TWI332033B - - Google Patents
Download PDFInfo
- Publication number
- TWI332033B TWI332033B TW095113727A TW95113727A TWI332033B TW I332033 B TWI332033 B TW I332033B TW 095113727 A TW095113727 A TW 095113727A TW 95113727 A TW95113727 A TW 95113727A TW I332033 B TWI332033 B TW I332033B
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum
- separation
- separating
- vacuum device
- rtigt
- Prior art date
Links
- 238000000926 separation method Methods 0.000 claims description 78
- 239000000463 material Substances 0.000 claims description 43
- 239000000126 substance Substances 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 31
- 238000001816 cooling Methods 0.000 claims description 16
- 238000002955 isolation Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 26
- 239000012071 phase Substances 0.000 description 23
- 238000001704 evaporation Methods 0.000 description 18
- 230000008020 evaporation Effects 0.000 description 17
- 238000000034 method Methods 0.000 description 12
- 238000000746 purification Methods 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 230000033228 biological regulation Effects 0.000 description 7
- 239000011368 organic material Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000011796 hollow space material Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000859 sublimation Methods 0.000 description 4
- 230000008022 sublimation Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- NNJPGOLRFBJNIW-HNNXBMFYSA-N (-)-demecolcine Chemical compound C1=C(OC)C(=O)C=C2[C@@H](NC)CCC3=CC(OC)=C(OC)C(OC)=C3C2=C1 NNJPGOLRFBJNIW-HNNXBMFYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 235000002566 Capsicum Nutrition 0.000 description 1
- 239000006002 Pepper Substances 0.000 description 1
- 235000016761 Piper aduncum Nutrition 0.000 description 1
- 235000017804 Piper guineense Nutrition 0.000 description 1
- 244000203593 Piper nigrum Species 0.000 description 1
- 235000008184 Piper nigrum Nutrition 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000971 Silver steel Inorganic materials 0.000 description 1
- 244000062793 Sorghum vulgare Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- -1 button Chemical compound 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000012229 microporous material Substances 0.000 description 1
- 235000019713 millet Nutrition 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000012860 organic pigment Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000035922 thirst Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D7/00—Sublimation
- B01D7/02—Crystallisation directly from the vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/10—Vacuum distillation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2005/004175 WO2006111180A1 (de) | 2005-04-19 | 2005-04-19 | Vakuumvorrichtung und verfahren zur gasphasenbearbeitung einer substanz |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200710237A TW200710237A (en) | 2007-03-16 |
| TWI332033B true TWI332033B (enrdf_load_html_response) | 2010-10-21 |
Family
ID=34967463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095113727A TW200710237A (en) | 2005-04-19 | 2006-04-18 | Vacuum device and method for treating a substance in a gas phase |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE112005003542A5 (enrdf_load_html_response) |
| TW (1) | TW200710237A (enrdf_load_html_response) |
| WO (1) | WO2006111180A1 (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017003516A1 (de) * | 2017-04-11 | 2018-10-11 | Creaphys Gmbh | Beschichtungsvorrichtung und Verfahren zur reaktiven Dampfphasenabscheidung unter Vakuum auf einem Substrat |
| DE102022110071A1 (de) | 2022-02-01 | 2023-08-03 | Seifert Systems Ltd. | Klimatisierungseinrichtung für einen Betrieb in industrieller Umgebung |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1084239B (de) * | 1959-02-11 | 1960-06-30 | Gea Luftkuehler Ges M B H | Verfahren und Vorrichtung zur kontinuierlichen Abscheidung von Sublimationsproduktenaus heissen Traegergasen |
| CH472364A (de) * | 1966-12-22 | 1969-05-15 | Geigy Ag J R | Verfahren zur Herstellung eines neuen polycyclischen Amins |
| US5354563A (en) * | 1985-07-15 | 1994-10-11 | Research Development Corp. Of Japan | Water dispersion containing ultrafine particles of organic compounds |
| DE19755266C1 (de) * | 1997-12-12 | 1999-02-25 | Gea Luftkuehler Happel Gmbh | Desublimator |
| US6811592B2 (en) * | 2002-03-01 | 2004-11-02 | Johnson & Johnson Vision Care, Inc. | Thin film in-line degasser |
-
2005
- 2005-04-19 WO PCT/EP2005/004175 patent/WO2006111180A1/de active Application Filing
- 2005-04-19 DE DE112005003542T patent/DE112005003542A5/de not_active Withdrawn
-
2006
- 2006-04-18 TW TW095113727A patent/TW200710237A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200710237A (en) | 2007-03-16 |
| DE112005003542A5 (de) | 2008-02-28 |
| WO2006111180A1 (de) | 2006-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Tao et al. | A new scanning tunneling microscope reactor used for high-pressure and high-temperature catalysis studies | |
| CN104685694A (zh) | 多孔金属支承的薄膜钠离子导电固态电解质 | |
| TWI332033B (enrdf_load_html_response) | ||
| CN101348903B (zh) | 多功能薄膜沉积设备 | |
| Tachibana et al. | Kinetic condensation and evaporation of metallic iron and implications for metallic iron dust formation | |
| CN110799824A (zh) | 用于冷冻电子显微镜的气相样品制备 | |
| EP4180105A1 (en) | Refining method | |
| Bourim et al. | Development and characterization of non-evaporable getter thin films with Ru seeding layer for MEMS applications | |
| CN101486440B (zh) | 纳米粒子生成装置 | |
| US9255307B2 (en) | Tantalum-material multilevel distillation crucible and distillation process | |
| JP2003527295A5 (enrdf_load_html_response) | ||
| WO2011140060A2 (en) | Thermal evaporation sources with separate crucible for holding the evaporant material | |
| JP2015134305A (ja) | 有機材料の精製装置 | |
| US6375893B1 (en) | Method and apparatus for evaporating components of multiple substance mixtures and multiple substance systems | |
| RU2663813C2 (ru) | Геттерная насосная система | |
| WO2019182104A1 (ja) | 静電チャック装置および静電チャック装置の製造方法 | |
| US7794674B2 (en) | Consolidated vacuum sublimation module | |
| WO2013145832A1 (ja) | 有機材料の精製装置 | |
| JP4837600B2 (ja) | 電磁誘導型通気性発熱体及び高温過熱蒸気生成システム | |
| US6100621A (en) | Thermionic converter with differentially heated cesium-oxygen source and method of operation | |
| CN100497162C (zh) | 加热器一体型负电荷氧原子发生装置 | |
| US20100300869A1 (en) | Micro-fluidic separating device for liquid mixtures | |
| Schmidt et al. | Design of a compact and versatile radiation heater with an additively manufactured Nb radiation shield for UHV high-temperature sample preparation | |
| Ricote et al. | Channelized substrates made from BaZr0. 75Ce0. 05Y0. 2O3− d proton-conducting ceramic polymer clay | |
| US20200083455A1 (en) | Apparatus for manufacturing organic material and method of manufacturing organic material using the apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |