TWI334473B - Decomposing burner for inflammability material - Google Patents
Decomposing burner for inflammability material Download PDFInfo
- Publication number
- TWI334473B TWI334473B TW96125392A TW96125392A TWI334473B TW I334473 B TWI334473 B TW I334473B TW 96125392 A TW96125392 A TW 96125392A TW 96125392 A TW96125392 A TW 96125392A TW I334473 B TWI334473 B TW I334473B
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- exhaust gas
- process exhaust
- combustion
- decomposition
- flame retardant
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
Description
1334473 24874pif 九、發明說明： 【發明所屬之技術領域】 本發明疋關於一種難燃性物質分解燃燒器， 於-種適合將半導體製造工程、液晶製造工程、太= 製？工程或廢棄變壓器内的氣體處理工程等所排出的；程 排氣中包含的，作為成臈原料的石夕烧系物質（Si^、& 、1334473 24874pif IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a flame retardant decomposition burner, which is suitable for semiconductor manufacturing engineering, liquid crystal manufacturing engineering, and too? Exhausted from the gas treatment project in the project or the waste transformer; the material contained in the exhaust gas, which is used as a raw material for the sputum (Si^, &
TEOS(Si(OCH5)4)、邮4等)及淨化絲刻中所使2 6、 碳系的難分解性物質(邙4、sf6、c2f6、c3f8、c4Fs、 ^等），_高效率地進行燃燒分解之難燃性物質分解3燃 【先前技術】 在從半導體製造工程、液晶製造工程、太陽電 工私或廢棄變内的氣體處理I程等所排出 ^含有較多麵的有害㈣。為了對這财害物^ ^ =化處理隨㈣大氣中，提財各種各樣的排氣處理TEOS (Si(OCH5)4), E-mail 4, etc.) and carbon-based hard-to-decompose substances (邙4, sf6, c2f6, c3f8, c4Fs, ^, etc.), _ efficiently Decomposition of a flame-retardant substance that undergoes combustion decomposition. 3 [Previous technique] It is harmful from a semiconductor process, a liquid crystal manufacturing process, a solar process, or a gas treatment in a waste process. In order to deal with this treasury ^ ^ = treatment with (four) the atmosphere, to finance a variety of exhaust treatment
在專利文獻1 +，記載有—制除有害 其目的是將含有難燃性物質的製程排氣有效地進 二燃k分解處理，在該消除有害物質排氣裝置中，是在上 上下延伸之燃燒筒體-的周側壁上，於上流： =排氣的導人孔，並使心沿著與燃燒龍的中心轴 的面相平行的方向，於下流側配置多個燃燒器，且這 二、燒器是使其燃燒器噴出方向對與燃燒筒體中心軸直交 的面呈傾斜狀’且沿著與燃燒筒體上所假定的假想圓的ς 7 24874pif 致之方向，藉此，使製程排氣在形成高熱的大範圍燃 I區蜮所滯留的時間增長’而促進含有難燃性物質的製程 排氣的熱分解以消除有害物質。 在專利文獻2中記載有一種難燃性物質分解燃燒器 ^其如圖5(a)的平面圖及圖5(b)的剖面圖所示，將燃燒 筒體2的上端利用閉塞壁3進行封閉，且在該閉塞壁3上， 以，燃燒筒體2的中心轴線l相一致的形態而安裝有製程 排氣導入孔40 ’其中，該製程排氣導入孔40喷出含有難 燃物質的製程排氣，另外，在從中心軸線L開始的同心圓 上的位置上安裝有多個燃燒器50 ,而且，前述多個燃燒器 50疋以各個喷出火焰f可在燃燒筒體2的中心轴線l上的 大致相同點上進行收束的形態，而使軸線向下流側傾斜地 哭燃性物質分解職器iq中，藉由使多個燃燒 的燃燒區域S。^且，在火·束的_上形成高溫 排氣確實地通獅區域^來自製㈣轉人孔40的製程 燃燒分解處理可有效’/斤以，排氣中的難燃性物質的 CF4或SF6,也可得卜V’即使為燃燒分解溫度高的 〔專利文獻^解率。 165422號公報 日本專利早期公開之特開2001 - 〔專利文獻2 ί a 202108號公報 日本專利早期公開之特開2003- 1334473 24874pif 製程::明如t導體製造，排出的 解燃燒器進行燃燒分的物質分 上述難婵性物暂八妒秘之貝驗，但在該過程中發現， 壁3上，安裳用：噴C用-種在燃燒室上部的閉塞 氣導入孔4。和多個續的製程排氣伽Patent Document 1+ describes that the purpose of removing harmful substances is to efficiently process a process exhaust gas containing a flame retardant substance into a second-burning k-decomposition process, and in the exhausting device for eliminating harmful substances, it is extended up and down. On the circumferential side wall of the combustion cylinder - in the upper flow: = the exhaust hole of the exhaust gas, and the heart is arranged in a direction parallel to the plane of the central axis of the combustion dragon, and a plurality of burners are arranged on the downstream side, and The burner is such that its burner discharge direction is inclined to the surface orthogonal to the central axis of the combustion cylinder and along the direction of the imaginary circle assumed by the combustion cylinder, ς 7 24874pif, thereby making the process row The time during which the gas stays in the large-scale combustion zone where high heat is formed increases, and the thermal decomposition of the process exhaust gas containing the flame retardant substance is promoted to eliminate harmful substances. Patent Document 2 describes a flame-retardant substance decomposing burner which is closed by the closing wall 3 as shown in the plan view of Fig. 5(a) and the cross-sectional view of Fig. 5(b). On the occluding wall 3, a process exhaust gas introduction hole 40' in which the process exhaust gas introduction hole 40 is sprayed is contained in a state in which the central axis l of the combustion cylinder 2 is aligned with each other. The process exhaust gas is additionally provided with a plurality of burners 50 at a position on a concentric circle starting from the central axis L, and the plurality of burners 50 are each at the center of the combustion cylinder 2 with each of the discharge flames f At a substantially identical point on the axis l, a form of converging is performed, and a plurality of burning combustion regions S are formed in the deciphering material decomposing unit iq in which the axis is inclined downward. ^And, the formation of high-temperature exhaust gas on the fire _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ SF6, can also be obtained, even if the combustion decomposition temperature is high [patent document resolution rate]. Japanese Laid-Open Patent Publication No. 165422 (Patent Document No. JP-A No. 202108) Japanese Patent Laid-Open Publication No. 2003- 1334473 24874pif Process: Manufactured as a t-conductor, and discharged by a de-burner The substance is divided into the above-mentioned difficult substances, but in the process, it is found that on the wall 3, the Anshang uses: the spray C uses the occluded gas introduction hole 4 in the upper part of the combustion chamber. And multiple continuous process exhausts
物質處理二:二=，當_^ 衣矛王排虱含有較多的SiH4、Si,H,、 TEOS^CXy^M SiF4這樣的魏杨㈣，在妙燒哭 M)的附近’作為燃燒生成物，容易生成峨的粉體= ，）。以種健的形成容|在職筒體雜燒_端部上附 著堆積’有可能在製程排氣導人孔40或錢n 5〇中引起 粉體堵塞等。如產生粉體堵塞等，則會對來自燃燒器5〇 的燃料供給帶轉畅使峨狀態惡化，在最差的情況下Substance treatment 2: two =, when _^ 矛 王 虱 虱 虱 虱 虱 虱 虱 虱 虱 虱 Si Si 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏 魏Things, easy to produce 峨 powder =,). The formation of the seed is healthy. The in-service cylinder miscellaneous _ is attached to the end. It is possible to cause powder blockage in the process exhaust guide hole 40 or money n 5〇. If powder clogging occurs, the fuel supply belt from the burner 5〇 will be smoothed to deteriorate the enthalpy state, in the worst case.
有可能導致失火，所以必須避免產生這種問題。而且，還 要考慮到在製程排氣孔4〇内也會形成作為燃燒生成物的 粉體並結塊。 在半導體製造工程或液晶製造工程中所使用的製程氣 體的置’與基板尺寸的大小大致成比例。近年來，在半導 體製造領域，晶圓尺寸正在從200mm向300mm過渡，而 且，在液晶製造領域，基板玻璃尺寸正在從第5代向第6 代’從第6代向第7代過渡。隨之，所使用的製程氣體的 量顯著增加，當然所使用的石夕炫系物質的量也增加，且作 9 ^4874pif 為其燃燒生成物的Si〇2，粉體(矽石粉）的排出旦也掸力 因此，有效地避免因前述Si〇2的粉體(矽石粉產产 礙’就成為難燃性物質分解燃燒器的一大課題。 早 本發明者們還發現’當應處理的製程排氣量增少時， 從1個製程排氣導入孔40被送入到燃燒室内的排氣的 流速增大，使製程排氣像被推開那樣而通過所收束的火 焰’所以燃燒分解效率下降。 專利文獻1所記述的消除有害物質排氣裳置，採用一 種在燃燒筒體的周侧壁上配置燃燒器的構成；^能夠=某種 程度上抑制Si〇2那種燃燒生成物分散而侵入到燃燒器内 的問題。而且，採用一種在上流側配置製程排氣的導入孔， 並在下流側配置燃燒器的構成，所以能夠充分地確保製程 排氣導入孔和燃燒火焰的距離，可使製程排氣 ，形成低溫區域，因此可期待能夠在某種程度上避免於製 程排氣導入孔内及其附近產生燃燒生成物的問題。 ^但是，在專利文獻1所記述之形狀的消除有害物質排 氣裝置中，製程排氣導入孔是使其軸心配置在愈辦燒筒@ 財心轴直交的面相平行的方向上，當在製程排氣 初就含有Si〇2這種粉體的情況下，或在製程排氣導入孔内 產生燃燒生成物的情況下，有可能在孔内滯留而結塊，形 成防礙衣粒排氣流動的要因。如前所述，在所使用的製程 排氣的量呈顯著增加傾向的狀況下，所排出的製程排氣中 從最初就含有Si〇2這種粉體的情況正在增多，而充分地產 生粉體在製程排氣導入孔内的滞留。 24874pif 另外，與專利文獻2所示那樣，將製程排氣導入孔安 裝在與燃燒筒體的中心軸線相—致的方向上之情況相比， 當使製程排氣導人孔配置在與燃燒筒體的巾心轴直交的面 相平仃的方向上時，因為燃燒火焰的形狀混亂，高溫區域 生成又到限制的理由，而使燃燒分解處理效率下降。 ^另外在專利文獻1所記述之形狀的消除有害物質排 氣裝置中’燃燒火焰的噴出方向為與燃燒筒體上所 的假想圓_線相—致之方向，不存在多個火焰收束於一 ^的^ ’所_以充分地形成高溫的輯分解處理區 V ^、3有CF4、SF6、NF3等鹵化碳系難燃性物質的製程 排氣，無法得到充分的處理效率。 【發明内容】 ^明的目的是提供—種#於上述問題而形成的被進 改，的難燃性物質分解燃燒器，其即使對含有狐、 j>2二JS、ST4等那樣因燃燒分解而生成粉體(Si〇2等） 物質及CF4、叭、吨等齒化碳系難燃性物質的 衣^ ^確保聽燒分解處賴率，且可不使處理 效率下降而連續運轉。 ㈣^本，明的難燃性物質分解燃燒器為—種至少包括 燃燒器和多個製程排氣導入孔，且各燃燒 :燁性：2 Γ導入5都被安裝在燃燒筒體的周侧壁上之 燒哭、解燃，器’其中，燃燒筒體是-端封閉’燃 八二陳麻::燒同體内形成火焰，製程排氣導入孔是將 3、，”、、’、的製程排氣導人到燃燒筒體内；其特徵在 1334473 24S74pif A .別逃夕调燃現器是以各個噴 心轴線上的大致相同點上進行收束^ ’.··、燒筒體的中 流側傾斜地被安裝在燃燒筒體的周側壁：:下 排氣導入孔是以其軸線的延長線在前述：：二個製程 的上流側，於燃燒筒體的中心 、的收束區 軸線向下流侧傾斜地被安 們安裝在燃燒筒體的上邱p气宝 土上與將匕 解燃燒器相比•燒態的難燃性物質分 生堵塞障礙的程度；、。秘的“而使孔部或燃燒器產 在喷排氣導入孔由於是以其軸線的延長線 ==:=:側而=筒體的中，線上 ㈣的周側壁上’所以與製程排氣導入孔使其軸 酉^之^燒筒體的中心轴直交的面相平行的方向而進行 μ的難燃性物質分解燃燒器相比，能夠有效地阻 生的粉體在孔部内滯留而結塊。而且，利用該構造， t確保所需的火焰與製程排氣導入孔出口的距離，能夠 效地、防止A在製程排氣導入孔的出口附近產生燃燒生成物 友夕，私等）等。藉此，能夠有效地阻止因粉體而使製程排 乳導入孔及燃燒器產生流路障礙等。 另外由於製程排氣導入孔是使其軸線向下流侧傾斜 12 24874pif 24874pif 而安裝在錄筒體的周側壁上，朗孔部出口的斷面積依 據所傾斜的角度而橢圓狀地增大，結果可使氣體緩 地下降而順利地將製程職導人義燒筒體内。因此: 夠減少對燃燒火焰形狀變化所產生的影響。 為了進一步增大該效果，製程排氣導入孔也可採用_ 種具有其斷面積隨著向職筒體_出口部靠近而 大的部分之構成。藉此，能夠更加有效地阻止在製程^ 導入孔中產生因粉體所導致的流路障礙等。 ；； 在利用本發明的難燃性物質分解燃燒器中，多個 器以各個喷出火焰可在燃燒筒體的巾心軸線上的大致相^ 點上進行收束之形態’使軸線向下流侧傾斜，並如前述 樣安，在燃燒筒體的周㈣上，而在火焰收束的區域 形成咼溫的燃燒區域。而且，製程排氣是從所設置的 製程排氣導人孔被導人到職筒體内，所以可不使流速姆 大地朝向該高溫的燃燒區域，並從其上方侵入。』 混入到製程排氣中的SiH4、Si2H6、TE0S、石夕燒^ 物質及CF4、SF6、NF3等函化碳系難燃性物質的姆燒:鯉 兩效地進行。另外，多個製程排氣導人孔是以在燃燒筒^ 的中心軸線上的大致相同點上相交的形態，而使軸線向 ，側傾斜地進行配置，所以如前述那樣，可不使初速度姆 、且不使燃燒火焰產生大的混亂地進行侵入，從、士田 來看，也可使含有㈣碳系難燃性物質的I魏 燃燒分解效率。而且，祕也可消除製程排氣沿著= 體的壁面區域，亦即經由燃燒室的低溫區域而訂的= 1334473 24874pif 象，所以由此也可阻止燃燒分解效率的下降。 在利用本發明的難燃性物質分解燃燒器中，各燃燒器 及各製程排氣導入孔的軸線的傾斜角度，對燃燒筒體的; 心軸線在15度〜60度的範圍内較佳。在本發明者們的實 驗中，各燃燒器的軸線的傾斜角度在3〇度前後較佳，各& 程排氣導入孔的軸線的傾斜角度在45度前後較佳。藉由像 這樣選擇減’可得到更高的燃燒分解效率。如燃^器的 傾斜角度大於60度，則使製程排氣導入孔的附近高溫化而 促進Si〇2的生成，所以不佳，如傾斜角度小於15度，則 火焰過於接近燃燒筒體内面，容易產生燃燒筒體的熱損 傷’所以不佳。而且，如各製程排氣導人孔的軸線的傾斜 角度小於15度左右，則火焰上方的空間變得過大，使難燃 性物質分解燃燒器徒然地變長，所以不佳。而且，如大於； 60度，則從各製程排氣導入孔所進入的製程排氣形成乳 流，所以不佳。 在利用本發明的難燃性物質分解燃燒器中，為了容易 維護，各燃燒器可從燃燒框體上自如裝卸較佳。使燃燒器 自如裝卸的方法，考慮有在例如燃燒框體側設置鞘管部， 並在’、中插入燃燒杰主體，且利用夾板型接頭等不使用工 具即可裝卸的接頭而進行安裝之方法等。 <在^^用本發明的難燃性物質分解燃燒器中，較佳是還 設置沿著燃燒筒體的内壁面進行轉動的到刀(scraper)。夢 t在利，燃燒分解而由石夕炫系物質生成Si02(石夕石粉)的 情況下，可在域筒體的㈣上所附著的作為燃燒生 14 1334473 24874pif 成物的粉體，能夠阻止難燃 降。在利用本發明的難燃性物質分質刀^燒器的性能下 燃燒筒體的上端側進行封閉的 而、^中，可利用將 而且，從難燃性物質分解燃 而麵鬆地安裝刮刀， 在從燃燒火焰軸的位置上，^、、構成上來看，蓋構件處 驅動機構等因熱而受到損傷。有效地避免刮刀的 在維護時打開莒欉株而m他咕 盍構件也可輕量化， 容易。 構件而對燃燒筒體的内部進行維修等變得 在利用本發明的難燃性物 沿著燃燒筒體的内_卜w ώ,燒$中，較佳是像 筒，並使所構成的内 ==構成_筒:能=常== 燒面：:abl;)=耐— 县备入&。π B ' 了謀未難燃性物質分解燃燒器的 等^、兄下m耐熱性金屬所構成的内筒受到熱損傷 下’可藉由只更換内筒’而再 ==吏用二筒的材質為一或鉻錄鐵合金Ϊ 耐熱性金屬，或者氮切或碳化料喊較佳。 =用本發明的難燃性物質分解燃燒器，具有多個製程 孔，即使在對並列設置的多個製造或處理裝置所 排出的衣程排氣’或者一台具有多室的製造或處理裝置每 -室所排出的製程排氣同時進行處理的情況下，藉由只設 置該製造或處理裝置或者室部的數目的製賴氣導入孔， 也可阻止在燃燒筒體的上流產生製程排氣之間的合流，所 15 1334473 24874pif 以也能夠排除因製程排氣的混合所導致的危險性。 在利用本發明的難燃性物質分解燃燒器中，對其應處 理的製程排氣並無特別的限制，但在製程排氣為從半導體 製造工程、液晶製造工程、太陽電池製造工程或廢棄變壓 器内的氣體處理工程所排出的，含有SiH4、Si2H6、TEOS 或SiF4這樣的矽烷系物質及CF4、SF6、NF3這樣的i|化碳 系難燃性物質之製程排氣的情況下，利用本發明的難燃性 物質分解燃燒器可特別有效地發揮機能。 如利用本發明的難燃性物質分解燃燒器，則對從半導 體製造工程、液晶製造工程、太陽電池製造工程或廢棄變 壓器内的氣體處理工程等所排出的，含有SiH4、Si2H6、 TEOS、SiF4等這樣的因燃燒分解而生成粉體(Si02等）的矽 烷系物質，並同時含有CF4、SF6、NF3等這樣的鹵化碳系 難燃性物質之製程排氣，可在高燃燒分解效率的基礎上進 行無害化處理。而且，可不使處理效率下降而連續長時間 運轉。 【實施方式】 以下，對利用本發明的難燃性物質分解燃燒器的一形 態，參照圖示進行說明。圖1所示為難燃性物質分解燃燒 器1的一個例子，圖1(a)為平面圖，圖1(b)為利用圖1⑻ 的b-b線的剖面圖。圖2為用於說明本發明的難燃性物質 分解燃燒器的火焰的形成與製程排氣的導入位置之模式 圖。 燃燒器1包括圓筒形的燃燒筒體2和將該燃燒筒體2 16 24874pif 的一端進行封閉的蓋構件3 ^在該例子中，燃燒筒體2是 由筒主體21、外筒22和内筒23構成，其中，筒主體21 疋由不定形耐火材料構成，外筒22是由耐熱性金屬製作， 用於從外側覆蓋筒主體，内筒23是由SUS310S或鉻鎳鐵 合金這樣的耐熱性金屬製作。内筒23是沿筒主體21的内 壁配置 —i，敉佳疋在内筒23和筒主體21的内壁面之間僅形 成間隙24。而且，較佳是内筒23以可從筒主體21上輕鬆 地進行裝卸的狀態’而利用適當的裝置安裝在筒主體21 上燃燒间體2的下方侧開放端是與習知的這種燃燒器同 樣地’通過適當的管路與吸引鼓風機(blower)相連接，或與 水洗膝器（scrubber)等相連接。 在燃燒筒體2的上端形成有適當的内凸緣25，且在該 定螺栓31等裝置，爾地繼前： 士 在盍構件3的中央形成有貫通孔32，可在維i 日寸或後述的刮刀7〇的安I 維凌 33進行封閉。 〕女裝¥加以·。通常是利用蓋部 在燃燒筒體2上，多個姆燒哭 自如地安#。户闰-丨叫，·、& 5ϋ相距專間隔被裝卸 的門:在圖不的例子中，3個燃燒器50是以12〇产 的間隔進行钱，但實 =120度 器50以其轴ώ要有2個以上即可。各燃燒It is possible to cause a fire, so this problem must be avoided. Further, it is also considered that a powder as a combustion product is also formed in the process vent hole 4〇 and agglomerated. The process gas used in semiconductor manufacturing engineering or liquid crystal fabrication engineering is approximately proportional to the size of the substrate. In recent years, in the field of semiconductor manufacturing, the wafer size is shifting from 200 mm to 300 mm, and in the field of liquid crystal manufacturing, the substrate glass size is shifting from the 5th generation to the 6th generation from the 6th generation to the 7th generation. Along with this, the amount of process gas used is remarkably increased, and of course, the amount of Shi Xi Xuan-like substance used is also increased, and 9 ^ 4874 pif is used for the discharge of Si 〇 2 and powder ( whetstone powder). Therefore, it is also effective to avoid the powder of the above-mentioned Si〇2 (the problem of the production of vermiculite powder becomes a major problem of the decomposition of the burner of the flame retardant substance. The inventors also found that 'when it should be processed When the process exhaust amount is increased, the flow rate of the exhaust gas sent into the combustion chamber from one process exhaust gas introduction hole 40 is increased, and the process exhaust image is pushed away and passes through the collected flame 'so that it burns The decomposing efficiency is reduced. The exhausting device for eliminating harmful substances described in Patent Document 1 adopts a configuration in which a burner is disposed on the circumferential side wall of the combustion cylinder; ^ can be suppressed to some extent to the combustion generation of Si〇2 The problem that the material is dispersed and intruded into the burner. Further, since the introduction hole of the process exhaust gas is disposed on the upstream side and the burner is disposed on the downstream side, the process exhaust gas introduction hole and the combustion flame can be sufficiently ensured. Distance Since the process is exhausted to form a low-temperature region, it is expected that the problem of generating a combustion product in and around the process exhaust gas introduction hole can be avoided to some extent. However, the elimination of the shape described in Patent Document 1 is harmful. In the material exhausting device, the process exhaust gas introduction hole is arranged such that its axial center is arranged in a direction parallel to the surface of the intersection of the shaft and the fiscal axis, and the powder of Si〇2 is contained at the beginning of the process exhaust. In the case where the combustion product is generated in the process exhaust gas introduction hole, there is a possibility that the hole stays in the hole and agglomerates, thereby forming a factor that hinders the flow of the granule exhaust gas. As described above, in the process used. In the case where the amount of exhaust gas tends to increase remarkably, the amount of the powder containing Si〇2 from the beginning of the discharged process exhaust gas is increasing, and the retention of the powder in the process exhaust gas introduction hole is sufficiently generated. 24874pif Further, as shown in Patent Document 2, when the process exhaust gas introduction hole is installed in a direction parallel to the central axis of the combustion cylinder, when the process exhaust gas guide hole is disposed and burned Cylinder When the surface in which the mandrel is perpendicular to the surface of the mandrel is in a flat direction, the shape of the combustion flame is disturbed, and the generation of the high-temperature region is limited again, and the efficiency of the combustion decomposition treatment is lowered. ^In addition, the elimination of the shape described in Patent Document 1 is harmful. In the material exhaust device, the direction in which the combustion flame is ejected is in the direction of the imaginary circle _ line on the combustion cylinder, and there is no plurality of flames converging in a ^' to sufficiently form a high temperature. In the decomposition treatment zones V^ and 3, there are process exhaust gases of halogenated carbon-based flame retardants such as CF4, SF6, and NF3, and sufficient processing efficiency cannot be obtained. [Invention] The purpose of the invention is to provide the above-mentioned problems. The flame-retardant substance decomposition burner that has been modified to form a powder (such as Si〇2) and CF4, which are decomposed by combustion, such as fox, j>2, JS, and ST4. The clothes of the refractory carbon-based flame retardant substance ensure the rate of the burn-off decomposition, and can be continuously operated without deteriorating the treatment efficiency. (4) The present and the flame-retardant substance decomposition burners are at least a burner and a plurality of process exhaust gas introduction holes, and each combustion: 烨: 2 Γ introduction 5 is installed on the circumferential side of the combustion cylinder On the wall, the burning and de-burning, the device 'where the burning cylinder is - end closed' burning eight two Chen Ma:: burning with the body to form a flame, the process exhaust gas introduction hole is 3,,,,,, The process exhaust is guided into the combustion cylinder; its characteristics are in 1334473 24S74pif A. The escape is performed at the same point on each axis of the spray core ^ '.