1336663 九、發明說明 【發明所屬之技術領域】 本發明係關於用來噴出液滴的液滴噴出裝置，詳而言 之是關於噴墨頭移動架可動型之多頭的噴墨液滴塗布裝置 【先前技術】 噴墨頭是利用氣泡或壓電元件來以高精度噴出少量液 滴的裝置，噴墨塗布裝置則是利用噴墨頭而實現高精度高 氣密的液滴塗布的裝置，因此近年來備受矚目，而期待其 能運用於各種領域。 如專利文獻1所記載，隨著塗布對象之基板變得大型 化，組裝於裝置的噴墨頭數目也增多，而在基板上進行高 精密塗布時’該等噴墨頭的安裝上的偏差所造成之噴墨頭 位置的偏差’會對塗布性能產生嚴重影響。於是，必須使 用治具來進行噴墨頭的安裝，或藉由觀測噴嘴來進行位置 修正等，以謀求噴嘴位置精度的提昇。 〔專利文獻1〕日本特開2004- 1 48 1 80號公報（第1圖 【發明內容】 在專利文獻1的方法，是藉由設置於噴墨頭部的攝影 機來觀測噴到基板上的液滴狀態，而計算其相對於安裝的 基準位置之偏移量’並藉由移動噴墨頭來進行修正。此外 -5- 1336663 ，還利用固定攝影機而根據塗布液的飛行狀況來觀測塗布 量。 然而，在該方法，因各個噴墨頭的射出速度、射出角 度不同，在實際進行塗布的情形，各噴墨頭之間的塗布狀 態會有差異，而可能在膜上產生條紋不均一。又必須準備 試驗用的基板，且必須進行試驗用的噴出，因此會產生塗 布液的浪費。 本發明的目的是爲了提供一種塗布裝置，除了習知之 根據噴嘴位置的檢測結果來修正噴嘴位置以外，還用點 (dot)位置檢測攝影機來觀測塗布後的基板上的各點位置， 藉此求出塗布偏差量後進行噴嘴位置的修正，又觀測實施 的噴出液滴的飛行狀態，根據其觀測結果來進行噴出控制 ，而實現出高精度的塗布。 爲了抑制噴墨頭的射出狀態差異所造成的影響，係在 基板上進行圖案塗布後，用攝影機測定其塗布點的位置偏 移而計算出移動量，並將噴墨頭在ΧΥ0方向上移動，藉 此進行位置修正。 在本發明是著眼於，雖然噴墨頭的射出速度、射出角 度等的偏差對單一噴墨頭而言是比較小，但在排列配置的 各噴墨頭之間，製造時產生之初期特性偏差非常大，在裝 置設置時會產生安裝誤差，又進行塗布時的環境變化（例 如，氣溫變化、使用材料的黏度變化、堵塞等）所造成的 前述噴墨頭的經時特性變化的影響非常大’因此在即將進 行塗布之間，測定各噴墨頭的射出特性，根據前述測定結 -6- 1336663 果來進行塗布控制，藉此減少各塗布點的位置偏差，而製 造出均一且無偏差的高品質面板。 【實施方式】 以噴墨塗布裝置爲例來而說明本發明的實施例。 第1、2圖係顯示裝設6個噴墨頭的噴墨塗布裝置之 槪略圖。 在本噴墨塗布裝置設置：用來裝載塗布對象物的基板 21，藉由未圖示的吸引吸附機構來固定在載台面上的基板 載台20。又以橫跨該基板載台20的方式，設置可在前後 方向移動的移動架2。在該移動架2上，在前方側設置可 沿移動架的長邊方向（左右方向）移動的3個噴墨頭1，同 樣的在後方側也設置3個噴墨頭1。在移動架2的兩腳部 分設置移動載台1 7(設置有線性馬達），藉由驅動線性馬達 ，可使其在線性軌道1 8(設置在架台側）上朝前後方向移動 。此外，雖未圖示出，但在移動載台17還具備讓移動架2 上下移動的機構。各噴墨頭1是連結於噴墨頭移動機構3 ，噴墨頭移動機構3是固定在移動架2上。 在噴墨頭移動機構3上，是透過安裝托架4來安裝噴 墨頭，相對於基板載台20，噴墨頭1的噴出口（噴嘴9)是 以隔著間隔且平行的方式配置著。噴墨頭移動機構3、安 裝托架4以及噴墨頭1的組合，是以前列3個後列3個（ 合計6個）且呈鋸齒狀的方式設置於移動架2。此外，在裝 置（基板載台20)的前方（或後方）設置噴嘴攝影機6及飛滴 1336663 檢查攝影機7。噴嘴攝影機6是爲了觀測噴墨頭1的噴嘴 而設置成朝上方’飛滴檢查攝影機7是爲了觀測從噴嘴9 噴出的液滴狀態而設置成朝水平方向。此外，如第2圖所 示’在移動架2的後方（或前方）側，設置覆蓋移動架2的 後方側噴墨頭之蓋體，在該蓋體部分安裝塗布點檢查攝影 機8。該塗布點檢查攝影機8，是爲了觀測塗布於基板面 上的液滴狀態而設置成朝下方。爲了使該塗布點檢查攝影 機8沿著線性軌道22 (設置於蓋體部）在移動架2的長邊方 向移動，係具備線性馬達。 接著說明裝置的各部分的功能及動作。 如第3圖所示，在各噴墨頭1的底面，以2維且複數 列的方式配置複數個用來噴出液滴材料的噴嘴9。在各噴 墨頭1內設置有用來噴出液滴材料的壓電驅動機構。又噴 嘴9是隔著等間隔來配置。在本實施例’是將2列的噴嘴 9配置成鋸齒狀，但並不侷限於此’也可以是1列，或增 加列數。 如第4圖所示，噴墨頭移動機構3係具備：3個離合 器10、11、12、軸13、14、15以及驅動力傳送盒35。離 合器10，是用來將噴墨頭1連結（或解除連結）於軸13，藉 由接通（ON)離合器10，能使噴墨頭在x軸方向移動。離 合器1 1，是用來將噴墨頭1連結（或解除連結）於軸1 4 ’藉 由接通（ON)離合器11，能使噴墨頭1在Υ軸方向移動。 離合器1 2，是用來將噴墨頭1連結（或解除連結）於軸1 5 ’ 藉由接通（ON)離合器12，能使噴墨頭1在0方向旋轉。 1336663 各軸13、14' 15，係藉由內設於連結部16之噴墨頭驅動 馬達來進行旋轉。因此，藉由將各離合器接通斷開 (ΟΝ/OFF)，能選擇各安裝托架和裝設於其的噴墨頭，而任 意地在X、Y、0方向移動。 如先前所說明，移動架2是透過移動載台17來設置 於線性軌道1 8，移動架2係具備：能使其相對於移動載台 1 7進行垂直上下移動之驅動機構、以及使其沿著線性軌道 18在前後方向移動的驅動機構。 此外是設置有噴嘴攝影機6，以觀測各噴墨頭1的噴 嘴狀態，藉此檢測各噴嘴的堵塞，而進行噴嘴的清掃或噴 嘴的更換等。再者，爲了觀測從噴嘴噴出的液滴的飛行狀 態而設置飛滴檢杳攝影機7。第5圖係顯示噴嘴攝影機的 觀測狀況，第6圖係顯示複數個噴墨頭的噴出口的配置狀 態。未圖示的控制部，係利用噴嘴攝影機的觀測結果、目 前爲止的噴嘴的使用經歷等，來判斷是否應進行清掃或是 更換噴墨頭，並根據其判斷結果來進行處理。 前述之噴嘴攝影機6及飛滴檢查攝影機7，是以同軸 且可朝左右方向移動的方式設置在移動軌道19(設置在基 板載台20的前方側）上。首先，在移動架2上昇（各噴墨頭 位於上方）的狀態下，使移動架2沿著線性軌道1 8移動， 而讓設置於移動架2的噴墨頭1的噴嘴位置對準噴嘴攝影 機6的位置（移動軌道位置）。接著，將噴嘴攝影機6移動 至應觀測的噴墨頭1的噴嘴位置，從下側觀測各噴墨頭1 的噴嘴的狀態。此外，將飛滴檢查攝影機7移動至可觀測 -9- 1336663 從各噴墨頭噴出的液滴的位置，將目標對準飛滴，以和噴 嘴面平行移動的方式進行飛滴的觀測。藉由觀測飛滴，可 預測噴墨頭1的偏移、噴嘴9的堵塞等，同時能作爲驅動 控制噴墨頭1的資訊來使用。在進行飛滴的觀測時，如果 可以的話，可利用真空吸附等來在基板載台2 0上設置調 整用基板21，藉由使移動架2在上下方向移動以控制各噴 墨頭和基板2 1的間距，並控制移動架2的前後方向的移 動速度（亦即塗布速度）來在基板21上實施材料塗布。這時 ，藉由控制移動速度和各噴墨頭的射出時點，可進行各種 圖案的塗布。此外，不使用調整用基板，而以實際的塗布 狀態來進行上述控制亦可。 第7圖係顯示塗布點檢查攝影機的觀測狀況。第8圖 係顯示塗布點的放大圖。該塗布點檢查攝影機8如第2圖 所示，是以能沿移動架2的長邊方向移動的方式設置於移 動架2的後部側。亦即，塗布點檢查攝影機8，係設置於 線性軌道22(設置於移動架2上），藉由使塗布點檢查攝影 機8在該線性軌道上移動（左右方向），且使移動架2在上 下前後方向移動’即可觀測塗布於基板21上的塗布點26 。根據該塗布點檢查攝影機8所拍攝的基板2 1影像’來 求出塗布於基板上的塗布液滴的位置，藉此進行噴嘴位置 的修正。 接著，使用第9圖來說明噴嘴位置修正（校正）方法。 第9圖係顯示噴嘴位置調整方法的流程圖。 首先，在第一階段，根據噴嘴攝影機6的檢查結果來 -10- 1336663 實施各噴嘴的位置修正（習知方法）。就其順序而言，是先 使基板載台20及移動架2動作而將噴墨頭移動至噴嘴攝 影機6的位置。接著， (1) 以前列中央的噴墨頭1爲基準，用噴嘴攝影機6來 觀測噴墨頭1的兩端噴嘴23、24的位置，取其座標爲XI 、Y1。 (2) 實施噴嘴攝影機6和塗布點檢查攝影機8的座標修 正。 (3) 實施移動架2和塗布點檢查攝影機8的座標修正。 (4) 算出噴墨頭1的’端部的噴嘴23和鄰接噴墨頭30的 噴墨頭1的噴嘴25的偏移量dx' dy、d0，實施噴墨頭的 位置調整（參照第6圖）。 (5) 以同樣的方式在所有的噴墨頭間進行調整後，利用 噴嘴攝影機6算出兩端噴嘴的位置。 接著，在第二階段，是使用塗布點檢查攝影機來觀測 基板上的塗布點26，根據觀測結果來求出點的位置偏移量 ，以實施噴墨頭的噴出位置的修正。 (6) 對所有的噴墨頭，在調整用基板21上實施圖案塗 布。 (7 )用塗布點檢查攝影機8來觀測塗布點2 6的位置。 (8) 實施噴嘴攝影機和塗布點檢査攝影機的座標修正。 (9) 實施移動架和塗布點檢查攝影機的座標修正。 (10) 算出噴墨頭1的塗布點27和鄰接噴墨頭30的塗 布點29的偏移量Dx、Dy、D 0，實施噴墨頭的位置調整（ -11 - 1336663 參照第8圖）。 (1 1)以同樣的方式在所有的噴墨頭間進行調整後，利 用噴嘴攝影機6算出兩端噴嘴的位置。 (12)經由以上步驟完成校正。 此外，爲了配合基板的彎曲來校正噴墨頭和基板的間 距，藉由裝載感測器可進一步提昇塗布精度。 【圖式簡單說明】 第1圖係顯示噴墨塗布裝置的整體構造。 第2圖係顯示塗布裝置的後方。 第3圖係顯示噴墨頭的噴嘴排列。 第4圖係顯示噴墨頭移動機構的詳細構造。 第5圖係顯示噴嘴的觀測方法。 第6圖係顯示藉由觀測噴嘴來進行位置修正的方法。 第7圖係顯示塗布點的觀測方法。 第8圖係第7圖的塗布點的局部放大圖。 第9圖係噴嘴位置調整方法的流程圖。 【主要元件符號說明】 1 :噴墨頭 2 :移動架 3 :噴墨頭移動機構 4 :托架 6 :噴嘴攝影機 -12- 1336663 7 :飛滴檢查攝影機 8 :塗布點檢查攝影機 9 :噴嘴 1 7 _·移動載台 1 8 :線性軌道 2 0 :基板載台1336663 IX. Description of the Invention [Technical Field] The present invention relates to a droplet discharge device for ejecting droplets, and more particularly to a multi-head inkjet droplet coating device for a movable type of an inkjet head moving frame. Prior Art The ink jet head is a device that ejects a small amount of liquid droplets with high precision using a bubble or a piezoelectric element, and the ink jet coating device is a device that realizes high-precision, high-air-tight droplet coating by using an ink jet head, and thus, in recent years, It is highly regarded and it is expected to be used in various fields. As described in Patent Document 1, as the substrate to be coated is increased in size, the number of ink jet heads assembled in the apparatus is also increased, and when high-precision coating is performed on the substrate, the deviation of the mounting of the ink jet heads is The resulting deviation in the position of the ink jet head has a serious influence on the coating performance. Therefore, it is necessary to use the jig to mount the ink jet head, or to perform position correction by observing the nozzle, so as to improve the nozzle position accuracy. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004- 1 48 No. 80 (Patent Document 1) The method of Patent Document 1 is to observe a liquid sprayed onto a substrate by a camera provided on an ink jet head. In the drop state, the offset amount with respect to the mounted reference position is calculated and corrected by moving the ink jet head. Further, in addition to the fixed camera, the coating amount is observed based on the flying condition of the coating liquid. However, in this method, since the ejection speed and the emission angle of the respective ink jet heads are different, in the case where the coating is actually performed, the coating state between the respective ink jet heads may be different, and streaks may be uneven on the film. It is necessary to prepare a substrate for testing, and it is necessary to perform ejection for testing, thereby causing waste of the coating liquid. It is an object of the present invention to provide a coating device which, in addition to conventionally correcting the nozzle position based on the detection result of the nozzle position, Using a dot position detecting camera to observe the position of each dot on the coated substrate, thereby obtaining the coating deviation amount and correcting the nozzle position. The flying state of the ejected droplets is measured, and the ejection control is performed based on the observation result to achieve high-precision coating. In order to suppress the influence of the difference in the ejection state of the inkjet head, after pattern coating on the substrate, The positional deviation of the coating point is measured by a camera, and the amount of movement is calculated, and the inkjet head is moved in the ΧΥ0 direction to perform position correction. The present invention focuses on the ejection speed and the ejection angle of the inkjet head. The deviation of the other is relatively small for a single inkjet head, but the initial characteristic deviation generated during manufacture between the inkjet heads arranged in an array is very large, and an installation error occurs during device installation, and when coating is performed, The influence of changes in the temporal characteristics of the ink jet head caused by environmental changes (for example, temperature change, viscosity change of the material used, clogging, etc.) is very large. Therefore, the ejection characteristics of each ink jet head are measured between coatings. Coating control is performed according to the above-mentioned measurement result -6 - 1336663, thereby reducing the positional deviation of each coating point, and manufacturing uniformity and no [Embodiment] An embodiment of the present invention will be described by taking an inkjet coating apparatus as an example. Fig. 1 and Fig. 2 are schematic views showing an inkjet coating apparatus equipped with six inkjet heads. In the inkjet coating apparatus, the substrate 21 for loading an object to be coated is fixed to the substrate stage 20 on the stage surface by a suction suction mechanism (not shown), and the substrate stage 20 is traversed. A moving frame 2 that is movable in the front-rear direction is provided. On the moving frame 2, three ink-jet heads 1 movable in the longitudinal direction (left-right direction) of the moving frame are provided on the front side, and the same is also provided on the rear side. 3 ink-jet heads 1. A moving stage 17 (provided with a linear motor) is provided at both leg portions of the moving frame 2, and by driving the linear motor, it can be made on the linear track 18 (set on the gantry side) Move in the front and rear direction. Further, although not illustrated, the moving stage 17 further includes a mechanism for moving the moving frame 2 up and down. Each of the ink jet heads 1 is coupled to the ink jet head moving mechanism 3, and the ink jet head moving mechanism 3 is fixed to the moving frame 2. In the ink jet head moving mechanism 3, the ink jet head is attached through the mounting bracket 4, and the discharge port (nozzle 9) of the ink jet head 1 is disposed so as to be parallel to each other with respect to the substrate stage 20. . The combination of the ink jet head moving mechanism 3, the mounting bracket 4, and the ink jet head 1 is provided in the moving frame 2 so that three (the total of six) and three (the total) are arranged in a zigzag manner. Further, the nozzle camera 6 and the flying droplet 1336663 are provided in front of (or behind) the apparatus (substrate stage 20) to inspect the camera 7. The nozzle camera 6 is disposed upward to observe the nozzle of the inkjet head 1. The droplet inspection camera 7 is disposed in a horizontal direction in order to observe the state of the droplets ejected from the nozzles 9. Further, as shown in Fig. 2, a cover covering the rear side ink jet head of the moving frame 2 is provided on the rear (or front) side of the moving frame 2, and a coating spot inspection camera 8 is attached to the cover portion. The coating spot inspection camera 8 is disposed to face downward in order to observe the state of the droplets applied to the surface of the substrate. In order to move the coating spot inspection camera 8 along the linear rail 22 (provided in the lid portion) in the longitudinal direction of the moving frame 2, a linear motor is provided. Next, the function and operation of each part of the device will be described. As shown in Fig. 3, a plurality of nozzles 9 for ejecting droplet material are disposed on the bottom surface of each of the ink jet heads in a two-dimensional and plural array. A piezoelectric drive mechanism for ejecting droplet material is disposed in each of the ink jet heads 1. Further, the nozzles 9 are arranged at equal intervals. In the present embodiment, the nozzles 9 of the two rows are arranged in a zigzag shape, but the present invention is not limited to this, and may be one column or an increase in the number of columns. As shown in Fig. 4, the head moving mechanism 3 includes three clutches 10, 11, and 12, shafts 13, 14, and 15 and a driving force transmission case 35. The clutch 10 is for connecting (or uncoupling) the ink jet head 1 to the shaft 13, and by rotating the clutch 10, the ink jet head can be moved in the x-axis direction. The clutch 1 1 is for connecting (or uncoupling) the ink jet head 1 to the shaft 1 4 ' by turning the clutch 11 ON, so that the ink jet head 1 can be moved in the x-axis direction. The clutch 12 is for connecting (or uncoupling) the ink jet head 1 to the shaft 15'. By turning on the clutch 12, the ink jet head 1 can be rotated in the 0 direction. 1336663 Each of the shafts 13, 14' 15 is rotated by an ink jet head driven motor provided in the joint portion 16. Therefore, by turning the clutches ON/OFF (ΟΝ/OFF), it is possible to select each of the mounting brackets and the ink jet head mounted thereon, and to move in the X, Y, and 0 directions arbitrarily. As described above, the moving frame 2 is disposed on the linear track 1 through the moving stage 17, and the moving frame 2 is provided with a driving mechanism capable of vertically moving up and down with respect to the moving stage 17, and A drive mechanism in which the linear track 18 moves in the front-rear direction. Further, the nozzle camera 6 is provided to observe the state of the nozzles of the respective ink-jet heads 1, thereby detecting clogging of the respective nozzles, and cleaning of the nozzles or replacement of the nozzles. Further, in order to observe the flying state of the liquid droplets ejected from the nozzles, the fly-by-detection camera 7 is provided. Fig. 5 shows the observation state of the nozzle camera, and Fig. 6 shows the arrangement state of the ejection ports of the plurality of ink jet heads. The control unit (not shown) determines whether or not cleaning or replacement of the ink jet head is performed by the observation result of the nozzle camera, the current use history of the nozzle, and the like, and performs processing based on the result of the determination. The nozzle camera 6 and the droplet inspection camera 7 described above are provided on the moving rail 19 (provided on the front side of the substrate stage 20) so as to be coaxial and movable in the left-right direction. First, in a state where the moving frame 2 is raised (each ink head is positioned above), the moving frame 2 is moved along the linear track 18, and the nozzle position of the ink jet head 1 provided on the moving frame 2 is aligned with the nozzle camera. 6 position (moving track position). Next, the nozzle camera 6 is moved to the nozzle position of the ink jet head 1 to be observed, and the state of the nozzles of the respective ink jet heads 1 is observed from the lower side. Further, the flying drop inspection camera 7 is moved to a position where the liquid droplets ejected from the respective ink-jet heads can be observed -9 - 1336663, and the target is aligned with the flying droplets, and the droplets are observed to move in parallel with the nozzle surface. By observing the flying droplets, it is possible to predict the shift of the ink jet head 1, the clogging of the nozzle 9, and the like, and to use it as information for driving and controlling the ink jet head 1. When the droplets are observed, if necessary, the substrate 21 for adjustment can be provided on the substrate stage 20 by vacuum suction or the like, and the moving head 2 can be moved in the vertical direction to control the respective heads and the substrate 2. The pitch of 1 is controlled, and the moving speed of the moving frame 2 in the front-rear direction (that is, the coating speed) is controlled to apply material coating on the substrate 21. At this time, by controlling the moving speed and the timing of the ejection of each of the ink jet heads, it is possible to apply various patterns. Further, the above-described control may be performed in an actual coating state without using the substrate for adjustment. Figure 7 shows the observation status of the coating point inspection camera. Figure 8 shows an enlarged view of the coating point. As shown in Fig. 2, the coating spot inspection camera 8 is provided on the rear side of the movable frame 2 so as to be movable in the longitudinal direction of the moving frame 2. That is, the coating point inspection camera 8 is disposed on the linear rail 22 (disposed on the moving frame 2), and moves the coating point 8 on the linear track (left and right direction) by the coating point, and causes the moving frame 2 to be up and down. The coating point 26 applied to the substrate 21 can be observed by moving in the front-rear direction. The position of the coated liquid droplets applied to the substrate is determined by checking the image of the substrate 2 1 taken by the camera 8 based on the coating point, thereby correcting the position of the nozzle. Next, the nozzle position correction (correction) method will be described using FIG. Figure 9 is a flow chart showing a method of adjusting the position of the nozzle. First, in the first stage, position correction of each nozzle (conventional method) is performed based on the inspection result of the nozzle camera 6 -10- 1336663. In this order, the substrate stage 20 and the moving frame 2 are first operated to move the ink jet head to the position of the nozzle camera 6. Next, (1) The position of the nozzles 23 and 24 at both ends of the ink jet head 1 is observed by the nozzle camera 6 based on the inkjet head 1 in the center of the previous row, and the coordinates are XI and Y1. (2) The coordinate correction of the nozzle camera 6 and the coating spot inspection camera 8 is carried out. (3) The coordinate correction of the moving frame 2 and the coating point inspection camera 8 is carried out. (4) The offset amount dx' dy and d0 of the nozzle 23 at the end of the ink jet head 1 and the nozzle 25 of the ink jet head 1 adjacent to the ink jet head 30 are calculated, and the position adjustment of the ink jet head is performed (see the sixth). Figure). (5) After adjusting between all the ink-jet heads in the same manner, the position of the nozzles at both ends was calculated by the nozzle camera 6. Next, in the second stage, the coating point 26 on the substrate is observed using a coating spot inspection camera, and the positional shift amount of the dot is obtained based on the observation result to correct the discharge position of the ink jet head. (6) Pattern coating is applied to the adjustment substrate 21 for all of the ink jet heads. (7) The position of the coating point 26 is observed by the coating point inspection camera 8. (8) Implement the coordinate correction of the nozzle camera and the coating point inspection camera. (9) Implement the coordinate correction of the mobile rack and the coating point inspection camera. (10) The offset amounts Dx, Dy, and D 0 of the application point 27 of the inkjet head 1 and the coating point 29 adjacent to the inkjet head 30 are calculated, and the position adjustment of the inkjet head is performed (refer to Fig. 8 of -11 - 1336663) . (1 1) After adjusting between all the ink-jet heads in the same manner, the nozzle camera 6 was used to calculate the positions of the nozzles at both ends. (12) The correction is completed through the above steps. Further, in order to correct the pitch of the ink jet head and the substrate in accordance with the bending of the substrate, the coating accuracy can be further improved by loading the sensor. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows the overall structure of an inkjet coating apparatus. Figure 2 shows the rear of the coating device. Fig. 3 shows the nozzle arrangement of the ink jet head. Fig. 4 is a view showing the detailed configuration of the ink jet head moving mechanism. Figure 5 shows the observation method of the nozzle. Fig. 6 shows a method of performing position correction by observing a nozzle. Figure 7 shows the observation method of the coating point. Fig. 8 is a partially enlarged view showing a coating point of Fig. 7. Figure 9 is a flow chart of the nozzle position adjustment method. [Main component symbol description] 1 : Inkjet head 2: Moving frame 3: Inkjet moving mechanism 4: Bracket 6: Nozzle camera -12- 1336663 7: Flying drop inspection camera 8: Coating point inspection camera 9: Nozzle 1 7 _·Mobile stage 1 8 : Linear track 2 0 : Substrate stage