TWI355708B - Method and apparatus for supplying substrates to a - Google Patents

Description

1355708 VI. Description of the Invention: [Technical Field of the Invention] This application claims priority to U.S. Provisional Patent Application Serial No. 60/407,336, the entire disclosure of which is incorporated herein. This article is hereby incorporated by reference. The present invention relates to the processing of substrates, and more particularly to apparatus and methods for supplying substrates to processing tools. [Prior Art] This application is related to the following U.S. Patent Application, the entire disclosure of which is hereby incorporated by reference. U.S. Provisional Patent Application No. 60/407,45, filed on August 31, 2002, Case Name &quot;System For Transporting Wafer Carriers&quot;; US Provisional Patent Application No. 60/407,339, Application 曰2002-8 On the 31st of the month, the case name &quot;Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Ope'ning/Closing"; US Provisional Patent Application No. 60/407,474, application 8 August 31, 2002, the name of the case &quot;Method and Apparatus for Unloading Wafer Carriers from Wafer Carrier Transport System&quot;; US Provisional Patent Application No. 60M07, 452, Application Date August 31, 2002, Case Name &quot;End Effector Having Mechanism For Reorienting A Wafer Carrier Between Vertical and Horizontal Orientations&quot;; US Provisional Patent Application No. 60/407,337, Application 曰 2002 1355708 August 3 1 曰 'Case Name&quot; Wafer Loading Station with Docking Grippers at Docking Stations&quot;; US Provisional Patent Application No. 60/407,340, application date August 2002 3 1 曰 'Case Name' &quot;Wafer Carrier having Door Latching and Wafer Clamping Mechanisms&quot;; US Provisional Patent Application No. 60/443,087, filed on January 27, 2003, 'Case Names&quot;Methods and Apparatus for Transporting Wafer Carriers&quot; US Provisional Patent Application No. 60/407, 463, filed on August 31, 2002 曰 'Case Name Handler That Handler That Unloads Wafer Carriers Directly From a Moving Conveyor&quot; ! US Provisional Patent Application No. 60/443,004, Application 1 January 27, 2003 曰 'Case Name </ br> Wafer Carrier Handler That Unloads Wafer Carriers Directly From a Moving Conveyor&quot; » US Provisional Patent Application No. 60/443, 153, Application 1 January 27, 2003 曰 'Case Name' 〇verhead Transfer Flange and Support for Suspending Wafer Carrier&quot;; US Provisional Patent Application No. 60/443,001, January 27, 2003, 'Case Names&quot;Systems ancj Methods for Tra.nsferring Wafer Carriers Between Processing Tools&quot; And the US temporary Lee application No. 60 / 443,115, filed Jan. 27, 2003, saying saying 'case name &quot; Apparatus an (j Method for Storing and Loading Wafer Carriers &quot;. Semiconductor components are typically fabricated on substrates such as germanium substrates, glass plates or the like, commonly referred to as wafers, for use by computers, screens, and the like. These components are fabricated by a series of fabrication steps such as thin film deposition, oxidation, etching, grinding, and heat treatment, and lithography 5708. No. 4 patent case (four) year yue repair process. Although multiple 丄 can be performed in a single processing device—in general, for $/丨, 廿, processing tool production steps, the substrate still needs to be transferred in different processing tools and other locations. Stored in. In order to ensure that the processing tool is free from idling, it is not necessary to be able to be close to the substrate that is not ruthless. So load and store each! Near the processing tool. Such loading and storage equipment is generally referred to as a docking station=where the substrate carrier is opened and the material is taken out from the carrier and transferred to a processing fixture, and the second is located on the docking station. The storage rack, a waste loading position at the loading and storage device I, and a robotic arm for transporting the carrier between the work waste station and the storage rack. The robot arm can contain a connected &amp; The support, ., and structure consist of a set vertical guide and a horizontal load: the end effector can be moved horizontally and vertically at the docking station, multiple storage racks, and the factory loading station. Piece, it:? The second preparation can be modularized (for example, with a meta ^ and then a typical installation in a single - virtual 1 non-modular material (10), such as a ^ frame), or type It has a number of processors and is installed in front of the m, while the code is cited. Eight (1) side extension horizontal and / or vertical guidance work waste exhibition position receiving - a system from the ^ μ The carrier moved from the factory loading position to the museum 'after the robot arm, processed, and then returned to The arm of the * carrier is moved from the docking station to the storage rack: the second carrier: the carrier is moved from the storage rack to the working load station by the robot arm and the carrier is driven by the machine substrate carrier , Factory loading 2: Stopping the need to move between the storage racks and the severing platform may impose a considerable amount of 135.5708 Dimensions &gt; 4d nickname patent case g g g month correction «% month U 曰 repair (3⁄4 positive replacement page The load is on the robot arm, and the substrate in the substrate carrier that appears in the factory may not be lengthened for processing. Therefore, the handling of the flow carrier is not required. ~—L soil [Invention] The present invention In the first aspect, a method of supplying a substrate to a processing tool is proposed. The first method comprises the following steps (1) providing a plurality of loading cassettes; each of which has an adapted substrate to open the substrate carrier. Mechanism &amp; change position where the substrate carrier is moving and When the material is prepared, the base material is exchanged with the substrate carrier equipment. (3) A carrier carrier is provided, which has a terminal actuator for contacting the carrier, and the (four) carrier is used. Transmitting the substrate carrier between the 2 position and the plurality of loading cassettes; and (4) receiving the first plurality of substrate substrates in the working waste position m carrier conveying device:: pairing the plurality of bases For each of the material carriers, the substrate carrier is directly transferred from the factory exchange location to the base; (7) in individual loading ports, docked and opened: (4) straight = in individual loading Opening and closing the substrate carrying: and the charging transfer substrate carrier of the mi to the factory exchange position, 丄 5): specifically returning the substrate carrier to the substrate carrier for shipping damage. The second method is as follows: the first station for transporting the substrate carrier comprises a transfer substrate carrier, and the substrate is loaded to the handler "scraper" for transporting the substrate carrier carrier carrier The use of the substrate (:); the substrate of the substrate loading platform is driven by the substrate, the substrate carrier is moving, and the material carrier is transported, so that the substrate carrier is searched from the 1355708 piece.丨丨时$1 1 3 3⁄43⁄4 is replacing greedy i pass = ϊ: the carrier is trembled from the base, (4) docked at the loading 并 and the substrate is driven in. The carrier-to-substrate-loading material carrier conveyance belt conveys the substrate carrier-based-transport substrate carrier to the processing tool. The substrate carrier transporter includes (i) a vertical guide, ( 2) a horizontal guide 连接 connected to the vertical guide: an actuator for supporting the substrate carrier to guide relative to the vertical: straight movement and horizontal movement relative to the horizontal guide. Vertical guide pendant The step of moving includes (1) using the substrate loading platform of the substrate loading station to remove the substrate carrier from the substrate The carrier transporting the -α纟 carrier is directly transferred from the substrate carrier conveyor belt to (4) at the first loading (i) at the first loading port, stopping and opening the substrate carrier; the material carrier conveying belt And (5) directly to the base substrate, the present invention for contacting and transporting one such method can also provide individual substrates (eg,; substrate in or on the substrate carrier) The method and equipment of the present invention are exchanged, transported, and the substrate/base machine supplied to the processing fixture is transferred from the factory loading position to the loading magazine. No need to transport the parts to a factory exchange other than the loading bee. Bit =, the substrate/substrate carrier is "directly" transferred from the work loading position to the load 1355708. The method and apparatus of the present invention provides for the transfer of the substrate or the substrate carrier without the smooth and highly efficient access of the processing tool. . Thus, the total time required to transport and handle the substrate can be reduced, the cost and capital investment required to operate the substrate can be reduced, and the burden on the robotic arm of the substrate carrier handler can be reduced. Other features and aspects of the invention will be apparent from the exemplary embodiments described hereinafter, the scope of the claims and the accompanying drawings. [Embodiment] Related Terms In this context, the proper term "docking" means that the substrate or substrate carrier moves toward -璋α, such as a clean room wall opening, thereby exchanging the substrate. Similarly, &quot;removal&quot; means the movement of the substrate or substrate carrier away from the mouthpiece, such as the mouth of a clean room wall, thereby exchanging the substrate. Township: 乂 徂 」 ” ” ” ” ” ” ” ” ” ” “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ Or the substrate carrier during the substrate carrier transport device. A "substrate or substrate carrier transport device" includes a conveyor belt, an automated guided vehicle (AGV), or any other device that transports a substrate or substrate carrier to a processing tool loading location (or reverse transport). A "processing tool" includes one or more processing chambers and one or more substrate handlers for loading and unloading the processing chambers, which may or may not be covered by a processing chamber of its own, such as a factory interface Processing room or transfer room. The processing chamber can perform vacuum, atmospheric or other processes on the substrate including, for example, physical vapor deposition (PVD), chemical vapor deposition (Cvd), etching, measuring, cleaning, grinding, and the like. ^55708 A load 埠j includes for conveying substrates to processing

In May, the UU is a tool (or the opposite direction).

1 is a top plan view showing a conventional modular loading and storage device U11, a second front end view of a storage substrate, adjacent to the conventional processing tool 113, showing modular loading and storage devices (1) . The front end robotic processing chamber 115 (or factory interface) display is located between the loading and storage device U1 and the processing tool 113. As shown in Fig. 1, the loading and storage device is located adjacent to the first side of the clean room wall 117, and the front end arm processing chamber is located on the second side adjacent to the clean room wall 117. The front end robotic arm processing chamber 115 includes a robotic arm 119 that moves horizontally along a track (not shown) to extract substrates from the loading and storage unit 111 and transfer them to the load lock of the processing tool 113. . The loading and storage device m comprises a pair of loading stations 123, in order to extract the substrate, the substrate carrier is placed therein (in this case, the equipment for loading the platform is for docking operations, so it can be called a docking station), and more A storage rack 201 (Fig. 2 is a preferred illustration) is placed on the docking station table 23 (for example, a storage rack 201 is mounted on the support frame 203 at a higher position. Also on the support frame 203 Similarly, the substrate carrier handling robot arm 2〇5 is mounted «The robot arm 205 includes a vertical guide 2〇7 in which the terminal actuator 209 is mounted for vertical movement. The vertical guide 2〇7 is mounted along The horizontal guide 211 is horizontally moved. A factory loading position 2 1 3 for receiving the substrate carrier is located between the docking stations 123. By means of the vertical guide 207 and the horizontal guide 211, the substrate carrier carries the robot arm The terminal actuator 209 of 205 is capable of moving the substrate carrier in the factory loading position 2, 3, the storage rack 201 and the docking station 123. However, as previously indicated, the substrate carrier is repeatedly moved, loaded from the factory Bit 9 1355708 ★ # &amp; to the storage rack 2 (H, then to the docking station - the factory loading position 213 (possibly by the storage rack 201) may result in two: to and 113 supply 仏 ^ 匕 匕 led to the processing 2 The reason 7 consumes a large amount of time, thereby increasing the amount of "work_in_pr_cess". (10) iiA diagram - a front view 'illustration' shows an illustrative soil loading station provided in accordance with the present invention. Marking number 301 through eight 2 station platform 'Loading station 301 includes a plurality of loading: preferably all have a docking mechanism (not shown), the carrier is moved to support the substrate carrier and to enable An opening to be transported by one substrate of the substrate. As in the special example of Fig. 3A, each of them has three 3. 5, 3 07 mounted load 埠 3 〇 3. Therefore, in the second Heap: There are six loadings 埠3〇3. Also / Yu 埠. Stacking 3〇7 to be placed on the stack 3. 5: He-number side: ^ ^ ^ ~ You are open. Each one is used to open the door : includes a mechanism, usually indicated by the reference number 309, == 4 3〇3 substrate carrier. In the present invention - Receiving a single substrate carrier. The special carrier member is a shape and a large substrate. The substrate is covered with a US material 3 substrate. In general, the loading cassette 303 can be of any type (for example, Single-substrate carrier, a plurality of bases;: L front open-type substrate carrier 311 - in one embodiment of the invention in which two of Tan 3° 3 are loaded, 'each one =: ΐΓ 311 and a docking base Material carrier (for example, = a nightmare on the wall of the swimming room can achieve this kind of opening two rows - a cam and follow the request No. _, No. 339, Shen ί = Shen ^ case 'US patent Shen Guan Jia Yin, August 31, 2002, application 丄 355708

The name "Using the wafer carrier's mobile ten-family I method and 1, the description of the movement to make the wafer carrier open -, :::", can not reveal a type of loading, It is also possible to use conventional closed door opening devices (eg 'on-off carrier'). Such devices typically use a single = sin = plant gate and remove the substrate from the carrier to enable extraction of the substrate. a substrate carrier transport device, for example, shown in 313, is set to select a value from the oil band (the unscrupulous station Δ 3〇1 carrier to the substrate loading port 301 of the present invention, and Loading the platform π from the substrate of the present invention. Regarding the assembly station of the present invention, the substrate carrier is removed, and the substrate carrier is exchanged; L / with the abutment: the conveyor belt 313 is its w and: For receiving from the conveyor belt 313; the conveyor belt 313 conveys the substrate carrier. Therefore, the 317 and the parent-changing device 315 define a factory exchange position exchange device &quot; exchange with the conveyor belt 313. The dry carrier, may have the type of the previous application, for example, in the previous US Patent Application No. 6_7, 451, the application date of the year = the name of the dew-Augu Shenhong application A system for transporting wafer carriers, which reveals that the platform of the plant 'turns to contact and connect/unlink wafer carriers to or from the factory transport system above. There is another option, substrate acceptance Piece exchange device 3 =::: the type of the request, for example, the US patent application Ϊ '394旒One of the elevated elements disclosed therein is linearly raised to meet (too unlink the substrate carrier to or from the factory transport system above = ▲ cf. its entirety and present here). There is another option, The substrate parent changing device 315 may have the type of the previous co-application, as described in 'US Patent Application No. 6/4〇7 474, the filing date is 2, 2, 8 'application name' Self-crystal (four) method and apparatus for unloading a crystal carrier from a carrier transport system, which discloses a rotating arm that rotates to connect and connect/unlink the substrate carrier to or from the factory transport system above

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System. There is still a further selection of 叮 修 修 四 四 四 四 四 四 四 四 四 四 四 四 四 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且 并且Exchange 1 parent to change any position) and the same application, the United States patent application of cattle ° such methods are detailed in the year of August Λ λ and the case No. _7, 463, the application date is f day and 60/443, _ , Yu, please 2003! 27s when the conveyor belt (or the line on the 1st wheel (4), -I1 month 27曰. ^ ^, the load-bearing part of the construction) can be set to the substrate carrier exchange device when moving, XL ^ The base carrier is removed from the conveyor belt 313, and when the conveyor belt (or along its feeder) is moved, the conveyor belt 313 is transferred to the substrate carrier to transmit it. a*. a to the substrate carrier . Therefore, when the semiconductor production s is ready for operation, the rotation of the wheel, the continuous movement from the feeding is the production of the smuggling soil in the production equipment to reduce the passage of the raw materials; The time required, and in order to reduce the total amount of substrate during the work at any given time. The loading station 3〇1 of the present invention further includes a carrier handler 319 including a terminal actuator 321 for contacting the substrate carrier 311. For example, the end effector 321 can be used to grasp the substrate carrier 311 from the bottom deck soil carrier 311' or from the top, and the like. The μ actuator 321 is used to move vertically along a vertical guide 323. The vertical guides 323 are sequentially used to move horizontally along a horizontal guide 325. Therefore, the terminal actuator 321 can move in the factory exchange position 317 and all the loading magazines 303. It will also be appreciated that the end effector 321 can also move vertically in the space 327 between the stacks 305, 307 of the load cassette 303. Alternatively, the vertical and horizontal guides can be reconfigured as shown in Figure 3 to allow the end effector 32 to be used to move horizontally along the horizontal guide 325 and to guide the horizontal guide 325 along the vertical guide. 323 moves vertically. Although not shown in Figure 3A or 3B, the loading station of the present invention may include one or more storage shelves to store the substrate and/or substrate carrier. 12 1355708 \〇dr Fig. 4 is a schematic plan view showing the 3〇1 cloth surface of the loading platform of the present invention. In Fig. 4, the reference numeral 117 indicates a clean room wall. The reference number 401 indicates the trajectory of the stack 4 305 on which the cassette 303 is loaded. Indicated, code 403 represents the trajectory of the stack 3〇7 carrying 淳3〇3. The "following" (f0〇tprint) is a projection of the item on the floor of the equipment. The number 4G5 indicates the area between the tracks 4G1#. It should be understood that the tool "dashed line range" of the loading station port of the present invention means that the area 405 between the tracks 401 and 403 plus the track 4G1# 403 is added. The reference number 407 represents the dotted line range of the tool defined by stacks 401 and 403. The operable carrier carries 胄 319 α such that it is only a linear range of material carriers (1) defined by the trajectories 401, 403 of the one. In accordance with the flow chart of Fig. 6 of the present invention, a controller c controls the operation of the carrier handler 319. 2 Referring again to Figure 3 or Figure 3, it will be understood that the factory exchange location 317 at an individual height above the load magazine 303 will also be understood to have substantially the same manifestations for the stack 305 and the factory exchange location 317. However, other configurations of the loading station 301 of the present invention are also contemplated. For example, the ^ parent transposition f 317 may be located at or below the height of 303. The trajectory of the worker Wei's change position 317 can also be loaded with 埠3〇. The trajectory of 7 is 4. 3 matches (Fig. 4). Alternatively, the trajectory of the work 7 may not coincide with any of the stack 305, 3 〇 7 tracks 4 〇 1, 4 〇 3 of the load 埠 303.示7's figure, a side view of the substrate, showing a substrate handler, which is related to the conventional processor. Loading 3 3B ^) ° Referring to Figure 5, the symbol 501 represents a substrate handler provided in accordance with the present invention. The Xie Xun is placed at a lower position (e.g., the mark number 5 () 3 ^) = ^ The substrate handler 501 of the present invention can be moved horizontally to access one of the lowest stacks of the loaded J3 1355708 埠 303. It is also possible to place the Us of the present invention in a higher position (as shown in the figure and reference numeral 505), in which the substrate handler 501 of the present invention can be horizontally moved to access the stack at the highest point of the load 303. . It will be understood that 'any position where the substrate handler 5〇1 of the present invention is placed between the marked positions 5〇3 and 5〇5 is specifically indicated in the drawing) 'for example, in a substrate handler 5 of the present invention. The 〇ι can be moved horizontally to access the position of the stack of t between the loads 303. In this context, the substrate handler "accesses" a substrate (e.g., to transport a substrate) as it extends into the loading area. = Person will understand that 'after the substrate carrier 5〇1 of the present invention is removed from the substrate carrier 3 ιι which is docked in the plurality of loading cassettes 3〇3 (after not shown in the figure) 3A or 3B, not shown in Fig. 5), the substrate of the present invention may be directed to the processor * 113, or, in particular, the load lock chamber 121 of the first stage (as shown in Fig. 1, not separately shown in Fig. 5) ) supply substrate. Figure 6 is a flow chart illustrating the substrate of the present invention in accordance with the operation of the present invention, e.g., Figure 3: = station port 3〇1. Controller c can be coupled to the substrate loading station and operation is performed to complete one or more steps in the process of Figure 6. The carrier member 3U is received at the factory exchange position η? according to the first step 6〇1' of Fig. 6. In the exemplary substrate loading station of Figure 3A or 3B, the carrier exchange device 315 removes the carrier 311 from the conveyor belt 313 (e.g., by the end effector 321). It can occur 'for example, when the conveyor belt 313 moves. Following the 601st step of Fig. 6, is the 603th step. At the 6th 3th carrier handler 319, one of the transport substrates 11 to the load magazine 03 is exchanged from the factory. According to the present invention, from the factory 1355708, the monthly transportation of the substrate carrier 311 to the mounting of the substrate carrier 311 to the ViT3 is also carried out from the factory exchange position 317. The substrate carrier member and the carrier carrier 319 in which one of the substrate carrier 3丨1 and the loading cassette 303 is placed are not placed on the substrate except for one of the loading tans 303. The carrier member 311. After the step 603 of Fig. 6, is the step of step 6〇5. In the case: the substrate carrier 3U is docked and opened in the loading cassette 3. 3 by the carrier handler 319. Wherein, as shown above, the loading 埠3〇3 may be used to cause the docking and opening of the substrate carrier 3丨丨 to occur simultaneously. After the sixth step 5 of Fig. 6 is the sixth step 7 step. (9) Step 7, the substrate handler 501 extracts a substrate from a substrate carrier 311 that has been parked in the loading cassette 3 and is opened by the substrate carrier 311. Then, the substrate carrier 501 supplies the substrate. The extracted substrate is given to the processing tool (1) and processed within the processing tool U3 (Step 6-9). After the processing procedure of the substrate in 113, the substrate handler 501 returns the substrate to a substrate carrier 311 that is docked and opened at the loading 〇3〇3 (step 6). The substrate carrier 3 into which the substrate has been inserted is closed and exits the loading cassette 3 (step 613). The separation and closing of the substrate carrier 303 can occur simultaneously. After step 6! 3 of FIG. Step 615. In step 615, the carrier handler 319 transports the substrate carrier 311 from the loading cassette 303 to the factory parent changing position 3 17 . According to one aspect of the invention, the loading cassette 303 can be loaded. The substrate carrier 311 can be transported directly from the load magazine 303 to the factory by directly transporting the substrate carrier 311 to the factory exchange location 31, ie after removal from the load magazine 303 and before being sent to the factory exchange location 3 17 The position 317 is exchanged without being placed in any of the carrier support positions. Following the 615th step of Figure 6 is step 617. In the first step, the carrier exchange device 315 returns the substrate carrier 311 to the delivery 15 1355708 strip 313. In one embodiment of the invention ' The delivery of the L-belt can still be achieved. It should be noted that the step of docking and/or opening the substrate carrier can be omitted in systems that transport individual substrates or do not need to dock substrates. Therefore, Section 605 and Step 613 is optional. It will be appreciated that the method of the present invention can be accomplished with individual substrates rather than substrate carriers. Transport between the carrier transport device and the processing tool 'additional numbers indicate individual substrates rather than Substrate carrier to avoid duplication. 'The method and apparatus of the present invention have the advantage that the total time of the substrate passing through the body production equipment can be reduced because of the smooth transport of the substrate carrier between the loading crucibles. This can be explained by reducing the manufacturing process, reducing capital costs, and reducing the cost of manufacturing a single substrate. The invention disclosed herein is intended to be illustrative of the embodiments of the invention, and the scope of the present invention will be apparent to those skilled in the art. _ ^ ^ J For example, the carrier transporter described above in relation to the figure includes a vertical guide for phase-to-horizontal horizontal movement... J-type water transporter type, in which Yuyao~, 汜Use a load Μ ...... Field: Between the parallel horizontal guide bows I are slidable - or, a vertical guide. There are still other:: slidable horizontal guides, including other types of carrier handling I - 銭 line J · raw guides in addition to the 3rd A or 3 όΑ όΑ όΑ - stack, the present invention also considers The two stacks that make the two = three load rafts can be loaded at the top of each stack. For example, each stack that can be loaded with : has: one;:;: =淳, or, possibly, the same number of load J in the stack. There is also no need to provide a stack of stacked stacks each. There is still another option to load only 埠. There are still more or more stacks to be emphasized. Although not every stacked stacking cooker 1355708 has the same trajectory, other types of configurations can be used for horizontally adjacent loadings. One. There are also examples of using a single "loading cassette" or using two loading cassettes. Single-US material handling machine 'supplied' 璺&quot; All the early-substrate handling machines used for loading 。. There are still possible options, individual substrate handling machines can be supplied to the mother-loading bee. Supply order—Substrate transfer is used for all load magazines than load stacks of more than one stack 4. Advance can be supplied to individual substrate handlers for each stack of stacks 2 can be used outside conveyor belt 313 The substrate carrier transport device transports the substrate carrier to/from the factory exchange location. If a transfer is used as the substrate carrier transport device, when the semiconductor, the production device is continuously selected to move. Although related to the present invention The substrate loading station only shows one factory exchange location, but also considers two or more factory exchange locations for the substrate loading station associated with the present invention. For example, the H exchange location can be used for incoming substrates. And a second factory exchange location can be used for the outbound substrate carrier. It is also contemplated herein that more than one substrate carrier transport device can be supplied for use with the substrate loading station of the present invention. In a preferred embodiment of the invention, the invention is used in a substrate loading station port having a frame that is coupled to a vertical guide and a horizontal guide. In this method, the preferred substrate loading station is modular. And can be quickly infused and calibrated. In this case, the substrate loading station contains one or more storage. Each storage rack can be mounted on the frame. By mounting the substrate carrier handler and storage rack on the frame, The substrate carrier handler and the storage rack have preset positions associated with each other. It is more advantageous for installation and calibration and has another advantage of using a modular substrate loading station. Similarly, for loading and / or Other mechanisms for unloading the substrate carrier from an upper factory transport system, such as the 'feeding mechanism', can also be optimally mounted on the frame. Exemplary Feed 17, (#3月1曰修(贡)i餐餐页i

The delivery mechanism can be bundled with red __ I.* rotating platform or rotating arm, etc., as described in the prior patent application _ An,, 0ΛΛ〇^ °月', 'US Patent Application No. 60/407, 451, Application 8 August 2002 Q, 曰' and No. 60/407, 474, application on August 31, 2002. ^ One aspect of the invention 'can be placed on the clean room wall with a mounting position =: frame (for example, pre-drilled bolt holes, etc.), or on the wall of the processing ^ (eg 'Wu Wei interface cavity room). Preferred Embodiments of the Invention ^ The wall has a predetermined mounting position for docking the clamp or docking platform t. In addition, the wall has a predetermined mounting position for mounting the substrate carrier opening mechanism. When each frame, docking mechanism' and substrate carrier opening mechanism are cracked at predetermined positions on the same surface, each φ relative position is predetermined and contributes to the mounting and calibration of the substrate loading station. . The invention relating to a single substrate carrier has been disclosed herein. However, it is also contemplated to use the present invention to accommodate associated substrate carriers of more than one substrate, or to transport the associated individual substrates (not transported by the carrier) using the present invention. It will be apparent to those skilled in the art that the apparatus of the present invention can be far different from the exemplary embodiments shown and described herein. Any equipment operated in accordance with the method of Figure 6 (whether or not docked and opened, and whether or not a substrate carrier (eg, individual substrate carrier system) is used) can be read in Within the solid. Therefore, the present invention is disclosed by a preferred embodiment, and it is understood that the invention also includes other embodiments that can be read within the spirit and scope of the invention, for example, the scope of the patent application. [Simple description of the diagram] Figure 1 is a plan view of the plane, showing the processing tool and related substrate 18 / U8 (four) year Hu ° (day repair ▲ 丨 • ^-------] 9 diagram habits Known configuration of loading and storage of carrier loading and storage equipment Fig. 2 is a front view showing the first preparation; 3rd and 3rd carrier mounting equipment Fig. 4 - stacking track of 埠; A front view showing two exemplary embodiments of a substrate provided in accordance with the present invention; a plan view showing the substrate carrier access load shown in the loading diagram shown in FIG. 3 or 38 5 is a side view of the third or third side; and Fig. 6 is a flow chart showing the substrate carrier loading device' illustrating the method of operating the present invention and related processing tools as shown in Fig. 3 or Fig. 3.