··, the body The middle flow side is installed obliquely on the peripheral side wall of the combustion cylinder: the lower exhaust gas introduction hole is an extension line of its axis in the aforementioned:: the upstream side of the two processes, at the center of the combustion cylinder, the converging area axis The downward flow side is inclined to be installed on the upper Qiu p gas of the combustion cylinder, and the degree of clogging of the flame retardant substance in the burnt state is compared with that of the smelting burner; The hole or the burner is produced in the exhaust gas introduction hole because the extension line of its axis ==:=: side = the cylinder In the middle of the line (four), on the side wall of the circumference, it is compared with the flame-retardant substance-decomposing burner in which the process is performed in a direction parallel to the surface in which the axis of the cylinder is perpendicular to the axis of the cylinder. The powder that can be effectively blocked is retained in the pore portion to agglomerate. Further, with this configuration, t ensures the distance between the required flame and the outlet of the process exhaust gas introduction hole, and effectively prevents A from generating combustion products near the outlet of the process exhaust gas introduction hole, and the like. Thereby, it is possible to effectively prevent the flow path of the process milk introduction hole and the burner from being caused by the powder. In addition, since the process exhaust gas introduction hole is installed on the circumferential side wall of the cylinder body by tilting the axis downwardly from the flow side 12 24874pif 24874pif, the sectional area of the outlet of the flange portion is increased elliptically according to the inclined angle, and the result is The gas is slowly lowered and the process is guided to the inside of the furnace. Therefore: It is enough to reduce the impact on the shape of the combustion flame. In order to further increase the effect, the process exhaust gas introduction hole may be configured to have a portion whose sectional area is large as the service cylinder_outlet portion approaches. Thereby, it is possible to more effectively prevent the occurrence of a flow path disorder or the like due to the powder in the process introduction hole. In the flame-retardant decomposition burner of the present invention, the plurality of devices are configured such that each of the ejected flames can be converged at substantially the same point on the axis of the core of the combustion cylinder to cause the axis to flow downward. The side is inclined, and as described above, on the circumference (four) of the combustion cylinder, and in the region where the flame is converged, a warm combustion zone is formed. Further, the process exhaust gas is guided from the set process exhaust gas guiding hole into the cylinder body, so that the flow rate can be prevented from entering the high-temperature combustion region and invading from above. The SiH4, Si2H6, TE0S, Shixi burning materials and the functionalized carbon-based flame retardant substances such as CF4, SF6, and NF3 are mixed into the process exhaust gas. Further, the plurality of process exhaust gas guiding holes are arranged such that they intersect at substantially the same point on the central axis of the combustion tube, and the axial direction and the side are obliquely arranged. Therefore, as described above, the initial velocity may not be In addition, it is possible to invade the combustion flame without causing great confusion, and it is also possible to use I-combustion decomposition efficiency of the (four) carbon-based flame retardant substance. Moreover, the secret can also eliminate the process exhaust gas along the wall area of the body, that is, the low temperature area of the combustion chamber is set to = 1334473 24874pif image, so that the combustion decomposition efficiency can also be prevented from decreasing. In the flame retardant decomposition burner of the present invention, the inclination angle of the axis of each of the burners and the respective process exhaust gas introduction holes is preferably in the range of 15 to 60 degrees with respect to the combustion cylinder; In the experiments of the inventors, the inclination angle of the axis of each burner was preferably around 3 degrees, and the inclination angle of the axis of each & exhaust introduction hole was preferably around 45 degrees. By selecting minus in this way, a higher combustion decomposition efficiency can be obtained. If the inclination angle of the burner is greater than 60 degrees, the temperature of the vicinity of the process exhaust gas introduction hole is increased to promote the formation of Si〇2, so that if the inclination angle is less than 15 degrees, the flame is too close to the inner surface of the combustion cylinder. It is easy to produce thermal damage to the combustion cylinder', so it is not good. Further, if the inclination angle of the axis of the exhaust guide holes of each process is less than about 15 degrees, the space above the flame becomes excessively large, and the flame-retardant substance decomposition burner is vainly elongated, which is not preferable. Further, if it is larger than 60 degrees, the process exhaust gas entering from the exhaust gas introduction holes of each process forms a milk flow, which is not preferable. In the flame retardant decomposition burner of the present invention, it is preferable that each burner can be easily attached and detached from the combustion casing for easy maintenance. In the method of attaching and detaching the burner to the burner, it is conceivable to provide a sheath portion on the side of the combustion casing, and to insert a combustion main body in ', and to mount the joint without using a tool such as a splint joint. Wait. < In the flame retardant decomposition burner of the present invention, it is preferable to provide a scraper that rotates along the inner wall surface of the combustion cylinder. When the dream is in the profit, the combustion is decomposed and the SiO2 (Shihushi powder) is formed by the Shi Xixuan substance, and the powder which can be attached to the (4) of the domain cylinder as the burning product 14 1334473 24874pif can prevent Hard to burn down. In the performance of the flame-retardant substance of the present invention, the upper end side of the combustion cylinder is closed, and the scraper can be used to separate and burn the flame-retardant substance. In the position from the burning flame axis, the driving mechanism at the cover member is damaged by heat. Effectively avoiding the blade. When the maintenance is turned on, the 盍 盍 member can also be lightweight and easy. The inside of the combustion cylinder is repaired by the member, and the flame-retardant material according to the present invention is burned in the inner portion of the combustion cylinder, preferably in the form of a cylinder, and the inside of the cylinder is formed. ==Constituent_Cylinder: can = normal == burnt noodles:: abl;) = resistant - county ready & π B 'There is a non-flammable substance decomposition burner, etc., the inner cylinder made of the m heat-resistant metal is under thermal damage, and can be replaced by only replacing the inner cylinder. It is made of a material such as a chrome-plated iron alloy, a heat-resistant metal, or a nitrogen-cut or carbonized material. = Decomposing the burner with the flame retardant substance of the present invention, having a plurality of process holes, even in the process of exhausting a plurality of manufacturing or processing devices disposed side by side or a multi-chamber manufacturing or processing device In the case where the process exhaust gas discharged from each chamber is simultaneously processed, it is also possible to prevent the process exhaust gas from being generated in the upstream of the combustion cylinder by providing only the manufacturing or processing device or the number of the gas separation holes of the chamber portion. The confluence between the two, 15 1334473 24874pif can also eliminate the danger caused by the mixing of the process exhaust. In the flame retardant decomposition burner using the present invention, there is no particular limitation on the process exhaust gas to be treated, but the process exhaust gas is from semiconductor manufacturing engineering, liquid crystal manufacturing engineering, solar cell manufacturing engineering or waste transformer. In the case of a process gas discharged from a gas treatment project containing SiH4, Si2H6, TEOS or SiF4, and an exhaust gas of an i|carbonized flame retardant such as CF4, SF6 or NF3, the present invention is utilized. The flame retardant decomposition burner can perform functions particularly effectively. When the burner is decomposed by a flame retardant substance of the present invention, SiH4, Si2H6, TEOS, SiF4, etc. are discharged from a semiconductor manufacturing process, a liquid crystal manufacturing process, a solar cell manufacturing process, or a gas processing project in a waste transformer. Such a decane-based substance which generates a powder (SiO 2 or the like) by combustion decomposition and contains a process exhaust gas of a halogenated carbon-based flame retardant such as CF 4 , SF 6 or NF 3 can be based on high combustion decomposition efficiency. Perform harmless treatment. Further, it is possible to continuously operate for a long time without deteriorating the processing efficiency. [Embodiment] Hereinafter, a state in which a flame retardant decomposition burner of the present invention is used will be described with reference to the drawings. Fig. 1 shows an example of a flame retardant decomposition burner 1, Fig. 1(a) is a plan view, and Fig. 1(b) is a cross-sectional view taken along line b-b of Fig. 1(8). Fig. 2 is a schematic view for explaining the formation of a flame of the flame-retardant substance decomposition burner of the present invention and the introduction position of the process exhaust gas. The burner 1 includes a cylindrical combustion cylinder 2 and a cover member 3 that closes one end of the combustion cylinder 2 16 24874pif. In this example, the combustion cylinder 2 is composed of a cylinder main body 21, an outer cylinder 22, and an inner portion. The cylinder 23 is constructed in which the cylinder main body 21 is made of an amorphous refractory material, and the outer cylinder 22 is made of a heat-resistant metal for covering the cylinder main body from the outside, and the inner cylinder 23 is a heat-resistant metal such as SUS310S or Inconel. Production. The inner cylinder 23 is disposed along the inner wall of the cylinder main body 21, i, and only the gap 24 is formed between the inner cylinder 23 and the inner wall surface of the cylinder main body 21. Further, it is preferable that the inner cylinder 23 is attached to the lower end of the combustion chamber 2 on the cylinder main body 21 by a suitable means in a state in which the inner cylinder 23 can be easily attached and detached from the cylinder main body 21, and is conventionally burned. The device is similarly connected to a suction blower through a suitable conduit or to a scrubber or the like. A suitable inner flange 25 is formed at the upper end of the combustion cylinder 2, and in the device such as the fixed bolt 31, a through hole 32 is formed in the center of the cymbal member 3, which can be An I Wei Ling 33 of the scraper 7 后 described later is closed. 〕 Women's ¥ to add. Usually, the cover portion is used on the combustion cylinder 2, and a plurality of smoldering crying freely.闰 闰 丨 丨 · · · · 丨 丨 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : There are two or more axes. Burning
w — 延長線在燃燒筒體2的中心_ T 的大致相同點P1上進时叉的料 二輪線L上 (較佳是15度〜〜、 見疋的角度α 藉此，而如佳是3°度)朝下傾輸 2的中心軸線匕上的大致相同點Pla上進行收體 24874pif …在燃二^域周气’形成高溫的*然燒區域s。 導入孔60 上，還相距等間隔形成有多個製程排氣 ===的例子中，3個製程排氣導入孔6。以分 ^5 ^ " 120 ^ ^ 文衣谷衣％排氧導入孔6〇是以其 的收東區域上流側的位置p2上，於燃燒 的魚声的大致相同點上相交之形態，而以規定 =:形成。製程排氣導入孔-通二:： 來自例如半導體製造裝置等的製程排氣。 燒少的燃燒處理時’是在各燃燒器Μ形成燃 w的狀悲下，而從各製程排氣導入孔6〇將製程排氣 ^入到燃燒筒體2内。各製程魏導人孔6Q朝下以角度 傾斜，所以即使在製程排氣G中含有si〇2這種粉 體邮況下，粉體也不會滯留在管路61及製賴氣導入孔 60内，而是進入到燃燒筒體2内。 製程排氣G是以利用朝下流側傾斜的姿勢而在燃燒筒 體2的中心軸的大致相_上相交的形態，從各製程排氣 導孔60噴出，所以不會引起大的亂流，並以燃燒筒體2 的中〜軸L為中心進行合流。合流的製程排氣G朝著火焰 f收束的區域上所形成的高溫燃燒區域s，從其上方進行侵 入。藉此，使混入到製程排氣G中的SiH4、％Η6、TE〇st =4等石夕燒系物質及CF4、SF6、NFs等鹵化碳系難燃性物 質的燃燒分解以高效率進行。燃燒分解處理完成後的製程 1334473 24S74pif 排氣G從燃燒筒體2的下端流出。w — The extension line is on the second alignment L of the fork at the substantially same point P1 of the center _ T of the combustion cylinder 2 (preferably 15 degrees ~ ~, see the angle α of the α, thereby, as good as 3 °°) The substantially identical point Pla on the central axis 朝 of the downward tilting 2 is subjected to the receiving body 24874pif ... the burning zone s of the high temperature is formed in the combustion zone. In the introduction hole 60, three process exhaust gas introduction holes 6 are formed in an example in which a plurality of process exhaust gases are formed at equal intervals. In the form of ^5 ^ " 120 ^ ^ 衣衣谷衣% oxygen introduction hole 6 〇 is the shape of the upper part of the upper side of the upper part of the intersection point p2, at the same point of the burning fish sound, and Formed with the rule =:. Process Exhaust Gas Introduction Hole - Pass 2:: Process exhaust gas from, for example, a semiconductor manufacturing facility. When the burning process is low, the combustion is performed in each of the burners, and the process exhaust gas is introduced into the combustion cylinder 2 from the respective process exhaust gas introduction holes 6 . The process guide hole 6Q of each process is inclined at an angle downward, so even if the process exhaust gas G contains the powder of si〇2, the powder does not remain in the pipe 61 and the gas introduction hole 60. Inside, it enters the combustion cylinder 2. The process exhaust gas G is discharged from the respective process exhaust passage holes 60 so as to intersect with each other in the substantially phase of the central axis of the combustion cylinder 2 in a posture inclined toward the downstream side, so that large turbulence does not occur. The joining is performed centering on the middle to the axis L of the combustion cylinder 2. The merged process exhaust gas G invades the high-temperature combustion region s formed on the region where the flame f is converged, from above. As a result, the combustion decomposition of a halogenated material such as SiH4, %Η6, TE〇st=4, and a halogenated carbon-based flame retardant substance such as CF4, SF6 or NFs mixed in the process exhaust gas G is efficiently performed. Process after completion of combustion decomposition treatment 1334473 24S74pif Exhaust gas G flows out from the lower end of the combustion cylinder 2.
在燃燒分解的過程中，生成Si02等這樣的粉體物質。 燃燒生成物的生成主要是在製程排氣導入孔60的下流側 生成’而且’製程排氣導入孔60處於從所形成的火焰f 偏向上流侧的低溫區域，所以不會產生所生成的Si02等形 成塊狀，而使製程排氣導入孔60閉塞的問題。而且，因為 合流的製程排氣G進入形成火焰f的中央部分，而且，製 程排氣G及形成火焰f朝下喷出，所以，生成的si〇2等這 樣的粉體物質被積極地付於朝向下流侧的能量，也可避免 出現所生成的Si〇2等在各燃燒器50的噴出口附近呈塊狀 集結，而閉塞喷出口的問題。因此，可在長時間内，對含 有 SiH4、Si2H6、TEOS、SiF4 等石夕烧系物質及 cf4、SF6、 NF3等鹵化碳系難燃性物質的製程排氣G，在高燃燒分解 效率的基礎上進行無害化處理。In the process of combustion decomposition, a powdery substance such as SiO 2 or the like is formed. The generation of the combustion product is mainly generated on the downstream side of the process exhaust gas introduction hole 60, and the process exhaust gas introduction hole 60 is in a low temperature region from the side of the flame f which is formed upward, so that the generated SiO 2 or the like does not occur. The block shape is formed, and the process exhaust gas introduction hole 60 is closed. Further, since the merged process exhaust gas G enters the central portion where the flame f is formed, and the process exhaust gas G and the formation flame f are discharged downward, the generated powder material such as si〇2 is actively paid. The energy toward the downstream side can also avoid the problem that the generated Si 〇 2 or the like is aggregated in the vicinity of the discharge port of each burner 50 to block the discharge port. Therefore, it is possible to process the exhaust gas G of the process gas containing the SiH4, Si2H6, TEOS, SiF4, etc., and the halogenated carbon-based flame retardant materials such as cf4, SF6, and NF3 over a long period of time. It is harmlessly processed.
圖3所示為本發明的難燃性物質分解燃燒器的另一形 態，相當於圖1(b)。該難燃性物質分解燃燒器la與圖2所 示的難燃性物質分解燃燒器丨的不同點在於有刮刀 7〇。其他的構成相同，並付以相同的符號。刮刀7〇' SUSSIOS或鉻鎳鐵合金這樣的耐熱合金或者氮化石夕或碳化 石夕这樣的陶曼製作’並由轴部7!和到離棒72構成， 軸部71是通過在蓋構件3財麵軸的前述貫通孔 Γ所是與㈣71連接並沿著燃燒筒體2的内壁 „商内筒23的内壁面進行移動 中，袖部71具有手柄73，可藉由操作手柄？3,而使到^ 19 24874pif 24874pifFig. 3 shows another embodiment of the flame retardant decomposition burner of the present invention, which corresponds to Fig. 1(b). The flame-retardant substance decomposition burner 1a differs from the flame-retardant substance decomposition burner 图 shown in Fig. 2 in that a blade 7 is provided. The other components are the same and are given the same symbols. A scraper 7〇's heat-resistant alloy such as SUSSIOS or Inconel or a Taman-like made of nitrite or carbon stone, and consists of a shaft portion 7! and an off-bar 72, and the shaft portion 71 passes through the cover member 3. The through hole of the face shaft is connected to the (four) 71 and moves along the inner wall surface of the inner wall „ of the combustion cylinder 2, and the sleeve 71 has a handle 73 which can be operated by the handle 3 To ^ 19 24874pif 24874pif
剖面圖。該難燃性物質分解^4(b)為沿著圖4(a)的b-b線的 物質分解燃燒器丨的不”點，、:繞器lb與圖丨所示的難燃性 的斷面積隨著向燃燒筒體’2在於，具有製程排氣導入孔60 部分61。其他的構成相同，内的出口部靠近而逐漸擴大之 中，製程排氣導入孔6〇的言並付以相同的符號。在該例子 部分，形成呈喇叭狀逐漸擔网主體21上所形成的貫通孔的 • 成，可使氣體流速緩緩下二大的部分61。藉由採用這種構 燒简體2内，能狗進一步而j填利地將製程排氣導入到燃 狀變化所帶來的影響。^且、小製程排氣對燃燒火焰f的形 排氣導入孔60中產生因粉’能夠更加有效地阻止在製程 在本發明的難燃性物斯八斤迨成的流路堵塞等的問題。 3的構成可簡潔化且輕量化而: 内進行維護時的作二 囉而溫度較低。所以，蓋構件 。因此，還具有使打開蓋構件3 作業變得容易之效果。 • 3的附近因為與燃燒器50 Π解燃燒1卜1a巾，蓋構件 ^ ΛΑ Ϊ V ._ . 刀離而、:恩疫击六你 α .、* .. 【圖式簡單說明】Sectional view. The incombustible substance decomposition ^4(b) is a point of decomposition of the burner 丨 along the bb line of Fig. 4(a), and the non-flammable sectional area shown by the winding device lb and the figure 丨With the combustion cylinder '2, there is a process exhaust gas introduction hole 60 portion 61. The other configuration is the same, the inner outlet portion is gradually enlarged, and the process exhaust gas introduction hole 6 is the same. In this example, the through-hole formed in the trumpet-like gradual net body 21 is formed so that the gas flow rate can be gradually lowered to the second largest portion 61. By using the structure 2, The dog can further introduce the process exhaust gas into the influence of the change of the combustion state. Moreover, the small process exhaust gas can generate the powder due to the shaped exhaust gas introduction hole 60 of the combustion flame f more effectively. The problem of blocking the flow path of the flame retardant in the process of the present invention is prevented. The structure of the third embodiment can be simplified and reduced in weight: the temperature during maintenance is low and the temperature is low. The cover member also has an effect of facilitating the operation of opening the cover member 3. Because nearly 50 Π solution with a burner 1a Bu towel, cover member ^ ΛΑ Ϊ V ._ knife and, from: Phytophthora Well you hit six α, * .. [Brief Description of the drawings]
所示為製程排氣對本 發明的難燃性物質分解燃繞 20 1334473 24874pif 器的喷出火焰之進入狀態的模式圖。 圖3所示為本發明的難燃性物質分解燃燒器之另一形 態的相當於圖1 (b)的圖示。 圖4所示為本發明的難燃性物質分解燃燒器的又一形 態，圖4(a)相當於圖1(b)，圖4(b)為利用圖4(a)的b-b線的 剖面圖。 圖5所示為習知的難燃性物質分解燃燒器，圖5(a)為 平面圖，圖5(b)為利用圖5(a)的b-b線的剖面圖。 ^ 【主要元件符號說明】 1、la、lb :難燃性物質分解燃燒器 2 :圓筒形的燃燒筒體 3 :閉塞壁（蓋構件） 10 :難燃性物質分解燃燒器 21 :由不定形耐火材料所構成的筒主體 22:由耐熱性金屬所製作的外筒 23 :由耐熱性金屬所製作的内筒 • 24 :間隙 25 :内凸緣 31 :固定螺栓 32 :貫通孔 33 :蓋部 . 40:製程排氣導入孔 50 :燃燒器 60 :製程排氣導入孔 21 0 1334473 24874pif 61 :管路 70 :刮刀 71 :軸部 72 :刮離棒 f :喷出火焰 G:製程排氣 L:燃燒筒體的中心轴線 L1 :燃燒器的軸線 L2 :製程排氣導入孔的軸線 S .火焰的南溫區域 α :燃燒器的軸線的傾斜角 石：製程排氣導入孔的轴線的傾斜角 22Shown is a schematic view showing the state in which the process exhaust gas decomposes the flame-retardant substance of the present invention into the blasting flame of the 20 1334473 24874 pif. Fig. 3 is a view corresponding to Fig. 1(b) showing another embodiment of the flame retardant decomposition burner of the present invention. Fig. 4 is a view showing still another embodiment of the flame retardant decomposition burner of the present invention, wherein Fig. 4(a) corresponds to Fig. 1(b), and Fig. 4(b) shows a section taken by the bb line of Fig. 4(a). Figure. Fig. 5 shows a conventional flame retardant decomposition burner, Fig. 5(a) is a plan view, and Fig. 5(b) is a cross-sectional view taken along line b-b of Fig. 5(a). ^ [Main component symbol description] 1. la, lb: flame retardant decomposition burner 2: cylindrical combustion cylinder 3: occlusion wall (cover member) 10: flame retardant decomposition burner 21: no The cylinder main body 22 composed of a shaped refractory material: an outer cylinder 23 made of a heat-resistant metal: an inner cylinder made of a heat-resistant metal • 24: gap 25: inner flange 31: fixing bolt 32: through-hole 33: cover 40. Process exhaust gas introduction hole 50: Burner 60: Process exhaust gas introduction hole 21 0 1334473 24874pif 61 : Line 70: scraper 71: Shaft portion 72: scraping rod f: spray flame G: process exhaust L: the central axis L1 of the combustion cylinder: the axis L2 of the burner: the axis S of the process exhaust introduction hole. The south temperature region of the flame α: the inclination angle of the axis of the burner: the axis of the process exhaust introduction hole Tilt angle 22
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| JP2006213648A JP4987380B2 (en) | 2006-08-04 | 2006-08-04 | Flame retardant decomposition burner |
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| JP2015010800A (en) * | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | Exhaust gas treatment device |
| CN111720839A (en) * | 2020-06-12 | 2020-09-29 | 山东同智创新能源科技股份有限公司 | Environment-friendly multi-stage combustion device applied to waste gas liquid incineration treatment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497726B2 (en) * | 1998-12-01 | 2010-07-07 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP4009501B2 (en) * | 2002-06-25 | 2007-11-14 | 岩谷産業株式会社 | Combustion type vertical abatement system |
| JP4528141B2 (en) * | 2005-01-14 | 2010-08-18 | 東京瓦斯株式会社 | Flame retardant decomposition burner |
-
2006
- 2006-08-04 JP JP2006213648A patent/JP4987380B2/en active Active
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2007
- 2007-06-25 WO PCT/JP2007/062663 patent/WO2008015855A1/en active Application Filing
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4987380B2 (en) | 2012-07-25 |
| TW200819683A (en) | 2008-05-01 |
| WO2008015855A1 (en) | 2008-02-07 |
| JP2008039280A (en) | 2008-02-21 |
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