1321216 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種檢測裝置，尤其涉及一種利用光電原 理進行檢測之平面度檢測裝置，本發明還涉及一種平面度 檢測方法。 【先前技術】 •機械加工中常需對加工後工件之表面平面度進行檢 別’以驗證產品之外形是否合格。傳統之平面度檢測方法 .中較為常用的係採用平台加塞尺之方式進行。 平台加塞尺之方式檢測平面度之過程為：首先將工件 放置於-基準平台上；然後用塞尺檢查卫件平面度值是否 合格。採用平台加塞尺之方式具有卫作原理簡單、設備成 本低之優點。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detecting device, and more particularly to a flatness detecting device for detecting using an optical principle, and to a flatness detecting method. [Prior Art] • It is often necessary to check the surface flatness of the machined workpiece after machining to verify that the shape of the product is acceptable. The traditional flatness detection method is more commonly used in the platform plus feeler. The process of detecting the flatness by means of the platform feeler is: first place the workpiece on the -reference platform; then use the feeler gauge to check whether the flatness value of the guard is acceptable. The use of the platform plus feeler has the advantages of simple manufacturing principle and low equipment cost.
然而，採用平台加塞尺之方式檢測工件之平面度，其 檢，精度-般只能達到〇. G 2毫米；且由於檢測過程^鮮 1員人判斷’冑需要對多工件進行連續檢測時，容易 造成操作人員之勞動強度過高而產生疲勞。另，平台加塞 方，檢測為接觸式檢測，即檢測時工件待測表面需與 。及基尺之間相互接觸；因此於檢測過程中，工件待測 ^面與平台及基尺之間難免要發生碰撞與摩擦。如此，平 口與塞尺於長時間使用後其檢測精度將必然下降且 测時工件之待測表面與平台及塞尺 能使工件待測表面留下到痕，從而影響工件之可 果工件對表面品質要求較高’則該種測量方法不能滿足 7 丄」二丄4丄ο 測量要求。 【發明内容】 擗备、?於上述内奋’有必要提供一種測量精度較高且易於 免被測工件被碰撞之平面度檢測裝置及方法。 一種平面度檢測裝置’其包括-光發射單元、一光接 收早^一載物台、一遮光單元及一處理單元。其中該光 ::早2與該光發射單元相對設置。該載物台位於該光發 光單元亦位於該光發射單元與該光接收單元之間，1用ί ^時於待取件之待測表面之最高點及最低點 間與該待測表面相配合形成透光間隙。該處理單元鱼該光 接收以相連，其用於處理該光純單元接㈣之光訊息。 -種平面度檢測方法，將待測工件放 =載物台上，該待測工件具有一待測表面= 度檢測装置包括-光發射單元、—光接收單元、—載物么、 :遮光單元及一處理單元；其中該光接收單元與該光發口射 早兀相對設置；該载物台位於該光發射單元與該光接收單 7G之間’其用於承载待測工 — 射單元盥^ 一 牛，糾先早兀亦位於該光發 早兀/、該先接收早兀之間；該處理單元與該光接收單元 其用Γ處理該光接收單元接收到之光訊息；開啟光 ’朝該待測工件之待測表面與該遮光元件之間發 射光線’該光接收單元接收通過該待測表面與該遮光元件 之，之光線’ ·及該處理單元根據光接收單元接收到光線之 訊心判斷工件待測表面之平面度狀況。 8 U21216 通過井旅知技術’採用上述平面度檢測裝置檢測，其 作用决:早％、光接收單元、豸光單元與處理單元配合 二|!斷工件之平面度是否合格，於檢測過程★基本上 疲勞子.人員之主觀判斷’因而可減輕操作人員之勞動 b訊息較㈣定，故檢測精度容易提高；另，由 •撞與^接觸式測量’該檢測裝置與工件待測表面發生碰 率較小’故易於避免工件於待測表面留下到 量時^料面度檢測裝置具有測量精度較高且可避免測 •時於被測工件表面留下刮痕之優點。 【實施方式】 做推下：將結合附圖及實施例對平面度檢測裝置及方法 做進一步詳細說明。 成 =圖：：本發明較佳實施例一之平面度檢測裝置 — 原'理不思圖。平面度檢測裳置1G包括光發射單 心、光接收單元12、載物台⑴遮光單元“及處心 ΓΙ5,。其中光接收單元12可與光發射單元11相對設置， 12^=中，/發射單元11之紐射巾d光接收單元 處於同一直線上。載物…位於光發 ^早=η與光接收單元12之間，其用於承載待測工件 。早7^ 14亦位於光發射單元11與光接收單元12 之間，其可設於該载物台13上或設於該載物台η之相對 側，本實施例中，遮光單元14設於載物台13上之靠近該 先發射單兀11侧。處理單元15與光接收單元12相連，‘ 用於處理該光純單元12純狀純息。 '、 9 1321216 光發射單元11可為發出之光線為發散光或平行光束 之光源。光接收單元12彳由光電轉換器件來形成，該光電 轉換器件可為互補金屬氧化物半導體（c〇mplementary Metal Oxide Semiconductor, CM〇s)、電荷耦合器（㈤… Couple Device，CCD)與光敏電阻之一。 遮光單元14用於檢測時於待測工件18之待測表面之 •最高點及最低點之高度之間與待測表面相配合形成透光間 _隙，其可為塊狀物體或板狀物體，其横截面可為三角形或 矩形。本實施例中遮光單元14之橫截面為矩形。 處理單元15用於處理光接收單元12接收到之光訊 息，其可由一可編程控制器構成。#然，為便於顯示檢測 .之結果，該處理單元15還可包括—顯示裝置用於顯示處理 後之結果。該光訊息可為光強訊息，例如光強大小與光強 分佈等。 檢測過程中，可以以載物台13之上表面131為基準 •面’先根據待測工件18所需之規格1定遮光單元14之 頂面141與載物台13之上表面131之間之距離為η。然後 開啟光發射單元n，此時光線可直接進入光接收單元Η。 接著將待測工件18放置於載物台13上，若待測工件Μ 之待測，與載物台13之上表面131之距離Z大於Η，則 光發射單兀U發出之光線仍可進入光接收單元U，如果 待測工件18之待測處與載物台13之上表面ΐ3ι之距離z :於等於H，則光發射單元11#出之光線被待測工件18 '、擋而無法進入光接收單元12。處理單元15則可根據光 接收單元12接收到之光訊息變化情況來判斷待測工件 之待測處之平面度是否合格。上述檢測過程之檢測精度可 J於等於〇 〇1耄米。檢測過程中，採用光發射單元11、 光接收單元12、遮光單元14與處理單元15之配合作用來 判斷工件18之平面度是否合格，期間不存在操作人員之主 觀判斷三因此可減輕操作人員之勞動疲勞；且光線是否進 •入接收單元12較易測定，因此檢測精度容易提高；另，待 籲碑工件I8只要放置於載物台U上即可得出合格與否，故 其易於避免被到傷。 請參閱圖2,本發明較佳實施例二之平面度檢測裝置 2〇、:平面f檢測裝置20與平面度檢測裝置1〇相似，亦包 括光發射單元21、光接收單元22、載物台23、遮光單元 24及處理單元25。其不同點在於：平面度檢測裝置還 包括一驅動單元26。驅動單元26分別與載物台U及處理 单兀f相連，其用於驅動載物台23移動。使用過程中， _驅動單7L 26根據處理單元25之控制可驅動載物台2 動’因此通過設置處理單元25之處理程式，不僅可用於判 斷工：28之某一處之平面度是否合格，還可根據需要控制 驅動早兀26移動載物台23以帶動工件28朝不同之方 動使得光接收單几22獲得較全面之反映工件28之被測 表面結構之光訊息，繼而易於使處理單元25得出待測工件 28更加詳細之平面度狀況。 請參閱圖、3’本發明較佳實施例三之平面度檢測 30。平面度檢測裝置3〇與平面度檢測裝置2〇相似 11 1321216 括光發射單元31、光接收單元32、載物台33、遮光單元 34、處理單元35及驅動單^ %。其不同點在於··驅動單 兀36分別與處理單幻5、光發射單& 31及光接收單元％ :連，驅動單元36可根據處理單元35之控制驅動光發射 單元31及光接收單元32同時移動。 可以理解，平面度檢測裝置10、20、30可用於檢測 板狀或塊狀產品之平面度，亦可用於檢測框架類產品趣曲 φ狀況。可以理解，於平面度檢測裝置1〇、2〇、3〇中，如果 將遮光單元設置於載物台之相對面，讓待測工件之待測表 面與遮光單元相對，還可進—步避免待測工件之待測表面 與載物台之摩擦與碰撞’防止待測表面被刮傷。可以理解， ^簡化平面，測裳置20、30之結構，通過事先設定载物 留 _ 1 , ' 對運動路徑’並於處理 早兀中編制相應之運算程式，可不採用驅動單元，而同樣 可測定待測工件較為詳細之平面度狀況。可以理解，告上 •述平面度檢測裝置用於檢測框架類產品之麵曲時，可二 ^目對設置之複數光射單4光接收單元，以提高檢^ 綜上所述，本發明符合發 受仟，爱依法提出專 利申mu所述者僅為本發明之較佳實施方式 發明之範圍並不以上述實施方式為限，舉凡熟悉 之人士 ’於援依本案發明精神所作之等效修飾或變化技： 應包含於以下之申請專利範圍内。 白 12 ^^1216 【圖式簡單說明】 圖1係本發明平面度檢測裝置較佳實施例一之工作 理示意圖。 、 圖2係本發明平面度檢測裝置較佳實施例二之工 理示意圖。 圖3係本發明平面度檢測裝置較佳實施例三之工作原 .理示意圖。 _ .【主要元件符號說明】 平面度檢測農置 10、20、30 光發射單元 11 、 21 、 31 光接收單元 載物台 上表面 12、22、32 13 、 23 、 33 131 遮光單元 頂面 14、24 ' 34 141 處理單元 15 ' 25 、 35 驅動單元 26、36 待測工件 18、28 13However, the flatness of the workpiece is detected by the platform plus the feeler gauge, and the accuracy of the inspection can only reach 〇. G 2 mm; and because the inspection process is judged by the freshman, it is necessary to continuously test multiple workpieces. It is easy to cause the operator's labor intensity to be too high and cause fatigue. In addition, the platform plus the plug is detected as contact detection, that is, the surface to be tested of the workpiece needs to be tested. And the base ruler are in contact with each other; therefore, during the detection process, collision and friction between the workpiece to be tested and the platform and the base rule are inevitable. In this way, the detection accuracy of the flat mouth and the feeler gauge will be inevitably decreased after long-term use, and the surface to be tested and the platform and the feeler gauge of the workpiece can leave the surface to be tested of the workpiece to the mark, thereby affecting the workpiece to the surface of the workpiece. The quality requirements are higher', and the measurement method cannot meet the measurement requirements of 7 丄"2丄4丄ο. SUMMARY OF THE INVENTION It is necessary to provide a flatness detecting device and method which have high measurement accuracy and are easy to avoid collision of a workpiece to be tested. A flatness detecting device' includes a light emitting unit, a light receiving unit, a light blocking unit, and a processing unit. Wherein the light: early 2 is disposed opposite to the light emitting unit. The light-emitting unit is located between the light-emitting unit and the light-receiving unit, and cooperates with the surface to be tested between the highest point and the lowest point of the surface to be tested of the object to be tested. A light transmission gap is formed. The processing unit fish receives the light for connection, and is used to process the optical information of the optical unit (4). - a flatness detection method, placing the workpiece to be tested on the stage, the workpiece to be tested having a surface to be tested = degree detecting means including - light emitting unit, - light receiving unit, - carrying