JP2005014216A - Dot deviation detection method and dot deviation detecting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dot deviation detection method whereby a positional deviation of dots obtained when liquid droplets discharged from discharge nozzles of a liquid droplet discharging head strike at an object to be inspected can be simply and quickly detected, and to provide a dot deviation detecting device. <P>SOLUTION: The dot deviation detecting device 1 for detecting the positional deviation of dots obtained when the liquid droplets discharged from discharge nozzles of the liquid droplet discharging head strike at the object to be inspected has an inspection table 2 for holding the object 20, a camera 3 for imaging electronic images of a plurality of dots aligned and formed on the object 20, a moving means 4 for moving the camera 3 in a horizontal direction relatively to the inspection table 2, a control means for controlling the operation of the moving means 4, an image processing means for measuring an interval of adjacent dots by image processing the electronic images, and an output means for outputting information obtained by the image processing means. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dot deviation detection method and a dot deviation detection apparatus for detecting a positional deviation of dots obtained by a droplet ejected from an ejection nozzle of a droplet ejection head landing on an inspection object.
[0002]
[Prior art]
In recent years, it has been proposed to manufacture liquid crystal display devices, organic EL (Electro-Luminescence) devices, electron-emitting devices, PDP (Plasma Display Panel) devices, electrophoretic display devices, and the like using inkjet droplet discharge devices. ing. In a droplet discharge device used for manufacturing such an apparatus, a workpiece and a droplet discharge head (inkjet head) are moved in an X-axis direction and a Y-axis by an XY movement mechanism including an X-axis table and a Y-axis table. By moving droplets from the respective discharge nozzles of the droplet discharge head while relatively moving in the direction, dot rows having a predetermined pattern are formed on the surface of the workpiece.
[0003]
In such a droplet discharge device, the position of a dot obtained by landing of a droplet deviates from the normal position due to a flight curve of the droplet discharged from the discharge nozzle of the droplet discharge head. May occur or even missing dots may occur. For this reason, in order to ensure the accuracy of the product, when a dot shift occurs, this is detected and the discharge timing is corrected, or recovery processing such as cleaning and nozzle suction is performed on the droplet discharge head. There is a need.
[0004]
Conventionally, a method for optically detecting the trajectory of a droplet discharged from a discharge nozzle has been proposed as a method for detecting dot shift or dot dropout (see, for example, Patent Document 1). However, this method requires a very precise and expensive detection device, and the operation of the device requires complicated and sophisticated control. Therefore, there is a problem that it takes a great deal of cost, labor, and time. As a result, there is a problem that time, labor, and expense are required for parts other than the original product manufacture, and the product manufacturing cost increases.
[0005]
[Patent Document 1]
JP-A-8-309963
[0006]
[Problems to be solved by the invention]
An object of the present invention is to provide a dot misalignment detection method capable of easily and rapidly detecting a positional misalignment of dots obtained by droplets ejected from ejection nozzles of a droplet ejection head landing on an inspection object. The object is to provide a dot deviation detection device.
[0007]
[Means for Solving the Problems]
Such an object is achieved by the present invention described below.
The dot deviation detection method of the present invention is a dot deviation detection method for detecting a positional deviation of dots obtained by a droplet ejected from an ejection nozzle of a droplet ejection head landing on an inspection object,
An electronic image of a plurality of dots formed side by side on the object to be inspected is imaged, the interval between adjacent dots is measured by image processing of the electronic image, and the measured value is compared with a normal value. It is characterized by detecting a positional shift of the.
[0008]
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly. Therefore, since the time, labor, and cost required for parts other than the original product manufacturing by the droplet discharge device can be reduced, the manufacturing cost of the original product can be reduced.
[0009]
In the dot shift detection method of the present invention, it is preferable to further obtain information regarding the area of each dot by performing image processing on the electronic image.
Thereby, in addition to the dot deviation, it is also possible to confirm whether or not the size (liquid amount) of the droplets ejected from each ejection nozzle has a set value.
In the dot deviation detection method of the present invention, it is preferable that each dot is formed by discharging a droplet from each of the discharge nozzles in a state where the droplet discharge head is relatively stopped with respect to the inspection object.
As a result, when forming dots on the object to be inspected by the droplet discharge device, complicated control is not necessary for the droplet discharge device, so that it is possible to detect dot displacement more easily and quickly.
[0010]
In the dot deviation detection method of the present invention, it is preferable that each dot is formed by discharging a droplet from each discharge nozzle while moving the droplet discharge head relative to the object to be inspected.
Thereby, when forming dots on the object to be inspected by the droplet discharge device, the dot rows can be freely arranged, and the dot rows can be arranged so as to be easily imaged by the camera. In addition, it is possible to detect dot displacement.
[0011]
In the dot shift detection method of the present invention, it is preferable that dots are arranged in a plurality of rows on the inspection object.
As a result, the number of dots entering the camera's field of view can be increased, and dot displacement can be detected for a larger number of dots with a single imaging operation, so dot displacement can be detected more quickly and efficiently. be able to.
[0012]
The dot displacement detection device of the present invention is a dot displacement detection device that detects the displacement of a dot obtained by landing a droplet discharged from a discharge nozzle of a droplet discharge head on an inspection object,
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
Output means for outputting information obtained by the image processing means.
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly.
[0013]
The dot displacement detection device of the present invention is a dot displacement detection device that detects the displacement of a dot obtained by landing a droplet discharged from a discharge nozzle of a droplet discharge head on an inspection object,
An inspection table for holding the inspection object;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Moving means for moving the camera relative to the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
Output means for outputting information obtained by the image processing means.
[0014]
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly. Further, by moving the camera with respect to the object to be inspected, all the dots on the object to be inspected can be imaged, and the positional deviation can be detected for all the dots.
[0015]
The dot displacement detection device of the present invention is a dot displacement detection device that detects the displacement of a dot obtained by landing a droplet discharged from a discharge nozzle of a droplet discharge head on an inspection object,
A work table for holding a work and the inspection object;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward an object held on the work table;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Moving means for moving the droplet discharge head and the camera relative to the work table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
Output means for outputting information obtained by the image processing means.
[0016]
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly. Further, by moving the camera with respect to the object to be inspected, all the dots on the object to be inspected can be imaged, and the positional deviation can be detected for all the dots. Furthermore, since the work table and the inspection table of the droplet discharge device can be used together, the space efficiency can be improved and the space can be saved. In addition, since dot deviation can be detected as it is without moving the inspection object after dots are formed on the inspection object on one worktable, dot deviation detection can be performed more quickly and efficiently. .
[0017]
The dot displacement detection device of the present invention is a dot displacement detection device that detects the displacement of a dot obtained by landing a droplet discharged from a discharge nozzle of a droplet discharge head on an inspection object,
A work table for holding a work and the inspection object;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward an object held on the work table;
An inspection table for holding the object to be inspected when performing dot deviation detection;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object held on the inspection table;
Moving means for moving the droplet discharge head relative to the work table in a horizontal direction and moving the camera relative to the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
Output means for outputting information obtained by the image processing means.
[0018]
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly. Further, by moving the camera with respect to the object to be inspected, all the dots on the object to be inspected can be imaged, and the positional deviation can be detected for all the dots. In addition, since the work table and inspection table are separated, product production and dot displacement detection can be performed in parallel, and dot displacement detection can be performed without affecting product production efficiency. Can do.
[0019]
The dot displacement detection device of the present invention is a dot displacement detection device that detects the displacement of a dot obtained by landing a droplet discharged from a discharge nozzle of a droplet discharge head on an inspection object,
A work table that holds the work,
An inspection table;
A first roller for unwinding a long inspection object wound in a roll shape onto the inspection table;
A second roller for winding the inspection object that has passed over the inspection table;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward the workpiece and the inspection object;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object positioned on the inspection table;
Moving means for relatively moving the droplet discharge head and the work table in a horizontal direction, and relatively moving the camera and the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
Output means for outputting information obtained by the image processing means.
[0020]
As a result, the positional deviation of the dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the inspection object can be easily and easily performed without requiring an expensive device or complicated control. It can be detected quickly. Further, by moving the camera with respect to the object to be inspected, all the dots on the object to be inspected can be imaged, and the positional deviation can be detected for all the dots. Furthermore, since a long inspection object wound in a roll shape is used, the replacement cycle of the inspection object can be lengthened, and the labor required for the inspection can be reduced.
[0021]
In the dot shift detection device according to the aspect of the invention, it is preferable that the droplet discharge head has at least one discharge nozzle row in which a plurality of discharge nozzles are arranged.
Thereby, dot deviation detection can be performed more easily and quickly.
In the dot shift detection device of the present invention, the moving means includes an X-axis direction moving means that moves in a horizontal direction (hereinafter referred to as “X-axis direction”), and a direction that is perpendicular to the X-axis direction (hereinafter referred to as “X-axis direction”). And Y-axis direction moving means for moving in the “Y-axis direction”).
Accordingly, since the camera can be moved in a two-dimensional direction orthogonal to the object to be inspected, dot deviation detection can be performed for a wider range of dot rows.
[0022]
In the dot shift detection device of the invention, the droplet discharge head has at least one discharge nozzle row in which a plurality of discharge nozzles are arranged, and the discharge nozzle row is inclined with respect to the X-axis direction or the Y-axis direction. It is preferable.
As a result, when forming dots on the object to be inspected, since the degree of freedom of arrangement of the dot rows is high, it is possible to arrange the dot rows so that it is easy to capture images with a camera. Can be detected.
[0023]
In the dot shift detection device according to the aspect of the invention, it is preferable that the image processing unit further obtains information regarding the area of each dot by performing image processing on the electronic image.
Thereby, in addition to the dot deviation, it is also possible to confirm whether or not the size (liquid amount) of the droplets ejected from each ejection nozzle has a set value.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.
1 to 3 show a first embodiment of a dot deviation detection method and a dot deviation detection apparatus according to the present invention. FIG. 1 is a plan view showing the entire dot deviation detection apparatus, and FIG. FIG. 3 is a cross-sectional view taken along line AA in FIG. 1, FIG. 3 is a block diagram of the dot misalignment detection apparatus shown in FIG. 1, FIG. 4 is a bottom view showing a nozzle surface of a droplet discharge head, and FIG. FIG. 6 is a plan view showing a configuration example of a dot row formed on the inspection object, and FIG. 6 is a diagram showing an example of an output file output by the dot deviation detection device shown in FIG.
[0025]
A dot deviation detection device 1 shown in FIG. 1 detects a positional deviation of dots obtained by droplets ejected from ejection nozzles of a droplet ejection head (inkjet head) 13 landing on an inspection object. . According to this dot deviation detection device 1, it is possible to discover that a discharge abnormality such as a flying curve of a droplet or a missing dot has occurred in the droplet discharge head 13, whereby a droplet discharge device (inkjet) This can contribute to an improvement in the yield of products manufactured by the drawing apparatus.
[0026]
In the present invention, the droplet discharge device is not only an ordinary inkjet printer for printing characters / images, but also an industrial droplet discharge device (for example, a liquid crystal display device, an organic EL device, an electron emission device, a PDP). And the like used in the manufacture of devices, electrophoretic display devices, etc.). Further, the liquid (including the dispersion liquid) discharged by the droplet discharge head is not particularly limited. For example, ink, a filter material for a color filter, and a fluorescent light for forming an EL light emitting layer in an organic EL device. Materials, fluorescent materials for forming phosphors in PDP devices, migrating materials for forming electrophores in electrophoretic display devices, bank materials for forming banks on the surface of substrates, various coating materials, and electrodes Liquid electrode material for forming a spacer, a particle material for forming a minute cell gap between two substrates, a liquid metal material for forming a metal wiring, a lens material for forming a microlens, a resist Examples thereof include a light diffusing material for forming a material and a light diffuser.
[0027]
As shown in FIG. 1, the dot deviation detection device 1 includes an inspection table 2 that holds a flat or sheet-like inspection object 20 (for example, a glass substrate, a metal plate, a synthetic resin sheet, paper, and the like), and an inspection. A camera 3 provided above the table 2 so as to be movable in the horizontal direction (X-axis direction and Y-axis direction) and the vertical direction (Z-axis direction), and moving means 4 for moving the camera 3 in the horizontal direction and the vertical direction It has.
In this case, the left-right direction in FIG. 1 (direction perpendicular to the paper surface in FIG. 2) is the X-axis direction, the up-down direction in FIG. 1 (left-right direction in FIG. 2) is the Y-axis direction, and perpendicular to the paper surface in FIG. The direction (vertical direction in FIG. 2) is the Z-axis direction.
[0028]
The inspection table 2 is fixed to the upper part of a base (not shown) and has a horizontal holding surface 2a on the upper surface side, and the inspection object 20 is vacuum-adsorbed on the upper surface of the holding surface 2a. It is held by the holding means.
Droplets are ejected in advance on the inspection object 20 by the droplet ejection head 13 that is the target of dot deviation detection. On the inspection object 20, a plurality of dots 21 obtained by landing droplets discharged from the respective discharge nozzles 14 of the droplet discharge head 13 are formed side by side to form a dot row 22. ing.
[0029]
The camera 3 includes, for example, a solid-state imaging device such as a CCD (Charge Coupled Device) and a camera lens. The camera 3 captures an electronic image of a region including a plurality of dots 21 on the inspection object 20.
The moving means 4 includes a support plate 5 that supports the camera 3, a Z-axis direction moving means 6 that supports the camera 3 via the support plate 5 so as to be movable in the Z-axis direction and to be positioned at a predetermined position, and Z-axis An X-axis direction moving means 7 that supports the camera 3 so as to be movable in the X-axis direction and to be positioned at a predetermined position via the direction moving means 6 and the support plate 5, an X-axis direction moving means 7, and a Z-axis direction moving means. 6 and a support plate 5, and a Y-axis direction moving means 8 that supports the camera 3 so that it can move in the Y-axis direction and can be positioned at a predetermined position.
[0030]
The X-axis direction moving means 7 and the Y-axis direction moving means 8 of the moving means 4 are such that the camera 3 moves over the entire length in the X-axis direction and the entire length in the Y-axis direction of the inspection table 2 and is located on the inspection table 2. The moving range is set so that all the dots 21 on the object 20 can be captured.
Examples of the X-axis direction moving unit 7 and the Y-axis direction moving unit 8 include a configuration using a linear motor, and the Z-axis direction moving unit 6 includes a configuration using a feed screw mechanism, for example. However, the present invention is not limited to this, and any other one having a similar function may be used.
[0031]
As shown in FIG. 3, the dot deviation detection device 1 further includes an image processing unit 23, a display 24 as an output unit, and an external storage device 25.
The image processing means 23 measures the interval between adjacent dots 21 and the area of each dot 21 by performing image processing on the electronic image of the dot row 22 captured by the camera 3.
The display 24 includes, for example, a CRT (Cathode-Ray Tube), a liquid crystal display, and the like, and displays, for example, an operation screen, a data input screen, an image of a dot row 22 captured by the camera 3, an output file described later, and the like. be able to.
The external storage device 25 is configured by, for example, FDD (Floppy Disk Drive (“Floppy” is a registered trademark)).
[0032]
The control means 10 controls the moving means 4, the image processing means 23, and the display 24, respectively. The control unit 10 includes a CPU (Central Processing Unit) 101 and a storage unit (storage unit) 102. The storage unit 102 includes a storage medium (recording medium) that can be read by the CPU 101, and the storage medium includes a magnetic or optical recording medium, a semiconductor memory, or the like.
[0033]
As shown in FIG. 4, the droplet discharge head 13 of this embodiment has a discharge nozzle row 15 in which a plurality of discharge nozzles 14 are arranged in one row or two rows (one row in the drawing) at a predetermined arrangement interval S. ing. In the following description, for the sake of convenience, the leftmost discharge nozzle 14 in FIG. 4 is referred to as “No. 1”, and sequentially “No. 2, No. 3, etc.” toward the right side. The structure of the droplet discharge head 13 is not particularly limited. For example, even if the droplet discharge head 13 is configured to discharge a droplet by driving an actuator having a piezoelectric element, the liquid is heated by a heating element to generate bubbles. It may be configured to discharge droplets by causing them to discharge.
Hereinafter, a method for detecting a dot shift in the droplet discharge head 13 using the dot shift detection apparatus 1 configured as described above will be described.
[0034]
[1] First, using a droplet discharge device (not shown) including the droplet discharge head 13, droplets are discharged toward the surface of the inspection object 20 under the same conditions as the workpiece, and the dot rows 22 are formed. Form (see FIG. 5). That is, the inspection object 20 is held on the work table of the droplet discharge device, the droplet discharge head 13 is positioned at a predetermined position above the inspection object 20, and the discharge nozzles 14 are directed toward the inspection object 20. To discharge droplets. As a result, dot rows 22 are formed in a row on the surface of the inspection object 20 at substantially the same interval as the arrangement interval S of the discharge nozzles 14.
[0035]
In the case shown in FIG. 5, droplets are ejected in a state where the droplet ejection head 13 is stopped relative to the inspection object 20. Thus, the droplet discharge device only needs to be operated with simple control, and complicated control is unnecessary.
When the size of each dot 21 is large and overlaps with the adjacent dot 21, for example, the dots are divided into two times (two rows) of the odd-numbered discharge nozzles 14 and the even-numbered discharge nozzles 14. By forming 21, each dot 21 is separated to form a dot row 22.
[0036]
[2] The inspection object 20 is held on the inspection table 2 shown in FIG. 1, and the X-axis direction movement means 7 and the Y-axis direction movement means 8 of the moving means 4 are driven to connect the camera 3 to the inspection object 20. It is positioned above the upper dot row 22, the Z-axis direction moving means 6 is driven to move the camera 3 in the vertical direction, and the camera 3 is focused on the dot row 22 on the object 20 to be focused. The camera 3 is fixed at the position.
[0037]
[3] At this position, the camera 3 captures an electronic image of the dot row 22 as shown in FIG. In the present embodiment, only nine dots 21 are included in the field of view of the camera 3. Therefore, when there are a large number of discharge nozzles 14 of the droplet discharge head 13, the control means 10 operates the X-axis direction moving means 7 and the Y-axis direction moving means 8 to pick up an image while moving the camera 3 in the horizontal direction. repeat. Thereby, imaging can be performed for all the dots 21 corresponding to all the discharge nozzles 14 of the droplet discharge head 13.
[0038]
[4] Image data of an electronic image captured by the camera 3 is taken into the storage unit 231 included in the image processing unit 23. The image processing unit 23 measures the interval between adjacent dots 21 by performing image processing on an electronic image captured by the camera 3. The image processing unit 23 determines that the dot 21 is missing (a missing dot 21 due to non-ejection of a droplet) when there is no dot 21 in a certain area centered on the normal position. .
In the present embodiment, the image processing means 23 further measures the area of each dot 21. Then, the image processing unit 23 outputs these measurement data to the control unit 10.
[0039]
[5] The control unit 10 stores the measurement data input from the image processing unit 23 in the storage unit 102, collects the measurement data in a file having the format shown in FIG. 6, and outputs the file to the external storage device 25. To do. The means for outputting measurement data is not limited to the external storage device 25, and may be displayed (output) on the display 24 or output by printing on a printer. In addition, connecting to a network and sending it to another PC is also an efficient output method.
[0040]
In the output file shown in FIG. 6, the first line is a title, from the left, the nozzle number, the dot interval (inter-dot distance) [μm], and the dot area [μm ² ]. The second and subsequent lines are data, and each numerical value is separated by a comma symbol. The numerical values of the dot interval and the dot area corresponding to the nozzle number 1 are the distance L between the dot 21 of the first nozzle and the dot 21 of the second nozzle in FIG. ₁ And the area of the dot 21 of the first nozzle. Similarly, the numerical values of the dot interval and the dot area corresponding to the nozzle number 2 are the distance L between the dot 21 of the second nozzle and the dot 21 of the third nozzle, respectively. ₂ And the area of the dot 21 of the second nozzle is shown, and the same applies to the following.
In the output file shown in FIG. 6, a portion written as “non” indicates that there is no dot 21 (dot missing) due to the clogging of the discharge nozzle 14 or the like.
[0041]
The operator can determine the presence or absence of dot deviation by reading the output file as shown in FIG. 6 and comparing the measured value of the dot interval with a normal value (in this case, the arrangement interval S of the discharge nozzles 14). . That is, if the droplet discharged from the discharge nozzle 14 has landed at a regular position, the dot interval should match the array interval S of the discharge nozzle 14, so the measured value of the dot interval and the array interval S The presence or absence and degree of dot displacement can be determined by looking at the difference (dot displacement amount). Further, in this embodiment, since it is possible to determine whether or not there is a missing dot, it is possible to detect even when a non-ejection of a droplet occurs due to clogging of the ejection nozzle 14 or the like.
[0042]
In the present invention, the detected dot shift amount does not represent the absolute value of the shift of each dot 21 from the normal position, but the extent of dot shift (droplet flight curve) is within an allowable range. Therefore, it is sufficient information to determine whether or not it is, so that it greatly contributes to ensuring the quality of the product manufactured using the droplet discharge head 13.
[0043]
Further, in the present invention, when performing dot deviation detection, a plain object 20 can be used. For example, it is necessary to prepare an expensive object such as a glass mask with a precise pattern mark. Therefore, it is possible to detect the dot shift easily and at low cost. In addition, since it is not necessary to land at an accurate target position when droplets are ejected from the droplet ejection head 13 toward the object to be inspected 20, complicated control is not required for the droplet ejection device, and it is simple and quick. It is possible to detect dot displacement. For this reason, when manufacturing a product such as the one described above using a droplet discharge device, it is possible to reduce the time, labor, and cost required for parts other than the original manufacturing, thereby reducing the manufacturing cost. It can also be made.
In the present invention, the regular dot interval in the dot row 22 is input in advance to the control means 10, and the control means 10 automatically determines whether or not the dot deviation of each dot 21 is allowed based on the measurement data. You may make it determine to.
[0044]
In this embodiment, since the area of each dot 21 is measured, the size (liquid amount) of the liquid droplets discharged from each discharge nozzle 14 is compared by comparing this measured value with the regular area of the dots 21. ) Can be also detected. In this case, the image processing unit 23 does not need to measure the area of each dot 21, and acquires information related to the area of each dot 21 (for example, the length of the boundary line around the dot). May be.
[0045]
FIG. 7 is a plan view showing another configuration example of the dot row formed on the inspection object 20, and FIG. 8 is a plan view showing a second embodiment of the dot deviation detection device of the present invention. Hereinafter, the second embodiment of the dot deviation detection method and the dot deviation detection apparatus of the present invention will be described with reference to these drawings. However, the difference from the above-described embodiment will be mainly described, and the same matters will be described. The description is omitted.
[0046]
As shown in FIG. 8, the dot deviation detection device 1 </ b> A of the present embodiment is obtained by adding a dot deviation detection function to the droplet ejection device 11 provided with the droplet ejection head 13. A work table 12 that also serves as an inspection table, a camera 3 provided above the work table 12 so as to be movable in the horizontal direction (X-axis direction) and the vertical direction (Z-axis direction), and above the work table 12 A droplet discharge head 13 movably provided in the horizontal direction (X-axis direction), an X-axis direction moving means 7 for independently moving the camera 3 and the droplet discharge head 13 in the X-axis direction, and a work table. Y-axis direction moving means 8 for moving 12 in the Y-axis direction is provided. The droplet discharge head 13 is supported by the X-axis direction moving unit 7 via the support member 17. Here, the horizontal direction in FIG. 8 is the X-axis direction (sub-scanning direction), the vertical direction in FIG. 8 is the Y-axis direction (main scanning direction), and the direction perpendicular to the paper surface of FIG.
[0047]
In order to detect a dot shift by the dot shift detection apparatus 1A according to this embodiment configured as described above, first, a dot row is formed on the surface of the inspection object 20 using the droplet discharge device 11 under the same conditions as the workpiece. 22 is formed. That is, the inspection object 20 is held on the work table 12 of the droplet discharge device 11, the droplet discharge head 13 is positioned at a predetermined position above the inspection object 20, and each discharge nozzle of the droplet discharge head 13 is positioned. A droplet is ejected from 14 toward the inspection object 20 to form a dot row 22 on the surface of the inspection object 20. Thereafter, the camera 3 is positioned above the object to be inspected, the dot row 22 is imaged, and the electronic image is processed by the image processing means 23 in the same manner as described above, whereby dot deviation can be detected. .
In this embodiment, since the function of detecting the displacement of the dots 21 is added to the droplet discharge device 11, space efficiency can be improved and space saving can be achieved. Further, it is not necessary to replace the inspection object 20 from the work table to the inspection table, and dot deviation detection can be performed more quickly and easily.
[0048]
Further, in such a dot deviation detection device 1A, when forming the dot row 22 on the inspection object 20, the dot row 22 may be formed in a plurality of rows as shown in FIG. In this case, the discharge nozzle row 15 of the droplet discharge head 13 is divided into a plurality of blocks (in the figure, blocks of 10 nozzles) within a range that can be captured from the left of FIG. The droplet discharge heads 13 are moved relative to the object 20 to be tested, and droplets are discharged from the discharge nozzles 14 at different discharge timings. First, the first dot row 22 is formed on the inspection object 20 by the discharge nozzles 14 (No. 1 to No. 10) of the block located at the left end of the discharge nozzle row 15, and then A second dot row 22 is formed on the inspection object 20 by the discharge nozzles 14 (Nos. 11 to 20) in the second block, and then the discharge nozzles 14 (21 to 30 in the third block). The third dot row 22 is formed on the inspection object 20 by the nozzle No.), and this is repeated. In this way, more dots 21 can be arranged in the field of view of the camera 3, and dot displacement detection can be performed for a larger number of ejection nozzles 14 with a single image pickup. It is possible to detect dot displacement.
In the above case, the interval between the tenth dot 21 located at the right end of the first row and the eleventh dot 21 located at the left end of the second row cannot be measured. The distance between the tenth dots 21 can also be measured by forming the tenth dot 21 at the left end of the second row and forming it again.
[0049]
As shown in FIG. 9, when a plurality of (three in the figure, first to third heads) droplet discharge heads 13 are mounted on the support member 17 of the droplet discharge device 11, By forming the dot rows 22 in a plurality of rows in this manner, dot deviation detection can be performed more quickly and efficiently. In this case, when forming the dot row 22 on the inspection object 20, each droplet discharge head 13 is moved relative to the inspection object 20, and droplets are discharged from each droplet discharge head 13. Discharge at different timings. As shown in FIG. 10, first, the first droplet discharge head 13 forms the first dot row 22 on the inspection object 20, and then the second droplet discharge head 13. As a result, the second dot row 22 is formed on the inspection object 20, and then the third dot row 22 is formed on the inspection object 20 by the third droplet discharge head 13. In this way, more dots 21 can be arranged within the field of view of the camera 3, and dot displacement detection can be performed for more ejection nozzles 14 with a single image pickup, so that it can be performed quickly and efficiently. Dot shift detection can be performed. Then, as in the case of FIG. 7, the discharge nozzle row 15 of each droplet discharge head 13 is divided into a plurality of blocks, and the dot row 22 is repeatedly formed for each block, so that all discharge of each droplet discharge head 13 is performed. With respect to the nozzle 14, dot deviation detection can be performed.
[0050]
FIG. 11 is a plan view showing a third embodiment of the dot deviation detection device of the present invention, and FIG. 12 is a diagram showing still another configuration example of a dot row formed on a droplet discharge head and an inspection object. Hereinafter, the third embodiment of the dot deviation detection method and the dot deviation detection apparatus of the present invention will be described with reference to these drawings. However, the difference from the above-described embodiment will be mainly described, and the same matters will be described. The description is omitted.
[0051]
In addition to the work table 12 of the droplet discharge device 11, the dot deviation detection device 1 </ b> B shown in FIG. 11 separately provides an inspection table 2 that holds the inspection object 20 in which the dot row 22 is formed by the droplet discharge device 11. It is a thing. In this case, the Y-axis direction moving means 8 is provided on both the work table 12 and the inspection table 2, and can move independently in the Y-axis direction.
[0052]
In the dot deviation detection apparatus 1B shown in this embodiment, the inspection object 20 is held on the work table 12 and the dot row 22 is formed by the droplet discharge head 13, and then the inspection object 20 is placed on the inspection table 2. Instead, the image is picked up by the camera 3 and the dot deviation is detected. Alternatively, the dot row 22 may be formed by the droplet discharge head 13 while the inspection object 20 is held on the inspection table 2 from the beginning. The method for detecting dot deviation is the same as described above.
In this embodiment, since the work table 12 and the inspection table 2 are separated from each other, the production of the product and the detection of the dot deviation can be performed in parallel, and the production is performed while the dot deviation is detected. Since it is not necessary to stop the operation, the production efficiency can be improved.
[0053]
In the dot shift detection device 1B, the droplet discharge head 13 is installed in such a posture that the direction of the discharge nozzle row 15 is inclined with respect to the X-axis direction. When the dot row 22 is formed using such a droplet discharge head 13, the following may be performed. While moving the droplet discharge head 13 in the Y-axis direction relative to the inspection object 20, the droplet discharge timing from each discharge nozzle 14 is shifted to form a dot row 22 as shown in FIG. To do. That is, the first dot row 22 is formed on the inspection object 20 by the odd-numbered discharge nozzles 14, and the second dot row 22 is formed on the inspection object 20 by the even-numbered discharge nozzles 14. To do. In this way, more dots 21 can be arranged in the field of view of the camera 3, and dot displacement detection can be performed for a larger number of ejection nozzles 14 with a single image pickup. It is possible to detect dot displacement.
[0054]
In the above case, as shown in FIG. 12, when the inclination angle of the discharge nozzle row 15 with respect to the X-axis direction is θ and the arrangement interval of the discharge nozzles 14 is S, the normal value of the dot interval is 2S cos θ. Further, the dot deviation detection device 1B is not limited to the above method, and the droplets are ejected from the respective ejection nozzles 14 while the droplet ejection head 13 is stopped relative to the object to be inspected 20. Row 22 may be formed.
[0055]
FIG. 13 is a plan view showing a fourth embodiment of the dot deviation detection device of the present invention, and FIG. 14 is a side view showing an inspection table in the dot deviation detection device shown in FIG. Hereinafter, the fourth embodiment of the dot deviation detection method and the dot deviation detection apparatus of the present invention will be described with reference to these drawings. However, differences from the above-described embodiment will be mainly described, and similar matters will be described. The description is omitted.
[0056]
In the dot deviation detection device 1C shown in these drawings, the inspection table 2 is fixedly installed on the base. As shown in FIG. 14, the dot shift detection device 1 </ b> C includes a first roller 18 a that unwinds a long inspection object 20 (for example, roll paper) wound in a roll shape onto an inspection table, and an inspection. It has the 2nd roller 18b which winds up the to-be-inspected object 20 which passed on the table 2, and the motor 19 which rotationally drives the 2nd roller 18b. Thereby, when the motor 19 is driven, the inspection object 20 can be moved in the Y-axis direction on the inspection table 2 via the first roller 18a and the second roller 18b.
[0057]
In such a dot deviation detection apparatus 1C, the X-axis direction moving means 7 is operated to move the droplet discharge head 13 above the inspection table 2, and the dot row 22 is formed on the inspection object 20, and then By moving the camera 3 above the dot row 22 and picking up an image, dot deviation is detected. In this embodiment, since the long thing wound by roll shape around the to-be-inspected object 20 is used, the replacement cycle of the to-be-inspected object 20 can be lengthened. The dot shift detection device 1C is the same as the dot shift detection device 1B except for the points described above.
[Brief description of the drawings]
FIG. 1 is a schematic plan view of a dot deviation detection device according to a first embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view taken along line AA in FIG.
FIG. 3 is a block diagram of the dot deviation detection device shown in FIG. 1;
FIG. 4 is a bottom view showing a nozzle surface of a droplet discharge head.
FIG. 5 is a plan view showing a configuration example of a dot row formed on an inspection object.
FIG. 6 is a schematic plan view showing a modification of the head of the droplet discharge device.
FIG. 7 is a plan view showing another configuration example of a dot row formed on an inspection object.
FIG. 8 is a plan view showing a second embodiment of the dot shift detection device of the present invention.
FIG. 9 is a bottom view showing another configuration example of a droplet discharge head mounted on a droplet discharge device.
FIG. 10 is a plan view showing still another configuration example of a dot row formed on an inspection object.
FIG. 11 is a plan view showing a third embodiment of the dot misalignment detection apparatus of the present invention.
