TWI298315B - - Google Patents

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Publication number
TWI298315B
TWI298315B TW092119237A TW92119237A TWI298315B TW I298315 B TWI298315 B TW I298315B TW 092119237 A TW092119237 A TW 092119237A TW 92119237 A TW92119237 A TW 92119237A TW I298315 B TWI298315 B TW I298315B
Authority
TW
Taiwan
Prior art keywords
film
transparent film
transparent
raw material
material gas
Prior art date
Application number
TW092119237A
Other languages
English (en)
Chinese (zh)
Other versions
TW200413264A (en
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2003/000963 external-priority patent/WO2003064343A1/ja
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Publication of TW200413264A publication Critical patent/TW200413264A/zh
Application granted granted Critical
Publication of TWI298315B publication Critical patent/TWI298315B/zh

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  • Surface Treatment Of Glass (AREA)
TW092119237A 2003-01-31 2003-07-15 Method for forming transparent thin film, transparent thin film formed by the method and transparent substrate with transparent thin film TW200413264A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/000963 WO2003064343A1 (fr) 2002-01-31 2003-01-31 Procede de formation d'un film mince transparent, film mince transparent ainsi obtenu, et substrat transparent comportant un film mince transparent

Publications (2)

Publication Number Publication Date
TW200413264A TW200413264A (en) 2004-08-01
TWI298315B true TWI298315B (de) 2008-07-01

Family

ID=45090888

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092119237A TW200413264A (en) 2003-01-31 2003-07-15 Method for forming transparent thin film, transparent thin film formed by the method and transparent substrate with transparent thin film

Country Status (1)

Country Link
TW (1) TW200413264A (de)

Also Published As

Publication number Publication date
TW200413264A (en) 2004-08-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees