12.87613 * * » 九、發明說明： 【發明所屬之技術領域】 本發明係為提供一種雙軸六自由度振動量測系統，主要利用 一準直雷射光源與光路設計於待測物上，使雷射光源分別射入呈 i又之可被光束覆蓋之平面鏡組上，反射後分別由四個象限探測 裔來接收反射光點位置變化，以量測位移與角度，經由分析得到 其振動頻率大小，藉以有效且精準地量測工具機其待測物上之振 β 動變化為創新設計。 【先前技術】 按，目前用來量測單軸的振動訊號有三種感測器，如位移感 測器、速度感測器及加速度感測器，其中： 位移感測器，分有接觸式（如LVDT差速器之位置感應器）、 非接觸式（如渴電流式、電容式、光纖式和雷射式），主要是利 用^I鳊繞線圈產生之磁立場受被測物體之接近而變化的關係感 馨測出被測物體之位移，用於振動頻率較低時； 速度感測器，分有接觸式（LVT)、非接觸式（LDV)，主要利 用内部小磁鐵塊浸於阻尼液體中，其小磁鐵塊運動使線圈放出感 應電流來量測速度值，用於振動頻率較高； 加速度感測器’壓電晶體式（電壓式、電荷氏）壓電組式； 主要利用内部小質量塊之貫性拉壓壓電晶體放出電荷，來量測出 加速度值，用於振動頻率較高。 1287613 然而，由於上述三種振動量測方法都只能用於單—自由产上 量測，且其在量測六自由度振動訊號時則需要使用多各探頭，需 要使用多組量測儀器，相對也使得量測儀器所需之經費成本越 高，亦造成量測儀器使用時的誤差也越多，以及量測時之繁複步 驟，最後致使所獲得之六自由度振動訊號的準確性不佳。， 有4α於此本發明人精心研發一種利用可被光束覆蓋之平面 鏡組與象限探測器組成了六自由度振動量測設備與方法，使之藉 由少量元件組成，如此一來可以減少的使用數量，並可減少儀^ 所造成的誤差，還可減低儀器所該費，如此—來可以減少量測 儀器的使用數量，而且同時可減少量測的繁複步驟，並且能精確 的量測出六自由度振動訊號，有效符合現代工業朝精密化與奈米 級的方向前進。 【發明内容】 本^明之主要目的即在於提供一種雙軸六自由度振動量測 系統，利用了可被光束覆蓋之平面鏡組與象限探測器等少量元件 所組成之㉟備’ 8&合其準直雷射光源與光路設計，使之可減少量 測儀為的使用數量’同時也可減少量測的繁複步驟，並且能精確 、j 4 /、自由度成號’其解析度可達到，如此一來，不僅 唱上-筆可觀的量測儀器費用及時間，亦可大大的減少設備之使 用成本’取重要的是在減少成本的同時又不會影響到所需要的量 測、、α果’即提高了其量測設備於產業上的利用價值及實質效益，12.87613 * * » Nine, invention description: [Technical field of invention] The present invention provides a two-axis six-degree-of-freedom vibration measurement system, which mainly uses a collimated laser light source and an optical path to be designed on an object to be tested. The laser light source is respectively injected into the plane mirror group which is covered by the beam, and is reflected by the four quadrants to receive the position change of the reflected light spot to measure the displacement and the angle, and the vibration frequency is obtained through analysis. In order to effectively and accurately measure the vibration of the machine tool on the object to be tested, it is an innovative design. [Prior Art] Press, currently used to measure single-axis vibration signals, there are three kinds of sensors, such as displacement sensors, speed sensors and acceleration sensors, among which: displacement sensors, with contact type ( For example, the position sensor of the LVDT differential), non-contact type (such as thirst current type, capacitive type, fiber type and laser type), mainly use the magnetic position generated by the winding coil of the ^I to be close to the object to be measured. The relationship between the changes is measured by the displacement of the measured object, and is used when the vibration frequency is low. The speed sensor is divided into contact type (LVT) and non-contact type (LDV), and is mainly immersed in the damping by the internal small magnet block. In the liquid, the movement of the small magnet block causes the coil to emit an induced current to measure the velocity value for higher vibration frequency; the acceleration sensor 'piezoelectric crystal type (voltage type, charge type) piezoelectric group; mainly utilizes the internal The small mass is used to pull and pull the piezoelectric crystal to release the electric charge, and the acceleration value is measured to be used for the vibration frequency. 1287613 However, since the above three vibration measurement methods can only be used for single-free production measurement, and when measuring the six-degree-of-freedom vibration signal, multiple probes are needed, and multiple sets of measurement instruments are needed. The higher the cost of the measuring instrument, the more errors the measuring instrument uses, and the complicated steps in the measurement, and finally the accuracy of the obtained six-degree-of-freedom vibration signal is not good. 4α, the inventor has carefully developed a six-degree-of-freedom vibration measuring device and method using a plane mirror group and a quadrant detector that can be covered by a light beam, so that it can be reduced by using a small number of components. The quantity can reduce the error caused by the instrument, and can also reduce the cost of the instrument, so that the number of measuring instruments can be reduced, and at the same time, the complicated steps of the measurement can be reduced, and the measurement can be accurately measured. The degree of freedom vibration signal effectively conforms to the direction of modern industry towards precision and nano-class. SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a two-axis six-degree-of-freedom vibration measuring system, which utilizes a small number of components such as a planar mirror group and a quadrant detector that can be covered by a beam to meet the requirements of Straight laser source and optical path design, which can reduce the number of measuring instruments used, and also reduce the complicated steps of measurement, and can accurately, j 4 /, degree of freedom, its resolution can be achieved, so In the first place, not only can you sing the considerable cost and time of measuring instruments, but also greatly reduce the cost of using the equipment. 'It is important to reduce costs without affecting the required measurement, 'Improve the utilization value and substantial benefits of its measuring equipment in the industry,
1287613 因此，對於業界來說，實是一大福因。 為達本發明上揭目的之一種雙軸六自由度振動量測系統，其 量測方法，係以雷射二極體發出光束，照入與其對應之分光而分 出第一反射光，以及第一穿透光；其中： 第一反射光再經過與其光路對應之分光鏡分光，藉其反射光 射入待測物上所設與其光路對應的平面鏡產生第一垂直反射 光，由第一垂直反射光依序經過與其路對應之複分光鏡後，所分 出的穿透光、反射光分別射入象限探測器，即可精確量測出該方 向之位移、角度的振動變化值；另， 第一穿透光則經過與其光路對應之分光鏡分光，藉其反射光 射入待測物上所設與其光路對應的另一平面鏡產生第二垂直反 射光，由第二垂直反射光依序經過與其路對應之複分光鏡後，所 分出的穿透光、反射光分別射入象限探測器，即可精確量測出該 方向之位移、角度的振動變化值。 · 為達本發明上揭目的之一種雙軸六自由度振動量測系統，其 量測設備，係使用一雷射二極體提供光束，雷射光束射入第一分 光鏡（Beam Splitter)，產生二道光分別為第一穿透光與第一反 射光，第一反射光射入第二分光鏡產生第二反射光，第二分光鏡 產生的第二反射光再射入平台（待測物）上的被光束覆蓋平面鏡 組的第一平面鏡（Plane Mirror)，再經由第一平面鏡產生第一垂 直反射光，穿過第二分光鏡產生第二穿透光，射入第三分光鏡， !2.87613 由第三分光鏡產生第三穿透光與第三反射光，第三穿透光射入第 一象限探測器（Quadrant Detector)，藉由第一象限探測器接收 光點位置變化，量測出位移和振動頻率（量測χ—Ζ方向位移）， 第三反射光射入第二象限探測器，藉由第二象限探測器接收光點 位置變化，以量測角位移和振動頻率（繞X軸與繞Z軸方向旋轉 的角度變化）；另一道（第一分光鏡之第一穿透光）則射入第四 分光鏡產生第四反射光，第四分光鏡產生第四反射光再射入平台 上的被光束覆蓋平面鏡組的第二平面鏡，再經由第二平面鏡產生 第二垂直反射光，穿過第四分光鏡產生第四穿透光，射入第五分 光鏡，由第五分光鏡產生第五穿透光與第五反射光，第五穿透光 射入第二象限探測器，藉由第三象限探測器電流變化，量測出位 移和振動頻率（量測γ—ζ方向位移），第五反透光射入第四象限 探測器，藉由第四象限探測器電流變化，量測角度移和振動頻率 (繞Υ軸與繞Ζ軸方向旋轉的角度變化）。 據此’藉由上述精簡树，形成及構成雙軸六自由度振動量 測光路及設備，不僅成本減少許多，較前述習知量測儀器更為節 嗜許多費用和使用量測之步驟與時間，而且在減少成本的同時， 亦可取得高精度高準確性之量測 里而出自由度振動訊號結果， 升其發明價值。 # 【實施方式】 為使貝審查委貝進一步了 Μ + ί解本發明於前述之發明目的及 1287613 徵，兹配合圖面及圖號詳細說明如後·· 首先，請參閲圖-至圖三所示’係為本發明雙軸六自由度振 動量測系統之光路形成方法示意圖及設備位置示意圖； 本發明之量測方法，以雷射二極體丨發出光束u，照入與其 對應之第一分光鏡分光鏡2而分出第一反射光21，以及第一穿透 光22 ;其中： 第一反射光21再經過與其光路對應之第二分光鏡3分光， 藉其第二分光鏡3之第二反射光31射人待測物上所設與其光路 對應的卜平面鏡71而產生第—垂直反射光八，由第—垂直反射 光A依序經過與其對應之第二分光鏡3、第三分光鏡以，由第 三分光鏡所分出的第三穿透光4卜第三反射光42分別射入與其 對應之第-象限探測器81與第二象限探測器82，即可精確量測 出該方向之位移和振動頻率（量測χ_ζ方向位移）、角位移和振 動頻率（繞X軸與繞Ζ軸方向旋轉的角度變化）；另， 第-穿透光22則經過與其光路對應之第四分光鏡5分光， 藉其第四反射光51射人待測物上所設與其総對應的第二平面 鏡72產生第―垂直反射光Β，由第二垂直反射光β依序經過與其 路對應之複第四分光鏡5、第五分光鏡6後，所分出的第五穿透 光6卜第五反料62分別射人與其對應之第三象限探測器们、 細象限探測H 84,即可精確量測出該方向之位移和振動頻率 (里測γ ζ方向位移）、角位移和振動頻率（繞γ軸與繞ζ轴方 1287613 - · r ' 向旋轉的角度變化）。 