FIG. 12 is a diagram showing still another configuration example of a dot row formed on a droplet discharge head and an inspection object.
FIG. 13 is a plan view showing a fourth embodiment of the dot deviation detection device of the present invention.
14 is a side view showing an inspection table in the dot shift detection device shown in FIG. 13;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 1A, 1B, 1C ...... Dot shift detection device 2 ... Inspection table 2a ... Holding surface 3 ... Camera 4 ... Moving means 5 ... Support plate 6 ... Z-axis direction moving means 7 ... X-axis Direction moving means 8... Y-axis direction moving means 10... Control means 101... CPU 102... Storage section 11 .. Droplet discharge device 12 .. Worktable 13 ... Droplet discharge head 14. …… Discharge nozzle row 17 …… Support member 18a …… First roller 18b …… Second roller 19 …… Motor 20 …… Inspection object 21 …… Dot 22 …… Dot row 23 …… Image processing means 231 …… Storage unit 24 …… Display 25 …… External storage device

Claims (14)

A dot deviation detection method for detecting a positional deviation of dots obtained by a droplet ejected from an ejection nozzle of a droplet ejection head landing on an inspection object,
An electronic image of a plurality of dots formed side by side on the object to be inspected is imaged, the interval between adjacent dots is measured by image processing of the electronic image, and the measured value is compared with a normal value. A method for detecting dot misalignment, comprising detecting a misregistration. The dot shift detection method according to claim 1, wherein the electronic image is further processed to obtain information on the area of each dot. 3. The dot deviation detection method according to claim 1, wherein each dot is formed by ejecting a droplet from each of the ejection nozzles in a state where the droplet ejection head is stopped relative to the inspection object. The dot deviation detection method according to claim 1, wherein each dot is formed by ejecting a droplet from each of the ejection nozzles while moving the droplet ejection head relative to the object to be inspected. The dot deviation detection method according to claim 4, wherein dots are formed in a plurality of rows on the inspection object. A dot deviation detection device for detecting a positional deviation of dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the object to be inspected,
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
And a dot deviation detecting device comprising: output means for outputting information obtained by the image processing means. A dot deviation detection device for detecting a positional deviation of dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the object to be inspected,
An inspection table for holding the inspection object;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Moving means for moving the camera relative to the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
And a dot deviation detecting device comprising: output means for outputting information obtained by the image processing means. A dot deviation detection device for detecting a positional deviation of dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the object to be inspected,
A work table for holding a work and the inspection object;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward an object held on the work table;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object;
Moving means for moving the droplet discharge head and the camera relative to the work table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
And a dot deviation detecting device comprising: output means for outputting information obtained by the image processing means. A dot deviation detection device for detecting a positional deviation of dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the object to be inspected,
A work table for holding a work and the inspection object;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward an object held on the work table;
An inspection table for holding the object to be inspected when performing dot deviation detection;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object held on the inspection table;
Moving means for moving the droplet discharge head relative to the work table in a horizontal direction and moving the camera relative to the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
And a dot deviation detecting device comprising: output means for outputting information obtained by the image processing means. A dot deviation detection device for detecting a positional deviation of dots obtained by the droplets ejected from the ejection nozzle of the droplet ejection head landing on the object to be inspected,
A work table that holds the work,
An inspection table;
A first roller for unwinding a long inspection object wound in a roll shape onto the inspection table;
A second roller for winding the inspection object that has passed over the inspection table;
A droplet discharge head having a plurality of discharge nozzles for discharging droplets toward the workpiece and the inspection object;
A camera that captures an electronic image of a plurality of dots formed side by side on the inspection object positioned on the inspection table;
Moving means for relatively moving the droplet discharge head and the work table in a horizontal direction, and relatively moving the camera and the inspection table in a horizontal direction;
Control means for controlling the operation of the moving means;
Image processing means for measuring an interval between adjacent dots by image processing the electronic image;
And a dot deviation detecting device comprising: output means for outputting information obtained by the image processing means. The dot shift detection device according to claim 7, wherein the droplet discharge head has at least one discharge nozzle row in which a plurality of discharge nozzles are arranged. The moving means includes an X-axis direction moving means for moving in one horizontal direction (hereinafter referred to as “X-axis direction”), and a direction perpendicular to the X-axis direction (hereinafter referred to as “Y-axis direction”). The dot shift detection device according to claim 7, further comprising a Y-axis direction moving unit that moves the dot shift detection device. The droplet discharge head has at least one discharge nozzle row in which a plurality of discharge nozzles are arranged, and the discharge nozzle row is inclined with respect to the X-axis direction or the Y-axis direction. Dot shift detection device. The dot shift detection device according to claim 6, wherein the image processing unit further obtains information regarding the area of each dot by performing image processing on the electronic image.

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