A7 ' ' ______B7 五、發明説明（Γ~) ---- I明領域 本發明係關於一種梯型線寬量測之裝置及方法，特別是 關於一種光源可調整且多角度的梯型線寬量測之裝置及方 法。 t明背景 在同科技產業中，無論是半導體業、印刷電路板業或金 屬加工業，在蝕刻、底片、乾墨（dry film)、雷射盲孔 (Laser via)電鍍或金屬加工等製程後皆須檢驗所完成之 線、圓槽、圓或弧等圖形之結果，以判斷製程的良莠。判 斷標準為檢視該等完成圖形之梯型線寬的上底和下底寬 度、其相對應之中心座標及左右邊斜面之投影寬度。 所謂梯型線寬’指的是經蝕刻、電鍍、雷射燒孔或成 型、或機械成型等加工後的線、圓或旅之線寬。圖1係一 梯型線寬之剖面示意圖，其通常呈現一下寬上窄的梯型， 然亦可以為等腰梯型或其他不對稱之梯型。一般而言，只 要下底寬度比上底寬度寬之線寬皆可稱為梯型線寬，不限 定直線、圓糟線甚至圓洞亦可適用。在量測過程中，一梯 型線寬需被檢知的數據包括上底寬度A、下底寬度b、上 底之中心座標C、下底寬度中心座標C，、左邊斜面投影寬 度L及右邊斜面投影寬度R。 圖2所示為習知之梯型線寬之量測裝置2 〇 〇。如圖所 示，該裝置包含一底座210，其上具有一凹陷之置放待測 物之置物檢測區2 1 2，其側壁具有一水平線方向設置之近 乎平行平面之側光源2 1 3。在該置物檢測區2 1 2上方，有 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 512222 A7 _______B7 五、發明説明（2 ) 一與置物平面垂直之鏡筒22〇,其為一供光線通過的路 徑。在鏡筒2 2 0側邊上復有一環狀光源2 2 2的設置，該 裱狀光源222之光線入射方向與鏡筒22〇成一固定角度 投射到置物檢測區2 1 2内之待測物上。鏡筒2 2 0的頂端 有一影像擷取裝置2 3 0,為一可擷取自待測物反射回來之 光線的裝置，亦即可接收到待測物影像，如此就可藉鏡頭 刻度得知待測物之各項待測數值。另外，該影像擷取裝置 2 3 0也可透過電纜線2 5 0外接至一影像處理器26〇，以運 算並顯示出各項待測物所需測知之數值。此外，該量測卷 置2 0 0並包含一光源控制器2 4 〇，以供使用者控制環狀光 源2 2 2及側光源2 1 3的開與關及亮度的強弱/。 在使用量測裝置2 0 〇進行線寬量測時，可先開啟環狀光 源2 2 2，並利用光源控制器2 4 〇控制光線強弱，使入射光 適當地投射在置放於置物檢測區2 1 2上之待測物上。依據 光線的反射原理，梯型線寬兩斜側邊的反射光不易到達影 像擷取裝置2 3 0，所以在影像擷取裝置23〇上呈現出來的 待測物影像為一明党之線寬上底寬度區域以及一黑暗的兩 斜側邊區域，且其亮度成強烈對比，故可測得上底寬度A 及上底中心C的座標數值。接著將側光源2丨3打開，若側 光源2 1 3光線入射方向與待測線寬走向概略垂直，則兩斜 側邊區域的影像也會在影像擷取裝置2 3 0上明亮地呈現出 來，如此則可量測得下底寬度B及下底中心c，的座標數 值’並由該結果计算得到左邊斜面投影寬度與右邊斜面投 影寬度。故量測的條件必須是待測線寬走向需與側光源呈 -5 - L本紙張尺度適W7 ® @家鮮(CNS) A4規格(21GX297公釐) '""""" -—A7 '' ______B7 V. Description of the invention (Γ ~) ---- I. Field of the Invention The present invention relates to a device and method for measuring a stepped line width, in particular to a stepped line width with adjustable light sources and multiple angles. Measuring device and method. In the same technology industry, whether in the semiconductor industry, printed circuit board industry or metal processing industry, after etching, negative film, dry film, laser via plating or metal processing, etc. All the results of the completed line, round groove, circle or arc must be checked to judge the quality of the process. The judging criteria are the width of the upper and lower bottoms of the stepped line widths of these completed figures, their corresponding center coordinates, and the projected widths of the left and right bevels. The "ladder line width" refers to the line, circle or line width after processing such as etching, electroplating, laser burning or molding, or mechanical molding. Figure 1 is a schematic cross-sectional view of a ladder-shaped line width, which usually presents a ladder with a narrow width, but it can also be an isosceles ladder or other asymmetric ladder. Generally speaking, as long as the width of the bottom width is wider than the width of the upper bottom, it can be called a trapezoidal line width, and it is not limited to straight lines, broken lines, and even round holes. During the measurement process, the data of a ladder type line width to be detected includes the upper bottom width A, the lower bottom width b, the center coordinate C of the upper bottom, the center coordinate C of the lower bottom width, the left oblique projection width L, and the right Bevel projection width R. Fig. 2 shows a conventional ladder-type line width measuring device 2000. As shown in the figure, the device includes a base 210 having a recessed object detection area 2 1 2 on which the object to be measured is placed, and a side wall thereof having a side light source 2 1 3 which is arranged in a horizontal line direction and is close to a parallel plane. Above the object detection area 2 1 2 there is the paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 512222 A7 _______B7 V. Description of the invention (2) A lens barrel 22 perpendicular to the object plane It is a path for light to pass through. An annular light source 2 2 2 is arranged on the side of the lens barrel 2 2 0. The incident direction of the light of the frame-shaped light source 222 and the lens barrel 22 are projected into the object detection area 2 1 2 at a fixed angle. on. The top of the lens barrel 2 2 0 has an image capturing device 2 3 0, which is a device that can capture the light reflected from the object to be measured, and can also receive the image of the object to be measured. Each measured value of the tested object. In addition, the image capturing device 230 can also be externally connected to an image processor 26 through a cable 2500 to calculate and display the values required for each object to be measured. In addition, the measurement volume is 200 and includes a light source controller 2 40 for the user to control the on / off of the ring light source 2 2 2 and the side light source 2 1 3 and the intensity of the brightness /. When using the measuring device 200 to measure the line width, you can first turn on the ring light source 2 2 2 and use the light source controller 2 4 0 to control the intensity of the light so that the incident light is properly projected on the object detection area. 2 1 2 on the test object. According to the principle of light reflection, the reflected light on the oblique sides of the trapezoidal line width cannot easily reach the image capture device 230. Therefore, the image of the object to be measured displayed on the image capture device 23 is the line width of the bright party. The width of the upper base and a dark oblique side region, and the brightness of which are in strong contrast, can be used to measure the coordinates of the upper base width A and the upper base center C. Next, turn on the side light sources 2 丨 3. If the light incident direction of the side light sources 2 1 3 is roughly perpendicular to the line width to be measured, the images of the two oblique side areas will also be brightly displayed on the image capture device 2 3 0 In this way, the coordinate values of the bottom width B and the bottom center c, can be measured, and the left slope projection width and the right slope projection width can be calculated from the results. Therefore, the measurement conditions must be -5 to the line width to be measured and the side light source.-This paper is suitable for W7 ® @ 家 鲜 (CNS) A4 size (21GX297 mm) '" " " " "-
裝 訂Binding
概略垂直關係，否則反射光被影像擷取裝置2 3 0獲取量將 不足，不易明亮的呈現，此現象將隨垂直關係減弱而愈趨 明顯。 " 由於上述習知之梯型線寬之量測裝置2〇〇具有一對左右 各一之侧光源，若待測線寬方向與該側光源之光線入射方 白非主垂直狀感，則線寬兩斜側邊的反射光將無法準確回 傳至影像擷取裝置2 3 0,即使有部分反射光訊號得以被接 收到，其強度也不足以呈現出清楚的影像，遑論所欲測得 之各項數據之準確度。再者由於環狀光220之投射光角度 非與待測物表面垂直，當圖i線寬測邊α1或α2角稍大 時’多多少少會將部份屬於侧邊的部份，誤認為是上線寬 Α的部份，如此無法真實呈現實際上線寬a。 在線寬量測講究準確快速的趨勢下，如何在不需調整待 測物或量測裝置2 2 0相對位置的情形下，準確量得梯型線 寬之各項數值，即為本發明研究的方向所在。 發明之簡要說明 本發明之一目的係提供一種梯型線寬之量測裝置，具有 數對不同角度之側光源，呈環狀分佈，可準確量測待測梯 型線寬之各項數值。 本發明之第二目的係提供同軸式垂直光設計，用以量測 梯型上線寬之各項數值。 本發明之第三目的係提供一種梯型線寬之量測方法，利用 各組不同角度之側光源，配合濾光鏡的使用，使量測結果 具有更佳之準確度。 512222 五、發明説明（4 為達成上述目的’本發明揭示_種可調式多角度梯 寬之量測裝置，包含一底座，其上具有一置放待測物之平 台’該平台係一凹陷之置物檢測！，檢測區的側壁上呈有 側向光源產生機構，其為兩對或兩對以上位於相對位置之 側光源，呈環狀對稱分佈。在該置物檢測區上方，有一與 置物平面垂直之鏡筒，其為一供光線通過的路徑，内部並 设有一部分反射鏡。在鏡筒上與該部分反射鏡位置相當的 垂直方向上復設有一垂直光源。鏡筒的頂端有一影像擷取 裝置，可接收到待測物影像。此外，該量測裝置並包含一 光源控制器’以供使用者控制垂直光源以及側光源的開與 關及亮度的強弱。該鏡筒·、垂直光源、以及影像擷取裝置 係以一連接軸與底座連接起來。 本發明進一步揭示一量測梯型線寬之方法，首先將待測 物置於置物檢測區；打開垂直光源，利用光線反射原理測 得待測線寬之上底寬度及上底之中心座標；而後打開至少 一對側光源，測得待測線寬之下底寬度及下底寬度中心座 標。利用上底和下底寬度及上底和下底中心的座標數值， 經過適當的運算即可得到所有梯型線寬之待測數值。 圖式之簡單說明 本發明將依照後附圖式來說明，其中： 圖1係一梯型線寬之剖面示意圖； 圖2係習知之梯型線寬量測裝置之立體圖； 圖3係本發明的第一實施例之梯型線寬量測裝置之立體 Γ5Π · 圃， 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 裝 訂 512222 A7 B7 五、發明説明（5 ) 圖4係本發明的第—實施例之梯型線寬之量測裝置之垂 直光源之光線行徑示意圖； 圖5係本發明的第—實施例之梯型線寬之量測裝置之側 光源之光線行徑圖； 圖6U)至6(e)係本發明之梯型線寬之量測裝置之側光 源與待測線寬方向之關係圖；及 圖7係本發明之梯型線寬之量測方法之流程圖。 