TW200819704A - Optical measurement device for out-of-plane displacement and method used thereby - Google Patents

Optical measurement device for out-of-plane displacement and method used thereby Download PDF

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Publication number
TW200819704A
TW200819704A TW95138566A TW95138566A TW200819704A TW 200819704 A TW200819704 A TW 200819704A TW 95138566 A TW95138566 A TW 95138566A TW 95138566 A TW95138566 A TW 95138566A TW 200819704 A TW200819704 A TW 200819704A
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TW
Taiwan
Prior art keywords
light
image
lens
plane
optical
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Application number
TW95138566A
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English (en)
Chinese (zh)
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TWI292471B (enrdf_load_stackoverflow
Inventor
bo-xun Hou
Peng-Ren Chen
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Metal Ind Res & Dev Ct
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Priority to TW95138566A priority Critical patent/TW200819704A/zh
Application granted granted Critical
Publication of TWI292471B publication Critical patent/TWI292471B/zh
Publication of TW200819704A publication Critical patent/TW200819704A/zh

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  • Length Measuring Devices By Optical Means (AREA)
TW95138566A 2006-10-19 2006-10-19 Optical measurement device for out-of-plane displacement and method used thereby TW200819704A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95138566A TW200819704A (en) 2006-10-19 2006-10-19 Optical measurement device for out-of-plane displacement and method used thereby

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95138566A TW200819704A (en) 2006-10-19 2006-10-19 Optical measurement device for out-of-plane displacement and method used thereby

Publications (2)

Publication Number Publication Date
TWI292471B TWI292471B (enrdf_load_stackoverflow) 2008-01-11
TW200819704A true TW200819704A (en) 2008-05-01

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TW95138566A TW200819704A (en) 2006-10-19 2006-10-19 Optical measurement device for out-of-plane displacement and method used thereby

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TW (1) TW200819704A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI408331B (zh) * 2009-12-17 2013-09-11 Ind Tech Res Inst 雙面光學膜片量測裝置與方法
TWI461650B (zh) * 2012-04-17 2014-11-21 Univ Nat Taiwan 影像處理系統及其方法
CN107643055B (zh) * 2017-09-29 2024-12-10 中国科学院西安光学精密机械研究所 基于偏振光束的自参考准直光路系统及计算被测角度方法

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TWI292471B (enrdf_load_stackoverflow) 2008-01-11

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