023-06-20 |
Family
ID=86752745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222554083.1U Active CN219226257U (en) | 2022-09-27 | 2022-09-27 | Suction nozzle and adsorption module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219226257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118076084A (en) * | 2024-03-08 | 2024-05-24 | 珠海市硅酷科技有限公司 | Attaching head |
-
2022
- 2022-09-27 CN CN202222554083.1U patent/CN219226257U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118076084A (en) * | 2024-03-08 | 2024-05-24 | 珠海市硅酷科技有限公司 | Attaching head |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN219226257U (en) | Suction nozzle and adsorption module | |
| US7314344B2 (en) | Substrate-transporting device | |
| CN100432776C (en) | Substrate assembling apparatus and substrate assembling method | |
| KR100496401B1 (en) | Suction Unit | |
| CN117747526A (en) | Wafer sorting guide machine | |
| TWM627057U (en) | Water drop angle measuring machine | |
| JP4490449B2 (en) | Workpiece suction transfer device | |
| CN113137425B (en) | Suction cup device | |
| CN209922501U (en) | Automatic feeding device for thin materials | |
| CN217920282U (en) | Conveying adsorption device | |
| CN217229418U (en) | Adsorb response subassembly | |
| CN116588686A (en) | Glass substrate carrying device | |
| CN114313989B (en) | Loading device and automatic optical detection equipment | |
| JP2003332792A (en) | Electronic circuit component mounting head | |
| CN216234808U (en) | Multi-sheet product transferring, overturning and feeding device | |
| CN211812234U (en) | Novel annular highlight product transfer system | |
| CN220200664U (en) | Panel conveying mechanism and panel feeding conveying system | |
| JP2003273588A (en) | Surface mounting apparatus | |
| KR19990086041A (en) | Robot hand | |
| KR102284218B1 (en) | Demounting device | |
| KR102003782B1 (en) | Stall detecting apparatus for pulse motor | |
| KR102702523B1 (en) | Substrate processing apparatus and substrate processing method | |
| CN117542777B (en) | High-speed high-precision carrying device | |
| CN112147853B (en) | Adsorption device, method, cross-over hand, mask transmission system and photoetching equipment | |
| CN110683354A (en) | Novel annular highlight product transferring system and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |