1274139 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種即時量測平台角度誤差之光學式量測單 元及其方法，尤指針對結合光學尺與同時量測平台角"二: 術’可應用於各種加工機械上，且不會因光學尺量_斜的誤差 而對量測精度有所影響。 【先前技術】 ❿ 隨著高精密定位技術儀㈣發展，不論是在精密機械、半導 體^業、微（奈）米科技皆朝微小化、精密化與奈米級精度的方 向河進’ «定位平台精度的要求也越來越高，方能有效地提升 產品之整個品質及良率。 而精雄平台為各種精密設備中不可缺少之載具，故精密平台 多以線性光學尺料其定細授的量具，由於線性光學尺於實際 運動時量測，只能針對單軸做量測，其它如是傾斜角度的誤差;· 就沒辦法量測校正而導致數值的誤差，且目光學尺是由—此電子 70件組裝而成，會因為元件尺寸的誤差、元件間配合度等關係， 白s產生夕項决差’而該光學尺是否有傾斜的特性將影響整個光 學尺系統的精度與利用光學尺量測所加工產品的品質，被加工之 精密工件的加工尺寸皆需要考慮傾斜的誤差。 雖目前既知光學尺量測方法有繞射式雷射光學尺系統、線性 繞射式光學尺及自校準繞射式雷射光學尺等諸項設計，但其量測 5 1274139 知度都-直侷限於僅作單—方向之量測，而無法量測傾斜、偏擺 角度的^㉖里測，故其量測方法，無法量測偏擺角度，如此，其 所I測的精度會受到整個㈣物傾斜的影響造成誤差。 再加上’由於精密平台運動有六個自由度誤差U位誤差、 水平與垂直直度誤差、俯仰度、搖擺度與滾動度誤差，即使市面 ^光T尺發展已有單軸與雙軸的位移量測，稱線性單轴光學尺與 平面光學尺’而以往量測平台角度誤差多用離線校正的方式來進 _ 士圖心’為彻干涉方式校正角度的量測方式，再如圖 二所示、，為自動視準儀校正角度的方式，其主要目的為量測微小 角又進而里測真直度，故又稱為準直儀，它是一種靈敏且極精 確之光學儀器，量測時光源體經平面反射鏡所產生之小角度，這 些方式雖都適合於離線校正的方式，但卻無法線上即時量測角 度。 。因此，就現今產業為了能即時量測上述之多自由度的誤差， :有架設多軸干涉儀，但因此多軸干涉儀之價格非常昂貴，且其 安裝與調整困難，實不符高科技產業界所需求之經濟效益，難以 彰顯其使用之實質效益。 基於此，本發明係為解決現今即時量測平台角度誤差之光學 =量測單元及其方法之課題’故而研發-種可結合線性光學尺、 提供角度的誤差訊號之光學式㈣單元的_設計，不僅架設容 Μ便且’對於平台精度的提高，提供_有效且即時量 6 1274139 測的方法與裝置，使之具有除了可 月進仃線性位移量測以外， 對/、他自由度的誤差皆能一併即時 ^让 丁里列出美供即時回饋訊號， 進而心得平台精度的改善，盥 一+口祆i變化補償，提供該產業技 術之最重要的幫助。 【發明内容】 本發明之主要目的即在於提供一種即時量測平台角产等差 之光學式量測單元及其方法，可有效地整合光學尺〇、以及加 掛於具光學尺之平台上的光學式量測單元之二種量測，使工作平 台上不僅可量測—個線誤差（光學尺），及二個角度誤差α軸偏 擺角的誤差值（θχ#υ轴偏擺角的誤差值（0y)),而甚至量測 所造成角度的傾斜可以立即校正精度不受影響，且其I置及方法 之，成’只需—些簡單的元件來達成，即可減少量測儀器的使用 數置’同時’可減少量測的繁複步驟，如此-來，可省上一筆可 戒的量測儀器之#用及_，相對大大的減少成本，最重要的是 在減少成本的同時，又不會影響到所需要的結果，即提高了其量 則儀器的利用價值。 本I月之另一目的即在於提供一種即時量測平台角度誤差 之光學式$測單元及其方法，亦為—種低價位的線上即時角度量 挪儀裔’乃利用一個創新之光學式量測單元，具有結合一光源 刀光鏡（或運用ί/4 λ波片及偏極分光鏡（pbs))、一準直 透鏡與-四象限位移感測器之組成設計，利用雷射光源體擴束 1274139 後’經分光鏡分光反射後再 丹、工早直鏡準直後，入射至光學尺（光 柵）上’因光學尺為一種细宓 、、山先栅，故會產生各階繞射光利用其 茶階繞射光反射至井學々旦、日丨σσ 一 九予式里測早兀内沿原光路並聚焦在一個四 象限位移感測器，使之當光學式量測單元固定在平台上時，平台 移動產生角度誤差，可即時量測獲得平台運動之角度誤差。 為達本發明上揭目的之一種即時量測平台角度誤差之光學 式里則單70及其方法，對其量測裝置係於平台上利用夾治具將光 學式量測單元定位並與光學尺對準；其中，對上述光學式量測單 元係由-光源體、-分光鏡（或運用1/4入波片及偏極分光鏡 (PBS))、-準直透鏡及1象限位移感測器所連接組成。 而其里測方法如下··可使用—般的半導體雷射當光源體，雷 射光射出會先通過分光鏡（或1/〇波片再通過偏極分光鏡 (PBS)) ’此呀分光鏡會產生入射及反射這二道光，而反射光經 準直透鏡透後形成準直的雷射光束，再入射至光學尺（光栅）上， 產生繞射光；當線性平台移動時的角度誤差將使準直光束照射在 光栅上的入射方向有角度變化，相對使得所產生的零階繞射光方 向改變；且利用零階繞射光的反射方向改變使得反射後的光再通 過一次分光鏡（或1/4又波片再通過偏極分光鏡（pBS))後，聚 焦在光學式量測單元的四象限位移感測器不同位置上。 此外，對於上述分光鏡之設立，亦可運用1/4λ波片及偏極 分光鏡（PBS))之結合來取代之，而該1/4又波片及偏極分光鏡 1274139 而且其更增具有可降低光源 (PBS))不僅同樣有分光鏡之功能 強度減弱之效能。 【實施方式】 為使貴審查委員進一步了 徵，茲詳細說明如后： 解本發明於前述之發明 目的及特 請參閱圖三所示，係為本發明即 如— J千台角度誤差之光學 式置測單元的其一結構簡示圖；1274139 IX. Description of the invention: [Technical field of the invention] The present invention relates to an optical measuring unit for an angular measurement error of an instantaneous measurement platform and a method thereof, in particular, a combination of an optical ruler and a simultaneous measurement platform angle " : Technology ' can be applied to a variety of processing machinery, and will not affect the measurement accuracy due to optical scale _ skew error. [Prior Art] ❿ With the development of high-precision positioning technology (4), no matter in the precision machinery, semiconductor industry, micro (Nai) meters technology, the direction of miniaturization, precision and nano-level precision The accuracy of the platform is also getting higher and higher, in order to effectively improve the overall quality and yield of the product. The Jingxiong platform is an indispensable vehicle for all kinds of precision equipment. Therefore, the precision platform is mostly measured by a linear optical ruler. Since the linear optical scale is measured during actual motion, it can only be measured for a single axis. Others are the error of the tilt angle; · There is no way to measure the correction and cause the error of the value, and the optical ruler is assembled by the 70 pieces of the electronic component, which may be due to the error of the component size and the degree of fit between the components. The white s is a stagnation of the sigma and the slanting characteristic of the optical stalk affects the accuracy of the entire optical scale system and the quality of the processed product by the optical sizing. The processed dimensions of the processed precision workpiece need to be considered tilted. error. Although the optical scale measurement methods are currently known as diffraction laser optical scale system, linear diffraction optical scale and self-calibrating diffraction laser optical scale, the measurement is 5 1274139 It is limited to the measurement of the single-direction only, and it is impossible to measure the tilt and yaw angle of the 26-degree measurement. Therefore, the measurement method cannot measure the yaw angle. Therefore, the accuracy of the I measurement will be affected by the whole (4) The influence of the tilt of the object causes an error. In addition, due to the precision platform motion, there are six degrees of freedom error U-bit error, horizontal and vertical straightness error, pitch, sway and rolling error, even if the market has a single-axis and two-axis development. Displacement measurement, called linear single-axis optical ruler and planar optical ruler', and the previous measurement platform angle error is mostly used in the offline correction method to enter the _ _ _ heart 'for the interference method to correct the angle measurement method, then as shown in Figure 2 The method of correcting the angle of the automatic collimator is mainly for measuring the micro angle and then measuring the true straightness. Therefore, it is also called a collimator. It is a sensitive and extremely accurate optical instrument. The small angle generated by the light source body through the plane mirror, although these methods are suitable for off-line correction, but can not measure the angle on the line. . Therefore, in order to be able to measure the above-mentioned many degrees of freedom error in the current industry: there is a multi-axis interferometer, but the price of the multi-axis interferometer is very expensive, and its installation and adjustment are difficult, which is not in the high-tech industry. The economic benefits required are difficult to demonstrate the substantial benefits of its use. Based on this, the present invention is an object of an optical=measuring unit and a method for solving the angular error of the current measurement platform. Therefore, an optical (four) unit that can be combined with a linear optical scale and an angular error signal is provided. , not only to set up the capacity and to improve the accuracy of the platform, to provide _ effective and instantaneous amount of 6 1274139 measurement method and device, so that in addition to the monthly linear displacement measurement, the error of /, his degree of freedom All of them can immediately let Ding Li list the United States for instant feedback signals, and then improve the accuracy of the platform, and compensate for the changes in the performance of the industry, providing the most important help of the industry technology. SUMMARY OF THE INVENTION The main object of the present invention is to provide an optical measurement unit and method for real-time measurement platform angle difference production, which can effectively integrate an optical ruler and attach it to a platform with an optical scale. Two kinds of measurement of the optical measuring unit make the working platform not only measure the line error (optical scale), but also the error value of the two angle error α-axis yaw angle (θχ#υaxis yaw angle The error value (0y)), and even the tilt of the angle caused by the measurement can immediately correct the accuracy is not affected, and its I and method can be reduced by measuring only a few simple components. The use of the number 'simultaneous' can reduce the complicated steps of measurement, so that it can save a considerable amount of measurement instrumentation, and relatively large cost reduction, and most importantly, while reducing costs. It will not affect the desired result, that is, the value of the instrument will be increased by increasing its quantity. Another purpose of this month is to provide an optical unit that measures the angular error of the platform and its method. It is also a low-cost online instant angle meter that uses an innovative optical type. The measuring unit has a combination of a light source knife mirror (or ί/4 λ wave plate and polarized beam splitter (pbs)), a collimating lens and a four-quadrant displacement sensor, and uses a laser light source. After the beam expands 1274139, it is split by the spectroscope and then collimated with the straight lens. It is incident on the optical scale (grating). Because the optical scale is a fine ridge, the mountain is first grating, so it will produce various orders of diffracted light. Using the tea-step diffracted light to reflect the well-informed, the Japanese 丨σ 一 予 予 里 里 测 测 测 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并 并When it is up, the platform movement produces an angular error, which can be used to measure the angular error of the platform motion. In order to achieve the objective of measuring the angle error of the platform, the optical unit is 70 and the method thereof, and the measuring device is mounted on the platform, and the optical measuring unit is positioned and matched with the optical ruler by means of the clamping fixture. Alignment; wherein, the optical measuring unit is composed of a light source body, a beam splitter (or a quarter-input wave plate and a polarizing beam splitter (PBS)), a collimating lens, and a 1-quad displacement sensing The components are connected. The measurement method is as follows: · A general semiconductor laser can be used as the light source body, and the laser light will first pass through the beam splitter (or 1/〇 wave plate and then through the polarized beam splitter (PBS)). The incident and reflected light are generated, and the reflected light is transmitted through the collimating lens to form a collimated laser beam, which is then incident on the optical scale (grating) to generate diffracted light; the angular error when the linear platform moves will cause The direction of incidence of the collimated beam on the grating is angularly changed, so that the direction of the generated zero-order diffracted light is changed; and the direction of reflection of the zero-order diffracted light is changed so that the reflected light passes through the dichroic mirror again (or 1/ 4 After the wave plate passes through the polarizing beam splitter (pBS), it is focused on different positions of the four-quadrant displacement sensor of the optical measuring unit. In addition, for the establishment of the above-mentioned beam splitter, a combination of a 1/4 lambda wave plate and a polarizing beam splitter (PBS) can be used instead, and the 1/4 wave plate and the polarizing beam splitter 1274139 are further increased. Having a reduced light source (PBS) not only has the same performance as the spectral intensity of the beam splitter. [Embodiment] In order to further enlighten the reviewing committee, the following is a detailed description of the following: The present invention is based on the above-mentioned object of the invention and is specifically shown in Fig. 3, which is an optical lens of the present invention. A schematic diagram of a structure of the type of measuring unit;
—本發明所設計的即時量測平台角度誤差之光學式量測單 ^主要係為定位於平台i上並與光學尺2對準，而該光學式量 測早το 3之内部結構係由一光源體31、_分光鏡32、一準直透 鏡33及一四象限位移感測器34所構組而成，其中： 上述之平台1，可為移動平台或線性移動平台； 而上述之光學尺2，係設置於平台i上，又稱為光柵，此光 柵’為反射式光柵，會產生正-階、零階、和負_階繞射光，為 通常知識者皆知之技術，故於此不與贅述其本身作用目的與功 效； 對上述光學式虿測單元3之光源體31係採一般的半導體雷 射之應用’其投射的光源會通過分光鏡32 ; 該光學式量測單元3之分光鏡3 2，係與光源體31呈直接對應之 σ又立’為供光源體31投射之光源分成兩道光，一道光循原來投射 之路經繼續前進，如入射光，另一道前進方向垂直原本光前進方 9 1274139 向，如反射光，而分光鏡32所產生之反射光將通過準直透鏡33打 入線性光學尺2，另一道入射光則無用處； 該光學式量測單元3之準直透鏡33,係設立於分光鏡32及 其所奴產生反射光相對應之處，為將經過分光鏡32之反射光產 生準直呈一光束3U，以供準直光束311直接照射在設置於平台 1上之光學尺2後產生反射光，再次通過準直透鏡33及分光鏡 31，並照射在該四象限位移感測器34上，· 該四象限位移感測器34,係設立於分光鏡32欲產生反射光 之另m而與分光鏡32相對應，為供測得雷射光束如位 私的又化里’使其產生的信號經過電腦計算後得出雷射入射光點 位移變化4即，當其準直後之光束311照射在光學尺2上的入 射方向有X平台1角度變化時，會造成零階繞射光的反射方向改 變，使得反射後的光再通過一次八 ^ 人刀先鏡32後，直接聚焦在四象 限位私感測為34不同位置上，即可經由訊號處理後而得到豆角 度誤差值。 、請參閱圖四所示’係為本發明即時量測平台角度誤差之光學 式量測單元的另一結構簡示圖； 本發明上述即時量測平^度駐之光學式量測單元3,並 所設計的内部結構，亦可採以—光源體31、一 W波片35二 偏極分光鏡（PBS) 36、一畢亩、泰拉0 所構組而成。 透鏡33及-四象限位移感測器34 10 1274139 亦即，上述光學式量測單元3所設立之分光鏡32，則可採一 1/4人波片35及偏極分光鏡（PBS) 36之結合來取代之；如此可 藉由1/4 λ波片35分別與光源體31、準直透鏡33相對應設立， 以供光源體31直接通過，讓光源體31投射之光源（雷射光源） ^振動方向改變90度；以及，利用該偏極分光鏡（PBS) 36與1/4 -久波片3 5之組合應用，且偏極分光鏡（pbs ) 3 6與四象限位移感 測1§ 34相對應，為使所投射之光源（雷射光源）產生分光，而 • 使振動方向後相差90度的光反射，振動方向0度的光則直接入 射，且在此產生之反射光，將穿過準直透鏡33打入線性光學尺2 後產生反射，再次通過準直透鏡33，並再通過一次1/4λ波片奶 後，此時光束311振動方向已轉向9〇度，使其穿過偏極分光鏡 (PBS) 36後（因光源（雷射光源）經過二次1/4久波片35，不 會有分光效果出現），將聚焦在四象限位移感測器34不同位置 上，再經由afL號處理後而得到其角度誤差值。 _ 對於本發明上述即時量測平台肖度誤;t之光學式量測單元3 所採以分光鏡31之設計，為作分光之用；亦可採以1/4λ波片 35及偏極分光鏡（PBS) 36之結合來取代上述之分光鏡31，如此 可藉1/4 λ波片35及偏極分光鏡（PBS) 36的組合運用，不僅具 有分光之功能，同時更增具有降低光源強度減弱之效能。因此， 無論本發明採以分光鏡31或1/4又波片35及偏極分光鏡（pBs) 36的組合，皆涵蓋於本發明專利權利之範疇内。 11 1274139 再者，如圖三及圖四所示，係為本發明即時量測平台角度誤 差之結構實施作動圖； 本發明即時量測平台角度誤差之光學式量測單元3於實際使 用日守係啟動雷射光源體3丨從投射方向產生之光源（雷射光源）， 將先通過分光鏡31 (或通過1/4λ波片35後，再通過偏極分光 、兄（BS) 32)產生反射光，接著，該反射光會經過準直透鏡犯，- The optical measurement unit of the instantaneous measurement platform angle error designed by the present invention is mainly positioned on the platform i and aligned with the optical scale 2, and the optical structure is determined by the internal structure of the early το 3 The light source body 31, the _beam splitter 32, a collimating lens 33 and a four-quadrant displacement sensor 34 are formed, wherein: the platform 1 can be a mobile platform or a linear moving platform; 2, is set on the platform i, also known as the grating, the grating 'is a reflective grating, which will produce positive-order, zero-order, and negative-order diffracted light, which is a technique known to the general public. The purpose and effect of the function is not described in detail; the application of the general semiconductor laser to the light source body 31 of the above optical sensing unit 3 'the projected light source passes through the beam splitter 32; the optical measuring unit 3 The beam splitter 3 2 is directly corresponding to the light source body 31, and the light source for the light source body 31 is divided into two lights, and one light continues to advance according to the original projection path, such as incident light, and the other forward direction is vertical. Original light forward side 9 1274139 direction, such as The reflected light generated by the beam splitter 32 will be driven into the linear optical scale 2 through the collimator lens 33, and the other incident light will be useless; the collimating lens 33 of the optical measuring unit 3 is set in the beam splitter. 32 corresponds to the reflected light generated by the slave, and the collimated light passing through the beam splitter 32 is collimated to form a light beam 3U, so that the collimated light beam 311 is directly irradiated on the optical scale 2 disposed on the platform 1 to generate The reflected light passes through the collimating lens 33 and the beam splitter 31 again, and is irradiated on the four-quadrant displacement sensor 34. The four-quadrant displacement sensor 34 is set in the beam splitter 32 to generate reflected light. Corresponding to the beam splitter 32, for the measured laser beam, such as the position of the private beam, the signal generated by the computer is calculated by the computer to obtain the displacement of the incident spot of the laser light, that is, the beam after collimation When the incident direction of the 311 illumination on the optical scale 2 has an angle change of the X-platform 1, the reflection direction of the zero-order diffracted light is changed, so that the reflected light passes through the first-time lens 32 and is directly focused on the fourth. The image limit is measured at 34 different locations. Beans can be obtained via the error values after signal processing. Please refer to FIG. 4, which is another schematic diagram of the optical measuring unit of the present invention for measuring the angular error of the platform. The optical measuring unit 3 of the present invention is provided. The internal structure designed by the method can also be formed by a light source body 31, a W wave plate 35 dipolar polarizing mirror (PBS) 36, a Bimu, and a Tara 0. The lens 33 and the four-quadrant displacement sensor 34 10 1274139, that is, the beam splitter 32 set up by the optical measuring unit 3 can take a quarter-wave plate 35 and a polarizing beam splitter (PBS) 36. This is replaced by a combination of the 1/4 λ wave plate 35 and the light source body 31 and the collimator lens 33, respectively, for the light source body 31 to directly pass, and the light source body 31 to project the light source (the laser light source) ^ The vibration direction is changed by 90 degrees; and, by using the combination of the polarized beam splitter (PBS) 36 and the 1/4 - long-wave plate 35, and the polarized beam splitter (pbs) 3 6 and the four-quadrant displacement sensing 1§ 34 corresponds to, in order to split the projected light source (laser light source), and • to reflect light that is 90 degrees behind the vibration direction, the light with a vibration direction of 0 degrees is directly incident, and the reflected light is generated here. After passing through the collimator lens 33 into the linear optical scale 2, a reflection is generated, once again passed through the collimator lens 33, and after passing through a 1/4 λ wave plate, the direction of vibration of the beam 311 has been turned to 9 degrees, thereby making it After passing through the polarizing beam splitter (PBS) 36 (because the light source (laser source) passes through the second quarter long wave plate 35, not Spectroscopic effect occurs), the focus 34 at different positions on the four-quadrant displacement sensors, then the angle error is obtained via post-treatment afL number. _ For the above-mentioned instant measurement platform of the present invention, the optical measuring unit 3 adopts the design of the beam splitter 31 for the purpose of splitting light; it can also adopt the 1/4 λ wave plate 35 and the polarization splitting The combination of the mirror (PBS) 36 replaces the above-mentioned beam splitter 31, so that the combination of the 1/4 λ wave plate 35 and the polarized beam splitter (PBS) 36 can not only have the function of splitting light, but also have a reduced light source. The effect of weakening strength. Therefore, regardless of the present invention, a combination of a beam splitter 31 or a 1/4 wave plate 35 and a polarizing beam splitter (pBs) 36 is encompassed within the scope of the patent right of the present invention. 11 1274139 Furthermore, as shown in FIG. 3 and FIG. 4, it is a structural implementation diagram of the angular error of the instant measurement platform of the present invention; the optical measurement unit 3 for the angular error of the instantaneous measurement platform of the present invention is used in actual use. The light source (laser light source) generated by the laser light source body 3 from the projection direction is first generated by the beam splitter 31 (or after the 1/4 lambda wave plate 35, and then by the polarization splitting, the brother (BS) 32). Reflecting light, which is then passed through a collimating lens.