對上述之第一平面鏡71與第二平面鏡72可呈垂直方位設置 於待測物上’以形成垂直相位之反射光路，當雷射光束11其光 束直捏大於第一平面鏡71與第二平面鏡72時（也就是光束11能 完整覆蓋住平面鏡時），第一平面鏡71與第二平面鏡72產生偏 移而使反射光路徑會產生變化，當雷射光束n其光束直徑小於 第一平面鏡71與第二平面鏡72時（也就是光束n無法覆蓋住平 馨 ®鏡時），第-平面鏡71與第二平面鏡72產生偏移時，所產生 反射光路徑則無變化。 再者，本發明配合上述形成光路方法之設計，採以最佳之量 測設備，係包含： 雷射二極體1，以供發射出一雷射光束i i ; 第一分光鏡2，係配置於該雷射二極體丨的一光束u路徑 中，以將該雷射光束11產生分光為第一反射光21與第一穿透光 • 22 ; 第二分光鏡3,係配置於該第一反射光21的光束路徑中，以 將該第一反射光21產生分光為一第二反射光31，以及接收第一 垂直反射光A穿過，產生一第二穿透光32 ; 第三分光鏡4,係配置於該第—垂直反射光A的光束路徑中， 以將該第二穿透光32產生分光為一第三穿透光41與一第三反射 光42 ; 1287613 第四分光鏡5，係配置於該第一穿透光22的光束路徑中，以 將該第一穿透光22產生分光為一第四反射光51，以及接收第二 垂直反射光B穿過，產生第四穿透光52; 第五分光鏡6,係配置於該第二垂直反射光B的光束路徑中， 以將該第四穿透光52產生分光為一第五穿透光61與一第五反射 光62 ; 可被光束覆蓋之平面鏡組，係設置於待測物上，具有高度的 反射力，能有效提供穩定的反光源，其結構包括：一第一平面鏡 71，其可接收第二反射光31後，產光一第一垂直反射光a，該第 一垂直反射光A並再穿過第二分光鏡3與第三分光鏡4，產生一 弟二穿透光41與一第三反射光42，以供分別投射至與其對應之 第一象限探測器81與第二象限探測器82; —第二平面鏡72,其 可接收第四反射光51後，產光一第二垂直反射光B，該第二垂直 反射光B並再穿過第四分光鏡5與第五分光鏡6，以產生第五穿 ® 透光61與第五反射光62，以供分別投射至與其對應之第三象限 探測器83與第四象限探測器84 ;以及 象限探測器組，係為多段式位置感測器具有穩定性高、反應 時間快、解析度好，以能準確量測出反射光的變化，包括··一第 一象限探測器81，係能接收第三穿透光41，以得到所需方向之 位移變化量（位移和振動頻率（量測χ—ζ方向位移））；一第二象 限探測器82，係能接收第三反射^| 42，以得到所需方向之角度 12 12876131287613 Therefore, for the industry, it is a big blessing. A biaxial six-degree-of-freedom vibration measuring system for the purpose of the present invention is characterized in that a laser beam is emitted from a laser diode, and the corresponding reflected light is split to separate the first reflected light, and a penetrating light; wherein: the first reflected light is split by a beam splitter corresponding to the optical path, and the first vertical reflected light is generated by the first vertical reflected light by the plane mirror corresponding to the optical path set by the reflected light incident on the object to be tested. After the light passes through the complex beam splitter corresponding to the path, the separated transmitted light and the reflected light are respectively incident on the quadrant detector, and the vibration change value of the displacement and the angle in the direction can be accurately measured; A penetrating light is split by a beam splitter corresponding to its optical path, and the other vertical mirror light corresponding to its optical path is generated by the reflected light incident on the object to be tested, and the second vertical reflected light is sequentially passed by the second vertical reflected light. After the corresponding split-beam mirror, the separated transmitted light and reflected light are respectively incident on the quadrant detector, and the vibration change value of the displacement and the angle in the direction can be accurately measured. · A biaxial six-degree-of-freedom vibration measuring system for the purpose of the invention, wherein the measuring device uses a laser diode to provide a beam, and the laser beam is incident on the first beam splitter (Beam Splitter). The first light is generated as the first transmitted light and the first reflected light, the first reflected light is incident on the second splitter to generate the second reflected light, and the second reflected light generated by the second splitter is incident on the platform (the object to be tested) The first plane mirror (Plane Mirror) of the plane mirror is covered by the beam, and the first vertical reflected light is generated by the first plane mirror, and the second penetrating light