TWI311590B - - Google Patents

Description

1311590 IX. Description of the invention: 1. Field of the Invention The present invention relates to a coating system for multi-stage recycling and reuse of a coating material and a gas, and more particularly to a coating system for recovering input cooling gas and a target. [Prior Art] Vacuum coating systems currently used in the research or production of the electronics, optoelectronics, and mechanical industries generally include vapor deposition (CVD, PVD), sputtering (Spattering), and plasma nitrogenizing (Plasma nitrogenizing). The manufacturing rate is slow (process time is several hours to tens of hours), material consumption (gas and coating materials), and environmental pollution (direct discharge of toxic gases and target particles to the atmosphere). The conventional vacuum sputtering coating system includes a coating chamber which is connected to a mechanical vacuum pump (for low vacuum) and a diffusion vacuum pump (for high vacuum); the coating procedure using such a system is simplified. The words include: after the object to be plated is placed inside the cabin, the inside of the cabin should be pumped to 1 (Γ2 φ ～ 10_3 Torr (rough vacuum) with a mechanical pump, and then pumped to the cabin with a diffusion pump. To 1 (Γ6~1 (T Torr), and argon gas or other protective (inert) gas is supplied to the shielding gas supply source, and then vapor deposition or sputtering is performed, and the reaction is input to the cabin after the coating is completed. Gas (such as oxygen, nitrogen dioxide, etc.) and/or protective gas (inert gas such as argon, helium) break the vacuum, 'raise the pressure of the chamber to approximately equal to the outside air pressure (760 Torr) to cool the object to be plated Then, the door is opened to take out the object (component), and the next batch of the object to be plated is placed in the cabin, and then the vacuuming step is repeated to pump the cabin to 5

1311590 High vacuum for evaporation or splashing 'r' • At present, all kinds of coating systems have common shortcomings, such as: (1) In order to pump the inside of the carcass to high vacuum, it is necessary to stage the mechanical pump and the diffusion pump in stages. It is carried out; and the method of vacuuming is extremely time consuming, making the system inefficient. (2) The main reason for the high price of various coating systems is the vacuum pump, especially the diffusion pump, and for the quick vacuuming, the vacuum pump is mostly a large-scale machine that uses electricity, because the number of coating systems in the electronics factory is very high. More, the need for φ to the power company to apply for a larger contract electricity consumption, to pay a higher electricity bill; in addition, because each coating chamber is equipped with a vacuum pump, so the vacuum pump in the coating stage is idle state 'can not Support other coating systems. (3) The protective gas introduced into the tank and the reactive gas introduced in the process of the mine are eventually discharged to the outside world and cannot be effectively utilized, which may cause great harm to the environment and the human body. And the target particles in the cabin are likely to be discharged to the outside world with protective gas and reactive gases', which is also extremely unfavorable to the environment and the human body. • SUMMARY OF THE INVENTION The main object of the present invention is to solve the above problems and to provide a multi-stage recycling and reuse of a target material and a gas-collecting system of a gas in a multi-stage manner by pre-extracting a plurality of vacuum cylinders of high vacuum. Quickly pumping the cabin into true air, saving the time for the cabin to be vacuumed, and the gas extracted from the cabin is filtered by the recovery device and stored to reduce manufacturing time, productivity and product quality during plating. Rate, use less power at the same time, need (contract) Power device capacity is small, vacuum system is small, consume less gas, and can be recycled 6 1311590

Consumables can achieve the effect of not polluting the environment and green manufacturing. To achieve the foregoing objects, the present invention provides a coating system for multi-stage recycling of a substance and a gas, comprising: a tank connected to a gas input line and an exhaust line. A coating device is disposed inside the chamber for separating and depositing a target to be plated to form a film. At least one vacuum cylinder is connected to the suction line, and a valve is provided on the suction line between the chamber and the vacuum cylinder. A vacuum pump is connected to the vacuum cylinder by a connecting tube for drawing the vacuum cylinder to a high vacuum, and another valve is disposed on the connecting pipe between the vacuum pump and the vacuum cylinder. A recovery device is disposed in the suction line to sort and filter the gas and target particles extracted from the chamber. A gas return pipe is connected between the vacuum pump output side and the cabin. The above and other objects and advantages of the present invention will be readily understood from Of course, the invention may be varied on certain components, or in the arrangement of the components, but the selected embodiments are described in detail in the specification and their construction is shown in the drawings. [Embodiment] Please refer to Fig. 1, which shows the structure of the embodiment selected for the present invention, which is for illustrative purposes only and is not limited by this structure in the patent application. The coating system for multi-stage recycling and reuse of substances and gases in this embodiment 7

1311590 comprises a cabin 1 which is connected at least with a gas input line 22 for passing a protective or reactive gas 23 into the tank body 1, the vessel body 1 is connected to the pumping line 2 1, and is provided with a number of refrigeration (heating) The wafer or the cooling water pipe is distributed on the surface of the cabin 1 to control the internal environment of the body 1 to reach a predetermined temperature. A coating device 丄2 disposed inside the chamber 1 is used to release the deposited material and deposit it on the object to be formed to form a film.

One or more large-volume vacuum tubes 3 are connected to the suction line 2 1, and a valve 3 1 is disposed on the suction line 2 between the chamber 1 and the vacuum tube 3 and is controlled by the valve 3 1 It is connected to the cabin 1. a vacuum pump 4 is connected to the vacuum cylinder 3 by a connecting pipe 24, and is used to pump the vacuum cylinder 3 to a working vacuum higher than the cabin 1, wherein between the vacuum pump 4 and the vacuum cylinder 3 Another valve 3 2 is provided on the connecting pipe 24 to control the communication state between the two. The recovery device 5 connected to the suction line 21 for sequentially filtering the gas and the target particles extracted by the *Xuan cabin 1 , and in the embodiment, the recovery device 5 includes a plurality of ceramics in series The porous body unit 5丄a, 5 1 b 3 5 1 c and an activated carbon filter unit 52, wherein each ceramic porous body is π and separately controlled to a predetermined temperature and vacuum environment conditions, depending on the material in different vacuum The characteristics of different condensation temperatures are such that the gas-entrained substance (slag particles) is condensed on the porous surface of the porous body unit to filter out the single substance in the porous body unit step by step. The coating system of the multi-stage recycling and recycling of the material and the gas of the present invention has the functions of the coating process including: , 8 1311590

a. The vacuum tube is pumped by the vacuum pump 4 before the coating is applied to the working vacuum below the cabin 1. Therefore, when the forged and dry materials are placed in the cabin, the connected body and the vacuum tube 3 can be balanced. Negative pressure in the body to quickly reach the required vacuum of the cabin', and the vacuum in the recovery device 5 can be quickly generated and maintained. The vacuum cylinder 3 can be arranged in plurality and connected to the vacuum pump 4, so the actual The vacuum pump 4 required can be applied with smaller performance specifications, thus saving system cost. b When multiple vacuum tubes 3 are set, vacuum pump 4 can be divided

Each vacuum tube is pumped, and these vacuum tubes can be applied to other key film systems with proper planning, as shown in Figure 2, which saves system cost. C• Control the cooling rate of the material by applying semi-forced convection and controlling the pressure, flow and flow direction of the reaction gas 23 and/or the shielding gas in the input gun body during the vacuum breaking process to ensure the quality and shorten the cooling time. 'Using the vacuum cylinder to suck out the gas inside the body of the human body, in addition to promoting the catching and can be removed (separated) and purified by the recovery device 5

It is sent to the air cylinder 6 for reintroduction, so that the recycling can be greatly reduced: 1 milk' to reduce the cost of gas' while avoiding the release of toxic, harmful gases and light particles to the outside world. 1 Before opening the face, you can still use the vacuum tube to suck out the input face] _ inside the gas, reaction gas, trace shovel material vapor or particles, marry back to the $ of 5, after (separation) purification After the grading field is sent to the air reservoir, the air is again input to the pure vacuum to open the door to remove the key. Moreover, the ceramic porous body unit of the recovery device 5 is 5 1 a, 5 1 b, 9 1311590 Γ _4: [_. 5 1 c and activated carbon k thin soil [sucking, wishing early tg5 2 is one It can be detached and can be removed by adding (4) _ substances and gases for reuse in the case of adsorbed substances or gas. In summary, the present invention has a high degree of efficiency, a high vacuuming efficiency, and a low cost of the clock film, and is beneficial to the industry. The above description of the embodiments is intended to be illustrative of the invention, and is not intended to limit the scope of the invention.

From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the above-mentioned objects, and is in accordance with the provisions of the Patent Law. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the configuration of the present invention applied to a coating system. Fig. 2 is a schematic view showing the configuration of a multi-coating system according to the present invention. [Main component symbol description] Cabin 1

Coating device 12 Gas input line 2 2 Connection tube 2 4 Valve 3 1 Vacuum pump 4 Extraction line 2 1 Reaction gas 2 3 Vacuum tube 3 Valve 3 2 Recovery unit 5 Ceramic porous unit 5 1 a, 5 1 b , 5 1 c activated carbon filter unit 52 air reservoir 6

Claims (1)

\ 1311590 X.- Patent application scope 1 · A coating system for multi-stage recycling of substances and gases, comprising: a tank body connected with a gas input line and an exhaust pipe 5^, a coating device, The inside of the cabin is used for freeing and depositing the target to be plated to form a film; at least one vacuum tube is connected to the suction line, and is disposed on the suction line between the chamber and the vacuum tube. a valve; a vacuum pump connected to the vacuum tube by a connecting tube for pumping the vacuum tube to a high vacuum, and another valve on the connecting tube between the vacuum pump and the vacuum tube; at least one recovery device And arranged in the air suction pipeline to classify and filter the gas and the target particles extracted by the cabin; a gas return pipe connected between the vacuum pump output side and the cabin body. 2. A coating system for multi-stage recycling of substances and gases according to claim 1 of the patent application, wherein the outer surface of the chamber is provided with a plurality of cooling crystal sheets and a plurality of heating chips. 3. A coating system for multi-stage recycling of substances and gases according to claim 1 of the patent application, wherein the recovery device is selected from the group consisting of a ceramic porous unit and an activated carbon unit, and a combination of the two. 4. A coating system for multi-stage recycling of substances and gases according to item 3 of the patent application scope, wherein the recovery device has a plurality of ceramic porous units arranged in series, each ceramic porous unit and respectively Control 11 1311590 system to determine the temperature and vacuum environment conditions, in order to consolidate the recovery of vapor deposition materials and harmful gases. 5. A coating system for multi-stage recycling of substances and gases according to item 4 of the patent application scope, wherein the ceramic porous unit and the activated carbon unit are in a detachable type. 6. A coating system for multi-stage recycling of substances and gases according to item 5 of the patent application scope, wherein a gas return pipe is provided with a gas storage tank for storing recovered gas. 12