it件符號說明 A上底寬度 C 上底之中心在X方 向之投影座標 B下底寬度 C’下底寬度中心在X方 向之投影座標 L 左邊斜面投影寬度 R ; 右邊斜面投影寬度 200 習知梯型線寬量測裝置 2 10 底座 2 12 置物檢測區 2 14 側光源 220 鏡筒 222 環狀光源 23 0 影像擷取裝置 240 光源控制器 250 訊號與電源電纜 260 影像處理器 3 00 本發明之線寬量測裝置 3 10 底座 3 12 置物檢測區 3 13 水平侧光源組 3 15 垂直側光源組 3 17 右上左下側光源組 3 19 左上右下側光源組 320 鏡筒 322 垂直光源 324 部分反射鏡 3 3 0 高解析度攝影機 340 光源控制器 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 512222 A7 B7 五、發明説明（6 ) 3 5 0 訊號與電源電境 3 6 0 影像處理器 3 70 連接軸 較佳實施例說明 圖3為本發明的第一實施例之梯型線寬量測裝置之立體 圖。本實施例之量測裝置3 0 0具有一底座3 1 0，其上具有 一凹陷造型之置物檢測區3 1 2。該置物檢測區3 1 2的側壁 具有四對位於圓周上相對位置之側光源，呈環狀分佈，該 四組側光源分別是一水平側光源組3 1 3、一垂直側光源組 3 1 5、一右上左下側光源組317及一左上右下侧光源組 3 1 9。在該置物檢測區3 1 2上方，有一與置物平面垂直之 1¾旖320 ’該鏡筒320為一供光線通過的路徑，内部設有 一部分反射鏡（圖未示出）。在該鏡筒320之與該部分反射 鏡高度相當的垂直方向上復設有一垂直光源322。另在該 鏡筒3 2 0的頂端設有^呑影像擷取裝置，在本實施例中為一 高解析度攝影機（C 藉由訊號的電源電境〗Jlp傳至影像處理器|_，待進行影 像處理事宜。此外，長施例之量測裝置遲在並包含一光 源控制器3 4 0，以供使用者控制垂直光源以及側光源的開 與關及亮度的強弱。該鏡筒3 2 0、垂直光源3 22及高解析 度攝影機330係藉由一連接軸370結合於底座310。 圖4為本發明的第一實施例之梯型線寬之量測裝置之垂 直光源之光線行徑示意圖，為力求清楚，部份穿透光與本 發明無關之光徑並未標出，其光源僅以一燈泡示意，事實 上可為任何之發光體來源如led、_素燈藉光纖導管送來 lifeThe vertical relationship is rough. Otherwise, the amount of reflected light captured by the image capturing device 230 will be insufficient and it will not be easy to appear bright. This phenomenon will become more apparent as the vertical relationship weakens. " Since the conventional ladder-type line width measuring device 2000 has a pair of left and right side light sources, if the direction of the line width to be measured and the light incident from the side light source are not perpendicular to the main white, then the line The reflected light from the wide two oblique sides cannot be accurately transmitted back to the image capturing device 230. Even if a part of the reflected light signal is received, its intensity is not sufficient to present a clear image, let alone the desired Accuracy of each data. Furthermore, since the angle of the projected light of the ring-shaped light 220 is not perpendicular to the surface of the object to be measured, when the angle i1 or α2 of the line width of the figure i is slightly larger, the part will be part of the side, which is mistakenly considered It is part of the upper line width A, so that the actual line width a cannot be truly represented. The online width measurement pays attention to the accurate and fast trend. How to accurately measure the values of the ladder-shaped line width without adjusting the relative position of the object to be measured or the measuring device 2 2 0, which is the research of the present invention The direction is. Brief Description of the Invention One object of the present invention is to provide a ladder-shaped line width measuring device having a plurality of pairs of side light sources with different angles, which are distributed in a ring shape, and can accurately measure various values of the ladder-shaped line width to be measured. A second object of the present invention is to provide a coaxial vertical light design for measuring various values of line width on a ladder type. A third object of the present invention is to provide a method for measuring a trapezoidal line width. By using side light sources of different angles in different groups and using a filter, the measurement result has better accuracy. 512222 V. Description of the invention (4 In order to achieve the above-mentioned object, the present invention discloses `` a kind of adjustable multi-angle ladder width measuring device, which includes a base with a platform on which the object to be measured is placed '', the platform is a recessed Object detection! There is a lateral light source generating mechanism on the side wall of the detection area, which is two or more pairs of side light sources located in opposite positions, which are distributed symmetrically in a circle. Above the object detection area, there is a vertical to the object plane A lens barrel, which is a path for light to pass through, is internally provided with a part of a reflector. A vertical light source is provided on the lens barrel in a vertical direction corresponding to the position of the part of the reflector. An image is captured at the top of the barrel. The device can receive the image of the object to be measured. In addition, the measuring device includes a light source controller 'for the user to control the on and off of the vertical light source and the side light source and the intensity of the brightness. The lens barrel, vertical light source, And the image capturing device is connected to the base by a connecting shaft. The invention further discloses a method for measuring the ladder-type line width, firstly placing the object to be measured in the object detection area; Turn on the vertical light source, and use the principle of light reflection to measure the upper and lower widths and center coordinates of the upper and lower line widths. Then turn on at least one pair of side light sources to measure the lower and upper widths of the line widths to be measured and the center coordinates of the lower and lower widths. Using the coordinates of the upper and lower bottom widths and the coordinates of the upper and lower bottom centers, the measured values of all ladder-type line widths can be obtained through appropriate calculations. Brief description of the drawings The present invention will be explained in accordance with the following drawings. Among them: FIG. 1 is a schematic sectional view of a ladder type line width; FIG. 2 is a perspective view of a conventional ladder type line width measuring device; FIG. 3 is a perspective view of a ladder type line width measuring device according to the first embodiment of the present invention Γ5Π · The paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) binding 512222 A7 B7 V. Description of the invention (5) Figure 4 shows the ladder-type width of the first embodiment of the present invention. Schematic diagram of the light path of the vertical light source of the measuring device; Fig. 5 is a diagram of the light path of the side light source of the ladder-type line width measuring device of the first embodiment of the present invention; Figs. 6U) to 6 (e) are of the present invention. Side light source of ladder type line width measuring device The relationship diagram with the direction of the line width to be measured; and FIG. 7 is a flowchart of the method for measuring the ladder-type line width of the present invention. It symbol description A The width of the upper bottom C The coordinates of the center of the upper bottom in the X direction B The width of the bottom bottom C 'The projection of the center of the bottom width X in the X direction L Left bevel projection width R; Right bevel projection width 200 Line-width measuring device 2 10 Base 2 12 Object detection area 2 14 Side light source 220 Lens barrel 222 Ring light source 23 0 Image capture device 240 Light source controller 250 Signal and power cable 260 Image processor 3 00 Line of the invention Wide measuring device 3 10 Base 3 12 Object detection area 3 13 Horizontal side light source group 3 15 Vertical side light source group 3 17 Upper right and lower left light source group 3 19 Upper left and right lower light source group 320 Lens barrel 322 Vertical light source 324 Partial reflector 3 3 0 High-resolution camera 340 Light source controller This paper scale is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 512222 A7 B7 V. Description of the invention (6) 3 5 0 Signal and power environment 3 6 0 Image processing DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE CONNECTOR SHAFT 3 70 FIG. 3 is a perspective view of a ladder type line width measuring device according to a first embodiment of the present invention. The measurement device 300 of this embodiment has a base 3 10 and a recessed object detection area 3 12 thereon. The side wall of the object detection area 3 1 2 has four pairs of side light sources located at opposite positions on the circumference in a circular distribution. The four groups of side light sources are a horizontal side light source group 3 1 3 and a vertical side light source group 3 1 5 A light source group 317 on the upper right and lower left side and a light source group on the upper left and lower right side 3 1 9. Above the object detection area 3 1 2 there is a 1¾ 旖 320 which is perpendicular to the object plane. The lens barrel 320 is a path for light to pass through, and a part of a reflector (not shown) is set inside. A vertical light source 322 is further provided in the vertical direction of the lens barrel 320 corresponding to the height of the partial mirror. In addition, an image capturing device is provided at the top of the lens barrel 3 2 0. In this embodiment, it is a high-resolution camera (C is transmitted to the image processor via the power supply environment of the signal. Perform image processing matters. In addition, the measuring device of the long embodiment is late and includes a light source controller 3 4 0 for the user to control the on and off of the vertical light source and the side light source and the intensity of the brightness. The lens barrel 3 2 0. The vertical light source 322 and the high-resolution camera 330 are connected to the base 310 by a connecting shaft 370. Fig. 4 is a schematic diagram of the light path of the vertical light source of the ladder-type line width measuring device according to the first embodiment of the present invention. For the sake of clarity, part of the light path that is not related to the present invention is not marked. Its light source is only indicated by a light bulb. In fact, it can be sent by any fiber source such as led, _ prime lamp, etc. life
amera) 3 3 0，擴取之影像 -9- 本紙張尺度適用中國國家標準(CNS) A4規格(210 x 297公釐） 512222 A7 _____B7__._ 五、發明説明（7 ) 之光等。首先，光線自垂直光源3 2 2處發出，經過部分反 射鏡3 2 4的反射，轉而沿鏡筒3 2 0向下入射至位於該置 物檢測區3 1 2内之待測線寬4 1 0處。由光線反射的原 理，梯型線寬上底寬度平面部分會完全或大部份反射入射 的光線，而反射光將直線穿越部分反射鏡3 24，到達連接 在銳筒3 2 0上方之高解析度攝影機3 3 0。相反的，由於梯 型線寬之兩斜側邊部分會將入射光線.往兩側邊反射出去， 故其影像不會或極少量被高解析度攝影機3 3 0接收到並呈 現出來，所以此時在高解析度攝影機3 3 0上呈現出來的影 像為一中間明亮部分與兩側陰暗部分，該中間明亮部分為 梯型線寬之上底寬度，而兩側陰暗部分則為梯型線寬兩斜 侧邊之模糊影·像。如此，使用者可藉由該高解析度攝影機 3 3 0所攝之影像而得知待測線寬4 1 〇之上底寬度及上底之 中心座標之數值。 圖5係本發明的第一實施例之梯型線寬之量測裝置之側 光源之光線行徑圖，其中光源僅以一燈泡示意，事實上可 為任何之發光體來源如led、齒素燈藉光纖導管送來之光 等。入射光方向與待測線寬4 10走向呈直角或近乎直角的 一對側光源的光線在入射至待測線寬41〇兩斜側邊之表面 後，其反射光方向會沿著鏡筒3 2 0向上而被高解析度攝影 機3 3 0接收，故兩斜側邊之影像也會被呈現出來。此時， 高解析度攝影機3 3 0上呈現出的影像為兩條亮帶之影像， 此兩亮帶之外緣相對寬度即為該待測線寬下底寬度的寬 度。使用者可藉高解析度攝影機33〇所得之影像即可得知amera) 3 3 0, enlarged image -9- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 x 297 mm) 512222 A7 _____ B7 __._ 5. The light of invention description (7). First, the light is emitted from the vertical light source 3 2 2 and is reflected by the partial reflection mirror 3 2 4 and then enters downward along the lens barrel 3 2 0 to the line width 4 1 to be measured located in the object detection area 3 1 2 0 places. Based on the principle of light reflection, the flat part of the ladder-shaped line width and the bottom width will completely or mostly reflect the incident light, and the reflected light will pass straight through the partial mirror 3 24 to reach the high resolution connected above the sharp tube 3 2 0 Degree camera 3 3 0. On the contrary, because the two oblique sides of the trapezoidal line width will reflect the incident light. The images will not be received or displayed by the high-resolution camera 3 3 0, or a small amount, so this At the time, the image presented on the high-resolution camera 3 3 0 is a middle bright part and a dark part on both sides. The middle bright part is the upper and lower widths of the ladder-shaped line width, and the dark parts on both sides are the ladder-shaped line width. Blurred shadows and images on two oblique sides. In this way, the user can know the values of the upper and lower widths of the line width to be measured and the center coordinates of the upper bottom by using the image taken by the high-resolution camera 330. FIG. 5 is a light path diagram of a side light source of a ladder-type line width measuring device according to the first embodiment of the present invention, wherein the light source is only illustrated by a light bulb, and can actually be any light source such as a led or a toothed lamp Light from fiber optic ducts, etc. The direction of the incident light and the width of the line to be measured 4 10 The light rays from a pair of side light sources that are at or near a right angle are incident on the surface of the oblique sides of the line to be measured 41 °, and the direction of the reflected light will follow the lens barrel 3 The 20 is up and received by the high-resolution camera 3 3 0, so the two oblique sides of the image will also be presented. At this time, the image displayed on the high-resolution camera 3 3 0 is an image of two bright bands, and the relative width of the outer edges of the two bright bands is the width of the bottom line width of the line width to be measured. Users can learn from the images obtained by the high-resolution camera 33
512222 A7 _ B7_ .__ 五、發明説明（8 ) 待測梯型線寬之下底宽度及下底寬度中心座標之數值。 在量測下底寬度及下底寬度中心座標時，需視待測線寬 之角度來選擇開啟哪一組側光源，原則上僅需開啟光線入 射方向與受測線寬最接近直角的側光源。以一直線線寬 6 1 〇為例，若待測線寬為垂直放置，如圖6 ( a)所示，則要 開啟水平側光源組3 1 3。若該直線線寬6 1 0為如圖6(b) 所示呈一水平方向放置，則開啟垂直側光源組3 1 5。若該 直線線寬610為左上右下方向放置，如圖6(c)所示，則 需選擇右上左下側光源組3 1 7。若該直線線寬6 1 0呈右上 左下方向，如圖6 ( d)所示，則開啟左上右下側光源組 3 1 9。此外，並非每個線寬皆為直線，若受測線寬為其他 形狀，則得視其線型走向來決定所要開啟的側光源。例如 圖6 ( e)所示者，一待測線寬6 2 0為不規則形狀，則需開 啟水平側光源組3 1 3、垂直側光源組3 1 5及左上右下側光 源組3 1 9，即可順利量測得所需之數值。當然，使用者也 可將所有方向的側光源組全數開啟，呈環狀向内投射，則 可適用所有的線型，此舉可以省去使用者挑選側光源組的 步騾。 本發明之梯型線寬之量測裝置之側光源組可以使用單色 LED光源或其他鹵素光源，並且可再外加一光閘 控制光線的方向及角度。此外，本發明之裝置另可包本一 滤光鏡’如此便可使用白光LED作為側光源，只要視情 況需要使用不同的色片即可得需要之色光。而若側光源使 用白光LED與濾光鏡，則也可在高解析度攝影機的鏡頭 -11- 本紙張尺度適财S S家標準(CNS) A4^(21G X 297公釐） -----—_ 512222 A7 __ B7 __ 五、發明説明（9 ) 上再裝設一同樣色片光波長之濾光鏡（bandpass filter)，如此可過濾其他雜光，使得接收到的待測線寬影 像不受其他外來光源之干擾。 除了上述之量測裝置外，本發明更提供一可調式多角度 梯型線寬量測之方法，其步驟如圖7所示。首先將待測物 置於置物檢測區3 1 2内，然後打開垂直光源3 2 2 ,利用光 線反射原理測得待剝線寬之上底寬度A及上底之中心座標 C。接著根據該待測線寬之形狀及方位，選擇開啟至少一 組側光源或全開，測得待測線寬之下底寬度B及下底寬度 中心座標C，。得知上底和下底寬度及上底和下底中心的座 標數值後，即可利用公式：l-1+c—C計算得到左邊斜面 投影寬度L，再利用公式5一則可得知右邊斜面之投影 寬度R。 本發明之技術内容及技術特點巳揭示如上，然而熟系本 項技術之人士仍可能基於本發明之教示及揭示而作種種不 背離本發明精神之替換及修飾。因此，本發明之保護範圍 應不限於實施例所揭示者，而應包括各種不背離本發明之 替換及修飾，並為以下之申請專利範園所涵蓋。 -12- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐)512222 A7 _ B7_ .__ 5. Description of the invention (8) The values of the center of the bottom and bottom of the ladder line width to be measured. When measuring the center coordinates of the bottom width and bottom width, you need to choose which set of side light sources to turn on depending on the angle of the line width to be measured. In principle, you only need to turn on the side light sources whose light incidence direction and line width are closest to the right angle. Take the straight line width 6 1 0 as an example. If the line width to be measured is placed vertically, as shown in Figure 6 (a), the horizontal light source group 3 1 3 should be turned on. If the straight line width 6 1 0 is placed in a horizontal direction as shown in FIG. 6 (b), the vertical side light source group 3 1 5 is turned on. If the straight line width 610 is placed in the upper left, lower right direction, as shown in FIG. 6 (c), the upper right, lower left light source groups 3 1 7 need to be selected. If the straight line width 6 1 0 is in the upper right and lower left directions, as shown in FIG. 6 (d), the upper left and right lower light source groups 3 1 9 are turned on. In addition, not every line width is a straight line. If the measured line width is other shapes, you must determine the side light source to be turned on depending on its line shape. For example, as shown in Fig. 6 (e), if the measured line width 6 2 0 is irregular, the horizontal light source group 3 1 3, the vertical light source group 3 1 5 and the upper left and lower right light source groups 3 1 need to be turned on. 9, the required value can be measured smoothly. Of course, the user can also turn on all the side light source groups in all directions and project them inward in a ring shape. All line types can be applied. This can save the user the step of selecting the side light source groups. The side light source group of the ladder-type line width measuring device of the present invention can use a monochromatic LED light source or other halogen light source, and an optical shutter can be added to control the direction and angle of light. In addition, the device of the present invention can also include a filter, so that a white LED can be used as a side light source, as long as different color chips are used as needed to obtain the required color light. And if the side light source uses a white LED and a filter, it can also be used in the lens of a high-resolution camera. -11- This paper is a standard SS home standard (CNS) A4 ^ (21G X 297 mm) ----- —_ 512222 A7 __ B7 __ 5. The description of the invention (9) is equipped with a bandpass filter of the same color light wavelength, which can filter other stray light, so that the received line width image to be measured is not Interference from other external light sources. In addition to the measurement device described above, the present invention further provides an adjustable multi-angle stepped line width measurement method. The steps are shown in FIG. 7. First place the object to be measured in the object detection area 3 1 2, then turn on the vertical light source 3 2 2, and use the principle of light reflection to measure the upper and lower widths A and C of the upper bottom line width. Then, according to the shape and orientation of the line width to be measured, choose to turn on at least one group of side light sources or fully open, and measure the bottom coordinates B and C of the bottom width of the line width to be measured. After knowing the coordinates of the upper and lower bottom widths and the coordinates of the upper and lower bottom centers, you can use the formula: l-1 + c-C to calculate the left slope projection width L, and then use formula 5 to get the right slope The projection width R. The technical content and technical features of the present invention are disclosed above, but those skilled in the art may still make various substitutions and modifications based on the teaching and disclosure of the present invention without departing from the spirit of the present invention. Therefore, the protection scope of the present invention should not be limited to those disclosed in the embodiments, but should include various substitutions and modifications without departing from the present invention, and should be covered by the following patent application parks. -12- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm)