WO2008015855A1

WO2008015855A1 - Flame retardant material decomposition burner

Info

Publication number: WO2008015855A1
Application number: PCT/JP2007/062663
Authority: WO
Inventors: Atsuko Seo; Satoshi Yamashita; Kenichi Sugihara; Byoung-Sup Park; Heitetsu Kin; Kazuaki Fujimori; Tetsurou Hoshino
Original assignee: Tokyo Gas Co., Ltd.; Tokyo Gas Chemicals Co., Ltd.; Koike Sanso Kogyo Co., Ltd.
Priority date: 2006-08-04
Filing date: 2007-06-25
Publication date: 2008-02-07
Also published as: JP2008039280A; TWI334473B; TW200819683A; JP4987380B2

Abstract

A plurality of combustion burners (50) for forming a flame within a combustion cylinder (2) closed at its one end and a plurality of process exhaust gas introduction port (60)for introducing a process exhaust gas containing a flame retardant material into the combustion cylinder (2) are mounted on the peripheral wall of the combustion cylinder (2) closed at its one end. Each of the combustion burners (50) is mounted in such a manner that an axial line (L1) is inclined toward the downstream side so that spouted flames (f) converge at a substantially identical point (P1a) on a central axial line (L) in the combustion cylinder (2). Each processexhaust gas introduction port (60) is mounted in such a manner that an axial line (L2) is inclined toward the downstream side so that extension lines of axial lines (L2) cross each other at a substantially identical point of (P2) located on the upstream side of the convergent region of the spouted flames (f) and on the central axial line (L) in the combustion cylinder (2). The flame retardant material decomposition burner can render a process exhaust gas containing a silane material, which produces powder (such as SiO2) upon combustion decomposition, and a flon flame retardant material harmless with high combustion decomposition efficiency and can realize long-term operation without lowering the treatment efficiency.

Description

Specification

Flame retardant decomposition PANA

Technical field

TECHNICAL FIELD [0001] The present invention relates to a flame retardant substance decomposition partner, and in particular, a film forming raw material contained in a process exhaust gas discharged in a semiconductor manufacturing process, a liquid crystal manufacturing process, a solar cell manufacturing process, a gas treatment process in a waste transformer, or the like. Silane materials (SiH, Si H, TEOS (Si (OC H

4 2 6 2 5

)), SiF, etc.) and chlorofluorocarbons used in cleaning and etching

4 4

Substances (CF, SF, C F, C F, C F, CHF, NF, etc.) are simultaneously burned with high efficiency

4 6 2 6 3 8 4 8 3 3

The present invention relates to a flame retardant decomposition cracker suitable for understanding.

Background art

[0002] Process exhaust gas discharged from a semiconductor manufacturing process, a liquid crystal manufacturing process, a solar cell manufacturing process, a gas treatment process in a waste transformer, or the like contains many types of harmful substances. Various exhaust gas treatment devices have been proposed for detoxifying such harmful substances and releasing them into the atmosphere.

[0003] For example, Patent Document 1 describes an exhaust gas abatement apparatus for the purpose of effective combustion decomposition treatment of a process exhaust gas containing a flame retardant substance. The exhaust port for process exhaust gas is arranged on the peripheral side wall of the combustion cylinder extending to the upstream side so that its axial center is parallel to the plane perpendicular to the central axis of the combustion cylinder, and a plurality of ports are provided on the downstream side. Are arranged in a direction that is inclined with respect to the plane perpendicular to the central axis of the combustion cylinder and coincides with the tangent of the virtual circle assumed for the combustion cylinder. Increase the residence time in a wide combustion area where the heat is high, and promote the thermal decomposition of the process exhaust gas containing flame retardants to eliminate it.

[0004] In Patent Document 2, as shown in Fig. 5 (a) in a plan view and in Fig. 5 (b) in a cross-sectional view, the upper end of the combustion cylinder 2 is closed with a blocking wall 3, and the blocking wall In Fig. 3, a process exhaust gas introduction port 40 for ejecting process exhaust gas containing flame retardant is attached so as to coincide with the central axis L of the combustion cylinder 2, and a plurality of concentric circles from the central axis L are installed. A combustion burner 50 is attached, and each of the plurality of combustion burners 50 is combusted by each of the jet flames f. A flame retardant substance decomposition partner 10 is described in which the axis is inclined to the downstream side so that it can converge at substantially the same point on the central axis L of the cylinder 2.

[0005] In this flame retardant material decomposition burner 10, the flames f from the plurality of combustion burners 50 converge at approximately the same point on the central axis L of the combustion cylinder 2, so that the flame converges. A high temperature combustion region S is formed. Then, since the process exhaust gas from the process exhaust gas introduction port 40 surely passes through the region S, the combustion decomposition process of the flame-retardant substance in the exhaust gas proceeds effectively, and the combustion decomposition temperature is high. Even CF and SF are expensive

4 6

The solution rate is obtained.

Patent Document 1: Japanese Patent Laid-Open No. 2001-165422

Patent Document 2: Japanese Patent Laid-Open No. 2003-202108

Disclosure of the invention

[0006] The inventors have disclosed, for example, a process exhaust gas discharged from a semiconductor manufacturing process power as a patent document.

Experiments for combustion decomposition using the flame retardant decomposition cracker of the form described in Fig. 2 have been continued, and in the process, the flame retardant decomposition cracker clogs the upper part of the combustion chamber. Since the process exhaust gas introduction port 40 for ejecting process exhaust gas containing flame retardants and a plurality of combustion panners 50 are attached to the wall 3, both of them must be positioned close to each other and introduced. Process exhaust gases that are processed immediately at high temperatures increase the efficiency of detoxification, while process exhaust gases to be detoxified are SiH, Si H, TEOS (Si (OC H)

4 2 6 2 5

) And SiF such as SiF.

4 4

As a composition, it was experienced that SiO powder (silica powder) was easily generated. Of such powder

2

The formation may deposit on the combustion cylinder or the tip of the burner, and immediately cause clogging of the process exhaust gas introduction port 40 or combustion burner 50. If powder clogging occurs, it will interfere with the fuel supply from the combustion burner 50 and worsen the combustion state. In the worst case, it may lead to misfire, so it must be avoided. It is also conceivable that powder, which is a combustion product, is formed in the process exhaust gas introduction port 40 and is agglomerated.

[0007] The amount of process gas used in the semiconductor manufacturing process or the liquid crystal manufacturing process is substantially proportional to the size of the substrate. In recent years, in the semiconductor manufacturing field, the wafer size is 200 mm. In the liquid crystal manufacturing field, the substrate glass size is shifting from 5th generation to 6th generation and from 6th generation to 7th generation. Along with this, the amount of process gas used has increased remarkably, and naturally, the amount of silane-based substances used has increased, and the emission of SiO powder (silica powder) as a combustion product has also increased. . That

2

For this reason, it is possible to effectively avoid the trouble caused by the SiO powder (silica powder).

2

This is a major problem in the flame retardant decomposition cracker.

[0008] In addition, when the amount of process exhaust gas to be processed increases, the present inventors process the flame that has converged as the flow rate of the process exhaust gas fed into the combustion chamber from one process exhaust gas introduction port 40 increases. We also experienced that the combustion decomposition efficiency declines because the exhaust gas passes through as if it was pushed open.

[0009] The exhaust gas abatement apparatus described in Patent Document 1 has a configuration in which a combustion paner is disposed on the peripheral side wall of the combustion cylinder, and combustion products such as SiO scatter and enter the combustion panner.

2

Can be suppressed to some extent. In addition, the process exhaust gas introduction port is arranged on the upstream side and the combustion burner is arranged on the downstream side, so that the distance between the process exhaust gas introduction port and the combustion flame can be sufficiently secured, and the process Since the vicinity of the exhaust gas introduction port can be kept in a low temperature region, it is expected that combustion products can be avoided to some extent in and near the process exhaust gas introduction port.

[0010] However, in the exhaust gas abatement apparatus having the shape described in Patent Document 1, the process exhaust gas introduction port is arranged in a direction parallel to a plane perpendicular to the central axis of the combustion cylinder, If the process exhaust gas contains powder such as SiO from the beginning, or the process exhaust gas

2

If combustion products are generated in the introduction port, they may stay in the port and become agglomerated, which may hinder the flow of process exhaust gas. As described above, in a situation where the amount of process gas used tends to increase remarkably, powders such as SiO are often contained in the discharged process exhaust gas from the beginning. Process

2

The residence in the exhaust gas introduction port can occur sufficiently.

[0011] Further, as described in Patent Document 2, the process exhaust gas introduction port is connected to the central axis of the combustion cylinder as compared with the case where the process exhaust gas introduction port is attached in a direction that coincides with the central axis of the combustion cylinder. If it is placed in a direction parallel to the orthogonal plane, the shape of the combustion flame The combustion cracking efficiency is reduced because the shape is disturbed and the generation of the high temperature region is limited.

[0012] Further, in the exhaust gas abatement apparatus having the shape described in Patent Document 1, the direction in which the Pana flame is ejected is aligned with the tangent of the virtual circle assumed for the combustion cylinder, and a plurality of flames converge at one place. As for process exhaust gas containing chlorofluorocarbon-based flame retardants such as CF, SF, and NF, it is difficult to form a sufficiently high temperature combustion decomposition treatment area.

4 6 3

I can't get enough processing efficiency.

[0013] The present invention has been made in view of the above circumstances, and SiH, SiH, TEOS,

4 2 6

Silane-based materials that produce powders (such as SiO) by combustion decomposition, such as SiF, and CF

4 2 4

High combustion even for process exhaust gas containing chlorofluorocarbon flame retardants such as SF, NF

6 3

An object of the present invention is to provide a flame retardant decomposition cracker that can further improve the decomposition efficiency and can continue the operation without reducing the efficiency.

[0014] A flame retardant substance decomposition parner according to the present invention includes a combustion cylinder having one end closed, a plurality of combustion pans for forming a flame in the combustion cylinder, and a flame retardant substance in the combustion cylinder. A plurality of process exhaust gas introduction ports for introducing process exhaust gas containing at least

In addition, each combustion burner and each process exhaust gas introduction port are flame retardant decomposition crackers attached to the peripheral side wall of the combustion cylinder, and each of the plurality of combustion burners has a jet flame at the center of the combustion cylinder. The plurality of process exhaust gas introduction ports are attached to the peripheral wall of the combustion cylinder with the axis inclined to the downstream side so as to converge at substantially the same point on the axis. It is characterized in that it is attached to the peripheral side wall of the combustion cylinder with its axis inclined to the downstream side so that it intersects at substantially the same point on the central axis of the combustion cylinder upstream of the convergence region.

[0015] In the flame retardant substance decomposition partner according to the present invention, the combustion partner and the process exhaust gas introduction port are both attached to the peripheral side wall of the combustion cylinder, and they are attached to the upper closed wall of the combustion cylinder. Compared with this form of flame retardant decomposition burner, the degree of blockage of the port or the burner caused by the powder of combustion products is less.

[0016] Furthermore, in the plurality of process exhaust gas introduction ports, the extension line of the axis thereof is the concentration of the ejection flame. Since the axis is inclined to the downstream side so that it intersects at substantially the same point on the central axis of the combustion cylinder upstream from the bundle region, it is attached to the peripheral side wall of the combustion cylinder, so the process exhaust gas introduction port is Compared with the flame retardant decomposition cracker that is arranged so that its axial center is parallel to the plane perpendicular to the central axis of the combustion cylinder, the generated powder stays in the port and forms a lump. Can be effectively prevented. This structure also makes it possible to secure the required distance between the flame and the process exhaust gas introduction port outlet, so that combustion products (silica powder, etc.) are generated near the outlet of the process exhaust gas introduction port. Can be effectively prevented. As a result, it is possible to effectively prevent the process exhaust gas introduction port and the panner from causing a channel failure due to powder.

[0017] Furthermore, since the process exhaust gas introduction port is attached to the peripheral wall of the combustion cylinder with its axis inclined to the downstream side, the cross-sectional area at the port outlet increases in an elliptical shape according to the angle of inclination. As a result, the process exhaust gas can be smoothly introduced into the combustion cylinder by gradually reducing the gas flow rate. For this reason, the influence on the combustion flame shape change can be reduced.

[0018] In order to further increase this effect, the process exhaust gas introduction port may be configured to have a portion whose cross-sectional area gradually expands toward the outlet portion into the combustion cylinder. As a result, it is possible to more effectively prevent the occurrence of flow path failure due to powder at the process exhaust gas introduction port.

[0019] In the flame retardant substance decomposition parner according to the present invention, the plurality of combustion panners are inclined to the downstream side so that the respective fire flames can converge at substantially the same point on the central axis of the combustion cylinder. As described above, it is attached to the peripheral side wall of the combustion cylinder, and a high temperature combustion region is formed around the region where the flame has converged. In addition, since a plurality of process exhaust gases are introduced into the combustion cylinder through the plurality of process exhaust gas introduction ports, the upward force can enter the high temperature combustion region without increasing the flow velocity. As a result, SiH, Si H, TEOS, SiF and other silane-based substances mixed in the process exhaust gas and

4 2 6 4

Combustion and decomposition of CFC-based flame retardants such as CF, SF, and NF proceeds with high efficiency. More

4 6 3

In addition, since the plurality of process exhaust gas introduction ports are arranged with the axis inclined to the downstream side so that they intersect at substantially the same point on the central axis of the combustion cylinder, the initial speed is increased as described above. It is possible to enter the combustion flame without causing any significant disturbance, and this point also provides high combustion decomposition efficiency of process exhaust gas containing CFC-based flame retardants. In addition, it is possible to eliminate the phenomenon in which the process exhaust gas flows down along the wall surface region of the combustion cylinder, that is, through the low temperature region of the combustion chamber. This also prevents a decrease in combustion decomposition efficiency. .

[0020] In the flame retardant material decomposition parner according to the present invention, the inclination angle of the axis of each combustion parner and each process exhaust gas introduction port is in the range of 15 to 60 degrees with respect to the central axis of the combustion cylinder. Is preferred. In the experiments by the present inventors, the inclination angle of the axis of each combustion pan is preferably around 30 degrees, and the inclination angle of the axis of each process exhaust gas introduction port is preferably around 45 degrees. By selecting the angle in this way, higher combustion decomposition efficiency could be obtained. If the inclination angle of the combustion pan is larger than 60 degrees, the vicinity of the process exhaust gas introduction port is heated to promote the formation of SiO, so the unfavorable inclination angle is smaller than 15 degrees.

2

On the other hand, it is not preferable because the flame is too close to the inner surface of the combustion cylinder and thermal damage to the combustion cylinder is likely to proceed. Further, if the inclination angle of the axis of each process exhaust gas introduction port is smaller than about 15 degrees, the space above the flame becomes too large, and the flame retardant decomposition cracking force S is undesirably elongated. On the other hand, if it exceeds 60 degrees, the process exhaust gas entering from each process exhaust gas introduction port forms a turbulent flow, which is not preferable.

[0021] In the flame retardant substance decomposition partner according to the present invention, each combustion partner is preferably detachable from the combustion casing in order to facilitate maintenance. For example, a method for making the combustion partner detachable is to install a sheath tube on the combustion housing side and insert the combustion partner body into it, and attach it with a joint that can be attached and detached without using tools such as a clamped joint. It is done.

[0022] Preferably, the flame retardant substance decomposition partner according to the present invention further includes a scraper that rotates along the inner wall surface of the combustion cylinder. As a result, when SiO (silica powder) is generated from silane-based materials by combustion decomposition, combustion generation that adheres to the inner surface of the combustion cylinder

2

It is possible to scrape off the powder as a product, and to prevent the performance degradation of the flame retardant decomposition cracker. In the flame-retardant substance decomposition Pana according to the present invention, a scraper can be easily attached using a lid member that closes the upper end side of the combustion cylinder, and the lid member Is located at a position away from the combustion flame due to the structure of the flame retardant decomposition burner, so that it is possible to effectively avoid damage to the drive mechanism of the scraper due to heat. Also, the weight of the lid member can be reduced, and it becomes easy to repair the inside of the combustion cylinder by opening the lid member during maintenance.

[0023] In the flame-retardant substance decomposition partner according to the present invention, preferably, an inner cylinder made of a heat-resistant metal is provided along the inner wall of the combustion cylinder, and the scraper extends along the inner wall surface of the inner cylinder. To rotate. By providing an inner cylinder made of such a heat-resistant metal, it is possible to avoid thermal damage to the inner wall surface of the combustion cylinder, which is usually made of an irregular refractory material commonly called refractory brick or castable. This makes it possible to extend the life of the flame retardant decomposition cracker. If the inner cylinder made of heat-resistant metal is damaged by heat, etc., it is possible to use it again as a flame-retardant substance decomposition partner by replacing only the inner cylinder. The material of the inner cylinder is preferably a heat resistant metal such as SUS310S or Inconel, or a ceramic such as silicon nitride or silicon carbide.

[0024] The flame retardant substance decomposition planer according to the present invention includes a plurality of process exhaust gas introduction ports, and a plurality of manufacturing or processing apparatuses installed in parallel or a single unit having a plurality of chambers. Even when the process exhaust gas discharged from the equipment for each chamber is processed at the same time, by installing as many process exhaust gas introduction ports as the number of manufacturing or treatment equipment or chambers, Therefore, it is possible to prevent the process exhaust gases from merging with each other, thereby eliminating the danger caused by the mixing of process exhaust gases.

[0025] In the flame retardant decomposition cracker according to the present invention, the process exhaust gas to be treated is not particularly limited, but the process exhaust gas is a gas treatment in a semiconductor manufacturing process, a liquid crystal manufacturing process, a solar cell manufacturing process, or a waste transformer. Process power Discharged SiH, Si H, TE

4 2 6

CFC-based flame retardant materials such as CF, SF and NF together with silane-based materials such as OS and SiF

4 4 6 3

The flame retardant decomposition cracker according to the present invention functions particularly effectively when the process exhaust gas contains.

[0026] According to the flame-retardant substance decomposition Pana according to the present invention, SiH discharged in a semiconductor manufacturing process, a liquid crystal manufacturing process, a solar cell manufacturing process, a gas treatment process in a waste transformer, etc. Silanes that produce powder (SiO, etc.) by combustion decomposition such as Si H, TEOS, SiF

2 6 4 2

For process exhaust gas containing chlorofluorocarbon flame retardants such as CF, SF and NF

4 6 3

Thus, the detoxification process can be performed under high combustion decomposition efficiency. In addition, the operation can be continued for a long time without lowering the processing efficiency.

Brief Description of Drawings

[0027] [Fig. 1] Fig. 1 shows an embodiment of a flame retardant decomposition cracker according to the present invention, Fig. 1 (a) is a plan view, and Fig. 1 (b) is b-b in Fig. 1 (a). Sectional drawing by a line.

[FIG. 2] FIG. 2 is a diagram schematically showing a state in which process exhaust gas enters an ejection flame in the flame-retardant substance decomposition partner according to the present invention.

[FIG. 3] FIG. 3 is a view corresponding to FIG. 1 (b) showing another embodiment of the flame-retardant substance decomposition partner according to the present invention.

[FIG. 4] FIG. 4 is a view showing still another embodiment of the flame retardant substance decomposition partner according to the present invention. FIG. 4 (a) is a view corresponding to FIG. 1 (b), and FIG. Sectional view along line bb in Fig. 4 (a).

[Fig. 5] Fig. 5 is a diagram showing a conventional flame retardant decomposition planer. Fig. 5 (a) is a plan view, and Fig. 5 (b) is a cross-sectional view taken along line bb in Fig. 5 (a). .

Explanation of symbols

[0028] 1, la ... Flame retardant substance decomposition panner, 2 ... Cylindrical combustion cylinder, 21 ... Cylinder body made of irregular refractory material, 22 ... Outer cylinder made of heat-resistant metal, 23 ... Heat-resistant metal 3 ... Cover member, 32 ... Through hole, L ... Combustion cylinder center axis, 50 ... Combustion burner, L1 ... Combustion burner axis, D ... Combustion burner axis inclination, f ... Flame , S ... High temperature area of flame, 60 ... Process exhaust gas introduction port, L2 ... Process exhaust gas introduction port axis, β ... Process exhaust gas introduction port axis tilt angle, 70 · 'Scraper

BEST MODE FOR CARRYING OUT THE INVENTION

[0029] Hereinafter, an embodiment of a flame retardant substance decomposition partner according to the present invention will be described with reference to the drawings. Fig. 1 shows an example of the flame retardant decomposition cracker 1. Fig. 1 (a) is a plan view, and Fig. 1 (b) is a cross-sectional view taken along line b_b in Fig. 1 (a). Fig. 2 schematically illustrates the formation of flame and the introduction position of the process exhaust gas in the flame retardant material decomposition Pana according to the present invention. The parner 1 includes a cylindrical combustion cylinder 2 and a lid member 3 that closes one end of the combustion cylinder 2. In this example, the combustion cylinder 2 has a cylinder body 21 made of an irregular refractory material, an outer cylinder 22 made of a heat-resistant metal covering the outside, and an inner body made of a heat-resistant metal such as SUS310S or Inconel. It consists of cylinder 23. The inner cylinder 23 is disposed along the inner wall of the cylinder main body 21, and preferably a slight gap 24 is formed between the inner cylinder 23 and the inner wall surface of the cylinder main body 21. Preferably, the inner cylinder 23 is attached to the cylinder main body 21 by an appropriate means in a state where it can be easily detached from the cylinder main body 21. The lower open end of the combustion cylinder 2 is connected to a force connected to a suction blower, a water scrubber, and the like through an appropriate pipe line as in the case of a conventional parner of this type.

An appropriate inner flange 25 is formed at the upper end of the combustion cylinder 2, and the lid member 3 is detachably attached thereto by means such as a set bolt 31. A through hole 32 is formed in the center of the lid member 3 and is used for maintenance or for attaching a scraper 70 described later. Usually sealed with cap 33.

[0032] A plurality of combustion burners 50 are detachably attached to the combustion cylinder 2 at equal intervals. In the example shown in the figure, it is optional as long as the three combustion panners 50 are installed at 120 ° intervals with two or more forces. Each combustion spanner 50 has a predetermined angle α (preferably in the range of 15 to 50 degrees) so that the extension line of the axis L1 intersects at substantially the same point P1 on the center axis L of the combustion cylinder 2 (Preferably 30 degrees) and tilted downward, so that each fire flame f converges at approximately the same point Pla on the central axis L of the combustion cylinder 2 as shown in FIG. become. A high temperature combustion region S is formed around the region where the flame f has converged.

[0033] In the combustion cylinder 2, a plurality of process exhaust gas introduction ports 60 are further formed at equal intervals. In the example shown in the figure, the three process exhaust gas introduction ports 60 are attached at intervals of 120 degrees so as to be at intermediate positions between the combustion burners 50, respectively. Each process exhaust gas introduction port 60 is such that the extension line of the axis L2 intersects at substantially the same point on the central axis L of the combustion cylinder 2 at the position P2 upstream from the convergence region of the above-described ejection flame f. At a predetermined angle / 3 (preferably in the range of 15 to 50 degrees, more preferably 45 degrees). The process exhaust gas introduction port 60 is connected to, for example, a halfway through a pipe 61. Process exhaust gas from a conductor manufacturing apparatus or the like is introduced.

In the combustion treatment of the process exhaust gas, the process exhaust gas G is introduced into the combustion cylinder 2 from each process exhaust gas introduction port 60 in a state where the combustion flames f are formed in the combustion burners 50. Each process exhaust gas introduction port 60 is inclined downward at an angle j3. Therefore, even if the process exhaust gas G contains a powder such as Si02, the powder is in the pipeline 61 and the process exhaust gas introduction port. Enters combustion cylinder 2 without staying in 60

[0035] Since the process exhaust gas G is ejected from each process exhaust gas introduction port 60 so as to intersect at substantially the same point on the central axis L of the combustion cylinder 2 in a posture inclined to the downstream side, a large turbulent flow is caused. Without merging around the central axis L of the combustion cylinder 2. The merged process exhaust gas G enters the high-temperature combustion region S formed in the region where the flame f converges from above. As a result, SiH, Si H, TE〇S, SiF, etc.

4 2 6 4 Combustion decomposition of silane-based materials and chlorofluorocarbon-based flame retardant materials such as CF, SF, and NF is high.

4 6 3

Progress with efficiency. Process exhaust gas G, which has been subjected to combustion decomposition treatment, flows out from the lower end of the combustion cylinder 2.

[0036] In the process of combustion decomposition, a powder material such as SiO is generated. The production of combustion products is

2

This occurs mainly on the downstream side of the process exhaust gas introduction port 60, and the process exhaust gas introduction port 60 is in a low temperature region away from the formed flame f to the upstream side. There should be no situation where the process exhaust gas introduction port 60 is blocked due to lumps.

2

. In addition, since the process exhaust gas G that has joined the central part of the formed flame f enters, and the process exhaust gas G and the formed flame f are jetted downward,

2 such a powder substance is positively given energy to the downstream side, and the SiO etc. generated in the vicinity of the outlet of each combustion pan 50 accumulate in a lump and block the outlet.

2

It is also possible to avoid the occurrence of unexpected situations. Therefore, for a long time, SiH, Si H, TE

4 2 6

〇 Add silane-based materials such as S and SiF and chlorofluorocarbon-based flame retardant materials such as CF, SF and NF

4 4 6 3

It is possible to detoxify the process exhaust gas G containing high combustion decomposition efficiency. [0037] FIG. 3 is a diagram illustrating another form of the flame retardant decomposition cracker according to the present invention. Equivalent FIG. This flame retardant substance decomposition partner la is different from the flame retardant substance decomposition partner 1 shown in FIG. 1 in that a scraper 70 is provided. Other configurations are the same and are denoted by the same reference numerals. The scraper 70 is made of a heat-resistant alloy such as SUS310S or Inconel, or ceramics such as silicon nitride or silicon carbide, and includes a shaft portion 71 that passes through the through-hole 32 formed in the center of the lid member 3, and a shaft portion 71. And a scraping bar 72 that moves along the inner wall surface of the inner cylinder 23 attached to the inner wall of the combustion cylinder 2. The shaft portion 71 includes a handle 73 in the illustrated example. By operating the handle 73, the scraping bar 72 can be periodically rotated along the inner wall surface of the inner cylinder 23. As a result, the powder adhering to the inner cylinder 23 is effectively scraped off. The scraper rod 72 can also be rotated periodically by driving the motor.

