1301117 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種平板(flat panel)夾持裝置，尤其是一種可 以在製造LCD、PDP或有機EL等平板顯示器時固定玻璃基板之類 的平板，還可以在各程序之間移動時有效地支援基板的夾持裝置。 【先前技術】 一般來說，平板顯示器主要包括液晶顯示器（LCD)，pDp及有 機 EL(0rganic Electroluminescence)。LCD 需要額外的光源，並 且在亮度、對比、視角及大面積化上存在著技術限制，因此人們 最近對有機EL的研究頗爲活躍。有機el可以由低電壓驅動，能 夠自我發光，輕而薄，視野廣闊，回應敏捷。 上述的平板顯示器是針對由玻璃等物質所構成的基板進行 沉積等-連串的程序後製成的。該平板被基板夾持器⑽㈣固 定後需要通過各種類賴沉積程序，這時，基板趙器需要支援 基板的沉積面並使下。該夾紅俩沈積料的精度起著重 要的影響，例如’基板鏡在鱗崎下轉良好解面度。此 外’爲了提高作業性與縮短作業_，基板縣卸應簡單二瞭。 ehuck)或靜 電吸盤（electrostatic chuck)的方法最爲普遍。 真空吸盤是-種把吸盤靠在平板後面並從平板背面吸入吸 1301117 者之間的氣壓差夾持平板的方法。_方法 ;‘ _都在真錄態下娘揭沈鮮料上，而 ^也嫌複雜。也就是說，由於灰塵，水蒸氣及氧氣等= 板顯示器不良率上升的主要原因，因此需要在真空狀態 進灯作業’細真空賴在這種真空輯上是不起作用的。 另外，靜電吸盤是-種利用靜電力吸附(黏附)平板的方法， 它讓電流ϋ過平婦面使其生場(eleetriG，铁後利 用電=使由玻轉材㈣成的平板帶電(eleetrify)，進而利用它 的靜電力（electrcstatic fQrce)吸附(_)平板。這種方法可以 在真空狀態下使用，卻包含著下顺點。爲了_面雜大的平 板，靜電吸盤需要維持較大㈣場，耻它雜電量很大；爲了 在各種類型的沈積程序中持續供應電流而需要使用複雜的機械裝 置；電流在基板形成了電場’該電場對需要沈積到平板上的物質 (例如化學物質等沈積物)造成影響並進而降低其性能。.、 尤其是，爲了分離基板而停止電流供應時，由於無法立即消 除帶電平板裏的電荷(Charge)，使分離作業遭遇困難。 【發明内容】 本發明針對上述現有技術的缺點提出了結構簡單並可以在真 二中使用的平板夾持裝置。 本發明提供的平板夾持裝置可以減少耗電量，並且在維持良 好平面度的情形下輕易地夾持面積較大的平板。 1301117 a板爲物，她嫩辭_奸可蝴 伟^基減於可控料的底虹面，夾雜在敍 水 性膜調節機制使上述彈性=^Γ=Γ固定雜膜，彈 彈性板上下運動並㈣Γ 性節機制則可以使 對出令彈=調節機制把上述各孔連接到一個出口上，通過 的^供應量以彈性膜爲邊界維持上下兩邊_力差。 在其他實施例中，位於升降板的上述彈性膜調節機制可以在 2板的上方繼嶋，鱗㈣彻觀裏伸出多個 長官並分別插入上述各孔内，延長管的底面則被彈性膜密封。 膜 亡述各孔連接到-個出口上’通過對出口的空氣供應量以彈性 爲邊界維持夾持板上下兩邊的壓力差。 在/、他貝關中，位於升降板的上述彈性膜調節機制可以在 失持板的上方進行垂直運動，升降板中朝下的多個孔裏伸出多個 延長管並分靡人上述各軸，上親長料_人電磁闕並根 據電氣信號使彈性膜膨脹。 上述的每個電磁閥採取了由黏貼基板用外部電磁閥與分離基 板用内部電磁閥組成的雙重結構。 上述舞性膜使用了軟質合成麟，它細伸率高，與每個孔 的形狀相同，在孔的邊緣進行黏接⑻祕⑹結合。” 1301117 上述黏麵的巾央部位是非黏接部，它可贿分離動作變得 上輕性膜與黏接膜可以是4角以上的多角形或長方形。 另方面，本發明的平板夾持裝置可以夾持位於可控升降的 底座上面的基板，它也可以由下胜要單元組成：在底座上方可 以水平機，_的多他裏分财對向難物輪；兩端是 :以掛在上·肩的糾，其底面在料進人祕板底面内部的 大场置和、3曲突㈣夾持板底面的突出位置之間進行彈性變形 的彈性板；黏接在雜板的底面，_著雜力並可轉附基板 ^黏接膜；在_板H繼额水平縣，從底面突出的 夕個動作棒可以分別插人上述孔的雜板；在夾持板的上方進行 垂直與水平稿料與上述雜板鱗突，而城絲突出的多 個動作鎖可以分職人上述孔的分離板。 在上述擔片麟叙間安轉簧可崎収好的效果。 另-方面，本發明的平板夾持裝置可以夾持位於可控升降的 ^座上面的基板’它也可以由下胜要單元組成：在基板上面均 勾分佈的磁性物體，·在上述磁性物體的上方自由義，其底面安 裝了與上述磁性板對應的永久磁鐵，整個表面上有多個貫通孔的 失持板;位於爽持板上方的分離板，分離板底面有多個可以插入 上述貫通孔並與基板的上邊干涉的動作鎖。 上述磁性板利用可以在真空中使用的黏接劑黏貼到基板上， 1301117 或者通過抑在真㈣使㈣輕顧板且_於餘的單面黏 膜(Film)黏接到基板上。 【實施方式】 下面結合_和適當的實_對本發日胖板紐裝置做進一 步的說明。 圖圖5疋本毛日月平板夾持裝置的第一實施例的^^列圖。圖裏 的底座（1G)是由餐的控㈣置來控健升降的，它可以支承從 外部進入的基板⑽。底座（1G)不僅支承置於其上的基板⑽， 還可把基板舉到後述狀的工作位置，上面安裝著空氣袋(未圖示） 等物以便賴基板。這時，如果f要保護基板下面_樣，可以 使夾持板的彈性_上，當基板進人夾持板的上面後加以固定， 旋轉180度後再輸送到下一個程序即可。 夾持板(20)在底座（10)上方沿著執道(未圖示）做水平移動。 夾持板(20)的形狀與四邊形相似，它沿著執道進入位於底座（1〇) 上方的工作位置，也就是基板（12)的夾持位置後等待，完成了對 基板(12)的夾持工作後，再沿著執道移動到下一個程序。 夾持板(20)的底面有多個具有一定深度的孔(μ)。這些孔(22) 以矩陣的方式均勻分佈，每個孔(22)都連接到位於夾持板(2〇)侧 面的單一出口（28)上。 上述每個孔(22)的尾端固定著具有一定彈性的彈性膜(24)。 1301117 彈生膜(24)的邊緣被黏接(Boding)到孔(22)的入口處並維持著良 好的結合狀態。該彈性膜⑽由石夕膜等延伸率卓越的材料所組 成’它的延伸率與彈性復原力至少可以在任何直徑賴形平面形 態延伸期-餘的半球形後，—旦外力解除即可恢復原來的形 態’也就是原先的圓形平面形態。 彈性膜(24)的底面固定著黏接膜(26)。黏接膜(26)的一侧由 黏接劑固定在彈性膜⑽上，另—侧維持著—定的黏接力。 如圖2所示，上述彈性膜⑽與黏接膜⑽都是圆形。上述黏接 膜⑽對_之_材料維持著良好的機力，分料不會在基 板面上留下黏性物質。此外，黏性物質可以長時間保持黏接力而 呈現半永久性。由於人㈣這種雜㈣是耳航詳的，因此省 略了對它的詳細說明。 本發明包括了通過上述夾持板⑽的出口（28)控制空氣量的 調節機制⑽。該調節機制⑽通過對空氣流量的控制以彈性膜 (24)爲邊界使上下兩邊產生壓力差並進而導致彈性膜變形。 下面針對具有上述結構的本發明平板夾縣置說明其動作狀態。 首先，如圖1所示，在底座⑽下降的情形下，夾持板⑽糊 其上方的J1作位置’也就是基板⑽的鱗位置。這時，只要基 板(12)被輸送職座⑽上面，底座（1{))就被财沒有顯示_ 動裝置驅動而上升。 如圖3所示，這時調節機制⑽就會開放夾持板⑽的出口 1301117 (28) p返著出口（28)被開放’孔(22)裏流入外部空氣並造成壓力-上升，進而驅使彈性膜(24)膨脹並突出於夾持板⑽的底面。這 ’ 時，上述孔裏的壓力是大氣壓。由於本發明是安裝到真空室裏使 _ 用的，因此當孔連接到外部的大氣壓時，相對地使孔内部對其外 真工。卩）維持了較雨的壓力，進而使彈性膜(μ)突出。 因此，朝下突出的彈性膜（24)將接觸到已上升的底座（1〇)上 的基板（12)上邊，結果就是與彈性膜(24)底面的黏接膜(26)接 觸。底座（10)的上升動作將在基板（12)接觸到夾持板(2〇)底面之 籲 釗元成’黏接膜(26)則由大氣壓充分地施加壓力。 這時，如圖4所示，解除夾持板(2〇)内的大氣壓，底座（1〇) 則回到下降的位置。基板(12)將繼續被黏接膜(26)黏接到夾持板 (20)，並且沿著未圖示的執道被輸送到下一個程序，例如進行蔭 罩(Shadow Mask)夾持等程序。 下面針對完成沉積程序後使基板（12)脫離夾持板(2〇)的過程 加以說明。圖5局部放大了執行分離動作的主要單元。完成了沈 鲁 積工作後’基板(12)就被輸送到分離程序並停止，然後控制閥（3〇) 被打開並使大氣壓進入孔(22)内。彈性膜(24)將隨著孔内壓力上 升而膨脹，並使基板（12)逐漸脫離黏接膜（26)。也就是說，彈性 . 膜(24)將被壓力推壓並呈半球狀突出，每個黏接部將從邊緣起逐 漸脫離，等到彈性膜(24)充分膨脹後將只剩下中央部位黏接在黏 接膜上。黏接膜將喪失維持基板（12)的力量，基板將脫離並回到 11 V Ss y 1301117 下面的其他底座上。 "另-方面，® 6〜圖8顯示了本發明平板夾持裝置的彈性膜調 節機制的第—實施例。本實施例巾獨立的夾持板可以減少輸送負 荷。 、 夾持板(20)的上方有垂直運動的升_⑽。升降板⑽包 含了朝下的多個孔，從這些孔裏伸出了多個延長管⑽並分別插 入上述夾持板(20)的孔(22)内，延長管(42)的底面安裝了其他彈 性膜’這些部件構成了—體。每觀長f(42)連接到位於升降板 ⑽侧_單-出口⑽上。調節機制⑽控制了流經上述升降 板W0)出口（44)的空氣量。该調節機制通過對空氣量的調節，以 延長管的獨立雜膜⑽紐界使上下兩邊赴壓力差並進而導 致下面夾持板(2〇)的彈性膜(24)變形。 下面說明第二實施例的動作。如圖6所示，夾持板(2〇)進入 工作位置，基板（12)置於底座（1〇)上面時，底座（1〇)上升，升降 板(40)也同時下降。這時，底座（1〇)被輸送到夾持板⑽的底面 後停止’延長管(42)插人夾持板⑽的孔(22)内並使黏接膜⑽ 黏接到基板⑽。在這種情形下義作是與本發餐第—實施例 相同的。完成了對基板(12)的黏接工作後，底座（1〇)下降，升降 板(40)上升，_原先的位置。基板⑽將_轉被黏接膜⑽ 黏接到夾持板(20)的狀態（未圖示），並且被輸送到下一個程序。 12 1301117 第二實施例巾，使絲麟鱗板的分軸序除了需要上述位於 夾持位置上的升降板以外，還需要結構相_另—贿降板。也— 就是說’如圖8所示，在分離過程中必須有另—個升降板⑽彳 能使基板分離。 在本發明第二實施例中是通過升降板⑽的升降來控制彈性· 膜的’因此在程序之間機時，只魏_續板⑽需要被輸· 送工具(未圖示)輸送，從而降低了移動負荷。尤其是解決了第一 實施例中因爲空氣供應線與鱗板—起移動而可預見關題。 馨 圖9〜圖11顯示了本發明平板夾持裝置的雜膜調節機制第 三實施例。它轉了降低輸送負荷的結構，但是娜性膜調節機 制改爲利用電氣力量進行控制。 夾持板(20)的上方有垂直運動的升降板⑽。升降板⑽包 含了朝下的多個孔，從這些减伸出了多個延長管⑽並分別插 入上述夾持板⑽的孔(22)内’這些部件構成了—體。電磁嶋 _ 入這些孔(22)内，並根據電氣信號而使彈性膜(24)膨脹。上述每 個電磁閥採取了由黏貼基板用外部電磁閥(54)與分離基板用内部 · 電磁閥（56)組成的雙重結構。 下面說明本發明第三實施例的動作。如圖g所示，夾持板(2〇) 進入工作位置，基板（12)置於底座（10)上面時，底座（1〇)上升， 升降板(40)也同時下降。這時如圖1〇所示，升降板(5〇)下降並使 13 1301117 延長管⑽插人孔⑽内，與此同時，和第—實施例—樣支承了 基板(12)的底座（10)開始上升。在這種情形下，只魏到基板爽 持信號，外部電磁’4)就開始動作，它將往下突出並使彈性膜 (24)朝下雜。外部電賴（54)動作時，内部電磁_6)將―起 移動。這時，彈性膜⑽將突_域的位置，使基板⑽與黏 接膜（26)互相緊密加壓並黏接。 黏接完畢後，升降板⑽上升，底座⑽則下降回到原先的 位置，只剩下趙板⑽和基板-起被輸制下—個程序。 上另一方面’需要分離基板⑽時，内部電磁闊⑽收到分離 信號後就開始動作。這時，外部電磁閥（54)固定在延長管⑽内， 只有内部電酬⑽突出。因此如圖u所示，動作桿(56a)將推 壓彈性膜(24)的巾央雜使彈性膜呈逆__脹，進而使基板 (12)脫離。 和第二實施例-樣’本發明的第三實施例可以減輕失持板⑽ 的重量並降低移動負荷’而且由於它利用電氣控制彈性膜，因此 不像第-及第二實施例-樣需要供應空氣的裝置，可以使結構簡 單化，作業空間清潔化，有效地降低了不良率。 另-方面，本發明在上述的每個實施例中，在黏接膜(26)的 中央部位形成沒有黏接力的非黏接部（26a)將更爲有效。也就是 虎’如圖2—樣形成非黏接部（26a)，就可以在分離過程中如圖5、 圖8及圖11所示，當彈性膜充分膨脹後，只有黏接膜(26)的中央 14 1301117 部位與基板(12)接觸 接部（26a)，基板無法 (26a)可以有效地防止 情況。 。但是，由於中央部位是沒有黏接膜的非黏. 繼續黏附在黏接膜(26)上。因此，非黏接部 彈性膜(24)充分膨脹卻無法使基板脫離的 圖12〜圖15是本發明第四實施例的相關圖形。圖12是彈性板 的立體結構®，圖13是該雜板與夾持板的結合狀細。本實施 例中在夾持板(2〇)均勻分佈著四邊形的多個孔(22)，每個孔(⑵ 的内牆上有-雙對向的擋肩（22a)。彈性板⑽)是金屬材料，它的 兩端疋掛在上述擋肩（版)的播片（62)。該彈性板⑽）的底面在彎 曲進入夾持板底_部的突人位置和料突出於夾持板底面的突 出位置之間進行彈性變形。這時，在突人位置的形狀幾乎是水平， 可以把它視爲曲率半徑非常大的圓弧。黏接膜⑽黏接(B〇nding) 到上述彈性板⑽）的底面。如果柿誠⑽形成—條穿越彈性 板兩端擋片（62)之間的中央位置的帶形非黏接部（26a)，將能使效 果更爲顯著。 夾持板的上方有可以水平垂直移動的黏接板(7〇)，黏接板(7〇) 的底面突出形成了可以對整個上述彈性板(6〇)施加壓力的多個動 作棒(70a)。還有可以水平垂直運動的分離板(72)，分離板(72)的 一側則有多個動作銷（72a)突出並與彈性板(60)的非黏接部（26a) 對應。黏接板(70)與分離板(72)可以在每個夾持板的上方進行水 15 < 5 1301117 平與垂直運動，因此需要注意避免移動時互相干涉。 · 另方面，在上述播片（62)與播肩（22a)之間安裝了多個彈箬 (64)。每個’轉固定狀態，並且在自由狀態下支援雜板⑽） 使其底面位於夾持板底面之上。 下面說明具有上述結構的本發明第四實施例的動作。如圖Μ 所示底座上升時，黏接板(7〇)也會同時下降並使動作棒(7如)推 £彈性板(60)，彈黃（64)被壓縮導致彈性板(6〇)底部突出於孔(22) 外並絲板(12)上邊接觸。在這種情形下，即使底座下降，黏接 ⑩ 板(70)上升，基板(12)也會維持被黏接膜(26)黏接到彈性板(6〇) 的狀憑’基板⑽重制餅簧⑽)無法恢復初始狀態，導致彈 性板(60)無法進入内側並維持基板的黏接狀態。黏接板(7〇)在這 種情形下上升並脫離夾持板⑽，夾持板則被輸送到沈積程序位 置並完成沈積作。需要把完成了沈雜序的基板分離時，把完 成沈積的基板輸送到初始位置，然後如圖15所示，驅動分離板(72) 下降，動作銷(他)將推壓彈性板⑽的中央部位，也就是非黏接 # 部（26a) ’彈性板(60)將朝下彎曲突出並將基板(⑵推離彈性板 (60)。 . 在本發的明第四實施例中，在實際夾持基板的彈性板⑽)與 輸送基板⑽的麟板⑽)之間安裝彈簧(64)，可以儘量減少由 於夾持板移動時産生的機械振動等原因所造成的基板(⑵顫抖， 進而降低基板中途脫離的可能性。 16 < *5 ) 1301117 本發明還允雜上述第四實補巾說_如綠結構與第三 實施例中說_耕板結構加贿合，進㈣過電磁_動作控 制彈性板⑽）。也就是說’基板的夾持是通過外部電磁閥的動作 完成的’ *基板的分咖提通制部電磁_動作完成的。由合 成樹脂(橡膠）製成的彈性膜保證了動作的可靠性。 另-方面，圖16〜圖18是本發明第五實施例的相關圖形。下 面說明了利用磁性板夾持基板的機制。圖16圖示了整個結構。 磁性板(80)固定在基板（12)上面，夾持板（9〇)在它的上方進行上 下運動，刀離板〇00)在夾持板（90)的上方進行上下運動。 如圖17所示，磁性板(80)均勻排列在基板（12)上面。如圖i8a 所示，每個磁性板(80)由黏接劑（82)固定到基板。上述磁性板(8〇) 的形態與個數不限於目16中的圖示而採取多樣化的形態與個數， 例如，即使只使用一個黏接板也可以。把磁性板(8〇)黏附到基板 (12)的方法也有很多種。除了上述黏接劑（82)以外，還可以利用 在真空中不會氣化的南黏性液體黏接基板與黏接板；或者先把單 面黏膜(Fi lm)黏接到基板後利用上述液體黏接黏膜(Fi lm)與基 板；或者如圖18b所示，磁性板⑽）可以在真空中使用，利用分 離時沒有殘留物的單面黏膜(Film)(84)覆蓋磁性板進行黏接。 使用上述液體時，可以在程序完畢後利用液體清除裝置清除 液體’或者拿掉塗上了液體的單面黏膜(Film)即可。 17 <5 1301117 在夾持板(90)的底面安裝了與上述磁性板⑽）對應的多個永久磁 鐵(92)。夾持板(90)的整個面上均勻地分佈著貫通孔。貫通 孔（94)的理想位置是每個永久磁鐵（92)之間的中間位置。 分離板（100)上具有可以通過上述夾持板(9〇)的貫通孔（94) 插入並與基板上面干涉的多個動作銷（1〇2)。爲了避免動作銷（1〇2) 接觸基板(12)時對基板造成損傷，最好使用特氟綸(tefl〇n)等材 料製作。 具有上述結構的本發明弟五貫施例，如圖19a所示，當底座 (10)上升後，磁性板(80)在指定的位置被永久磁鐵(92)吸住，基 板(12)也被夾持板(90)支承。這時底座（丨〇)下降就會變成如圖19b 的狀態，基板(12)跟著夾持板(90)被輸送到沈積位置後進行沈積 私序。需要把完成了沈積程序的基板分離時，把完成沈積的基板 輸送到初始位置，然後如圖19c所示驅動分離板（1〇〇)下降，動作 銷（102)將插入夾持板(90)的貫通孔(94)並在指定位置推壓基板 (12)的上邊，磁性板(80)被推離永久磁鐵(92)，基板(〇則回到 預先在指定位置等待的底座（10)上面。完成了所有程序後，磁性 板(80)將脫離基板。 根據第五實施例，可以在程序之間移動時只輸送基板（12)， 因此即使是面積較大的基板也能輕易地夾持及輸送。 另一方面，本發明雖然對上述各種實施例進行了說明，作是 也可以互相置換各實施例中可互換的組成單元而形成另一種形能 18 l3〇lli7 的實施例，因此本發明的技術範圍應該包括可以由上述實施例經 過置換與簡單替代等操作而衍生出來的實施形態。例如，下面的 说明也可以構成本發明的一個實施例。使夾持板的黏接膜部位朝 上，基板進入夾持板的上方，然後利用基板重量使黏接膜與基板 黏接，再把夾持板旋轉180度即可完成對基板的夾持。 本發明所提供的平減縣置上湖紐上了魏黏接用黏 接劑的彈性隔_ ’使縣發_平板夾持裝置祕結構簡單， 可以在真空中使用’減少耗«，還可以發揮輕歧持較大面積 平板的效果。 19 Ι3011Π 【圖式之簡單說明】 圖1 圖 圖 圖2=明Γ板爽持裝置的第—實施例的結構剖面 ^弟—實施綱夾持板結構底面圖。 °疋本务明第一實施例的動作狀態圖。 ^4 =本發明第—實施綱基板續動作狀態圖。 ^本發—實施例的基板分離動作局部放大剖面 °疋本發明第二實施例的結構剖面圖。 °疋本發明第二實施例的動作狀態圖。 Υ是本务明第二實施例的基板分離動作局部放大剖面 圖9是本發明第三實施例的結構剖面圖。 圖1〇疋本發明第三實施例的動作狀態圖。 j疋本發明第三實施例的基板分離動作局部放大剖面 ° 疋本务明弟四實施例的彈性膜結構立體圖。 回3本翻第四實細的雜麟夾持板的結合狀態剖面 。14疋本發明第四實施例的基板黏接動作剖面圖。 圖15是本發明第四實施例的基板分離動作剖面圖。 回6疋本發明第五實施例的結構剖面圖。 圖17疋本發明第五實施例中磁性板布置狀態的基板平面圖。 ° 18a疋本發明第五實施例中磁性板吸附的局部放大剖面 圖 圖 圖 圖0 20 1301117 圖18b是本發明第五實施例中磁性板其他吸附例的局部放大 剖面圖。 圖19a〜圖19c是本發明第五實施例的動作剖面圖。 【元件編號之說明】 10:底座 20:夾持板 24:彈性膜 26a:非黏接部 30:調節閥 42，52:延長管 54:外部電磁閥 56a:動作桿 90 ·失持板 94 :貫通孔 102 :動作銷 12:平板 22:孔 26:黏接膜 28:出口 40，50:升降板 44:出口 56:内部電磁閥 80:磁性板 92 :永久磁鐵 100 :分離板 21BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel holding device, and more particularly to a flat panel for fixing a glass substrate when manufacturing a flat panel display such as an LCD, a PDP or an organic EL. It is also possible to effectively support the holding device of the substrate when moving between the programs. [Prior Art] In general, flat panel displays mainly include liquid crystal displays (LCDs), pDps, and organic ELs (Organic Electroluminescence). LCDs require additional light sources, and there are technical limitations in brightness, contrast, viewing angle, and large area. Therefore, recent research on organic EL has been active. The organic el can be driven by a low voltage, can self-illuminate, is light and thin, has a wide field of view, and responds to agility. The flat panel display described above is produced by a series of processes such as deposition of a substrate made of a material such as glass. After the flat plate is fixed by the substrate holders (10) and (4), various deposition processes are required. In this case, the substrate scanner needs to support the deposition surface of the substrate and to be lowered. The accuracy of the sandwiched red deposits has an important influence, such as the 'substrate mirror' is well-turned under the scales. In addition, in order to improve workability and shorten the work _, the substrate county is simple. Ehuck) or electrostatic chucks are the most common methods. The vacuum chuck is a method of holding the suction cup against the back of the flat plate and sucking the flat plate from the back of the flat plate to absorb the difference in air pressure between 1301117. _ method; ‘ _ are in the real recording state of the mother to sink the fresh material, and ^ is also too complicated. That is to say, since dust, water vapor, oxygen, etc., the main cause of the increase in the defective rate of the board display, it is necessary to carry out the light operation in a vacuum state. The fine vacuum does not contribute to such a vacuum. In addition, the electrostatic chuck is a method of adsorbing (adhering) the plate by electrostatic force, which allows the current to pass through the flat surface of the woman (eleetriG, after the iron is used to make the plate from the glass material (four) charged (eleetrify) ), and then use its electrostatic force (electrcstatic fQrce) adsorption (_) plate. This method can be used under vacuum, but it contains the next point. In order to singularly large plates, the electrostatic chuck needs to maintain a large (four) Field, shame is very large; in order to continue to supply current in various types of deposition procedures, complex mechanical devices are needed; current forms an electric field on the substrate. The electric field is a substance that needs to be deposited on the plate (such as chemicals, etc.) The deposit affects and further degrades its performance. In particular, when the current supply is stopped in order to separate the substrate, the charge in the charged plate cannot be immediately eliminated, and the separation operation is difficult. A flat plate clamping device which is simple in structure and can be used in the second two is proposed in view of the above disadvantages of the prior art. Reduce power consumption, and easily hold a large-area flat plate while maintaining good flatness. 1301117 A board is a thing, her tender words are reduced to the bottom surface of the controllable material. The inclusion mechanism in the water-repellent membrane adjustment mechanism makes the above-mentioned elasticity = ^ Γ = Γ fixed membrane, elastic elastic plate movement and (4) Γ 节 mechanism can make the corresponding bomb = adjustment mechanism to connect the above holes to an outlet, through The supply of the ^ is maintained at the upper and lower sides by the elastic film. In other embodiments, the above-mentioned elastic film regulating mechanism on the lifting plate can be followed by two plates, and the plurality of chiefs are extended in the scale (four). And inserted into each of the above holes, the bottom surface of the extension tube is sealed by the elastic film. The film is connected to each of the outlets to maintain the pressure difference between the lower sides of the clamping plate by the elastic supply of the air supply to the outlet. In the /, Beibeiguan, the above elastic film adjustment mechanism on the lifting plate can be vertically moved above the missing plate, and a plurality of extension pipes are protruded from the plurality of holes facing downward in the lifting plate and are divided into the above Axis Long material _ human electromagnetic 阙 and expand the elastic film according to electrical signals. Each of the above-mentioned solenoid valves adopts a double structure consisting of an external electromagnetic valve for bonding the substrate and an internal electromagnetic valve for separating the substrate. The above-mentioned dance film uses soft synthesis. Lin, which has a high elongation rate, is the same shape as each hole, and is bonded at the edge of the hole (8) secret (6)." 1301117 The central portion of the above-mentioned adhesive surface is a non-adhesive part, which can be used for bribery separation. The light film and the adhesive film may be polygonal or rectangular with a corner of 4 or more. In addition, the flat plate clamping device of the present invention can hold the substrate on the base of the controllable lifting, and it can also be composed of the lower winning unit. : Above the base can be horizontal machine, _ more than the other side of the wealth of the opposite to the object wheel; both ends are: to hang on the shoulders of the correction, the bottom of the material into the bottom of the bottom of the man's secret board, and 3 The elastic plate that elastically deforms between the protruding positions of the bottom surface of the clamping plate; the bottom surface of the miscellaneous plate is adhered to the bottom surface of the miscellaneous plate, and the substrate is bonded to the bonding film; in the _ board H success level county, An action stick protruding from the bottom can The miscellaneous plates are respectively inserted into the holes; the vertical and horizontal manuscripts and the above-mentioned jagged scales are arranged above the clamping plates, and the plurality of action locks protruding from the city wire can be divided into the separating plates of the holes. In the above-mentioned slabs, the revolving springs can be used for good results. In another aspect, the flat plate clamping device of the present invention can hold a substrate on a controllable lifting platform. It can also be composed of a lower winning unit: a magnetic object that is hooked on the substrate, and the magnetic object Above the free sense, a permanent magnet corresponding to the magnetic plate is mounted on the bottom surface thereof, and a plurality of through holes are provided on the entire surface; a separating plate located above the cooling plate, a plurality of bottom surfaces of the separating plate can be inserted into the through hole An action lock that interferes with the upper edge of the substrate. The magnetic plate is adhered to the substrate by an adhesive which can be used in a vacuum, 1301117 or by (4) allowing the (4) to be affixed to the substrate and the remaining single-sided adhesive film (Film) to be bonded to the substrate. [Embodiment] The following is a further explanation of the fat board device in conjunction with _ and appropriate real_. Figure 5 is a diagram showing the first embodiment of the present invention. The base (1G) in the figure is controlled by the control of the meal (4), which can support the substrate (10) entering from the outside. The base (1G) not only supports the substrate (10) placed thereon, but also lifts the substrate to a working position as will be described later, and an air bag (not shown) or the like is attached to the substrate. At this time, if f is to protect the underside of the substrate, the elasticity of the holding plate can be fixed, and the substrate can be fixed after being inserted into the upper surface of the holding plate, rotated 180 degrees, and then transported to the next program. The clamping plate (20) is moved horizontally along the way (not shown) above the base (10). The shape of the clamping plate (20) is similar to that of the quadrilateral. It waits along the way to the working position above the base (1〇), that is, the holding position of the substrate (12), and waits for the substrate (12). After the clamping work, move along the road to the next program. The bottom surface of the holding plate (20) has a plurality of holes (μ) having a certain depth. The holes (22) are evenly distributed in a matrix, and each hole (22) is connected to a single outlet (28) located on the side of the holding plate (2〇). An elastic film (24) having a certain elasticity is fixed to the rear end of each of the holes (22). 1301117 The edge of the elastic film (24) is bonded to the entrance of the hole (22) and maintains a good bond. The elastic film (10) is composed of a material having excellent elongation such as a stone film. Its elongation and elastic restoring force can be restored at least in any diameter-dependent plane shape extension period - after the hemispherical shape, the external force can be restored. The original form 'is also the original circular plane shape. An adhesive film (26) is fixed to the bottom surface of the elastic film (24). One side of the adhesive film (26) is fixed on the elastic film (10) by an adhesive, and the other side maintains a certain adhesive force. As shown in Fig. 2, the elastic film (10) and the adhesive film (10) are both circular. The above-mentioned adhesive film (10) maintains a good force against the material, and the material does not leave a sticky substance on the substrate surface. In addition, the viscous material can be semi-permanently maintained for a long time. Since the person (4) is miscellaneous (four), the detailed description of it is omitted. The present invention includes an adjustment mechanism (10) for controlling the amount of air through the outlet (28) of the above-described holding plate (10). The adjustment mechanism (10) causes a pressure difference between the upper and lower sides and a deformation of the elastic film by controlling the air flow rate with the elastic film (24) as a boundary. Next, the operation state of the tablet holder of the present invention having the above configuration will be described. First, as shown in Fig. 1, in the case where the base (10) is lowered, the J1 above the holding plate (10) is used as the position 'that is, the scale position of the substrate (10). At this time, as long as the substrate (12) is transported over the seat (10), the base (1{)) is lifted by the display of the engine. As shown in Fig. 3, the adjustment mechanism (10) will open the outlet 1301117 (28) of the clamping plate (10). The return port (28) is opened into the hole (22) and flows into the outside air to cause pressure-rise, thereby driving the elasticity. The membrane (24) expands and protrudes from the bottom surface of the clamping plate (10). At this time, the pressure in the above hole is atmospheric pressure. Since the present invention is installed in a vacuum chamber, when the hole is connected to the outside atmospheric pressure, the inside of the hole is relatively made to work outside.卩) The rain pressure is maintained, and the elastic film (μ) is protruded. Therefore, the elastic film (24) protruding downward will come into contact with the upper side of the substrate (12) on the raised base (1), with the result that it is in contact with the adhesive film (26) on the bottom surface of the elastic film (24). The ascending action of the base (10) causes the substrate (12) to contact the bottom surface of the holding plate (2) to form an adhesive film (26) which is sufficiently pressurized by atmospheric pressure. At this time, as shown in Fig. 4, the atmospheric pressure in the holding plate (2〇) is released, and the base (1〇) is returned to the lowered position. The substrate (12) will continue to be adhered to the clamping plate (20) by the bonding film (26), and will be transported to the next program along a path (not shown), for example, a shadow mask clamping, etc. program. The following is a description of the process of disengaging the substrate (12) from the holding plate (2〇) after the deposition process is completed. Figure 5 partially enlarges the main unit performing the separation action. After the sinking work is completed, the substrate (12) is transported to the separation process and stopped, and then the control valve (3〇) is opened and atmospheric pressure is introduced into the hole (22). The elastic film (24) will expand as the pressure in the hole rises, and the substrate (12) is gradually separated from the adhesive film (26). That is, the elasticity. The film (24) will be pressed by the pressure and protrude in a hemispherical shape, and each of the adhesive portions will gradually detach from the edge, and the elastic film (24) will be fully expanded to leave only the central portion to be adhered. On the adhesive film. The adhesive film will lose the force of the substrate (12) and the substrate will detach and return to the other base below the 11 V Ss y 1301117. "Other aspects," 6 to 8 show a first embodiment of the elastic film adjusting mechanism of the flat plate holding device of the present invention. The separate holding plate of the present embodiment can reduce the transport load. There is a vertical movement _(10) above the clamping plate (20). The lifting plate (10) comprises a plurality of downwardly facing holes from which a plurality of extension tubes (10) extend and are respectively inserted into the holes (22) of the holding plate (20), and the bottom surface of the extension tube (42) is mounted. Other elastic films 'these parts make up the body. Each viewing length f (42) is connected to the side of the lifting plate (10) - single-outlet (10). The adjustment mechanism (10) controls the amount of air flowing through the outlet (44) of the lift plate W0). The adjustment mechanism adjusts the amount of air to extend the pressure difference between the upper and lower sides of the independent membrane (10) of the tube and thereby deform the elastic film (24) of the lower holding plate (2〇). Next, the action of the second embodiment will be described. As shown in Fig. 6, the holding plate (2〇) enters the working position, and when the substrate (12) is placed on the base (1〇), the base (1〇) rises and the lifting plate (40) also descends. At this time, the base (1) is conveyed to the bottom surface of the holding plate (10), and the extension tube (42) is inserted into the hole (22) of the holding plate (10) and the adhesive film (10) is bonded to the substrate (10). In this case, the meaning is the same as that of the present embodiment. After the bonding work on the substrate (12) is completed, the base (1〇) is lowered, and the lift plate (40) is raised, _ the original position. The substrate (10) is in a state in which the adhesive film (10) is adhered to the holding plate (20) (not shown), and is conveyed to the next program. 12 1301117 The second embodiment of the towel, in addition to the above-mentioned lifting plate in the clamping position, requires the structural phase_other-bribery lowering plate. Also - that is, as shown in Fig. 8, there must be another lifting plate (10) in the separation process to separate the substrates. In the second embodiment of the present invention, the elastic film is controlled by the lifting and lowering of the lifting plate (10). Therefore, when the machine is interposed between the programs, only the wei slab (10) needs to be transported by a transporting tool (not shown), thereby Reduced the mobile load. In particular, it is solved in the first embodiment that the air supply line and the slats are movable in advance to be foreseeable. Xin Figure 9 to Figure 11 show a third embodiment of the membrane adjustment mechanism of the plate clamping device of the present invention. It turned to reduce the structure of the transport load, but the membrane adjustment mechanism was changed to use electrical power for control. Above the clamping plate (20) there is a vertically moving lifting plate (10). The lifting plate (10) includes a plurality of downwardly facing holes from which a plurality of extension tubes (10) are extended and inserted into the holes (22) of the holding plates (10) respectively. These components constitute a body. The electromagnetic 嶋 _ enters these holes (22) and expands the elastic film (24) according to electrical signals. Each of the above solenoid valves has a double structure consisting of an external solenoid valve (54) for bonding the substrate and an internal solenoid valve (56) for separating the substrate. Next, the action of the third embodiment of the present invention will be described. As shown in Fig. g, the clamping plate (2〇) enters the working position, and when the substrate (12) is placed on the base (10), the base (1〇) rises and the lifting plate (40) also descends. At this time, as shown in FIG. 1A, the lifting plate (5〇) is lowered and the 131301117 extension pipe (10) is inserted into the hole (10), and at the same time, the base (10) supporting the substrate (12) is supported by the first embodiment. Start to rise. In this case, only the substrate is held to the signal, and the external electromagnetic '4' starts to move, and it will protrude downward and make the elastic film (24) face downward. When the external power supply (54) is activated, the internal electromagnetic _6) will move. At this time, the position of the elastic film (10) is such that the substrate (10) and the adhesive film (26) are tightly pressed and adhered to each other. After the bonding is completed, the lifting plate (10) is raised, and the base (10) is lowered back to the original position, leaving only the Zhao board (10) and the substrate-to-be-produced--a program. On the other hand, when the substrate (10) needs to be separated, the internal electromagnetic wide (10) starts to operate after receiving the separation signal. At this time, the external solenoid valve (54) is fixed in the extension tube (10), and only the internal electric charge (10) is protruded. Therefore, as shown in Fig. u, the action lever (56a) pushes the elastic sheet of the elastic film (24) to cause the elastic film to be inverted, thereby causing the substrate (12) to be detached. The second embodiment of the present invention can reduce the weight of the missing plate (10) and reduce the moving load' and because it utilizes the electrically controlled elastic film, it is not required as in the first and second embodiments. The device for supplying air can simplify the structure, clean the working space, and effectively reduce the defect rate. On the other hand, in each of the above embodiments, the non-adhesive portion (26a) having no adhesive force at the central portion of the adhesive film (26) is more effective. That is, the tiger's form a non-adhesive part (26a) as shown in Fig. 2, as shown in Fig. 5, Fig. 8 and Fig. 11, during the separation process, when the elastic film is fully expanded, only the adhesive film (26) The central 14 1301117 portion is in contact with the substrate (12) (26a), and the substrate cannot be effectively prevented (26a). . However, since the central portion is non-adhesive without an adhesive film, it continues to adhere to the adhesive film (26). Therefore, the non-adhesive portion elastic film (24) is sufficiently expanded but the substrate cannot be detached. Figs. 12 to 15 are related drawings of the fourth embodiment of the present invention. Fig. 12 is a three-dimensional structure of the elastic plate, and Fig. 13 is a combination of the jagged plate and the holding plate. In this embodiment, a plurality of quadrangular holes (22) are uniformly distributed on the holding plate (2), and each hole (the inner wall of the (2) has a double opposite shoulder (22a). The elastic plate (10) is Metal material, the ends of which are hung on the above-mentioned shoulder (version) of the broadcast piece (62). The bottom surface of the elastic plate (10) is elastically deformed between a protruding position which is bent into the bottom portion of the holding plate and a protruding position where the material protrudes from the bottom surface of the holding plate. At this time, the shape at the position of the person is almost horizontal, and it can be regarded as an arc having a very large radius of curvature. The adhesive film (10) is bonded (B〇nding) to the bottom surface of the elastic plate (10). If the persimmon (10) forms a strip-shaped non-adhesive portion (26a) that passes through the central position between the end plates (62) of the elastic plate, the effect will be more remarkable. Above the clamping plate, there is a bonding plate (7〇) which can move horizontally and vertically. The bottom surface of the bonding plate (7〇) protrudes to form a plurality of action bars (70a) which can apply pressure to the entire elastic plate (6〇). ). There is also a separating plate (72) which is horizontally and vertically movable, and a side of the separating plate (72) has a plurality of action pins (72a) projecting and corresponding to the non-adhesive portion (26a) of the elastic plate (60). The bonding plate (70) and the separating plate (72) can perform horizontal and vertical movement of water 15 < 5 1301117 above each holding plate, so care must be taken to avoid mutual interference when moving. On the other hand, a plurality of magazines (64) are installed between the above-mentioned broadcast piece (62) and the shoulder (22a). Each 'turns to a fixed state, and supports the miscellaneous plate (10) in a free state) with its bottom surface above the bottom surface of the holding plate. Next, the operation of the fourth embodiment of the present invention having the above configuration will be described. As shown in Figure 上升, when the base is raised, the bonding plate (7〇) will also descend at the same time and the action bar (7) will be pushed to the elastic plate (60), and the elastic yellow (64) will be compressed to cause the elastic plate (6〇). The bottom protrudes beyond the hole (22) and contacts the upper side of the wire plate (12). In this case, even if the base is lowered, the bonding 10 plate (70) rises, and the substrate (12) is maintained by the adhesive film (26) adhered to the elastic plate (6〇) by the substrate (10). The cake spring (10) cannot be restored to the initial state, and the elastic plate (60) cannot enter the inside and maintain the bonding state of the substrate. In this case, the bonding plate (7〇) rises and disengages from the holding plate (10), and the holding plate is conveyed to the deposition program position and the deposition is completed. When it is necessary to separate the substrate from which the impurity sequence is completed, the substrate to be deposited is transported to the initial position, and then, as shown in FIG. 15, the driving separation plate (72) is lowered, and the action pin (the other) pushes the center of the elastic plate (10). The portion, that is, the non-adhesive # portion (26a) 'the elastic plate (60) will be bent downward and protrude and push the substrate ((2) away from the elastic plate (60). In the fourth embodiment of the present invention, in practice A spring (64) is attached between the elastic plate (10) for holding the substrate and the lining plate (10) of the transport substrate (10), so as to minimize the vibration caused by mechanical vibration caused by the movement of the clamping plate ((2) tremble, thereby reducing The possibility of detachment of the substrate in the middle. 16 < *5 ) 1301117 The present invention also allows the fourth solid cover to be said to be _ such as the green structure and the third embodiment, the ploughing plate structure is combined with bribes, and the (four) over electromagnetic _ Action control elastic plate (10)). That is to say, the "clamping of the substrate is completed by the action of the external solenoid valve." * The electromagnetic conduction operation of the substrate is completed. The elastic film made of synthetic resin (rubber) ensures the reliability of the action. On the other hand, Figs. 16 to 18 are related figures of the fifth embodiment of the present invention. The mechanism for holding the substrate by the magnetic plate is explained below. Figure 16 illustrates the entire structure. The magnetic plate (80) is fixed on the substrate (12), and the holding plate (9〇) moves up and down above it, and the blade moves up and down above the holding plate (90). As shown in Fig. 17, the magnetic plates (80) are evenly arranged on the substrate (12). As shown in Figure i8a, each magnetic plate (80) is secured to the substrate by an adhesive (82). The form and number of the magnetic plates (8 inches) are not limited to the ones shown in Fig. 16, and various forms and numbers are adopted. For example, only one bonding plate may be used. There are also many ways to adhere a magnetic plate (8 〇) to the substrate (12). In addition to the above-mentioned adhesive (82), it is also possible to use a south viscous liquid which is not vaporized in a vacuum to adhere the substrate and the bonding board; or to bond the single-sided adhesive film (Film) to the substrate, The liquid bonding film (Film) and the substrate; or as shown in Fig. 18b, the magnetic plate (10) can be used in a vacuum, and the magnetic plate is covered by a single-sided film (84) having no residue at the time of separation for bonding. . When using the above liquid, you can use the liquid removal device to remove the liquid after the program is finished or remove the liquid-coated single-sided film (Film). 17 <5 1301117 A plurality of permanent magnets (92) corresponding to the above-described magnetic plates (10) are attached to the bottom surface of the holding plate (90). Through holes are evenly distributed on the entire surface of the holding plate (90). The ideal position of the through hole (94) is the intermediate position between each of the permanent magnets (92). The separating plate (100) has a plurality of action pins (1〇2) that can be inserted through the through holes (94) of the holding plate (9) and interfere with the upper surface of the substrate. In order to avoid damage to the substrate when the action pin (1〇2) contacts the substrate (12), it is preferable to use a material such as teflon (tefl〇n). According to the fifth embodiment of the present invention having the above structure, as shown in Fig. 19a, when the base (10) is raised, the magnetic plate (80) is attracted by the permanent magnet (92) at a specified position, and the substrate (12) is also The clamping plate (90) is supported. At this time, the base (丨〇) is lowered to become the state shown in Fig. 19b, and the substrate (12) is transported to the deposition position following the holding plate (90) to be deposited in a private order. When it is necessary to separate the substrate on which the deposition process is completed, the substrate to be deposited is transported to the initial position, and then the separation plate (1〇〇) is lowered as shown in Fig. 19c, and the action pin (102) is inserted into the holding plate (90). The through hole (94) pushes the upper side of the substrate (12) at a specified position, the magnetic plate (80) is pushed away from the permanent magnet (92), and the substrate (back to the base (10) waiting in advance at the designated position After all the procedures are completed, the magnetic plate (80) will be detached from the substrate. According to the fifth embodiment, only the substrate (12) can be transported while moving between programs, so that even a large-area substrate can be easily held. On the other hand, the present invention has been described with respect to the above various embodiments, and it is also possible to replace the interchangeable constituent units of the respective embodiments to form another embodiment of the shape energy 18 l3〇lli7. The technical scope of the invention should include embodiments which can be derived from the above-described embodiments by replacement and simple replacement, etc. For example, the following description may also constitute an embodiment of the invention. The part is facing upward, the substrate enters the upper part of the clamping plate, and then the bonding film is bonded to the substrate by the weight of the substrate, and then the clamping plate is rotated by 180 degrees to complete the clamping of the substrate. Putting on the elastic barrier of the adhesive for Wei bonding on the lake _ 'Let the county hair _ flat plate clamping device secret structure is simple, you can use 'reduced consumption' in the vacuum, you can also play a light slab holding a large area flat 19 Ι3011Π [Simplified description of the drawing] Fig. 1 Fig. 2Fig. 2 is a structural section of the first embodiment of the slab holding device, and the bottom view of the structure of the clamping plate is implemented. Fig. 4 is a diagram showing the state of the operation of the substrate of the first embodiment of the present invention. Fig. 1 is a cross-sectional view showing the structure of the substrate according to the second embodiment of the present invention. FIG. 1 is a cross-sectional view showing a structure of a second embodiment of the present invention. FIG. 1 is a cross-sectional view showing a structure of a third embodiment of the present invention. The action state diagram of the third embodiment. j DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE PREFERRED EMBODIMENT OF THE INVENTION Fig. 15 is a cross-sectional view showing the substrate separating operation of the fourth embodiment of the present invention. Fig. 17 is a sectional view showing the structure of the fifth embodiment of the present invention. A plan view of a substrate in a state in which a magnetic plate is disposed in a fifth embodiment. A partial enlarged sectional view of a magnetic plate in a fifth embodiment of the present invention is shown in Fig. 0 20 1301117. Fig. 18b is another adsorption of the magnetic plate in the fifth embodiment of the present invention. Fig. 19a to Fig. 19c are cross-sectional views showing the action of the fifth embodiment of the present invention. [Description of component number] 10: Base 20: Holding plate 24: Elastic film 26a: Non-adhesive portion 30: Adjustment valve 42, 52: Extension tube 54: External solenoid valve 56a: Action lever 90 · Missing plate 94: Through hole 102: Action pin 12: Plate 22: Hole 26: Adhesive film 28: Outlet 40, 50: Lifting plate 44: Outlet 56: Internal solenoid valve 80: Magnetic plate 92: Permanent magnet 100: Separating plate 21