CN100426069C - Pressure debubble furnace and its application method - Google Patents
Pressure debubble furnace and its application method Download PDFInfo
- Publication number
- CN100426069C CN100426069C CNB2005101141667A CN200510114166A CN100426069C CN 100426069 C CN100426069 C CN 100426069C CN B2005101141667 A CNB2005101141667 A CN B2005101141667A CN 200510114166 A CN200510114166 A CN 200510114166A CN 100426069 C CN100426069 C CN 100426069C
- Authority
- CN
- China
- Prior art keywords
- heater
- connecting pipe
- panel
- discharge
- card casket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Furnace Details (AREA)
Abstract
A pressurized de-flaot furnace utilizes parallel connection pipeline to connect independently operated conventional type of pressurized de-bubbling furnaces together to form a pressurized de-float system for raising process efficiency and for saving more energy.
Description
Technical field
The invention relates to a kind of pressure debubble system and application process thereof, refer to a kind of pressure debubble system and application process thereof that is applicable to that removal panel bubble is used especially.
Background technology
In the panel process equipment, generally all be provided with the pressure debubble furnace of independent running at present, its fundamental purpose is in order to residual bubble behind the removal light polarizing film applying panel.In conventional practice, be that the card casket that fills with panel is inserted in the pressure debubble furnace of independent running, carry out pressurized, heated again and keep the segment process time.After reaching the technology required time, must get rid of the air of stove inner high voltage high temperature earlier, just can open fire door and exchange another batch card casket for, remove the technology of bubble to proceed the next group panel.
See also shown in Figure 1ly, Fig. 1 is operating system 100 synoptic diagram of the pressure debubble furnace 101 of the independent running of a tradition.Wherein, in the well-known operations system 100, can comprise that load carrier 102 and that a pressure debubble furnace 101, can carry three panel card casket A, B, C transports the automatic delivering mechanism 103 of each card casket.At first, can respectively the card casket that contains unprocessed panel be sent in the operating system 100 from exporting 110 by automatic delivering mechanism 103, then, but will block the load carrier 102 that casket is inserted the carrier card casket one by one again, and this load carrier 102 that has loaded three card casket A, B, C is sent in the pressure debubble furnace 101, removed the pressurized, heated technology of bubble to carry out panel.After reaching a process time of presetting, must get rid of the air of stove inner high voltage high temperature earlier, could will block casket by load carrier 102 and send pressure debubble furnace 101 one by one.At last, be to utilize automatic delivering mechanism 103 to export 120 output function systems 100 certainly with containing the card casket of handling panel respectively.So, just can carry out the cycle operation of next group panel.
Apparently, handle for the panel of next group, traditional operating system 100 must get and heat again, could carry out circulative processing step in pressure debubble furnace 101 again.Because new panel from generation to generation maximizes day by day, relatively needs large-scale pressurization body of heater for the panel size demand, however in the conventional practice along with the supply of each pressurized, heated, not only expend the considerable energy, and also increase the process time of body of heater pressurized, heated.
Therefore, need a kind of pressure debubble system that saves the energy and shorten the process time at present badly, with the existing problem of the operating system that solves above-mentioned conventional press debubbling oven.
Summary of the invention
The object of the present invention is to provide a kind of pressure debubble system.
Another purpose of the present invention is to provide a kind of process of removing the panel bubble.
For achieving the above object, pressure debubble system provided by the invention and process can be summarized as follows.
Wherein the pressure debubble system includes:
A plurality of bodies of heater are in order to ccontaining a plurality of panels;
The connecting pipe of a plurality of parallel connections, in order to being connected to this a plurality of bodies of heater respectively, and each connecting pipe all has one and connects air valve; And
One has the discharge of a gas collection valve, in order to connect these a plurality of connecting pipes;
Wherein, these a plurality of bodies of heater comprise a n body of heater and a n+1 body of heater at least, the connecting pipe of these a plurality of parallel connections comprises a n connecting pipe and a n+1 connecting pipe at least, this n connecting pipe is in order to be connected in this n body of heater, this n+1 connecting pipe is in order to be connected in this n+1 body of heater, this n connecting pipe is connected by this discharge with this n+1 connecting pipe, and n is the integer greater than zero.
Described system also includes at least one mechanical arm, in order to inserting in this body of heater by a plurality of panels.
Described system, wherein these a plurality of panels are placed at least one panel card casket.
Described system, wherein these a plurality of panels are placed in same panel card casket or different panels card casket, and this panel card casket is placed in this body of heater.
Described system, wherein this panel is a glass substrate, a plastic base or a silicon substrate.
Described system, wherein this body of heater is an airtight chamber.
The process of removal panel bubble of the present invention may further comprise the steps:
(a) provide a system of removing the panel bubble, and this system includes: first connecting pipe of at least one first body of heater and second body of heater, at least one parallel connection and second connecting pipe and have the discharge of a gas collection valve, wherein, this connecting pipe in parallel is connected to this a plurality of bodies of heater respectively, and each connecting pipe has one and connects air valve; And this discharge connects these a plurality of connecting pipes to be communicated with these a plurality of bodies of heater;
(b) insert at least one plate in this first body of heater;
(c) feed gases at high pressure to this first body of heater, and heat this first body of heater to a preset temperature and keep a preset pressure;
(d) after a default process time of this first body of heater, this first body of heater is connected with this second body of heater by this discharge;
(e) close the connection air valve that this connects second body of heater, heat this second body of heater to this preset pressure and this preset temperature, and open this gas collection valve to get rid of the residual gas of this first body of heater with pressurization; And
(f) take out the panel of this first body of heater.
Described process, wherein also comprise: after a default process time of this first body of heater in step (d), open one and be connected in connection air valve and on first connecting pipe of this first body of heater and be connected in connection air valve on second connecting pipe of this second body of heater, be connected with one second body of heater to make this first body of heater by this discharge.
Described process, wherein this system also comprises the 3rd body of heater.
Described process, wherein step (e) also comprises step:
(e1) after the default process time, this second body of heater was connected in being somebody's turn to do of this second body of heater with the 3rd body of heater by this discharge;
(e2) close connection air valve on the 3rd connecting pipe that the 3rd body of heater connects, heat the 3rd body of heater to this preset pressure temperature with pressurization, and open this gas collection valve to get rid of the residual gas of this second body of heater; And
(e3) take out the panel of this second body of heater.
Described process, wherein step (e1) also comprises: open the connection air valve on the 3rd connecting pipe that connection air valve and on this second connecting pipe that is connected in this second body of heater is connected in the 3rd body of heater, and by this discharge this second body of heater is connected with the 3rd body of heater.
Described process, wherein these gases at high pressure are air, nitrogen or argon gas.
Described process, wherein this preset temperature is between 40 ℃ to 60 ℃.
Described process, wherein this preset pressure is between 3kg/cm
2To 8kg/cm
2
Described process wherein should be preset the process time between 15 to 25 minutes.
Described process, wherein this system also includes at least one mechanical arm, in order to inserting in this body of heater by at least one panel.
Described process, wherein these a plurality of panels are placed at least one panel card casket.
Described process, wherein these a plurality of panel card caskets are placed in same panel card casket or different panels card casket, and this panel card casket is placed in this body of heater.
Described process, wherein this panel is a glass substrate, a plastic base or a silicon substrate.
Described process, wherein this body of heater is an airtight chamber.
Under regard to above general introduction and discuss in more detail:
Pressure debubble of the present invention system includes a plurality of bodies of heater in order to ccontaining at least one panel, a plurality of connecting pipe and in order to the parallel connection that is connected to body of heater respectively in order to connect the discharge of these a plurality of connecting pipes.Wherein, each connecting pipe all has one and connects air valve, and discharge has a gas collection valve.
In pressure debubble of the present invention system, a plurality of bodies of heater comprise a n body of heater and a n+1 body of heater at least, and the connecting pipe of a plurality of parallel connections comprises a n connecting pipe and a n+1 connecting pipe at least.Wherein, the n connecting pipe is in order to being connected in the n body of heater, and the n+1 connecting pipe is in order to being connected in the n+1 body of heater, and the n connecting pipe is to be communicated in the n+1 connecting pipe by discharge.At this, the mentioned n of the present invention is for greater than zero integer.
Thus, compared to the pressurization body of heater that independently operates separately traditionally, pressure debubble of the present invention system can utilize the improvement of the pipe that is connected in parallel, reuse process gas with the use of minimizing body of heater gases at high pressure and the time of pressurized, heated, and under circulative operation between each body of heater, not only save the time swap of panel card casket, also can promote whole performance efficiency.
In order to simplify traditional carrying of card casket and conveying mechanism, with usage space of saving equipment and the time swap that shortens the card casket, and be easier to maintenance, the system that the present invention removes the panel bubble can also comprise at least one mechanical arm, so that at least one plate is inserted in the body of heater.Certainly, the present invention can cooperate carrying of known panel card casket and conveying mechanism, sends in the pressure debubble of the present invention system with the card casket that will carry panel.
The mentioned panel of the present invention is inserted the mode of body of heater can be unrestricted, preferablely can directly insert in the body of heater, insert in the body of heater after maybe panel can being placed at least one panel card casket again.And the panel card casket of being put in this body of heater of the present invention does not also limit its quantity, preferablely panel can be placed in same panel card casket or different panels card casket.
The present invention also provides a kind of process of removing the panel bubble, and it step that comprises provides a pressure debubble system; Insert at least one plate in first body of heater; Feed in gases at high pressure to the first body of heater, and heat first body of heater to a preset temperature and keep a preset pressure; After a default process time of first body of heater, first body of heater is connected with second body of heater by discharge; Close the connection air valve that connects second body of heater, heat second body of heater to preset pressure and preset temperature, and open the gas collection valve to get rid of the residual gas of first body of heater with pressurization; And the panel that takes out first body of heater.
The above-mentioned pressure debubble system that mentions includes: first connecting pipe of at least one first body of heater and second body of heater, at least one parallel connection and second connecting pipe and have the discharge of a gas collection valve.Wherein, connecting pipe in parallel is to be connected to each body of heater respectively, and each connecting pipe has one and connect air valve, makes each body of heater can independently control external connection.Moreover discharge of the present invention is in order to connect each connecting pipe in parallel, so that connect each body of heater.
Thus, compared to conventional press body of heater mode of operation independently separately, pressure debubble of the present invention system can utilize connecting pipe in parallel and reuse process gas, it has not only utilized again desires exhaust gas discharged to save the energy in the traditional handicraft, and more can shorten the process time of pressurized, heated, to promote whole process efficiency.
Moreover, remove in the process of panel bubble in the present invention, the step that feeds a gas can be the method for known any feeding one gases at high pressure to the pressure debubble body of heater, and preferable can by discharge of the present invention import gases at high pressure or can in each body of heater, also set up one independently snorkel with the required gases at high pressure of each body of heater of independently supplying.
In the present invention's one preferred embodiment, each body of heater of the present invention all is provided with a snorkel, to provide gases at high pressure respectively to each body of heater.And the present invention is by the connection of the associated line of parallel connection and collocation discharge, the waste gas after the technology is passed in another body of heater of heating of waiting to pressurize with utilizing again, and remaining technology waste gas is to utilize discharge to get rid of.
In addition, the present invention removes the process of panel bubble, wherein step (d) can also comprise: after a default process time of this first body of heater, open one and be connected in connection air valve and on first connecting pipe of first body of heater and be connected in connection air valve on second connecting pipe of second body of heater, be connected with second body of heater to make first body of heater by discharge.
In order more to reduce energy use amount, pressure debubble of the present invention system optionally also includes the 3rd body of heater, and after second body of heater reaches the default process time, can second body of heater is connected with the 3rd body of heater by discharge.Then, can close a connection air valve that is connected on the 3rd connecting pipe of the 3rd body of heater,, and open the gas collection valve to get rid of gas remaining in second body of heater so that the 3rd body of heater heats to the preset pressure temperature.At last, can take out the panel of having removed bubble in second body of heater.Wherein, above-mentioned connection second body of heater can also comprise with the step of the 3rd body of heater: open a connection air valve on the 3rd connecting pipe that air valve and is connected in the 3rd body of heater of being connected that is connected on second connecting pipe of second body of heater, and by discharge second body of heater is connected with the 3rd body of heater.
Moreover the present invention removes that employed gases at high pressure can be any gas in the panel bubble process, preferable air, nitrogen or the argon gas of can be.And preset temperature, preset pressure or default process time mentioned in the process of the present invention are not limited to them, and it can the adjustment that cooperatively interacts according to the demand (for example: the volume of panel quantity, reacting furnace-e/or and quantity etc.) of process conditions.
In one preferred aspect, the temperature that is suitable in the technology of the present invention can be between 40 ℃ to 60 ℃, and the preset temperature of better technology can be about 50 ℃.In another preferred aspect, the preset pressure of process of the present invention can be between 3kg/cm
2To 8kg/cm
2, and the preset pressure of better technology can be 5kg/cm
2About.Again in the preferred aspect, mentioned default process time can be between 15 to 25 minutes in the technology of the present invention, and goodly are about 20 minutes.
In addition, employed panel can be unrestricted among the present invention, preferablely can be a glass substrate, a plastic base or a silicon substrate, and goodly can be the substrate that a flat-panel screens is used.Body of heater mentioned in the present invention can be unrestricted, is preferably one and can pressurizes or heatable airtight chamber.
Pressure debubble of the present invention system can be applicable in the process equipment of a panel, and it mainly is to utilize high temperature and pressure-air removing residual bubble after the panel applying light polarizing film, and makes light polarizing film more can fit in panel itself densely.
Description of drawings
Fig. 1 is the synoptic diagram of the operating system of a known pressure debubble furnace.
Fig. 2 is the synoptic diagram of the pressure debubble system of a preferred embodiment of the present invention.
Fig. 3 is the pipeline synoptic diagram of the pressure debubble system of a preferred embodiment of the present invention.
Embodiment
Embodiment 1
See also Fig. 2, Fig. 2 is the synoptic diagram of the pressure debubble system 200 of the present invention's one preferred embodiment.Shown in the figure, the pressure debubble system 200 of present embodiment includes three pressure debubble body of heater A1, B1, C1; And one in order to the carrying and the mechanical arm 210 of conveyor surface integrated circuit board casket 260.In present embodiment, pressure debubble system 200 is inserted an integrated circuit board casket 260 among each pressure debubble body of heater A1, B1, the C1 by mechanical arm 210, and the card casket number that is contained in the body of heater can be not limited to this routine described card casket number.
Please refer to Fig. 3, Fig. 3 is the pipeline synoptic diagram of present embodiment pressure debubble system 200.Shown in figure, this routine pressure debubble system 200 includes second connecting pipe 230, that first connecting pipe 220, that one first body of heater A1, one second body of heater B1, one the 3rd body of heater C1, be connected in the first body of heater A1 is connected in the second body of heater B1 and is connected in the 3rd connecting pipe 240, of the 3rd body of heater C1 in order to the discharge 250 that is communicated with each connecting pipe, the gas cylinder 280 of ventilation line 270 and in order to gases at high pressure to be provided of a parallel connection.Wherein, ventilation line 270 in parallel is to connect each body of heater A1, B1, C1 respectively, and is connected with gas cylinder 280, and each body of heater A1, B1, C1 have a breather valve 271,272,273 respectively, with the independent required gases at high pressure of each body of heater of supplying with.As shown in Figure 3, gas cylinder 280 includes a gas cylinder supply valve 281, to open as total pass of gas output.In addition, have one on each connecting pipe 220,230,240 respectively and connect air valve 221,231,241, and discharge 250 also has a gas collection valve 251 in order to the turnover of control total system gas.In present embodiment, contain an integrated circuit board casket (figure does not show) in each body of heater A1, B1, the C1 respectively, and each card casket can be equipped with a plurality of pending panels.
To adopt the pressure debubble system 200 of above-mentioned present embodiment to illustrate that this example removes the process of panel bubble at this, please in the lump with reference to the diagram of Fig. 2 and Fig. 3.In addition, to remove the process of panel bubble be not only to be defined in following content in the present invention.
At first, this routine pressure debubble system 200 sends a panel card casket 260 that fills with panel into each pressure debubble body of heater A1, B1, C1 respectively by a mechanical arm 210, and connection air valve 221,231,241 and breather valve 271,272,273 in the pressure debubble system 200 on each connecting pipe 220,230,240 all belong to closed condition.
After the first body of heater A1 inserts an integrated circuit board casket 260, open the breather valve 271 of the gas cylinder supply valve 281 and the first body of heater A1, after being sent into the first body of heater A1, a pressure-air promptly closes breather valve 271.Then body of heater A1 is heated approximately to 50 ℃ and the about 5kg/cm of maintenance
2Furnace pressure.Treat that body of heater A1 carries out after about 20 minutes panels remove bubble processing, the connection air valve 221 of opening the first body of heater A1 and the second body of heater B1 are connected air valve 231, and the first body of heater A1 is connected in the second body of heater B1 by discharge 250, so that the High Temperature High Pressure air of half among the first body of heater A1 is passed to the second body of heater B1.Then, close the connection air valve 231 of the second body of heater B1 again, and open the breather valve 272 of the second body of heater B1, after supplying gas required in the second body of heater B1, promptly close breather valve 272.Again the second body of heater B1 is boosted and be warming up to one 50 ℃, 5kg/cm
2Process environments, carry out the pressing of second batch of panel; And open gas collection valve 251 simultaneously to get rid of among the first body of heater A1 remaining half High Temperature High Pressure air, can take out the panel of having removed bubble among the first body of heater A1.
Therefore, the second body of heater B1 can save about 50% energy, and removes the conventional practice power consumption process of pressurized, heated again from.In addition, the first body of heater A1 can be again sent into next group panel card casket in this body of heater by mechanical arm 210 and removes bubble processing to continue.
After the panel pressing in the card casket among the second body of heater B1 finished, the second body of heater B1 was connected with the 3rd body of heater C1 by the pipeline of parallel connection, and the High Temperature High Pressure air of half among the second body of heater B1 is passed to the 3rd body of heater C1.Its flow process is the mode of communicating that is same as the first body of heater A1 and the second body of heater B1, and the process conditions of the 3rd body of heater C1 pressurized, heated are identical with above-mentioned condition, and wherein supplying the interior required gas of the 3rd body of heater C1 is the unlatching that utilizes a breather valve 273.In present embodiment, the high temperature and high pressure gas after the 3rd body of heater C1 technology provides back among the first body of heater A1, and forms a circulative operating system.Please note, the method of one gases at high pressure to each body of heater is provided among the present invention, be not limited to the described content of present embodiment, it can adopt as the mode that independently is supplied to each body of heater in this example by the ventilation line of parallel connection, perhaps utilize the pipeline of discharge, or even known any input one gases at high pressure are all applicable to the method for pressure debubble body of heater as the gas turnover.
Three pressure debubble body of heater A1 that this routine pressure debubble system 200 is contained, B1, C1 can be according to the length of process time, and the high temperature and high pressure gas after the mutual exchange reaction alternately each other is to save the required energy of pressurized, heated.In present embodiment, the process time of each body of heater when three bodies of heater are operated simultaneously, then can be handled 1 panel card casket every about 13 minutes when being about 20 minutes.
Mentioned panel is the panel of using for a TFT LCD in this example, and it mainly is to utilize pressure and temperature to remove light polarizing film to bind the bubble that is produced behind the panel, to strengthen the degree of adhesion of light polarizing film and panel base material.Note that the panel that the present invention is suitable for is not only the panel that this routine described TFT LCD is used, also applicable to the two-d display panel of other kind.
The foregoing description is only given an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (20)
1. pressure debubble system includes:
A plurality of bodies of heater are in order to ccontaining a plurality of panels;
The connecting pipe of a plurality of parallel connections, in order to being connected to this a plurality of bodies of heater respectively, and each connecting pipe all has one and connects air valve; And
One has the discharge of a gas collection valve, in order to connect these a plurality of connecting pipes;
Wherein, these a plurality of bodies of heater comprise a n body of heater and a n+1 body of heater at least, the connecting pipe of these a plurality of parallel connections comprises a n connecting pipe and a n+1 connecting pipe at least, this n connecting pipe is in order to be connected in this n body of heater, this n+1 connecting pipe is in order to be connected in this n+1 body of heater, this n connecting pipe is connected by this discharge with this n+1 connecting pipe, and n is the integer greater than zero.
2. the system as claimed in claim 1 is characterized in that, includes at least one mechanical arm, in order to inserting in this body of heater by a plurality of panels.
3. the system as claimed in claim 1 is characterized in that, wherein these a plurality of panels are placed at least one panel card casket.
4. system as claimed in claim 3 is characterized in that, wherein these a plurality of panels are placed in same panel card casket or different panels card casket, and this panel card casket is placed in this body of heater.
5. the system as claimed in claim 1 is characterized in that, wherein this panel is a glass substrate, a plastic base or a silicon substrate.
6. the system as claimed in claim 1 is characterized in that, wherein this body of heater is an airtight chamber.
7. process of removing the panel bubble may further comprise the steps:
(a) provide a system of removing the panel bubble, and this system includes: first connecting pipe of at least one first body of heater and second body of heater, at least one parallel connection and second connecting pipe and have the discharge of a gas collection valve, wherein, this connecting pipe in parallel is connected to this a plurality of bodies of heater respectively, and each connecting pipe has one and connects air valve; And this discharge connects these a plurality of connecting pipes to be communicated with these a plurality of bodies of heater;
(b) insert at least one plate in this first body of heater;
(c) feed gases at high pressure to this first body of heater, and heat this first body of heater to a preset temperature and keep a preset pressure;
(d) after a default process time of this first body of heater, this first body of heater is connected with this second body of heater by this discharge;
(e) close the connection air valve that this connects second body of heater, heat this second body of heater to this preset pressure and this preset temperature, and open this gas collection valve to get rid of the residual gas of this first body of heater with pressurization; And
(f) take out the panel of this first body of heater.
8. process as claimed in claim 7, it is characterized in that, wherein also comprise: after a default process time of this first body of heater in step (d), open one and be connected in connection air valve and on first connecting pipe of this first body of heater and be connected in connection air valve on second connecting pipe of this second body of heater, with by this discharge just this first body of heater be connected with one second body of heater.
9. process as claimed in claim 7 is characterized in that wherein this system also comprises the 3rd body of heater.
10. process as claimed in claim 7 is characterized in that, wherein step (e) also comprises step:
(e1) after the default process time, this second body of heater was connected in being somebody's turn to do of this second body of heater with the 3rd body of heater by this discharge;
(e2) close connection air valve on the 3rd connecting pipe that the 3rd body of heater connects, heat the 3rd body of heater to this preset pressure temperature with pressurization, and open this gas collection valve to get rid of the residual gas of this second body of heater; And
(e3) take out the panel of this second body of heater.
11. process as claimed in claim 10, it is characterized in that, wherein step (e1) also comprises: open the connection air valve on the 3rd connecting pipe that connection air valve and on this second connecting pipe that is connected in this second body of heater is connected in the 3rd body of heater, and by this discharge this second body of heater is connected with the 3rd body of heater.
12. process as claimed in claim 7 is characterized in that, wherein these gases at high pressure are air, nitrogen or argon gas.
13. process as claimed in claim 7 is characterized in that, wherein this preset temperature is between 40 ℃ to 60 ℃.
14. process as claimed in claim 7 is characterized in that, wherein this preset pressure is between 3kg/cm
2To 8kg/cm
2
15. process as claimed in claim 7 is characterized in that, wherein should preset the process time between 15 to 25 minutes.
16. process as claimed in claim 7 is characterized in that, wherein this system also includes at least one mechanical arm, in order to inserting in this body of heater by at least one panel.
17. process as claimed in claim 7 is characterized in that, wherein these a plurality of panels are placed at least one panel card casket.
18. process as claimed in claim 17 is characterized in that, wherein these a plurality of panel card caskets are placed in same panel card casket or different panels card casket, and this panel card casket is placed in this body of heater.
19. process as claimed in claim 7 is characterized in that, wherein this panel is a glass substrate, a plastic base or a silicon substrate.
20. process as claimed in claim 7 is characterized in that, wherein this body of heater is an airtight chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101141667A CN100426069C (en) | 2005-10-26 | 2005-10-26 | Pressure debubble furnace and its application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101141667A CN100426069C (en) | 2005-10-26 | 2005-10-26 | Pressure debubble furnace and its application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1955799A CN1955799A (en) | 2007-05-02 |
| CN100426069C true CN100426069C (en) | 2008-10-15 |
Family
ID=38063222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101141667A Expired - Fee Related CN100426069C (en) | 2005-10-26 | 2005-10-26 | Pressure debubble furnace and its application method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100426069C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100447624C (en) * | 2007-09-11 | 2008-12-31 | 友达光电股份有限公司 | Pressurized debubbling oven and pressurized debubbling oven system |
| CN203164465U (en) * | 2013-03-11 | 2013-08-28 | 深圳市华星光电技术有限公司 | Bubble removing device |
| CN113253495B (en) * | 2021-05-28 | 2021-11-02 | 苏州华星光电技术有限公司 | Liquid crystal panel bubble collecting method and device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0974057A (en) * | 1995-09-06 | 1997-03-18 | Kokusai Electric Co Ltd | In-furnace pressure control system |
| CN1333539A (en) * | 2000-07-14 | 2002-01-30 | 住友电气工业股份有限公司 | Oxide superconductive wire material making method and heat treatment apparatus for said method |
| JP2003236481A (en) * | 2002-02-14 | 2003-08-26 | Toshiba Corp | Washing method, washing apparatus, manufacturing method for semiconductor device, and manufacturing method for active matrix type display device |
| US20030196719A1 (en) * | 2002-04-23 | 2003-10-23 | Yong-Seok Park | Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment |
| JP2004294557A (en) * | 2003-03-25 | 2004-10-21 | Fuji Photo Film Co Ltd | Display unit, image display device, and display method |
| JP2005079528A (en) * | 2003-09-03 | 2005-03-24 | Kyoshin Engineering:Kk | High precision high pressure annealer |
-
2005
- 2005-10-26 CN CNB2005101141667A patent/CN100426069C/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0974057A (en) * | 1995-09-06 | 1997-03-18 | Kokusai Electric Co Ltd | In-furnace pressure control system |
| CN1333539A (en) * | 2000-07-14 | 2002-01-30 | 住友电气工业股份有限公司 | Oxide superconductive wire material making method and heat treatment apparatus for said method |
| CN1684204A (en) * | 2000-07-14 | 2005-10-19 | 住友电气工业股份有限公司 | Pressure heat treatment apparatus employed for preparing oxide superconducting wire |
| JP2003236481A (en) * | 2002-02-14 | 2003-08-26 | Toshiba Corp | Washing method, washing apparatus, manufacturing method for semiconductor device, and manufacturing method for active matrix type display device |
| US20030196719A1 (en) * | 2002-04-23 | 2003-10-23 | Yong-Seok Park | Wet processing bath and fluid supplying system for liquid crystal display manufacturing equipment |
| JP2004294557A (en) * | 2003-03-25 | 2004-10-21 | Fuji Photo Film Co Ltd | Display unit, image display device, and display method |
| JP2005079528A (en) * | 2003-09-03 | 2005-03-24 | Kyoshin Engineering:Kk | High precision high pressure annealer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1955799A (en) | 2007-05-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100426069C (en) | Pressure debubble furnace and its application method | |
| CA2471672A1 (en) | A method and an installation for densifying porous substrates by chemical vapour infiltration | |
| CN212688145U (en) | Energy-saving seamless pipe heat treatment equipment | |
| CN114659374B (en) | Flue gas utilization method of propane dehydrogenation device, propane dehydrogenation system and control method | |
| CN105486096B (en) | A kind of residual-heat utilization method and device of indirect heating type sintering system | |
| CN103013817B (en) | Liquefaction equipment and liquefaction process for producing alcohol by using starchiness as raw material | |
| CN101901739B (en) | Substrate cooling method, substrate cooling system and substrate processing device | |
| CN202350502U (en) | Roller kiln device | |
| CN208745494U (en) | Laminating system | |
| CN210079499U (en) | Circulating gas-liquid phase reaction device for organic synthesis | |
| CN212266947U (en) | Laminating system | |
| KR100874512B1 (en) | Energy-saving pressure lamination device and method | |
| CN207907745U (en) | A kind of degreasing bath combustion gas drying chamber waste heat for supplying device | |
| CN212293743U (en) | Continuous deposition diamond film equipment | |
| CN101649753A (en) | Method for recycling steam exhaust of temperature and pressure reducing device of steam pipe network | |
| TWI313371B (en) | ||
| TWI311590B (en) | ||
| CN209341895U (en) | A kind of sealing box type multipurpose furnace residual heat using device | |
| CN209646928U (en) | Automobile spoiler pressing device hot air circulating system | |
| CN100520517C (en) | Energy-saving type pressurizing attaching device and method | |
| CN203758275U (en) | Vacuum pump pipeline series device | |
| CN220229986U (en) | Infrared heating system | |
| CN201549525U (en) | Autoclave battery group | |
| CN215952151U (en) | Device for drying brick material by using waste heat | |
| KR20050094910A (en) | Processing method and apparatus by the autoclave |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081015 Termination date: 20091126 |