TWI367384B - Thin film transistors with poly(arylene ether) polymers as gate dielectrics and passivation layers - Google Patents
Thin film transistors with poly(arylene ether) polymers as gate dielectrics and passivation layersInfo
- Publication number
- TWI367384B TWI367384B TW096119830A TW96119830A TWI367384B TW I367384 B TWI367384 B TW I367384B TW 096119830 A TW096119830 A TW 096119830A TW 96119830 A TW96119830 A TW 96119830A TW I367384 B TWI367384 B TW I367384B
- Authority
- TW
- Taiwan
- Prior art keywords
- poly
- polymers
- thin film
- film transistors
- arylene ether
- Prior art date
Links
- 239000003989 dielectric material Substances 0.000 title 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 title 1
- 238000002161 passivation Methods 0.000 title 1
- -1 poly(arylene ether Chemical compound 0.000 title 1
- 229920000642 polymer Polymers 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/42—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes polyesters; polyethers; polyacetals
- H01B3/427—Polyethers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/34—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
- C08G65/38—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols
- C08G65/40—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols from phenols (I) and other compounds (II), e.g. OH-Ar-OH + X-Ar-X, where X is halogen atom, i.e. leaving group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Thin Film Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Polyethers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US81053406P | 2006-06-02 | 2006-06-02 | |
US11/752,722 US7919825B2 (en) | 2006-06-02 | 2007-05-23 | Thin film transistors with poly(arylene ether) polymers as gate dielectrics and passivation layers |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200801757A TW200801757A (en) | 2008-01-01 |
TWI367384B true TWI367384B (en) | 2012-07-01 |
Family
ID=38329959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096119830A TWI367384B (en) | 2006-06-02 | 2007-06-01 | Thin film transistors with poly(arylene ether) polymers as gate dielectrics and passivation layers |
Country Status (8)
Country | Link |
---|---|
US (1) | US7919825B2 (zh) |
EP (1) | EP1863037A1 (zh) |
JP (1) | JP4746009B2 (zh) |
KR (1) | KR100882996B1 (zh) |
CN (1) | CN101220147A (zh) |
MY (1) | MY144168A (zh) |
SG (1) | SG137832A1 (zh) |
TW (1) | TWI367384B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4802933B2 (ja) * | 2006-08-17 | 2011-10-26 | セイコーエプソン株式会社 | 半導体装置、電子装置及び電子機器 |
JP2008103653A (ja) * | 2006-09-22 | 2008-05-01 | Tohoku Univ | 半導体装置及び半導体装置の製造方法 |
JP5200377B2 (ja) * | 2006-12-28 | 2013-06-05 | 大日本印刷株式会社 | 有機半導体素子 |
US7736727B2 (en) | 2007-02-23 | 2010-06-15 | Sabic Innovative Plastics Ip B.V. | Electrically insulating film and method |
US7657999B2 (en) * | 2007-10-08 | 2010-02-09 | Advantech Global, Ltd | Method of forming an electrical circuit with overlaying integration layer |
TWI364146B (en) * | 2008-03-27 | 2012-05-11 | Taiwan Tft Lcd Ass | Contact structure and connecting structure |
GB2458940B (en) * | 2008-04-03 | 2010-10-06 | Cambridge Display Tech Ltd | Organic thin film transistors |
JP2010040897A (ja) * | 2008-08-07 | 2010-02-18 | Sony Corp | 有機薄膜トランジスタ、有機薄膜トランジスタの製造方法、および電子機器 |
EP2253669B1 (en) * | 2009-05-20 | 2016-02-24 | Teknologian tutkimuskeskus VTT Oy | PPO composition as bonding base for electronic components, and method |
US8513650B2 (en) * | 2009-05-29 | 2013-08-20 | Xerox Corporation | Dielectric layer for an electronic device |
SG11201503164QA (en) | 2012-10-22 | 2015-06-29 | Delsper LP | Cross-Linked Organic Polymer Compositions and Methods for Controlling Cross-Linking Reaction Rate and of Modifying Same to Enhance Processability |
US9127138B2 (en) | 2013-01-28 | 2015-09-08 | Delsper LP | Anti-extrusion compositions for sealing and wear components |
CA2906858C (en) | 2013-03-15 | 2021-09-21 | Delsper LP | Cross-linked organic polymers for use as elastomers |
CN108878540A (zh) * | 2018-07-12 | 2018-11-23 | 南方科技大学 | 一种底栅薄膜晶体管及其制备方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5179188A (en) | 1990-04-17 | 1993-01-12 | Raychem Corporation | Crosslinkable fluorinated aromatic ether composition |
US5144780A (en) | 1991-03-25 | 1992-09-08 | Gieling Thomas G | Portable structure |
US5874516A (en) | 1995-07-13 | 1999-02-23 | Air Products And Chemicals, Inc. | Nonfunctionalized poly(arylene ethers) |
US6060170A (en) | 1998-02-25 | 2000-05-09 | Air Products And Chemicals, Inc. | Functional groups for thermal crosslinking of polymeric systems |
JPH11326947A (ja) | 1998-05-15 | 1999-11-26 | Asahi Chem Ind Co Ltd | ポリマー絶縁膜の液晶表示体 |
US6280794B1 (en) | 1999-03-10 | 2001-08-28 | Conexant Systems, Inc. | Method of forming dielectric material suitable for microelectronic circuits |
US6946676B2 (en) | 2001-11-05 | 2005-09-20 | 3M Innovative Properties Company | Organic thin film transistor with polymeric interface |
ATE525757T1 (de) * | 2001-12-19 | 2011-10-15 | Merck Patent Gmbh | Organischer feldeffekttransistor mit organischem dielektrikum |
US6713357B1 (en) | 2001-12-20 | 2004-03-30 | Advanced Micro Devices, Inc. | Method to reduce parasitic capacitance of MOS transistors |
US6716955B2 (en) | 2002-01-14 | 2004-04-06 | Air Products And Chemicals, Inc. | Poly(arylene ether) polymer with low temperature crosslinking grafts and adhesive comprising the same |
CN100438070C (zh) | 2002-02-07 | 2008-11-26 | 台湾积体电路制造股份有限公司 | 栅极组件及其制造方法 |
US6846899B2 (en) | 2002-10-01 | 2005-01-25 | Chartered Semiconductor Manufacturing Ltd. | Poly(arylene ether) dielectrics |
US7179878B2 (en) * | 2003-10-31 | 2007-02-20 | Burgoyne Jr William Franklin | Poly(arylene ether) polymer with low temperature or UV crosslinking grafts and dielectric comprising the same |
US7608855B2 (en) | 2004-04-02 | 2009-10-27 | Spansion Llc | Polymer dielectrics for memory element array interconnect |
JP4462624B2 (ja) | 2004-09-29 | 2010-05-12 | 本田技研工業株式会社 | スプリングリテーナ及びその製造方法 |
US7382421B2 (en) | 2004-10-12 | 2008-06-03 | Hewlett-Packard Development Company, L.P. | Thin film transistor with a passivation layer |
US7170093B2 (en) | 2004-11-05 | 2007-01-30 | Xerox Corporation | Dielectric materials for electronic devices |
-
2007
- 2007-05-23 US US11/752,722 patent/US7919825B2/en not_active Expired - Fee Related
- 2007-05-31 EP EP07109341A patent/EP1863037A1/en not_active Withdrawn
- 2007-06-01 SG SG200703965-4A patent/SG137832A1/en unknown
- 2007-06-01 CN CNA2007101288069A patent/CN101220147A/zh active Pending
- 2007-06-01 KR KR1020070053839A patent/KR100882996B1/ko not_active IP Right Cessation
- 2007-06-01 TW TW096119830A patent/TWI367384B/zh not_active IP Right Cessation
- 2007-06-01 MY MYPI20070877A patent/MY144168A/en unknown
- 2007-06-01 JP JP2007147136A patent/JP4746009B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100882996B1 (ko) | 2009-02-12 |
KR20070115781A (ko) | 2007-12-06 |
EP1863037A1 (en) | 2007-12-05 |
US7919825B2 (en) | 2011-04-05 |
US20070296047A1 (en) | 2007-12-27 |
JP4746009B2 (ja) | 2011-08-10 |
TW200801757A (en) | 2008-01-01 |
MY144168A (en) | 2011-08-15 |
SG137832A1 (en) | 2007-12-28 |
JP2007321152A (ja) | 2007-12-13 |
CN101220147A (zh) | 2008-07-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |