TWI292471B - - Google Patents
Download PDFInfo
- Publication number
- TWI292471B TWI292471B TW95138566A TW95138566A TWI292471B TW I292471 B TWI292471 B TW I292471B TW 95138566 A TW95138566 A TW 95138566A TW 95138566 A TW95138566 A TW 95138566A TW I292471 B TWI292471 B TW I292471B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- lens
- image
- plane
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 57
- 238000006073 displacement reaction Methods 0.000 claims description 33
- 238000012545 processing Methods 0.000 claims description 31
- 238000005259 measurement Methods 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 14
- 230000001154 acute effect Effects 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 238000004364 calculation method Methods 0.000 description 7
- 238000002360 preparation method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- MCWJHOCHKYKWMK-UHFFFAOYSA-N helium Chemical compound [He].[He] MCWJHOCHKYKWMK-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003702 image correction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI292471B true TWI292471B (enrdf_load_stackoverflow) | 2008-01-11 |
| TW200819704A TW200819704A (en) | 2008-05-01 |
Family
ID=44769900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200819704A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI408331B (zh) * | 2009-12-17 | 2013-09-11 | Ind Tech Res Inst | 雙面光學膜片量測裝置與方法 |
| TWI461650B (zh) * | 2012-04-17 | 2014-11-21 | Univ Nat Taiwan | 影像處理系統及其方法 |
| CN107643055A (zh) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
| CN116125627A (zh) * | 2022-12-06 | 2023-05-16 | 江苏北方湖光光电有限公司 | 一种成像系统与光通迅接收光路共轴的光学系统 |
-
2006
- 2006-10-19 TW TW95138566A patent/TW200819704A/zh unknown
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI408331B (zh) * | 2009-12-17 | 2013-09-11 | Ind Tech Res Inst | 雙面光學膜片量測裝置與方法 |
| TWI461650B (zh) * | 2012-04-17 | 2014-11-21 | Univ Nat Taiwan | 影像處理系統及其方法 |
| CN107643055A (zh) * | 2017-09-29 | 2018-01-30 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
| CN107643055B (zh) * | 2017-09-29 | 2024-12-10 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
| CN116125627A (zh) * | 2022-12-06 | 2023-05-16 | 江苏北方湖光光电有限公司 | 一种成像系统与光通迅接收光路共轴的光学系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200819704A (en) | 2008-05-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107255454B (zh) | 一种基于紫外成像dic的超高温多尺度多功能应变测量系统及测量方法 | |
| JP5112588B2 (ja) | 精密工業部品の形状および幾何学的寸法を測定するための方法並びに装置 | |
| JP5087186B1 (ja) | 等光路干渉計 | |
| TWI486550B (zh) | 厚度線上即時檢測之光學干涉裝置及其方法 | |
| US7545510B2 (en) | Method of characterizing transparent thin-films using differential optical sectioning interference microscopy | |
| JP2014508922A5 (enrdf_load_stackoverflow) | ||
| TWI436029B (zh) | 光學式強度型三維表面形貌與顯微量測裝置及方法 | |
| CN102425998B (zh) | 光学元件抛光表面质量全参数检测装置和检测方法 | |
| WO2013091584A1 (zh) | 一种检测基质内缺陷的方法及装置 | |
| TWI292471B (enrdf_load_stackoverflow) | ||
| JP2003042731A (ja) | 形状計測装置および形状計測方法 | |
| CN210155024U (zh) | 一种光学相干层析成像装置以及成像系统 | |
| JP2001235317A (ja) | 光学球面曲率半径測定装置 | |
| TWI434021B (zh) | Non - contact optical composite measurement method and system | |
| CN106931900A (zh) | 一种同轴照明的线视场色散样板干涉仪 | |
| WO2020135891A1 (zh) | 激光平行度检测仪 | |
| CN114136228B (zh) | 基于激光散斑法的热形变检测系统、检测方法及应用 | |
| TWI495841B (zh) | High - resolution Reflective Three - dimensional Photoelectric Microscope | |
| Riebeling et al. | Optical form measurement system using a line-scan interferometer and distance measuring interferometers for run-out compensation of the rotational object stage | |
| JP5518187B2 (ja) | 変形計測方法 | |
| Ammann et al. | Enhancing the performance of light field camera by pattern projection | |
| CN100385224C (zh) | 球面反射镜的双点源干涉检测方法及装置 | |
| JP6193088B2 (ja) | 金属光沢面に塗布される透明樹脂の塗布領域と塗布量を検出する方法及びその光コヒーレンストモグラフィー計測システム | |
| TWI708040B (zh) | 外反射式三維形貌測量儀 | |
| JPH10111244A (ja) | 屈折率分布の測定方法及び装置 |