[0038] Fig. 4 shows another embodiment of the flame retardant substance decomposition panner according to the present invention. Fig. 4 (a) is a diagram corresponding to Fig. 1 (b), and Fig. 4 (b) is a diagram. 4 is a cross-sectional view taken along line b_b in FIG. This flame-retardant material decomposition Pana lb has a portion 61 in which the cross-sectional area of the process exhaust gas introduction port 60 gradually expands toward the outlet portion into the combustion cylinder 2, so that the flame-retardant material shown in FIG. Dissimilar to decomposition Pana 1. Other configurations are the same, and are denoted by the same reference numerals. In this example, the partial force S of the through-hole formed in the cylinder main body 21 in the process exhaust gas introduction port 60 is a portion 61 that gradually expands in the form of a trumpet. With this configuration, it becomes possible to smoothly reduce the gas flow rate and smoothly introduce the process exhaust gas into the combustion cylinder 2, thereby further reducing the influence of the process exhaust gas on the shape change of the combustion flame f. be able to. In addition, it is possible to more effectively prevent the process exhaust gas introduction port 60 from causing a channel failure due to powder.

[0039] In the flame-retardant substance decomposing burner 1, la according to the present invention, the vicinity of the lid member 3 is relatively low in temperature because it is separated from the combustion burner by 50 forces. Therefore, the configuration of the lid member 3 can be simplified and reduced in weight. For this reason, the effect of facilitating the work when the lid member 3 is opened and the inside of the combustion cylinder is maintained is also brought about.

Claims

The scope of the claims

[1] A combustion cylinder with one end closed, a plurality of combustion partners for forming a flame in the combustion cylinder, and a plurality of processes for introducing process exhaust gas containing a flame retardant into the combustion cylinder An exhaust gas introduction port, and each combustion burner and each process exhaust gas introduction port are flame retardant decomposition crackers attached to the peripheral side wall of the combustion cylinder. Is attached to the peripheral side wall of the combustion cylinder with the axis inclined to the downstream side so that the erupting flame can converge at approximately the same point on the central axis of the combustion cylinder. The port is inclined to the downstream side wall of the combustion cylinder by inclining the axis to the downstream side so that the extension line of the axis intersects at substantially the same point on the central axis of the combustion cylinder upstream from the convergence area of the jet flame. Attached Flame retardant material decomposition PANA characterized by.

[2] The flame retardant substance decomposition partner according to claim 1, wherein the process exhaust gas introduction port has a portion whose cross-sectional area gradually increases toward an outlet portion into the combustion cylinder.

[3] The inclination angle of the axis of each combustion pan and each process exhaust gas introduction port is in the range of 15 degrees to 60 degrees with respect to the central axis of the combustion cylinder. Flame retardant decomposition PANA.

[4] The flame-retardant substance decomposing pan according to any one of claims 1 to 3, further comprising a scraper that rotates along the inner wall surface of the combustion cylinder.

5. The combustion cylinder includes an inner cylinder made of a heat resistant metal along the inner wall, and the scraper rotates along the inner wall surface of the inner cylinder. Flame retardant material decomposition PANA.

[6] Process exhaust gas to be treated is discharged from semiconductor manufacturing process, liquid crystal manufacturing process, solar cell manufacturing process or gas processing process in waste transformer, SiH, Si H, TEOS, Si

4 2 6

Process exhaust gas containing silane-based substances that produce powder by combustion decomposition, such as F, and

Four

And chlorofluorocarbon-based flame retardants such as CF, SF, C F, C F, C F, CHF, NF

4 6 2 6 3 8 4 8 3 3

The flame retardant according to any one of claims 1 to 5, wherein the flame retardant is a process exhaust gas. Sexually decomposed PANA.