TW200819704A - Optical measurement device for out-of-plane displacement and method used thereby - Google Patents
Optical measurement device for out-of-plane displacement and method used thereby Download PDFInfo
- Publication number
- TW200819704A TW200819704A TW95138566A TW95138566A TW200819704A TW 200819704 A TW200819704 A TW 200819704A TW 95138566 A TW95138566 A TW 95138566A TW 95138566 A TW95138566 A TW 95138566A TW 200819704 A TW200819704 A TW 200819704A
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- image
- lens
- plane
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 67
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 43
- 238000005259 measurement Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000009792 diffusion process Methods 0.000 claims abstract description 9
- 238000012545 processing Methods 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 19
- 230000001154 acute effect Effects 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008846 dynamic interplay Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI292471B TWI292471B (enrdf_load_stackoverflow) | 2008-01-11 |
TW200819704A true TW200819704A (en) | 2008-05-01 |
Family
ID=44769900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95138566A TW200819704A (en) | 2006-10-19 | 2006-10-19 | Optical measurement device for out-of-plane displacement and method used thereby |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200819704A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408331B (zh) * | 2009-12-17 | 2013-09-11 | Ind Tech Res Inst | 雙面光學膜片量測裝置與方法 |
TWI461650B (zh) * | 2012-04-17 | 2014-11-21 | Univ Nat Taiwan | 影像處理系統及其方法 |
CN107643055B (zh) * | 2017-09-29 | 2024-12-10 | 中国科学院西安光学精密机械研究所 | 基于偏振光束的自参考准直光路系统及计算被测角度方法 |
-
2006
- 2006-10-19 TW TW95138566A patent/TW200819704A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
TWI292471B (enrdf_load_stackoverflow) | 2008-01-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI486550B (zh) | 厚度線上即時檢測之光學干涉裝置及其方法 | |
TWI797377B (zh) | 表面形狀量測裝置以及表面形狀量測方法 | |
TW544509B (en) | Method and system for measuring the relief of an object | |
CN102003946A (zh) | 一种高温三维数字图像相关测量系统及其测量方法 | |
CN102425998A (zh) | 光学元件抛光表面质量全参数检测装置和检测方法 | |
TW201237359A (en) | Three dimensional surface profilometer and microscopy, and the method using the same | |
CN100523720C (zh) | 光学非接触式三维形状测量仪 | |
TW201800717A (zh) | 即時檢測全場厚度的光學裝置 | |
TWI292471B (enrdf_load_stackoverflow) | ||
TWI287619B (en) | A light beam measurement device | |
JPH03225259A (ja) | 屈折率分布、透過波面の測定方法およびこの方法に用いる測定装置 | |
CN114252185B (zh) | 基于穆勒矩阵的硅片反射光偏振应力检测装置及方法 | |
JP3423486B2 (ja) | 光学素子の屈折率分布の測定方法および装置 | |
TW201120401A (en) | Contact-less optical composite measurement method and system thereof. | |
CN210155024U (zh) | 一种光学相干层析成像装置以及成像系统 | |
JP2000002514A (ja) | 膜厚測定装置及びアライメントセンサ並びにアライメント装置 | |
Prause et al. | Verification of a single-shot high speed aerial chromatic confocal metrology sensor | |
Prause et al. | Toward areal chromatic confocal metrology | |
JP3228458B2 (ja) | 光学的3次元計測装置 | |
JP2003139515A (ja) | スペックルを利用した変形量の絶対値計測方法 | |
TWI495841B (zh) | High - resolution Reflective Three - dimensional Photoelectric Microscope | |
JP5518187B2 (ja) | 変形計測方法 | |
JP2003042711A (ja) | 試料観察計測用可干渉ビーム装置 | |
Ammann et al. | Enhancing the performance of light field camera by pattern projection | |
JP3599921B2 (ja) | 屈折率分布の測定方法及び装置 |