此時準直透鏡33便將此反射光準直擴束成光束311後，使雷射 光束311打在光學尺（光栅）2上後產生反射光，反射後的雷射光 束311再次通過準直透鏡33,而通過準直透鏡犯之雷射光束 311，同樣會通過分光鏡32(或通過1/4又波片⑽後，再穿過偏 極分光鏡32)，此時光| 311將會照射在四象限㈣感測 器34上；若準直雷射光束311入射至光學尺（光拇）2的有角度誤 差產生時，會造成輯繞射料光路有所變化，進而改變雷射光 束311入射至四象限位移感測器At this time, the collimator lens 33 collimates the reflected light into the light beam 311, and then causes the laser beam 311 to strike the optical scale (grating) 2 to generate reflected light, and the reflected laser beam 311 passes through the collimation again. The lens 33, and the laser beam 311 committed by the collimating lens, also passes through the beam splitter 32 (or through the 1/4 wave plate (10) and then through the polarizing beam splitter 32), at which time the light | 311 will illuminate On the four-quadrant (four) sensor 34; if the angular error of the collimated laser beam 311 incident on the optical scale (optical thumb) 2 is generated, the optical path of the revolving shot is changed, and the laser beam 311 is changed. Incident to four-quadrant displacement sensor
34的位置，所得到的位置變化 可轉化用來計算X軸偏擺角的誤差值⑺\)與Μ偏擺角的誤差 值（0y)，藉此即可順利達成即時量測角度誤差之效果。 復’如圖五所示，關於本發明欲再訴求之即時量測平台角度 誤差之方法，如下所述： 係於平台 上設置有光學尺2， 並利用夾治具將上述光學式 量 置 測單元3予以定位，且該光學式量測單 里只」早兀d與光學尺2對準設 •’而該光學式量測單元3必須具有由夯、、原卿 ，田九源體31、分光鏡（或採 12 1274139 1/4 λ波片35及偏極分光鏡（PBS) 36之組合）、準直透鏡33、 及四象限位移感測器34所組成。 當本發明欲進行即時量測平台角度誤差之方法時，啟動光學 式量測單元3，此時雷射光源體31之光源投射入分光鏡32 (或 、先通過1/4人波片35、再通過偏極分光鏡（PBS) 36)，此時射入 、 分光鏡32 (或先通過1/4 λ波片35、再通過偏極分光鏡（pBS) 36，由於1/4 λ波片的光學特性，故通過偏極分光鏡祁後僅有一 道反射光）之光源已分成兩道光，而其一道光的方向將與準直透 鏡33相對應而形成反射光，利用該反射光經準直透鏡犯透後， 形成準直的雷射光束311，即入射至光學尺（光柵）2上產生繞射 光而再次通過分光鏡32後，即直接照射在四象限位移感測器3 ; 如此一來，當線性平台移動時的角度有誤差時，將使得準直光束 311照射在光學尺（光柵）2上的入射方向有角度變化，使得所產 _ 生的繞射光（以零階繞射光為主）方向改變，繼而可利用零階繞 射光的反射方向改變，使得反射後的光再通過分光鏡32(或先通 過1/4λ波片35、再通過偏極分光鏡（PBS) 36)後，直接聚焦 在四象限位移感測器34的不同位置上，最後在四象限位移感測 器34之特性，俾可即時求得平台角度誤差。 據此，由上可知，本發明所設計之即時量測平台角度誤差的 光學式量測單元3’此光學式量測單元3洲上述之方法來與平 台卜光學尺2搭配進行操作，可提供角度的誤差訊號，不僅架 13 1274139 將是一最佳有效的 设容易而且價格便宜，對於平台精度的提高， 方法。 此外’對於本發明所設計之光學式量測單元3及即時角度量 測的方法，不僅提供了低價位之設備，心可量測平台運動的兩 個角度誤差’如圖三所示，本發明所設計之光學式量測單元3, 運用雷射二極體之光源體3卜分光鏡32 (或㈤波片犯及偏 極分光鏡（PBS) 36之組合，如圖四所示）、準直透鏡扣、及四 象限位移感測器34之組構而成，使其可利用雷射光源體Μ所射 出之光源擴錢，經分錢32分光反射後再經準直透鏡33準直 後’入射至光學尺2上，由於光學尺2為—種細密光柵，故會產 生各階繞射光’彻其零階繞射光反射至光學式量測單元3内沿 =光路並聚焦在—個四象限位移感測器34,以求得即時即時角度 量測之結果；是故’當光學式量測單元3被固定在平台i上時， 平台i移動產生角度誤差，即可精準量測平台運動之:度誤差。 ―由於本發明之光學式量測單元3可精準量測平台運動之角度 誤差，對其所配合使用之平台i (線性移動平台），無論是單以χ 軸或Υ軸架構，或者結合χ轴及⑽之架構，皆可分別或同時求 得X軸偏擺角的誤差值（㈣或γ軸偏擺角的誤差值（心）；因 此，本發明所設計之專利精華，可整合光學尺2本身及光學式量 測單元3^二種量測，甚至量測所造成角度的傾斜皆可以立即校 精度不又衫響’且可量測一個線誤差，及二個角度誤差（X軸 14 1274139 偏擺角的誤差值（ΘΜ γ軸偏擺角的誤差值（ΘΥ))，而且對該 光學式量測單元3只需—些簡單的元件來組成，如此-來可以減 少量測儀器的使用數晋，而θ m 而且问日守可減少量測的繁複步驟，更可 省上一筆可觀的量測儀器費用及時間，可大大的減少成本，最重 要的疋在減j成本的同時又不會影響到所需要的結果，即提高了 其量則儀器的彻價值，這對於業界來說可說是—大福因。 上列詳細說明係針對本發明之—可行實施例之具體說明，惟 該實施例並非用以限制本發明之專利範圍，凡未脫離本發明技藝 精神所為之等效實施或變更，均應包含於本案之專利範圍中。- ”不上所述’本案不但在方法上4屬創新，並能較習用處理方 法3曰進上述多項功效，應已充分符合新穎性及進步性之法定發明 專利要件，爰依法提出中請，料貴局核准本件發明專利申二 案，以勵發明’至感德便。 '月At the position of 34, the resulting position change can be converted to calculate the error value of the X-axis yaw angle (7)\) and the error value of the yaw angle (0y), thereby achieving the effect of instantaneous measurement of the angular error. . As shown in FIG. 5, the method for the instantaneous measurement platform angle error of the present invention is as follows: The optical scale 2 is set on the platform, and the optical quantity is measured by using the fixture. The unit 3 is positioned, and only the optical measuring unit 3 is disposed in front of the optical measuring unit. The optical measuring unit 3 must have a 量, 原原, Tianjiu source 31, and a beam splitter. (Or a combination of 12 1274139 1/4 λ wave plate 35 and polarized beam splitter (PBS) 36), collimating lens 33, and four-quadrant displacement sensor 34. When the present invention is to perform a method for instantaneously measuring the angle error of the platform, the optical measuring unit 3 is activated, and the light source of the laser light source body 31 is projected into the beam splitter 32 (or, first, through the 1/4 person wave plate 35, Then pass the polarizing beam splitter (PBS) 36), at this time, the incident beam splitter 32 (or first through the 1/4 λ wave plate 35, and then through the polarized beam splitter (pBS) 36, due to the 1/4 λ wave plate The optical characteristic, so that the light source passing through the polarizing beam splitter has only one reflected light, the light source has been split into two lights, and the direction of one light will be corresponding to the collimating lens 33 to form reflected light, and the reflected light is used to pass the light. After the straight lens is broken, a collimated laser beam 311 is formed, that is, incident on the optical scale (grating) 2 to generate diffracted light and once again passes through the beam splitter 32, that is, directly irradiated to the four-quadrant displacement sensor 3; When there is an error in the angle when the linear platform moves, the incident direction of the collimated beam 311 on the optical scale (grating) 2 is angularly changed, so that the generated diffracted light (with zero-order diffracted light is The main direction changes, and then the reflection of the zero-order diffracted light can be utilized The change is such that the reflected light passes through the beam splitter 32 (or first through the 1/4 lambda plate 35 and then through the polarized beam splitter (PBS) 36), and is directly focused on different positions of the four-quadrant displacement sensor 34. Finally, in the characteristics of the four-quadrant displacement sensor 34, the platform angle error can be obtained immediately. Accordingly, it can be seen from the above that the optical measuring unit 3' of the instantaneous measurement platform angle error designed by the present invention is operated by the above-mentioned method of the optical measuring unit 3 and the platform optical tape 2, and can be provided. The angle error signal, not only the frame 13 1274139 will be an optimal and effective design, and the price is cheap, and the accuracy of the platform is improved. In addition, the optical measuring unit 3 and the instant angle measuring method designed by the invention not only provide low-cost equipment, but also can measure the two angular errors of the platform motion as shown in FIG. The optical measuring unit 3 designed by the invention uses a light source body 3 of a laser diode to divide the beam splitter 32 (or (5) a combination of a wave plate and a polarized beam splitter (PBS) 36, as shown in FIG. 4), The collimator lens buckle and the four-quadrant displacement sensor 34 are configured to expand the money by using the light source emitted by the laser light source body, and after being split by the light for 32 cents, and then collimated by the collimating lens 33. 'Injected onto the optical scale 2, since the optical scale 2 is a fine-grained grating, each order of diffracted light will be generated'. The zero-order diffracted light is reflected to the inner edge of the optical measuring unit 3 = the optical path and focused on a four-quadrant The displacement sensor 34 is used to obtain the result of the instantaneous real-time angle measurement; therefore, when the optical measurement unit 3 is fixed on the platform i, the platform i moves to generate an angular error, so that the platform motion can be accurately measured. : Degree error. ―Because the optical measuring unit 3 of the present invention can accurately measure the angular error of the platform motion, the platform i (linear moving platform) used together, whether it is a single-axis or a Υ-axis structure, or a combined χ axis And the structure of (10) can obtain the error value of the X-axis yaw angle ((4) or the error value (heart) of the γ-axis yaw angle separately or simultaneously; therefore, the patented essence designed by the present invention can integrate the optical ruler 2 Both the optical measuring unit and the optical measuring unit 3^ measure, even the tilt of the angle caused by the measurement can immediately correct the accuracy of the shirt and can measure a line error and two angle errors (X-axis 14 1274139) The error value of the yaw angle (ΘΜ the error value of the y-axis yaw angle (ΘΥ)), and the optical measuring unit 3 only needs a few simple components, so that the use of the measuring instrument can be reduced. Counting Jin, and θ m and asking the daily guard to reduce the complicated steps of measurement, can save a considerable amount of measuring instrument cost and time, can greatly reduce the cost, the most important thing is to reduce the cost while not Will affect the desired result, ie improve The amount is the value of the instrument, which can be said to be the industry's specific description. The above detailed description is for the specific description of the possible embodiments of the present invention, but the embodiment is not intended to limit the scope of the patent of the present invention. Equivalent implementations or changes that do not depart from the spirit of the invention should be included in the scope of the patent in this case. - "Not as described" This case is not only innovative in terms of method, but also comparable to the conventional processing method. Into the above-mentioned multiple functions, it should have fully complied with the statutory invention patent requirements of novelty and progressiveness, and pleaded with the law in accordance with the law, and it is expected that your office will approve the second case of the invention patent, in order to invent the invention to the sense of virtue.
15 1274139 【圖式簡單說明 圖 圖一係習知利用干涉方式校正…… 又叼κ剛示意圖； 一、 角度的方式m · 圖三為本發明光學式相單㈣ 二， 圖四為本發明光學式 …貫施作動 以及 仏的另-結構簡示暨實施作動 角度的量測 圖二係習知利用自動視準儀校正 、 圖；15 1274139 [Simplified illustration of the diagram Figure 1 is a conventional method of correction using interference mode... and 叼 κ just diagram; I. Angle mode m · Figure 3 is the optical phase of the invention (4) 2, Figure 4 is the optical of the invention式...After the actuation and the other-structure simplification of the 暨 and the measurement of the implementation of the angle of action, the second is the use of automatic collimator calibration, map;
圖五係為本發明即時量测平 【主要元件符號說明】 台角度誤差之整體量測系統Figure 5 is the instantaneous measurement of the invention. [Main component symbol description] The overall measurement system of the angle error
1平台 2光學尺 3光學式量測單元 31光源體1 platform 2 optical scale 3 optical measuring unit 31 light source body
311光束 32分光鏡 33準直透鏡 34四象限位移感測器 35 1/4λ波片 3 6偏極分光鏡 16311 beam 32 beam splitter 33 collimating lens 34 four-quadrant displacement sensor 35 1/4λ wave plate 3 6 polarized beam splitter 16