CN105358911A - Exhaust gas treatment equipment - Google Patents
Exhaust gas treatment equipment Download PDFInfo
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- CN105358911A CN105358911A CN201480037729.4A CN201480037729A CN105358911A CN 105358911 A CN105358911 A CN 105358911A CN 201480037729 A CN201480037729 A CN 201480037729A CN 105358911 A CN105358911 A CN 105358911A
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- Prior art keywords
- combustion chamber
- waste gas
- combustion
- gas
- burner
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J1/00—Removing ash, clinker, or slag from combustion chambers
- F23J1/06—Mechanically-operated devices, e.g. clinker pushers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/32—Incineration of waste; Incinerator constructions; Details, accessories or control therefor the waste being subjected to a whirling movement, e.g. cyclonic incinerators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Incineration Of Waste (AREA)
- Gasification And Melting Of Waste (AREA)
Abstract
To provide exhaust gas treatment equipment for removing an exhaust gas by burning or pyrolyzing the same in a rational manner. Treatment equipment (A) having: a combustion chamber (1) for removing a supplied exhaust gas by burning or decomposing the same, one end part (1a) of the combustion chamber (1) being closed; an exhaust pipe (2) for discharging the removed exhaust gas and connected to an other end part (1b) of the combustion chamber (1); and a housing (10) for accommodating the combustion chamber (1) and the exhaust pipe (2). In the combustion chamber, an exhaust gas supply port (3) for supplying the exhaust gas to be removed to the closed one end part (1a) side is provided, a burner (4) is provided closer to the exhaust pipe (2) side than is the exhaust gas supply port (3), and a combustion-sustaining gas supply nozzle (5) for supplying a combustion-sustaining gas is provided between the burner (4) and the exhaust gas supply port (3), or is provided closer to the exhaust pipe (2) side than is the burner (4).
Description
Technical field
The present invention relates to a kind for the treatment of apparatus of waste gas, it is for by making the waste gas burning of such as discharging from the manufacturing process of semiconductor or thermal decomposition and innoxious and discharge.
Background technology
Such as, the specific operation in known semiconductor manufacturing process generates the virose gas of human body tool, gas earth environment being brought to negative effect.When being released to air by so harmful gas, require to carry out the removing of toxicant, innoxious.Therefore, propose and by making such waste gas burning or decomposition and innoxious, thus the treating apparatus (such as with reference to patent document 1,2) of the waste gas of above-mentioned requirements can be met.
The treating apparatus of the waste gas described in patent document 1 has: the combustion chamber of tubular, and one end of this combustion chamber by shutoff, and is imported into and needs innoxious waste gas to promote gas with reaction; And aiutage, it is connected orthogonally with the other end of this combustion chamber, and combustion-supporting property gas flows into from one end of this aiutage, discharges burnt gas from the other end of this aiutage.Import waste gas from the end side of combustion chamber and promote gas and the gas selected from hydrogen, methane, ethane, propane, butane etc. with as react, the mist be made up of this reaction promotion gas and waste gas moves to aiutage effluent with laminar condition.Although this mist has combustibility, do not comprise the oxygen with combustion-supporting property.
On the other hand, as combustion-supporting property gas, such as air flows into aiutage at high speed, the part of this combustion-supporting gas and the stop collision of cross section being arranged on aiutage and combustion chamber, the vortex flow that formation mixes with the mist of combustion chamber.Therefore, by utilizing the igniter being arranged on the spark plug of combustion chamber such to light a fire, can make waste gas, reaction promotes the gas combustion that gas and air mix, waste gas is innoxious by burning or decompose thus.In addition, the waste gas after innoxious aiutage internal flow and be directed into washer, be captured by washer with burning or the dust that decomposes and produce, and discharge to air after sufficient cooling.
In the treating apparatus of the waste gas described in patent document 1, the air as combustion-supporting property gas not only plays and promotes that the mist of gas carries out combustion-supporting effect to waste gas and reaction, also plays the effect be used for the refrigerating gas that burnt gas cools.Therefore, a large amount of air is needed.
The treating apparatus of the waste gas described in patent document 2 is configured to, and is at one end provided with the supply road needing innoxious waste gas by the end side of the combustion chamber of shutoff, and is leaning on the position of another side to be provided with burner than this supply road.The fuel gas such as hydrogen, LNG, LPG, town gas and air being supplied to burner, by making their mist burn, waste gas can being made innoxious in high-temperature area burning or decomposition.In addition, carry in path at the burning gases be connected with another side of combustion chamber, attract air by the washer be connected with downstream from upstream side, and attract the burning gases of waste gas burning from combustion chamber.
In the treating apparatus of the waste gas described in patent document 2, the crosspoint of carrying path in combustion chamber and burning gases is not provided with baffle plate.Therefore, the part of the air attracted from the upstream side of burning gases carrying path as the waste gas in combustion chamber combustion-supporting property gas and play a role, but the major part of this air has the effect cooled burning gases.
At first technical literature
Patent document
Patent document 1: Japan Patent No. 2963792 publication
Patent document 2: Japanese Unexamined Patent Publication 2003-083531 publication
In the treating apparatus of the waste gas described in patent document 1, make high speed circulation in aiutage and the waste gas innoxious with the air of stop collision and the need produced in combustion chamber and react and promote that the mist of gas mixes, and undertaken lighting a fire by spark plug and make it burn.That is, the mist produced in combustion chamber is imflammable gas, but needs the air as combustion-supporting property gas when making this mist burn.But, according to the difference of the amount of the air from aiutage flowing in combustion chamber, worry to be difficult to the mist being present in this combustion chamber is burnt completely.
In the treating apparatus of the waste gas described in patent document 2, by using burner, the temperature in combustion chamber can be improved.But, when waste gas is imflammable gas, in combustion chamber, forming the state of hypoxgia, in order to make this waste gas burning need the air as combustion-supporting property gas, there are the misgivings being difficult to waste gas is burnt completely.
The air that flows in aiutage, burning gases carrying path described in patent document 1,2 have the imflammable gas for the waste gas comprised in combustion chamber the function as combustion-supporting property gas, attract burning from combustion chamber after the function of generation gas and the refrigerating function for treating apparatus.Particularly, in order to play sufficient cooling effect, need to make air carry high speed in path at aiutage, burning gases and flow in large quantities.Consequently, temperature in combustion chamber produces the limit, when in the offgas containing the high composition of ignition temperature or decomposition temperature high composition, worries to produce and is difficult to carry out innoxious problem to these compositions.
In addition, according to the character of waste gas, the difference of amount that are supplied to combustion chamber, cannot ensure from the amount of the air of aiutage, burning gases carrying path flowing in combustion chamber be for make this waste gas burn completely for sufficient amount.Therefore, have nothing to do with the burning in combustion chamber, worry to produce the waste gas of unburned state, the waste gas of unreacted state.By a large amount of Dilution air flowed in aiutage, burning gases carrying path, there are the misgivings being reduced to below incendivity range of concentrations in such unburned waste gas, unreacted waste gas.In this case, existence is difficult to misgivings innoxious fully.
Summary of the invention
The problem that invention will solve
The object of the present invention is to provide a kind of for making waste gas reasonably burn or thermal decomposition and the treating apparatus of innoxious waste gas.
For solving the method for problem
In order to solve above-mentioned problem, the treating apparatus of waste gas of the present invention has: combustion chamber, and an end of this combustion chamber, by shutoff, makes supplied waste gas burning or decomposition and innoxious; Aiutage, it is connected with another end of described combustion chamber, is discharged by the waste gas after innoxious in this combustion chamber; And framework, it receives described combustion chamber and aiutage, in described combustion chamber, the waste gas supply port supplying and need innoxious waste gas is being provided with by an end side of shutoff, and leaning on the position of aiutage side to be provided with burner than this waste gas supply port, in addition, between this burner and waste gas supply port or than this burner, the position of aiutage side is leaned on to be provided with the combustion-supporting property gas supply nozzle supplying combustion-supporting property gas.
On the basis of the treating apparatus of above-mentioned waste gas, be preferably, around described combustion chamber, be configured with multiple burner, and be configured with multiple combustion-supporting property gas supply nozzle.
In addition, on the basis of the treating apparatus of above-mentioned arbitrary waste gas, be preferably, the multiple burners being configured in the surrounding of described combustion chamber relative to this combustion chamber inclined configure, and multiple combustion-supporting property gas supply nozzle also relative to combustion chamber inclined configure.
In addition, on the basis of the treating apparatus of above-mentioned arbitrary waste gas, be preferably, scraper plate is configured with, the axle that the end being configured to that this scraper plate has this combustion chamber through can rotate and to be installed on this axle and to strike off the scraper component of the attachment of the inner surface attachment in described combustion chamber in described combustion chamber.
Invention effect
In the treating apparatus (hereinafter referred to as " treating apparatus ") of waste gas of the present invention, the waste gas supply port that supply needs innoxious waste gas is provided with in an end is by the combustion chamber of shutoff, lean on the position of aiutage side to be provided with burner than this waste gas supply port, between this burner and waste gas supply port or than this burner, lean on the position of aiutage side to be provided with combustion-supporting property gas supply nozzle.Therefore, when the inside of combustion chamber exists the waste gas of unburned state, the mist of this waste gas and the combustion-supporting property gas supplied from combustion-supporting property gas supply nozzle can be generated, and the mist of generation can be made to burn.
That is, the combustion-supporting property gas supply nozzle by being arranged at combustion chamber supplies combustion-supporting property gas independently, can adjust the oxygen concentration in this combustion chamber individually.Therefore, be imflammable gas at waste gas, the atmosphere in combustion chamber is formed as hypoxgia under such circumstances, can eliminate hypoxgia, reliably promotes burning.
Therefore, the waste gas of unburned state can not be had in combustion chamber, temperature in this combustion chamber can be remained the state of higher temperature, therefore, the composition that the ignition temperature that needs to comprise in innoxious waste gas can be made high reliably burns, or the composition making decomposition temperature high reliably decomposes and innoxious.
Particularly, when making waste gas burning, be used in due to unfavorable the air flowed in aiutage, but supply combustion-supporting property gas from independently combustion-supporting property gas supply nozzle, therefore, it is possible to realize reliable burning, the reliably high temperature of the waste gas in combustion chamber.Therefore, the air flowed in aiutage contributes to the cooling of the burning gases of waste gas burning, the cooling of device, can improve cooling effectiveness.
By the multiple burner of configuration around combustion chamber, and configure multiple combustion-supporting property gas supply nozzle, the internal temperature of combustion chamber can be made with roughly uniform state high temperature.
Particularly, the multiple burners being configured in the surrounding of combustion chamber tiltedly configure in the plane introversion of the orthogonality of center shaft with combustion chamber, and multiple combustion-supporting property gas supply nozzle also tiltedly configures in the plane introversion of the orthogonality of center shaft with combustion chamber.Therefore, the flame formed by burner forms the circinate flowing centered by central shaft with the combustion-supporting property gas sprayed from combustion-supporting property gas supply nozzle, waste gas is involved in this circinate flowing, thus can realizes efficient burning.
In addition, be configured with scraper plate in a combustion chamber, the axle that the end and being configured to that this scraper plate has this combustion chamber through can rotate and to be installed on this axle and to strike off the scraper component of the attachment that the inner surface in combustion chamber adheres to, even if thus with the burning of waste gas or decomposition and the dust produced is attached to the inner surface of combustion chamber, also this dust can be wiped off.
Accompanying drawing explanation
Fig. 1 is the schematic diagram be described the overall structure for the treatment of apparatus.
Fig. 2 is the figure be described the relation of the burner and combustion-supporting property gas supply nozzle that are configured in combustion chamber.
Fig. 3 is the figure be described combustion chamber and scraper plate.
Detailed description of the invention
Below, treating apparatus of the present invention is described.Treating apparatus of the present invention by making the tool such as silane, disilane, diborane, hydrogen phosphide, arsenous hydricde, Nitrogen trifluoride, silicon fluoride, the silicon chloride virose special material gas that generates from the manufacturing process of semiconductor, liquid crystal panel or solar cell etc. or carbon tetrafluoride, sulfur hexafluoride etc. bring the Freon gas of negative effect to earth environment, there is the waste gas burnings such as volatile hydrogen or decomposition and innoxious and discharge.
Treating apparatus of the present invention is configured to, in combustion chamber, supply needs innoxious waste gas and supplies combustion-supporting property gas, the condition of high temperature will be remained in combustion chamber by lighting a fire to burner, supplied waste gas burning and innoxious can be made thus, or at high temperature to decompose and innoxious.Further, treating apparatus of the present invention is configured to, and the waste gas (hereinafter referred to as " innoxious gas ") after innoxious can be discharged from the aiutage be connected with combustion chamber.
In the present invention, to supply to combustion chamber and innoxious waste gas is not limited to imflammable gas or non-combustible gas, using the waste gas generated from the manufacturing process of semiconductor, liquid crystal panel or solar cell etc. as object.In such waste gas, some waste gas is imflammable gas and can passes through burning and innoxious gas, and some waste gas is non-combustible gas and can decomposes and innoxious gas etc. in high-temperature area.Therefore, by supplying combustion-supporting property gas to combustion chamber, incendivity concentration can being remained by this combustion chamber, can high-temperature area be kept by lighting a fire to burner.
The structure of burner is not particularly limited, and can use the structure that the mist of the fuel gas such as natural gas, liquefied petroleum gas and the combustion-supporting property such as air, oxygen gas and vapor permeation can be made to burn.In addition, the quantity being arranged on the burner of combustion chamber does not limit, as long as can make be supplied to the waste gas burning of this combustion chamber or keep the quantity of the sufficiently high temperature needed for decomposition.Therefore, preferably according to being supplied to the composition of waste gas of combustion chamber, the condition such as rugosity of flow and combustion chamber suitably sets.
Particularly, preferably do not make the center of direction towards combustion chamber of flame, but be configured to circle round around this center, the temperature equalization of burner combustion indoor can be made.By configuring burner like this, circinate air-flow can be formed in the inside of combustion chamber, can eliminate or reduce the burning inequality of supplied waste gas, decomposing inequality.
As the combustion-supporting property gas supplied to combustion chamber, air or oxygen can be adopted.Particularly, if consider the conditions such as price, the easness that obtains, then preferred air.In this case, air blast or fan can be set in the inside of framework, by driving this air blast or fan directly to the air of combustion chamber supply as combustion-supporting property gas.
In treating apparatus of the present invention, be arranged on the burner of combustion chamber and combustion-supporting property gas supply nozzle without the need to being necessarily directly installed on combustion chamber, can install combustion device, combustion-supporting property gas supply nozzle as long as be configured to.That is, burner, combustion-supporting property gas supply nozzle are without the need to being fixed on the assigned position of combustion chamber, also can be configured to the installation portion pre-setting burner, combustion-supporting property gas supply nozzle in this assigned position, and can load and unload to this installation portion.
Below, the structure of accompanying drawing to the treating apparatus of the present embodiment is used to be described.
Treating apparatus A has: end (being the end in the left side of a Fig. 1 in the present embodiment) 1a is by the combustion chamber 1 of shutoff, the aiutage 2 of another end 1b of this combustion chamber 1 is connected to orthogonally with combustion chamber 1, be formed in the waste gas supply port 3 of the 1a side, end of combustion chamber 1, be arranged on than the burner 4 of waste gas supply port 3 by the position of aiutage 2 side, be arranged on than the combustion-supporting property gas supply nozzle 5 of burner 4 by the position of aiutage 2 side, and the framework 10 of storage combustion chamber 1 and aiutage 2.
The attitude of combustion chamber 1 and the attitude of aiutage 2 are not limit, and in the present embodiment, the long side direction of combustion chamber 1 transversely configures, and the aiutage 2 longitudinally configured is connected with this combustion chamber 1.Combustion chamber 1 requires air-tightness with the connecting portion of aiutage 2, and therefore both connect by welding.
Combustion chamber 1 is formed as cylindric, and its rugosity is set as best size according to the treatment conditions comprising the amount needing innoxious waste gas.Particularly, because the 1b side, end of combustion chamber 1 is welded in aiutage 2, therefore combustion chamber 1 is made up of the simplified 1c of 1a side, end, the cylindrical shell 1d of 1b side, end, so that favourable when carrying out maintenance test to the inside of this combustion chamber 1.Further, these cylindrical shells 1c, 1d be bolted joints via flange 1e, forms combustion chamber 1.
Waste gas supply port 3 be arranged on combustion chamber 1 by the simplified 1c of the 1a side, end of shutoff.Be formed with the pipe joint 3a with flange 3b in the side of cylindrical shell 1c, waste gas ingress pipe 11 is connected with this flange 3b.End 11a through framework 10 ground of this waste gas ingress pipe 11 is arranged, and is connected with the generation source of not shown waste gas.
Burner 4 is arranged on than the position of waste gas supply port 3 by aiutage 2 side.In order to install combustion device 4, the cylindrical shell 1d forming combustion chamber 1 is provided with the installation component 4a of multiple pipe joint shape, and burner 4 is installed on each installation component 4a in the mode that can load and unload.
As shown in Figure 2, installation component 4a is angularly arranged on three positions of the outer peripheral face of combustion chamber 1, and each installation component 4a does not point to the center of combustion chamber 1, and is formed as the state that tilts a little.Therefore, the flame formed by burner 4 circles round counterclockwise as shown in this figure (b), the waste gas of the 1a side, end being supplied to combustion chamber 1 is involved in this swirling flow, can obtains good admixture.
The burner 4 being installed on the installation component 4a arranged in combustion chamber 1 is connected to mist pipe arrangement 12.This mist pipe arrangement 12 is configured to, and is connected with the agitator 13 of the inside being arranged on framework 10, and the mist formed by this agitator 13 can be supplied to burner 4.
Agitator 13 is connected with to be connected with not shown fuel gas supply source and by flowmeter 14a monitored flow fuel gas pipe arrangement 14, to be connected with the air blast 15 of the inside being arranged on framework 10 and to be monitored the air line 16 of flow by flowmeter 16a.Further, by monitoring that each flowmeter 14a, 16a operate agitator 13, can be formed and burn completely the mist of mixing ratio of sufficient air with making supplied fuel gas, and supplying to burner 4.
After supplying mist to burner 4, the mechanism that the mist sprayed from this burner 4 is lighted a fire is not particularly limited, not shown spark plug can be configured near installation component 4a and light a fire.
Combustion-supporting property gas supply nozzle 5 is arranged between the waste gas supply port 3 and burner 4 of combustion chamber 1 configuration, or than burner 4 position by aiutage 2 side, supply makes the waste gas of the unburned state of the inside being present in combustion chamber 1 again burn required combustion-supporting property gas.The quantity being arranged at the combustion-supporting property gas supply nozzle 5 of combustion chamber 1 is not limit, and sets best quantity according to the condition such as composition, flow of supplied waste gas.
In the present embodiment, combustion-supporting property gas supply nozzle 5 is arranged on two positions of burner 4 by aiutage 2 side than being arranged at combustion chamber 1.The structure of combustion-supporting property gas supply nozzle 5 is not particularly limited, as long as can spray the combustion-supporting property such as air, oxygen gas individually.Particularly in the present embodiment, utilize air as combustion-supporting property gas, as combustion-supporting property gas supply nozzle 5, as long as the structure of the air of q.s for the waste gas being supplied to combustion chamber 1 burns completely can be sprayed.
In order to install combustion-supporting property gas supply nozzle 5, be provided with the installation component 5a of pipe joint shape in the opposed locations of the cylindrical shell 1d forming combustion chamber 1.Each installation component 5a is formed with the centroclinal state relative to combustion chamber 1, and combustion-supporting property gas supply nozzle 5 is installed on these installation components 5a in the mode that can load and unload.Therefore, when spraying combustion-supporting property gas from combustion-supporting property gas supply nozzle 5 to combustion chamber 1, the combustion-supporting property gas sprayed circles round counterclockwise as shown in Fig. 2 (c), thus can obtain the swirling flow that is made up of the waste gas of the 1a side, end being supplied to combustion chamber 1, the flame rotated counterclockwise and combustion-supporting property gas.
Each combustion-supporting property gas supply nozzle 5 is connected with air line 17, and this air line 17 is connected with air blast 15 via flowmeter 17a.Therefore, by monitoring flowmeter 17a and adjusting the flow of air, the amount of the air supplied to combustion chamber 1 from combustion-supporting property gas supply nozzle 5 can be set.
Aiutage 2 is connected with at the end 1b of combustion chamber 1.The end 2a of the lower side of this aiutage 2 is at the inside opening of framework 10, and the upper surface ground configuration of the through framework 10 of end 2b of upper side, is connected with not shown water scrubber.Further, the attraction produced by the suction pump being arranged at water scrubber acts on aiutage 2.Do not limit the size of this attraction, in the present embodiment, the attraction of have an appointment in the end 2b effect of aiutage 21 kPa (KPa).
Framework 10 is configured to play high-air-tightness, is formed with opening 10a at upper surface, can import air by this opening 10a.Therefore, when attraction acts on aiutage 2, in this aiutage 2, be formed with air stream upward from below, be accompanied by this, the inside of combustion chamber 1 is formed as negative pressure, and is formed with the air stream from opening 10a to aiutage 2 in the inside of framework 10.In addition, when the air in framework 10 being supplied to air line 16,17 when making air blast 15 work, along with the supply of this air, forming air and flow into from the opening 10a of framework 10 and arrive the air stream of air blast 15.
As mentioned above, the effect of the attraction produced by water scrubber, the air stream formed in the inside of framework 10 with the work of air blast 15, can realize the cooling effect of the equipment for the inside being configured in this framework 10.
When making waste gas burning in combustion chamber 1, a part for the composition comprised in this waste gas becomes dust and is separated, and isolated composition is attached to the internal face of combustion chamber 1 sometimes.Therefore, in combustion chamber 1, be provided with the scraper plate 20 of the dust for striking off attachment.This scraper plate 20 need adopt and can manually to operate or automatic operation and inner surface along combustion chamber 1 move thus strike off the structure of the dust being attached to this inner surface.
As shown in Figure 3, scraper plate 20 has: the axle 20c having the scraper component 20a of the length roughly equal with the length of combustion chamber 1, the supporting member 20b be connected with the end of the side of scraper component 20a, be connected with the assigned position of supporting member 20b and become the pivot of the scraper plate 20 and stiffener 20d installed along supporting member 20b.
The scraper component 20a of scraper plate 20 is configured in the inside of combustion chamber 1, and axle 20c being configured by the mode of the end 1a of shutoff with through combustion chamber 1, and be supported on bearing components 21 in the mode that can rotate.In addition, in the end outstanding from bearing components 21 of axle 20c, the sprocket wheel 22c forming drive unit 22 is installed.Further, by the rotation of motor 22a being transmitted to axle 20c via sprocket wheel 22c, chain 22b, thus scraper component 20a can rotate along the inner surface of combustion chamber 1.
Not being defined through drive unit 22 drives scraper plate 20 still to drive scraper plate 20 off and on all the time, preferably suitably sets accordingly with the condition such as amount of the dust being attached to combustion chamber 1.
The total length of scraper component 20a forming scraper plate 20 is configured in combustion chamber 1, therefore on-streamly becomes high temperature, there are the misgivings of lifetime.Therefore, in the present embodiment, scraper component 20a is formed with cooling medium path 23 throughout the total length of long side direction, by supplying the pressure air as cooling medium to this cooling medium path 23, pressure cooling can be carried out.
Particularly, opening 23a is formed with at the free end (with the end of supporting member 20b opposite side) of the scraper component 20a of cooling medium path 23.In addition, when scraper plate 20 is arranged at combustion chamber 1, the position opposed with burner 4 in scraper component 20a is formed with the multiple jet 23b be communicated with cooling medium path 23.
Therefore, the cooling medium being supplied to cooling medium path 23 cools scraper component 20a in the process circulating in this cooling medium path 23, releases from opening 23a to aiutage 2, releases from jet 23b to the inside of combustion chamber 1 simultaneously.Like this, by cooling medium circulation in the cooling medium path 23 being formed at the scraper component 20a forming scraper plate 20, can cool scraper plate 20, reduce the impact that heat causes.
Scraper component 20a has the function of being wiped off by the dust of the inner surface being attached to combustion chamber 1.Particularly, due to scraper component 20a action under the state being exposed to high temperature, and the dust adhered to the state of solidifying securely relative to the inner surface of combustion chamber 1 is wiped off, therefore need that there is higher bending strength.
Therefore, in the present embodiment, the section of scraper component 20a is formed as quadrangle, and cooling medium path 23 is formed as flat quadrangle.This scraper component 20a is welded by two kinds of bars 20a1,20a2 different to thickness along long side direction and forms.Namely, a face of thinner bar 20a1 is formed the groove of long side direction, form the multiple jet 23b be communicated with this groove on the other surface, this bar 20a1 is configured in the central side of combustion chamber 1, thicker bar 20a2 is configured in the inner surface side of combustion chamber 1, and both are welded, thus form scraper component 20a.Further, the groove by being formed at bar 20a1 forms cooling medium path 23.
Particularly, scraper component 20a rotates under the state being configured at the combustion chamber 1 becoming high temperature, therefore worries that the free end side not being reinforced component 20d reinforcement is out of shape to the inner surface side of combustion chamber 1.Therefore, on the face opposed with the inner surface of bar 20a2 of scraper component 20a, inclined-plane 20e is formed with from free end to stiffener 20d.The angle of inclination of preferred inclined-plane 20e and conditions such as forming the temperature supposed in the material of scraper component 20a, combustion chamber 1 suitably set accordingly.
The axle 20c forming scraper plate 20 is formed not shown cooling medium supply road, this cooling medium supply road is communicated with the cooling medium path 23 be formed on scraper component 20a, supporting member 20b, is formed with cooling medium supply port in assigned position along rugosity direction throughly.Therefore, it is possible to make the cooling medium supplied via cooling medium supply port by axle 20c, supporting member 20b, scraper component 20a, release from opening 23a, jet 23b.
The axle 20c forming scraper plate 20 supports as rotating by bearing components 21, and has the function supplying cooling medium via this axle 20c.Therefore, bearing components 21 has: framework 25, and it is arranged on and is arranged on the bracket 24 of combustion chamber 1, and is formed for the chimeric hole (not shown) of axle 20c play; And bearing 21a, it is configured in the position corresponding with the two ends of framework 25, is fitted together to and supports axle 20c for rotating for axle 20c.
In the bearing components 21 formed as described above, when making the axle 20c of scraper plate 20 and bearing 21a, framework 25 chimeric, when supplying cooling medium to framework 25 in this condition, the cooling medium supplied supplies to cooling medium path 23 via the cooling medium supply port be formed on the axle 20c of scraper plate 20.
Next, the innoxious operation of the waste gas that the treating apparatus A by forming as described above implements is briefly described.
First, never illustrated fuel gas supply source supply fuel gas, and blower 15, to agitator 13 air supply, simultaneously to combustion-supporting property gas supply nozzle 5 air supply.Now, attract air from the opening 10a of framework 10, form the air stream in arrow a direction.
Monitored the flow of the fuel gas in fuel gas pipe arrangement 14 by flowmeter 14a, monitored the flow of the air supplied to agitator 13 by flowmeter 16a.Further, by monitoring that each flowmeter 14a, 16a operate agitator 13, thus the mixing ratio of fuel metering gas and air supplying to burner 4.In addition, monitor that flowmeter 17a supplies the air of ormal weight to combustion-supporting property gas supply nozzle 5.
As mentioned above, supply the mist of fuel gas and air from burner 4 to combustion chamber 1, and from combustion-supporting property gas supply nozzle 5 to combustion chamber 1 air supply.Further, by lighting a fire to burner 4, thus flame is formed in combustion chamber 1.This flame circles round counterclockwise as shown in Figure 2 and burns.
Make the water scrubber work be connected with aiutage 2, thus act on the attraction of this water scrubber.Be accompanied by this, have negative pressure in aiutage 2, combustion chamber 1 and framework 10 effect, as shown in Figure 1, attract a large amount of air from the opening 10a of framework 10, this air, along the flowing of arrow a direction, flows from the lower end 2a of aiutage 2 along arrow b direction.By a large amount of air stream produced in the inside of framework 10, to be configured in this framework 10 inside comprise combustion chamber 1, aiutage 2, air blast 15 equipment cool.
In addition, by acting on the negative pressure of aiutage 2 and produce the flowing in arrow c direction in combustion chamber 1, the attraction produced with this flowing acts on not shown waste gas via waste gas ingress pipe 11 and generates source, thus supplies waste gas from waste gas supply port 3 to combustion chamber 1.The waste gas being supplied to combustion chamber 1 becomes high temperature by the flame making burner 4 light a fire to produce, and combustible component burns, and resolving under high temperature point is decomposed.
When the waste gas being supplied to combustion chamber 1 comprises combusting component, by supplying the oxygen needed for burning from the air of combustion-supporting property gas supply nozzle 5 supply, promote the burning of waste gas.Like this, the combusting component comprised in waste gas mixes with the air supplied from combustion-supporting property gas supply nozzle 5 and can roughly fully burn, and can realize innoxious by what burn and carry out.
In addition, in the inside of combustion chamber 1, carry out the burning of the combusting component comprised in the flame of burner 4 and waste gas, therefore simultaneously, the internal temperature of this combustion chamber 1 can keep sufficient high-temperature area, and the decomposition composition in the high-temperature area that comprises in waste gas can be made reliably to decompose.
Internal-combustion as described above in combustion chamber 1 or at high temperature decompose and innoxious after innoxious gas be attracted by acting on the attraction of aiutage 2, discharge along arrow d direction towards not shown water scrubber.
As mentioned above, by via combustion-supporting property gas supply nozzle 5 to combustion chamber 1 air supply, even comprise the waste gas of combustible component, also can reliably to burn and innoxious.In addition, owing to carrying out the burning of the combusting component comprised in waste gas while the flame forming burner 4, therefore, it is possible to the internal temperature of combustion chamber 1 is remained high-temperature area, even the composition decomposed under the high temperature comprised in waste gas, also can reliably decompose.Therefore, it is possible to make the waste gas burning or the thermal decomposition that are supplied to combustion chamber 1, thus innoxious.
In addition, the major part of the Dust comprised in waste gas falls in the process of combustion chamber 1 combustion, decomposition at waste gas, and this dust is struck off from the inner surface of combustion chamber 1 by the scraper component 20a of scraper plate 20, flows to aiutage 2, discharges along arrow d direction.
Industrial utilizability
The treating apparatus of waste gas of the present invention being used in the waste gas of discharging the manufacturing process from semiconductor, the waste gas of being discharged by the manufacturing process of liquid crystal panel is useful when carrying out innoxious.
Description of reference numerals:
A treating apparatus
1 combustion chamber
1a, 1b end
1c, 1d cylindrical shell
1e flange
2 aiutages
2a, 2b end
3 waste gas supply ports
3a pipe joint
3b flange
4 burners
4a, 5a installation component
5 combustion-supporting property gas supply nozzles
10 frameworks
10a opening
11 waste gas ingress pipes
11a end
12 mist pipe arrangements
13 agitators
14 fuel gas pipe arrangements
14a, 16a, 17a flowmeter
15 air blasts
16,17 air line
20 scraper plates
20a scraper component
20a1,20a2 bar
20b supporting member
20c axle
20d stiffener
20e inclined-plane
21 bearing components
21a bearing
22 drive units
22a motor
22b chain
22c sprocket wheel
23 cooling medium paths
23a opening
23b jet
24 brackets
25 frameworks
Claims (4)
1. a treating apparatus for waste gas, is characterized in that, has:
Combustion chamber, an end of this combustion chamber, by shutoff, makes supplied waste gas burning or decomposition and innoxious;
Aiutage, it is connected with another end of described combustion chamber, is discharged by the waste gas after innoxious in this combustion chamber; And
Framework, it receives described combustion chamber and aiutage,
In described combustion chamber, the waste gas supply port supplying and need innoxious waste gas is being provided with by an end side of shutoff, and leaning on the position of aiutage side to be provided with burner than this waste gas supply port, in addition, between this burner and waste gas supply port or than this burner, the position of aiutage side is leaned on to be provided with the combustion-supporting property gas supply nozzle supplying combustion-supporting property gas.
2. the treating apparatus of waste gas according to claim 1, is characterized in that,
Around described combustion chamber, be configured with multiple burner, and be configured with multiple combustion-supporting property gas supply nozzle.
3. the treating apparatus of waste gas according to claim 1 and 2, is characterized in that,
The multiple burners being configured in the surrounding of described combustion chamber relative to this combustion chamber inclined configure, and multiple combustion-supporting property gas supply nozzle also relative to combustion chamber inclined configure.
4. the treating apparatus of waste gas according to any one of claim 1 to 3, is characterized in that,
Scraper plate is configured with, the axle that the end being configured to that this scraper plate has this combustion chamber through can rotate and to be installed on this axle and to strike off the scraper component of the attachment of the inner surface attachment in described combustion chamber in described combustion chamber.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-137931 | 2013-07-01 | ||
| JP2013137931A JP2015010800A (en) | 2013-07-01 | 2013-07-01 | Exhaust gas treatment device |
| PCT/JP2014/067437 WO2015002149A1 (en) | 2013-07-01 | 2014-06-30 | Exhaust gas treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105358911A true CN105358911A (en) | 2016-02-24 |
| CN105358911B CN105358911B (en) | 2018-02-13 |
Family
ID=52143724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480037729.4A Active CN105358911B (en) | 2013-07-01 | 2014-06-30 | The processing unit of waste gas |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2015010800A (en) |
| KR (1) | KR20160028459A (en) |
| CN (1) | CN105358911B (en) |
| WO (1) | WO2015002149A1 (en) |
Cited By (3)
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| CN110392596A (en) * | 2017-02-10 | 2019-10-29 | Eim研发有限公司 | The method and apparatus destroyed for gas |
| CN110465156A (en) * | 2018-05-09 | 2019-11-19 | 伊利诺斯工具制品有限公司 | Waste gas filter for reflow soldering |
| CN113091074A (en) * | 2021-04-01 | 2021-07-09 | 北京北方华创微电子装备有限公司 | Combustible gas processing device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220017469A (en) | 2019-11-21 | 2022-02-11 | 에코시스 피티이.엘티디. | gaseous pollutant treatment equipment |
| GB2613012A (en) * | 2021-11-22 | 2023-05-24 | Edwards Ltd | Abatement apparatus scraper cages |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2015002149A1 (en) | 2015-01-08 |
| JP2015010800A (en) | 2015-01-19 |
| CN105358911B (en) | 2018-02-13 |
| KR20160028459A (en) | 2016-03-11 |
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