TWI292471B - - Google Patents
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- Publication number
- TWI292471B TWI292471B TW95138566A TW95138566A TWI292471B TW I292471 B TWI292471 B TW I292471B TW 95138566 A TW95138566 A TW 95138566A TW 95138566 A TW95138566 A TW 95138566A TW I292471 B TWI292471 B TW I292471B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- lens
- image
- plane
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 57
- 238000006073 displacement reaction Methods 0.000 claims description 33
- 238000012545 processing Methods 0.000 claims description 31
- 238000005259 measurement Methods 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 14
- 230000001154 acute effect Effects 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 238000004364 calculation method Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- MCWJHOCHKYKWMK-UHFFFAOYSA-N helium Chemical compound [He].[He] MCWJHOCHKYKWMK-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003702 image correction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI292471B true TWI292471B (enrdf_load_stackoverflow) | 2008-01-11 |
TW200819704A TW200819704A (en) | 2008-05-01 |
Family
ID=44769900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200819704A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408331B (zh) * | 2009-12-17 | 2013-09-11 | Ind Tech Res Inst | 雙面光學膜片量測裝置與方法 |
TWI461650B (zh) * | 2012-04-17 | 2014-11-21 | Univ Nat Taiwan | 影像處理系統及其方法 |
CN107643055A (zh) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
-
2006
- 2006-10-19 TW TW95138566A patent/TW200819704A/zh unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408331B (zh) * | 2009-12-17 | 2013-09-11 | Ind Tech Res Inst | 雙面光學膜片量測裝置與方法 |
TWI461650B (zh) * | 2012-04-17 | 2014-11-21 | Univ Nat Taiwan | 影像處理系統及其方法 |
CN107643055A (zh) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
CN107643055B (zh) * | 2017-09-29 | 2024-12-10 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200819704A (en) | 2008-05-01 |
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