TWI354783B - System and method for sensing and analyzing gases - Google Patents

System and method for sensing and analyzing gases Download PDF

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Publication number
TWI354783B
TWI354783B TW093134809A TW93134809A TWI354783B TW I354783 B TWI354783 B TW I354783B TW 093134809 A TW093134809 A TW 093134809A TW 93134809 A TW93134809 A TW 93134809A TW I354783 B TWI354783 B TW I354783B
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TW
Taiwan
Prior art keywords
gas
voltage
sensor
array
resistance
Prior art date
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TW093134809A
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English (en)
Chinese (zh)
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TW200526952A (en
Inventor
John Carl Steichen
Harry Edwards Betsill
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Du Pont
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Publication of TW200526952A publication Critical patent/TW200526952A/zh
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Publication of TWI354783B publication Critical patent/TWI354783B/zh

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW093134809A 2003-11-12 2004-11-12 System and method for sensing and analyzing gases TWI354783B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51943303P 2003-11-12 2003-11-12

Publications (2)

Publication Number Publication Date
TW200526952A TW200526952A (en) 2005-08-16
TWI354783B true TWI354783B (en) 2011-12-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW093134809A TWI354783B (en) 2003-11-12 2004-11-12 System and method for sensing and analyzing gases

Country Status (7)

Country Link
US (1) US7763208B2 (https=)
EP (1) EP1682886A2 (https=)
JP (1) JP4885726B2 (https=)
KR (1) KR101148742B1 (https=)
CN (1) CN1902485A (https=)
TW (1) TWI354783B (https=)
WO (1) WO2005047876A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
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TWI611181B (zh) * 2016-10-19 2018-01-11 華邦電子股份有限公司 感測器陣列、其製造方法及感測方法
TWI660170B (zh) * 2018-05-08 2019-05-21 魏敬澄 提高有害氣體偵測器判斷的方法
TWI789488B (zh) * 2018-01-31 2023-01-11 日商興亞股份有限公司 氧感測元件

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US20090084160A1 (en) * 2007-10-01 2009-04-02 Scott Technologies, Inc. Gas measuring device and method of manufacturing the same
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JP5345603B2 (ja) * 2010-11-22 2013-11-20 新コスモス電機株式会社 半導体式ガス検知素子
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WO2014194482A1 (zh) * 2013-06-05 2014-12-11 中国科学院微电子研究所 基于压缩感知理论的气体识别方法
JP2015004537A (ja) * 2013-06-19 2015-01-08 新コスモス電機株式会社 ガス検知素子の駆動方法およびガス検知装置
JP2017506759A (ja) * 2014-02-14 2017-03-09 ローズマウント・アナリティカル・インコーポレーテッドRosemount Analytical Inc. 半導体式ガス検出センサの診断
CA2941432A1 (en) 2014-05-12 2015-11-19 Cooper Technologies Company Vacuum loss detection
EP2980567A1 (en) * 2014-07-31 2016-02-03 Atmospheric Sensors Ltd. Gas discriminating semiconductor sensors
US10509002B2 (en) * 2014-11-07 2019-12-17 3M Innovative Properties Company Wireless sensing devices and method for detecting hydration
US10732135B2 (en) * 2015-06-16 2020-08-04 Multicore Technologies, Llc System and method for determining one or more fluid concentrations in a fluid stream
TWI565944B (zh) * 2015-12-11 2017-01-11 台灣奈米碳素股份有限公司 一種氣體感測器及其製作方法
TWI565945B (zh) * 2015-12-11 2017-01-11 台灣奈米碳素股份有限公司 一種利用氣體辨識而具肺炎感染與肺炎菌種疾病分析功能的呼吸器
CN107966478A (zh) * 2016-10-19 2018-04-27 华邦电子股份有限公司 感测器阵列、其制造方法及感测方法
US10830722B2 (en) 2017-01-09 2020-11-10 King Abdullah Unviersity Of Science And Technology Gas sensors and methods of detecting gas
US10330617B2 (en) 2017-01-10 2019-06-25 Design West Technologies, Inc. Wearable sensor badge for toxic industrial chemicals
CN106872027A (zh) * 2017-04-18 2017-06-20 中国电子科技集团公司第四十六研究所 一种高功率光纤激光器回光探测及其保护电路
CA3061473A1 (en) * 2017-05-05 2018-11-08 Royal Melbourne Institute Of Technology Multi-gas sensing system
US10803382B2 (en) * 2017-06-16 2020-10-13 Intel Corporation Gas identification apparatus and machine learning method
JP7137280B2 (ja) * 2018-04-27 2022-09-14 新コスモス電機株式会社 フロンガスセンサ
WO2019220741A1 (ja) * 2018-05-17 2019-11-21 フィガロ技研株式会社 金属酸化物半導体ガスセンサを用いるガス検出装置とガス検出方法
KR102916094B1 (ko) * 2018-10-31 2026-01-21 램 리써치 코포레이션 히터 어레이 고장 (failure) 의 식별 및 보상
US11480555B2 (en) * 2019-05-15 2022-10-25 General Electric Company Sensing system and method
US11333646B2 (en) * 2019-06-05 2022-05-17 General Electric Company Gas sensor system and method
JP6976991B2 (ja) * 2019-06-06 2021-12-08 Nissha株式会社 2成分ガスの濃度比算出方法および検知対象ガスの濃度算出方法
US11867676B2 (en) 2020-03-09 2024-01-09 General Electric Company Multi-gas sensing system and method
CN111521647B (zh) * 2020-03-25 2023-04-21 南方科技大学 气体浓度检测方法、系统、计算机设备及存储介质
CN112683960B (zh) * 2020-11-17 2023-02-28 中国石油天然气股份有限公司 一种检测油田地层水中有毒气体含量的装置及工艺
JP7801766B2 (ja) * 2022-06-15 2026-01-19 国立研究開発法人産業技術総合研究所 化学成分判定装置、化学成分判定方法、化学成分判定プログラムおよび記録媒体
CN118090867B (zh) * 2024-04-24 2024-06-25 南京信息工程大学 一种fet氢气传感器及其制备方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI611181B (zh) * 2016-10-19 2018-01-11 華邦電子股份有限公司 感測器陣列、其製造方法及感測方法
TWI789488B (zh) * 2018-01-31 2023-01-11 日商興亞股份有限公司 氧感測元件
TWI660170B (zh) * 2018-05-08 2019-05-21 魏敬澄 提高有害氣體偵測器判斷的方法

Also Published As

Publication number Publication date
EP1682886A2 (en) 2006-07-26
WO2005047876A2 (en) 2005-05-26
US7763208B2 (en) 2010-07-27
KR20060118482A (ko) 2006-11-23
JP4885726B2 (ja) 2012-02-29
TW200526952A (en) 2005-08-16
JP2007510934A (ja) 2007-04-26
CN1902485A (zh) 2007-01-24
KR101148742B1 (ko) 2012-05-22
WO2005047876A3 (en) 2005-08-04
US20070202012A1 (en) 2007-08-30

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