TWI333431B - Liquid material applying apparatus - Google Patents

Description

1333431 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a coating apparatus for applying a fluid material to a substrate. [Prior Art] It is known to develop an organic EL display device using an organic EL (Electro Luminescence) material, for example, when manufacturing a main-matrix driving type organic EL display device using a polymer organic EL material. "Substrate"), in order to form a TFT (Thin Film circuit, iT0 (Indiura Tin idexide) electrode-shaped b partition wall as an anode, and a fluid material containing a positive hole transport material (hereinafter referred to as "a positive hole") The transport liquid ") is formed by a heat treatment to form a positive hole transport layer, a fluid material containing an organic EL material (hereinafter referred to as "organic liquid sputum"), an organic layer by heat treatment, a cathode, and an insulating film. In the case of manufacturing an organic EL display device, one of the devices for applying a positive hole transport liquid or an organic liquid liquid to a substrate is known, for example, in Japanese Patent Laid-Open Publication No. 2002-75640 (Document No.) and Japanese Patent Laid-Open 2 〇〇 3_ι〇755 (Document 2) discloses that a plurality of nozzles continuously ejecting a fluid material are directed toward a main scanning direction and a sub-scanning direction with respect to a substrate For moving, the fluid material is applied as a stripe device in the coating area on the substrate. The devices of Documents 1 and 2 will contain red (R), green (G), and blue (B), respectively. Three kinds of organic sputum of three kinds of organic EL materials, which are mutually different colors, are discharged from three nozzles and applied to the coating field on the substrate. 3 UXP/Invention Manual (Supplement)/97- 01/96139447 6 丄 431, which is formed in three ditches between the partition walls. In this device, three nozzle members are held in a body-like manner, and the member is held on the substrate with a vertical axis. The gap between the three nozzles in the sub-scanning direction is reduced, thereby reducing the coating pitch of the organic EL liquid. (4) "The confirmation of the nozzle cloth result by the manual operation of the operator is also directly visually applied by the operator. 'Ding, because it is difficult to adjust the pitch with high precision, it is adjusted; it takes a lot of work time and labor. In addition, when the nozzle spacing is 4 (four) due to factors such as nozzle pairing == loading error and nozzle manufacturing error, it is necessary to Adjust the spacing to make it even, but in [, =, and The present invention relates to an adjustment mechanism for uniformizing the pitch. The present invention is directed to coating a fluid core on a substrate with high precision (IV) between the coating and the filling chamber. (4) == provided with a substrate holding portion for holding the substrate, and The fluidity is continuously discharged toward the substrate, and the plurality of nozzles are scanned in the main scanning direction. The plurality of nozzles are moved relative to the substrate, and the sub-scanning mechanism is i-flat. The primary surface of the main surface and perpendicular to the main sweeping direction: two: the plurality of nozzles of the substrate and the nozzle in the direction of the scanning, and the spacing adjustment mechanism, which will be all the other plurals The movable nozzle is adjusted on the above-mentioned sub-scanning side by the upper or the second movement;:: 312XP/invention specification (supplement)/97-01/96139447 7 between the two adjacent nozzles The distance between the above-mentioned sub-scanning side:: two nozzles; the nozzle abutting portion, the elastic mechanism, which abuts the movable nozzles from the upper side and the pH side; the nozzle has the other direction from the above-mentioned field One side, f+ μ, +, 々 The nozzles are provided with the elastic force of the nozzle splicing portion W to the respective movable structures, and the nozzles are abutted against the cymbal; and the abutting portion moves the nozzle, and the fourth movable position that imparts an elastic force to the nozzle is: In the sub-scanning direction, according to the present invention, the pitch t of the plurality of nozzles can be adjusted with high precision. In the preferred embodiment, the elastic force applied by the nozzle elastic machine === is 1 and the sub-scanning The position of each of the four movable nozzles of the square β is independent of the pitch of the plurality of nozzles. In the preferred embodiment of the present invention, the main scanning mechanism and the sub-scanning mechanism are configured to move the plurality of nozzles and the nozzle mounting portion independently of the pitch adjusting mechanism. Thereby, the portion moved by the main scanning mechanism disk sub-scanning mechanism can be miniaturized. Further, in another embodiment of the invention, the pitch adjusting mechanism further includes a mounting portion fixing mechanism that fixes the nozzle mounting portion. Thereby, the pitch of the plurality of nozzles can be adjusted with higher precision. The above and other objects, features, aspects and advantages of the invention will be apparent from [Embodiment] Fig. 1 is a plan view showing a structure of a coating apparatus 1 according to a first embodiment of the present invention. The coating apparatus 1 is a device for coating a fluid material of a halogen-forming material on a glass substrate for a flat display device (hereinafter referred to as "substrate") 9 and a coating material of 312XP/invention specification (supplement)/97·01/96139447 8 . In the tenth embodiment, u and the first substrate are formed on the substrate 9 of the active matrix-driven organic EL (Electr®: Display) display device (hereinafter referred to as "the right 1 L material and the solvent (for example, mesitylene). The liquid material is called "organic EL liquid". ST is applied, and the coating apparatus 1 is provided with a substrate holding mechanism for holding the substrate 9 (heating using a heater inside the non-plate holding portion 11 is not shown). Further, as shown in FIGS. 1 and 2, the coating apparatus 1 has a main surface mechanism 12 that sweeps the substrate holding portion 11 in a predetermined direction with respect to the substrate 9 (that is, the Y direction in FIG. 1, hereinafter referred to as "sub-axis". The upper water moves 'and rotates centering on the axis in the vertical direction (ie, the Ζ direction); the alignment mark detecting portion 13 photographs and detects the alignment mark formed on the US board 9, and detects and detects In the base of the 柘 柘 i i main η 铩 7 half 铩. The coating head 14 is attached to the substrate 9 on the alumina L π ,, and the organic flying and β-out mechanism are continuously discharged from the four nozzles 17; the main surface of the coating head moving machine 9 is perpendicular to s , 丨 & > + 丄 在 in ten on the substrate

The X direction of the direction: the square "to the main broadcast: the direction (ie, in Figure 1, perpendicular to the Y liquid receiving portions 16' is set relative to the main scanning direction; the soil plate remains on the two sides of the raft, accepting the dispute The coating is loaded with the 〗 击 筏 and the organic hoe from the coating head 14 "4 nozzles more;; = door flow ^ material supply, which controls the construction of the same The control unit and the control unit are the same as the normal computer, and are executed by the program executed by the various calculation units CP1U'lt and become the operation area of the arithmetic processing 312XP/invention specification (supplement)/97_〇1 /96U9447 9 RAM, § Reminiscent of the basic program p for the operator to display a variety of resources = (four) various information on the fixed disk, isophase connection. Figure 3 shows: and the keyboard, mouse and other rounds The program executes the functions realized by the CPU of the control unit 2 in accordance with the processing of ms 3 以及 and the functions of the block = P, etc. of other structures: detection unit =: 4. In addition, the functions can also be The number two =: head: 4: straight ^, φ ή, v) are arranged in a straight line, and some micro-offset maps Zheng 2 go to the ha ^ Configured in the secondary scanning direction). In the present embodiment, the distance between the nozzles 17 in the sub-scanning direction is adjusted to be equal to the coating area 91 (the distance between the partition walls extending in the main scanning direction by the dotted line in Fig. 1) (3 times the distance between the partition walls). The distance between the nozzles 17 will be described later. Fig. 4 and Fig. 5 are front and top views, respectively, of the coating head 14. Fig. 4 and Fig. 5 The coating head 14 is provided with four nozzles that continuously discharge the organic liquid toward the substrate 9 (see FIG. 1) (hereinafter, when the * nozzles are respectively described, the "-X" side is sequentially referred to as "the first The nozzles 17a", "second nozzles! 7b", "third nozzles 17c", and "fourth nozzles 17d") and the nozzle mounting portion 14 are used to mount the four nozzles. The nozzle mounting portion 141 is provided with The back plate portion 1411 slightly perpendicular to the γ direction and the horizontal portion 1412 fixed at the lower end of the back plate portion 1411 (ie, the end on the (-Z) side) and slightly perpendicular to the z direction. At the horizontal portion 1412 of the nozzle mounting portion 141 Upper side is formed from (_γ) side 312ΧΡ/invention specification (supplement)/97-01/96139447 丄 edge toward (+Y) direction (ie, sub-sweeping side In the extended guide 142, the second nozzle 17b and the fourth nozzle nd are respectively attached to the three guide grooves 142. The first nozzle 17&, the nozzle m, and the fourth nozzle 17d are respectively provided with a slightly cylindrical nozzle body m for discharging a liquid discharge from the front end, and a plate-shaped slider 172 vertically mounted on the nozzle body. The slider 172 is intended to be held by a slider provided in the guide groove 142 of the nozzle 141. The portion 143 is movable along the guide groove 142. Accordingly, in the coating head 14, the i-th nozzle (7) spray f 17b and the fourth nozzle 17d are formed as movable nozzles that are movable in the sub-scanning direction. On the (-X) side of the first nozzle 17a, a nozzle lock portion 173a' that locks the position of the first nozzle 17 of the slider 172 with respect to the nozzle attachment portion 141 is provided, and is provided on the (one) side of the first nozzle 17a. The slider 172 of the nozzle 17a is guided from the guide groove 142. The nozzle lock portion 173a is provided with a fixing member which is abutted on the upper surface of the slider 172 (i.e., the main surface on the (+z) side) when the position of the slider m is locked, and the pressing portion 1732 by being fixed The member 1731 is pressed toward the slider 172, and the slider 172 is biased toward the slider holding portion 143 of the nozzle mounting portion 141. Fig. 6 is an enlarged left side view showing the vicinity of the nozzle lock portion 17 3 a. In Fig. 6, 'the drawing is easy to understand, and the first nozzle 17a located on the depth side of the nozzle locking portion i73a is omitted. As shown in FIG. 5 and FIG. 6, the plunger 1413' protruding from the back plate portion 1411 toward the (_¥) direction is fixed to the back plate portion 1411 of the nozzle mounting portion 141, and the plunger 1413 is closed (-Y). The front end of the side abuts the 312XP/invention specification (supplement)/97-Gl touch 139447 11 on the fixing member 1731. In the wide view 6, the fixed member mi is provided with a side surface on the (9) side, a substantially rectangular parallelepiped fixing member body 1733 to which the plunger 1413 is attached, and a side on the (_γ) side of the solid body member 1733. The 17f housing part protruding toward the (1) side is 1734 °. In addition, the 'fixing member mi is located below the fixed member body 3 (ie, the side of the Λ (_z) side), and is disposed adjacent to the column soil 1413 and away from the column. The first protrusion 1735 and the second protrusion 1736 of the portion of the plug 1413 (that is, the (+γ) side 盥 (?) Lu side). As shown in FIGS. 4 to 6 , the second projection 1736 is a linear projection that extends slightly parallel to the guide groove 142 (see FIG. 5 ) above the slider 172 (see FIG. 4 ) of the j-th nozzle 17 a. The i-th protrusion 1735 is located away from the first in the ^ direction under the fixing member body 1733! The point where the nozzle 17a is located (ie, the side of the (_χ) side) is a point-like protrusion that is slanted. The lower end portion of the j-th projection portion 35 is slightly separated from the upper surface of the horizontal portion 1412 of the nozzle mounting portion 141. The holding portion 1732 is provided with two bolts 1737 that penetrate the fixing member main body 1733 of the fixed member 1731 in two directions, and are fixed to the horizontal portion 1412 of the nozzle mounting portion 141; and two elastic members 1 738 (this embodiment) In the form of a coil spring, they are respectively disposed between the respective heads of the two bolts 1737 and the upper surface of the fixed member body 1 733. The bolt 1737 is inserted into the through hole formed in the fixed member body 1733, and the outer side surface of the bolt 丨 737 is separated from the inner side surface of the through hole. In the nozzle lock portion 173a, the fixing member 1731 is pressed toward the slider 172 (see FIG. 4) of the first nozzle i7a by the elastic member 1738 in a compressed state. Thereby, the second protrusion 1 736 of the fixing member 1731 abuts on the upper side of the horizontal portion 1412 of the nozzle mounting portion 141 on the z-side 312XP/invention specification (supplement)/97-01/96139447 12 1333431 2 At the position of the slider 172 at the four positions, by the elastic force acting on the slider holding portion 143 (refer to FIG. 4) on the slider m, the position of the slider 172 to the nozzle mounting P 141 is locked (ie, the first nozzle 17a is opposed to The nozzle mouth is fixed.) In the nozzle description portion 173a, the housing portion 1734 of the solid member (4) is lifted in the (10) direction, and the fixing member 1731 is in contact with the front end portion of the plunger 1413 as indicated by the two-dot chain line in FIG. For the fulcrum: the slight elastic slope of the upper elastic ore. Accordingly, the fixing member 1731 is inclined toward the direction away from the slider 172 by the fulcrum which is in contact with the nozzle mounting portion 141 (the plunger 1413). The fixing 2 projection (10) is separated from the slider (7), and the slider 172 is released. Bit = fixed. In the nozzle portion ma, the μ member 1731 may be slightly inclined toward the (-Χ) side in the state of the slider 172, but the first projection portion abuts against the horizontal portion 1412 of the nozzle mounting portion 141 to prevent the fixing 1731. Excessive tilting. As shown in FIG. 4 and FIG. 5, in the coating head 14, the nozzle locking portions 173b and 173d having the same structure as the nozzle locking portion 173a are provided on the (9) side of the fourth nozzle claw 盥 fourth nozzle i7d, respectively, and In the first nozzle 17b and the fourth nozzle 17 (the #5 side of the first nozzle 17), a guide squeegee 14 is provided, and the nozzle lock portions 173a and 17 are released, and 17% of the first nozzles i7a and the second nozzle are released. The relative state of each of the 17b and the fourth nozzles m, the three movable nozzles are respectively movable toward the sub-scanning direction. 312XP/Invention Manual (supplement)/97_〇1/96] 39447 13 1333431 141 From the third nozzle] 7c is immovably fixed to the mouth and mouth #•=:=. In other words, ....17a, 2 W 7 all nozzles, that is, the mouthpiece (the first nozzle mouth Anmai (4) 1ΓΓ The fourth nozzle 17d)' is attached so as to be movable toward the sub-sweeping direction with respect to the 嗔miM41. When the nozzle position is adjusted as described later, the position of the other three movable nozzles is adjusted by the third spray coating device reference. C is set as the coating device 丨t, and the four nozzles 17 are in the state of solid two: according to FIG. 4 and FIG. 5), and are moved:: = continuously discharged in the coating head 14 In the case of the EL liquid, the movement is shifted to the direction of the drawing. The f (four) head 14 is directed toward the main scanning: the substrate 9 is moved toward the sub-scanning side by the substrate moving mechanism 12. Then, the substrate 9 is repeated by the nozzle 17 toward ==::T. The substrate 9 is coated with two: = 2 "The moving mechanism 15 and the substrate moving mechanism 12 respectively become the main scanning ridges and the sub-movements that move the four nozzles 17 and the nozzle mounting portion 141 in the sub-scanning direction, respectively. As shown in Fig. 2, the coating * is further provided with a pitch adjusting mechanism 3' for respectively moving the plurality of movable nozzles (i.e., the first nozzle 17a, the second nozzle Hb, and the fourth nozzle 17d) in the sub-scanning direction Moving, adjusting the distance between two nozzles adjacent to each other in the sub-scanning direction (hereinafter referred to as "inter-nozzle distance"); the nozzle position detecting portion 4 detecting the position of the nozzle 17 in the sub-scanning direction; and locking The operating mechanism 5, which is operated by the operating nozzle 312XP/invention specification (supplement)/97·〇ι/96139447 14 1333431', performs the release of the slider (7) portion 2 of the movable nozzle; FIG. 3 shows the control mechanism of the "pitch adjustment mechanism locking portion" in the control coating device 1. 5 and the coating head 14 ^ is set to be happy. 134 and the other 6 are placed on the coating head 14 "5) the nozzle nozzle 17 and the nozzle mounting portion 141 (refer to FIG. 4 =), by the coating head moving mechanism 15 and the substrate moving machine (four), the unique structure 5 2 The adjustment mechanism 3, the nozzle position detecting unit 4, and the locking portion operating mechanism 5 are moved. In other words, the pitch adjusting mechanism 3, the nozzle position 4, and the locking portion operating mechanism 5 are disposed independently of the coating head 14 by the (four) 1 moving mechanism 15 The relative movement of the substrate moving mechanism 12 with respect to the substrate 9. The nozzle position detecting unit 4 is provided with an optical system 41 disposed on the (+ζ) side of the plurality of nozzles 17 as shown in Fig. 2, and is used for The plurality of nozzles 17 and the imaging unit 42 (in the present embodiment, a CCD (Char Located Device) camera) are observed, and the image of the plurality of nozzles 17 is sequentially acquired by the optical system 41. In the present embodiment, the imaging unit is used. 42 is on the upper surface of the slider 172 of the i-movable nozzle (that is, one of the first nozzle 17a, the second nozzle 17b, and the fourth nozzle I7d) and the horizontal portion 1412 of the nozzle mounting portion 141 (refer to FIGS. 4 and 5). Above, the portion near the slider 172 is photographed. Then, the control unit 2 is utilized. The pitch detecting unit 21 (see FIG. 3) obtains the positional relationship between the three sets of movable nozzles acquired by the imaging unit 42 based on the positional relationship between the sliders 72 and the horizontal portion 1412. 312XP/Invention Manual (Supplement)/97-01/96139447 15 1333431 The distance between the nozzles of the movable nozzles relative to the nozzle mounting portion 141. In addition, the coating device j detects 172 and the horizontal portion 1412. It is not necessary to set the movable nozzle to the position of the movable nozzle from the positional relationship of the contour of the guide groove 142 of the slider Π2 or the guide groove 142 of the horizontal portion 1412. According to the characteristic dry lock: the left side view of the operating mechanism 5. Fig. 7 and Fig. = a part of the mouth mounting portion 141 of the first two, and the nozzle lock 3a. As shown in Fig. 7, the locking portion operating mechanism 5 is provided with: In Fig. 7, the air pressure red 52 which advances and retreats in the γ direction, and the second = the rotary arm which is attached to the front end of the link 51 #(8) side, the rotation #53 is at the end opposite to the link 51, to be in the pillar Η The rotating shaft 55 is centrally rotatably mounted on the post 54. The locking portion operating machine 5, the link 51 of the air pressure red 52 is moved to the side, and the rotary arm 53 is rotated about the rotation axis 55, and is rotated to a predetermined angle in the hour hand direction in FIG. 7, and moved to the position shown by the two-dot chain line. In this way, the releasing portion 56' provided at the end portion of the rotating arm 53 on the side of the stay 54 abuts on the (-Z) side of the fixing member Π 31 of the nozzle locking portion n3a, and the house is fixed. Zhan's η% is in the direction of (4)). As shown by the two-dot chain line in Fig. 7, the female solid member 1731 is inclined at a contact point with the tip end portion of the plunger 1413, and the fixing member Π 31 is separated from the first! The slider 172 of the nozzle 17a (see Figs. 4 and 5) releases the locked state of the slider 172. Further, in the lock portion operation mechanism 5, the link Η of the pneumatic cylinder 52 is moved toward the (-Υ) side, and the rotary arm 53 is separated from the nozzle lock portion by 17% of the solid 312XP/invention specification (supplement)/ 97·01/96139447 16 1333431 Set the member 173 and return to the original position. Thereby, the fixing member i73i is pushed in the (-2) direction by the pressing portion 1732, and the slider 172 is given an elastic force toward the horizontal portion 1412 of the "nozzle mounting portion 141". As a result, the position of the slider 172 of the i-th nozzle, Ha is locked again with respect to the position of the nozzle mounting portion 141. In the coating device 1, the coating head 14 is moved in the main scanning direction by the coating head moving mechanism 15 shown in FIGS. i and 2, so that the i-movable nozzle (ie, the first shown in FIG. 4 and FIG. 5) The nozzle 17a, the second nozzle m, and the nozzle No. 17d are located on the (+Y) side of the releasing portion 56 (see FIG. 7) of the lock portion operating mechanism 5, and in this state, As described above, the lock mechanism operating mechanism 5 is driven to unlock or lock the nozzle: the nozzle. 』Actions Fig. 8 and Fig. 9 show the pitch adjustment mechanism 3 and the coating head 14 respectively: a plan view and a left side view. Only the portion - of the coating head 4 is shown in Fig. 8 as being easy to understand for the drawing. The spraying shown in Figs. 4 and 5 is omitted: the locking portion 173a and the guide 144. In Fig. 9, in order to facilitate the drawing, the nozzle mounting portion 141 and a part of the first nozzle 17a are represented by a cross section of the central axis of the first nozzle 17a, and the figure shown in Fig. 8 is shown! The first abutting portion 3111 on the side of the solid (=X) is omitted, as shown in Fig. 8 and Fig. 9, and the pitch adjusting mechanism 3 is provided with an ancient body of the ampoule 3, from the (+γ) side and the (_γ) side (that is, the sub-scanning direction 1/2 is fixed to the horizontal portion 1412 of the nozzle mounting portion 141, and the nozzle abutting portion 9f 141, the nozzle abutting portion 3 2 is removed from The (_γ) side (i.e., the side in the sub-scanning direction) abuts against the first nozzle 17a, and the nozzle elastic mechanism 33 is located from the opposite side of the nozzle portion 32 (i.e., the first nozzle 17a (+1〇 side, That is, the 312XP/invention specification (supplement)/97-01/96139447 \n 1333431 on the other side), the nozzle 17a is given to the nozzle abutting portion 32. The elastic nozzle 11a is abutted: Mouth: The machine adjusts its position in the sub-scanning direction. The mounting portion of the solid structure 31 is provided on the (]) side of the coating head 14: 141 1412 ^ ^ ^ The first of the first fixing portion 311 The branch portion 312 and the second fixed portion 311 that moves in the sub-scanning direction are provided with two == portions 3 (1) arranged in the main scanning direction, and the two second abutting portions in the main scanning direction Stomach 'will (four) arrived The portion 32 and the abutting portion moving mechanism 3 are on the first supporting portion 312. In the women's clothing, the mounting portion fixing mechanism 31 has a coating head that is abutted against the nozzle mounting portion 141 = 3H^2 by the (9) side; 42315 The fixing portion 314 includes two poisonous second abutting portions 3 (4) arranged in the main scanning direction, and between the two second abutting portions 314 in the main scanning direction, a connecting rod of the nozzle elastic mechanism 33 to be described later is provided. The 331 and the second 332 are attached to the second support portion 315. The rainbow/portion moving mechanism 34 is provided with a side surface on the (-Υ) side of the slider 172 of the micrometer 34 that abuts the nozzle 17a, and the joint portion 32 And a stepping motor 343 connected to the disc = meter 341 via a consumable. The nozzle elastic mechanism 33 is provided with: a link 33; 312XP / invention manual (supplement) / 97-01/96139447 18 1333431

The through hole formed in the back plate portion 1411 of the nozzle mounting portion 141 abuts against the side surface of the first nozzle 17a on the (+γ) side of the slider 172; the pneumatic cylinder 332' slides the link 331 The member 172 is pressed; and the regulator 3 is connected to the pneumatic cylinder 332 and controls the pressure in the pneumatic cylinder 332. In the pitch adjustment mechanism 3, the adjustment mechanism control unit 22 (see FIG. 3, FIG. 3) of the control unit 2 drives the first movement mechanism gig and the second movement mechanism 316' of the attachment portion fixing mechanism 31 to thereby the first support portion 312. Moving in the (+γ) direction, the second branch portion 315 is moved in the (-γ) direction. Thereby, the first fixing portion 3-11 and the second fixing portion 314 are respectively from the (_γ) side and (+γ). The side abuts against the horizontal portion 1412 of the nozzle attachment portion 141, and the nozzle attachment portion 141 is sandwiched and fixed by the second, fixed portion 311 and the second fixed portion 314. The pitch adjustment mechanism 3 is fixed at the nozzle attachment portion 141. In the state, the adjustment mechanism control unit 22 drives the motor 343 of the abutting portion moving mechanism 34 and the pneumatic cylinder 332 of the nozzle elastic mechanism 33, and the nozzle abutting portion 32 and the link 331 of the nozzle elastic mechanism 33 are respectively The (_γ) side and the (+Υ) side are in contact with the i-th nozzle 17a. Then, the abutting portion moving mechanism 3: moves the nozzle abutting portion 32 in the (+γ) direction, whereby the second nozzle 17& By the nozzle elastic mechanism 33, the nozzle abutting portion 32 is given an elastic force to move in the '+Y direction'. ": Temple 1 mouth elastic mechanism - The force of the ___ force and the link 331 are maintained by the adjuster 333 regardless of the relative position of the pneumatic cylinder 332, so that the elastic force applied to the first nozzle 17a by the nozzle elastic mechanism 33 is also The first nozzle 1 in the scanning direction. The position is irrelevant, and the status is determined. In addition, the first (fourth) 17a 3 invention manual (supplement)/97-01/96139447 13J3431 is moved, and the first predetermined condition is released. The lock of the nozzle lock portion 173a (see Figs. 4 to 6) is set to "2" to position the nozzle abutting portion 32 from the predetermined movement start position. 10,000 - 1st spray 2 7 = move ', adjust the position of the first nozzle 173 觜 17a to move to a more desired position == abutment portion 32 to return to the movement start position = = 32 back to the second adjustment The position of the mouth (4) is close to the elastic machine. When the starting position is raised, the first nozzle ❿ is also biased by the nozzle elastic machine 3 to the nozzle abutting portion 32, and moves in the phase (9) direction. Accordingly, it is possible to prevent the application of the coating device i shown in FIG. 2 by the application of the coating head moving mechanism by only the second nozzle Η: 背二==: The head 14 moves in the main scanning direction, so that the movable nozzle (that is, any one of the i-th nozzle m, the second nozzle nb, and the fourth nozzle_head 17d shown in FIG. 4 and FIG. 5) is located at the nozzle abutting portion. Between the nozzle and the nozzle elastic mechanism 33, and in this state, as described above, the one movable nozzle is adjusted in the sub-scan by driving the mounting portion fixing mechanism 31, the nozzle elastic mechanism 33, and the abutting portion moving mechanism 34. The position in the direction. The positional adjustment of the three movable nozzles (that is, the adjustment of the distance between the nozzles) is based on the images detected by the nozzle unit position detecting unit 4 by the imaging unit 42, and the nozzles detected by the distance detecting unit 21 between the control units 2 The distance between the two (i.e., based on the detection result of the pitch detecting unit 21), the adjustment mechanism control unit 22 controls the abutting portion moving mechanism of the pitch adjusting mechanism 3, and the 312XP/invention specification (supplement)/97-01/96139447 Implementation. Next, the adjustment process of the coating device 1 will be described. *妒_ First, use the singularity of sβI. When the nozzle spacing is withered, the first. , the cloth head moving mechanism 15' moves the Tuwei head 14 to the position indicated by the two-point chain line on the sin (10) side of the disk diagram 2, so that the first nozzle = (refer to FIG. 4 and FIG. 5) is located below the nozzle position detecting core, and The position between the nozzle abutting portion 32 and the nozzle elastic machine 槿 "镅敕μ:: mechanism 3 (hereinafter referred to as the second movable nozzle ❻ nozzle 17^ 173b, 173d (refer to Fig. 4 盥, 〇, The oil is fixed on the bear. As shown in Fig. 5), the nozzle attachment portion 141 is fixed, and the (four) portion 2 (four) nozzle position 42 is prepared, and the horizontal portion of the first nozzle jet portion (4) is imaged and the acquired image is transmitted. The pitch detecting unit of the control unit 2 refers to FIG. 3). The coating device is sequentially moved to the adjustment position by the coating head moving mechanism 15^the fourth nozzle 17d, and each nozzle π is sequentially photographed to acquire an image. The acquired image is transmitted to the pitch detecting unit 21. The pitch detecting unit 21 detects the relative position of each movable nozzle with respect to the nozzle mounting portion 141 based on the images of the three (four) nozzles, and obtains the i-th nozzle core based on the relative position ' The second nozzle claw and the fourth nozzle i?d are respectively associated with the third nozzle He (refer to Figs. 4 and 5) in the secondary sweep The distance between the drawing directions and the control unit 2 is set to be equal to three times the distance between the partition walls in the present embodiment, as described above, hereinafter referred to as "head 312XP / invention manual (supplement) / 97 -01/96139447 1333431 “=mouth spacing”), confirm whether the position of the nozzle must be adjusted. When the distance between the first nozzle 17a and the third nozzle 17c is equal to twice the target nozzle = distance ', and the distance between the second nozzle m and the fourth nozzle 17d and the third = 3 is equal to the target nozzle pitch, it is determined that it is unnecessary. Adjust the position of the squealing and end the adjustment of the nozzle spacing. On the other hand, if it is determined that the nozzle position needs to be adjusted, the third nozzle 17c is used as the reference = the portion 21 is determined based on the distance between the nozzles as described above. The amount by which the nozzle 17a, the second nozzle 17b, and the fourth nozzle ^ are moved in the sub-f drawing direction (hereinafter referred to as "movement amount"). Specifically, "the amount of movement of the first nozzle 17a is such that the first! The distance between the nozzles 17 and 17c is equal to twice the target nozzle pitch, and the amount of movement of the first nozzles 17b and the fourth nozzles I7d is such that the nozzles (7) of the second nozzles 4 and the third nozzles are respectively The distance is equal to the target = distance. Hereinafter, the positions of all the nozzles of the three movable nozzles (i.e., the i-th nozzle 2: ^ 2 nozzle 17b and the fourth nozzle 17d) will be described. After the shoulder movement adjustment is performed, the movement amount of the three movable nozzles is obtained, and the first nozzle 17a is moved to the adjustment position by the coating 15. Next, by the control, ==? (refer to Fig. 3), the second and second moving mechanisms 316 are controlled by the mounting and twisting mechanism 31 (see Figs. 8 and 9) t of the pitch adjusting mechanism 3, and fixed by 帛1. The 3U fish second fixing portion 314 abuts against the nozzle second fixing portion 1412 from the (-Y) side and the (+ γ) side, and fixes the nozzle mounting portion 141. Second, the control unit 2 drives the lock operation mechanism 5 (refer to FIG. 7), 312ΧΡ/invention specification (supplement)/97·〇ι/96ΐ39447 22^33431:=nozzle lock portion to the second nozzle% , ::: Moves in the scan direction. Then, the stepping motor of the abutting portion moving mechanism 34, such as the nozzle 17a, is controlled by the adjusting mechanism 22 to impart a spring force to the nozzle abutting portion 32 by the nozzle elastic device. The amount of movement obtained by the portion 21 is shifted toward the movement. 4 1 nozzle Ha is facing the sub-sweeping - the part operating mechanism 5 is driven again, and = wheat: the position of the first nozzle 17a is fixed. 1 The lock 173a locks the lock, and the rear adjusts the mechanism (22) by the adjustment mechanism control unit 22! The moving mechanism 313 and the second moving machine __ and the fourth portion 314 are separated from the 邛 1412 to release the fixing of the nozzle mounting portion 14i. " After the position adjustment of the first nozzle 17a is completed, the second nozzle 17b is moved to the adjustment position at 17 a', and the nozzle fixing mechanism 31 fixes the nozzle attachment portion (4) again. Next: the operating mechanism 5, the mouth nozzle locking portion is sprayed: = two locks, and by the nozzle 抿 pile portion 笫 2 nozzle 17b moving mechanism 34, the first: spray; = = mechanism 33 and the abutment The amount of movement is in the (+Y) square Y in accordance with the mechanism 5 as determined by the pitch detecting unit 21, and is locked by the nozzle: however, the locking portion is again driven. In addition, in the spray installation: two = lock wide nozzle m * portion 141 solid ^. ^ In the mechanism 31, the second nozzle 17b of the nozzle is also released, # and the second nozzle 17b are placed: the second adjustment is made... The fourth nozzle 17d is moved to the adjustment position, 312XP/invention manual (supplement) /97-01/96139447 23 1333431 The fixed nozzle mounting portion (4) is released, and the fourth nozzle nozzle 17d is released from the movement in the (+Y) direction. The fourth nozzle mounting portion (4) is fixedly locked to the fourth nozzle (7) and released. As a result, the coating device 1 t moves in the sub-scanning direction in order to adjust the movement amount by the pitch detection movement by the two-way nozzles other than the third nozzle 17c. In the present embodiment, the pitch is 12 〇. In the coating head 14, since the second nozzles 17a and d: = 4 nozzles 17d are set to be movable individually, the nozzles are wide, and the distance between the second nozzles 17b and the fourth nozzles (7) and the third and second c are respectively. In addition, in the coating device i, (four) of the three movable scanning directions, or the movable nozzles that adjust the nozzle pitch by any one of the movable nozzles may not perform three movable nozzles in the sub-scanning direction. After the movement in the sub-scanning direction is completed, imaging is performed. "2" The three fixed nozzles are sequentially photographed, and the distance between the nozzles is determined by the distance detecting portion 21, and it is confirmed whether the nozzle position has to be adjusted again. When it is determined, when it is determined that the nozzle position does not have to be adjusted again, the process ends. In addition, when it is judged that the nozzle position must be adjusted again, the adjustment of the pitch of the nozzle is performed until the nozzle position is determined that the adjustment of the nozzle pitch has not been adjusted, and the remaining portion is placed and held in the substrate holding portion 11 Then, the alignment mark detecting portion 13 is used to photograph the alignment mark. Then, based on the output of the alignment mark detecting portion 13, the substrate moving machine 3 is driven to the manual (supplement) / 97 to 6139447 24 1333431: The crucible substrate 9 is located at the coating start position shown by the solid line in FIG. 1 , and the cloth head 14 is moved by the coating head moving mechanism 15 .

Next, the fluid material supply portion is controlled and the coating head moving mechanism 15 is simultaneously driven from the mouth r liquid ' = soiling = . In the present embodiment, the moving speed of the coating head 14 is set to about mt', and when the same type of organic EL liquid is continuously discharged from the four nozzles 17 toward the substrate 9, the nozzle 17 is taken from the figure. The (9) side of the i is moved in the (-X) direction (i.e., the main scanning direction), and the organic EL liquid is applied to the four (four) trenches formed in advance on the coating region 91 of the substrate 9. Coating device! The stripe-shaped organic EL liquid applied to the four grooves is arranged in the sub-scanning direction at a pitch equal to three times the pitch of the partition walls. In other words, between the 2° trenches which are adjacent to each other by the application of the organic EL liquid, two trenches which are intended to be coated (or coated) with other kinds of organic EL liquid are sandwiched. The coating head 14 is moved to the upper side of the liquid receiving portion 16 on the (-X) side of the substrate 9 (shown by the two-dot chain line on the (-X) side in FIGS. 1 and 2), and then the substrate moving mechanism 12 is driven. The substrate 9 and the substrate holding portion 11 are moved by a distance of 12 times the pitch of the partition walls in the (+γ) direction in Fig. 1 . At this time, in the coating head 14, the nozzle 17 continuously discharges the organic EL liquid toward the liquid receiving portion 16. After the movement of the substrate 9 in the sub-scanning direction is completed, the coating head 14 is moved from the (-X) side of the substrate 9 to the (+χ) side in a state where the organic EL liquid is discharged from the nozzle 17. In the coating apparatus 1, the main scanning and sub-scanning of the substrate 9 by the high-speed repeating of the four nozzles 17 to the 312XP/invention manual (supplement)/97-01/96139447 25 1333431 of the substrate 9 are then carried out on the substrate 9 In the first item, the organic mash was applied in a stripe shape. At this time, the application of the organic EL liquid from the end of the nozzle 17 t spout = line is not stopped. The machine EL liquid 'ends the base plate 9 into two, and the branch that moves in the nozzle mounting portion 141 is determined to be relative to I. "Two =: can be ::::::::: The spacing on the square t (ie the nozzle spacing). In the B-distance adjusting mechanism 3' for moving the respective drawing directions, the nozzle abutting portion 32 abuts against the movable nozzles from the sub-sweep #喰^ (that is, the side), and the respective two mechanisms 33 are from the sub-scanning direction. The other side (i.e., the (9) side) is separated from this: an elastic force is applied to the nozzle abutting portion 32. Then, in the ",", the nozzle abutting portion 32 is moved toward (+?) by the abutting portion moving mechanism 34, thereby moving the movable nozzles in the sub-scanning direction. The device "is described above" by the nozzle abutting portion and the link 33 of the nozzle elastic mechanism 33 from the moving direction (i.e., the sub-scanning direction) = the movable nozzles are clamped, and the nozzle abutting portions are formed. 32 State in which the elastic force is applied: movement, the amount of movement of each movable nozzle can be controlled with high precision. As a result, the pitch of the plurality of nozzles 17 can be adjusted with both precisions. However, in the organic EL display device, since the distance between the partition walls formed on the substrate is extremely small, when the organic EL liquid is applied to the plurality of groove portions between the partition walls, it is necessary to obtain high positional accuracy. The position of the organic EL liquid to be discharged by the plurality of nozzles. As described above, in the coating apparatus, 312XP/mmmmm/97-0U96139447 26 can adjust the pitch of the plurality of nozzles 17 with high precision, so that the organic EL liquid can be applied to the substrate for the organic EL display device. The force of the alignment f I μ of the nozzle elastic mechanism 33 in the gap adjusting mechanism 3 on the gas is maintained in a state of two phases with the phase of the link coffee 332 with respect to the gas cylinder 332. Regardless of the position in the second pair of drawing directions, the elastic force applied by the nozzle elastic machine and the μ movable nozzles is constant, so that it is necessary to shift the nozzle abutting portion 32 on each movable nozzle such as (4). As a result, since the abutting portion moving mechanism "", 343' can be stably driven, the movement of each movable nozzle can be controlled with higher precision, and the pitch of the plurality of nozzles 17 can be more accurately adjusted. When the position of each movable nozzle in the sub-scanning direction is fixed, the nozzle mounting portion 141 is fixed by the wearing portion fixing mechanism 31, thereby preventing the movement from the abutting portion due to, for example, moving the movable nozzle ^ When the force operating mechanism 5 that is transmitted to the nozzle mounting portion 141 via the movable nozzle locks or unlocks the movable nozzle, an external force such as a force applied to the nozzle is mounted on the nozzle, causing the nozzle to be cleaned. The pitch of the plurality of nozzles 17 is adjusted with high precision. In particular, the i-th fixing portion 311 and the second fixing 4 314 of the mounting portion fixing mechanism 31 are used to sandwich the nozzle from the moving direction of the movable nozzle (i.e., the sub-scanning direction). By attaching the nozzle attachment portion 141 to the attachment portion 141, it is possible to more reliably prevent the nozzle attachment portion 141 from being skewed due to the force applied in the sub-scanning direction of the nozzle attachment portion 141 when the movable nozzle moves. The pitch of the plurality of nozzles 17 can be adjusted with higher precision. 312XP/Invention Manual (Supplement)/97^01/96139447 2η In the pitch adjustment mechanism 3 t, the spray.f I and the mounting portion are solid and the joint is broken. Connect The moving portion of the moving machine moves in the direction of the female machine, and the first fixed portion 311 of the nozzle is moved in the sub-scanning direction, and the nozzle mounting portion 141θ1 is fixed to the second fixing portion 314. The portion fixing mechanism 33 can automatically slant, the nozzle abutting portion % and the nozzle elastic force. Therefore, the nozzle can be omitted from the predetermined relative position of each movable nozzle to the movable nozzle of the adjustment target and the nozzle elastic mechanism 33 opposite to the nozzle In addition, the number of the plurality of mechanisms can be easily adjusted, and the number of the plurality of mechanisms can be easily adjusted, and the coating device 1 simplifies the structure of the various moving devices. The guide groove of each movable portion (4) is mounted on the nozzle and the gate distance of the nozzle 17 in the sub-scanning direction is easily and accurately adjusted. The nozzle body 171 that discharges the plurality of organic EL liquids can be easily and accurately adjusted. There is a slider m that spits T from the other end. Therefore, when the coating device i is being repaired, only the nozzle body 171 of the nozzle is cleaned and easily cleaned. In the device 1, according to the mouth position detection As a result of observing the position of the plurality of nozzles 17 with high precision, the optical system 41 of the unit 4 can adjust the pitch of the plurality of nozzles 17 with higher precision. Further, the pitch detecting unit 2 of the control unit 2 is based on the plurality of jets obtained by the imaging cassette 42. In the image of 胄17, the distance between two nozzles adjacent to each other in the sub-scanning direction is detected, and the pitch of detecting the plurality of nozzles 17 can be shortened in the adjustment operation of the nozzle pitch. 312XP/Invention Manual (Supplement)/97 -01/96139447 28 1333431 The time required. Further, the pitch of the plurality of nozzles 17 can be automatically adjusted by controlling the abutment 34' of the pitch adjusting mechanism 3 by the detecting portion 22 of the pitch detecting portion 21. Moving mechanism In the coating device 1, the position of the movable nozzle is easily locked and unlocked by the locking portion. Further, in the == lock portion, the elastic force of the cow 172 by the pressing portion 1732 to the fixing member i73 f is locked, and the movable jet = Π 31 is slightly tilted with the plunger 1413 as a fulcrum, and can be released. = The lock of the mouth. Accordingly, each nozzle lock portion is formed as a position of a simple movable nozzle. Further, the locking head 14 and the substrate holding portion u can be moved independently of the pitch structure 3, the nozzle position detecting portion 4, and the locking portion operating mechanism 5, as described above. When the organic EL liquid is applied, when the coating head 14 advances to the substrate: riding and sub-scanning, it is not necessary to move the pitch adjusting mechanism nozzle position detecting portion 4 and the locking portion operating mechanism 5. Accordingly, in the coating apparatus_1, a portion that is moved by the main scanning mechanism and the sub-scanning mechanism (that is, the coating head 14 and the substrate holding portion u that are moved by the coating head moving mechanism 15 and the substrate moving mechanism 12) ) It can be miniaturized and lightened, and as a result, a coating device can be realized! Miniaturization. Since the coating h can perform the main scanning of the coating head 14 to be performed at a high speed, it is particularly suitable for downsizing of the coating head 14. A coating device according to a second embodiment of the present invention. Fig. 1 is a front view of a coating device of the second embodiment. As shown in Fig. 312, the invention manual (supplement)/97_〇丨/96139447 29 1333431. In the coating device 1a, the nozzle position detecting unit 4 is disposed above the substrate holding cassette 11. The rest of the configuration is the same as that of the device 1' shown in Figs. 1 and 2 in the following description. The method of adjusting the nozzle pitch of the coating device la is different from the first embodiment except that the method of detecting the nozzle pitch is different. In the coating apparatus 1a, when the nozzle pitch is adjusted, the organic EL liquid is experimentally applied to the test coating substrate 9a held on the substrate holding portion 11. The organic EL liquid application applied to the substrate 9a is applied to the organic EL liquid applied to the substrate 9 (see FIG. 2 and FIG. 2), and when the organic EL liquid is discharged from the four nozzles 17, the main EL liquid is discharged. It is implemented by moving the coating master 14 in the scanning direction. Further, the partition wall described in the second embodiment is not formed on the substrate 9a. Next, the pattern of the organic EL liquid (that is, the four organic liquid liquid lines arranged in a stripe pattern) discharged from the four nozzles 17 and applied to the substrate is observed, and the optical system 41 of the 2 f position detecting unit 4 observes and The imaging unit "acquires an image of the pattern of the organic EL liquid. Then, the control unit 2 = detection unit 21 (see FIG. 3) 'from the image, the center line between the two adjacent liquid lines Each distance is regarded as the distance between the two nozzles in the sub-scanning direction, the distance between the two nozzles (that is, the distance between the nozzles), and the detection is the same as in the first embodiment, and the pitch adjustment mechanism is used. 3. The distance between the root nozzles 'moves in the sub-scanning direction: Fig. 5: the second nozzle 17a, the second nozzle l7b, and the nozzle nozzle 4 1700d), and adjusts the nozzle pitch. The partition wall is not provided on the substrate 9a, so the organic EL liquid line coated with the 312XP/invention specification (_97 side 30 1333431 may be irregularly spread in the sub-scanning direction with time. Therefore, utilization The imaging of the organic EL liquid pattern by the imaging unit 42 is preferably applied to the organic E just after application. After the liquid L (for example, within 10 msec after coating), the coating device 1a, as in the first embodiment, moves the nozzles abutting portion 32 in the pitch adjusting mechanism 3 (see FIG. 8). 9)) One of the sub-scanning directions (ie, the (_¥) side) abuts against the movable nozzles, and the nozzle elastic mechanism 33 (refer to FIGS. 8 and 9) is used from the other side of the sub-scanning direction. (the side of (10)), the respective movable nozzles are biased toward the nozzle abutting portion 32. Then, in this state, the nozzle moving mechanism 34 (see Figs. 8 and 9) moves the nozzle in the (9) direction. In the joint portion %', the movable nozzles are moved in the sub-scanning direction. As a result, the amount of movement of each movable nozzle can be accurately controlled, and the pitch of the plurality of nozzles 17 can be adjusted with high precision. 疋攸敎1 and In the 'coating apparatus 1a', the result of observing the organic EL liquid pattern by the light of the nozzle position detecting unit 4 is two degrees, and the pitch of the nozzles 17 can be more accurately measured, and the pitch of the control unit can be utilized. 2 based on the '5V image of the organic liquid pattern obtained by the imaging unit 42, Measured adjacent in the subscanning direction

In addition, it is possible to shorten the time required for the detection of the distance between the nozzles and the adjustment of the distance between the nozzles. Yan Shuang Jia Jia U Next, the third actual 彔 彔 Α Α Α 主 主 本 本 本 。 。 。 。 。 。 。 。 。 。 。 。 Fig. 11 is not the coating of the third form of her, and the coating step is made up of the A structure & front view. As shown in Fig. 11, the nozzle position detecting portion 4 is between (+X) 312XP/invention specification (supplement)/97_〇1/96丨39447^== and with the pitch adjusting mechanism 3 in Fig. 11 . The Si disposed in the (four) mouth is at a position that hinders the movement of the coating head 14. The rest of the configuration is the same as that given in the coating instructions shown in Fig. i and Fig. 2. The spraying method of the coating device 1b differs from the first embodiment in that the method of detecting the nozzle pitch is different. The remainder is substantially as in the coating device lb. When the nozzle pitch is adjusted, the coating head 14 is moved over the liquid receiving portion 16 on the = side. Then, the four liquid columns of the EL liquid discharged from the four nozzles 17 are viewed by the optical system of the nozzle position detecting unit 4, and the image of the four liquid columns of the organic EL liquid is obtained by the imaging unit 42. Further, the correspondence between the respective liquid columns and the nozzles 17 is obtained by detecting the position of the coating head 14 which is aligned with the focal length of each liquid column. Next, by using the pitch detecting unit 21 (see FIG. 3) of the control unit 2, the distance between the center lines of the liquid columns of the two organic EL liquids that are connected to each other is regarded as the phase in the four scanning directions. The distance between the two nozzles adjacent to each other (that is, the distance between the nozzles) is detected. Then, as in the first embodiment, the pitch adjustment mechanism 3 moves three movable nozzles in the sub-scanning direction by the distance between the nozzles (i.e., the i-th nozzle 17a shown in Figs. 4 and 5). The nozzle 17b and the fourth nozzle 17d) adjust the nozzle pitch. In the coating device 1b, as in the first and second embodiments, the nozzle abutting portion 32 (see FIGS. 8 and 9) is given the elastic force & state by the nozzle elastic mechanism 33 (see FIGS. 8 and 9). The movable nozzles are moved in the sub-scanning direction. The movement amount of each movable nozzle can be accurately controlled, and the pitch of the plurality of nozzles 17 can be adjusted. 312 ΧΡ 发明 发明 发明 发明 发明 97 96 96 96 96 96 96 96 96 96 lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb lb The result of the liquid column can be higher. The pitch detecting portion 21 is based on * two distances. Further, in the operation of detecting the organic EL liquid obtained by each of the jets 42 by the liquid column image of the control unit 2, the time required for detecting the complex number and the large distance can be adjusted at the pitch of the coating device at the nozzle pitch can be shortened.调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整 调整The main liquid level EL liquid column of the substrate 9 at the time of cloth can adjust the nozzle pitch according to (4) the distance between the organic EL liquids actually applied to the substrate. On the other hand, the coating of the second embodiment shown in Fig. 10 In the device la, the nozzle pitch can be adjusted according to the organic EL liquid pattern applied only to thereby directly control the pitch of the applied organic EL liquid pattern on the substrate used for the product. Further, 'Fig. 1 and Fig. 2 In the coating device 1 of the first embodiment, the nozzle pitch is adjusted in accordance with the image of the nozzle 17, whereby the nozzle pitch can be adjusted without actually applying the organic EL liquid to the substrate. Liquid column image ejected from nozzle 17 The image for detecting the distance between the nozzles can be easily obtained. The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications are possible. 312XP/Invention Manual (Supplement)/97. 〇 1/96139447 33 1333431 In the coating device 1 of the application form, it is also possible to use the imaging unit 42 of the mouth and mouth detection U 4 to sequentially and (or simultaneously) shoot four nozzles p (one + Z) At the top of the side, the distance between the nozzles is obtained. In addition, the position of the spray in the sub-scanning direction can also be made by using the facing laser to cause the scar rL (the side is equipped with the test Μ # ^ 湖 lake suppression), or Non-contact laser sweep 2 = measurement! The instrument can be found. In this case, 'the position of the movable nozzle can be continuously measured in the movable spray = two = movement, and the movement of the movable nozzle can be controlled according to the condition In the 2:: state: the substrate in which the pattern of the nozzles is applied with the pattern of the nozzles in the coating device 1a is not limited to the test coating soil plate 9a. For example, the substrate used for the product may be Photographed in a non-coated area of the pot: =1 wall to test the coated organic sputum: 'Obtains the distance between the nozzle and the whole mechanism. "' Mounting portion fixing means 31 may also be independent of: Γ :: 2, the nozzle 33 and the elastic force of the contact mechanism portion moving mechanism 34 = mechanism. In this case, the first part of the mounting portion fixing mechanism 31! The fixed broadcast, 2 fixing portion 314 may be provided to abut against the entire width of the nozzle mounting portion (4) main ft: and the moving nozzle abutting portion 32, the nozzle elastic mechanism 33 and the damper are provided in the main scanning direction. In the state in which the nozzle attachment portion 141 is held by the attachment portion fixing mechanism, the nozzle abutting portion 32, the nozzle cartridge Z, and the abutting portion moving mechanism 34 are moved to the corresponding movable nozzles. Position 慝 and adjust the position of the 3 movable nozzles in sequence. Furthermore, in the coating device i, three sets of mounting portion fixing mechanisms 312XP/invention manual (supplement)/97-01/96139447 34 3 two It abutting portions 32, the nozzle elastic mechanism 33, and the abutting portion movement may be provided. The mechanism, the cymbal operating mechanism 5, is arranged by arranging in the main scanning direction, and the position of the three movable nozzles can be simultaneously adjusted. In this case, * = I replaces the three sets of * mounting parts gj fixed mechanism 31, and the mounting portion of the nozzle mounting portion 141 is fixed over the entire width of the main sweeping machine ^. It is necessary to have a structure including a link coffee, a gas pressure 2, and a dead state 333. For example, the nozzle mounting portion 1 μ back plate portion 1411 may be used as a fulcrum, and each movable nozzle may be pressed toward the (_γ) square β. * The nozzle elastic mechanism of the component. However, as far as the coating head is quantified, the nozzle elastic mechanism is preferably disposed independently of the coating head, and is disposed separately from the coating head by the nozzle elastic mechanism, except for the nozzle pitch adjustment. The pressing force is not applied to the movable nozzle, so that the reliability of locking the movable nozzle can be improved. The nozzle locking portion can also replace the coil magazine of the pressing portion 1732, and the like is to use other components such as a disk spring. a spring member, or an elastic member such as rubber, presses the fixing member 1731 toward the slider 172 of the movable nozzle. Further, a magnet may be disposed in the movable nozzle and the nozzle mounting portion 141, and the magnetic force of the magnets may be utilized The fixing member 1731 is pressed toward the slider 172. Among the coating heads, any of the remaining nozzles other than the third nozzle (7) may be fixed to the nozzle wire portion 141 and set as a reference for adjusting the nozzle pitch. The branch nozzles 17 can also be oscillated to be individually movable in the sub-scanning direction. In this case, the nozzles can be adjusted with high precision by moving any of the three nozzles or four nozzles in the sub-sweep direction. 312XP/Invention Manual (Supplement)/97-01/96139447 1333431 In the coating device of the 加: 加 addition form, the number of f-distributed in the coating head 14 is not limited to four, but also 3 or more. For example, three kinds of organic (3) liquids each containing red (8), green & (6), blue (8) and other interactive color machine EL materials are simultaneously ejected from the "middle nozzles, and the substrate 9 is simultaneously sprinkled. Coating. In this case /', the state of the partition wall spacing between the two nozzles in the sub-scanning direction. ^ It is a fluid material that can be used to apply the positive hole transporting material containing the pixel shape = material 对 to the substrate 9 in the above-mentioned coating device (hereinafter referred to as "perforated hole transport ^ set ^. Here" The hole transporting material refers to a material that forms an organic EL display Ϊ = hole transport layer, and the so-called "perforated transport layer" is not a positive hole transport layer that transports a positive hole only by an organic EL layer formed of an organic EL material. The positive hole injection layer covering the positive hole is included. The coating device is not limited to the application of the transport liquid of the organic germanium display device, and can be used, for example, in a flat display device such as a liquid crystal display device. Using a substrate, a flow material containing a coloring material or a fluorescent material other type of pixel forming material is applied to the organic EL display device, and the organic EL display device is used to set the substrate to the other planes ===='; = material, the position of the (4) position of the fluidity (4) is required to be high = = above, because the pitch of the plurality of nozzles 17 can be adjusted with high precision in the coating device, and thus is particularly suitable for, for example, the display of the organic EL display Π 312XP /Invention Manual (supplement)/97-01/96139447 36 plate-coated positive hole transport liquid, and a substrate for a fluid material surface display device containing other pixel-forming materials, and the above-mentioned coating device can be used for a flat surface display device. For example, the magnetic disk (or optical disk) is coated with various fluid materials by various substrates such as a glass substrate, a ceramic substrate, or a semi-substrate substrate. The above description has been made in detail, but the above description is merely illustrative. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a coating apparatus according to a first embodiment of the present invention. Fig. 2 is a front view of a coating apparatus. Fig. 3 is a functional block diagram of the control unit. Fig. 4 is a front view of the coating head. Fig. 5 is a plan view of the coating head. Fig. 6 is an enlarged left side view of the vicinity of the nozzle locking portion. Fig. 8 is a plan view of the pitch adjusting mechanism and the coating head. Fig. 9 is a left side view of the pitch adjusting mechanism and the coating head. Fig. 1 is a front view of the coating device of the second embodiment. Third real Aspect of a front view of the coating apparatus. The main element SIGNS LIST 1 'la, lb coating apparatus 2 pitch adjustment mechanism control unit 3 312XP / specification (s) / the 97〇1 / 96,139,447 371,333,431 invention

4 nozzle position detecting unit 5 locking portion operating mechanism 9, 9a substrate 11 substrate holding portion 12 substrate moving mechanism 13 alignment mark detecting portion 14 coating head 15 coating head moving mechanism 16 liquid receiving portion 17 nozzle 17a first nozzle 17b 2 nozzle 17c third nozzle 17d fourth nozzle 21 pitch detecting unit 22 adjustment mechanism control unit 31 mounting portion fixing mechanism 32 nozzle abutting portion 33 nozzle elastic mechanism 34 abutting portion moving mechanism 41 optical system 42 imaging portion 51 '331 connecting rod 52 Pneumatic cylinder 312XP/Invention manual (supplement)/97-01/96139447 38 1333431 53 Rotating arm 54 Pillar 55 Rotary shaft • 56 Release part 91 Coating area 141 Nozzle mounting part 142 Guide groove. 143 Slide holder ● 144 guide plate 171 nozzle body 172 sliders 173a, 173b, 173d nozzle lock 311 first fixing portion 312 first support portion 313 first moving mechanism ^ 314 second fixing portion 315 second supporting portion 316 second moving mechanism 332 air pressure Cylinder 333 Regulator 341 Micrometer 342 Coupler 343 Stepper motor 1411 Back plate part 312XP / invention manual (supplement) / 97-01/96139447 39 13334 31 1412 Horizontal portion 1413 Plunger 1731 Fixing member 1732 Pressing portion 1733 Fixing member body 1734 Eave portion 1735 First projection. 1736 Second projection • 1737 Bolt 1738 Elastic member 3111 First abutment part 3141 2nd abutment Department 312XP/Invention Manual (supplement)/97-01/96139447

Claims (1)

X. Application for a patented bacteria device, which is a substrate holding portion for applying a fluid material on a substrate, which holds the substrate; 2. The substrate is continuously discharged with a fluid material; The plurality of nozzles, the upper main: two': moving in a direction parallel to the main scanning direction of the main surface of the substrate, the nozzle anemming portion together with the substrate phase, the squeezing mechanism 'being parallel to the substrate 2 in the sub-scanning direction of the main scanning direction, the plurality of nozzle mounting portions are relatively moved to the substrate; and the plurality of spray purple and the outer=adjusting mechanism' are all or all of the plurality of nozzles All the other movable nozzles are moved, _ this (four) h, + phase shifting in the direction of each of the two; in the S drawing direction between the two adjacent nozzles, the pitch adjustment mechanism is provided with: movable 3 connection ° Ρ Λ Abutting each of the force mechanisms from one of the sub-scanning directions, and applying an elastic force to the nozzle abutting portion to the movable nozzle from the other side of the sub-scanning direction; and Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ Ρ 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明/97-01/96丨39447 1333431 The coating device of the first aspect of the patent scope of the invention, wherein the elastic force applied to each of the movable nozzles by the two-nozzle elastic mechanism is one turn, and the movable nozzles described above are The coating device of the second aspect of the invention, wherein the plurality of nozzles and the spray-back dressing portion are independent of the pitch adjusting mechanism by the sub-scanning mechanism 2. The coating device according to claim 1, wherein the plurality of nozzle attachment portions are moved independently of the pitch adjustment mechanism by the scanning mechanism and the sub-scanning mechanism. [5] The coating device according to any one of the preceding claims, wherein the spacing (10) mechanism further has a fixing mechanism for fixing the above-mentioned mounting portion. Double 丨~文6. The coating apparatus according to the fifth aspect, wherein the attachment portion fixing mechanism includes: the first female shackle and the nozzle attachment portion from the sub-scanning direction; and the side abutting portion a fixing portion, the nozzle contact 4, and the abutting portion moving mechanism; the second fixing portion abuts against the nozzle mounting portion from the other side in the sub-scanning direction; and the force 1 abuts the second supporting portion The +2 fixed portion and the nozzle elastic first moving mechanism are moved in the sub-selection portion and the W field direction to move the i-th branch 312XP/invention specification (supplement)/97 The apparatus of any one of the above-mentioned 1st to 4th, wherein the movable nozzles are provided in the above-mentioned second branch. a sneezing body 'which discharges a fluid material from the front end; and a slider which is mounted with the above-mentioned nozzle too sturdy; the mouth amp 31 a sling body 'and is held in a guide formed in the above-described sub-scanning direction In the ditch, can be described I bow ditch move.涂布/σ± & the coating device of claim 7, wherein the upper portion of the nozzle is locked with respect to The nozzle locking portion locks the position of the alpha member and releases the lock. 9. The coating lock portion of claim 8 is characterized in that: the device, the towel 'the above-mentioned nozzle fixing member abuts against the above-mentioned slip when the position of the slider is locked, and the handle portion' The sliding member is biased toward the nozzle mounting portion by pressing the fixing member toward the slider; and when the position of the slider is relatively released, the jaw member is mounted on the disk. The fulcrum of the contact is centered and inclined toward the direction away from the above ^. For example, the coating device of the first to fourth items of the profit range, including the item _ _ 312 χΡ / invention manual (supplement) / 97-01/96139447 43 1333431 The nozzle 'plinds a pattern of a fluid material applied to the substrate from the plurality, and a plurality of liquid columns of the fluid material discharged from the plurality of nozzles. 11. The coating device according to claim 1G, wherein the image is further provided by the optical system to obtain the image of the plurality of movable jets; and the above-mentioned plurality of liquid columns; and The portion 'detects, from the image, the distance between the two nozzles that are in the sub-scanning direction. 1.2. The coating apparatus according to claim 5, further comprising: eight adjustment mechanism control unit that manufactures the abutting portion moving mechanism of the pitch adjustment mechanism based on a detection result of the pitch detecting unit. 13. The coating device according to any one of claims 1 to 4, wherein the fluid material comprises a pixel forming material for a flat display device. 14. The coating apparatus according to claim 13, wherein the pixel forming material is an organic tantalum material or a positive hole feeding material for an organic EL display device. 15. The coating apparatus according to claim 5, further comprising: an eight-optical system for observing the plurality of movable nozzles, the fluid material discharged from the plurality of nozzles and coated on the substrate The pattern, or a plurality of liquid columns of the pure material discharged from the plurality of nozzles from the above 312XP/^Hg^Hg^(^)/97-〇l/96139447 44 1333431. [16] The coating device of claim 15, further comprising an imaging unit that reads the plurality of movable whistle, the pattern of the fluid material, or the fluid material by the optical system An image of the plurality of liquid columns; and a pitch detecting unit that detects the distance between the two nozzles adjacent to each other in the sub-scanning direction from the image. The coating apparatus of claim 16, further comprising an adjustment mechanism control unit that controls the abutting portion moving mechanism of the pitch adjustment mechanism based on a detection result of the pitch detecting unit. 18. The coating device of claim 7, further comprising: an eight-optical system for observing the plurality of movable nozzles, the fluid material ejected from the plurality of nozzles and coated on the substrate A pattern, or a plurality of liquid columns of fluid material ejected from the plurality of nozzles. The coating apparatus of claim 18, further comprising: an eight imaging unit that acquires the pattern of the movable material of the plurality of movable nozzles or the fluid material via the optical system The image of the plurality of liquid columns; and the distance detecting portion 'the distance between the two nozzles adjacent to each other on the sub-scanning side from the image mask. The 312XP/invention specification (supplied)/97〇1/96139447 45 1333431. The coating device according to claim 19, further comprising: an adjustment mechanism control unit, which is detected according to the above-described pitch detecting unit As a result, the abutting portion moving mechanism of the above-described pitch adjusting mechanism is controlled. 312XP/Invention Manual (supplement)/97-01/96139447 46