[Main component symbol description] 111 Loading and storage equipment 113 Processing tool 115 Factory interface 117 Clean room wall 119 Arm 121 Load lock chamber 123 Transfer furnace 201 Storage rack 203 Support frame 205 Robot arm 207 Vertical guide 209 Terminal actuator 211 Horizontal Guide 213 Factory loading position 301 Loading station 303 Loading 305 305 Stacking 307 Stacking 309 Opener 311 Substrate carrier 313 Conveyor belt 315 Substrate carrier exchange

1355708 317 Factory exchange position 3 19 321 Terminal actuator 323 401 Trajectory 403 405 Inter-existing area 407 501 505 Substrate handler a higher position 503 Carrier transporter Vertical guidance trajectory tool Dash line range lower position

20

Claims (1)

135.5708 seven The number of the patent of the ^D 3f / y correction _ f丄ιΚ, the scope of the patent application: Yue Hao I repair (8) is being replaced! The method 7 of supplying a substrate to a processing tool comprises at least the following steps: providing a loading magazine, each of which has a mechanism for adapting to open a substrate carrier; providing a factory exchange location When the substrate carrier is moving and transported by the substrate carrier transport device, the factory exchange location is to exchange the substrate carrier with the substrate carrier; use the * carrier handler An end effector for transporting the substrate carrier away from the substrate carrier while the substrate φ carrier is moving and the carrier handler is used to exchange locations and the plurality of loads at the factory Transporting the substrate carrier between the crucible; receiving a first plurality of substrate carriers from the substrate carrier transport device at the factory replacement position; and each of the plurality of substrate carriers One: Directly transferring the substrate carrier from the factory exchange location to an individual loading magazine of the plurality of loading cassettes; the substrate carrier; and docking and opening the substrate carrier at the individual loading cassette. Loading the magazine, removing and closing the substrate carrier: transferring the label from the individual loading cassette to the factory exchange location to the substrate carrier transport device 1355708 2. The method of item i, wherein the substrate carrier is a single substrate carrier. 3. The method of claim 1, wherein the step of providing a plurality of loading cassettes comprises providing two stacked loading cassettes. 4. The method of claim 3, wherein the carrier handler moves only within an envelope defined by the trajectory of the two stacks (f〇〇tprint) The substrate carrier. The method of claim 1, wherein the docking of the substrate carrier occurs synchronously with the opening system. 6. As described in item 1 of the scope of the patent application, the method of placing the load port has a substantial phase, wherein the plant exchanges the same track. For example, the method of claim 1st, Jg.+, β + ▲, wherein the height of one of the union exchange locations is higher than the individual heights of all of the charges. 8. A substrate loading station for use by a handler, comprising at least: a first plurality of loading cassettes, wherein the wrestling connection processing tools each have a function to open a bucket name Mechanism of material carrier; 22 substrate carrier transport · έ · Λ · magnetic _ _ 疋 quot quot quot quot 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又 又A substrate of the substrate carrier handler is loaded with a factory exchange location, and the substrate carrier is being moved and transported by the substrate carrier transport device for transporting the substrate with the S ^ v where the equipment exchanges the substrate carrier; and the end effector of the carrier handler for contacting a substrate carrier and when the substrate carrier is moving and by the substrate carrier Disengaging the substrate (four) from the (four) carrier transport device during transport to transport the substrate carrier between the workstation exchange location and the first plurality of charges; ,. The carrier handler has a controller configured to perform the following steps: fly 0 and for each of a first plurality of substrate carriers: direct transfer of the substrate carrier from the factory exchange location to the plurality Loading the individual loading magazines in the crucible; docking and opening the substrate carrier in the individual loading cassettes; removing and closing the substrate carrier in the individual loading; directly from the individual loading cassette Transferring the substrate carrier to the work waste exchange location; and 23 1355708 returning the substrate carrier to the substrate carrier transport device 0. The substrate loading carrier handling as described in claim 8 The substrate carrier transported by the machine is an early loading station 'where the substrate carrier is. 10. Included in claim 8 is: placed in jO loading magazines. The second plurality of loading magazines are spaced apart and placed on one side of the first plurality of loading magazines. U. The substrate loading station according to claim 10, wherein the carrier handling machine is used in the package unit of the first group and the second plurality of loading substrates The substrate loading station of claim 11, wherein the carrier handler is used to carry only a plurality of loads of the second group of the first group and the second group. The substrate carrier is moved within the range defined by the trace. 13. The substrate loading platform according to the application of the special item (9), wherein the loading platform is configured to open the substrate while the substrate carrier is docked with the loading bee. Carrier. The substrate loading station of claim 8, wherein the work exchange position and the load port have substantially the same manifestations. The substrate loading station of claim 8, wherein the substrate carrier transporting device is a conveyor belt. 16. The substrate loading station of claim 8 wherein the one of the factory parent positions is higher than the individual heights of all of the loading magazines. 17. An apparatus for supplying a substrate to a processing tool, comprising at least: a substrate carrier transport apparatus for transporting a plurality of substrate carriers, the transport apparatus being adjacent to a substrate carrier transporter a substrate carrying station port for transporting a substrate carrier to the processing tool - the first carrier carrier comprises a terminal actuator And a controller, coupled to the substrate carrier handler and operating the substrate carrier handler, such that the apricot shitian 6 hai substrate carrier is Moving and transporting the device by the substrate carrier transport device, the end effector of the substrate carrier handler disengages the substrate carrier warhead from the substrate carrier transport device The controller is further operative to perform the following steps: • transporting the substrate carrier from the substrate carrier for direct delivery to the first loading cassette; in the first loading cassette, The substrate carrier; 25 removes and closes Closing the substrate carrier; transferring the substrate carrier directly to the substrate carrier transport device in the first loading device 18 - a device for supplying the substrate to a processing tool, at least comprising - a substrate carrier transport device, (d) for transporting a plurality of substrate carriers, the transport device being adjacent to a substrate loading station including a US substrate carrier handler, the substrate carrier being transported to transport a base: a carrier to a first limb of the processing tool, the substrate carrier transporter comprising: a vertical guide; a horizontal guide connected to the vertical guide; and a terminal driven Hx Supporting the substrate carrier and moving vertically relative to the vertical guide and horizontally relative to the horizontal guide; and controlling the coupling to the substrate carrier handler and operating the control (4) substrate carrier handling When the substrate carrier is being transported by the substrate carrier transport device, the end effector of the substrate carrier handler causes the substrate carrier to be carried from the positioned substrate Shipping design Disengaged, the controller is further operative to perform the following steps: 26 transporting the substrate carrier directly from the substrate carrying the free, ., autumn transport device to the first loading cassette; at the first loading distance, ^ n years 'stop and open the substrate carrier; in the "H", remove and close the substrate carrier; and directly transfer the substrate carrier to the substrate carrier transport device. A method of transporting a substrate carrier comprising the steps of: transporting a substrate carrier on an adjacent substrate loading station, 2 transporting the substrate carrier, the substrate loading station comprising - a substrate carrier a transporter for transporting the substrate carrier to a handler to load the substrate; and a substrate carrier transporting the substrate carrier from the substrate carrier When the substrate carrier is moving and being transported by the device, the substrate is loaded using the substrate An end effector of the machine disengages the substrate carrier to the device; transporting the substrate directly to the loading cassette to transport the equipment carrier from the substrate carrier; docking and opening the substrate carrier at the loading port Dismounting and closing the substrate carrier at the loading port; and transferring the device directly to the substrate carrier (4) substrate carrier. 27 20. A method of transporting a substrate carrier to: the method of loading a substrate onto a substrate carrier transporting the substrate carrier on a substrate carrier transport device adjacent to the substrate nightmare The substrate loading station has: a substrate carrier transporter for transporting the substrate carrier to a processing H-loading magazine, the substrate carrier handler comprising: a vertical guide; a horizontal guide connected to the vertical guide; and a terminal actuator for supporting the substrate carrier and vertically moving relative to the vertical guide and horizontally moving relative to the horizontal guide; When the carrier is moving and being transported by the substrate carrier transport device, the substrate carrier transporter using the substrate loading station moves the substrate carrier away from the substrate carrier transport device Φ transferring the substrate carrier directly from the substrate carrier transport device to the first loading cassette; docking and opening the substrate carrier at the first loading cassette; moving and removing the first loading cassette The carrier substrate; and the carrier material directly to the substrate conveying apparatus returns the substrate carrier. 28