JP2963792B2 - Method and apparatus for treating toxic exhaust gas - Google Patents
Method and apparatus for treating toxic exhaust gasInfo
- Publication number
- JP2963792B2 JP2963792B2 JP20750991A JP20750991A JP2963792B2 JP 2963792 B2 JP2963792 B2 JP 2963792B2 JP 20750991 A JP20750991 A JP 20750991A JP 20750991 A JP20750991 A JP 20750991A JP 2963792 B2 JP2963792 B2 JP 2963792B2
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- gas
- combustion
- exhaust gas
- turbulent
- combustible
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、工業プロセスから排出
される支燃性特殊材料ガスを含有する有毒性排ガスの処
理方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for treating toxic exhaust gas containing a specially combustible material gas discharged from an industrial process.
【０００２】[0002]
【従来の技術】半導体製造工程からは、シラン（ＳｉＨ
4）、ジシラン（Ｓｉ2Ｈ4）、ジボラン（Ｂ2Ｈ6）、ホ
スフィン（ＰＨ3）、アルシン（ＡｓＨ3）等の可燃性の
特殊材料ガスを含む有毒性排ガスが生成する。このよう
な有毒性排ガスは人体に対する毒性が極めて高いので、
その大気への放出に際しては、それに含まれる有毒性物
質の完全除去が要求される。2. Description of the Related Art From a semiconductor manufacturing process, silane (SiH
4 ) A toxic exhaust gas containing flammable special material gas such as disilane (Si 2 H 4 ), diborane (B 2 H 6 ), phosphine (PH 3 ), and arsine (AsH 3 ) is generated. Since such toxic exhaust gas is extremely toxic to the human body,
Release to the atmosphere requires complete removal of toxic substances contained in it.
【０００３】排ガス中に含まれる有毒性物質を除去する
ための有効な方法の１つとして、燃焼分解法が知られて
いる。即ち、有毒性排ガスを空気と反応させ燃焼させた
後、生成物（単体元素や酸化物の固体物質）をスクラバ
ー、バッグフィルター等で処理する方法である。ただ、
特殊材料ガス中には、シランのように二酸化珪素に表面
を包まれた気泡を発生し、気泡が破裂すると酸素と激し
く爆発的に反応するものとか、あるいはアルシンのよう
に許容濃度が極端に低い（０．０５ｐｐｍ）ものなどが
あり、また数種の特殊材料ガス成分が混合されて排出さ
れることが多いので、排出ガスを大気中にそのまま放出
できる程度にまで、特殊材料ガス成分を燃焼分解するこ
とはなかなか難しい。[0003] As one of effective methods for removing toxic substances contained in exhaust gas, a combustion decomposition method is known. That is, this method is a method in which toxic exhaust gas is reacted with air and burned, and then a product (a single element or a solid substance of an oxide) is treated with a scrubber, a bag filter, or the like. However,
In the special material gas, bubbles with the surface wrapped in silicon dioxide like silane are generated, and when the bubbles rupture, they react violently and explosively with oxygen, or the allowable concentration is extremely low like arsine (0.05 ppm), etc., and several kinds of special material gas components are often mixed and emitted. Therefore, the special material gas components are burned and decomposed to such an extent that the exhaust gas can be released to the atmosphere as it is. It is very difficult to do.
【０００４】そこで、特殊材料ガス成分を含有する排ガ
スを効率良く燃焼分解する方法として、例えば排ガス導
入管のノズル先端周囲に可燃性ガスを供給燃焼させ火炎
バリヤを形成し、これにより火炎内に導入された特殊材
料ガスを火炎雰囲気のバリヤの先方で強制的に燃焼させ
る方法（特開平１−９５２１４号公報）や、燃焼炉内に
空気を乱流的に導入し、渦巻流を形成させ、同時に導入
排ガスを着火させ、着火された排ガスを渦巻流中で完全
燃焼させる方法及び装置（特開昭６２−２１８７２０号
公報）などが提案されている。これらの方法は、半導体
製造工程等からのシラン、フォスフィン等の可燃性特殊
材料ガスを含有する排ガスの処理に有用である。Therefore, as a method for efficiently combusting and decomposing exhaust gas containing a special material gas component, for example, a combustible gas is supplied and burned around a nozzle tip of an exhaust gas introduction pipe to form a flame barrier, thereby introducing the gas into the flame. (Japanese Unexamined Patent Publication No. 1-95214), or a method in which air is introduced turbulently into a combustion furnace to form a vortex flow, There has been proposed a method and an apparatus for igniting an introduced exhaust gas and completely burning the ignited exhaust gas in a spiral flow (Japanese Patent Application Laid-Open No. 62-218720). These methods are useful for treating exhaust gas containing flammable special material gas such as silane and phosphine from a semiconductor manufacturing process or the like.
【０００５】[0005]
【発明が解決しようとする課題】ところが、近年半導体
製造工程（成膜プロセス）における化学気相蒸着（いわ
ゆるＣＶＤ）装置で、チャンバー内クリーニングに三弗
化窒素ガスが使用されるようになってきた。しかし、三
弗化窒素のような支燃性の特殊材料ガスを含有する排ガ
スに対しては、前記のような燃焼方式による処理方法で
は充分な燃焼分解ができず、排気中に許容量（１０ｐｐ
ｍ）以上の三弗化窒素が残留する。However, in recent years, nitrogen trifluoride gas has been used for cleaning in a chamber in a chemical vapor deposition (so-called CVD) apparatus in a semiconductor manufacturing process (film forming process). . However, the exhaust gas containing a special material gas such as nitrogen trifluoride, which has a supporting property, cannot be sufficiently decomposed by the above-described treatment method using the combustion method, and an allowable amount (10 pp) is contained in the exhaust gas.
m) or more of nitrogen trifluoride remains.
【０００６】なお、米国産業衛生協議会が設ける特殊材
料ガスの許容値（ＴＬＶ値）によると、支燃性ガスにつ
いては、次の表１に示されるようになっている。[0006] According to the permissible value (TLV value) of the special material gas provided by the American Society for Occupational Health, the supporting gas is as shown in Table 1 below.
【０００７】[0007]
【表１】 [Table 1]
【０００８】このような支燃性の特殊材料ガスを含有す
る排ガスに対する処理方法としては、電熱ヒータで加熱
分解し、その後分解生成物（ＨＦ、Ｎ2、Ｎｏｘ等）を
乾式吸着する方法が考えられる。ただ、ＣＶＤ装置中、
同じチャンバーでシラン等の可燃性特殊材料ガスと三弗
化窒素等の支燃性特殊材料ガスを使う場合、工程上の手
違いで、同じラインに可燃性特殊材料ガスと支燃性特殊
材料ガスが流れてくることも考えられる。前記加熱分解
による排ガス処理を採用した場合には、このような際
に、例えば排ガス処理装置中に残留シランガスがあっ
て、そこへ三弗化窒素ガスが流れ込むと、処理装置内で
爆発の危険がある。As a method for treating exhaust gas containing such a special material gas having flammability, a method of decomposing by heating with an electric heater and then dry-absorbing decomposition products (HF, N 2 , Nox, etc.) is considered. Can be However, in the CVD equipment,
When using flammable special material gas such as silane and flammable special material gas such as nitrogen trifluoride in the same chamber, flammable special material gas and flammable special material gas may It may be flowing. In the case where the exhaust gas treatment by the thermal decomposition is adopted, in such a case, for example, if there is residual silane gas in the exhaust gas treatment device and nitrogen trifluoride gas flows into it, there is a danger of explosion in the treatment device. is there.
【０００９】従って、本発明の目的は、三弗化窒素のよ
うな支燃性特殊材料ガス成分を含有する有毒性排ガス
を、燃焼分解方式によって、効率良く充分に分解するこ
とができる処理方法及びその実施に適した装置を提供す
ることにある。Accordingly, an object of the present invention is to provide a method for efficiently and sufficiently decomposing a toxic exhaust gas containing a special gaseous material such as nitrogen trifluoride, which contains a combustible special material gas component, by a combustion decomposition method. An object of the present invention is to provide a device suitable for the implementation.
【００１０】[0010]
【課題を解決するための手段】本発明によれば、支燃性
ガス成分を含有する有毒性排ガスを燃焼分解する有毒性
排ガスの処理方法であって、前記排ガスに該排ガス中の
支燃性ガス成分を分解するに必要な量の反応促進ガスを
混合する混合工程と加熱部を有する燃焼炉で前記混合工
程で得られた混合ガスを燃焼分解する燃焼工程とからな
ることを特徴とする有毒性排ガスの処理方法が提供され
る。According to the present invention, there is provided a method for treating a toxic exhaust gas by burning and decomposing a toxic exhaust gas containing a combustible gas component. A mixing step of mixing a reaction promoting gas in an amount necessary for decomposing a gas component, and a combustion step of burning and decomposing the mixed gas obtained in the mixing step in a combustion furnace having a heating unit. A method for treating toxic exhaust gases is provided.
【００１１】また、本発明によれば、支燃性ガス成分を
含有する有毒性排ガスを燃焼分解する排ガス処理装置で
あって、有毒性排ガス導入配管及び反応促進ガス導入配
管を備えた混合部と助燃性ガス導入口、着火手段及び燃
焼ガス排出口を備えた燃焼部とからなり、且つ前記混合
部の下流に前記燃焼部が開放連結されていることを特徴
とする有毒性排ガスの処理装置が提供される。Further, according to the present invention, there is provided an exhaust gas treatment apparatus for burning and decomposing toxic exhaust gas containing a combustible gas component, comprising a mixing section provided with a toxic exhaust gas introduction pipe and a reaction promoting gas introduction pipe. An apparatus for treating toxic exhaust gas, comprising: a combustion section having an auxiliary gas introduction port, an ignition means and a combustion gas discharge port, and wherein the combustion section is openly connected downstream of the mixing section. Provided.
【００１２】即ち、本発明の支燃性ガス成分を含有する
有毒性排ガスの処理方法は、排ガスに該排ガス中の支燃
性ガス成分を分解するに必要な量の反応促進ガスを混合
した後に、該混合ガスを燃焼反応に付すという構成とし
たことから、支燃性ガス成分の燃焼反応が効率的に行な
われ、支燃性ガス成分を許容濃度（ＴＬＶ値）以下に減
少せしめた排出ガスを得ることができるものとなる。ま
た、本発明の装置は、支燃性ガス成分を含有する有毒性
排ガスと反応促進ガスとを混合する混合部と、得られた
混合ガスを燃焼分解する燃焼部とを開放連結させた構成
としたことから、混合部と燃焼部とを一体化した装置と
することが可能であり、従って簡単なコンパクトな構成
で且つ燃焼効率の高いものとなる。That is, the method for treating a toxic exhaust gas containing a combustible gas component according to the present invention comprises the step of mixing the exhaust gas with an amount of a reaction promoting gas necessary for decomposing the combustible gas component in the exhaust gas. Since the mixed gas is subjected to a combustion reaction, the combustion reaction of the combustible gas component is efficiently performed, and the exhaust gas in which the combustible gas component is reduced to an allowable concentration (TLV value) or less. Can be obtained. Further, the apparatus of the present invention has a configuration in which a mixing section for mixing a toxic exhaust gas containing a combustible gas component and a reaction promoting gas, and a combustion section for burning and decomposing the obtained mixed gas are connected to each other. Therefore, it is possible to provide an apparatus in which the mixing section and the combustion section are integrated, and therefore, it has a simple and compact configuration and high combustion efficiency.
【００１３】本発明で処理対象となる有毒性排ガスは、
支燃性の特殊材料ガス成分を含有するものである。この
支燃性の特殊材料ガスとしては、例えば三弗化窒素、一
酸化窒素、二酸化窒素、塩素、弗素等が挙げられる。な
お、支燃性ガスとは、水素、プロパン、メタン、シラ
ン、フォスフィン等の可燃性ガスを酸化、燃焼させるた
めのガスと定義されるものである。このような支燃性ガ
スは、前記したように、半導体製造工程等から排出され
る排ガス中に含まれる。なお、本発明によると、排ガス
中に支燃性ガス成分のみではなく、同時にシラン等の可
燃性特殊材料ガス成分が含まれるものであっても、爆発
等の危険性なしに安全に処理することができる。The toxic exhaust gas to be treated in the present invention is:
It contains a special material gas component that supports flammability. Examples of the combustible special material gas include nitrogen trifluoride, nitrogen monoxide, nitrogen dioxide, chlorine, and fluorine. Here, the term "combustible gas" is defined as a gas for oxidizing and burning a combustible gas such as hydrogen, propane, methane, silane, and phosphine. As described above, such a supporting gas is contained in exhaust gas discharged from a semiconductor manufacturing process or the like. According to the present invention, even if the exhaust gas contains not only the combustible gas component but also the flammable special material gas component such as silane at the same time, it can be safely treated without danger of explosion. Can be.
【００１４】本発明においては、先ず混合工程で、有毒
性排ガスに該排ガス中の支燃性ガス成分を分解するに必
要な量の反応促進ガスが混合される。この反応促進ガス
は、三弗化窒素等の支燃性ガス成分と酸化反応する可燃
性ガスであり、例えば水素、メタン、エタン、プロパ
ン、ブタン等が挙げられるが、その中でも二酸化炭素の
発生を避ける意味で水素が最も好ましい。なお、この場
合の両ガスの混合割合は、排ガス中の支燃性ガス１部に
対し、体積比で反応促進ガス１〜１００部の範囲であ
る。支燃性ガスが三弗化窒素の場合は、三弗化窒素１部
に対し、体積比で水素５〜３０部とするのが好ましい。In the present invention, first, in a mixing step, a reaction promoting gas in an amount necessary for decomposing a flammable gas component in the toxic exhaust gas is mixed with the toxic exhaust gas. The reaction promoting gas is a combustible gas that undergoes an oxidation reaction with a combustible gas component such as nitrogen trifluoride, and includes, for example, hydrogen, methane, ethane, propane, and butane. Hydrogen is most preferred in the sense of avoidance. In this case, the mixing ratio of both gases is in the range of 1 to 100 parts by volume of the reaction promoting gas to 1 part of the supporting gas in the exhaust gas. When the supporting gas is nitrogen trifluoride, the volume ratio is preferably 5 to 30 parts by volume of hydrogen per 1 part of nitrogen trifluoride.
【００１５】また、有毒性排ガスと反応促進ガスとの混
合に際しては、排ガス流に対し反応促進ガス流を、流速
０．００１〜１０ｍ／秒、好ましくは０．０１〜１ｍ／
秒、導入角度０〜１８０度で混合することができる。混
合部の形状は、混合が容易に行なえれば良く、円筒形等
任意の形状を採用することができる。当然、混合部は有
毒性排ガス導入配管、反応促進ガス導入配管を備え、且
つ燃焼部との開放連結口（混合ガス排出口）を有する装
置からなる。When mixing the toxic exhaust gas with the reaction promoting gas, the flow of the reaction promoting gas relative to the exhaust gas flow is set to a flow rate of 0.001 to 10 m / sec, preferably 0.01 to 1 m / sec.
Mixing can be performed at an introduction angle of 0 to 180 degrees in seconds. The shape of the mixing section is not particularly limited as long as mixing can be easily performed, and an arbitrary shape such as a cylindrical shape can be adopted. Naturally, the mixing section is provided with a toxic exhaust gas introduction pipe and a reaction promoting gas introduction pipe, and is constituted by a device having an open connection port (mixed gas discharge port) with the combustion section.
【００１６】混合工程（混合部）で混合された有毒性排
ガス／反応促進ガス混合物（以下単に混合ガスと記す）
は、次に燃焼工程（焼燃部）に送入される。燃焼工程
は、加熱部を有する燃焼炉に前記混合ガスを導入し、支
燃性特殊材料ガス成分を燃焼分解する工程である。本工
程においては、シラン等の通常の可燃性特殊材料ガスを
含む排ガスを燃焼分解する処理と同様の処理が行なわれ
る。即ち、通常の排ガス燃焼法の場合と比べ、排ガスの
代わりに前記混合ガスが導入される点が異なるのみであ
る。従って、燃焼部は、混合部との開放連結口（混合ガ
ス導入口）、助燃ガス導入口、着火手段及び燃焼ガス排
出口を備えた装置からなる。Toxic exhaust gas / reaction promoting gas mixture (hereinafter simply referred to as mixed gas) mixed in the mixing step (mixing section)
Is then sent to the combustion process (burning section). The combustion step is a step in which the mixed gas is introduced into a combustion furnace having a heating unit to burn and decompose the combustible special material gas component. In this step, a process similar to the process of burning and decomposing exhaust gas containing a normal combustible special material gas such as silane is performed. That is, the only difference is that the mixed gas is introduced instead of the exhaust gas as compared with the normal exhaust gas combustion method. Therefore, the combustion section is composed of a device provided with an open connection port (mixed gas introduction port) with the mixing section, an auxiliary gas introduction port, an ignition means, and a combustion gas discharge port.
【００１７】上記したように、燃焼工程では、前記混合
ガスが原料ガスとして導入される以外は、通常のシラン
等の可燃性特殊材料ガスを含有する排ガスに対すると同
様の燃焼操作が行なわれるが、支燃性特殊材料ガスは可
燃性特殊材料ガスと比べ、完全燃焼が困難なので、燃焼
効率を高めるための燃焼方法を採用することは非常に好
ましい。As described above, in the combustion step, the same combustion operation as that for the exhaust gas containing the flammable special material gas such as silane is performed except that the mixed gas is introduced as the raw material gas. Since the combustion supporting special material gas is more difficult to completely burn than the combustible special material gas, it is very preferable to employ a combustion method for improving the combustion efficiency.
【００１８】例えば、前記混合ガスを火炎壁を通して助
燃性ガスの渦巻流中に導入し、滞留時間を充分とること
によって完全燃焼させるとか、排ガス導入管ノズルの先
端周囲に助燃性ガスを供給して火炎壁を形成させ、該火
炎内に導入された前記混合ガスを火炎壁の上流で強制的
に燃焼させる方法などを採用することができる。For example, the mixed gas is introduced into the swirling flow of the auxiliary gas through the flame wall, and the residence time is sufficient for complete combustion, or the auxiliary gas is supplied around the tip of the exhaust gas introduction pipe nozzle. A method of forming a flame wall and forcibly burning the mixed gas introduced into the flame upstream of the flame wall can be adopted.
【００１９】次に、本発明を図面により説明する。図１
は本発明方法を実施する場合の処理装置ないし本発明装
置の実施例を示す断面図であり、前記混合ガスを火炎壁
を通して助燃性ガスの渦巻流中に導入し、燃焼分解する
方式を採用した例である。Next, the present invention will be described with reference to the drawings. FIG.
FIG. 2 is a cross-sectional view showing an embodiment of a processing apparatus or an apparatus of the present invention when the method of the present invention is performed.The method adopts a method in which the mixed gas is introduced into a swirling flow of a combustible gas through a flame wall to burn and decompose. It is an example.
【００２０】図１において、本装置は混合部１と燃焼部
２とからなり、燃焼部２は燃焼域３と助燃性ガス流通域
４とからなっている。助燃性ガス流通域部分４は、両端
部が助燃ガス導入口５及び燃焼ガス排出口６を形成し、
この両端部の間に連結口７が存在する。この連結口７の
周囲に混合部１と連結する燃焼域部分３が垂直に取り付
けられていて、連結口７に付属する端部で開放されてい
る。燃焼域部分３はそのまま混合部１と接続し、その端
部も開放されている。なお、上記助燃性ガス流通域部分
４は、助燃性ガス導入口５から後記のバッフル１８付近
にかけての燃焼補助部分と、バッフル１８付近から燃焼
ガス排出口６付近にかけての冷却部分とから構成され
る。In FIG. 1, the present apparatus comprises a mixing section 1 and a combustion section 2, and the combustion section 2 comprises a combustion zone 3 and an auxiliary gas flow zone 4. Both ends of the combustion assisting gas flow area 4 form a combustion assisting gas inlet 5 and a combustion gas outlet 6,
A connection port 7 exists between the two ends. Around the connection port 7, a combustion zone portion 3 connected to the mixing section 1 is vertically mounted, and is opened at an end attached to the connection port 7. The combustion zone portion 3 is connected to the mixing portion 1 as it is, and its end is also open. The auxiliary combustion gas distribution region 4 is composed of a combustion auxiliary portion extending from the auxiliary gas introduction port 5 to the vicinity of a baffle 18 described later, and a cooling portion extending from the vicinity of the baffle 18 to the vicinity of the combustion gas outlet 6. .
【００２１】混合部１において、燃焼域部分３との連結
端は開放されているが、その反対端８は、蓋板９により
閉鎖されている。パイプ状の混合部１、燃焼域部分３及
び助燃性ガス流通域部分４並びに蓋板９は、何れも充分
な耐熱性を有する材料からなり、例えばステンレス鋼、
炭素鋼などが用いられる。燃焼域部分３の側壁を貫い
て、例えば白金先端を有する好ましくは複数のスパーク
プラグからなる着火装置１０が取り付けられている。上
記スパークプラグを用いる際には、着火補助用として水
素等の燃焼ガスを燃焼域部分３の側壁から供給すること
が好ましい。なお、着火装置１０はセラミックヒータの
ようなものでもよく、この場合、着火装置１０は燃焼域
部分３の側壁に取り付けることもできる。また、図中、
１１及び１２は温度を検出するための熱電対である。混
合部１の端部８には、支燃性ガスを含有する有毒性排ガ
スの導入口１３及び反応促進ガス導入口１４が設けられ
ていて、それらを介して排ガス及び反応促進ガスが混合
部１に導入され、そこで混合される。In the mixing section 1, the connection end with the combustion zone portion 3 is open, but the opposite end 8 is closed by a lid plate 9. The pipe-shaped mixing section 1, the combustion zone portion 3, the combustion-assisting gas flow zone portion 4, and the cover plate 9 are all made of a material having sufficient heat resistance, for example, stainless steel,
Carbon steel or the like is used. Attached through the side wall of the combustion zone 3 is an ignition device 10, preferably consisting of a plurality of spark plugs having, for example, platinum tips. When using the above-mentioned spark plug, it is preferable to supply a combustion gas such as hydrogen from the side wall of the combustion zone portion 3 for assisting ignition. The igniter 10 may be a ceramic heater or the like, and in this case, the igniter 10 may be attached to the side wall of the combustion zone 3. In the figure,
11 and 12 are thermocouples for detecting temperature. The end 8 of the mixing section 1 is provided with an inlet 13 for a toxic exhaust gas containing a combustible gas and an inlet 14 for a reaction accelerating gas, through which the exhaust gas and the reaction accelerating gas are supplied. And mixed there.
【００２２】反応の実施に当っては、助燃性ガス導入口
５が燃焼を維持する乱流ガスの源となる。燃焼ガス排出
口６は、通常フランジ１５を介してスクラバーに結合さ
れている。スクラバーからの吸引作用により、助燃性ガ
ス（通常空気、酸素富化空気等）をその導入口５から吸
引して、助燃性ガス流通域部分４中を乱流的に通す。In carrying out the reaction, the auxiliary combustion gas inlet 5 serves as a turbulent gas source for maintaining the combustion. The combustion gas outlet 6 is usually connected to a scrubber via a flange 15. By the suction action from the scrubber, a combustion assisting gas (normal air, oxygen-enriched air, etc.) is sucked from its inlet 5 and turbulently flows through the combustion assisting gas flow area 4.