matter, : shading unit And a processing unit; wherein the light receiving unit is disposed opposite to the light emitting port; the stage is located between the light emitting unit and the light receiving unit 7G, which is used to carry the workpiece to be tested. ^ 一牛,先先早兀 is also located in the light premature 兀 /, the first reception early ;; the processing unit and the light receiving unit for processing the light receiving information received by the light receiving unit; turning on the light ' Transmitting light between the surface to be tested of the workpiece to be tested and the shading element, the light receiving unit receives the light passing through the surface to be tested and the shading element, and the processing unit receives the light according to the light receiving unit The heart state judges the flatness condition of the surface to be tested of the workpiece. 8 U21216 Through the well-known technology, the above-mentioned flatness detection device is used for detection. The effect is as follows: early %, light receiving unit, calender unit and processing unit cooperate with two |! Whether the flatness of the workpiece is qualified, in the detection process ★ basic On the subject of fatigue, the subjective judgment of the personnel, thus reducing the operator's labor b message compared to (4), so the detection accuracy is easy to improve; in addition, by collision and ^ contact measurement 'the detection device and the workpiece surface to be tested collision rate The smaller one is easy to avoid when the workpiece is left to the surface to be tested. The surface roughness detecting device has the advantages of high measurement accuracy and can avoid scratching on the surface of the workpiece to be tested. [Embodiment] Referring down: The flatness detecting device and method will be further described in detail with reference to the accompanying drawings and embodiments. FORM=Fig:: The flatness detecting device of the preferred embodiment 1 of the present invention is the original one. The flatness detecting skirt 1G includes a light emitting single core, a light receiving unit 12, a stage (1) light blocking unit "and a center ΓΙ 5, wherein the light receiving unit 12 can be disposed opposite to the light emitting unit 11, 12^=zhong, / The light-emitting towel d light-receiving unit of the transmitting unit 11 is on the same straight line. The load is located between the light-emitting early_n=n and the light-receiving unit 12, and is used for carrying the workpiece to be tested. The early 7^14 is also located in the light emission. The unit 11 and the light receiving unit 12 may be disposed on the stage 13 or on the opposite side of the stage η. In this embodiment, the light shielding unit 14 is disposed on the stage 13 and is adjacent to the stage. The light-emitting unit 12 is connected to the light-receiving unit 12, and is used to process the pure unit 12 of the pure optical unit. ', 9 1321216 The light-emitting unit 11 can emit light as a divergent light or a parallel beam. The light receiving unit 12 is formed by a photoelectric conversion device, which may be a complementary metal oxide semiconductor (CM〇s), a charge coupler ((5)... Couple Device, CCD) and One of the photoresistors. Shading unit 14 Between the highest point and the lowest point of the surface to be tested of the workpiece 18 to be tested, the surface of the surface to be tested is matched with the surface to be tested to form a light-transmissive gap, which may be a block-like object or a plate-like object, and its cross section. The cross section of the shading unit 14 is rectangular in this embodiment. The processing unit 15 is configured to process the optical information received by the light receiving unit 12, which can be constituted by a programmable controller. As a result of the detection, the processing unit 15 may further include a display device for displaying the processed result. The optical message may be a light intensity message, such as a light intensity and a light intensity distribution, etc. During the detection process, the load may be carried. The upper surface 131 of the stage 13 is a reference surface. First, the distance between the top surface 141 of the light shielding unit 14 and the upper surface 131 of the stage 13 is η according to the specification 1 of the workpiece 18 to be tested. Then the light emission is turned on. The unit n, at this time, the light can directly enter the light receiving unit Η. Then, the workpiece 18 to be tested is placed on the stage 13, and if the workpiece to be tested is to be tested, the distance Z from the upper surface 131 of the stage 13 is greater than Oh, the light emission is emitted by a single U The light can still enter the light receiving unit U. If the distance between the to-be-measured portion of the workpiece 18 to be tested and the upper surface of the stage 13 is :3ι: equal to H, the light emitted by the light emitting unit 11# is the workpiece 18 to be tested. The processing unit 15 can determine whether the flatness of the workpiece to be tested is qualified according to the change of the optical information received by the light receiving unit 12. The detection accuracy of the above detection process can be J. In the detection process, the light emitting unit 11, the light receiving unit 12, the shading unit 14 and the processing unit 15 are used to determine whether the flatness of the workpiece 18 is acceptable, and there is no subjective view of the operator. Judging three can therefore reduce the labor fatigue of the operator; and whether the light enters or receives the receiving unit 12 is easier to measure, so the detection accuracy is easy to be improved; in addition, the workpiece I8 to be recalled can be qualified as long as it is placed on the stage U. Whether it is or not, it is easy to avoid being injured. Referring to FIG. 2, the flatness detecting device 2 of the second embodiment of the present invention is similar to the flatness detecting device 1 and includes a light emitting unit 21, a light receiving unit 22, and a stage. 23. The shading unit 24 and the processing unit 25. The difference is that the flatness detecting device further includes a driving unit 26. The drive unit 26 is connected to the stage U and the process unit f, respectively, for driving the stage 23 to move. During use, the _driver 7L 26 can drive the stage 2 according to the control of the processing unit 25. Therefore, by setting the processing routine of the processing unit 25, it can be used not only to determine whether the flatness of a certain part of the work 28 is acceptable. The drive stage 23 can also be controlled as needed to drive the workpiece 28 toward different directions so that the light receiving unit 22 obtains a more comprehensive light information reflecting the measured surface structure of the workpiece 28, which in turn facilitates the processing unit. 25 gives a more detailed flatness condition of the workpiece 28 to be tested. Referring to the drawings, 3' flatness detection 30 of the preferred embodiment 3 of the present invention. The flatness detecting device 3 is similar to the flatness detecting device 2 11 11 1321216 includes a light emitting unit 31, a light receiving unit 32, a stage 33, a light blocking unit 34, a processing unit 35, and a drive unit. The difference is that the driving unit 36 is connected to the processing single magic 5, the light emitting single & 31 and the light receiving unit %, respectively, and the driving unit 36 can drive the light emitting unit 31 and the light receiving unit according to the control of the processing unit 35. 32 moves at the same time. It can be understood that the flatness detecting devices 10, 20, 30 can be used for detecting the flatness of a plate-like or block-shaped product, and can also be used for detecting the φ condition of a frame-like product. It can be understood that, in the flatness detecting device 1〇, 2〇, 3〇, if the shading unit is disposed on the opposite side of the stage, the surface to be tested of the workpiece to be tested is opposite to the shading unit, and further avoiding The friction and collision between the surface to be tested and the stage of the workpiece to be tested 'prevents the surface to be tested from being scratched. It can be understood that ^ simplifying the plane, measuring the structure of the skirt 20, 30, by setting the load to leave _ 1 , 'for the motion path' and compiling the corresponding operation program in the processing early, can not use the drive unit, but also Determine the flatness condition of the workpiece to be tested. It can be understood that, when the flatness detecting device is used for detecting the surface music of the frame type product, the plurality of light-emitting single-light receiving units can be separately arranged to improve the inspection, and the present invention conforms to The invention is not limited to the above-described embodiments, and the equivalent modifications of the person skilled in the art in the spirit of the invention of the present invention are not limited to the scope of the invention. Or change technology: It should be included in the scope of the following patent application. White 12 ^^1216 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the operation of a preferred embodiment 1 of the flatness detecting device of the present invention. 2 is a schematic diagram of a second preferred embodiment of the flatness detecting device of the present invention. Figure 3 is a schematic view showing the operation of the preferred embodiment 3 of the flatness detecting device of the present invention. _ [Description of main component symbols] Flatness detection agricultural 10, 20, 30 light emitting unit 11, 21, 31 Light receiving unit stage upper surface 12, 22, 32 13 , 23 , 33 131 shading unit top surface 14 , 24 ' 34 141 processing unit 15 ' 25 , 35 drive unit 26 , 36 workpiece to be tested 18 , 28 13