KR20050057012A - Method and apparatus for supplying substrates to a processing tool - Google Patents

Abstract

In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.

Description

METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL

This application claims the priority of US Provisional Application No. 60 / 407,336, filed August 31, 2002, the content of which is incorporated herein by reference.

The present invention relates to substrate processing, and more particularly, to an apparatus and method for supplying a substrate to a processing tool.

This application is incorporated herein by reference and relates to the following US patent applications co-assigned and co-pending:

US Provisional Application No. 60 / 407,451, filed August 31, 2002, entitled " System For Transporting Wafer Carriers " (agent Docket No. 6900 / L);

US Patent Provisional Application No. 60 / 407,339 filed on August 31, 2002, entitled "Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Opening / Closing" (Agent Docket No. 6976 / L);

US patent application Ser. No. 60 / 407,474, filed August 31, 2002, entitled "Method and Apparatus for Unloading Wafer Carriers from Wafer Carrier Transport System";

US Provisional Application No. 60 / 407,452, filed Aug. 31, 2002, entitled “End Effector Having Mechanism For Reorienting A Wafer Carrier Between Vertical And Horizontal Orientations” (Agent Dock No. 7097 / L);

US Provisional Application No. 60 / 407,337, filed Aug. 31, 2002, entitled "Wafer Loading Station with Docking Grippers at Docking Stations" (Agent Docket No. 7099 / L);

US Provisional Application No. 60 / 407,340, filed Aug. 31, 2002, entitled “Wafer Carrier Having Door Latching and Wafer Clamping Mechanism” (Agent Docket No. 7156 / L);

US Provisional Application No. 60 / 443,087, filed Jan. 27, 2003, entitled "Method and Apparatus for Transporting Wafer Carriers" (Agent Docket No. 7163 / L);

US Patent Provisional Application No. 60 / 407,4363, filed Aug. 31, 2002, entitled "Wafer Carrier Handler That Unloads Wafer Carriers Directly From a Moving Conveyor" (Agent Docket No. 7676 / L);

US Provisional Application No. 60 / 443,004, filed Jan. 27, 2003, entitled "Wafer Carrier Handler That Unloads Wafer Carriers Directly From a Moving Conveyor" (Agent Docket No. 7676 / L2);

US Provisional Application No. 60 / 443,153, filed Jan. 27, 2003, entitled "Overhead Transfer Flange and Support for Suspending Wafer Carrier" (Agent Docket No. 8092 / L);

US Provisional Application No. 60 / 443,001, filed Jan. 27, 2003, entitled "Systems and Methods for Transferring Wafer Carriers Between Processing Tools" (Agent Docket No. 8201 / L); And

US Provisional Application No. 60 / 443,115, filed Jan. 27, 2003, entitled "Apparatus and Method for Storing and Loading Wafer Carriers" (Agent Docket No. 8202 / L).

Semiconductor devices are fabricated on substrates such as silicon substrates, glass plates, and the like, often referred to as wafers, for use in computers, monitors, and the like. These devices are manufactured in a sequence of manufacturing steps such as thin film deposition, oxidation, etching, polishing and heat treatment and lithography processing. Although multiple manufacturing steps may be performed in a single processing device, typically the substrate must be transported between different processing tools for at least some manufacturing steps.

The substrate is stored in a carrier for transfer between the processing tool and another location. In order to ensure that the processing tool does not idle, an almost unprocessed substrate must be provided to the tool. Thus, the mounting and storage device is typically located adjacent to each processing tool. Such mounting and storage devices generally include one or more docking stations in which the substrate carriers are opened and each substrate is extracted from the carrier and transported to the processing tool, as well as multiple storage shelves, mountings and A factory load location to receive the carrier in the storage device, and a robot to transport the carrier between the factory load location, the docking station and the plurality of storage shelves. The robot can include an end effector coupled to the support structure. Typically, the support structure includes a vertical guide and a horizontal guide configured to allow the end effector to move horizontally and vertically between the docking station, multiple storage shelves and factory load locations.

The mounting and storage device may be designed modularly (eg, including components mounted in a frame that typically extends from the front of a single processing tool) or nonmohularly ( For example, typically including components that can be mounted independently with horizontal and / or vertical guides extending from the front of multiple processing tools.

After the carrier is received at the factory load position, it can be moved by the robot from the factory load position to one of the storage shelves. The carrier can then move from the storage shelf to the docking station. After the substrate is extracted from the carrier, processed and returned to the carrier, the carrier can be moved by the robot from the docking station to one of the storage shelves. The carrier can then be moved by the robot from the storage shelf to the factory load position. Shuffling of substrate carriers between storage shelves, factory load locations, and docking stations places significant loads on the robot, extending the period of time that the substrates in the carriers are provided to the factory without being processed. Can be. Therefore, it is required to simplify the processing of the substrate carrier.

1 is a plan view of a conventional processing tool and associated substrate carrier mounting and storage device;

2 is a front view showing the conventional mounting and storage device of FIG.

3A and 3B are front views illustrating two exemplary embodiments of a substrate carrier mounting apparatus provided in accordance with the present invention;

4 is a schematic diagram showing the footprint of the load port stack shown in FIG. 3A or 3B;

5 is a schematic side view showing a substrate handler accessing the load port shown in FIG. 3A or 3B.

FIG. 6 is a flow diagram illustrating the manner of operation of the substrate carrier mounting apparatus and associated processing tool of the present invention of FIG. 3A or 3B. FIG.

In a first aspect of the invention, a first method for supplying a substrate to a processing tool is provided. The first method comprises the steps of (1) providing a plurality of load ports each having a mechanism for opening the substrate carrier; (2) providing a factory replacement location where the substrate carrier transporting device and the substrate carrier are replaced while the substrate carrier is in operation and transported by the substrate carrier transporting device; (3) providing a carrier handler having an end effector in contact with the substrate carrier and transporting the substrate carrier between the factory replacement location and the plurality of load ports; And (4) receiving the first plurality of substrate carriers from the substrate carrier transporting device at a factory replacement location. For each of the first plurality of substrate carriers, the method includes the steps of: (1) transporting the substrate carriers directly from the factory replacement location to each one of the plurality of load ports; (2) docking and opening the substrate carrier at each load port; (3) undocking and closing the substrate carrier at each load port; (4) transporting the substrate carrier directly from each load port to the factory replacement location; And (5) returning the substrate carrier to the substrate carrier transporting device.

In a second aspect of the invention there is provided a second method for transporting a substrate carrier. The second method includes (1) conveying a substrate carrier on a substrate carrier conveyor positioned adjacent a substrate mounting station that includes a substrate carrier handler for transporting the substrate carrier to a load port of the processing tool; (2) using an end effector of the substrate carrier handler of the substrate mounting station to disassemble the substrate carrier from the substrate carrier conveyor while the substrate carrier is in operation and transported by the substrate carrier conveyor; (3) transporting the substrate carrier directly from the substrate carrier conveyor to the load port; (4) docking and opening the substrate carrier at the load port; (5) undocking and closing the substrate carrier at the load port; And (6) returning the substrate carrier directly to the substrate carrier conveyor.

In a third aspect of the invention, a third method is provided for transporting a substrate carrier to a substrate mounting station. The third method includes conveying the substrate carrier on a substrate carrier conveyor positioned adjacent to the substrate loading station. The substrate placement station includes a substrate carrier handler for transporting the substrate carrier to a first load port of the processing tool, the substrate carrier handler comprising: (1) a vertical guide; (2) a horizontal guide coupled to the vertical guide; And (3) an end effector that supports the substrate carrier and moves vertically with respect to the vertical guide and moves horizontally with respect to the horizontal guide.

The third method comprises the steps of (1) using an end effector of a substrate carrier handler of a substrate mounting station to disassemble the substrate carrier from the substrate carrier conveyor; (2) directly transporting the substrate carrier from the substrate carrier conveyor to the first load port; (3) docking and opening the substrate carrier at the first load port; (4) undocking and closing the substrate carrier at the first load port; And (5) directly returning the substrate carrier to the substrate carrier conveyor. Many other aspects are provided, such as systems and apparatuses according to the above and other aspects of the invention. Similarly, the method of the present invention provides for the replacement, transportation, and placement of individual substrates, using substrate handlers having end effectors that contact and transport individual substrates (ie, not in or on the substrate carrier).

According to the method and apparatus of the present invention, the substrate / substrate carrier supplied to the processing tool is transported directly from the factory replacement location to the load port. The meaning that the substrate / substrate carrier is "directly" transported from the factory replacement location to the load port means that it is transported without a handler to position the substrate / substrate carrier on any support location other than the load port.

The method and apparatus of the present invention provide for simple and efficient transport of substrates and / or substrate carriers to processing tool load ports. As a result, the overall time required to transport and process the substrate can be reduced, the cost and investment capital associated with the work-in-process of the substrate can be reduced, and the load on the substrate carrier handling robot can be reduced. have.

Further features and advantages of the present invention will become more apparent with reference to the following detailed description, claims and accompanying drawings.

Related term

The term "docking" as used herein refers to the inward movement of a substrate or substrate carrier towards a port where the substrate is replaced, such as a port in a clean room wall. Similarly, the term "undocking" refers to the outward movement of a substrate or substrate carrier from a port where the substrate is replaced, such as a port in a clean room wall.

A “factory exchange location” refers to a substrate or substrate by a device while removing the substrate or substrate carrier from the substrate or substrate carrier transport device or placing the substrate carrier on the substrate or substrate carrier transport device. Includes all points in the space where the carrier is to be processed.

A "substrate or substrate carrier transport device" includes a conveyor, an unmanned vehicle (AGV), or any other device for transporting a substrate or substrate carrier to a processing tool mounting location.

A “processing tool” includes one or more processing chambers and one or more substrate handlers for mounting and dismounting the processing chambers. The substrate handler may or may not be included in the chamber itself, such as a factory interface chamber or a transport chamber. The processing chamber may perform vacuum, atmospheric pressure or other processes on the substrate, including, for example, physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, metrology, cleaning, polishing, and the like.

A "load port" includes a location where a substrate or substrate carrier is disposed for transport of a substrate to and / or from a processing tool.

System description

1 is a plan view illustrating a conventional modular loading and storage device 111 in a location for storing a carrier near a conventional processing tool 113. 2 is a front view illustrating the modular mounting and storage device 111. First, referring to FIG. 1, the front end robot chamber 115 (or factory interface) is shown to be located between the mounting and storage device 111 and the processing tool 113. As shown in FIG. 1, the mounting and storage device 111 is located adjacent to the first side of the clean room wall 117 and the front end robot chamber 115 is adjacent to the second side of the clean room wall 117. Is located. The front end robot chamber 115 includes a robot 119 that is movable horizontally along a track (not shown) to extract the substrate from the mounting and storage device 111 to load load chamber 121 of the processing tool 113. You can transport them to The mounting and storage device 111 comprises a pair of mounting stations 123 in which the substrate carrier is positioned for substrate extraction (in this embodiment the mounting station is mounted as a docking operation and is considered a docking station), and the docking station 124 ) A plurality of storage shelves 201 (best shown in FIG. 2) located above (eg, above the docking station). The storage shelf 201 is mounted on the support frame 123. In addition, the substrate carrier processing robot 205 is mounted on the support frame 203. The robot 205 includes a vertical guide 207 with an end effector 209 mounted thereon for vertical movement. The vertical guide 207 is mounted for horizontal movement along the horizontal guide 211. Factory load locations 213 for receiving substrate carriers are located between docking stations 123.

By the vertical guide 207 and the horizontal guide 211, the end effector 209 of the substrate carrier handling robot 205 is the substrate carrier between the factory load position 213, the storage shelf 201 and the docking station 213. Can be moved. Note, however, before this that the shuffling of the substrate carrier from the factory mounting station 213 to the storage shelf 201, the next docking station 123, and back to the factory load position 213 (via the possible storage shelf 201). ) Causes a significant amount of time spent in feeding the substrate to the processing tool 113, increasing the workload.

3A is a schematic front view of an exemplary substrate mounting station provided in accordance with the present invention. In general, reference numeral 301 denotes the substrate mounting station of the present invention. The mounting station 301 includes a number of load ports 303. Each load port 303 preferably includes a docking mechanism (not shown), such as a platform or motorized gripper, that supports the substrate carrier and moves the substrate carrier towards and from the opening through which the substrate being transported passes. In the particular embodiment shown in FIG. 3A, the load ports 303 are arranged in two stacks 305 and 307 with three load ports each. Thus, a total of six load ports 303 are provided in the embodiment of FIG. 3A. Other numbers and / or load port arrangements may be used. Stack 307 is positioned spaced away from the side of stack 305. Each load port 303 includes a mechanism indicated by reference numeral 309 for opening a substrate carrier docked to the load port 303. In one embodiment of the invention, the load port 303 houses a single substrate carrier. The term "single substrate carrier" refers to a substrate carrier of a shape and size that includes only one substrate at a time. In general, the load port 303 may accept any type of substrate carrier (eg, a single substrate carrier, multiple substrate carriers, front open substrate carriers, front opening unified pods, combinations thereof, etc.). I can accept it. 3A shows a substrate carrier 311 docked at two load ports 303.

In one embodiment, each load port 303 opens the substrate carrier 311 concurrently with the substrate carrier docking (eg, movement of the carrier towards the port of the clean room wall). Such opening can be achieved, for example, via a cam and follower arrangement. This type of load port was previously incorporated on August 31, 2002, filed under the name "Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Opening / Closing" (Agent Dock No. 6976 / L). Co-pending US patent application Ser. No. 60 / 407,339. Alternatively, conventional door opening devices (eg, open the carrier after docking) can be used. Such devices typically use a door receiver that is undocked and removed to allow substrate extraction from the carrier.

A substrate carrier transporting device, such as a conveyor (shown schematically at 313), is configured to transport the substrate carrier to the mounting station 301 of the present invention and to remove the substrate carrier from the mounting station 301. The substrate carrier replacement device 315 is associated with the mounting station 301 of the present invention and disposed adjacent to the conveyor 313 and receives the substrate carrier from the conveyor 313 and transports the substrate carrier to the conveyor 313. Accordingly, it will be appreciated that the substrate carrier replacement device 315 forms a factory replacement location 317 where the substrate carrier is replaced with the conveyor 313. Substrate carrier replacement device 315 is described, for example, on August 31, 2002, previously incorporated US patent application Ser. No. 60 / filed under the name " System For Transporting Wafer Carriers " (representative docket No. 6900 / L). It may be in the form shown in 407,451, which discloses a rotating platform that rotates to contact and / or engage / disengage the substrate carrier relative to the overhead factory transport system.

As another alternative, the substrate carrier replacement device 315 discloses (and is referred to herein in its entirety) a linearly upwardly extending member to contact and engage / disengage the substrate carrier relative to the overhead factory transport system. In the form of co-pending US patent application Ser. No. 09 / 755,394. As another alternative, the substrate carrier replacement device 315 was previously incorporated US patent application Ser. No. 60 / 407,474, filed August 31, 2002, entitled "Method and Apparatus for Unloading Wafer Carriers from Wafer Carrier Transport Systems". It may be in the form disclosed in (Agent Dock No. 7024 / L, which discloses a rotating arm for contacting and engaging / disassembling the substrate carrier with respect to the overhead factory transport system). Alternatively, the substrate carrier replacement device may be omitted and the carrier handler may be moved from the factory replacement location (eg, the location where the carrier is replaced between the mounting station and the carrier transport device of the present invention) to the carrier transport device 313. The substrate carrier can be replaced. Such methods include co-pending US patent application Ser. No. 60 / 407,463, filed Aug. 31, 2002, and Rep. Docker No. 6067-43, filed Jan. 27, 2003. 7676 / L2).

The substrate carrier replacement device 315 removes the substrate carrier from, for example, the conveyor 313 while the conveyor (or carrier transported thereon) is in operation, and the conveyor (or substrate carrier transporter running along it) is in operation. May be configured to transport the substrate carrier to the conveyor 313. Thus, maintaining the conveyor 313 in continuous movement while the semiconductor fabrication facility is in operation, thereby improving substrate transport through the fabrication facility, and reducing the amount of time required for each particular substrate to cross the fabrication facility. In this way, the total number of substrates provided as work-in-process (WIP) at any given time can be reduced.

The mounting station 321 of the present invention further includes a carrier handler 319. Carrier handler 319 includes end effector 321 in contact with substrate carrier 311. For example, the end effector 321 supports the substrate carrier 311 from the bottom, or holds the substrate carrier 311 from the top and the like.

The end effector 321 moves vertically along the vertical guide 323. As a result, the vertical guide 323 moves horizontally along the horizontal guide 325. As a result, the end effector 323 can move between the factory replacement location 317 and all load ports 303. Also, the end effector 321 may move vertically in the space 327 between the stacks 305, 307 of the load port 303. In one alternative, the vertical and horizontal guides may be repositioned as shown in FIG. 3B, with the end effector 321 moving horizontally along the horizontal guide 325 and the horizontal guide 325 being the vertical guide 323. Can move vertically along Although not shown in FIG. 3A or 3B, the mounting station of the present invention may include one or more shelves for storing substrates and / or substrate carriers.

4 is a schematic top view showing the layout features of the mounting station 301 of the present invention. In FIG. 4, reference numeral 117 denotes a clean room wall. Reference numeral 401 denotes a footprint of the load port 303 stack 305. Reference numeral 403 denotes the footprint of the load port 303 stack 307. The term "footprint" means a protrusion on the floor of a facility. Reference numeral 405 denotes an area between the footprints 401, 403. The tool “envelope” of the mounting station of the present invention should be understood to mean footprints 401, 403 with an area 405 added between the footprints 401, 403. Reference numeral 407 denotes a tool envelope formed by footprints 401 and 403.

The carrier handler 319 can operate to allow the substrate carrier 311 to move only within the envelope formed by the footprints 401, 403 of the load port stacks 305, 307. The controller C controls the operation of the carrier handler 319 and is programmed to operate the carrier handler according to the present invention as described in detail with reference to the flowchart shown in FIG.

Referring again to FIG. 3A or 3B, the factory replacement location 317 is at a height greater than the height of each of the load ports 303. In addition, the factory replacement location 317 and the stack 305 of load ports 303 have substantially the same footprint. However, other arrangements of the mounting station 301 of the present invention may be contemplated. For example, factory replacement location 317 may coincide with footprint 403 (FIG. 4) of stack 307 of load port 303. In addition, the footprint of the factory replacement location 317 may match the footprint 403 (FIG. 4) of the load port 303 stack 307. As another alternative, the footprint of the factory replacement location 317 may not match one of the footprints 401, 403 of the load port 303 stack 305, 307.

5 is a schematic side view illustrating a substrate handler in connection with a stacked load port 303 and a conventional processing tool 113 of a mounting station 301 (FIG. 3A or 3B) of the present invention. 5, reference numeral 501 denotes a substrate handler provided in accordance with the present invention. The substrate handler 501 of the present invention is optionally located in a lower position (indicated by reference numeral 503), and the substrate handler 501 of the present invention is horizontally accessible to access the lowest one of the stacked load ports 303. I can move it. In addition, the substrate handler 501 of the present invention may optionally be located in an upper position (illustrated virtually with reference numeral 505), and the handler 501 of the present invention may be placed on top of the stacked load port 303. Can move horizontally for access. The substrate handler 501 of the present invention is shown in a position where, for example, the substrate handler 501 of the present invention can be moved horizontally for access to the middle of the stacked load ports 303. It may optionally be located at any intermediate position (not specifically shown in the figure) between the teeth 503, 505.

As used herein, a substrate handler is for "accessing" a load port when the substrate handler extends to the load port area (eg, for substrate transport).

After the substrate handler 501 of the present invention removes the substrate (not shown) from the substrate carrier 311 (FIG. 3A or 3B, not shown in FIG. 5), the docked one of the stacked load ports 303, The substrate handler 501 of the invention may provide to the processing tool 114 or more specifically to the load lock chamber 121 (not individually shown in FIGS. 1 and 5) of the processing tool 113.

6 is a flow chart illustrating the operation of a substrate mounting station constructed in accordance with the present invention, such as the substrate mounting station 301 of the present invention in FIG. 3A or 3B. Controller C operates to perform one or more processes of FIG. 6 and is coupled to a substrate mounting station.

Following the first step 601 of FIG. 6, the substrate carrier 311 is received at the factory replacement location 317. Illustratively, the substrate loading station of FIG. 3A or 3B removes the substrate carrier 311 from, for example, the conveyor 313 (eg, via the end effector 321). This occurs, for example, while the conveyor 313 is in operation.

 Step 603 follows from step 601 of FIG. In step 603, the carrier handler 319 transports the substrate carrier 311 from the factory replacement location 317 to one of the load ports 303. In accordance with the present invention, the substrate carrier 311 is transported directly from the factory replacement location 317 to one of the load ports 303. That is, the carrier handler 319 may be connected with one of the load ports 303 after removing the substrate carrier 311 from the factory replacement location 317 and before placing the substrate carrier 311 in one of the load ports 303. The substrate carrier 311 is not positioned at any other carrier support position.

Step 605 follows from step 603 of FIG. In step 605, the substrate carrier 311 is docked and opened at one of the load ports 303 located by the carrier handler 319. Note that the load port 303 can be adjusted to simultaneously dock and open the substrate carrier 311.

Step 607 continues from step 605 of FIG. In step 607, the substrate handler 501 extracts the substrate from the substrate carrier 311 that is docked and opened by one of the load ports 303. The extracted substrate is then supplied to the processing tool 113 by the substrate handler 501, and processing of the substrate takes place in the processing tool 113 (step 609).

After substrate processing in the processing tool 113 is completed, the substrate handler 501 returns the substrate to the substrate carrier 311 that is docked and opened at one of the load ports 303 (step 611). The substrate carrier 311 into which the processed substrate is then inserted is closed and undocked from the load port 303 (step 613). Undocking and closing of the substrate carrier 303 may occur simultaneously. Step 615 continues from step 613 of FIG. In step 615 the carrier handler 319 transports the substrate carrier 311 from the load port 303 to the factory replacement location 317. In accordance with aspects of the present invention, the substrate carrier 311 may be transported directly from the load port 303 to the factory replacement location 317. That is, the substrate carrier 311 is not located on any carrier support location after being removed from the load port 303 and before being shipped to the factory replacement location 317 and is not located on the carrier support location 317 from the load port 303. Can be shipped.

Step 617 follows from step 615 of FIG. In step 617, the carrier replacement device 315 returns the substrate carrier 311 to the conveyor 313. In one embodiment of the invention this is done while the conveyor 313 is in operation. It should be noted that the docking and / or undocking step of the substrate carrier may be omitted in the system for transporting each substrate, or the substrate may not need to be docked. Thus, steps 605 and 613 are optional. The method of the present invention can be performed with individual substrates rather than substrate carriers. Furthermore, additional drawings for each substrate transport rather than the substrate carrier between the substrate transport apparatus and the processing tool are not included to prevent repetition.

The method and apparatus of the present invention has the advantage that the transport of the substrate carrier to the load port is simple, and the overall transport time of the substrate through the semiconductor manufacturing facility can be reduced. This can in turn be interpreted as reduced work-in-process (WIP), lower capital costs, and reduced manufacturing cost per substrate.

The foregoing detailed description has only been disclosed for the embodiments of the present invention; Modifications of the methods and apparatus disclosed above within the scope of the invention will be readily apparent to those skilled in the art. For example, the carrier handler described above in connection with FIG. 3A or 3B includes a vertical guide that moves horizontally along one horizontal guide. However, one may also consider using a carrier handler in which the vertical guide is slide mounted between two horizontal guides. As another alternative, a carrier handler of the type in which the horizontal guide is slidably mounted on one or more vertical guides can be used. Of course, other types of carrier handlers may be used, including those that do not use linear guides.

Different configurations of load ports may also be used, with two stacks of three load ports each shown in FIG. 3A or 3B. For example, there may be only two load ports in each stack of load ports or four or more load ports in each stack of load ports. In addition, each load port need not be provided with the same number of load ports. As another alternative, only one load port stack may be provided or three or more load port stacks may be provided. Also, while each stacked load port is shown to occupy the same footprint, other arrangements with partially overlapping or non-overlapping footprints may be used. There may be embodiments where a single load port is used, or two or more horizontally adjacent load ports are used.

5 shows a single substrate handler configured to provide all load ports in all load ports in a load port stack. As a possible alternative, each substrate handler may provide a respective load port. In addition, a single substrate handler may be used to provide all load ports of one or more stacks of load ports. In addition, each substrate handler may be provided for each stack of load ports.

A substrate carrier transporting device other than the conveyor 313 may be used to provide the substrate carrier at the factory replacement location and to transport the substrate carrier from the factory replacement location. When a conveyor is used as the substrate carrier transport apparatus, the substrate manufacturing facility can be operated while selectively maintaining the operating state continuously.

Although only one factory replacement location is shown with respect to the substrate mounting station of the present invention, two or more factory replacement locations associated with the substrate mounting station of the present invention may be provided. For example, the first factory replacement location can be used to introduce the substrate carrier and the second factory replacement location can be used for removal from the substrate carrier. In addition, the substrate loading station of the present invention may be operated by one or more substrate carrier transport apparatuses.

Preferably, the invention is used in a substrate mounting station comprising a frame to which vertical and horizontal guides are coupled. In this way, the preferred substrate mounting station is modular and can be quickly mounted and calibrated. If the substrate mounting station includes one or more storage shelves, each storage shelf may be mounted on a frame. By mounting both the substrate carrier handler and the storage shelf or shelves in the frame, the substrate carrier handler and the storage shelves have a predetermined position relative to each other. This makes installation and calibration easier and offers another advantage of using a modular substrate mounting station. Similarly, other mechanisms may be preferably mounted to the frame, such as a mechanism dedicated to mounting and / or dismounting the substrate carrier from the overhead factory transport system. Exemplary dedicated mechanisms are described in US patent application Ser. Nos. 60 / 407,451, filed August 31, 2002 and 60 / 407,474, filed August 31, 2002 (agents Nos. 6900 and 7024). As disclosed, it may include rotating platforms or rotating arms and the like.

In one aspect, the frame may be mounted at a predetermined mounting location (eg, pre-drilled bolt holes, etc.) on the clean room wall or on the front wall of the chamber (eg factory interface chamber). It may also preferably have a predetermined mounting position to which the docking gripper or docking platform is mounted. In addition, the wall can have a predetermined mounting position on which the substrate carrier opening mechanism can be mounted. When the frame, the docking mechanism, and the substrate carrier opening mechanism are each mounted in predetermined positions on the same surface, each relevant position is predetermined, facilitating installation and calibration of the substrate mounting station.

The present invention is illustrated in the context of a single substrate carrier. However, in the application of the present invention, the present invention may be applied in connection with a substrate carrier holding one or more substrates or in connection with the transport of individual substrates (not transported through a carrier). The apparatus of the present invention can be significantly distinguished from the embodiments shown and disclosed herein. (Whether docking and opening is performed and whether or not a substrate carrier is used (eg, each substrate system)) Any device operating according to the method of FIG. 6 may be within the scope of the present invention.

Thus, while the invention has been described in connection with preferred embodiments, other embodiments may be implemented without departing from the scope and spirit of the invention as defined in the appended claims below.

Claims (20)

A method of supplying a substrate to a processing tool, Providing a plurality of load ports, each having a mechanism for opening a substrate carrier; Providing a factory replacement location where the substrate carrier is replaced with a substrate carrier transporting device while the substrate carrier is in operation and transported by the substrate carrier transporting device; Providing a carrier handler having an end effector in contact with the substrate carrier and transporting the substrate carrier between the factory replacement location and the plurality of load ports; Receiving a first plurality of substrate carriers from the substrate carrier transporting device at the factory replacement location; And For each of the first plurality of substrate carriers Transporting the substrate carrier directly from the factory replacement location to one of the plurality of load ports; Docking and opening the substrate carrier at each load port; Undocking and closing the substrate carrier at the respective load port; Transporting the substrate carrier directly from the respective load port to the factory replacement location; And Returning the substrate carrier to the substrate carrier transporting device. Substrate supply method comprising a. The method of claim 1, And the substrate carrier is a single substrate carrier. The method of claim 1, Providing the plurality of load ports comprises providing two stacks of load ports. The method of claim 3, wherein And the carrier handler moves the substrate carrier only within an envelope formed by the footprints of the two stacks of load ports. The method of claim 1, Wherein the docking of each of the substrate carriers occurs simultaneously with the opening of each of the substrate carriers. The method of claim 1, And wherein said factory replacement location and said load port have substantially the same footprint. The method of claim 1, Wherein the factory replacement location is at a height higher than the height of each of all load ports. A substrate mounting station for a processing tool, A first plurality of load ports operatively coupled to the processing tool and each having a mechanism to open the substrate carrier; A factory replacement position where the substrate carrier is replaced with the substrate carrier transporting device while the substrate carrier is in operation and transported by the substrate carrier transporting device; A carrier handler having an end effector in contact with said substrate carrier and transporting a substrate carrier between said factory replacement location and said first plurality of load ports, The carrier handler is configured for each of the first plurality of substrate carriers, Transporting the substrate carrier directly from the factory replacement location to one of the plurality of load ports; Docking and opening the substrate carrier at each load port; Undocking and closing the substrate carrier at the respective load port; Transporting the substrate carrier directly from the respective load port to the factory replacement location; And And a controller programmed to perform the step of returning the substrate carrier to the substrate carrier transporting device. The method of claim 8, And the substrate carrier carried by the carrier handler is a single substrate carrier. The method of claim 8, And a second plurality of load ports spaced apart from the sides of the first plurality of load ports. The method of claim 10, And the carrier handler moves vertically in the space between the first and second plurality of load ports. The method of claim 11, And the carrier handler moves the substrate carrier only within an envelope formed by the footprints of the first and second plurality of load ports. The method of claim 8, Each of the load ports opening the substrate carrier simultaneously with the load port and the substrate carrier docking. The method of claim 8, And the factory replacement location and the load port have substantially the same footprint. The method of claim 8, And the substrate carrier transporting device is a conveyor. The method of claim 8, And the factory replacement position is at a height higher than the height of each of all load ports. An apparatus for supplying a substrate to a processing tool, A substrate carrier handler for transporting the substrate carrier to a first load port of the processing tool, the substrate carrier handler comprising an end effector supporting the substrate carrier; And Is coupled to the substrate carrier handler to control the substrate carrier handler such that an end effector of the substrate carrier handler disengages the substrate carrier from the substrate carrier conveyor while the substrate carrier is in operation and transported by the substrate carrier conveyor. Including a controller for The controller, Transporting the substrate carrier directly from the substrate carrier conveyor to the first load port; Docking and opening the substrate carrier at the first load port; Undocking and closing the substrate carrier at the first load port; And And returning the substrate carrier directly to the substrate carrier conveyor. An apparatus for supplying a substrate to a processing tool, Transporting a substrate carrier to a first load port of the processing tool, supporting a vertical guide, a horizontal guide coupled to the vertical guide, and supporting the substrate carrier and moving vertically about the vertical guide and about the horizontal guide A substrate carrier handler comprising an end effector moving horizontally; And A controller operative to control the substrate carrier handler coupled to the substrate carrier handler to disengage the substrate carrier from a substrate carrier conveyor positioned adjacent to the substrate carrier handler, the end effector of the substrate carrier handler; The controller, Transporting the substrate carrier directly from the substrate carrier conveyor to the first load port; Docking and opening the substrate carrier at the first load port; Undocking and closing the substrate carrier at the first load port; And And returning the substrate carrier directly to the substrate carrier conveyor. A method of transporting a substrate carrier, Transporting the substrate carrier on a substrate carrier conveyor positioned adjacent the substrate mounting station including a substrate carrier handler for transporting the substrate carrier to a load port of the processing tool; Using an end effector of the substrate carrier handler of the substrate mounting station to disengage the substrate carrier from the substrate carrier conveyor while the substrate carrier is in operation and transported by the substrate carrier conveyor; Transporting the substrate carrier directly from the substrate carrier conveyor to the load port; Docking and opening the substrate carrier at the load port; Undocking and closing the substrate carrier at the load port; And Returning the substrate carrier directly to the substrate carrier conveyor. A method of transporting a substrate carrier to a substrate mounting station, Transporting the substrate carrier on a substrate carrier conveyor positioned adjacent to the substrate loading station The substrate loading station transports the substrate carrier to a first load port of a processing tool, supports a vertical guide, a horizontal guide coupled to the vertical guide and the substrate carrier and moves vertically about the vertical guide and With end effector moving horizontally about the horizontal guide; Using an end effector of the substrate carrier handler of the substrate mounting station to disassemble the substrate carrier from the substrate carrier conveyor; Transporting the substrate carrier directly from the substrate carrier conveyor to the first load port; Docking and opening the substrate carrier at the first load port; Undocking and closing the substrate carrier at the first load port; And Returning said substrate carrier directly to said substrate carrier conveyor.