(1) 1290069 % < 九、發明說明 【發明所屬之技術領域】 本發明，是關於把用以將附著於板狀構件的壓延油等 油脂成分或板狀構件予以洗淨之洗淨液等之液體等附著物 去除的附著物去除裝置，特別是關於在對上述板狀構件強 吹壓縮空氣來去除上述附著物的附著物去除裝置。 φ 【先前技術】 一般而言，以壓延機將金屬板或樹脂板等板狀構件壓 延時，爲了使利用工作輥筒（壓延輥筒）或該工作輥筒所 壓延出來的板狀構件冷卻、或是爲了提升壓延效率等，會 ' 在上述工作輥筒與上述板狀構件的壓延接觸部供給壓延油 。並且，當必須洗淨板狀構件表面的污穢或氧化膜等的情 形下，便得使上述板狀構件通過容納有洗淨劑的洗淨槽。 由於在如此壓延後的板狀構件上附著有上述壓延油或 φ是洗淨劑，所以在以捲取裝置等捲取上述板狀構件之前， 就必須去除上述壓延油或是洗淨劑。這是因爲，如果對於 所附著之壓延油等沒有做處理就這麼來捲取板狀構件的話 ，由於所被捲取的板狀構件間之接觸面的摩擦係數變小， 板狀構件會有朝向該寬幅方向橫滑而頂撞到捲取裝置、或 是產生板狀構件本身斷裂等問題之虞。還有，壓延油的去 除若是不夠充分就讓被捲取的板狀構件（壓延帶材〉在下 一製程進行退火時，也會產生退火不均一，造成產品品質 降低的問題。又再者，若是在仍附著有洗淨劑的狀態下來 •5- (2) 1290069 保管板狀構件的話，由於該洗淨劑的作用也會產生板狀構 件腐蝕的問題。 在過去，對於去除上述壓延油或洗淨劑的手法有許多 被提出。例如，習知有利用鋼鐵製的滾子對、或是以橡膠 等之彈性體使表面被覆橡膠擦布或是橡膠的滾子對、或是 以不織布等多孔質材料使表面被覆有多孔質的滾子對等等 ，來將附著於上述板狀構件的壓延油或是洗淨劑予以刮取 φ 下或是擰取下的手法。又，如專利文獻1及2所記載之方 式，利用從噴射噴嘴以朝向板狀構件噴射壓縮氣體（壓縮 空氣），來吹掉壓延油或是洗淨劑等附著物之手法亦爲習 知。 〔專利文獻1〕日本特開平1 0-8276號公報 〔專利文獻2〕日本特開平1 0- 1 466 1 1號公報 然而，使用上述橡膠擦布或是各滾子對來去除附著物 的上述手法，由於是使上述滾子對與板狀構件相接觸之方 •式’所以在板狀構件表面上會有擦傷等接觸傷產生之虞。 特別是，在使用橡膠滾子對或是鐵鋼滾子對時，雖然說對 上述板狀構件的押壓力越高則越能提升去除效果，不過相 反地，也會有容易產生接觸傷之問題。如此之問題，在板 狀構件越薄的情形下越是嚴重，有時候甚至會導致板狀構 件的斷裂。 又，使用上述多孔質滾子時，相較於上述橡膠擦布、 橡膠滾子對、或是鐵鋼滾子對，接觸傷雖然較爲減輕，不 過由於滾子表面的孔阻塞不僅會降低附著物的去除效果， -6- (3) 1290069 同時具有必須進行用以解除孔阻塞之維修作業上的麻煩。 另一方面，上述專利文獻1、2所記載的手法由於是 以非接觸方式來去除附著物，所以不會產生上述接觸傷等 的問題。不過，由於噴射噴嘴與壓延板表面是以間隔數 mm〜數十mm右的距離來配設，所以空氣的噴射能量（噴 射壓力）被分散而具有無法取得充分的附著物去除效果之 問題。 φ 當然，若是更進一步將供給到上述噴射噴嘴之壓縮空 氣的壓縮壓力設定爲更高壓的話，是可以提高附著物的去 除效果，但是產生壓縮空氣的壓縮機、或是蓄積壓縮空氣 的空氣槽等就得大型化，再者必須強化空氣配管等的高耐 壓化，對於經濟面、實用面而言並不理想。 若是能夠將噴射噴嘴極儘可能地靠近板狀構件表面的 話，就能夠防止空氣噴射能的分散，效率良好地去除附著 物，不過將上述噴射噴嘴過度地接近板狀構件表面時，則 #會由於壓延時所產生的振動或是板狀構件在搬運時所產生 的振動、或是板狀構件的反翹等，使得上述噴射噴嘴與板 狀構件相接觸而有損傷到上述板狀構件之虞。因此，於以 往，要將上述噴射噴嘴靠近到離上述壓延板表面數mm以 下是困難的。 又，在壓延速度（搬運速度）愈來愈追求高速化（約 800m/min以上）的近年來，即使使用上述任一種去除手 法，都無法效率良好，且有效果地去除在高速壓延、高速 搬運下之板狀構件的附著物。 (4) 1290069 【發明內容】 在此，本發明是有鑑於上述情事而被發明，其目的是 在於提供一種可以縮小壓延金屬板等之板狀構件與噴射噴 嘴的間隔距離，可有效率地去除上述板狀構件上的附著物 ，並且對於在高速壓延、高速搬運下之板狀構件的附著物 去除作業亦可對應之附著物去除裝置。 本發明，係針對於適用在：利用形成有噴射口之噴嘴 體，從上述噴射口噴射壓縮氣體將附著於板狀構件上的附 著物予以去除之附著物去除裝置者，上述噴嘴體是以移動 自如地被支持在與上述板狀構件之表面大致呈垂直的方向 上之方式所構成。使噴嘴體可追隨板狀構件的起伏而移動 ，並使噴嘴體能夠維持在隨時與板狀構件離開大致一定間 隔之狀態。 【實施方式】 以下參照圖面，同時說明本發明之實施形態以及實施 例，以方便理解本發明。又，以下的實施形態以及實施例 ，僅爲本發明具體化之後的一例示，並不是具有限定本發 明之技術性範圍的性格。 首先，本發明是針對於應用於從形成有噴射口之噴嘴 體的上述噴射口，藉由讓壓縮氣體噴射，來將附著於板狀 構件上的附著物去除的附著物去除裝置者，其中上述噴嘴 體，是在上述板狀構件的表面以朝大致垂直之方向上可以 移動自如地被支持之方式所構成。 (5) 1290069 ★ 藉由如此之構成，使上述噴嘴體能夠離上述板狀構件 而隨時維持在大致一定間隔距離的位置的狀態下而浮游。 例如，上述噴嘴體在位於上述板狀構件的上面側時，從上 述板狀構件以隨時維持在大致一定間隔距離的位置的狀態 下使上述噴嘴體浮游。藉此，即使對於在上述板狀構件所 產生的振動、或是板狀構件反翹等變形而使得上述板狀構 件的表面上下動作之情形時，上述噴嘴體也能夠追隨配合 φ 其上下動作而上下移動，所以從上述板狀構件表面到上述 噴嘴體爲止的間隔距離隨時被維持在大致一定。其結果， 使得上述板狀構件與上述噴嘴體的間距設定在數mm以下 ，具體上是設定爲0.1mm左右成爲可能。藉此，對於以往 由於間隔距離設置成數mm左右，因此若是沒有供給比較 高壓的壓縮氣體，就無法得到充分的附著物去除效果，如 今依據本發明，藉由可以將上述間隔距離更加縮小，使用 低於以往之壓力的壓縮氣體就可以得到與以往有同等或是 肇超過以往的附著物去除效果。特別是上述噴射口爲複數個 時，由於利用壓縮氣體的噴射壓對上述噴嘴體的複數作用 力的平衡得以均衡，故藉由該平衡作用，可以更加安定地 使上述噴嘴體隨時維持在離上述板狀構件大致一定間隔距 離之位置的狀態下而浮游。 並且，由於縮小上述板狀構件與上述噴嘴體之距離， 使噴射到上述板狀構件的噴射壓縮氣體的噴射壓力提高， 所以也#夠去除由壓延速度局速化之壓延機所壓延後之板 狀構件（亦即被高速搬運之板狀構件）的附著物。 -9- (6) 1290069 在此，上述噴射口的總面積，以未滿噴嘴體相向面之 面積的3分之2之方式來形成上述噴射口爲理想。此乃上 述噴嘴體利用壓縮空氣的噴射壓力而浮起，用以安定維持 在該位置的最佳理想條件，這是由本專利申請案的發明者 從實驗等結果所得知者。 又，在上述噴嘴體相向面所形成的噴射口，例如，是 在上述板狀構件的搬運方向與上述噴嘴體的移動方向兩者 φ 大致垂直相交的方向上隔以間隔所排列者。 又，在上述噴嘴體相向面，設置有在與上述板狀構件 的搬運方向以及上述噴嘴體的移動方向大致垂直相交的方 向上具有長型開口部的平面噴嘴，可以使壓縮氣體均等地 放射於上述板狀構件的寬幅方向全區域。 再者，也爲了使得利用壓縮氣體的噴射讓上述噴嘴體 容易地從上述板狀構件離開一間隔，故構成上述噴嘴體的 主要構件，是以塑膠材料等輕量材料爲理想。 φ 又，要使上述板狀構件的上面側及下面側之在任一表 面的附著物皆能夠去除，上述噴嘴體，以設置在上述板狀 構件的上面側及下面側的任一方或是兩方皆設置爲理想。 又再者，以具彈性之方式支持上述噴嘴體來構成爲理 想。藉此，上述噴嘴體被設置在上述板狀構件的下面側之 情形時，在壓縮氣體的噴射壓力與朝向上述板狀構件所作 用的彈性彈壓力的平衡作用下，使上述噴嘴體能夠隨時維 持在離上述板狀構件大致一定間隔距離之位置的狀態下。 又，若是使被設置在上述板狀構件上下面雙方之噴嘴 -10- (7) 1290069 囑 體以彈性地被支持之方式來構成的話，例如，即使上述板 狀構件突然劇烈地上下變動時，也可以防止上述噴嘴體朝 上下方向的過度噴射或噴射不足、或是擺振等。 在本發明的形態中，是在上述相向面，設有陷沒狀的 氣體蓄積部’在上述噴嘴體，形成有使上述氣體蓄積部的 內部與上述噴嘴體的外部相連通的連通孔。在如此之形態 中，壓縮氣體被噴射到板狀構件，該氣體反彈至上述板狀 φ 構件而衝突於上述相向面時，從上述噴射口所噴射出來的 壓縮氣體也會蓄積在上述氣體蓄積部的內部，使上述氣體 蓄積部內部的氣體經由上述連通孔被導引至上述噴嘴體的 外部。因此，受到壓縮氣體的噴射所剝落的附著物會滯留 於上述氣體蓄積部，並能夠將該滯留的空氣排出到外部。 其結果，特別是上述附著物，即使是存在有會易於附著於 上述相向面之材料，例如，油或含有油之塵埃等具備黏性 者，也能夠確實地防止其衝突至上述相向面而附著於該相 •向面，並且能減輕噴射口的阻塞或是附著物對板狀構件的 再附著。 此時，若是設有從上述連通孔吸引上述空氣蓄積部內 之氣體的吸引機構，便可以效率良好地將包含附著物之氣 體予以排出。 又，若是具備有從上述連通孔將被包含在排出氣體內 之附著物予以分離回收的附著物分離回收機構爲理想。藉 此，由於從上述連通孔所排出的附著物不會分散到大氣中 ，所以可以實現對人體或環境不造成傷害及破壞的附著物 -11 - (8) 1290069 去除裝置。並且，可以防止所排放出的附著物不會飛舞於 上述板狀構件而造成再附著。 再者，上述附著物分離回收機構，可以是從含有附著 物的氣體當中，僅將液體狀附著物予以分離回收者。當上 述液體狀附著物爲油或是洗淨液等等之類可以再利用之物 質的情形時，可以僅將其回收再利用。 本發明的另一形態，係具備有：與上述噴嘴體連結， φ使該噴嘴體對上述板狀構件的表面大致朝垂直方向移動之 驅動機構，以及被供給到上述噴嘴體的壓縮氣體在未達事 先所訂定的規定壓力時，藉由驅動控制上述驅動機構，讓 上述噴嘴體從上述板狀構件朝向開離方向移動之驅動控制 機構。藉此，例如，當壓縮空氣槽或是供給壓縮空氣的泵 浦等故障等原因，造成壓縮空氣的壓力未達規定壓力，即 使連讓上述噴嘴體浮游（浮起）都沒有充分的壓縮空氣被 供給時’由於在上述噴嘴體落下到即將碰撞到上述板狀構 #件之前，可以由該板狀構件強制性地拉離，所以防止由於 上述碰撞所造成之板狀構件的損傷。 在此，使用第1圖的線路圖，說明本發明之實施形態 之附著物去除裝置X的空氣控制系統以及其槪略構成。 本附著物去除裝置X，例如，是把附著在藉由壓延機 等所壓延出之金屬製或是非金屬製之板狀構件T上的壓延 油或是洗淨劑等液體或屑片等附著物予以去除的裝置，如 第1圖所示地，係具備有：使來自於空氣壓力源5所供給 的壓縮空氣（壓縮氣體的一例）噴射到上述板狀構件T之 -12- 1290069 ⑼ 表面的噴嘴體100;夾介於該噴嘴體100與上述空氣壓力 源5配管連接管路6而設置的電磁閥2 ;夾設在該電磁閥 2之下流側管路6的減壓閥3 ;夾介設置在該減壓閥3下 流側的空氣過濾器4 ;以及將上述電磁閥2激磁/消磁， 將壓縮空氣的通過路徑（空氣路）進行切換控制的控制器 1。又，在本實施形態中，作爲壓縮氣體是使用壓縮空氣 爲例來做說明，不過若是使用腐蝕性較低的氮氣等亦無妨 φ 。又，本附著物去除裝置X並非是限定於利用上述壓延機 所壓延出之板狀構件，而是對於所有板狀構件皆可適用。 上述控制器1，是由具備順序控制器等之控制單元等 所構成，例如，當偵測到來自於外部所輸入的啓動信號時 ，便將上述電磁閥2激磁，使該電磁閥2從關閉位置切換 到開啓位置。經由上述電磁閥2把所供給的壓縮空氣，係 藉由減壓閥3減壓到預先所預定的一定壓力，再利用具備 排洩器的空氣過濾器4使水蒸氣或灰塵等被去除之後，才 φ被供給到上述噴嘴體100。 接著，以使用第2A圖至第2C圖的模式圖，說明關於 上述噴嘴體100。在此第2A圖是上述噴嘴體1〇〇在長邊 方向（第2 A圖的左右方向）的縱向斷面槪略圖；第2B 圖是從第2A圖之噴嘴體100的A箭頭方向所觀察的圖； 第2C圖是顯示第2A圖之噴嘴體100的變形例。在圖中沒 有標示符號的箭頭是表示壓縮空氣的流動方向。 上述噴嘴體1 00，如第2A圖如所示，係被配置在板 狀構件T的上面側。該噴嘴體1 0 〇是由塑膠材料等輕質構 -13- (10) 1290069 件所成形，在上述板狀構件T的寬幅方向上呈長型大致爲 長方體形狀。 在上述噴嘴體100相向於上述板狀構件τ上面（上方 表面）Τ1的相向面102形成有4個噴射口 101。該4個噴 射口 101，是在與上述噴嘴體1〇〇的移動方向W1 (請參 照第2Α圖）及上述板狀構件Τ的搬運方向W2 (請參照第 2Β圖）大致呈垂直相交的方向W3(請參照第2Β圖）上 φ 隔以間隔而排列（於圖示之例爲等間隔排列）。又，上述 噴射口 101並不侷限於4個，只要至少形成1個以上的噴 射口 1 0 1即可。 於上述相向面1 02，隔以一預定間隔形成有與上述板 狀構件T的搬運方向W2相平行的複數個溝1 〇6 (在本實 施形態爲5個溝），是用來將來自上述噴射口 1 〇 1所噴射 出來的壓縮空氣導引到上述板狀構件T之搬運方向W2的 上流側，把已剝離的附著物朝向上述搬運方向W2的上流 肇側吹散。該溝1 06在上述板狀構件T之搬運方向W2上流 側的一端l〇6a是形成爲尾端擴散狀，並於上述搬運方向 W2側之面呈開放。 又，對於平行於上述搬運方向 W2所形成的上述溝 1 06，由於剝離後的附著物有可能再次附著在上述板狀構 件T上，因此，與上述溝1 0不同，如第2C圖所示地，相 對於上述搬運方向W2以將具有朝向上述板狀構件T的寬 幅方向外側傾斜角度的溝106-1形成於上述相向面102爲 理想。若形成有如此的溝1 06-1，由於已剝離附著物會流 -14- (11) 1290069 動於該溝106-1的壓縮空氣一起被吹向上述板狀構件τ的 寬幅方向外側，所以可以提高附著物的去除效率。 在於上述噴嘴體100的上述相向面102相反的面103 ’形成有由上述空氣壓源5 (第1圖）所供給再藉由上述 減壓閥4減壓至一預定壓力的壓縮空氣供給口 104。該供 給口 104，是連通於在內部連通上述各噴射口 1〇1的連通 路1 〇 5。因此，當對該供給口 1 〇4供給壓縮空氣時，則使 • 壓縮空氣經由上述連通路105而從上述各噴射口 101噴射 於上述板狀構件Τ的上面Τ1。 又，在上述噴嘴體100的上述面103直立設有滑動桿 111，再者，於該上方適當地設置有在垂直方向上能夠滑 移地支持上述滑動桿1 1 1之滑動導引1 12。該滑動桿111 與滑動導引1 1 2 (以下，將此等總稱爲滑動機構1 1 〇 )， 是在大致垂直於上述板狀構件Τ之上面Τ1的方向W1上 ，將上述噴嘴體1 00可移動自如地支持之機構的一例示。 #當然，不限定於上述滑動機構1 1 0，例如，也可以是使用 藉由一端被固定之螺旋彈簧等彈性構件從上方懸吊之狀態 來支持上述噴嘴體1 00之機構（請參照第9圖）、或是從 上述噴嘴體1 00長邊方向的側面搭設板彈簧等彈性構件來 支持上述噴嘴體100的機構等，使上述噴嘴體100朝向上 述大致垂直方向W 1可移動自如地被彈性支持者。 在此，針對壓縮空氣被供給到如上述所構成之噴嘴體 100時，對於上述噴嘴體100的動作做說明。當從上述供 給口 1 04壓縮空氣一被供給時，所被供給之壓縮空氣通過 -15- (12) 1290069 上述連通路105從各噴射口 101噴射出（請參照第2A圖 )。從上述噴射口 101所噴射出來的壓縮空氣該壓縮壓力 瞬間被釋放而朝向上述板狀構件T的上面T 1以大致呈放 射狀被強吹出（請參照第2 B圖〉。 又，強吹於上述板狀構件T的壓縮空氣的壓力，被強 吹於上述板狀構件T的上面T1之後，成爲使上述噴嘴體 1 〇〇從上述板狀構件T間離開之力，亦即，成爲欲將上述 • 噴嘴體100朝向移動方向W1的上方推舉之推舉力而作用 於上述噴嘴體100。如此地，藉由上述推舉力作用於上述 噴嘴體100，使上述噴嘴體100從上述板狀構件T浮起。 當利用上述推舉力使上述噴嘴體1〇〇 —浮起時，上述噴嘴 體1 00的相向面1 02與上述板狀構件T之間便產生間隙d 。於該間隙d形成有藉由從上述噴嘴體1 〇 〇所噴射出之空 氣壓而成的空氣壓層，藉此，使得上述噴嘴體1〇〇在從上 述板狀構件T僅離開距離d的位置處浮游。又，在本實施 #形態中，於壓縮空氣供給，係利用後述的原理，讓上述噴 嘴體1 〇〇僅從上述板狀構件T的上面T1浮起距離dG，利 用減壓閥3調整壓縮空氣的壓縮壓力，使上述噴嘴體1〇〇 在該位置爲浮游之狀態。 藉由如此噴吹出之壓縮空氣的噴射壓力，可以使上述 噴嘴體1 0 0浮游之同時，亦使附著於上述板狀構件τ上面 T 1的壓延油或洗淨劑等液體、屑片、髒污等附著物剝離 。又，由於噴射出的壓縮空氣是沿著上述溝1 06流至上述 板狀構件τ之搬運方向W 2的上流側，所以被剝離下來的 -16- (13) 1290069 屠 附著物便隨著該流動經過上述噴嘴體1 00與上述板狀構件 T的上面T 1的間隙被吹往上述搬運方向W2的上流側。 在此，關於作用於上述噴嘴體1 〇〇的力F (以縱軸表 示，以下稱之爲作用力F)與上述噴嘴體100到上述板狀 構件T的上面T1之間的間隔距離d (以橫軸表示）的關 係，係以第3圖及第5A圖至第5C圖來說明。在此，第3 圖是顯示上述作用力F與上述間隔距離d之關係的圖；第 φ 5A圖至第5C圖是顯示噴射口 101附近的壓力分布的圖； 第5 A圖是顯不間隔距離d之間距爲d 〇時的壓力分布；第 5 B圖是顯示間隔距離d之間距爲d! ( > d 〇 )時的壓力分 布；第5 C圖是顯示間隔距離d之間距爲d 2 ( < d 〇 )時的 壓力分布。又，在此先說明，上述作用力F，爲包含利用 壓縮空氣的噴射壓欲將上述噴嘴體100往移動方向W1的 上方推舉的推舉力，以及如後述之欲使上述噴嘴體100往 上述板狀構件T吸著之吸著力，並忽視上述噴嘴體100的 鲁重量。 從第3圖所示的曲線圖可以理解地，上述間隔距離d 爲上述間距dG時，上述作用力F爲〇。此時，如第5 A圖 如所示，由於藉由壓縮空氣的噴射壓欲將上述噴嘴體100 推舉之推舉壓1^的積分値（亦即，推舉力），與欲將上 述噴嘴體1 〇〇往上述板狀構件T吸著的吸著壓p2的積分 値（亦即，吸著力）維持在大小十分平衡的關係，因而在 相距上述間距的位置處，上述噴嘴體1 00可以處於浮 游狀態。又，上述吸著壓P2，是壓縮空氣從上述噴嘴體 -17- (14) 1290069 1 00與上述板狀構件T的間隙流出時所產生的負壓，由該 負壓而形成上述吸著力。 在此’當上述板狀構件Τ於壓延時或是搬運時產生振 動等，使得上述板狀構件Τ的上面τ 1朝向下方向移動， 使得上述間隔距離d比間距d()還大而成爲間距dl ( > d〇 )時，在上述間隔距離d之空間內，欲妨礙壓縮空氣流動 的抵抗變小，使壓縮空氣易於逃逸，增加流出空氣的流速 φ 。因此，如第5 B圖所示地，上述吸著壓p2會增大使上述 吸著力大過上述推舉力，藉由該吸著力使上述噴嘴體1〇〇 朝下方移動，使間隔距離d從間距d!縮小到間距d〇。因 此，即使上述板狀構件T的上面T1朝下方向移動時，上 述噴嘴體1 00會立即復原到上述平衡狀態，而在離開上述 間距d〇的位置處浮游。 另一方面，上述間隔距離d成爲比間距d〇還小之間 距d2 (< dG )時，與上述相反地，在上述間隔距離d之空 0間內，欲妨礙壓縮空氣流動的抵抗變大，使壓縮空氣難以 逃逸，減少流出空氣的流速。因此，如第5 C圖所示地， 上述吸著壓P2會減少使得上述推舉力大過上述吸著力， 藉由該推舉力使上述噴嘴體1 00朝上方移動，使間隔距離 d從間距d2擴大到間距d〇。因此，即使於此情形下，上述 噴嘴體1 00亦會立即復原到上述平衡狀態。 如此地，於本附著物去除裝置X中，即使上述板狀構 件T的上面T1上下變動時，由於上述噴嘴體100會隨著 該上下變動而上下移動，所以從上述板狀構件T的上面 -18- 1290069 * (15) τ 1到上述噴嘴體1 00爲止的間隔距離d會隨時大致維持 於一定。亦即，即使上述板狀構件T在振動時，由於一直 可以維持在一定的間隔距離d，所以沒有設限地就算把上 述間隔距離d設定在接近於0之間距d〇 (例如〇 · 1 mm ), 噴嘴體1 〇 0也不會接觸到上述板狀構件T，因此上述板狀 構件T不會有損傷。 在此，上述板狀構件T突然上下變動時，由於上述噴 參嘴體1 〇〇追隨該上下變動也突然劇烈地上下變動，所以上 述噴嘴體100在朝向上下方向可能會有發生過度噴射或是 噴射不足之虞。又，若該過度噴射與噴射不足周期性發生 時，上述噴嘴體1 〇〇恐有擺振等現象的虞。因此，爲了防 止上述過度噴射或是擺振等，噴嘴體1 00以由彈簧等彈性 構件做彈性支持爲理想。具體而言，可以在上述滑動桿 111以夾介螺旋型彈簧之手法、或是使用以油減震器等緩 衝構件所構成的滑動桿Π1之手法等。 # 另外，形成在上述噴嘴體1〇〇之相向面102的上述噴 射口 101的開口面積與上述相向面102的面積，在讓上述 噴嘴體100浮起而言爲重要因素。其理由以第5A圖至第 5 C圖說明如下。又，在此亦於方便性上，是以忽略上述 噴嘴體100的重量來做說明。 如第5 B圖所示，當間隔距離d增大時，如上所述， 在上述間隔距離d之空間內欲妨礙壓縮空氣流動的抵抗會 變小，所以流至外部的壓縮空氣的流量增加。因此，對於 上述噴嘴體100的相向面102 (特別是上述噴射口 101的 -19- (16) 1290069 周邊部分），產生上述吸著壓P2(負壓）。該吸著壓P2 ’是作用有欲讓上述噴嘴體1 00吸著於上述板狀構件T之 力。在此，以來自壓縮空氣的噴射壓而欲推舉上述噴嘴體 100之推舉壓？，（>〇);上述吸著壓P2(<0);所有噴 射口 1 0 1的開口面積的合計値爲S 於上述噴嘴體1 00的 相向面1 02作用有上述吸著壓p2的面積合計値爲s2時， 當滿足（P^S! ) + ( P2XS2 ) < 0的條件時，由於欲將上述 鲁板狀構件T予以吸著的吸著力勝過欲將噴嘴體1 〇 〇朝向上 方推舉之推舉力，所以上述噴嘴體100被朝向下方拉下。 因此，無關於間隔距離d的大小，在維持於間距d〇的狀 態下要讓上述噴嘴體100浮游，只要滿足？1><81>?2\32的 條件即足夠。在此，由於噴射壓P!與吸著壓P2具備有相 關關係，所以爲了滿足上述條件，以面積S !及S2爲變動 値來滿足上述條件之方式即可。 另一方面，板狀構件T的附著物由於是利用流動於上 ®述噴嘴體100之相向面102的壓縮空氣所去除，所以當上 述面積S2相較於面積S !若太過小時，就難以去除附著物 會造成去除效果的降低。 在此，本案的發明者，以作爲滿足可以讓噴嘴體100 維持在上述間距爲dG的狀態下浮游之條件，以及提高上 述去除效果之條件等兩方的條件，經由反覆實驗及硏究而 得知當(1) 1290069 % < IX. EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a cleaning liquid for washing a fat or oil component such as a rolling oil adhering to a plate-shaped member or a plate-shaped member. The deposit removing device for removing deposits such as liquids is particularly an adhering device for removing adhering substances which strongly blow compressed air to the above-mentioned plate-like members to remove the deposits. φ [Prior Art] In general, a plate-shaped member such as a metal plate or a resin plate is pressed by a calender to cool a plate-shaped member which is rolled by a work roll (calender roll) or the work roll, Or, in order to improve the rolling efficiency or the like, the rolling oil is supplied to the rolling contact portion of the work roll and the plate member. Further, when it is necessary to clean the surface of the plate member, such as contamination or an oxide film, the plate member is passed through a cleaning tank containing the detergent. Since the rolling oil or φ is adhered to the plate-like member after the rolling, the cleaning agent is removed, and the rolling oil or the cleaning agent must be removed before the sheet-like member is wound up by a winding device or the like. This is because if the plate-like member is taken up without treatment for the attached rolling oil or the like, since the friction coefficient of the contact surface between the wound plate-like members becomes small, the plate-like member has a direction. The wide direction is horizontally slid to the top of the winding device, or the problem that the plate member itself is broken. Further, if the removal of the rolling oil is insufficient, the rolled sheet member (calendered strip) will be annealed in the next process, resulting in uneven annealing, resulting in a problem of lowering the quality of the product. In the state in which the detergent is still attached, 5-5 (2) 1290069 When the plate-shaped member is stored, the plate member is also corroded due to the action of the detergent. In the past, the above-mentioned rolling oil or washing was removed. Many methods have been proposed for the detergent. For example, it is known to use a pair of rollers made of steel, or a rubber pair such as rubber or a rubber roller or a porous pair of non-woven fabrics. The material is coated with a porous roller pair or the like to scrape the rolling oil or the detergent adhering to the above-mentioned plate-like member, or to be screwed off. Further, as in Patent Document 1, In the method described in the above, it is also known to use a method in which a compressed gas (compressed air) is ejected from a jet nozzle to blow off a deposit such as a rolling oil or a detergent. [Patent Document 1] In the above-mentioned method, the above-mentioned method of removing the deposit by using the above-mentioned rubber wipe or each pair of rollers is used in the above-mentioned manner. When the roller is in contact with the plate-shaped member, there is a problem that a contact injury such as a scratch occurs on the surface of the plate member. In particular, when using a rubber roller pair or a steel roller pair, although It is said that the higher the pressing force of the above-mentioned plate-shaped member, the more the lifting effect can be improved, but conversely, there is a problem that contact damage is likely to occur. Such a problem is more serious in the case where the plate member is thinner, sometimes It may even cause breakage of the plate-shaped member. Moreover, when the above-mentioned porous roller is used, the contact injury is lessened than that of the above-mentioned rubber wiper, rubber roller pair, or iron steel roller pair, but The hole clogging on the sub-surface not only reduces the removal effect of the deposit, but also has a trouble in the maintenance work for releasing the hole clogging. On the other hand, the above-mentioned Patent Documents 1 and 2 describe hand Since the deposit is removed in a non-contact manner, the above-mentioned problem of contact damage or the like does not occur. However, since the spray nozzle and the surface of the rolled plate are disposed at a distance of several mm to several tens of mm right, the air is disposed. The ejection energy (ejection pressure) is dispersed and has a problem that a sufficient effect of removing the adhering matter cannot be obtained. φ Of course, if the compression pressure of the compressed air supplied to the ejection nozzle is further set to a higher pressure, the attachment can be improved. The removal effect is increased, but the compressor that generates compressed air or the air tank that accumulates compressed air is increased in size. In addition, it is necessary to strengthen the high pressure resistance of the air piping, etc., which is not ideal for economical and practical surfaces. If the nozzle tip can be placed as close as possible to the surface of the plate member, the dispersion of the air jet energy can be prevented, and the deposit can be removed efficiently, but when the spray nozzle is excessively approached to the surface of the plate member, Vibration due to pressure delay or vibration generated by the plate member during transportation, or plate shape The reverse warping or the like of the member causes the above-described spray nozzle to come into contact with the plate-like member to be damaged to the above-mentioned plate-like member. Therefore, in the past, it has been difficult to bring the above-mentioned spray nozzles to a distance of several mm or less from the surface of the above-mentioned rolled plate. In addition, in recent years, the rolling speed (transport speed) has been increasing in speed (about 800 m/min or more), and even if any of the above-described removal methods are used, it is not efficient, and it is effective to remove high-speed rolling and high-speed conveyance. Attachment of the lower plate member. (4) 1290069 SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the invention is to provide a method for reducing the distance between a plate-shaped member such as a rolled metal plate and an injection nozzle, which can be efficiently removed. The depositing device on the plate-like member and the deposit removing device corresponding to the deposit removing operation of the plate-shaped member under high-speed rolling and high-speed conveyance may be used. The present invention is applied to an attachment removing device that removes an adhering matter adhering to a plate-like member from a jet nozzle by a nozzle body in which an ejection port is formed, and the nozzle body is moved. It is freely supported in such a manner as to be substantially perpendicular to the surface of the above-mentioned plate member. The nozzle body can be moved in accordance with the undulation of the plate-like member, and the nozzle body can be maintained at a predetermined interval from the plate-like member. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments and examples of the present invention will be described with reference to the drawings to facilitate the understanding of the present invention. Further, the following embodiments and examples are merely examples after the present invention is embodied, and are not intended to limit the technical scope of the present invention. First, the present invention is directed to an attachment removing device for removing an adhering matter attached to a plate member by ejecting a compressed gas from the ejection port of the nozzle body in which the ejection port is formed, wherein The nozzle body is configured to be movably supported in a substantially vertical direction on the surface of the plate member. (5) 1290069 ★ With such a configuration, the nozzle body can be floated while being maintained at a position at a substantially constant distance from the plate-like member. For example, when the nozzle body is located on the upper surface side of the plate-like member, the nozzle body is floated from the above-described plate-like member while maintaining a position at a substantially constant distance. Therefore, even when the vibration of the plate-shaped member or the deformation of the plate-like member causes the surface of the plate-shaped member to move up and down, the nozzle body can follow the vertical movement of the fitting φ. Since the movement is performed up and down, the distance from the surface of the plate member to the nozzle body is maintained substantially constant at any time. As a result, the distance between the plate-shaped member and the nozzle body is set to be several mm or less, and specifically, it is possible to set it to about 0.1 mm. Therefore, since the separation distance is set to about several mm in the past, if the compressed gas having a relatively high pressure is not supplied, a sufficient effect of removing the deposit cannot be obtained. According to the present invention, the above-described separation distance can be further reduced and the use can be low. Compressed gas of the past pressure can be obtained in the same way as in the past or more than the conventional attachment removal effect. In particular, when the number of the injection ports is plural, the balance of the plurality of urging forces of the nozzle body is equalized by the injection pressure of the compressed gas, so that the balance body can be more stably maintained at any time. The plate-like members float in a state where they are substantially spaced apart from each other. Further, since the distance between the plate-shaped member and the nozzle body is reduced, the injection pressure of the injected compressed gas injected into the plate-shaped member is increased, so that the plate after the rolling by the rolling speed is accelerated. Attachment of a member (that is, a plate member that is transported at a high speed). -9- (6) 1290069 Here, it is preferable that the total area of the injection ports is such that the injection port is formed to be less than two-thirds of the area of the opposing faces of the nozzle body. This is the best ideal condition for the nozzle body to float by the injection pressure of the compressed air for maintaining the position, which is known from the results of experiments and the like by the inventors of the present patent application. Further, the injection port formed on the opposing surface of the nozzle body is, for example, arranged at intervals in a direction in which the conveying direction of the plate-like member and the moving direction of the nozzle body are substantially perpendicular to each other. Further, a planar nozzle having an elongated opening in a direction substantially perpendicular to a direction in which the direction in which the plate member is conveyed and a direction in which the nozzle body is moved is provided on the opposing surface of the nozzle body, so that the compressed gas can be uniformly radiated The entire width direction of the above-mentioned plate member. Further, in order to allow the nozzle body to be easily separated from the plate-like member by the injection of the compressed gas, the main member constituting the nozzle body is preferably a lightweight material such as a plastic material. φ Further, the deposit on any of the upper surface and the lower surface of the plate-like member can be removed, and the nozzle body is provided on one or both of the upper surface side and the lower surface side of the plate-shaped member. All are set to ideal. Further, it is desirable to support the nozzle body in an elastic manner. Thereby, when the nozzle body is provided on the lower surface side of the plate-shaped member, the nozzle body can be maintained at any time under the balance of the injection pressure of the compressed gas and the elastic spring pressure acting on the plate-shaped member. In a state where it is at a position substantially spaced apart from the above-mentioned plate-like member. In addition, when the nozzles of the nozzles 10-(7) 1290069 provided on both the upper and lower sides of the plate-like member are elastically supported, for example, even if the plate-like members suddenly and violently move up and down, It is also possible to prevent over-ejection or insufficient ejection of the nozzle body in the vertical direction, or shimmy or the like. In the aspect of the present invention, the gas storage unit is provided with a trapped shape in the opposing surface. The nozzle body is formed with a communication hole that allows the inside of the gas storage unit to communicate with the outside of the nozzle body. In such a form, when the compressed gas is ejected to the plate-like member and the gas rebounds to the plate-shaped φ member and collides with the opposing surface, the compressed gas ejected from the ejection port is also accumulated in the gas accumulating portion. The inside of the gas accumulating portion is guided to the outside of the nozzle body via the communication hole. Therefore, the deposits which are peeled off by the injection of the compressed gas are retained in the gas accumulating portion, and the trapped air can be discharged to the outside. As a result, in particular, even if the adhering material has a material which is likely to adhere to the opposing surface, for example, oil or dust containing oil, it is possible to reliably prevent the collision with the opposing surface and adhere thereto. In the phase and the face, it is possible to reduce the clogging of the ejection opening or the reattachment of the attachment to the plate member. At this time, if the suction means for sucking the gas in the air accumulating portion from the communication hole is provided, the gas containing the deposit can be efficiently discharged. Further, it is preferable that the deposit separation and recovery mechanism that separates and collects the deposit contained in the exhaust gas from the communication hole is provided. As a result, since the deposits discharged from the communication holes are not dispersed in the atmosphere, it is possible to achieve an attachment that does not cause damage or damage to the human body or the environment -11 - (8) 1290069 Removal device. Further, it is possible to prevent the discharged deposit from flying on the above-mentioned plate member and causing reattachment. Further, the deposit separation and recovery mechanism may be one in which only the liquid deposit is separated and recovered from among the gases containing the deposit. When the liquid deposit is a substance that can be reused, such as an oil or a washing liquid, it can be recycled and reused. According to another aspect of the present invention, a driving mechanism that is coupled to the nozzle body and that moves the nozzle body substantially in a vertical direction on a surface of the plate member, and a compressed gas supplied to the nozzle body are provided. When the predetermined pressure is set in advance, the drive mechanism that controls the drive mechanism to move the nozzle body from the plate member toward the opening and closing direction is driven. Thereby, for example, when the compressed air tank or the pump supplying the compressed air is malfunctioning or the like, the pressure of the compressed air is less than the predetermined pressure, and even if the nozzle body is floated (floating), there is insufficient compressed air. At the time of supply, since the above-mentioned nozzle body is dropped until it is about to collide with the above-mentioned plate-shaped member, the plate-shaped member can be forcibly pulled away, so that the damage of the plate-shaped member due to the above collision is prevented. Here, an air control system of the deposit removing device X according to the embodiment of the present invention and a schematic configuration thereof will be described using the wiring diagram of Fig. 1 . The deposit removing device X is, for example, a liquid such as a rolling oil or a cleaning agent attached to a metal or non-metal plate member T which is rolled by a calender or the like, or a deposit such as a chip. As shown in Fig. 1, the apparatus for removing the compressed air (an example of a compressed gas) supplied from the air pressure source 5 is sprayed onto the surface of the -12-1290069 (9) of the plate-shaped member T. a nozzle body 100; a solenoid valve 2 interposed between the nozzle body 100 and the air pressure source 5; and a pressure reducing valve 3 disposed on the flow side line 6 below the solenoid valve 2; An air filter 4 provided on the downstream side of the pressure reducing valve 3, and a controller 1 for exciting/demagnetizing the electromagnetic valve 2 and switching the passage (air path) of the compressed air. Further, in the present embodiment, as the compressed gas, compressed air is used as an example, but it is also possible to use φ without using a nitrogen gas having low corrosivity. Further, the deposit removing device X is not limited to the plate-like member which is rolled by the calender, but is applicable to all the plate-shaped members. The controller 1 is constituted by a control unit or the like having a sequence controller or the like. For example, when detecting an activation signal input from the outside, the solenoid valve 2 is energized to cause the solenoid valve 2 to be closed. The position is switched to the on position. The supplied compressed air is depressurized by the pressure reducing valve 3 to a predetermined predetermined pressure, and the water vapor or dust is removed by the air filter 4 having the drainer. φ is supplied to the nozzle body 100 described above. Next, the nozzle body 100 will be described with reference to the pattern diagrams of Figs. 2A to 2C. 2A is a longitudinal cross-sectional view of the nozzle body 1〇〇 in the longitudinal direction (the left-right direction of FIG. 2A), and FIG. 2B is a view from the direction of the arrow A of the nozzle body 100 of FIG. 2A. Fig. 2C is a modification showing the nozzle body 100 of Fig. 2A. The arrow without a symbol in the figure indicates the flow direction of the compressed air. The nozzle body 100 is disposed on the upper surface side of the plate member T as shown in Fig. 2A. The nozzle body 10 成形 is formed of a light-weight material such as a plastic material, 13-(10) 1290069, and has a long and substantially rectangular parallelepiped shape in the width direction of the plate-shaped member T. Four injection ports 101 are formed in the opposing surface 102 of the nozzle body 100 facing the upper surface (upper surface) Τ1 of the plate-shaped member τ. The four injection ports 101 are substantially perpendicular to the moving direction W1 of the nozzle body 1 (see the second drawing) and the conveying direction W2 of the plate-shaped member (see the second drawing). W3 (please refer to Figure 2). φ is arranged at intervals (in the illustrated example, they are arranged at equal intervals). Further, the number of the injection ports 101 is not limited to four, and it is sufficient that at least one or more injection ports 1 0 1 are formed. A plurality of grooves 1 〇 6 (in the present embodiment, five grooves) which are parallel to the conveyance direction W2 of the plate-like member T are formed at a predetermined interval from the opposite surface 102, and are used to The compressed air jetted from the injection port 1 〇1 is guided to the upstream side of the conveyance direction W2 of the plate-like member T, and the peeled deposit is blown toward the upstream side of the conveyance direction W2. One end 16a of the groove 106 on the flow side in the conveyance direction W2 of the plate-like member T is formed in a diffused shape at the trailing end, and is open on the side in the conveyance direction W2 side. Further, since the groove 106 formed parallel to the conveyance direction W2 may adhere to the plate member T again after the peeling, the groove 10 is different from the groove 10 as shown in FIG. 2C. It is preferable that the groove 106-1 having an angle of inclination toward the outer side in the width direction of the plate-shaped member T is formed on the opposing surface 102 with respect to the conveyance direction W2. If such a groove 106-1 is formed, since the peeled deposit will flow-14-(11) 1290069, the compressed air moving in the groove 106-1 is blown toward the outer side in the width direction of the plate-shaped member τ, Therefore, the removal efficiency of the attachment can be improved. The surface 103' opposite to the opposing surface 102 of the nozzle body 100 is formed with a compressed air supply port 104 which is supplied from the air pressure source 5 (Fig. 1) and is decompressed by the pressure reducing valve 4 to a predetermined pressure. . The supply port 104 is connected to a communication path 1 〇 5 that communicates with the respective injection ports 1〇1 inside. Therefore, when compressed air is supplied to the supply port 1 〇 4, compressed air is injected from the respective injection ports 101 through the communication passage 105 to the upper surface Τ 1 of the plate-shaped member 。. Further, a slide bar 111 is erected on the surface 103 of the nozzle body 100, and a slide guide 1 12 that slidably supports the slide bar 1 1 1 in a vertical direction is provided as appropriate. The slide bar 111 and the slide guide 1 1 2 (hereinafter, collectively referred to as the slide mechanism 1 1 〇) are the nozzle body 1 00 in a direction W1 substantially perpendicular to the upper surface Τ1 of the plate-shaped member Τ1. An example of a mechanism that is movably supported. # Of course, the sliding mechanism 1 10 is not limited thereto. For example, a mechanism for supporting the nozzle body 1 00 by using an elastic member such as a coil spring fixed at one end may be used (see ninth). And a mechanism for supporting the nozzle body 100 by arranging an elastic member such as a leaf spring from a side surface in the longitudinal direction of the nozzle body 100, and the nozzle body 100 is movably and elastically oriented in the substantially vertical direction W1. supporter. Here, when the compressed air is supplied to the nozzle body 100 configured as described above, the operation of the nozzle body 100 will be described. When compressed air is supplied from the supply port 104, the supplied compressed air is ejected from the respective injection ports 101 through the communication passage 105 of -15-(12) 1290069 (please refer to FIG. 2A). The compressed air injected from the injection port 101 is instantaneously released, and is strongly blown toward the upper surface T 1 of the plate-like member T in a substantially radial direction (please refer to FIG. 2B). After the pressure of the compressed air of the plate-shaped member T is strongly blown on the upper surface T1 of the plate-shaped member T, the force of the nozzle body 1 is separated from the plate-shaped member T, that is, it is intended to be The nozzle body 100 acts on the nozzle body 100 with a pushing force that is pushed upward from the movement direction W1. Thus, the nozzle body 100 acts on the nozzle body 100, and the nozzle body 100 floats from the plate member T. When the nozzle body 1 is floated by the above-described pushing force, a gap d is formed between the opposing surface 102 of the nozzle body 100 and the plate-like member T. The gap d is formed by An air pressure layer formed by pressing the air ejected from the nozzle body 1 ,, whereby the nozzle body 1 is floated at a position separated from the plate-shaped member T by a distance d. In the implementation of the # form, The compressed air supply is such that the nozzle body 1 浮 is floated only from the upper surface T1 of the plate-shaped member T by a distance dG by the principle described later, and the compression pressure of the compressed air is adjusted by the pressure reducing valve 3 to make the nozzle body 1〇 In this state, the position is a state of floating. By the ejection pressure of the compressed air thus blown, the nozzle body 100 can be floated, and the rolling oil or the washing adhered to the upper surface T1 of the plate-shaped member τ can be performed. The deposit such as a liquid, a chip, or a dirt is peeled off, and the compressed air that has been ejected flows along the groove 106 to the upstream side in the conveyance direction W 2 of the plate-shaped member τ, so that it is peeled off. The -16-(13) 1290069 slaughter is blown to the upstream side of the conveyance direction W2 as the flow passes through the gap between the nozzle body 100 and the upper surface T1 of the plate-like member T. Here, The distance F between the nozzle body 100 (hereinafter referred to as the urging force F) and the upper surface T1 of the nozzle body 100 to the plate-like member T (indicated by the horizontal axis) of the nozzle body 1 〇〇 Relationship, with Figure 3 and 5A The figure is shown in Fig. 5C. Here, Fig. 3 is a view showing the relationship between the above-described urging force F and the above-described separation distance d; the φ 5A to 5C are views showing the pressure distribution in the vicinity of the injection port 101; Figure 5A is the pressure distribution when the distance between the distances d is d 〇; the fifth B is the pressure distribution when the distance between the distances d is d! ( > d 〇); The pressure distribution when the distance between the separation distances d is d 2 ( < d 〇) is displayed. Further, the above-described force F is to include the injection pressure of the compressed air to move the nozzle body 100 to the moving direction W1. The pushing force pushed upward is the suction force of the nozzle body 100 to be sucked toward the plate member T as will be described later, and the weight of the nozzle body 100 is ignored. As can be understood from the graph shown in Fig. 3, when the distance d is the pitch dG, the force F is 〇. At this time, as shown in FIG. 5A, since the injection pressure of the compressed air is desired, the above-described nozzle body 100 is recommended to push the integral pressure 1 (ie, the pushing force) of the pressure, and the nozzle body 1 is to be used. The integral enthalpy (i.e., the absorbing force) of the absorbing pressure p2 sucked toward the plate-like member T is maintained in a very balanced relationship, so that the nozzle body 100 can be floated at a position apart from the above-mentioned pitch. status. Further, the suction pressure P2 is a negative pressure generated when compressed air flows out from the gap between the nozzle body -17-(14) 1290069 100 and the plate-like member T, and the suction force is formed by the negative pressure. Here, when the plate-like member is subjected to pressure or time-lapse, vibration or the like is generated, so that the upper surface τ 1 of the plate-shaped member 移动 is moved downward, so that the distance d is larger than the distance d() and becomes a pitch. In the case of dl ( > d〇), in the space of the above-mentioned separation distance d, the resistance against the flow of the compressed air becomes small, the compressed air is easily escaped, and the flow velocity φ of the outflow air is increased. Therefore, as shown in Fig. 5B, the suction pressure p2 is increased to make the suction force larger than the pushing force, and the nozzle body 1〇〇 is moved downward by the suction force to make the distance d from the pitch. d! Zoom out to the spacing d〇. Therefore, even when the upper surface T1 of the plate-like member T is moved downward, the nozzle body 100 immediately returns to the equilibrium state and floats at a position apart from the above-described pitch d〇. On the other hand, when the distance d is smaller than the distance d〇 from the distance d2 (<dG), contrary to the above, the resistance against the flow of the compressed air is increased in the space of the interval d. It makes the compressed air difficult to escape and reduces the flow rate of the outflowing air. Therefore, as shown in Fig. 5C, the suction pressure P2 is reduced such that the pushing force is greater than the suction force, and the nozzle body 100 is moved upward by the pushing force so that the distance d is from the distance d2. Expand to the spacing d〇. Therefore, even in this case, the nozzle body 100 described above is immediately restored to the above-described equilibrium state. As described above, in the deposit removing device X, even when the upper surface T1 of the plate-like member T is changed up and down, the nozzle body 100 moves up and down in accordance with the vertical fluctuation, so that the upper surface of the plate-shaped member T is 18- 1290069 * (15) The distance d between the τ 1 and the nozzle body 1 00 is maintained at a constant level. That is, even if the above-mentioned plate-shaped member T is vibrating, since it can always maintain a certain distance d, the distance d is set to be close to 0 (i.e., 〇·1 mm) without limitation. Since the nozzle body 1 〇 0 does not come into contact with the above-described plate-like member T, the above-mentioned plate-shaped member T is not damaged. Here, when the plate-shaped member T suddenly changes up and down, the nozzle body 1 突然 suddenly fluctuates up and down closely following the up-and-down fluctuation, so that the nozzle body 100 may be excessively sprayed in the up-and-down direction or Insufficient injection. Further, when the over-injection and the insufficient injection occur periodically, the nozzle body 1 may be in a state of turbulence such as a shimmy phenomenon. Therefore, in order to prevent the above-described over-ejection or shimmy, etc., it is preferable that the nozzle body 100 is elastically supported by an elastic member such as a spring. Specifically, the slide bar 111 may be a method of sandwiching a spiral spring or a method of using a slide bar 1 formed by a cushion member such as an oil damper. Further, the opening area of the injection port 101 formed in the opposing surface 102 of the nozzle body 1 and the area of the opposing surface 102 are important factors for causing the nozzle body 100 to float. The reason is explained as follows from Fig. 5A to Fig. 5C. Here, the convenience is also described in terms of ignoring the weight of the nozzle body 100 described above. As shown in Fig. 5B, when the separation distance d is increased, as described above, the resistance against the flow of the compressed air in the space of the above-described separation distance d becomes small, so that the flow rate of the compressed air flowing to the outside increases. Therefore, the suction pressure P2 (negative pressure) is generated in the opposing surface 102 of the nozzle body 100 (particularly, the -19-(16) 1290069 peripheral portion of the injection port 101). The suction pressure P2' acts to force the nozzle body 100 to be sucked by the plate member T. Here, the pressing pressure of the nozzle body 100 is recommended by the injection pressure from the compressed air. (>〇); the absorbing pressure P2 (<0); the total 开口 of the opening areas of all the injection ports 1 0 1 is S. The absorbing pressure p2 acts on the opposing surface 102 of the nozzle body 100 When the total area of the area is s2, when the condition of (P^S!) + (P2XS2) < 0 is satisfied, the suction force to be sucked by the above-mentioned flat plate member T is better than that of the nozzle body 1 Since the 〇 pushes the pushing force upward, the nozzle body 100 is pulled downward. Therefore, regardless of the size of the separation distance d, the nozzle body 100 is floated while being maintained at the pitch d〇, as long as it is satisfied? The condition of 1><81>?2\32 is sufficient. Here, since the injection pressure P! has a relationship with the suction pressure P2, in order to satisfy the above conditions, the above conditions may be satisfied by the variation of the areas S! and S2. On the other hand, since the deposit of the plate-shaped member T is removed by the compressed air flowing on the opposing surface 102 of the nozzle body 100, it is difficult to make the above-mentioned area S2 smaller than the area S! Removal of attachments can result in reduced removal. Here, the inventors of the present invention obtained the conditions for satisfying the condition that the nozzle body 100 can be floated in the state where the pitch is dG, and the conditions for improving the removal effect, and the like, by the repeated experiment and the study. Zhidang
Si < 2SSi < 2S
-20- (17) 1290069 時爲最佳。在此，以上述噴嘴體1 0 0之相向面1 0 2的面積 爲s時，該面積S，由於可以近似於s与s 1 + s 2 ’所以上 式（1 )可以變形爲以下之形式。 3S! < 2S …(2 ) 亦即，上述噴射口 1 0 1其各別之開口部面積的合δ十値 φ 只要以大約未滿上述相向面102面積的3分之2之方式來 形成上述噴射口 101，就不會受壓縮空氣的壓力所影響而 容易取得上述推舉力與上述吸著力的平衡，並使上述噴嘴 體1 〇〇追隨板狀構件Τ的振動安定地浮游之同時’可以取 得充分的去除效果。 然而，在本實施形態中，是使上述間隔距離d 0以比 較接近0之爲0.1mm的方式來調整供給到噴嘴體100的壓 縮空氣壓。如此地，使間隔距離dG以比較接近0之値來 •設定的理由敘述如下。 如第4圖所示，對板狀構件T的上面Τ1在對垂直方 向上強吹壓縮空氣，當以上述壓縮空氣衝撞於上述板狀構 件T的範圍的面積（在第4圖中以虛線所圍的面積）爲W ，壓縮空氣於衝撞到上述板狀構件T爲止的壓縮空氣流速 (在間隔距離d的平均流速）爲V時，若WV2的値愈大 ，則去除掉板狀構件T上面T 1上的附著物的力量就愈大 。在此，從上述噴嘴體1 00的噴射口 1 01所被噴射的壓縮 空氣之流量爲Q時，由於可近似地Q与WV，故可表示成 -21 - (18) 1290069 wV2 = QV … (3 )。 在此，所噴射的流量Q爲一定時’從上式（3) ’可 以容易理解到流速v愈大，去除附著物的力就愈大。 一般而言，當壓縮空氣從噴嘴體100的噴射口 ιοί被 噴射時，由於該壓縮壓力受到釋放使壓縮空氣呈放射狀被 Φ 吹出，所以流速V隨著愈離開噴射口 101而降低。同時， 夾介於上述間隔距離d之空間的大氣亦爲抵抗而成爲使流 速V降低之要因。因此，流量Q —定時，由於間隔距離d 愈小，上述流速V就愈大，所以去除上述附著物的力就變 大。由如此之理由，在本實施形態中，是使間隔距離d〇 以比較接近〇之値0.1mm之方式來設定噴嘴體100所供給 的壓縮空氣壓。 φ 〔實施例1〕 其次，使用第6A圖及第6B圖，來說明本發明第1實 施例之該附著物去除裝置XI。第6A圖是上述噴嘴體100a 在長邊方向（第6A圖的左右方向）的縱向斷面槪略圖； 第6B圖是從第6A圖之噴嘴體l〇〇a的b箭頭方向所觀察 的圖。又，對於與上述實施形態的構成要素爲同一構成要 素’則標示以與上述實施形態相同符號並省略其說明。 該實施例的附著物去除裝置X〗相對於上述實施形態 的附著物去除裝置X之具體特徵處，如第6A圖，尤其是 -22- (19) 1290069 如第6B圖所示地，是在相向於板狀構件T上面T1的相向 面102使用設置有溝107的噴嘴體l〇〇a此點。在第6Α圖 中，在上述噴嘴體1〇〇並沒有圖示出形成有溝106 (請參 照第2A圖〜第2C圖），但上述噴嘴體i〇〇a即使爲形成 有上述溝106者亦無妨。 如第6A圖所示，上述溝107，是在與上述板狀構件T 的搬運方向W2 (請參照第6B圖）垂直相交的方向上形成 φ 有4個分別連通的噴射口 1 01。藉此，例如上述噴射口 1 〇 1即便是少數，也可以使從4個噴射口 1 〇 1所噴射出來 的壓縮空氣均等地噴射到上述板狀構件T上面T 1之寬幅 方向全區域。 〔實施例2〕 接著，以第7A圖及第7B圖，說明關於本發明第2實 施例之該附著物去除裝置X2。 φ 於本實施例中，使用第7A圖所顯示的噴嘴體l〇〇b。 具備有上述附著物去除裝置X2之噴嘴體l〇〇b，在該相向 面1 〇 2，係在沿著與板狀構件T的搬運方向W 2 (請參照 第7A圖〉及噴嘴體100b的移動方向W1 (請參照第7B 圖）大致垂直相交的方向W3，形成有隔以間隔所配置的 4個噴射口 1 01，並且，與上述以4個噴射口作爲1組的 噴射口列1 0 1 a大致相同的噴射口列1 〇 1 b隔以一預定間隔 而並排設置在該方向W2的下流側。藉由如該等並排方式 所設置的上述噴射口列1 0 1 a、1 0 1 b，即使以上述噴射口列 -23- (20) 1290069 1 0 1 a無法去除的附著物仍殘留在上述板狀構件T時，由 於藉由排列在上述板狀構件Τ的搬運方向W2之下游側的 上述噴射口列1 0 1 b來進行附著物的去除處理，所以附著 物的去除效果能夠更加提升。又，在本實施例中，雖然例 示出如上述般地形成有2列噴射口列（1 01 a、1 0 1 b )之噴 嘴體1 00b，但並沒有特別限定於2列。 又，在上述噴嘴體l〇〇b，在與上述板狀構件T的搬 運方向W2及上述噴嘴體l〇〇b的移動方向W1大致垂直相 交的方向 W3，形成有具備長型開口部的平面噴嘴1〇8。 該平面噴嘴1 0 8，係經由圖示省略的連通路與連通路1 〇 5 連接，並供給來自於供給口 1 04的壓縮空氣。藉由如此之 平面噴嘴1 0 8的形成，而可以讓壓縮空氣均等地噴射到上 述板狀構件T上面T1的寬幅方向全區域。又，對於平面 噴嘴108，爲了確保吐出量等目的，也可以連接其他的空 氣供給源。 φ 在此，由於上述噴嘴體100、l〇〇a等在其移動方向 W 1上移動時，上述噴射口 1 0 1全部都是在相對於上述板 狀構件T大致呈垂直地噴射壓縮空氣的方式所形成。但是 ，垂直於上述板狀構件T所噴射出的壓縮空氣其作用專門 將附著物剝離，對於將剝離後的附著物吹散到板狀構件T 的搬運方向W2上流側的作用較少。當然，於上述附著物 去除裝置X2，雖然形成有將由上述噴射口 101所噴射出 的壓縮空氣導引向上述板狀構件T之搬運方向上流側的導 引溝106，不過流動於該溝106之空氣流，利用了從上述 -24- (21) 1290069 噴射口 1 0 1所噴射出來的壓縮空氣的其中一部分，所以對 於將已剝離的附著物吹散向搬運方向W2的上游側的作用 並不大。又，噴射出來的壓縮空氣的一部分是流動於上述 溝1 06中，所以亦減低了讓附著物剝離的力量。因此，在 本實施例中，如第7B圖所示，爲使壓縮空氣朝向上述板 狀構件T的搬運方向上游側噴射，因此對上述平面噴嘴 108設有傾斜角。 φ 又，如第7B圖所示，在上述噴嘴體100b，沿著方向 W3形成有長型的空氣積存部109a，是讓來自上述噴射口 1 0 1所噴射，流動於上述相向面1 02與上述板狀構件T間 之空間中的空氣得以滯留（相當於氣體積存之一例示）。 此乃是爲了效率佳地去除已被剝離的附著物，使存在有已 被剝離之附著物的空氣蓄積在上述相向面1 〇2側而設者。 又，在與上述相向面102相反之面.103，爲了使上述空氣 積存部l〇9a內的空氣逃逸至外部，形成有將上述空氣積 馨存部l〇9a導引至外部的空氣逃逸孔109b (相當於連通孔 之一例示）。 在本實施形態中，於上述相向面1 〇2，開設有凹陷狀 的氣體積存部l〇9a，於上述噴嘴體l〇〇b ’形成有使上述 氣體積存部l〇9a的內部與上述噴嘴體l〇〇b的外部連通的 空氣逃逸孔1 〇9b。因此在本實施形態中，使壓縮空氣噴射 於板狀構件T，該氣體由上述板狀構件T反彈而衝擊到上 述相向面102時，從上述噴射口 101所噴射出來的壓縮空 氣也會積存在上述氣體積存部109a的內部，使上述氣體 -25- (22) 1290069 積存部109a內部的氣體通過上述空氣逃逸孔i〇9b而被導 引到上述噴嘴體100b的外部。因此，藉由壓縮空氣的噴 射’可以使被剝離下的附著物滯留於上述氣體積存部i 〇9a ，然後再使該滯留的空氣朝向外部排出。其結果，尤其是 ’上述附著物是容易附著於上述相向面1 02的材料，例如 即使是油或是含有油的塵埃等具有黏性者，確實地防止該 附著物衝擊到上述相向面1 02然後附著於該相向面〗〇2 , φ 因此可以減輕噴射口 1 0 1的阻塞或是附著物對板狀構件T 的再附著。 又，在上述空氣逃逸孔109b也可以設置以配管或是 軟性管等所連接的鼓風機風扇（相當於吸氣機構之一例示 )。若以驅動上述鼓風機風扇，從上述空氣逃逸孔109b 吸引上述空氣積存部190a內的空氣之方式者，可以更效 率地把含有附著物的空氣予以排出。 •〔實施例3〕 其次，使用第8圖的區塊圖，說明本發明的第3實施 例。於本實施例之該附著物去除裝置X3，係具備：設置 於噴嘴體100b (請參照第2實施例，第7A圖）的上述空 氣逃逸孔l〇9b;在連接於作爲吸氣機構之一例示的鼓風機 121的管路上，把從上述空氣逃逸孔190b所排出的空氣內 所含有的液體狀或是霧狀的壓延油（液體狀附著物之一例 示〉與空氣分離而回收到設置於裝置外的油槽130等之油 分離機1 20 (附著物分離回收機構之一例示）；以及把分 -26 - (23) 1290069 離後的壓延油導入於油槽1 3 0的排洩器1 2 2所構成。又， 關於本附著物去除裝置X3的其他構成要素，由於是與上 述第2實施例之該附著物去除裝置X2的構成相同，所以 省略其他構成要素的說明。 作爲上述油分離機120者可以思及各種裝置，不過在 此，僅例示出於內部設置有可以從空氣中僅將壓延油予以 分離的油過濾器120a，藉由上述油過濾器120a把被分離 φ 後的壓延油積存於配有排放孔120c之具備排放層120b的 裝置。 上述排洩器122，是被連結於上述排放孔120c，其係 藉由從外部所供給的壓縮空氣回流到上述排洩器1 22而利 用在上述排洩器122內部所產生的負壓，從上述排放層 120b吸引壓延油而導引至油槽130者。當上述鼓風機121 運轉中，在上述油分離機1 2 0，由於空氣的流動是沿著從 噴嘴體100b通過油過濾器120a朝向通過鼓風機121的流 •動路徑，所以由該空氣流動所起因而產生負壓，使得上述 排放層120b的壓延油難以從上述排放孔120c排出，不過 由於在本附著物去除裝置X3設置有上述排洩器122，所 以即使上述鼓風機1 2 1在運轉中，仍可以強制性地將上述 壓延油排出。 如此所構成之本附著物去除裝置X3，當從上述空氣 逃逸孔190b所排出來的空氣被送入上述油分離機120時 ，藉由上述油過濾器120a分離壓延油。然後，被分離出 壓延油後之空氣，是利用上述鼓風機1 2 1由上述油分離機 •27- (24) 1290069 1 2 0被吸出而被排出於外部。另一方面，藉由上述油過濾 器120a所分離出的壓延油’被積存於上述排放層i2〇b。 然後，蓄積於上述排放層120b的壓延油，是利用上述排 洩器1 2 2由上述排放孔1 2 0 c被吸出，朝向上述油槽1 3 〇 而被排出。 又’若是一直對上述排洩器1 22供給壓縮空氣，當排 放層120b的壓延油全部被排出時，會造成空氣也從上述 修排放孔1 20c被排出，不僅降低了壓延油的分離效率，鼓 風機1 21亦有成爲高負載之虞。因此，以間歇性地，亦即 ’以每隔一預定時間對上述排洩器1 22供給壓縮空氣爲理 想。或是，也可以在上述排放層1 2 Ob預先設置放流開關 等’當接收到表示某一預定量的壓延油已被積存之來自於 上述放流開關的輸出信號爲條件，此時才使壓縮空氣切換 閥等動作，僅於一預定時間內供給壓縮空氣之方式。 如此地，在本附著物去除裝置X3中，由於空氣與壓 ϋ延油被分離，壓延油被回收到油槽1 3 0，所以可完成不把 含有壓延油的空氣排放到大氣中，就能夠去除對人體或環 境有害的部分。並由於所排出的壓延油被回收，所以能夠 使壓延油回收再可利。 本實施例中，雖是以將壓延油分離而回收的例示來做 說明’但例如，對於將壓延油以外之液體狀的附著物予以 分離回收之情形時，本實施例之該附著物去除裝置Χ3亦 可適用之。 又，若是替代上述油過濾器而設置能夠從所排出的空 -28- (25) 1290069 氣分離塵埃等固體附著物之沒有被圖示出的空氣過濾器時 ’則不限於液狀附著物，也能夠分離回收固體狀的附著物 〔實施例4〕 其次’以第9圖，說明本發明的第4實施例。在本實 施例之該附著物去除裝置X4，不僅在上述板狀構件τ的 φ上面Τ1側’在下面T2側亦設置有在上述實施形態中之噴 嘴體°在此’上述噴嘴體100被設置於上述板狀構件 T的下面T2側時，由於必須以與設置於上述上面τ 1側時 相反方向地噴射壓縮空氣之方式來配置上述噴嘴體1〇〇, 因此，在此種情形下，如第9圖所示地，爲了防止上述噴 嘴體1 〇〇因其自重而朝下側移動之同時，爲將上述噴嘴體 100移動自如地支持在與板狀構件T的下面T2大致呈垂 直的方向 W 1上，所以藉由懸吊式螺旋彈簧等彈性構件 修1 1 3彈性地支持上述噴嘴體1 〇〇。藉由如此之構成，不僅 能夠把上述板狀構件T兩面的附著物予以去除，而且能夠 防止上述噴嘴體100朝向上下方向過度噴射、或噴射不足 、或發生擺振。 〔實施例5〕 在此所說明之本發明第5實施例之該附著物去除裝置 X5，是以維持噴嘴體100浮揚力之方式所構成。 具體而言，如第1 〇圖的管路圖所示，是由：除了具 -29 - TOQOO^Q第94126725號專利申請案 •丄中文說明書修正頁 民國96年3月14曰修正 (26) 備有上述減壓閥3、空氣過濾器4、控制器1、及噴嘴體 1 00之外，再加上，預定設定了動作壓力値（限定壓力値 )之壓力開關7、以及利用被供給的壓縮空氣而動作的氣 壓缸1 40 (驅動機構之一例示）所構成。又，與上述實施 形態及實施例的構成相異，是替代上述電磁閥2而採用3 方向可切換的3向電磁閥2a。 上述氣壓缸1 40，是屬於在內部具備有彈簧等彈性構 φ 件140a及活塞14 0b的單動式氣壓缸，當一預定壓力（至 少是具有大於上述彈性構件140a之彈壓力而得以使活塞 1 40b作用之空氣壓力））以上的壓縮空氣被供給到空氣供 給室140d時，上述活塞140b朝向與上述彈性構件140a 的彈壓方向相反的方向（讓上述彈性構件140a壓縮的方 向））動作。該氣壓缸140，是被安裝在可使其上述活塞 l4〇b朝鉛直方向動作，且，藉由壓縮空氣之供給可使上述 活塞140b朝向上方動作之支持構件141。 # 又，朝向上述活塞140b下側延伸的活塞軸140c，是 夾介上述的彈性構件1 1 3 (請參照第9圖）連結於支持上 述噴嘴體100的支持構件142。利用如此之連結，當上述 活塞140b動作時，上述噴嘴體100會朝大致垂直於板狀 • 構件T表面之方向被拉起。 上述電磁閥2a，爲具有1個輸入埠及2個輸出埠的3 方向電磁閥，輸入埠P1是配管連接於空氣壓力源5。另 一方面，2個輸出埠中，在無激磁時與空氣壓力源5連通 的埠P2是配管連接於上述氣壓缸140的空氣供給室140d -30- (27) 1290069 96. 3· 14必上 ，被激磁時與空氣壓力源5連通的埠Ρ3是配管連接於上 述減壓閥3。 上述壓力開關7，是當被供給到上述噴嘴體1〇〇的壓 縮空氣在還未滿預定的限定壓力時便將檢測信號傳送給控 制器1。又，上述限定壓力，是用以讓噴嘴體1〇〇浮起的 最低限度所所必須的壓力。 在如此所構成的本附著物去除裝置X 5中，利用供給 φ 壓縮空氣使得上述噴嘴體1 〇〇正處於浮游（浮起）狀態時 ，當從上述壓力開關7對上述控制器1輸出檢測信號，上 述3方向電磁閥2a受上述控制器1而解除激磁。藉此， 上述3方向電磁閥2a動作，使輸出埠P3關閉，並且，打 開輸出埠P2。然後，夾介上述輸出埠P2使壓縮空氣被供 給到上述空氣供給室1 40d。又，以上述方式控制上述3方 向電磁閥2a的上述控制器1是相當於驅動控制機構。 於上述氣壓缸140，當壓縮空氣被供給到上述空氣供 φ 給室140d時，活塞140b朝向上方移動，上述噴嘴體1〇〇 亦隨著上述活塞140b的移動而被朝向上側拉起。 如此地，對噴嘴體1 〇〇所供給的壓縮空氣的壓力在未 滿限定壓力時，由於上述噴嘴體100是藉由上述氣壓缸 • 140所拉起，因此可以防止上述噴嘴體100落下而損傷到 . 上述板狀構件T。 又，在本第5實施例中，雖是對噴嘴體100設置在板 狀構件T上面側之情形做說明，當然，如上述第4實施例 所說明地，對於噴嘴體1 〇〇設置在上述板狀構件T下面側 -31 - (28) 1290069 96. 3· 14^4^ 時亦同樣地可以適用之。又，此種情形時，是以藉由活塞 140b動作將噴嘴體100從上述板狀構件T的下面朝向下 方拉引之方式來設置上述氣壓缸140。 又，在本實施例中，是揭示使用單動式的氣壓缸140 來作爲驅動機構之例示，但是，例如以使用複動式的氣壓 缸爲例亦無妨。 如以上所說明，係適用於從由一個以上的噴射口所形 φ 成的噴嘴體之該等噴射口噴射壓縮氣體，將附著於上述板 狀構件的附著物予以去除之附著物去除裝置者，由於上述 噴嘴體是以移動自如地被支持在與上述板狀構件的表面大 致呈垂直的方向上之方式所構成，故能夠使上述噴嘴體維 持在隨時與上述板狀構件間隔大致一定間隔距離之位置的 狀態下浮游。藉此，即使於上述板狀構件產生振動或是由 於板狀構件有反翹等變形而使得上述板狀構件的表面上下 動作時，由於上述噴嘴體可以隨著該上下動作而上下移動 φ ，所以可以使得從上述板狀構件的表面到上述噴嘴體的間 隔距離隨時大致維持於一定。因此，能夠把上述板狀構件 與上述噴嘴體之間的間距設定在數mm以下，具體而言是 能夠設定到0.1mm左右。藉此，相較於以往由於設在數 • mm左右的間隔距離，若是沒有供給比較高壓的壓縮氣體 .的話就不能得到充分的附著物去除效果之情形，根據本發 明，藉由使上述間隔距離更加狹小，所以使用壓力比以往 還低之壓縮氣體，就可以得到相同於以往或是超過以往的 附著物去除效果。特別是上述噴射口爲複數個時，由於使 -32· 1290069 (29) 得利用壓縮氣體的噴射壓對上述噴嘴體的複數個作用力在 平衡上更能均衡，所以藉由該平衡作用，可以更加安定地 使上述噴嘴體維持在隨時與上述板狀構件間隔大致一定間 隔距離之位置的狀態下浮游。 又，藉由縮短上述板狀構件與上述噴嘴體之距離而提 高了噴射到上述板狀構件的壓縮氣體的噴射壓力，所以能 夠去除壓延速度高速化之壓延機所壓延的板狀構件，也就 φ 是可以去除被高速搬運下之板狀構件的附著物。 又，由於在上述噴嘴體的上述相向面設有凹陷狀的氣 體積存部，並於上述噴嘴體形成有上述連通孔，所以可以 使上述氣體積存部內包含有附著物的氣體排出至外部，減 輕噴射口的阻塞或是附著物對板狀構件的再附著。 又，由於利用吸引機構強制性地使氣體積存部內的氣 體被吸引排出，所以可以效率佳地排出含有附著物之氣體 〇 • 又，由於設有上述附著物分離回收機構，所以從上述 連通孔所排出的附著物不會被分散到大氣中，實現對人體 或環境無污染的附著物去除裝置。並且，可以防止被排出 後的附著物對上述板狀構件的再附著。 再者，上述附著物分離機構，由於可以從含有附著物 之氣體僅將液狀附著物予以分離回收者，所以上述液狀附 著物若是油或是洗淨液等能夠再利用者時，可以僅回收該 等物質再利用。 又，由於設有上述驅動機構及上述驅動控制機構’所 -33- (30) 1290069 以上述噴嘴體在衝撞到上述板狀構件之前可強制地被退離 ，其結果，可防止板狀構件的損傷。 〔產業上之可利用性〕 本發明，是以壓延機製造金屬板或是樹脂板等板狀構 件時，作爲用以去除附著在壓延後之板狀構件的壓延油或 是洗淨劑之技術，極適切於產業上所利用者。 【圖式簡單說明】 第1圖是用以槪略性說明本發明之實施形態之附著物 去除裝置的空氣控制系統的線路圖。 第2A圖是附著物去除裝置的噴嘴體在長邊方向的縱 向斷面槪略圖。 第2B圖是從第2A圖之噴嘴體的A箭頭方向所觀察 的圖示。 φ 第2C圖是顯示第2A圖之噴嘴體變形例的底面槪略圖 〇 第3圖是表示對噴嘴體的作用力與間隔距離的關係圖 〇 第4圖是說明間隔距離與附著物去除效果之關係的模 式圖。 第5 A圖是顯示間隔距離d之間距爲dG時，噴射口附 近的壓力分布圖。 第5B圖是顯示間隔距離d之間距爲d 1 ( > d〇 )時， -34- (31) 1290069 噴射口附近的壓力分布圖。 第5C圖是顯示間隔距離d之間距爲d2 ( < d())時， 噴射口附近的壓力分布圖。 第6A圖是本發明第1實施例之該附著物去除裝置的 噴嘴體在長邊方向的縱向斷面槪略圖。 第6B圖是從第6A圖之噴嘴體的B箭頭方向所觀察 的圖示。 • 第7A圖是說明本發明第2實施例之該附著物去除裝 置的噴嘴體的模式圖。 第7B圖是第7A圖之附著物去除裝置的噴嘴體的斷面 槪略圖。 第8圖是顯示本發明第3實施例之該附著物去除裝置 其槪略構成的區塊圖。 第9圖是說明本發明第4實施例之該附著物去除裝置 的噴嘴體的模式圖。 # 第1 〇圖是顯示本發明第5實施例之該附著物去除裝 置其槪略構成的管路圖。 t主要元件符號說明】 1290069 (32) 5 :空氣壓力源 6 :管路 7 :壓力開關 100 :噴嘴體 1 0 1 :噴射口 1 0 2 :相向面 104 :供給口 φ 1 05 :連通路 106 ：溝 l〇9a :空氣（氣體）積存部 109b :空氣逃逸孔 1 1 〇 :滑動機構 1 1 1 :滑動桿 112 :滑動導引 1 1 3 :彈性構件 籲12〇 :油分離機 12 0b :排放層 120c :排放孔 1 2 1 :鼓風機 122 :排洩器 1 3 0 :油槽 1 4 0 :氣壓缸 140a :彈性構件 14 0b ：活塞 -36- (33) 1290069 140c :活塞軸 140d :空氣供給室 1 4 1 :支持構件 d :間隔距離 T :板狀構件 T1 :板狀構件（的）上面 W1 :噴嘴體的移動方向 φ W2 :板狀構件的搬運方向 W 3 :噴射口的排列方向-20- (17) 1290069 is the best. Here, when the area of the opposing surface 10 2 of the nozzle body 100 is s, the area S can be approximated by s and s 1 + s 2 ', so that the above formula (1) can be deformed into the following form. . 3S! < 2S (2), that is, the combined δ 値 φ of the respective opening areas of the ejection openings 1 0 1 is formed to be approximately two-thirds of the area of the opposing surface 102 The injection port 101 is not affected by the pressure of the compressed air, and it is easy to obtain the balance between the pushing force and the absorbing force, and the nozzle body 1 〇〇 follows the vibration of the plate-shaped member 安 while floating stably. Get a full removal effect. However, in the present embodiment, the compressed air pressure supplied to the nozzle body 100 is adjusted such that the distance d 0 is 0.1 mm closer to 0. In this way, the reason why the separation distance dG is relatively close to 0 is set as follows. As shown in Fig. 4, the upper surface of the plate-like member T is strongly blown with compressed air in the vertical direction, and the area of the range in which the compressed air collides with the above-mentioned plate-shaped member T (in FIG. The area of the enclosure is W, and the compressed air flow rate (the average flow velocity at the separation distance d) when the compressed air collides with the above-mentioned plate-shaped member T is V. If the WV2 is larger, the upper surface of the plate-shaped member T is removed. The greater the force of the attachment on T 1 . Here, when the flow rate of the compressed air injected from the injection port 101 of the nozzle body 100 is Q, since it can approximate Q and WV, it can be expressed as -21 - (18) 1290069 wV2 = QV ... ( 3). Here, when the flow rate Q to be ejected is constant, 'from the above formula (3)', it can be easily understood that the larger the flow velocity v is, the larger the force for removing the deposit is. In general, when compressed air is ejected from the ejection port of the nozzle body 100, since the compression pressure is released and the compressed air is radially blown by Φ, the flow velocity V decreases as it goes away from the ejection opening 101. At the same time, the atmosphere sandwiching the space of the above-mentioned separation distance d is also a factor that causes the flow velocity V to decrease. Therefore, at the flow rate Q - timing, since the smaller the separation distance d is, the larger the flow velocity V is, the larger the force for removing the deposit is. For this reason, in the present embodiment, the compressed air pressure supplied from the nozzle body 100 is set such that the distance d〇 is relatively close to 0.1 mm. φ [Embodiment 1] Next, the attachment removing device XI according to the first embodiment of the present invention will be described using Figs. 6A and 6B. 6A is a longitudinal cross-sectional view of the nozzle body 100a in the longitudinal direction (the horizontal direction of FIG. 6A); and FIG. 6B is a view seen from the direction of the b arrow of the nozzle body 10a of FIG. 6A. . It is to be noted that the same components as those of the above-described embodiment are denoted by the same reference numerals as in the above-described embodiment, and the description thereof will be omitted. The attachment removing device X of this embodiment is specific to the attachment removing device X of the above embodiment, as shown in Fig. 6A, especially -22-(19) 1290069 as shown in Fig. 6B. The opposing surface 102 facing the upper surface T1 of the plate-like member T uses the nozzle body 10a provided with the groove 107 at this point. In the sixth drawing, the nozzle body 1 is not shown with a groove 106 (see FIGS. 2A to 2C), but the nozzle body i〇〇a is formed even if the groove 106 is formed. It doesn't matter. As shown in Fig. 6A, the groove 107 is formed in the direction perpendicular to the conveyance direction W2 (see Fig. 6B) of the plate-like member T, and has four injection ports 119 that communicate with each other. Thereby, for example, even if the injection port 1 〇 1 is small, the compressed air ejected from the four injection ports 1 〇 1 can be equally sprayed onto the entire area in the width direction of the upper surface T 1 of the plate-like member T. [Embodiment 2] Next, the attachment removing device X2 according to the second embodiment of the present invention will be described with reference to Figs. 7A and 7B. φ In the present embodiment, the nozzle body 10b shown in Fig. 7A is used. The nozzle body 10b having the above-described deposit removing device X2 is disposed along the conveying direction W 2 with the plate-like member T (see FIG. 7A) and the nozzle body 100b. In the moving direction W1 (please refer to FIG. 7B), the direction W3 in which the vertical direction intersects substantially is formed, and four injection ports 119 arranged at intervals are formed, and the above-described four injection ports are used as one group of ejection ports 10 The substantially identical ejection port arrays 1 〇 1 b are arranged side by side at a predetermined interval in the downstream side of the direction W2. The ejection port arrays 1 0 1 a, 1 0 1 are provided by the side-by-side arrangement. b, even if the deposit which cannot be removed by the above-described ejection port array -23-(20) 1290069 1 0 1 a remains in the above-mentioned plate-like member T, it is arranged downstream of the conveying direction W2 of the above-mentioned plate-shaped member 由于In the above-described ejection port row 10 1 b, the removal process of the deposits is performed, so that the effect of removing the deposits can be further improved. Further, in the present embodiment, the two rows of ejection ports are formed as described above. (1 01 a, 1 0 1 b ) nozzle body 1 00b, but is not particularly limited to Further, in the nozzle body 10b, a long opening is formed in a direction W3 that substantially perpendiculars to a direction W2 in which the plate-shaped member T is conveyed and a direction W1 in which the nozzle body 10b moves. The planar nozzle 1 〇 8 is connected to the communication path 1 〇 5 via a communication path (not shown), and supplies compressed air from the supply port 104. With such a planar nozzle 1 The formation of 0 8 allows the compressed air to be equally sprayed onto the entire widthwise direction of the upper surface T1 of the plate-like member T. Further, for the planar nozzle 108, other air supply sources may be connected for the purpose of ensuring the discharge amount and the like. Here, when the nozzle bodies 100, 10a, etc. are moved in the moving direction W1 thereof, the ejection openings 110 are all sprayed with compressed air substantially perpendicularly with respect to the plate-like member T. However, the compressed air jetted perpendicularly to the plate-like member T acts to peel off the deposit, and blows the adhered material to the upstream side in the conveyance direction W2 of the plate-shaped member T. In the above-described deposit removal device X2, the guide groove 106 that guides the compressed air jetted from the injection port 101 to the upstream side in the conveyance direction of the plate-shaped member T is formed, but flows into the guide groove 106. Since the air flow of the groove 106 uses a part of the compressed air injected from the above-mentioned -24-(21) 1290069 injection port 110, the peeled deposit is blown to the upstream side in the conveyance direction W2. The effect is not large. In addition, a part of the injected compressed air flows in the groove 106, so that the force for peeling off the deposit is also reduced. Therefore, in the present embodiment, as shown in Fig. 7B, in order to eject the compressed air toward the upstream side in the conveyance direction of the plate-shaped member T, the flat nozzle 108 is provided with an inclination angle. φ Further, as shown in Fig. 7B, in the nozzle body 100b, a long air reservoir 109a is formed along the direction W3, and is ejected from the injection port 110, and flows on the opposite surface 102 and The air in the space between the plate-like members T is retained (corresponding to one of the gas reservoirs). This is for the purpose of efficiently removing the adhered matter and accumulating the air having the adhered deposit on the side of the opposing surface 1 〇2. Further, on the surface 103 opposite to the opposing surface 102, in order to allow the air in the air reservoir portion 〇9a to escape to the outside, an air escape hole for guiding the air scent portion l〇9a to the outside is formed. 109b (equivalent to one of the connected holes). In the present embodiment, a recessed gas reservoir portion 〇9a is formed in the opposing surface 1 〇2, and the inside of the gas reservoir portion 〇9a and the nozzle are formed in the nozzle body 10b' The externally connected air escape hole 1 〇 9b of the body l〇〇b. Therefore, in the present embodiment, when compressed air is ejected to the plate-like member T, and the gas rebounds from the plate-shaped member T and hits the opposing surface 102, the compressed air ejected from the ejection port 101 is also accumulated. Inside the gas reservoir 109a, the gas inside the gas-25-(22) 1290069 reservoir 109a is guided to the outside of the nozzle body 100b through the air escape hole i〇9b. Therefore, by the injection of the compressed air, the adhered matter can be retained in the gas reservoir portion i 〇 9a, and then the retained air can be discharged toward the outside. As a result, in particular, the above-mentioned deposit is a material which is likely to adhere to the opposing surface 102, and for example, even if it is oil or dust containing oil, it is surely prevented from impinging on the opposing surface 102. Then, it is attached to the opposing faces 〇2, φ so that the clogging of the ejection openings 110 or the reattachment of the adhering substances to the plate-like member T can be alleviated. Further, a blower fan (corresponding to one of the intake mechanisms) connected to a pipe or a flexible pipe may be provided in the air escape hole 109b. When the blower fan is driven to suck the air in the air accumulating portion 190a from the air escape hole 109b, the air containing the deposit can be discharged more efficiently. [Embodiment 3] Next, a third embodiment of the present invention will be described using the block diagram of Fig. 8. The deposit removing device X3 of the present embodiment includes the air escape hole l〇9b provided in the nozzle body 100b (refer to the second embodiment, FIG. 7A); and is connected to one of the suction mechanisms In the piping of the blower 121, the liquid or mist-like rolling oil (an example of a liquid deposit) contained in the air discharged from the air escape hole 190b is separated from the air and collected in the apparatus. An oil separator 130 such as an oil groove 130 (exemplified as one of the deposit separation and recovery mechanisms); and a drainer 1 2 2 for introducing the rolling oil after the separation of -26 - (23) 1290069 into the oil tank 130 In addition, since the other components of the deposit removing device X3 are the same as those of the deposit removing device X2 of the second embodiment, the description of the other components will be omitted. Various devices can be conceived, but here only the oil filter 120a which can separate only the rolling oil from the air is provided, and the oil filter 120a is used to calender the separated φ. The device is provided in the discharge hole 120b provided with the discharge hole 120c. The discharge device 122 is connected to the discharge hole 120c, and is used by the compressed air supplied from the outside to be returned to the discharge device 1 22 The negative pressure generated inside the drainer 122 is sucked by the rolling oil from the discharge layer 120b and guided to the oil groove 130. When the blower 121 is in operation, in the oil separator 1 2 0, the flow of air is along Since the nozzle body 100b passes through the oil filter 120a toward the flow path through the blower 121, a negative pressure is generated from the flow of the air, so that the rolling oil of the discharge layer 120b is difficult to be discharged from the discharge hole 120c, but Since the deposit removing device X3 is provided with the above-described drainer 122, the rolling oil can be forcibly discharged even when the blower 1 2 1 is in operation. The present attachment removing device X3 thus constructed is from the above air. When the air discharged from the escape hole 190b is sent to the oil separator 120, the rolling oil is separated by the oil filter 120a. Then, it is separated. The air after the rolling of the oil is sucked out by the above-mentioned oil separator 1 2 1 by the above-mentioned oil separator, 27-(24) 1290069 1 2 0, and is discharged to the outside. On the other hand, it is separated by the oil filter 120a. The rolling oil 'is accumulated in the discharge layer i2〇b. Then, the rolling oil accumulated in the discharge layer 120b is sucked out from the discharge hole 1 2 0 c by the drainer 12 2 toward the oil groove 13 Further, if the compressed air is supplied to the ejector 1 22 at all times, when the rolling oil of the discharge layer 120b is completely discharged, air is also discharged from the vent hole 1 20c, which not only reduces the rolling oil. The separation efficiency of the blower 1 21 also becomes a high load. Therefore, it is desirable to supply compressed air to the above-described drainer 1 22 intermittently, that is, at every predetermined time. Alternatively, it is also possible to preliminarily set a discharge switch or the like in the discharge layer 1 2 Ob as a condition for receiving an output signal from the discharge switch indicating that a predetermined amount of rolling oil has been accumulated. The operation of switching valves and the like to supply compressed air only for a predetermined period of time. As described above, in the present attachment removing device X3, since the air and the compressed oil are separated, the rolling oil is recovered into the oil tank 130, so that the air containing the rolling oil can be removed without being discharged into the atmosphere. A part that is harmful to the human body or the environment. Since the discharged rolling oil is recovered, the rolling oil can be recovered and reused. In the present embodiment, the description is made by taking an example in which the rolling oil is separated and recovered. However, for example, when the liquid deposit other than the rolling oil is separated and recovered, the deposit removing device of the present embodiment is used. Χ3 is also applicable. In addition, when an air filter (not shown) capable of separating solid deposits such as dust from the discharged air -28-(25) 1290069 gas is provided instead of the oil filter, it is not limited to the liquid deposit. It is also possible to separate and recover a solid deposit (Example 4) Next, a fourth embodiment of the present invention will be described with reference to Fig. 9. In the deposit removing device X4 of the present embodiment, not only the φ1 side of the plate-shaped member τ, but also the nozzle body of the above-described embodiment is provided on the lower side T2 side. In the case of the lower surface T2 side of the plate-like member T, the nozzle body 1A is disposed so as to inject the compressed air in the opposite direction to the upper surface τ 1 side. Therefore, in this case, As shown in Fig. 9, in order to prevent the nozzle body 1 from moving downward due to its own weight, the nozzle body 100 is movably supported in a direction substantially perpendicular to the lower surface T2 of the plate-shaped member T. Since W 1 is provided, the above-described nozzle body 1 弹性 is elastically supported by an elastic member such as a suspension coil spring. According to this configuration, not only the attachments on both surfaces of the plate-like member T but also the nozzle body 100 can be prevented from being excessively ejected in the vertical direction, or insufficiently injected or shimmy can be generated. [Embodiment 5] The deposit removing device X5 of the fifth embodiment of the present invention described above is configured to maintain the floating force of the nozzle body 100. Specifically, as shown in the piping diagram of Figure 1, it is: In addition to the -29 - TOQOO^Q Patent No. 94,226,725 patent application, 丄 Chinese manual revision page, Republic of China, March 14, 1996 amendment (26) In addition to the pressure reducing valve 3, the air filter 4, the controller 1, and the nozzle body 100, a pressure switch 7 that is set to have an operating pressure 値 (limited pressure 値) and a supplied pressure is provided. A pneumatic cylinder 1 40 (exemplified by a drive mechanism) that operates by compressing air. Further, unlike the above-described embodiment and the configuration of the embodiment, a three-way electromagnetic valve 2a that is switchable in three directions is used instead of the solenoid valve 2. The pneumatic cylinder 140 is a single-acting pneumatic cylinder having an elastic member φ member 140a and a piston 1400b which are internally provided with a predetermined pressure (at least having a larger pressure than the elastic member 140a) to cause the piston When the compressed air of the first 40b is supplied to the air supply chamber 140d, the piston 140b is moved in a direction opposite to the direction in which the elastic member 140a is biased (the direction in which the elastic member 140a is compressed). The pneumatic cylinder 140 is attached to a support member 141 that allows the piston l4b to operate in the vertical direction and that allows the piston 140b to move upward by the supply of compressed air. Further, the piston shaft 140c extending toward the lower side of the piston 140b is coupled to the support member 142 that supports the nozzle body 100 with the elastic member 1 1 3 (see Fig. 9) interposed therebetween. With such a connection, when the piston 140b is operated, the nozzle body 100 is pulled up in a direction substantially perpendicular to the surface of the plate-like member T. The solenoid valve 2a is a three-way solenoid valve having one input port and two output ports, and the input port P1 is a pipe connected to the air pressure source 5. On the other hand, among the two output ports, the 埠P2 that communicates with the air pressure source 5 when there is no excitation is the air supply chamber 140d -30- (27) 1290069 96. 3·14 of the pipe connected to the pneumatic cylinder 140. The crucible 3 that communicates with the air pressure source 5 during the excitation is a pipe connected to the pressure reducing valve 3. The pressure switch 7 transmits a detection signal to the controller 1 when the compressed air supplied to the nozzle body 1 is not full of a predetermined limited pressure. Further, the above-mentioned limited pressure is a pressure necessary for the minimum of the nozzle body 1 to float. In the attachment removing device X 5 configured as described above, when the nozzle body 1 is in a floating (floating) state by supplying φ compressed air, a detection signal is output from the pressure switch 7 to the controller 1. The three-direction electromagnetic valve 2a is deenergized by the controller 1. Thereby, the three-direction electromagnetic valve 2a operates to close the output port P3 and open the output port P2. Then, the above output 埠P2 is interposed to supply compressed air to the above air supply chamber 1 40d. Further, the controller 1 that controls the three-way electromagnetic valve 2a in the above manner corresponds to a drive control mechanism. In the pneumatic cylinder 140, when compressed air is supplied to the air supply chamber 140d, the piston 140b moves upward, and the nozzle body 1b is pulled upward toward the upper side as the piston 140b moves. As described above, when the pressure of the compressed air supplied to the nozzle body 1 is less than the predetermined pressure, the nozzle body 100 is pulled up by the pneumatic cylinder 140, so that the nozzle body 100 can be prevented from falling and being damaged. To the above plate member T. Further, in the fifth embodiment, the case where the nozzle body 100 is provided on the upper surface side of the plate-shaped member T will be described. Of course, as described in the fourth embodiment, the nozzle body 1 is provided above. The lower side of the plate member T -31 - (28) 1290069 96. 3· 14^4^ is equally applicable. Further, in this case, the pneumatic cylinder 140 is provided such that the nozzle body 100 is pulled downward from the lower surface of the plate-like member T by the action of the piston 140b. Further, in the present embodiment, an example in which the single-acting pneumatic cylinder 140 is used as the drive mechanism is disclosed. However, for example, a double-acting pneumatic cylinder may be used as an example. As described above, it is applied to an attachment removing device that ejects a compressed gas from the ejection openings of the nozzle body formed by one or more injection ports, and removes the adhering matter attached to the plate-shaped member. Since the nozzle body is movably supported in a direction substantially perpendicular to the surface of the plate-like member, the nozzle body can be maintained at a predetermined distance from the plate-shaped member at any interval. Floating in the state of the position. Thereby, even when the plate-shaped member vibrates or the plate-shaped member is deformed by a warp or the like to cause the surface of the plate-shaped member to move up and down, the nozzle body can move up and down φ with the vertical movement. The distance from the surface of the plate-like member to the nozzle body can be kept substantially constant at any time. Therefore, the distance between the plate-shaped member and the nozzle body can be set to several mm or less, and specifically, can be set to about 0.1 mm. Therefore, compared with the conventional separation distance of about several mm, if a relatively high-pressure compressed gas is not supplied, a sufficient effect of removing the deposit cannot be obtained. According to the present invention, the above-described separation distance is obtained. It is even smaller, so the use of compressed gas with a lower pressure than before can achieve the same or more past attachment removal effect. In particular, when the number of the injection ports is plural, since the plurality of forces of the nozzle body are more balanced by the injection pressure of the compressed gas by -32·1290069 (29), the balance can be used. The nozzle body is more stably floated in a state where it is spaced apart from the plate-like member by a predetermined distance. Further, by shortening the distance between the plate-shaped member and the nozzle body, the injection pressure of the compressed gas injected into the plate-shaped member is increased, so that the plate-shaped member which is rolled by the rolling mill with a high rolling speed can be removed. φ is an attachment that can remove the plate-like member that is transported at a high speed. Further, since the recessed gas reservoir is provided on the opposing surface of the nozzle body, and the communication hole is formed in the nozzle body, the gas containing the deposit in the gas reservoir can be discharged to the outside, and the injection can be reduced. Blockage of the mouth or reattachment of the attachment to the plate member. In addition, since the gas in the gas reservoir is forcibly sucked and discharged by the suction mechanism, the gas containing the deposit can be efficiently discharged. Further, since the deposit separation and recovery mechanism is provided, the communication hole is provided. The discharged deposits are not dispersed into the atmosphere, and an attachment removing device that does not pollute the human body or the environment is realized. Further, it is possible to prevent the attachment of the discharged object to the reattachment of the above-mentioned plate member. Further, since the deposit separating means can separate and collect only the liquid deposits from the gas containing the deposits, if the liquid deposits can be reused such as oil or washing liquid, only the liquid deposits can be reused. Recycling these materials for reuse. Further, since the drive mechanism and the drive control mechanism '33-(30) 1290069 are provided, the nozzle body can be forcibly retracted before the collision with the plate-shaped member, and as a result, the plate-shaped member can be prevented. damage. [Industrial Applicability] The present invention is a technique for removing a rolling oil or a detergent attached to a rolled plate member when a sheet metal member such as a metal plate or a resin plate is produced by a calender. It is extremely suitable for those who use it in the industry. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a circuit diagram for schematically explaining an air control system of an attachment removing device according to an embodiment of the present invention. Fig. 2A is a schematic longitudinal cross-sectional view showing the nozzle body of the deposit removing device in the longitudinal direction. Fig. 2B is a view as seen from the direction of the arrow A of the nozzle body of Fig. 2A. φ 2C is a bottom view showing a modification of the nozzle body in Fig. 2A. Fig. 3 is a view showing a relationship between the urging force and the separation distance of the nozzle body. Fig. 4 is a view showing the separation distance and the effect of removing the deposit. Schematic diagram of the relationship. Fig. 5A is a pressure distribution diagram showing the vicinity of the injection port when the distance between the separation distances d is dG. Fig. 5B is a graph showing the pressure distribution in the vicinity of the injection port of -34-(31) 1290069 when the distance between the separation distances d is d 1 ( > d 〇 ). Fig. 5C is a graph showing the pressure distribution in the vicinity of the ejection opening when the distance between the separation distances d is d2 ( < d()). Fig. 6A is a schematic longitudinal cross-sectional view showing the nozzle body of the deposit removing device according to the first embodiment of the present invention in the longitudinal direction. Fig. 6B is a view as seen from the direction of the B arrow of the nozzle body of Fig. 6A. Fig. 7A is a schematic view showing a nozzle body of the deposit removing device according to the second embodiment of the present invention. Fig. 7B is a schematic cross-sectional view showing the nozzle body of the deposit removing device of Fig. 7A. Fig. 8 is a block diagram showing the outline of the attachment removing device of the third embodiment of the present invention. Fig. 9 is a schematic view showing a nozzle body of the deposit removing device according to the fourth embodiment of the present invention. #第一1图 is a piping diagram showing a schematic configuration of the deposit removing device according to the fifth embodiment of the present invention. t Main component symbol description] 1290069 (32) 5 : Air pressure source 6 : Pipe 7 : Pressure switch 100 : Nozzle body 1 0 1 : Injection port 1 0 2 : Opposite surface 104 : Supply port φ 1 05 : Communication path 106 : Groove l〇9a: Air (gas) reservoir 109b: Air escape hole 1 1 〇: Sliding mechanism 1 1 1 : Slide bar 112: Sliding guide 1 1 3 : Elastic member 〇 12〇: Oil separator 12 0b : Drain layer 120c: discharge hole 1 2 1 : blower 122 : drainer 1 3 0 : oil tank 1 4 0 : pneumatic cylinder 140a: elastic member 14 0b : piston - 36 - (33) 1290069 140c : piston shaft 140d : air supply chamber 1 4 1 : Support member d : separation distance T : plate member T1 : upper surface of the plate member W1 : moving direction of the nozzle body φ W2 : conveying direction of the plate member W 3 : arrangement direction of the ejection openings
-37--37-