JP2015010800A - Exhaust gas treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exhaust gas treatment device to detoxify exhaust gas by burning or thermally decomposing the same in a rational manner.SOLUTION: A treatment device A comprises: a combustion chamber 1 which is closed at one end section 1a thereof and detoxifies exhaust gas supplied thereto by combusting or decomposing the same; an exhaust cylinder 2 which is connected to the other end section 1b of the combustion chamber 1 and exhausts the detoxified exhaust gas; and a housing 10 which stores the combustion chamber 1 and the exhaust cylinder 2. The combustion chamber has: an exhaust gas supply port 3, at the closed end section 1a, through which the exhaust gas to be detoxified is supplied; a burner 4 which is installed at a position closer to the exhaust cylinder 2 than the exhaust gas supply port 3; and a combustible gas supply nozzle 5 which supplies combustible gas to the position between the burner 4 and the exhaust gas supply port 3 or closer to the exhaust cylinder 2 than the burner 4.

Description

  The present invention relates to an exhaust gas processing apparatus for removing exhaust gas by burning or thermally decomposing exhaust gas discharged from a semiconductor manufacturing process, for example.

  For example, it is known that a gas that is toxic to the human body or a gas that adversely affects the global environment is generated from a specific process in the semiconductor manufacturing process. When such harmful gases are released into the atmosphere, removal and removal of toxic substances are required. For this reason, there has been proposed an exhaust gas treatment apparatus that can satisfy the above requirements by burning or decomposing such exhaust gas for detoxification (see, for example, Patent Documents 1 and 2).

  The exhaust gas processing apparatus described in Patent Document 1 is connected to a cylindrical combustion chamber into which an exhaust gas to be detoxified and a reaction promoting gas are introduced at one end and orthogonal to the other end of the combustion chamber. And an exhaust pipe through which auxiliary combustion gas flows in and combustion exhaust gas is exhausted from the other end. A gas selected from hydrogen, methane, ethane, propane, butane, etc. is introduced as an exhaust gas and a reaction promoting gas from one end side of the combustion chamber, and a mixed gas composed of the reaction promoting gas and the exhaust gas is in a laminar flow state on the exhaust tube side Flowing into. Although this mixed gas has flammability, it does not contain oxygen having combustion support.

  On the other hand, for example, air flows into the exhaust stack at a high speed as an auxiliary combustion gas, and a part of the auxiliary combustion gas collides with a baffle provided at the intersection of the exhaust stack and the combustion chamber to mix with the mixed gas in the combustion chamber. Forming a spiral flow. For this reason, by igniting with an ignition device such as a spark plug provided in the combustion chamber, it becomes possible to burn the gas mixed with the exhaust gas, the reaction promoting gas and the air, and the exhaust gas is burned or decomposed and removed. The Further, the detoxified exhaust gas flows into the exhaust pipe and is introduced into the scrubber, and dust generated by combustion or decomposition is collected by the scrubber and sufficiently cooled, and then discharged to the atmosphere.

  In the exhaust gas treatment apparatus described in Patent Document 1, the air used as the auxiliary combustion gas is not only expected to promote the mixed gas of the exhaust gas and the reaction promoting gas, but to cool the combustion exhaust gas. It is also expected to act as a cooling gas. For this reason, a large amount of air is required.

  The exhaust gas treatment apparatus described in Patent Document 2 is configured by providing an exhaust gas supply path to be detoxified on one end side of a combustion chamber whose one end is closed and a burner on the other end side from the supply path. ing. Fuel gas such as hydrogen gas, LNG, LPG, city gas and air are supplied to the burner, and by burning these mixed gases, the exhaust gas can be burned or decomposed in a high temperature range to be detoxified. . Further, in the combustion gas transport passage connected to the other end side of the combustion chamber, air is sucked from the upstream side, and combustion gas in which exhaust gas is burned from the combustion chamber is sucked by the scrubber connected to the downstream side.

  In the exhaust gas treatment apparatus described in Patent Document 2, no baffle is provided at the intersection between the combustion chamber and the combustion gas transport passage. For this reason, a part of the air sucked from the upstream side of the combustion gas transport passage acts as a combustion-supporting gas for the exhaust gas in the combustion chamber, but most of the air has an action of cooling the combustion gas.

Japanese Patent No. 2996392 JP 2003-083531 A

  In the exhaust gas treatment apparatus described in Patent Document 1, the spark gas is mixed with the mixed gas of the exhaust gas to be detoxified and the reaction promoting gas generated in the combustion chamber at high speed through the exhaust cylinder and colliding with the baffle. It is burned by being ignited by a plug. That is, although the mixed gas generated in the combustion chamber is a combustible gas, air as an auxiliary combustion gas is required to burn the mixed gas. However, depending on the amount of air flowing from the exhaust pipe into the combustion chamber, it may be difficult to completely burn the mixed gas existing in the combustion chamber.

  In the exhaust gas treatment apparatus described in Patent Document 2, the temperature in the combustion chamber can be increased by using a burner. However, when the exhaust gas is a combustible gas, the combustion chamber is in an oxygen-deficient state, and air as an auxiliary combustion gas is required to burn the exhaust gas, making it difficult to completely burn the exhaust gas. There is a risk of becoming.

  The air flowing through the exhaust pipe and the combustion gas transport passage described in Patent Documents 1 and 2 sucks the function as an auxiliary combustion gas for the combustible gas including the exhaust gas in the combustion chamber and the combustion gas generated from the combustion chamber. It also has a cooling function for the function and the processing equipment. In particular, in order to exert a sufficient cooling effect, it is necessary to flow a large amount of air through the exhaust pipe and the combustion gas transport passage at a high speed. As a result, the temperature in the combustion chamber is limited, and when exhaust gas contains components having a high combustion temperature or components having a high decomposition temperature, it becomes difficult to remove these components. There is a fear.

  In addition, depending on the nature and amount of the exhaust gas supplied to the combustion chamber, the amount of air flowing into the combustion chamber from the exhaust tube or the combustion gas transport passage may be sufficient to completely burn the exhaust gas. There is no guarantee. For this reason, there is a possibility that unburned exhaust gas or unreacted exhaust gas may be generated in spite of combustion in the combustion chamber. Such unburned exhaust gas and unreacted exhaust gas may be diluted by a large amount of air flowing through the exhaust pipe or the combustion gas transport passage, and may be lowered to a combustible range concentration or less. In this case, there is a possibility that it is difficult to sufficiently remove the harmful substances.

  An object of the present invention is to provide an exhaust gas treatment apparatus for rationally burning or thermally decomposing exhaust gas for detoxification.

  In order to solve the above problems, an exhaust gas treatment apparatus according to the present invention includes a combustion chamber that closes one end and burns or decomposes the supplied exhaust gas to remove it, and the other end of the combustion chamber. An exhaust pipe that exhausts exhaust gas that is connected and detoxified in the combustion chamber; and a housing that houses the combustion chamber and the exhaust pipe, and the combustion chamber is detoxified on one closed end side An exhaust gas supply port for supplying exhaust gas to be supplied is provided, and a burner is provided on the exhaust tube side of the exhaust gas supply port, and further, combustion is supported between the burner and the exhaust gas supply port or on the exhaust tube side of the burner. A combustion-supporting gas supply nozzle for supplying a property gas is provided.

  In the exhaust gas processing apparatus, it is preferable that a plurality of burners and a plurality of combustion-supporting gas supply nozzles are disposed around the combustion chamber.

  Further, in any one of the exhaust gas treatment apparatuses, the plurality of burners arranged around the combustion chamber are arranged to be inclined with respect to the central axis of the combustion chamber, and a plurality of combustion-supporting gas supplies It is preferable that the nozzle is also inclined with respect to the central axis of the combustion chamber.

  In any one of the above-described exhaust gas treatment apparatuses, the combustion chamber includes a shaft that is rotatably disposed through one end of the combustion chamber, and a shaft attached to the shaft. It is preferable that a scraper having a scraping member that scrapes off deposits adhered to the inner surface is disposed.

  In the exhaust gas treatment apparatus according to the present invention (hereinafter, simply referred to as “treatment apparatus”), an exhaust gas supply port for supplying exhaust gas to be removed and an exhaust gas supply port are provided in the combustion chamber closed at one end. A burner is provided on the exhaust tube side, and a combustion-supporting gas supply nozzle is provided between the burner and the exhaust gas supply port or on the exhaust tube side of the burner. For this reason, when there is an unburned exhaust gas in the combustion chamber, a mixed gas of the exhaust gas and the combustion-supporting gas supplied from the combustion-supporting gas supply nozzle can be generated. Can be burned.

  That is, the oxygen concentration in the combustion chamber can be uniquely adjusted by supplying the combustion-supporting gas independently by the combustion-supporting gas supply nozzle provided in the combustion chamber. For this reason, even when the exhaust gas is a combustible gas and the atmosphere in the combustion chamber becomes deficient in oxygen, it is possible to eliminate deficient oxygen and promote reliable combustion.

  Therefore, there is no unburned exhaust gas in the combustion chamber, and the temperature in the combustion chamber can be maintained at a higher temperature. For this reason, the combustion temperature contained in the exhaust gas to be detoxified It is possible to surely burn a component having a high temperature, or to reliably decompose and remove a component having a high decomposition temperature.

  In particular, in order to supply the combustion-supporting gas from an independent combustion-supporting gas supply nozzle without using the air flowing through the exhaust pipe when the exhaust gas is burned, the combustion of the exhaust gas in the combustion chamber is ensured, A reliable high temperature can be realized. For this reason, the air flowing in the exhaust pipe contributes to cooling of the combustion gas combusted by the exhaust gas and cooling of the apparatus, and the cooling efficiency can be improved.

  By disposing a plurality of burners around the combustion chamber and a plurality of combustion-supporting gas supply nozzles, the internal temperature of the combustion chamber can be increased in a substantially uniform state.

  In particular, a plurality of burners arranged around the combustion chamber are arranged to be inclined in a plane orthogonal to the center axis of the combustion chamber, and a plurality of combustion-supporting gas supply nozzles are also orthogonal to the center axis of the combustion chamber. Inclined in the plane. For this reason, the flame formed by the burner and the combustion-supporting gas injected from the combustion-supporting gas supply nozzle form a spiral flow around the central axis, and exhaust gas is entrained in this spiral flow. Can realize efficient combustion.

  A shaft disposed rotatably in the combustion chamber through one end of the combustion chamber; and a scraping member attached to the shaft to scrape off deposits attached to the inner surface of the combustion chamber; By disposing the scraper having the above, even if dust generated by combustion or decomposition of the exhaust gas adheres to the inner surface of the combustion chamber, the dust can be scraped off.

It is a schematic diagram explaining the whole structure of a processing apparatus. It is a figure explaining the relationship between the burner arrange | positioned in a combustion chamber, and a combustion support gas supply nozzle. It is a figure explaining a combustion chamber and a scraper.

  The processing apparatus according to the present invention will be described below. The processing apparatus according to the present invention is a toxic special material such as silane, disilane, diborane, phosphine, arsine, nitrogen trifluoride, silicon fluoride, silicon chloride, etc. produced from the manufacturing process of semiconductors, liquid crystal panels or solar cells. Exhaust gas such as gas or chlorofluorocarbon gas, carbon tetrafluoride, sulfur hexafluoride, etc., which adversely affects the global environment, explosive hydrogen gas, etc. is burned or decomposed and removed for discharge.

  The treatment apparatus according to the present invention supplies exhaust gas to be detoxified into the combustion chamber, supplies combustion-supporting gas, maintains the combustion chamber at a high temperature by igniting a burner, and burns the supplied exhaust gas. It is configured so that it can be removed or decomposed at a high temperature. The exhaust gas that has been removed (hereinafter referred to as “detoxification gas”) can be exhausted from an exhaust pipe connected to the combustion chamber.

  In the present invention, the exhaust gas to be supplied to the combustion chamber to be detoxified is not limited to whether it is a flammable gas or a non-flammable gas. The exhaust gas generated from the process is targeted. Such exhaust gases include flammable gases that can be detoxified by combustion, nonflammable gases that can be decomposed and detoxified in a high temperature range, and the like. For this reason, it is possible to maintain the combustion chamber at a combustible concentration by supplying a combustion-supporting gas to the combustion chamber, and it is possible to maintain a high temperature region by igniting the burner.

  The configuration of the burner is not particularly limited, and a burner that can burn a mixed gas obtained by mixing a fuel gas such as natural gas or liquefied petroleum gas and a combustion-supporting gas such as air or oxygen gas is used. Is possible. Further, the number of burners provided in the combustion chamber is not limited, and any number may be used as long as the exhaust gas supplied to the combustion chamber can be held at a sufficiently high temperature to burn or decompose. For this reason, it is preferable to set suitably according to conditions, such as a component and flow volume of the exhaust gas supplied to a combustion chamber, and the thickness of a combustion chamber.

  In particular, the burner is preferably arranged so that the flame can be swirled around the center without directing the flame direction toward the center of the combustion chamber so that the temperature in the combustion chamber can be made uniform. By disposing the burner in this way, it is possible to form a spiral airflow in the combustion chamber, and it is possible to eliminate or reduce the uneven combustion and the uneven decomposition of the supplied exhaust gas.

  Air or oxygen gas can be employed as the combustion-supporting gas supplied to the combustion chamber. In particular, air is preferable in consideration of conditions such as price and availability. In this case, a blower or a fan is provided inside the housing, and the blower or fan can be driven to supply air as a combustion-supporting gas directly to the combustion chamber.

  In the processing apparatus according to the present invention, the burner and the combustion-supporting gas supply nozzle provided in the combustion chamber do not necessarily have to be directly attached to the combustion chamber, and the burner and the combustion-supporting gas supply nozzle can be attached. What is necessary is just to be comprised. That is, the burner and the combustion-supporting gas supply nozzle do not need to be fixed at a predetermined position in the combustion chamber, and a mounting portion for the burner and the combustion-supporting gas supply nozzle is provided at the predetermined position, It may be configured to be detachable.

  Hereinafter, the configuration of the processing apparatus according to the present embodiment will be described with reference to the drawings.

  The processing apparatus A includes a combustion chamber 1 in which one end (the left end in FIG. 1 in this embodiment) 1a is closed, and the other end 1b of the combustion chamber 1 orthogonal to the combustion chamber 1. Connected to the exhaust cylinder 2, the exhaust gas supply port 3 formed on the end 1a side of the combustion chamber 1, the burner 4 provided closer to the exhaust cylinder 2 than the exhaust gas supply port 3, and the exhaust gas more than the burner 4. A combustion-supporting gas supply nozzle 5 provided on the cylinder 2 side, and a housing 10 in which the combustion chamber 1 and the exhaust cylinder 2 are housed are configured.

  Although the posture of the combustion chamber 1 and the posture of the exhaust pipe 2 are not limited, in the present embodiment, the combustion chamber 1 is disposed in the longitudinal direction in the lateral direction, and is disposed in the longitudinal direction with respect to the combustion chamber 1. An exhaust pipe 2 is connected. Since a connection between the combustion chamber 1 and the exhaust pipe 2 is required to be airtight, both are connected by welding.

  The combustion chamber 1 is formed in a cylindrical shape, and the optimum dimension is set according to the processing conditions including the amount of exhaust gas to be detoxified. In particular, since the combustion chamber 1 is welded to the exhaust pipe 2 on the end 1b side, the cylinder 1c on the end 1a side and the end 1b side are advantageous for maintenance and inspection of the inside of the combustion chamber 1. And the cylindrical body 1d. And these cylinders 1c and 1d are bolt-joined via the flange 1e, and the combustion chamber 1 is comprised.

  The exhaust gas supply port 3 is provided in the cylindrical body 1 c on the closed end 1 a side of the combustion chamber 1. A nipple 3a having a flange 3b is formed on a side surface of the cylindrical body 1c, and an exhaust gas introduction pipe 11 is connected to the flange 3b. An end portion 11a of the exhaust gas introduction pipe 11 is provided so as to penetrate the housing 10, and is connected to an exhaust gas generation source (not shown).

  The burner 4 is provided closer to the exhaust tube 2 than the exhaust gas supply port 3. In order to attach the burner 4 to the cylindrical body 1d constituting the combustion chamber 1, a plurality of nipple-like attachment members 4a are provided, and the burner 4 is detachably attached to each attachment member 4a.

  As shown in FIG. 2, the attachment members 4 a are provided at three equal angles on the outer peripheral surface of the combustion chamber 1, and each attachment member 4 a is slightly inclined without being directed to the center of the combustion chamber 1. It is formed in the state. For this reason, the flame formed by the burner 4 swirls counterclockwise as shown in FIG. 2B, and the exhaust gas supplied to the end 1a side of the combustion chamber 1 is entrained in this swirl flow. It is possible to obtain a simple mixed state.

  A mixed gas pipe 12 is connected to each burner 4 attached to an attachment member 4 a provided in the combustion chamber 1. The mixed gas pipe 12 is connected to a mixer 13 provided inside the housing 10, and is configured so that the mixed gas formed by the mixer 13 can be supplied to the burner 4.

  The mixer 13 is connected to a fuel gas supply source (not shown) and the flow rate is monitored by a flow meter 14a, and the flow rate is monitored by a flow meter 16a connected to a blower 15 provided inside the housing 10. The air pipe 16 is connected. Then, by operating the mixer 13 while monitoring the flow meters 14a and 16a, a mixed gas having a mixing ratio with air sufficient to completely burn the supplied fuel gas is formed and supplied to the burner 4. Configured to get.

  The means for igniting the mixed gas injected from the burner 4 after supplying the mixed gas to the burner 4 is not particularly limited, and it is possible to ignite by arranging a spark plug (not shown) in the vicinity of the mounting member 4a. is there.

  The combustion-supporting gas supply nozzle 5 is provided between the exhaust gas supply port 3 disposed in the combustion chamber 1 and the burner 4 or closer to the exhaust tube 2 than the burner 4, and is in an unburned state existing inside the combustion chamber 1. The combustion-supporting gas necessary for recombusting the exhaust gas is supplied. The number of the combustion-supporting gas supply nozzles 5 provided in the combustion chamber 1 is not limited, and an optimal number is set according to conditions such as a component and a flow rate of the supplied exhaust gas.

  In this embodiment, the combustion-supporting gas supply nozzles 5 are provided at two locations on the exhaust tube 2 side of the burner 4 provided in the combustion chamber 1. The configuration of the combustion-supporting gas supply nozzle 5 is not particularly limited as long as the combustion-supporting gas such as air or oxygen can be injected independently. In particular, in the present embodiment, air is used as the combustion-supporting gas, and the combustion-supporting gas supply nozzle 5 injects a sufficient amount of air for complete combustion of the exhaust gas supplied to the combustion chamber 1. It only has to be obtained.

  In order to attach the combustion-supporting gas supply nozzle 5 to a position facing the cylindrical body 1d constituting the combustion chamber 1, a nipple-like attachment member 5a is provided. Each attachment member 5a is formed in an inclined state with respect to the center of the combustion chamber 1, and a combustion-supporting gas supply nozzle 5 is detachably attached to these attachment members 5a. For this reason, when the combustion-supporting gas is injected from the combustion-supporting gas supply nozzle 5 into the combustion chamber 1, the injected combustion-supporting gas turns counterclockwise as shown in FIG. It is possible to obtain a swirling flow composed of exhaust gas supplied to the end 1a side of the combustion chamber 1, a flame swirling counterclockwise, and a combustion-supporting gas.

  Each combustion-supporting gas supply nozzle 5 is connected to an air pipe 17, and the air pipe 17 is connected to a blower 15 via a flow meter 17 a. For this reason, it is possible to set the amount of air from the combustion-supporting gas supply nozzle 5 to the combustion chamber 1 by monitoring the flow meter 17a and adjusting the flow rate of air.

  An exhaust pipe 2 is connected to the end 1 b of the combustion chamber 1. The exhaust tube 2 has a lower end 2a opened inside the housing 10, and the upper end 2b is disposed through the upper surface of the housing 10 and connected to a water scrubber (not shown). Yes. And the suction force by the suction pump provided in the water scrubber is acting on the exhaust pipe 2. The magnitude of this suction force is not limited. In this embodiment, a suction force of about 1 kilopascal (KPa) acts on the end 2b of the exhaust pipe 2.

  The housing 10 is configured so as to exhibit high airtightness, and an opening 10a is formed on the upper surface, and air is introduced through the opening 10a. Therefore, when a suction force acts on the exhaust cylinder 2, an air flow from below to above is formed in the exhaust cylinder 2, and accordingly, the inside of the combustion chamber 1 also becomes negative pressure, and the interior of the casing 10 An air flow from the opening 10a to the exhaust pipe 2 is formed. Further, when the blower 15 is operated and the air in the housing 10 is supplied to the air pipes 16 and 17, the air flows from the opening 10 a of the housing 10 to the blower 15 as the air is supplied. It is formed.

  As described above, the action of the suction force by the water scrubber and the cooling action on the devices arranged inside the casing 10 by the air flow formed inside the casing 10 as the blower 15 is operated. It can be realized.

  When exhaust gas is burned in the combustion chamber 1, some of the components contained in the exhaust gas are separated as dust, and the separated components may adhere to the inner wall surface of the combustion chamber 1. For this reason, the combustion chamber 1 is provided with a scraper 20 for scraping off adhering dust. The scraper 20 may have any structure that can move along the inner surface of the combustion chamber 1 by manual operation or automatic operation and scrape off dust adhering to the inner surface.

  As shown in FIG. 3, the scraper 20 includes a scraping member 20a having a length substantially equal to the length of the combustion chamber 1, a support member 20b connected to one end of the scraping member 20a, and a support. The shaft 20c is connected to a predetermined position of the member 20b and serves as the rotation center of the scraper 20, and a reinforcing member 20d attached along the support member 20b.

  The scraper 20 has a scraping member 20 a disposed inside the combustion chamber 1, a shaft 20 c penetrating the closed end 1 a of the combustion chamber 1, and rotatably supported by the bearing member 21. Yes. A sprocket wheel 22c constituting the driving device 22 is attached to an end portion of the shaft 20c protruding from the bearing member 21. The scraping member 20a can be rotated along the inner surface of the combustion chamber 1 by transmitting the rotation of the motor 22a to the shaft 20c via the sprocket wheel 22c and the chain 22b.

  Whether the scraper 20 is always driven or intermittently driven by the driving device 22 is not limited, and is preferably set appropriately in accordance with conditions such as the amount of dust adhering to the combustion chamber 1.

  Since the scraping member 20a constituting the scraper 20 is disposed in the combustion chamber 1 over its entire length, there is a possibility that the temperature becomes high during operation and the life is shortened. Therefore, in this embodiment, the scraping member 20a is formed with a cooling medium passage 23 over the entire length in the longitudinal direction, and the cooling medium passage 23 is supplied with pressurized air as a cooling medium so as to be forcibly cooled. Has been.

  In particular, in the cooling medium passage 23, an opening 23a is formed at the free end of the scraping member 20a (the end opposite to the support member 20b). Further, when the scraper 20 is installed in the combustion chamber 1, a plurality of injection ports 23b communicating with the cooling medium passage 23 are formed at positions facing the burner 4 in the scraping member 20a.

  For this reason, the cooling medium supplied to the cooling medium passage 23 cools the scraping member 20a in the course of flowing through the cooling medium passage 23, and is discharged from the opening 23a to the exhaust pipe 2, and at the same time from the injection port 23b to the combustion chamber 1 Is released inside. As described above, the cooling medium flows through the cooling medium passage 23 formed in the scraping member 20 a constituting the scraper 20, so that the scraper 20 can be cooled to reduce the influence of heat.

  The scraping member 20 a has a function of scraping off dust adhering to the inner surface of the combustion chamber 1. In particular, the scraping member 20a operates in a state where it is exposed to a high temperature and scrapes off dust adhering to the inner surface of the combustion chamber 1 in a state of being firmly solidified, so that it needs to have a high bending strength.

  For this reason, in this embodiment, the scraping member 20a is formed in a quadrangular section, and the cooling medium passage 23 is formed in a flat quadrangular shape. The scraping member 20a is configured by welding two types of bar members 20a1 and 20a2 having different thicknesses in the longitudinal direction. That is, a longitudinal groove is formed on one surface of the thin bar member 20a1, and a plurality of injection ports 23b communicating with the groove from the other surface are formed. The bar member 20a1 is formed on the center side of the combustion chamber 1. The scraping member 20a is configured by arranging the thick bar material 20a2 on the inner surface side of the combustion chamber 1 and welding them together. And the cooling-medium channel | path 23 is formed of the groove | channel formed in the bar material 20a1.

  In particular, since the scraping member 20a rotates in a state where it is disposed in the combustion chamber 1 that is at a high temperature, the free end side that is not reinforced by the reinforcing member 20d may be deformed to the inner surface side of the combustion chamber 1. . For this reason, on the surface of the scraping member 20a facing the inner surface of the bar member 20a2, a slope 20e is formed from the free end to the reinforcing member 20d. The inclination angle of the inclined surface 20e is preferably set as appropriate in accordance with conditions such as the material constituting the scraping member 20a and the temperature assumed for the combustion chamber 1.

  The shaft 20c constituting the scraper 20 is formed with a cooling medium supply passage (not shown) that communicates with the cooling medium passage 23 formed in the scraping member 20a and the support member 20b, and penetrates in a thickness direction at a predetermined position. Thus, a cooling medium supply port is formed. Therefore, the cooling medium supplied through the cooling medium supply port can be discharged from the opening 23a and the ejection port 23b through the shaft 20c, the support member 20b, and the scraping member 20a.

  The bearing member 21 has a function of rotatably supporting a shaft 20c constituting the scraper 20 and supplying a cooling medium via the shaft 20c. For this reason, the bearing member 21 is disposed in a housing 25 that is attached to a bracket 24 provided in the combustion chamber 1 and in which a hole (not shown) for loosely fitting the shaft 20 c is formed, and in portions corresponding to both ends of the housing 25. And a bearing 21a that fits the shaft 20c and rotatably supports the shaft 20c.

  In the bearing member 21 configured as described above, when the shaft 20c of the scraper 20 is fitted to the bearing 21a and the housing 25 and the cooling medium is supplied to the housing 25 in this state, the supplied cooling medium is the shaft 20c of the scraper 20. The coolant is supplied to the coolant passage 23 through the coolant supply port formed in the above.

  Next, the exhaust gas detoxification operation by the processing apparatus A configured as described above will be briefly described.

  First, fuel gas is supplied from a fuel gas supply source (not shown) and the blower 15 is driven to supply air to the mixer 13, and at the same time, air is supplied to the combustion-supporting gas supply nozzle 5. At this time, air is sucked from the opening 10a of the housing 10 to form an air flow in the direction of arrow a.

  The flow rate of the fuel gas in the fuel gas pipe 14 is monitored by the flow meter 14a, and the flow rate of the air supplied to the mixer 13 is monitored by the flow meter 16a. Then, the mixer 13 is operated while monitoring the flow meters 14 a and 16 a, thereby adjusting the mixing ratio of the fuel gas and air and supplying the mixture to the burner 4. Further, a predetermined amount of air is supplied to the combustion-supporting gas supply nozzle 5 while monitoring the flow meter 17a.

  As described above, the combustion chamber 1 is supplied with a mixed gas of fuel gas and air from the burner 4 and with air from the combustion-supporting gas supply nozzle 5. Then, a flame is formed in the combustion chamber 1 by igniting the burner 4. As shown in FIG. 2, this flame swirls counterclockwise and burns.

  The water scrubber connected to the exhaust pipe 2 is operated, and the suction force of the water scrubber is applied. Along with this, negative pressure acts on the exhaust cylinder 2, the combustion chamber 1 and the housing 10, and as shown in FIG. 1, a large amount of air is sucked from the opening 10a of the housing 10 and flows in the direction of arrow a. It flows in the direction of arrow b from the lower end 2a of the exhaust tube 2. Equipment including the combustion chamber 1, the exhaust pipe 2, and the blower 15 disposed inside the housing 10 is cooled by a large amount of air flow generated inside the housing 10.

  Further, a negative pressure acting on the exhaust cylinder 2 causes a flow in the direction of the arrow c in the combustion chamber 1, and a suction force accompanying this flow acts on an exhaust gas generation source (not shown) via the exhaust gas introduction pipe 11, and the exhaust gas becomes exhaust gas. It is supplied from the supply port 3 to the combustion chamber 1. The exhaust gas supplied to the combustion chamber 1 is heated to a high temperature by the flame ignited by the burner 4, and combustible components are combusted, and decomposition components at high temperatures are decomposed.

  When the exhaust gas supplied to the combustion chamber 1 includes a combustion component, oxygen necessary for combustion is supplied by the air supplied from the combustion-supporting gas supply nozzle 5, and combustion of the exhaust gas is promoted. As described above, the combustion component contained in the exhaust gas can be mixed with the air supplied from the combustion-supporting gas supply nozzle 5 and can be burned substantially completely, so that the removal by combustion can be realized. .

  Moreover, since the flame by the burner 4 and the combustion of the combustion components contained in the exhaust gas are simultaneously performed in the combustion chamber 1, the internal temperature of the combustion chamber 1 can be maintained in a sufficiently high temperature range, and the exhaust gas It is possible to reliably decompose the decomposition components in the high temperature range contained in.

  The detoxification gas burned in the combustion chamber 1 as described above or decomposed and detoxified at a high temperature is sucked by the suction force acting on the exhaust cylinder 2 and flows in the direction of the arrow d to form water (not shown). It is discharged to the scrubber.

  As described above, by supplying air to the combustion chamber 1 via the combustion-supporting gas supply nozzle 5, even exhaust gas containing a combustible component can be reliably burned and removed. In addition, since the combustion components contained in the exhaust gas are simultaneously burned together with the formation of the flame by the burner 4, the internal temperature of the combustion chamber 1 can be maintained in a high temperature range and decomposed at the high temperature contained in the exhaust gas. Even a component can be reliably decomposed. Therefore, the exhaust gas supplied to the combustion chamber 1 can be burned or thermally decomposed for detoxification.

  Further, most of the dust component contained in the exhaust gas falls during the process in which the exhaust gas burns and decomposes in the combustion chamber 1, but this dust is scraped from the inner surface of the combustion chamber 1 by the scraping member 20 a of the scraper 20. , Flows into the exhaust tube 2 and is discharged in the direction of the arrow d.

  The exhaust gas treatment apparatus according to the present invention is advantageous when it is used to remove exhaust gas discharged from a semiconductor manufacturing process or exhaust gas discharged from a liquid crystal panel manufacturing process.

A treatment apparatus 1 combustion chamber 1a, 1b end 1c, 1d cylinder 1e flange 2 exhaust cylinder 2a, 2b end 3 exhaust gas supply port 3a nipple 3b flange 4 burner 4a, 5a mounting member 5 combustion-supporting gas supply nozzle 10 housing Body 10a Opening 11 Exhaust gas introduction pipe 11a End 12 Mixed gas piping 13 Mixer 14 Fuel gas piping 14a, 16a, 17a Flow meter 15 Blower 16, 17 Air piping 20 Scraper 20a Scraping member 20a1, 20a2 Bar material 20b Support member 20c Shaft 20d Reinforcement member 20e Slope 21 Bearing member 21a Bearing 22 Drive device 22a Motor 22b Chain 22c Sprocket wheel 23 Cooling medium passage 23a Opening 23b Injection port 24 Bracket 25 Housing

Claims (4)

A combustion chamber that closes one end and burns or decomposes the supplied exhaust gas for detoxification;
An exhaust pipe connected to the other end of the combustion chamber and exhausting exhaust gas detoxified in the combustion chamber;
A housing for housing the combustion chamber and the exhaust pipe,
The combustion chamber is provided with an exhaust gas supply port for supplying exhaust gas to be detoxified on one closed end side, a burner is provided on the exhaust tube side of the exhaust gas supply port, and the burner and the exhaust gas are further provided. An exhaust gas treatment apparatus, characterized in that a combustion-supporting gas supply nozzle that supplies combustion-supporting gas is provided between the supply port and the exhaust tube side of the burner.   The exhaust gas processing apparatus according to claim 1, wherein a plurality of burners and a plurality of combustion-supporting gas supply nozzles are disposed around the combustion chamber.   The plurality of burners arranged around the combustion chamber are arranged to be inclined with respect to the central axis of the combustion chamber, and the plurality of combustion-supporting gas supply nozzles are also arranged to be inclined with respect to the central axis of the combustion chamber. The exhaust gas treatment apparatus according to claim 1 or 2, wherein the exhaust gas treatment apparatus is an exhaust gas treatment apparatus.   The combustion chamber includes a shaft that is rotatably disposed through one end of the combustion chamber, a scraping member that is attached to the shaft and scrapes off deposits attached to the inner surface of the combustion chamber, An exhaust gas treatment apparatus according to any one of claims 1 to 3, wherein a scraper having the above is disposed.

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