【００２３】一方、三弗化窒素等の支燃性特殊材料ガス
を含有する有毒性排ガスは、通常極めて低圧の層流で排
ガス導入配管１３から、また同時に水素等の反応促進ガ
スが反応促進ガス導入配管１４から、混合部１中に導入
され、混合される。半導体製造工程において、三弗化窒
素等に付加される圧力は、大気圧より極く僅か高い程度
であるので、排ガスはそれと殆ど同一圧力で導入配管１
３に流入し、上向きの背圧を避けるようにしなければな
らない。On the other hand, toxic exhaust gas containing a special material gas such as nitrogen trifluoride is usually supplied from the exhaust gas introduction pipe 13 in a very low pressure laminar flow, and at the same time, a reaction promoting gas such as hydrogen is reacted with the reaction promoting gas. The mixture is introduced into the mixing section 1 from the introduction pipe 14 and mixed. In the semiconductor manufacturing process, the pressure applied to nitrogen trifluoride or the like is extremely slightly higher than the atmospheric pressure.
3 to avoid upward back pressure.
【００２４】導入配管１３から層流状で導入された排ガ
ス及び導入配管１４から導入された反応促進ガスは、層
流状で混合部１内を流れ、更に燃焼域部分３へ導かれ
る。一方、助燃性ガス流通域部分４中を流れる高速の助
燃性ガス流が連結口７に達すると、該ガス流は燃焼域部
分３において、低速の混合ガスと遭遇する。従って、助
燃性ガスの一部は連結口７に入り、点１６で燃焼域部分
３の側壁に衝突し、矢印１７の方向に遠心的渦巻状に流
れる。The exhaust gas introduced in a laminar flow from the introduction pipe 13 and the reaction promoting gas introduced from the introduction pipe 14 flow in the mixing section 1 in a laminar flow, and are further guided to the combustion zone 3. On the other hand, when the high-speed combustible gas flow flowing in the combustible gas flow zone 4 reaches the connection port 7, the gas flow encounters the low-speed mixed gas in the combustion zone 3. Therefore, a part of the combustible gas enters the connection port 7, collides with the side wall of the combustion zone portion 3 at the point 16, and flows in a centrifugal spiral shape in the direction of the arrow 17.
【００２５】燃焼域部分３において、着火装置１０によ
り火炎の壁が形成され、そこへ層流状の混合ガスが流れ
てきて燃焼を開始する。燃焼域部分３内で燃焼が進み、
そこで渦巻状火炎がおこる。次に、この渦巻状火炎は矢
印１７の方向で助燃性ガス流通域部分４の下流に向けら
れる。図中、１８は火炎指向のためのバッフルである。
燃焼ガス排出口６を通過する燃焼ガスは、通常１００℃
以下であって、スクラバーで完全に処理される。In the combustion zone 3, a flame wall is formed by the igniter 10, into which a laminar mixed gas flows to start combustion. The combustion proceeds in the combustion zone part 3,
There is a spiral flame. Next, the spiral flame is directed in the direction of arrow 17 to the downstream of the auxiliary gas flow area 4. In the figure, reference numeral 18 denotes a baffle for directing a flame.
The combustion gas passing through the combustion gas outlet 6 is usually 100 ° C.
The following is completely processed in the scrubber.
【００２６】[0026]
【実施例】以下、実施例により本発明を更に詳細に説明
するが、本発明はこれらに限定されるものではない。EXAMPLES The present invention will be described in more detail with reference to the following Examples, but it should not be construed that the present invention is limited thereto.
【００２７】実施例１〜４ 三弗化窒素と窒素との混合ガスを調製して原料ガスと
し、反応促進ガスとして水素を用い、図１に示す装置に
より、白金先端を有するスパークプラグを２個使用し、
燃焼域部分３の側壁から着火補助用燃焼ガスとして水素
を１５lit／分流し、更に助燃性ガスとして空気を燃焼
ガス排出口６に接続するポンプで７ｍ3／分吸引するこ
とによって、燃焼実験を行ない、排出ガス出口濃度を測
定した。その結果を表２に示す。なお、表２中の炉内温
度及び出口温度は、それぞれ熱電対１１と１２により測
定した。Examples 1 to 4 A mixed gas of nitrogen trifluoride and nitrogen was prepared as a raw material gas, hydrogen was used as a reaction promoting gas, and two spark plugs each having a platinum tip were formed by the apparatus shown in FIG. use,
A combustion experiment is performed by flowing hydrogen as a combustion assisting combustion gas at a flow rate of 15 lit / min from the side wall of the combustion zone portion 3 and further sucking air as a combustion assisting gas at 7 m 3 / min with a pump connected to the combustion gas outlet 6. And the exhaust gas outlet concentration was measured. Table 2 shows the results. The furnace temperature and the outlet temperature in Table 2 were measured by thermocouples 11 and 12, respectively.
【００２８】[0028]
【表２】 [Table 2]
【００２９】比較例１〜５ 三弗化窒素又はそれと窒素との混合ガスを調製して原料
ガスとし、反応促進ガスを用いなかった点及び着火補助
用燃焼ガスとして水素を３５lit/分流した点以外は、実
施例と同様にして燃焼実験を行なった。その結果を表３
に示す。Comparative Examples 1 to 5 Except that nitrogen trifluoride or a mixed gas thereof was prepared and used as a raw material gas, and no reaction promoting gas was used, and hydrogen was used as a combustion assisting combustion gas at a flow rate of 35 lit / division. A combustion experiment was performed in the same manner as in the example. Table 3 shows the results.
Shown in
【００３０】[0030]
【表３】 [Table 3]
【００３１】[0031]
【発明の効果】本発明の有毒性排ガスの処理方法は、排
ガスに該排ガス中の支燃性ガス成分を分解するに必要な
量の反応促進ガスを混合した後に、該混合ガスを燃焼反
応に付すという構成としたことから、支燃性ガス成分の
燃焼反応が効率的に行なわれ、支燃性ガス成分を許容濃
度（ＴＬＶ値）以下に減少した排出ガスを得ることがで
きる。According to the method for treating toxic exhaust gas of the present invention, after mixing an amount of a reaction promoting gas necessary for decomposing a combustible gas component in the exhaust gas with the exhaust gas, the mixed gas is subjected to a combustion reaction. With this configuration, the combustion reaction of the supporting gas component is efficiently performed, and the exhaust gas in which the supporting gas component is reduced to the allowable concentration (TLV value) or less can be obtained.
【００３２】また、本発明の装置は、支燃性ガス成分を
含有する有毒性排ガスと反応促進ガスとを混合する混合
部と、得られた混合ガスを燃焼分解する燃焼部とを開放
連結させた構成としたことから、混合部と燃焼部とを一
体化した装置とすることが可能であり、従って簡単なコ
ンパクトな装置で且つ燃焼効率も高く、工業的に有用な
ものである。Further, in the apparatus of the present invention, a mixing section for mixing a toxic exhaust gas containing a supporting gas component with a reaction promoting gas and a combustion section for burning and decomposing the obtained mixed gas are openly connected. With such a configuration, it is possible to provide an apparatus in which the mixing section and the combustion section are integrated, and therefore, it is a simple and compact apparatus, has high combustion efficiency, and is industrially useful.
【図１】本発明方法を実施する場合の処理装置ないし本
発明装置の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of a processing apparatus or an apparatus of the present invention when the method of the present invention is performed.
【符号の説明】 １ 混合部 ２ 燃焼部 ３ 燃焼域 ４ 助燃性ガス流通域 ５ 助燃性ガス導入口 ６ 燃焼ガス排出口 ７ 連結口 ８ 混合部端 ９ 蓋板 １０ 着火装置 １１ 熱電対 １２ 熱電対 １３ 排ガス導入配管 １４ 反応促進ガス導入配管 １５ フランジ １６ 助燃性ガス衝突点 １７ 助燃性ガス流進路 １８ バッフル[Description of Signs] 1 mixing section 2 combustion section 3 combustion area 4 combustible gas circulation area 5 combustible gas introduction port 6 combustion gas discharge port 7 connection port 8 mixing section end 9 cover plate 10 ignition device 11 thermocouple 12 thermocouple 13 Exhaust gas introduction pipe 14 Reaction promotion gas introduction pipe 15 Flange 16 Combustion gas collision point 17 Combustion gas flow path 18 Baffle
フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) F23G 7/06 ZAB F23G 7/06 101 Continuation of the front page (58) Field surveyed (Int.Cl. 6 , DB name) F23G 7/06 ZAB F23G 7/06 101
Claims (4)
を燃焼分解する有毒性排ガスの処理方法であって、前記
排ガスに該排ガス中の支燃性ガス成分を分解するに必要
な量の反応促進ガスを混合する混合工程と加熱部を有す
る燃焼炉で前記混合工程で得られた混合ガスを燃焼分解
する燃焼工程とからなることを特徴とする有毒性排ガス
の処理方法。1. A method for treating a toxic exhaust gas, which burns and decomposes a toxic exhaust gas containing a supporting gas component, wherein the exhaust gas contains an amount of gas necessary for decomposing the supporting gas component in the exhaust gas. A method for treating toxic exhaust gas, comprising: a mixing step of mixing a reaction promoting gas; and a combustion step of burning and decomposing the mixed gas obtained in the mixing step in a combustion furnace having a heating unit.
程と開放連結され、他端が後記助燃性ガス流通域部分と
開放連結されている燃焼域部分、（ロ）助燃性ガス導入
口及び燃焼ガス排出口を両端部に有し、且つ中間部に燃
焼域部分との連結口を有する助燃性ガス流通域部分、及
び（ハ）燃焼域部分に配置された着火装置、からなる構
成を有し、且つ（ニ）助燃性ガス流をその導入口から助
燃性ガス流通域部分に乱流状で導入し、次にこの乱流ガ
ス流を遠心的渦巻状に連結口から燃焼域部分に流入さ
せ、且つ同部分から前記連結口を通って流出させ、同時
に燃焼域部分に導入された前記混合ガスを該部分で着火
させ、燃焼分解させ、次いで乱流ガス流を燃焼ガス排出
口から排出させることを特徴とする請求項１記載の有毒
性排ガスの処理方法。2. The combustion furnace comprises: (a) a combustion zone portion having one end openly connected to the mixing step and the other end openly connected to a combustion assisting gas flow zone portion described later; A combustible gas flow area having a port and a combustion gas discharge port at both ends and a connection port with a combustion area at an intermediate portion; and (c) an ignition device disposed in the combustion area. And (d) introducing a combustible gas flow from its inlet into the combustible gas flow area in a turbulent manner, and then subjecting the turbulent gas stream to a centrifugal spiral from the connection port to the combustion area portion. At the same time, and flows out of the same through the connection port.At the same time, the mixed gas introduced into the combustion zone is ignited and decomposed by combustion, and then the turbulent gas stream is discharged from the combustion gas outlet. The method for treating toxic exhaust gas according to claim 1, wherein the exhaust gas is discharged.
を燃焼分解する排ガス処理装置であって、有毒性排ガス
導入配管及び反応促進ガス導入配管を備えた混合部と助
燃性ガス導入口、着火手段及び燃焼ガス排出口を備えた
燃焼部とからなり、且つ前記混合部の下流に前記燃焼部
が開放連結されていることを特徴とする有毒性排ガスの
処理装置。3. An exhaust gas treatment apparatus for combusting and decomposing toxic exhaust gas containing a combustible gas component, comprising: a mixing section having a toxic exhaust gas introduction pipe and a reaction promoting gas introduction pipe; An apparatus for treating toxic exhaust gas, comprising an ignition means and a combustion section provided with a combustion gas discharge port, wherein the combustion section is openly connected downstream of the mixing section.
と開放連結され、他端が後記助燃性ガス流通域部分と連
結されている燃焼域部分、（ロ）助燃性ガス導入口及び
燃焼ガス排出口を両端部に有し、且つ中間部に燃焼域部
分との連結口を有する助燃性ガス流通域部分、（ハ）燃
焼域部分に配置された着火装置、及び（ニ）助燃性ガス
流をその導入口から助燃性ガス流通域部分に乱流状で導
入し、次にこの乱流ガス流を遠心的渦巻状に連結口から
燃焼域部分に流入させ且つ同部分から前記連結口を通っ
て流出させ、次いで乱流ガス流を燃焼ガス排出口から排
出させるための装置、からなることを特徴とする請求項
３記載の有毒性排ガスの処理装置。4. The combustion section includes: (A) a combustion zone portion having one end openly connected to the mixing portion and the other end connected to a combustion assist gas flow zone portion described later; And a combustible gas flow area having a combustion gas discharge port at both ends and a connection port with a combustion area in the middle, (c) an ignition device disposed in the combustion area, and (d) auxiliary combustion The turbulent gas flow is introduced in a turbulent manner from the inlet into the combustible gas flow area through the inlet, and then the turbulent gas flow is centrifugally swirled into the combustion area through the connection port, and the turbulent gas flow is connected therefrom. 4. The toxic exhaust gas treatment device according to claim 3, further comprising a device for discharging the turbulent gas stream from the combustion gas discharge port through an outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20750991A JP2963792B2 (en) | 1991-07-24 | 1991-07-24 | Method and apparatus for treating toxic exhaust gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20750991A JP2963792B2 (en) | 1991-07-24 | 1991-07-24 | Method and apparatus for treating toxic exhaust gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0626634A JPH0626634A (en) | 1994-02-04 |
| JP2963792B2 true JP2963792B2 (en) | 1999-10-18 |
Family
ID=16540902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20750991A Expired - Lifetime JP2963792B2 (en) | 1991-07-24 | 1991-07-24 | Method and apparatus for treating toxic exhaust gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2963792B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015010800A (en) * | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | Exhaust gas treatment device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10151231A (en) * | 1996-09-27 | 1998-06-09 | Nippon Steel Corp | Golf club head and manufacture thereof |
| JP4690597B2 (en) * | 2001-08-10 | 2011-06-01 | 株式会社ニューフレアテクノロジー | Combustion type abatement system |
-
1991
- 1991-07-24 JP JP20750991A patent/JP2963792B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015010800A (en) * | 2013-07-01 | 2015-01-19 | 小池酸素工業株式会社 | Exhaust gas treatment device |
| KR20160028459A (en) | 2013-07-01 | 2016-03-11 | 고이께 산소 고교 가부시끼가이샤 | Exhaust gas treatment equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0626634A (en) | 1994-02-04 |
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