is generated by the second beam splitter to enter the third beam splitter, 2.87613 The third spectroscope generates the third penetrating light and the third reflected light, and the third penetrating light is incident on the first quadrant detector (Quadrant Detector), and the first quadrant detector receives the position change of the spot, and measures Displacement and vibration frequency (measurement χ-Ζ direction displacement), the third reflected light is incident on the second quadrant detector, and the second quadrant detector receives the position change of the light spot to measure the angular displacement and the vibration frequency (around X-axis and rotation around the Z-axis The other angle (the first transmitted light of the first beam splitter) is injected into the fourth beam splitter to generate a fourth reflected light, and the fourth beam splitter produces a fourth reflected light and then incident on the platform is covered by the light beam. a second plane mirror of the plane mirror group, and then generating a second vertical reflected light through the second plane mirror, generating a fourth penetrating light through the fourth beam splitter, entering the fifth beam splitter, and generating a fifth penetrating light by the fifth beam splitter And the fifth reflected light, the fifth transmitted light is incident on the second quadrant detector, and the displacement and the vibration frequency are measured by the current change of the third quadrant detector (measuring the displacement of the γ-ζ direction), and the fifth reverse The light is incident on the fourth quadrant detector, and the angular shift and the vibration frequency (the angle of rotation about the Υ axis and the Ζ axis direction) are measured by the fourth quadrant detector current change. According to this, the above-mentioned streamlined tree forms and constitutes a biaxial six-degree-of-freedom vibration measuring optical path and equipment, which not only reduces the cost much, but also saves a lot of cost and usage measurement steps and time compared with the aforementioned conventional measuring instruments. Moreover, while reducing the cost, it is also possible to obtain a high-accuracy and high-accuracy measurement and the result of the vibration signal of the degree of freedom, thereby increasing the value of the invention. # [Embodiment] In order to further improve the present invention and the 1287613 sign, the drawings and the drawings are detailed as follows. First, please refer to the figure-to-picture The third embodiment is a schematic diagram of the optical path forming method and the device position diagram of the biaxial six-degree-of-freedom vibration measuring system of the present invention. The measuring method of the present invention emits the beam u with a laser diode, and corresponds to the corresponding The first beam splitting mirror 2 separates the first reflected light 21 and the first transmitted light 22; wherein: the first reflected light 21 is further split by the second beam splitter 3 corresponding to the optical path thereof, and the second splitter mirror The second reflected light 31 of the third object is incident on the plane mirror 71 corresponding to the optical path of the object to be tested, and the first vertical reflected light is generated, and the first vertical reflected light A sequentially passes through the second beam splitter 3 corresponding thereto. In the third beam splitter, the third transmitted light 4 and the third reflected light 42 separated by the third beam splitter are respectively incident on the corresponding first-quadrant detector 81 and second quadrant detector 82, thereby being accurate. Measure the displacement and vibration frequency in this direction Χ_ζ directional displacement), angular displacement and vibration frequency (angle change around the X-axis and the direction around the y-axis); in addition, the first-passing light 22 is split by the fourth beam splitter 5 corresponding to its optical path, by means of the fourth The reflected light 51 is incident on the second object mirror 72 corresponding to the 待 of the object to be tested, and the first vertical reflected light 产生 is generated, and the second vertical reflected light β is sequentially passed through the fourth splitting mirror 5 and the fifth corresponding to the path. After the beam splitter 6, the fifth penetrating light 6 and the fifth counter material 62 respectively are respectively injected with the corresponding third quadrant detectors and the fine quadrant detecting H 84, so that the displacement in the direction can be accurately measured. And the vibration frequency (the γ ζ direction displacement), the angular displacement and the vibration frequency (the angle around the γ axis and the winding axis 1287613 - · r ' rotation). The first plane mirror 71 and the second plane mirror 72 may be disposed on the object to be tested in a vertical orientation to form a reflected light path of a vertical phase. When the laser beam 11 is directly pinched, the beam is directly larger than the first plane mirror 71 and the second plane mirror 72. When the light beam 11 can completely cover the plane mirror, the first plane mirror 71 and the second plane mirror 72 are offset to change the reflected light path, and when the laser beam n has a smaller beam diameter than the first plane mirror 71 and When the two plane mirrors 72 (that is, when the beam n cannot cover the Pingxin® mirror), when the first plane mirror 71 and the second plane mirror 72 are offset, the reflected light path is not changed. Furthermore, the present invention, in combination with the above-described method of forming an optical path method, employs an optimum measuring device, comprising: a laser diode 1 for emitting a laser beam ii; a first beam splitter 2, configured In the beam u path of the laser diode ,, the laser beam 11 is split into the first reflected light 21 and the first transmitted light • 22; the second beam splitter 3 is disposed in the first In the beam path of the reflected light 21, the first reflected light 21 is split into a second reflected light 31, and the first vertically reflected light A is received to generate a second transmitted light 32. The third split light is generated. The mirror 4 is disposed in the beam path of the first vertical reflected light A to split the second transmitted light 32 into a third transmitted light 41 and a third reflected light 42; 1287613 fourth beam splitter 5. The light is disposed in the beam path of the first transmitted light 22 to split the first transmitted light 22 into a fourth reflected light 51, and receives the second vertically reflected light B to pass through, to generate a fourth a penetrating light 52; a fifth beam splitter 6 disposed in the beam path of the second vertically reflected light B to wear the fourth The light transmission 52 generates splitting into a fifth penetrating light 61 and a fifth reflecting light 62; the plane mirror group which can be covered by the light beam is disposed on the object to be tested, has a high reflection force, and can effectively provide a stable anti-light source. The structure includes: a first plane mirror 71, which can receive the second reflected light 31, and generates a first vertical reflected light a, and the first vertical reflected light A passes through the second beam splitter 3 and the third splitter The mirror 4 generates a second light transmitting light 41 and a third reflected light 42 for respectively projecting to the first quadrant detector 81 and the second quadrant detector 82 corresponding thereto; a second plane mirror 72, which can receive After the fourth reflected light 51, a second vertical reflected light B is generated, and the second vertically reflected light B passes through the fourth beam splitter 5 and the fifth beam splitter 6 to generate a fifth through light transmission 61 and a first The five reflected lights 62 are respectively projected to the third quadrant detector 83 and the fourth quadrant detector 84 corresponding thereto; and the quadrant detector group is a multi-segment position sensor having high stability and fast response time. The resolution is good, so that the reflected light can be accurately measured, including The first quadrant detector 81 is capable of receiving the third transmitted light 41 to obtain a displacement change amount (displacement and vibration frequency (measurement χ-ζ direction displacement)) in a desired direction; a second quadrant detector 82, The system can receive the third reflection ^| 42, to obtain the desired direction of the angle 12 1287613
H I 艾化里（角位移和振動頻率（繞x軸與繞z軸方向旋轉的角度變 化））；-第三象限探測器83,係能接收第五穿透光61，以得到 所需方向之位移變化量（位移和振動頻率（量測Y-Z方向位移））； 一第四象限_器84，係能接收第五反射光62，以得到所需方 向之角度變化量（角位移和振動頻率（繞Y軸與繞Z軸方向旋轉 的角度變化））。 對於上述象限探測器組8，本發明於欲量測角度變化之第二 I象限仏測$ 82與第四象限探測器84前可各裝設—透鏡91、92， 如圖一與圖三所示，使之量測角度時，可有效防止阿貝誤差的產 生’達到量測之精確度。 據此本發明之特點，利用裝設於待測物上之可被光束覆盖 之平面鏡組’配合雷射二極體1、數分光鏡2、3、4、5、6及象 探測器、、且之光路形成方〉去，以及少量元件所組成之量測設備， 可解決前述W知量關器必須使用較多數量之缺失，而且也減少 > ΐ測的繁複步驟’並且能精確的量測出六自由度之振動變化訊號 (其解析度可達到50nm)，如此一來可省上一筆可觀的量測設備 之費用及日寸間’亦大大的減少成本，最重要的是在減少成本的同 守又不會影響到所需要的量測結果之實質效益，即提高了其量 測儀器的利用價值。 上列詳細說明係針對本發明之一可行實施例之具體說明，惟 口亥實施例並非用以限制本發明之專利範圍，凡未脫離本發明技藝 13 1287613 精神所為之等效實施或變更，均應包含於本案之專利範圍中。 、、’示上所it本案不但在方法上確屬創新，並能較習用處理方法增 進上述多項功效，應已充分符合新穎性及進步性之法定發明專利 要件，爰依法提出申請，懇請貴局核准本件發明專利申請案， 以勵發明，至感德便。 【圖式簡單說明】 圖一為本發明雙軸六自由度振動量測系統之光路形成方法 示意圖； 圖二為本發明雙軸六自由度振動量測系統之光路形成方法 另一實施示意圖；以及 圖三為本發明雙軸六自由度振動量測系統之設備位置示意 圖。 【主要元件符號說明】 1雷射二極體 11光束 2第一分光鏡 21第一反射光 22第一穿透光 3第二分光鏡 31第二反射光 . 32第二穿透光 14 1287613 _ 第三分光鏡 第三穿透光 第三反射光 第四分光鏡 第四反射光 第四穿透光 第五分光鏡 第五穿透光 第五反射光 第一平面鏡 第二平面鏡 第一象限探測器 第二象限探測器 第三象限探測器 第四象限探測器 透鏡 透鏡 第一垂直反射光 第二垂直反射光HI Ai Li (the angular displacement and the vibration frequency (the angle of rotation around the x-axis and the direction around the z-axis)); the third quadrant detector 83 is capable of receiving the fifth transmitted light 61 to obtain the desired direction Displacement change amount (displacement and vibration frequency (measuring YZ direction displacement)); a fourth quadrant _ 84, capable of receiving the fifth reflected light 62 to obtain an angular change amount (angular displacement and vibration frequency) in a desired direction ( The angle of rotation around the Y axis and around the Z axis))). For the above-described quadrant detector group 8, the present invention can be equipped with a lens 91, 92 for the second I-quadrant measurement of the angle change and the fourth quadrant detector 84, as shown in FIG. 1 and FIG. It can be used to measure the angle, which can effectively prevent the generation of Abbe error' to achieve the accuracy of measurement. According to the features of the present invention, a planar mirror group that can be covered by a light beam mounted on the object to be tested is used in conjunction with the laser diode 1, the dichroic mirror 2, 3, 4, 5, 6 and the image detector, And the light path forming side> go, and the measuring device composed of a small number of components, can solve the above-mentioned W knowing the amount of the device must use a large number of missing, but also reduce the complex steps of the 'measurement' and can accurately Measure the six-degree-of-freedom vibration change signal (the resolution can reach 50nm), which can save a considerable amount of measurement equipment and the cost of the day, which greatly reduces the cost, and most importantly, reduces the cost. The co-defense will not affect the actual benefits of the required measurement results, that is, increase the utilization value of its measurement instruments. The detailed description above is a detailed description of one of the possible embodiments of the present invention, and is not intended to limit the scope of the present invention, and the equivalent implementation or modification of the spirit of the present invention is not departing from the spirit of the present invention. It should be included in the patent scope of this case. This case is not only innovative in terms of method, but also able to enhance the above-mentioned multiple functions compared with the conventional processing methods. It should fully comply with the statutory invention patent requirements of novelty and progressiveness, and apply for it according to law. Approved this invention patent application, in order to invent invention, to the sense of virtue. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a light path forming method of a biaxial six-degree-of-freedom vibration measuring system according to the present invention; FIG. 2 is another schematic view showing another embodiment of a light path forming method of a two-axis six-degree-of-freedom vibration measuring system according to the present invention; Figure 3 is a schematic view showing the position of the device of the biaxial six-degree-of-freedom vibration measuring system of the present invention. [Description of main component symbols] 1 laser diode 11 beam 2 first beam splitter 21 first reflected light 22 first transmitted light 3 second beam splitter 31 second reflected light 32 second penetrating light 14 1287613 _ Third beam splitter third penetrating light third reflected light fourth beam splitter fourth reflected light fourth penetrating light fifth beam splitter fifth penetrating light fifth reflected light first plane mirror second plane mirror first quadrant detector Second quadrant detector third quadrant detector fourth quadrant detector lens lens first vertical reflected light second vertical reflected light